JP2010117553A - Light irradiation device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a light irradiation device with a plurality of lamps and a condensing mirror, in which a barrier wall is prevented from swelling deformation (buckling) in a direction perpendicular to the wall plane when the barrier wall is disposed between the lamps. <P>SOLUTION: The barrier wall is composed of a plurality of rectangular planar members are aligned in the longitudinal direction, and a column support supporting the planar members, in which the planar members are supported by the column support while allowing elongation of the planar member in the longitudinal direction by thermal expansion. The planar members can be arranged horizontally or vertically, and the planar members aligned in the longitudinal direction are preferably arranged to leave a little clearance between the adjoining planar members. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a light irradiation apparatus used in an exposure apparatus for manufacturing a semiconductor element, a printed circuit board, a liquid crystal substrate, and the like, and particularly relates to a light irradiation apparatus including a plurality of lamps.

As a light source used in an exposure apparatus for a semiconductor element, a printed circuit board, and a liquid crystal display substrate, a large ultrahigh pressure mercury lamp of several kW to several tens of kW has been mainly used. These light sources have high reliability and have been used for some time.
In recent years, liquid crystal display substrates and printed circuit boards have been increased in area, and accordingly, the exposure apparatus has been required to expand the light irradiation area, and the exposure light source is also required to be enlarged.

As a light irradiation apparatus provided with a large exposure light source, for example, as in Patent Document 1, a light irradiation apparatus in which a light source is configured by a plurality of lamps and reflecting mirrors (condensing mirrors) that reflect light emitted from the lamps. Has been proposed.
In FIG. 9, the structure of the conventional light irradiation apparatus described in patent document 1 is shown.
As the light source 10, for example, two lamps 1a and 1b and condenser mirrors 2a and 2b are used. The two condenser mirrors 2a and 2b are arranged so that the second focal points thereof coincide with each other.

FIG. 10 is a diagram showing the configuration of the light source 10 shown in FIG. As shown in the figure, the condensing mirrors 2a and 2b are partially cut off obliquely with respect to the optical axis L of the condensing mirrors 2a and 2b, and the cut surfaces S thus cut out are parallel to each other and the condensing mirror 2a. , 2b are arranged so as to share the second focus f.
Returning to FIG. 9, the light from the light source 10 is folded back by the first plane mirror 3 and enters the integrator lens 4 placed at the second focal position of the condenser mirrors 2 a and 2 b. The light adjusted so that the illuminance distribution on the irradiated surface 8 becomes uniform by the integrator lens 4 is folded back by the second plane mirror 6 via the shutter 5, and the central ray becomes parallel by the collimator lens 7. The surface 8 is irradiated.

In the light irradiating apparatus including a light source composed of a plurality of lamps and a condensing mirror, the reason why the condensing mirror is partially cut out as shown in FIG. This is because the light use efficiency can be increased and the illuminance on the light irradiation surface 8 can be increased without increasing the collimation angle (viewing angle) θ.
JP 2004-245912 A JP 2008-83586 A

However, as shown in FIG. 10, when the condensing mirrors are cut and arranged, there is no obstacle between the adjacent lamps.
Therefore, if a problem such as a crack occurs in one lamp during lighting, the broken lamp fragment reaches the next lamp, and in some cases damages other lamps. It can also be caused.

In order to prevent this, it is conceivable that a partition wall is provided between the condenser mirrors arranged side by side so that even if the lamp is broken, the fragments do not reach the adjacent lamp.
For example, the exposure light source described in Patent Document 2 is provided with a partition wall between the condenser mirrors, although the purpose of installation is different.

However, if a plate-like member is simply disposed between the condenser mirrors as the partition wall, the following problems occur.
FIG. 11 is a diagram showing the force applied to the plate member used as the partition wall.
As shown in FIG. 11A, when a single plate-like member 100 is disposed between the condensing mirrors, the plate-like member 100 emits light B emitted from the lamp 1 while the lamp is on. The central portion 101 (circled hatched portion in the figure) near the lamp 1 is heated to a high temperature, and as a result, the central portion 101 generates a force F1 that tends to expand outward.
On the other hand, the peripheral portion 102 of the plate-like member 100 far from the lamp 1 has a lower temperature rise and a smaller amount of thermal expansion than the central portion 101.

  Therefore, as shown in FIG. 11 (b), the force F1 to be expanded generated in the central portion 101 is pressed from the peripheral portion 102 that does not expand so much, and the central portion 101 is compressed from the peripheral portion 102 in the opposite direction. You will receive F2. Therefore, a force F3 in a direction perpendicular to the plane of the plate-like member 100 is generated in the central portion 101. As a result, the central portion 101 swells (warps) in a direction perpendicular to the plane of the plate-like member 100. ) Deformation called “buckling” occurs.

As described above, in the light source of the light irradiation device, the plate-like member as the partition wall is disposed between the condenser mirror and the condenser mirror. However, it is desirable that the distance between the condenser mirrors on which the partition walls are arranged be as small as possible in order to reduce the component that does not reflect the light from the lamp.
For this reason, if the partition wall, that is, the plate-like member is deformed due to buckling in the narrow space, the deformed plate-like member may push the edge of the light collecting mirror and damage the light collecting mirror. It is done.

The present invention has been made in consideration of the above problems, and the object of the present invention is to
In a light irradiation device including a plurality of lamps and a reflecting mirror, when a partition is provided between the reflecting mirror and the reflecting mirror, light that does not cause deformation (buckling) in which the partition swells in a direction orthogonal to the plane of the partition. It is to provide an irradiation apparatus.

  In order to solve the above problems, in the present invention, a plurality of lamps, a reflecting mirror provided around each of the plurality of lamps and reflecting light from each lamp, and provided between the reflecting mirror and the reflecting mirror. In the light irradiation apparatus provided with the partition wall, the partition wall is provided with a plurality of rectangular plate-like members arranged in the longitudinal direction, and a column supporting the plurality of plate-like members. The member is attached to the column while allowing expansion and contraction (movement) along the longitudinal direction of the plate-like member due to thermal expansion.

A specific method for supporting the plate-like member on the support is as follows.
When arranging a plate-like member horizontally long, a long hole along the longitudinal direction is formed in a plate-like member. Then, a screw or pin is inserted into the elongated hole, and the inserted screw or pin is fixed to the column, thereby supporting the plate-like member on the column.
Alternatively, a long hole is formed in the support along the longitudinal direction of the plate-like member. Then, a screw or pin is inserted into the elongated hole, and the inserted screw or pin is fixed to the plate member, thereby supporting the plate member on the support column.

By supporting in this way, the plate-like member can be moved by thermal expansion with respect to the pillar in the longitudinal direction of the long hole formed in the plate-like member or the pillar.
Moreover, when arrange | positioning a plate-shaped member vertically long, the upper end is attached to a support | pillar, and a lower end is not fixed. The plate-like member can be moved by thermal expansion in the direction of gravity, which is the longitudinal direction thereof.
Note that it is desirable that the plate-like members aligned in the longitudinal direction be supported horizontally by forming a gap between adjacent plate-like members, regardless of whether they are arranged horizontally or vertically.

Further, in the above light irradiation device, when four lamps and a reflecting mirror are used as the light source, the partition walls are arranged in a cross shape by crossing at the center, and each lamp is arranged in four quadrants formed by the partition walls. And a reflecting mirror for reflecting the light from the lamp.
Further, in the above light source, each reflecting mirror is cut out at two positions in the 90 ° direction, the cut-out portions are arranged to face each other, and the partition wall is arranged between the cut-outs.

  In the light irradiation device of the present invention, a plurality of rectangular plates in which the plate-like members forming the wall surfaces of the partition walls provided between the reflecting mirrors that reflect the light from the lamp are aligned in the longitudinal direction are arranged. By constituting from the plate-like members, the width of each plate-like member was narrowed to reduce the temperature difference in the width direction of each plate-like member. As a result, the direction in which the plate-like member extends greatly due to thermal expansion can be limited to the longitudinal direction of the plate.

And since each plate-like member was attached to the column supporting each plate-like member so as to allow elongation in the longitudinal direction due to thermal expansion, the plate-like member is placed on its own plane during lamp lighting. On the other hand, deformation (buckling) that swells in a direction perpendicular to the surface does not occur.
Therefore, even if the partition wall is provided in a portion where the distance between the reflecting mirror is narrow, the reflecting mirror is not damaged.

  Further, by attaching a plate-like member to the support column by forming a gap between adjacent plate-like members, when each plate-like member is thermally expanded, the amount of thermal expansion (expansion and contraction) in the adjacent plate-like member. Although the length is different, they do not rub against each other and can prevent generation of dust. Furthermore, it also serves as room for expansion of the plate-like member in the width direction.

  In the light irradiation device using four lamps and a condensing mirror, when the rectangular plate-shaped members forming the partition walls are arranged horizontally long by crossing the partition walls and arranging them in a cross shape, In particular, a free space in which the plate member can be extended by thermal expansion can be easily formed on one end side of the plate member (the side opposite to the side where the partition walls intersect).

  In the case of the above-described light irradiation device, if the reflecting mirrors are cut out at two positions in the 90 ° direction and the notches are arranged facing each other, the four reflecting mirrors have the same shape and can be shared. As a result, the cost of the entire apparatus can be reduced.

FIG. 1 is a diagram showing a schematic configuration of a light irradiation apparatus of the present invention. In addition, the same code | symbol is attached | subjected about the same thing as FIG.
FIG. 9 is different from FIG. 9 in that a partition wall 20 is provided between a condenser mirror of a light source constituted by a plurality of lamps, and other configurations are basically the same.

FIG. 2 is a diagram showing the configuration of the first embodiment of the partition wall shown in FIG.
As shown in the figure, the partition wall 20 includes a plurality (eight in the figure) of an elongated rectangular plate (hereinafter referred to as a strip plate) 21 and two support columns that support the plurality of strip plates 21 at both ends. 22 and 23.
The wall surface portion for preventing the fragments when the lamp is broken from reaching the adjacent lamp is formed by arranging a plurality of strips in the vertical direction with the longitudinal direction aligned horizontally. In addition, in the same figure, the frame which fixes a support | pillar to the lower part of a wall surface is also shown.

The strip plate 21 is made of a stainless steel plate because it can withstand heating by light from a lamp (estimated temperature is 400 ° C. to 600 ° C.) and is a relatively inexpensive material.
In addition, if internal strain due to processing remains in the strip plate 21, buckling (warping) is likely to occur and the amount of deformation increases, so the stainless steel plate used as the strip plate is annealed (annealed and annealed). To go and remove the strain.
In addition, the size of one of the strip plates 21 in this embodiment is 600 mm in length, 30 mm in width, and 6 mm in thickness.

Here, the length of the strip plate 21 corresponds to the length of the cutout formed in the condenser mirror, and is designed to be equal to or longer than the length of the cutout.
The thickness is designed by calculating the thickness so that when a broken piece of the lamp hits the strip, the broken piece does not penetrate the strip.
The width is designed by calculating a distance that does not generate a temperature distribution that causes buckling in the width direction when the thickness of the strip plate is the above-described thickness.

FIG. 3 is an enlarged view of a portion where the strip plate 21 is supported by the columns 22 and 23.
As shown in the figure, a long through hole 30 along the longitudinal direction is formed at the longitudinal end of the strip plate 21, and a screw 40 or a pin 50 is inserted into the through hole 30. Then, the inserted screw 40 or pin 50 is fixed to the columns 22 and 23. As a result, the strip plate 21 is supported by the 22 and 23 support columns.
As will be described later, when the through holes 30 are formed at both ends of the strip plate 21, both need not be long holes, and only the through holes formed at one end may be long holes.

FIG. 3A and FIG. 3B are diagrams showing an example in which the strip plate 21 is attached to the column 23 with the screw 40. 3A is a perspective view thereof, and FIG. 3B is a sectional view thereof.
A screw hole 60 of a screw 40 that supports the strip plate 21 is formed in the column 23, and a through hole 30 is formed in the strip plate 21. Since the strip plate 21 is thermally expanded in the longitudinal direction, the through hole 30 is a long hole that is several millimeters longer in the longitudinal direction of the strip plate 21 in consideration of the amount of thermal expansion.

  Subsequently, after a spring washer 42 and a flat washer 43 are inserted into the shaft 41 of the screw 40, a cylindrical member called a collar 44 is passed through, and the screw 40 is inserted into the through-hole 30 together with the collar 44. Screw on to. The collar 44 is higher than the plate thickness (6 mm) of the strip plate 21, and the diameter of the through hole 30 is larger than the outer diameter of the collar 44.

  The screw 40 is tightened until the washers 42 and 43 hit the collar 44. As described above, since the collar 44 is higher than the thickness of the strip plate 21, the strip plate 21 is not completely fixed to the column 23. The strip plate 21 is supported by allowing movement of expansion and contraction due to thermal expansion with respect to the column 23 corresponding to the long hole of the formed through hole 30.

FIG. 3C is a diagram illustrating an example in which the strip plate 21 is attached to the support column 22 with the pins 50.
In this example, the support post 22 is U-shaped and has pin holes 70 that are fixed through the pins 50 on both sides. A through-hole 30 is formed in the strip plate 21, and the through-hole 30 is a long hole that is several millimeters longer in the longitudinal direction of the strip plate 21 in consideration of expansion and contraction due to thermal expansion of the strip plate 21 as described above. .

The strip plate 21 is inserted into the U-shaped concave portion 71 of the support column 22, and the pin 22 in the order of the pin hole 70 of the support plate 22 → the through hole 30 of the strip plate 21 → the other pin hole 70 of the support column 22. Pass 50.
Note that the width of the U-shaped concave portion 71 of the support 22 is set to be slightly wider than the thickness of the strip plate 21. Further, the U-shape (U-shape) is formed deeply so that the side surface in the longitudinal direction of the strip plate 21 does not hit the bottom surface of the U-shape (U-shape) of the support column 22.

If it does in this way, the strip board 21 is not completely fixed with respect to the support | pillar 22 like the example using the said screw, and the strip board 21 is the part for the long hole of the formed through-hole 30, and the support | pillar 22. On the other hand, expansion and contraction due to thermal expansion is allowed and supported.
As a method of supporting both ends of the strip plate 21 on the columns 22 and 23, screws may be used at both ends, or pins may be used at both ends, and one may use screws and the other use pins. May be.

  Note that, as described above, when the strips 21 are arranged horizontally and supported at both ends by the columns 22 and 23 as in the present embodiment, the screws 40 or pins 50 formed at both ends of the strip 21 are provided. It is not necessary for both the through-holes 30 that pass therethrough to be elongated holes. The through hole 30 at least at one end may be a long hole having a length corresponding to expansion and contraction due to thermal expansion of the strip plate 21.

As described above, the plurality of strip plates 21 are independently attached to the support columns 22 and 23 so as to align the plurality of longitudinal directions in the vertical direction. Thereby, each strip 21 can be expanded and contracted by thermal expansion independently of the adjacent upper and lower strips, and can be attached and detached one by one.
Then, the strips 21 are arranged up to the height of the peripheral edge when the condensing mirror is not cut out.
In this embodiment, as shown in FIG. 2, eight strip plates are arranged (stacked). As a result, even if one lamp breaks, the fragments are blocked by the partition wall and do not reach the next lamp.

FIG. 4 shows the partition wall 20 configured in this manner as a four-lamp type light source (four lamps 1a, 1b, 1c, 1d and condensing mirrors 2a, 2b that reflect and collect light from each lamp. , 2c, 2d).
FIG. 5 is a view showing a partition wall attached to a four-lamp light source, and is a view in which a lamp and a condenser mirror are removed from FIG.

  As shown in FIG. 5, in a four-lamp type light source, four partition walls are arranged in a cross shape by intersecting at the center. As shown in FIG. 4, the lamps 1a, 1b, 1c, 1d and the light emitted from the lamps are divided into four quadrants divided by 90 ° generated by partition walls arranged in a cross shape. Reflecting mirrors (condensing mirrors) 2a, 2b, 2c, and 2d that reflect and collect light are arranged.

  Each condensing mirror 2a, 2b, 2c, 2d is cut out at two locations in the 90 ° direction, and the cut out portions are arranged facing each other. As a result, the lamps are closer to each other than when the condensing mirror is not cut out, and the brightness when the four lamps and the condensing mirror are regarded as one light source is increased. As described above, the collimation angle ( The use efficiency of light can be increased without increasing the viewing angle) θ.

Further, by arranging the lamp and the condensing mirror as described above, the four condensing mirrors 2a, 2b, 2c, and 2d all have the same shape in the same direction and are shared as parts. As a result, the cost of the entire apparatus can be reduced.
And the partition 20 is arrange | positioned between the notch of these condensing mirrors 2a, 2b, 2c, 2d. If the distance between the condenser mirrors is large, the amount of light that is not reflected in the light from the lamp increases accordingly. Therefore, it is desirable to keep it as narrow as possible. In this embodiment, the distance is about 14 mm.

In the present embodiment, as shown in FIG. 5, the support columns 22 and 23 for supporting the strip plate 21 of the partition wall 20 are provided in the center and four in the peripheral portion. One end of the strip plate 21 is attached to the central column 22 so as to extend in four directions, and the other end of the strip plate 21 is attached to a column 23 provided in the peripheral portion. Thereby, the partition which cross | intersected the cross shape is comprised.
In addition, by arranging the four partition walls 20 in a cross shape in this manner, the strips 21 of each partition wall 20 are in contact with the inner side (the central support column 22) when the four partition walls 20 are in contact with each other when they are extended by thermal expansion. It is easy to make a free space that can extend in the outer direction (direction of the supporting column 23 in the peripheral portion).

  Therefore, among the through holes 30 formed to fix the strip plate 21 to the columns 22 and 23, the through hole on the central column 22 side is not a long hole, and only the through hole on the peripheral column 23 side is a long hole. Thus, the strip plate 21 extends outward during thermal expansion. The shape of the long hole is formed in consideration of expansion and contraction of the thermal expansion of the strip plate 21.

FIG. 6 is a diagram schematically showing the state of the partition wall when the lamp is lit, and the state of the partition wall constituted by a strip plate when the lamp is lit will be described with reference to FIG. In the figure, the wall surface of the partition wall is constituted by five strip plates indicated by A to E, and the support columns are omitted.
When the lamp is lit, the central part (portion close to the lamp) of the strips A to E rises from about 400 ° C to 600 ° C. In the figure, the portion where the temperature of each strip plate increases is indicated by hatching. The central strip C close to the light emission point of the lamp has a wide temperature range, and the upper and lower strips of the central strip C have a narrow temperature increase region as they move away from the light emission point of the lamp.

At this time, the force generated in the strips A to E is divided into two, that is, a force generated in the vertical direction and a force generated in the left-right direction.
First, with respect to the vertical direction of the strip plate, as described above, the strip plate is narrowed so that a temperature difference in the vertical direction does not occur as much as possible. Therefore, a single strip has a small temperature difference in the vertical direction, and in the vertical direction, a hot part (a part with high thermal expansion) and a cold part (a part with low thermal expansion) are unlikely to occur. Therefore, the force which compresses from the up-down direction with respect to a part with high temperature does not arise.

In addition, since the width of the strip plate is narrow, even if the portion where the temperature is high thermally expands in the width direction, the amount is less than 1 mm, and the diameter of the through hole through which the screw or pin formed in each strip plate is passed Can be absorbed by the amount of play.
On the other hand, because the strips are arranged horizontally in the left-right direction, unlike the up-down direction, the left-right direction (longitudinal direction of the strip) has a hot part (a part where thermal expansion is large) and a cold part. (Part with less thermal expansion) occurs. When the hot part is thermally expanded, the strip plate extends in the left-right direction by several millimeters, but the elongation is absorbed by the long holes formed in the strip plate as described above.

  That is, since it is a rectangular strip, the plate-like member (strip) is limited in the direction of thermal expansion in its longitudinal direction, and therefore can absorb the thermal expansion and expansion / contraction of the plate through the long holes.

  The strip plate is a strip plate close to the lamp (for example, strip plate C) and a strip plate far from the lamp (for example, strip plate A or strip plate E), or a strip plate in the middle (for example, strip plate B or strip plate D). , The area of the high temperature area (the hatched area in the figure) differs, and therefore the amount of elongation FL due to thermal expansion differs. That is, the strip plate C extends long, but the strip plate A and the strip plate E extend shortly, and the strip plate B and the strip plate C are in the middle.

On the other hand, as described above, each strip plate is attached to the support column while allowing expansion and contraction of thermal expansion independently. Therefore, each of the strips A to E can move in accordance with the thermal expansion or contraction. Therefore, the force which compresses with respect to a part with high temperature also does not arise also in the left-right direction.
As described above, the strip plate is made narrow so that there is no temperature difference in the vertical direction, and a temperature difference is generated in the horizontal direction, but the expansion and contraction (movement) due to thermal expansion is allowed and the column is supported. Therefore, a force for compressing a portion having a high temperature does not occur in both the vertical direction and the horizontal direction.

Accordingly, each strip plate A to E does not generate a force in a direction orthogonal to its own plate surface, and the partition wall in which a plurality of strip plates are arranged is deformed to swell in a direction orthogonal to the plane of the partition wall ( No buckling).
In addition, when arranging each strip board side by side, it is desirable to provide the screw hole and pin hole for fixation formed in a support | pillar so that it can attach with a 1 mm or less clearance gap between adjacent strip boards.

This is because, as shown in FIG. 6, the strip plate thermally expands in the longitudinal direction, but the amount of extension FL differs among the strip plates. Therefore, if there is a gap between adjacent strip plates, the adjacent strip plates will not rub against each other when the respective strip plates perform thermal expansion / contraction according to each.
As a result, each strip can be stretched and contracted smoothly, and generation of dust due to rubbing can be prevented. Moreover, the expansion | swelling of an up-down direction (width direction of a strip board) can also be absorbed. If the gap is 1 mm or less, even if the lamp breaks and a piece passes through the gap, the adjacent lamp is not damaged.

In the first embodiment, a long hole is formed in the strip plate, and a screw hole for fixing a screw to the column or a pin hole for fixing the pin is formed. However, a hole for fixing a screw or a pin may be formed in the strip plate, and a long hole may be formed on the column side.
FIG. 7 shows a modification of the partition wall shown in the first embodiment. The same figure as FIG. 3 is an enlarged view of the part which supports a strip board to a support | pillar.

  The figure shows an example in which the strip plate 21 is attached to the support column 24 with screws 40. A screw hole 60 for fixing the screw 40 to the strip plate 21 is formed, and a long through hole 30 along the longitudinal direction of the strip plate 21 is formed in the support column 24. The length of the long hole is formed in consideration of expansion and contraction due to thermal expansion of the strip plate 21.

  A screw 40 is inserted into the long hole 30 and the strip plate 21 is attached to the column. As shown in the first embodiment, a washer and a collar are passed through the shaft of the screw 40. Even when the screw 40 is tightened, the strip plate 21 has a long hole portion formed in the column 24, Expansion and contraction due to thermal expansion are allowed.

In said 1st Example, the strip board was arrange | positioned horizontally long and arranged in multiple numbers up and down, and it was set as the wall surface. However, strip plates may be arranged vertically and arranged in the left-right direction as wall surfaces.
In FIG. 8, the structure of the 2nd Example of the partition provided in the light irradiation apparatus of this invention is shown.
In the figure, five strips A to E are arranged vertically, the upper ends of the strips A to E are supported by the support column 25, and the partition plates are configured by arranging the strips in the left-right direction. Is shown.

  As shown in the figure, when the strip plates are arranged vertically, the support columns 25 that support the strip plates A to E are provided in the horizontal direction (left-right direction). Each strip plate A to E is attached to the support column 25 provided in the lateral direction so that the upper end is screwed with a screw 40 and is suspended. The strip plates attached in this way are arranged on the left and right sides with a plurality of longitudinal directions aligned to form a wall surface.

  As described above, when the strips are arranged vertically, only one support column 25 supports the upper part of each of the strips A to E, and it is not necessary to support the lower part of the strips A to E. That is, the strip plate is supported by the support column 25 in a so-called “cantilever” manner. Each strip plate A to E is free at the lower end, and when thermally expanded, each strip plate can freely extend downward in the gravitational direction, which is the longitudinal direction of the strip plate, according to the respective extension amount FL. .

Therefore, when supporting the strip plate in a cantilever manner as described above, it is not necessary to form a long through hole as shown in the first embodiment on the strip plate or the support column.
As shown in the first embodiment, it is desirable to provide a gap between adjacent strip plates so that the strip plates do not rub against each other during thermal expansion.

  In addition, in the said 1st and 2nd Example, although the strip board was shown as a plate-shaped member, you may comprise with a mesh-shaped member, for example, a metal mesh. However, the size of the mesh must be small so that when a lamp is broken, large pieces that do not scratch the adjacent lamp will not pass.

It is a figure which shows schematic structure of the light irradiation apparatus of this invention. It is a figure which shows the structure of the 1st Example of a partition. It is the figure which expanded and showed the part which supports a strip board to a support | pillar. It is the figure which applied the partition to the light irradiation apparatus of a 4-lamp type light source. It is a figure which shows the partition attached to a 4-lamp light source. It is a figure which shows typically the state of the partition at the time of a lamp lighting. It is a figure which shows the modification of the partition shown in the 1st Example. It is a figure which shows the 2nd Example of a partition. It is a figure which shows the structure of the conventional light irradiation apparatus. It is a figure which shows the structure of the light source shown in FIG. It is a figure which shows the force added to the plate-shaped member of a partition.

Explanation of symbols

1a, 1b, 1c, 1d Lamps 2a, 2b, 2c, 2d Condensing mirrors (reflecting mirrors)
20 Bulkhead 21 Strip (Rectangular plate member)
22, 23, 24, 25 Post 30 Through hole 40 Screw 50 Pin

Claims (7)

In a light irradiation device comprising a plurality of lamps, a reflecting mirror provided around each of the plurality of lamps and reflecting light from each lamp, and a partition wall provided between the reflecting mirror and the reflecting mirror,
The partition includes a plurality of rectangular plate-like members aligned in the longitudinal direction, and a column supporting the plate-like member,
The light irradiation apparatus, wherein the plate-like member is supported by the support column while allowing elongation in the longitudinal direction due to thermal expansion.   The light irradiation apparatus according to claim 1, wherein the plate member is supported by the support column with a gap formed between adjacent plate members.   The plate-like member is disposed horizontally, and a long hole is formed in the plate-like member along the longitudinal direction of the plate-like member. The plate-like member is inserted with a screw or a pin into the long hole. The light irradiation device according to claim 1, wherein the light irradiation device is supported by fixing the inserted screw or pin to the support column.   The plate-like member is arranged in a horizontally long shape, and the support column is formed with a long hole along the longitudinal direction of the plate-like member. The plate-like member is inserted with a screw or a pin into the long hole, The light irradiation apparatus according to claim 1, wherein the light irradiation apparatus is supported by fixing the inserted screw or pin to the plate-like member.   3. The light irradiation apparatus according to claim 1, wherein the plate-like member is disposed vertically and is supported by fixing an upper end of the plate-like member to a support column. 4. In a light irradiation apparatus comprising four lamps, a reflecting mirror provided around each of the lamps and reflecting light from each lamp, and a partition wall provided between the reflecting mirror and the reflecting mirror,
A partition wall arranged in a cross shape intersecting at the center, and one lamp and a reflecting mirror for reflecting light from the lamp are provided in four quadrants formed by the partition wall. The light irradiation apparatus according to claim 5.   The light irradiation apparatus according to claim 6, wherein the reflecting mirror is cut out at two positions in a 90 ° direction, and the partition wall is arranged between the cutouts.

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