JP4961685B2 - Light irradiation device - Google Patents

Description

The present invention relates to a light irradiating device, and in particular, to a semiconductor integrated circuit substrate, a liquid crystal display substrate, or the like using an ultrahigh pressure mercury lamp in which mercury of 0.08 mg / mm ³ or more is enclosed in an arc tube as a light source. It is related with the light irradiation apparatus.

Conventionally, as a semiconductor integrated circuit light source substrate and an exposure apparatus for liquid crystal display substrates, primarily, it sealed about 0.01mg ^/ mm ³ ~0.05mg ^/ mm 3 in the light emitting tube mercury as a luminous material, number input power Large high-pressure mercury lamps of kW to several tens of kW have been used.

  However, in recent years, along with the increase in the area of the liquid crystal display substrate, an exposure apparatus having a large light irradiation area has been required, and an increase in the size of the light source for the exposure apparatus has been required. However, the increase in the size of the light source leads to an increase in the size of the arc tube and the electrodes constituting the high-pressure mercury lamp, resulting in a problem that the manufacturing cost increases because the number of manufacturing steps increases significantly. Furthermore, since a large high-pressure mercury lamp needs to pass a large current through the electrodes in the arc tube, when the material constituting the electrodes is tungsten, the evaporation of tungsten is accelerated and tungsten adheres to the inner wall of the arc tube. As a result, there arises a problem that the arc tube is blackened. For these reasons, the increase in size of high-pressure mercury lamps is approaching its limit.

  As a countermeasure against such a problem, for example, Japanese Patent Application Laid-Open No. 2004-361746 discloses an exposure light source device using a plurality of ultrahigh pressure mercury lamps having an operating voltage higher than that of a high pressure mercury lamp used as a light source of a liquid crystal projector. Has been proposed.

JP 2004-361746 A

  However, since the ultra-high pressure mercury lamp is also a heat source during lighting, if an exposure apparatus is configured using a large number of such lamps and is turned on all at once, the peripheral devices inside the exposure apparatus may be adversely affected. There is. For example, the temperature of the photomask or the object to be processed is raised, which causes a problem that the exposure process cannot be performed properly.

  In addition, when a large number of ultrahigh pressure mercury lamps are arranged adjacent to each other, light in the visible region or infrared region emitted from the ultrahigh pressure mercury lamp is irradiated to other adjacent light sources. Since the surface of the arc tube is extremely hot, the arc tube can be easily devitrified, or (B) the surface of the reflector that reflects light from the ultra-high pressure mercury lamp becomes extremely hot, and the reflector is damaged. Or (C) there is a problem such as a danger of short-circuiting when a power supply line connected between the ultra-high pressure mercury lamp and the lighting power source is melted by heat.

  In view of the above problems, the object of the present invention is the problem of heat generated when a plurality of ultrahigh pressure mercury lamps are lit simultaneously, and light in the visible region or infrared region emitted from the ultrahigh pressure mercury lamp are adjacent to each other. It is an object of the present invention to provide a light irradiation apparatus that can satisfactorily solve the problems caused by irradiation with other light sources.

The present invention employs the following means in order to solve the above problems.
The first means is that an ultra high pressure mercury lamp in which 0.08 mg / mm ³ or more of mercury is sealed in an arc tube, and the optical axis is substantially coincident with the tube axis of the ultra high pressure mercury lamp. In a light irradiation apparatus that includes a plurality of light sources each including a surrounding reflecting mirror and irradiates light emitted from each light source in a light irradiation region, the light sources are separated from each other by a support having a light emission port. An isolation wall that blocks light to an adjacent light source is provided between the light sources that are fixed and spaced apart, and a partition wall that extends integrally from the support in the optical axis direction to form a light source storage space is provided, The partition wall serves as the isolation wall, and the front side of a through hole formed by the partition wall serves as the light exit port, and the rear surface side of the through hole serves as an insertion port for the light source. Irradiation device.

The second means is the light irradiation apparatus according to the first means, wherein the partition wall includes a flow path for circulating the cooling medium.

According to the first aspect of the present invention, visible light and infrared light emitted from the light source by the isolation wall can be prevented from being emitted to other light sources, and the isolation wall functions as a heat sink. As a result, the light source can be cooled efficiently, the ultra-high pressure mercury lamp can be devitrified, the reflector can be broken, and the support and the isolation wall can be integrated. Since it is formed, the configuration of the light source unit is simplified.

According to the invention described in claim 2 , even if the partition wall (isolation wall) becomes high temperature, the partition wall (isolation wall) can be cooled by circulating the cooling medium in the flow path. It is possible to prevent heat from being trapped inside the partition wall (isolation wall).

  Hereinafter, a basic configuration of a light irradiation apparatus according to the present invention and embodiments of a light source unit will be described with reference to FIGS. 1 to 13.

FIG. 1 is a diagram showing a basic configuration of a light irradiation apparatus according to the present invention, excluding features of a light source unit shown in each embodiment described later.
In the figure, 1 is an ultra-high pressure mercury lamp, 2 is a reflecting mirror, 3 is a light source composed of the ultra-high pressure mercury lamp 1 and the reflecting mirror 2, 4 is a light source unit composed of a plurality of light sources 3, and 5 is A support that supports each light source 3, 6 is a light exit port provided in the support 5 that emits light from the light source 3, 7 is an integrator that makes the illuminance distribution of the light emitted from each light source 3 uniform, 8 Is a collimator, 9 is a mask stage, 10 is a mask, 11 is a work, 12 is a work stage, and 13 is a lighting power source for supplying power to each ultrahigh pressure mercury lamp 1.

  In this light irradiation device, as shown in the figure, the light source section 4 is composed of a plurality of light sources 3, and each light source 3 is individually supported by a support 5. The support body 5 is formed in a gently curved shape along the radiation surface or the elliptical surface, and the support body is configured so that the light emitted from each light source 3 overlaps on the incident surface of the integrator 7 which is a light irradiation region. The light source 3 is tilted and supported gradually toward the peripheral edge of 5.

  The light emitted from the plurality of light sources 3 is superimposed and incident on the integrator 7. The light emitted from the integrator 7 is collimated by the collimator 8 and is applied to a liquid crystal panel or a semiconductor integrated circuit coated with a photosensitive agent such as a resist held on the work stage 12 via the mask 10 held on the mask stage 9. The photosensitive agent on the work 11 such as a circuit board is exposed.

Next, a first embodiment of the light source unit will be described with reference to FIGS.
FIG. 2 is a perspective view seen from the direction opposite to the light emission direction of the light source unit of the light irradiation apparatus according to the invention of this embodiment, and FIG. 3 is the light emission of the light source unit of the light irradiation apparatus according to the invention of this embodiment. The front view seen from the direction side, FIG. 4 is side surface sectional drawing which expanded and showed one light source which comprises a light source unit.

  In these drawings, reference numeral 14 denotes a light source unit in which a plurality of light sources 3 are fixed to a support 5 so as to be spaced apart from each other, and a separation wall 15 is provided between the spaced light sources 3. An isolation wall 16 for blocking the light in the visible region or the infrared region emitted from the surrounding light source 3 from being irradiated to the surrounding light source 3, is attached to the support 5, and is supplied by a gas supply means such as a gas cylinder. A first flow path for circulating the cooling medium 18 such as a second flow path, 17 is a second flow path that communicates with the first flow path 16 at an interval along the longitudinal direction of the first flow path 16, 18 Is a cooling medium introduced into the first flow path 16, and 19 is a cooling medium provided for circulating a cooling medium such as air in a direction opposite to the light emitting direction of the light source unit 14 provided on the support 5. The air inlet 20 is provided in front of the reflecting mirror 2. A front glass, 21 is a stopper for ensuring that the tip of the reflecting mirror 2 fitted in the support 5 is properly inserted, and 22 is provided in a concave portion of the support 5 so that the pressing member 23 is directed in the direction of the reflecting mirror 2. An elastic member to be pressed, 23 is a pressing member that is pressed by the elastic member 22 and pressed into the recess of the reflecting mirror 2, and 24 is a fixing member that includes the elastic member 22 and the pressing member 23 and fixes the reflecting mirror 2 to the support 5. Reference numeral 25 denotes an opening (including a through hole and a notch) provided for penetrating the second flow path 17 through the isolation wall 14, and 26 is provided for penetrating the second flow path 17 through the reflecting mirror 2. 27 (including a through hole, a notch, etc.), 27 is a through hole provided for passing the feed line led out from one electrode of the ultrahigh pressure mercury lamp 1 through the reflecting mirror 2, and 28 is a base member 29, cool the ultra high pressure mercury lamp 1 and the reflector 2 An exhaust port provided for discharging the coolant after.

  Other configurations correspond to the configurations of the same symbols shown in FIG. The light source unit 14 shown in FIGS. 2 and 3 is formed in a planar shape, but actually, as described in FIG. 1, it is formed in a gently curved shape along the radiation surface or the elliptical surface.

Here, in the ultrahigh pressure mercury lamp 1, for example, a pair of electrodes made of tungsten are disposed opposite to each other in an arc tube made of quartz glass, and 0.08 mg / mm ^{3 to} 0.30 mg / mm in the arc tube. No. ³ mercury, rare gas, and halogen are enclosed, and the distance between the electrodes is 0.5 to 2.0 mm. When the amount of halogen encapsulated is 2 × 10 ^{−4 to} 7 × 10 ⁻³ μmol / mm ³ , the action of the halogen suppresses blackening / white turbidity of the arc tube, and a predetermined light transmittance is maintained.
Such an ultra-high pressure mercury lamp 1 efficiently emits light in an ultraviolet region of 300 nm to 450 nm used for exposure of a semiconductor integrated circuit substrate or a liquid crystal display substrate, and has high luminance.

  The reflecting mirror 2 is a parabolic reflecting mirror or an elliptic reflecting mirror, and a dielectric multilayer film that reflects light in the ultraviolet region of 300 nm to 450 nm is formed on the inner surface thereof. A front glass 20 is fitted into the opening on the light emitting direction side in order to prevent the fragments of the lamp from scattering when the ultrahigh pressure mercury lamp 1 is broken. Further, an opening 26 for introducing the second flow path 17, a recess for fitting the pressing member 23, and a through hole 27 for drawing out the power supply line are formed on the outer surface of the reflecting mirror 2. A base member 28 for securing insulation is attached to the neck of the reflecting mirror 2, and the base member 28 is provided with an exhaust port 29 for discharging the cooling medium in a direction opposite to the light emitting direction. It has been. The ultrahigh pressure mercury lamp 1 and the reflecting mirror 2 are fixed so that the first focal point of the reflecting mirror 2 and the location where the bright spot of the ultrahigh pressure mercury lamp 1 should be formed coincide.

Here, when the reflecting mirror 2 is made of borosilicate glass, it is less expensive than quartz glass, and thus there is an advantage that the cost required for production can be reduced.
However, when the reflecting mirror 2 is made of borosilicate glass, the light source 3 is preferably separated from the isolation wall 15. Because, when the reflecting mirror 2 made of borosilicate glass is brought into contact with the isolation wall 15, a temperature difference occurs between the surface and the inside of the reflecting mirror 2, and therefore, the thermal expansion coefficient of borosilicate glass is high. The high temperature part (inner part of the reflecting mirror 2) expands, whereas the relatively low temperature part (outer part of the reflecting mirror 2) does not expand, which may damage the reflecting mirror 2.
When the reflecting mirror 2 is made of quartz glass or crystallized glass, unlike the case of borosilicate glass, the reflecting mirror 2 can be brought into contact with the isolation wall 15, so that the cooling efficiency can be improved. The reason is that when the reflecting mirror 2 is made of quartz glass or crystallized glass, the thermal expansion coefficient of the glass is small, so that the reflecting mirror 2 may be damaged even if the isolation wall 15 is brought into contact with the reflecting mirror 2. Absent.
Further, when the reflecting mirror 2 is made of a metal such as aluminum, there is no fear of the reflecting mirror 2 being damaged, and the reflecting mirror 2 can be brought into contact with the isolation wall 15, so that the cooling efficiency can be improved. it can.

  The support 5 is formed with through holes which are the same number of light emission ports as the number of the light sources 3, and the optical axis of the light source 3 is brought into contact with the stopper 21 in the through holes. Directional positioning is performed. The support 5 is provided with a fixing member 24 including an elastic member 22 such as a spring and a pressing member 23 that abuts the reflecting mirror 2 made of metal, ceramic or the like at the tip thereof.

  For example, the isolation wall 15 is formed of a cylindrical body made of a heat transfer material such as aluminum, and a second flow path for cooling the ultrahigh pressure mercury lamp 1 is introduced to the outer surface of the isolation wall 15. An opening 25 is formed. Further, the inner surface of each isolation wall 15 is subjected to black alumite treatment so that visible light and infrared light transmitted through the reflecting mirror 2 are not reflected toward the light source 3 that emits the light. The isolation wall 15 extends from the support 5 in the optical axis direction, and is configured to cover at least the arc portion of the light source 3.

  The light source unit 14 is assembled by sliding the light source 3 with respect to the through-hole of the support 5 until the positioning portion hits the stopper 21 and fitting the pressing member 23 into the recess provided on the outer surface of the reflecting mirror 2. Thus, positioning in the optical axis direction is performed, and the reflecting mirror 2 is fixed to the support 5. Thereafter, the isolation wall 15 is placed on the support 5 so as to cover the outer surface of the light source 3, and is adhered and fixed to the support 5.

  As shown in FIG. 1, the same number of lighting power sources 13 that supply power to the ultrahigh pressure mercury lamp 1 of the light source 3 are provided as the number of light sources 3 so that one lighting power source 13 supplies power to one light source 3. ing. Thereby, for example, when one ultrahigh pressure mercury lamp 1 is devitrified in the light source unit 14, the power supply to only the ultrahigh pressure mercury lamp 1 is stopped to turn on the other ultrahigh pressure mercury lamp 1. In this state, only the defective lamp can be replaced, so that the exposure process can be continued without stopping the production line. Further, the two power supply lines led out from the base member 28 of each light source 3 and the through hole 27 provided in the reflecting mirror 2 are bound by a connector and electrically connected to each lighting power source 13.

Next, cooling of the light source unit according to the invention of this embodiment will be described.
The first cooling means cools the radiation heat generated by the visible light and infrared light emitted from the ultrahigh pressure mercury lamp 1 in the isolation wall 15 from the cooling air inlet 19 provided in the support 5. It is discharged to the rear part of the isolation wall 15 by the medium to prevent the temperature inside the isolation wall 15 from rising.
The second cooling means is provided on the support 5 so that the plurality of first flow paths 16 for circulating the cooling medium for cooling the light source 3 to the support 5 are positioned in the gaps between the light sources 3. The plurality of second flow paths 17 that are arranged and fixed in the provided recesses and that communicate with the first flow paths 16 at intervals along the longitudinal direction of the first flow paths 16 are arranged at substantially equal intervals. The cooling medium introduced into the second flow path 17 through the first flow path 16 is provided in the same number as 3, and the second is inserted into the openings 25 and 26 provided in the isolation wall 15 and the reflecting mirror 2. It is introduced into the reflecting mirror 2 by the flow path 17 and sprayed to the ultra high pressure mercury lamp 1. The cooling medium after being blown onto the ultrahigh pressure mercury lamp 1 is discharged to the outside of the light source 3 from the exhaust port 29 of the base member 28 provided at the neck of the reflecting mirror 2. The cooling medium discharged from the exhaust port 29 is discharged to the outside of the light source unit 14 by suction means such as a duct (not shown) provided outside the light source unit 14. The second flow path 17 can effectively cool the light source 3 by adjusting its opening diameter, total length, and the like.

  As described above, according to the light source unit 14 of the present embodiment, when the ultrahigh pressure mercury lamp 1 is turned on, the visible region or the infrared ray that is emitted from the ultrahigh pressure mercury lamp 1 and passes through the reflecting mirror 2 is transmitted. It is possible to prevent the light of the region from being irradiated to the other light source 3 by the isolation wall 15. Moreover, since the radiant heat of the isolation wall 15 can be discharged by the cooling medium introduced from the cooling air inlet 19, the temperature of the light source unit 14 can be prevented from being increased. In addition, since the ultrahigh pressure mercury lamp 1 and the reflecting mirror 2 are cooled by the cooling medium introduced from the second flow path 17, the ultrahigh pressure mercury lamp 1 is devitrified and the reflecting mirror 2 is damaged. Can be solved.

Next, a second embodiment of the light source unit will be described with reference to FIGS.
5 is a perspective view of the light source unit of the light irradiation apparatus according to the present embodiment as viewed from the direction opposite to the light emitting direction, and FIGS. 6A and 6B are cross-sectional views of the cooling block shown in FIG. It is.
In these drawings, reference numeral 30 denotes a cooling block provided with a flow path 31 for circulating a cooling medium 32 made of aluminum or the like, 31 denotes a flow path provided in the cooling block 30 made of a copper pipe or the like, and 32 denotes cooling water. Or the like.

  The other configurations correspond to the configurations with the same reference numerals shown in FIG. Further, the light source unit 14 shown in FIG. 5 is formed in a planar shape, but actually, as described in FIG. 1, it is formed in a gently curved shape along the radiation surface or the elliptical surface. Further, the light source unit 14 of the present embodiment may further include first and second cooling means similarly to the light source unit 14 of the first embodiment.

  As shown in these drawings, the cooling block 30 is provided in the gap between the light sources 3 so as to abut against the isolation wall 15 covering the outer surface of the light source 3. Further, the U-shaped tube that becomes the flow path 31 for circulating the cooling medium 32 is disposed in a recess having a U-shape as shown in FIG. Further, instead of such a configuration, as shown in FIG. 6B, the cooling block 30 may be divided into two so as to be embedded with a U-shaped tube interposed therebetween.

  As described above, according to the light source unit 14 of the present embodiment, when the ultrahigh pressure mercury lamp 1 is turned on, the visible region or the infrared ray that is emitted from the ultrahigh pressure mercury lamp 1 and passes through the reflecting mirror 2 is transmitted. It is possible to prevent the region of light from being irradiated to the other light sources 3 by the isolation wall 15. As a result, even if the isolation wall 15 becomes high temperature, cooling water circulating means such as a pump is connected to the inside of the U-shaped tube from the end of the U-shaped tube serving as the flow path 31 to cool the cooling water or the like. By circulating the medium 32, the isolation wall 15 can be cooled. As a result, it is possible to prevent heat from being trapped inside the isolation wall 15, thereby avoiding problems such as devitrification of the ultra-high pressure mercury lamp 1, damage to the reflecting mirror 2, and short-circuiting of the feeder line. Can do.

Next, a third embodiment of the light source unit will be described with reference to FIGS.
FIG. 7A is a perspective view of the light source unit of the light irradiation apparatus according to the invention of this embodiment as viewed from the light emitting direction side, and FIG. 7B is the light source unit of the light irradiation apparatus according to the invention of this embodiment. FIG. 8 is a perspective view seen from the side opposite to the light emitting direction side, FIG. 8 is a cross-sectional view seen from AA of the light source unit shown in FIG. 7A, and FIG. 9 is a light source unit 14 shown in FIG. It is the perspective view seen from the light-projection direction side of the light source unit group comprised by arranging several (4 pieces).

  Note that the configuration shown in these drawings corresponds to the configuration of the same symbol shown in FIG. The light source unit or the light source unit group shown in FIGS. 7 to 9 is formed in a substantially planar shape, but in actuality, as described in FIG. 1, it is formed in a gently curved shape along the radiation surface or the elliptical surface. Has been. Further, the light source unit of the present embodiment may also include first and second cooling means as in the light source unit of the first embodiment.

As shown in FIGS. 7 to 8, the light source unit 14 according to the invention of the present embodiment includes a row of light sources 3 (n ₃ ) arranged on the center side of the light source 3 (n ₃ ) arranged on the peripheral side ( Compared with n ₂ , n ₄ ), the distance from the light irradiation region is large, and further, the row (n ₁ , n ₅ ) of the light source 3 in which the row (n ₂ , n ₄ ) of the light source 3 is arranged on the peripheral side thereof. ), The separation distance from the light irradiation region is increased. That is, a step is provided in the row of adjacent light sources 3 so that the distance from the light irradiation region increases as the row of light sources 3 arranged on the center side of the light source unit 14 is approached.
Instead of the configuration in which a step in the sequence of the adjacent light source 3, as the distance from the light irradiation region closer to the line of the light source 3 arranged in the center side (m ₃₎ is increased, adjacent the light source You may comprise so that a level | step difference may be provided in 3 rows.

  Further, the support body 5 is formed with a step between the support bodies 5 constituting the adjacent columns or rows so that the distance from the light irradiation region increases toward the column or row on the center side of the light source unit 14. Yes.

  As shown in FIG. 8, the total length L1 of the step is preferably in a range of 1% or less with respect to the distance from the surface of the support 5 closest to the integrator 7 (periphery side) to the surface of the integrator 7. By setting the total length L1 of the step within this numerical value range, it is possible to satisfy a predetermined light irradiation illuminance and to provide a cooling effect described later.

  In the light source unit group according to the invention of the present embodiment, as shown in FIG. 9, for example, the light source units 14 in which 25 light sources 3 are arranged in 5 rows × 5 columns are arranged in 2 rows × 2 columns. Consists of. As a result, a light irradiation device composed of 100 light sources 3 can be easily configured.

  In FIG. 9, four light source units 14 having a step in the adjacent light source 3 column are arranged. However, a row of light sources adjacent to a light source unit having a step in the adjacent light source column is arranged. A light source unit group may be configured by combining with a light source unit provided with a step.

  According to the light source unit or the light source unit group of the present embodiment, the light source 3 positioned on the center side of the light source unit 14 is less likely to be cooled than the light source 3 positioned on the peripheral side of the light source 3. 1 may cause problems such as devitrification and breakage of the reflecting mirror 2, but by providing a step between the light sources 3, the cooling area increases in the isolation wall 15 covering the light source 3 located on the center side. Therefore, the isolation wall 15 functions as a heat sink, the light source 3 can be efficiently cooled, and the above-described problems can be avoided.

Next, a fourth embodiment of the light source unit will be described with reference to FIG.
FIG. 10 is a perspective view of the light source unit of the light irradiation apparatus according to the invention of this embodiment as viewed from the light emitting direction side.
The configuration shown in the figure corresponds to the configuration of the same reference numeral shown in FIG. Further, the light source unit 14 shown in FIG. 10 is formed in a substantially planar shape, but actually, as described in FIG. 1, it is formed in a gently curved shape along the radiation surface or the elliptical surface. Further, the light source unit 14 of the present embodiment may also include first and second cooling means as in the light source unit 14 of the first embodiment.

As shown in the figure, the light source unit 14 according to the invention of the present embodiment uses, for example, 25 light sources 3 and is arranged around the light source 3 fixed to the center of the support 5 and the light source 3. A first light source group that is closer to the light irradiation region than the light source 3, and a light source group that is disposed around the first light source group, the first light source group In comparison, the second light source group closer to the light irradiation region is provided, and the light source unit 14 is configured to have a pyramid appearance as a whole.
The support 5 of the light source unit 14 is formed with a step so that the distance from the light irradiation region increases as it approaches the center of the light source unit 14.
In addition, in claim 6, “the light source supported on the center side of the support” is arranged in the column or row of the light sources 3 arranged on the center side of the support 5 and the center of the support 5. The light source 3 is meant.

  A plurality of light source units 14 according to the invention of the present embodiment can be used to form a light source unit group as shown in FIG.

  According to the light source unit or the light source unit group of this embodiment, the same effects as those of the third embodiment can be obtained.

Next, a fifth embodiment of the light source unit will be described with reference to FIG.
FIG. 11A is a perspective view of a light source unit group configured by arranging a plurality (four) of light source units of the light irradiation apparatus according to the invention of the present embodiment as viewed from the light emitting direction side, and FIG. FIG. 12 is a perspective view of the light source unit group shown in FIG. 11A viewed from the side opposite to the light emitting direction.

  Note that the configuration shown in these drawings corresponds to the configuration of the same symbol shown in FIG. Further, although the light source unit group shown in these drawings is formed in a substantially planar shape, actually, as described in FIG. 1, it is formed in a gently curved shape along the radiation surface or the elliptical surface. Also in the light source unit group of the present embodiment, first and second cooling means may be provided in the same manner as the light source unit of the first embodiment.

  In the light source unit group according to the invention of the present embodiment, as shown in these drawings, for example, the light source units 14 in which 25 light sources 3 are arranged in 5 rows × 5 columns are arranged in 2 rows × 2 columns. As a result, a light source unit group composed of 100 light sources 3 is formed.

  Each light source unit 14 is formed with a step between adjacent light source 3 columns. By arranging such light source units in 2 rows × 2 columns, the central column of the light source unit group is the most light. The separation distance from the irradiation region is large, and the separation distance from the light irradiation region is configured to be smaller in the peripheral column.

  According to the light source unit group of the present embodiment, the same effects as those of the third embodiment can be obtained.

Next, a sixth embodiment of the light source unit will be described with reference to FIG.
FIG. 12 is a front view of the light source unit of the light irradiation apparatus according to the invention of the present embodiment as viewed from the light emission direction side.

  The configuration shown in the figure corresponds to the configuration of the same reference numeral shown in FIG. In addition, the light source unit shown in the figure is formed in a planar shape, but actually, as described in FIG. 1, it is formed in a gently curved shape along the radiation surface or the elliptical surface. Further, the light source unit of the present embodiment may also include first and second cooling means as in the light source unit of the first embodiment.

  As shown in the figure, in the light source unit 14 of the present embodiment, the separation distance between the light sources 3 arranged on the center side of the support 5 is larger than that of the light source 3 arranged on the center side. It is configured to be larger than the separation distance between the light sources 3 arranged on the edge side.

  According to the light source unit 14 according to the invention of the present embodiment, when a plurality of light sources 3 are densely lit up at the same time, the light source 3 located on the center side is difficult to be cooled, so that heat is generated inside the isolation wall 15. Although it is easy to block, by increasing the separation distance between the light sources 3 arranged on the center side of the support 5, it is possible to prevent heat from being accumulated in the center, and all light sources fixed to the support 5. 3 can be cooled uniformly.

Next, a seventh embodiment of the light source unit will be described with reference to FIG.
FIG. 13 is a view of the light source unit of the light irradiation apparatus according to the invention of this embodiment as viewed from the direction opposite to the light emitting direction.

  In this figure, 33 is a partition wall that extends integrally from the support 5 in the optical axis direction and also serves as an isolation wall forming a light source storage space, 34 is a flow path provided in the partition wall 33, and 35 is cooling water. Or the like. The other configurations correspond to the configurations with the same reference numerals shown in FIG. In addition, the light source unit 14 shown in the figure is formed in a substantially planar shape, but actually, as described in FIG. 1, it is formed in a gently curved shape along the radiation surface or the elliptical surface. Further, the light source unit 14 of the present embodiment may also include first and second cooling means as in the light source unit 14 of the first embodiment.

As shown in the figure, in the light source unit 14 of the present embodiment, through holes are provided in the support 5 according to the number of light sources 3, and the whole is formed by a partition wall 33 in a honeycomb shape. The front surface side of the through hole is a light emitting port, and the rear surface side of the through hole formed by the partition wall 33 is an insertion port for the light source 3.
The light source 3 is inserted into the through-hole formed by the partition wall 33 by sliding along the partition wall 33, fitted into the support 5, positioned in the optical axis direction, and fixed.
The flow path 34 for circulating the cooling medium 35 is formed in a U shape and is provided so as to penetrate the partition wall 33. A circulation means for circulating a cooling medium 35 such as a pump (not shown) is connected to the end of the flow path 34.

  During the exposure process, the light source 3 is blocked from visible and infrared light from the surrounding light source 3 by the partition wall 33 also serving as an isolation wall provided on the support 5. Even if the partition wall 33 reaches a high temperature, the reflecting mirror 2 in contact with the partition wall 33 can be efficiently cooled by circulating the cooling medium 35 through the flow path 34. This prevents heat from being trapped inside the partition wall 33, so that it is possible to prevent problems such as devitrification of the ultrahigh pressure mercury discharge lamp 1 and damage to the reflecting mirror 2.

It is a figure which shows the basic composition of the light irradiation apparatus which concerns on this invention except the characteristic of the light source unit shown in each embodiment. It is the perspective view seen from the opposite direction side to the light emission direction of the light source unit of the light irradiation apparatus which concerns on invention of 1st Embodiment. It is the front view seen from the light emission direction side of the light source unit of the light irradiation apparatus which concerns on invention of 1st Embodiment. It is side surface sectional drawing which expanded and showed one light source which comprises the light source unit shown in FIG. It is the perspective view seen from the opposite direction side to the light emission direction of the light source unit of the light irradiation apparatus which concerns on invention of 2nd Embodiment. It is sectional drawing of the cooling block shown in FIG. It is the perspective view which looked at the light source unit of the light irradiation apparatus which concerns on invention of 3rd Embodiment from the light emission direction side and the reverse direction side with respect to the light emission direction side. It is sectional drawing seen from AA of the light source unit shown in FIG. It is the perspective view seen from the light emission direction side of the light source unit group comprised by arranging the light source unit shown in FIG. It is the perspective view which looked at the light source unit of the light irradiation apparatus which concerns on invention of 4th Embodiment from the light-projection direction side. FIG. 7 is a perspective view of a light source unit group configured by arranging a plurality (four) of light source units of a light irradiation apparatus according to the invention of the fifth embodiment as viewed from the light emission direction side and the direction opposite to the light emission direction side. It is. It is the front view which looked at the light source unit of the light irradiation apparatus which concerns on invention of 6th Embodiment from the light emission direction side. It is the figure which looked at the light source unit of the light irradiation apparatus which concerns on invention of 7th Embodiment from the reverse direction side with respect to the light emission direction.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Super high pressure mercury lamp 2 Reflector 3 Light source 4 Light source part 5 Support body 6 Light emission port 7 Integrator 8 Collimator 9 Mask stage 10 Mask 11 Work 12 Work stage 13 Lighting power source 14 Light source unit 15 Isolation wall 16 1st flow path 17 Second flow path 18 Cooling medium 19 Cooling air inlet 20 Front glass 21 Stopper 22 Elastic member 23 Pressing member 24 Fixing member 25 Opening (including through holes, notches, etc.)
26 Opening (including through holes, notches, etc.)
27 Through-hole 28 Base member 29 Exhaust port 30 Cooling block 31 Channel 32 Cooling medium 33 Partition wall 34 Channel 35 Cooling medium

Claims (2)

An ultra-high pressure mercury lamp in which 0.08 mg / mm ³ or more of mercury is sealed in an arc tube, and a reflecting mirror that surrounds the ultra-high pressure mercury lamp with the optical axis substantially coincident with the tube axis of the ultra-high pressure mercury lamp. In the light irradiation device that includes a plurality of light sources and irradiates the light emitted from each light source in a light irradiation region,
The light source is fixed to a support having a light exit opening apart from each other, and a separating wall for blocking light to an adjacent light source is provided between the spaced light sources.
A partition wall that extends integrally from the support in the optical axis direction and forms a light source storage space is provided. The partition wall also serves as the isolation wall, and the front side of the through hole formed by the partition wall is the light beam. A light irradiation apparatus, wherein the light emitting device is an emission port, and a rear surface side of the through hole is an insertion port for the light source .   The light irradiation apparatus according to claim 1, wherein the partition wall includes a flow path for circulating a cooling medium.

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