TWI385435B - Lcos device and assembly of lcos device and circuit board - Google Patents

Lcos device and assembly of lcos device and circuit board Download PDF

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TWI385435B
TWI385435B TW97117065A TW97117065A TWI385435B TW I385435 B TWI385435 B TW I385435B TW 97117065 A TW97117065 A TW 97117065A TW 97117065 A TW97117065 A TW 97117065A TW I385435 B TWI385435 B TW I385435B
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substrate
liquid crystal
single crystal
germanium
circuit board
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TW97117065A
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TW200947039A (en
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Cho Hsin Chang
Yuan Tung Hung
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Universal Scient Ind Shanghai
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單晶矽液晶元件及其與線路板的組裝結構Single crystal germanium liquid crystal element and assembly structure thereof with circuit board

本發明是有關於一種顯示元件,且特別是有關於一種單晶矽液晶元件(liquid crystal on silicon device, LCOS device)及其與線路板的組裝結構。The present invention relates to a display element, and more particularly to a liquid crystal on silicon device (LCOS device) and an assembly structure thereof with a wiring board.

圖1是習知一種單晶矽液晶元件與可撓性線路板(flexible printed circuit board, FPCB)的組裝結構示意圖。請參照圖1,習知單晶矽液晶元件100包括一矽基板110以及一彩色濾光基板(color filter substrate)120。矽基板110具有相對的一第一表面112與一第二表面114,其中第一表面112上設有一線路層116,而線路層116具有至少一焊墊(bonding pad)116a。彩色濾光基板120與第一表面112相對,且局部覆蓋矽基板110的第一表面112及線路層116,以暴露出焊墊116a。1 is a schematic view showing the assembly structure of a conventional single crystal germanium liquid crystal element and a flexible printed circuit board (FPCB). Referring to FIG. 1 , a conventional single crystal germanium liquid crystal cell 100 includes a germanium substrate 110 and a color filter substrate 120 . The substrate 110 has a first surface 112 and a second surface 114. The first surface 112 is provided with a circuit layer 116, and the circuit layer 116 has at least one bonding pad 116a. The color filter substrate 120 is opposite to the first surface 112 and partially covers the first surface 112 and the wiring layer 116 of the ruthenium substrate 110 to expose the pad 116a.

在習知技術中,將單晶矽液晶元件100與一可撓性印刷電路板60組裝的方法是先將一導熱膠體50放置於可撓性印刷電路板60上,再將單晶矽液晶元件100放置於導熱膠體50上,之後再固化導熱膠體50以使單晶矽液晶元件100固著於可撓性印刷電路板60上。接著,進行打線製程,使一焊線(bonding wire)70連接於單晶矽液晶元件100的焊墊116a與可撓性印刷電路板60的一焊墊62之間。如此,單晶矽液晶元件100可透過焊線70而電性連接至可撓性印刷電路板60。In the prior art, the method of assembling the single crystal germanium liquid crystal element 100 and a flexible printed circuit board 60 is to first place a thermal conductive paste 50 on the flexible printed circuit board 60, and then to connect the single crystal germanium liquid crystal element. The 100 is placed on the thermal conductive paste 50, and then the thermal conductive paste 50 is cured to fix the single crystal germanium liquid crystal cell 100 to the flexible printed circuit board 60. Next, a wire bonding process is performed to connect a bonding wire 70 between the pad 116a of the single crystal germanium liquid crystal cell 100 and a pad 62 of the flexible printed circuit board 60. Thus, the single crystal germanium liquid crystal element 100 can be electrically connected to the flexible printed circuit board 60 through the bonding wires 70.

圖2是製作於一晶圓(wafer)上的單晶矽液晶元件的示意圖,而圖3是圖2中部分單晶矽液晶元件的示意圖。請參照圖2與圖3,單晶矽液晶元件100的製作方法是在一晶圓200上同時製作多個單晶矽液晶元件100,之後再進行分離製程, 以分離這些單晶矽液晶元件100。2 is a schematic view of a single crystal germanium liquid crystal cell fabricated on a wafer, and FIG. 3 is a schematic view of a portion of the single crystal germanium liquid crystal cell of FIG. Referring to FIG. 2 and FIG. 3, the single crystal germanium liquid crystal device 100 is fabricated by simultaneously forming a plurality of single crystal germanium liquid crystal cells 100 on a wafer 200, and then performing a separation process. These single crystal germanium liquid crystal cells 100 are separated.

然而,在每一單晶矽液晶元件100中,由於彩色濾光基板120是局部覆蓋矽基板110的第一表面112及線路層116,而且部分彩色濾光基板120突出於矽基板110外,導致在進行分離製程時需分別針對彩色濾光基板120與矽基板110進行切割與裂片製程,且晶圓200之矽基板110側需有切割指示線210。However, in each of the single crystal germanium liquid crystal cells 100, since the color filter substrate 120 partially covers the first surface 112 and the wiring layer 116 of the germanium substrate 110, and part of the color filter substrate 120 protrudes beyond the germanium substrate 110, When the separation process is performed, the color filter substrate 120 and the germanium substrate 110 are respectively subjected to a dicing and dicing process, and the dicing substrate line 110 of the wafer 200 is required to have a cutting indication line 210.

基於上述,習知單晶矽液晶元件100的製作方法需進行兩次切割與裂片製程,所以較為費時。此外,在進行裂片製程時,容易發生裂片不良的情形。Based on the above, the conventional method for fabricating the single crystal germanium liquid crystal element 100 requires two cutting and splitting processes, which is time consuming. In addition, when the splitting process is performed, the cracking is likely to occur.

本發明提供一種單晶矽液晶元件,其具有容易製作的優點。The present invention provides a single crystal germanium liquid crystal cell which has an advantage of being easy to manufacture.

本發明另提供一種單晶矽液晶元件與線路板的組裝結構,其具有容易組裝的優點。The present invention further provides an assembly structure of a single crystal germanium liquid crystal element and a wiring board, which has an advantage of being easy to assemble.

為達上述優點,本發明提出一種單晶矽液晶元件,其包括一矽基板(silicon substrate)以及一對向基板(opposite substrate)。矽基板具有相對的一第一表面與一第二表面,其中第一表面設有一線路層,而矽基板更具有多個導通孔(conductive through hole),從第一表面貫穿矽基板而至第二表面。對向基板與第一表面相對,且對向基板是完全覆蓋第一表面。In order to achieve the above advantages, the present invention provides a single crystal germanium liquid crystal cell comprising a silicon substrate and an opposite substrate. The 矽 substrate has a first surface and a second surface, wherein the first surface is provided with a circuit layer, and the 矽 substrate further has a plurality of conductive through holes extending from the first surface through the substrate to the second surface. The opposite substrate is opposite the first surface, and the opposite substrate completely covers the first surface.

在本發明之一實施例中,上述之對向基板之一第三表面的尺寸與矽基板之第一表面的尺寸相同,且第三表面面向第一表面。In an embodiment of the invention, the third surface of one of the opposite substrates is the same size as the first surface of the germanium substrate, and the third surface faces the first surface.

在本發明之一實施例中,上述之對向基板為一玻璃基板或一彩色濾光基板。In an embodiment of the invention, the opposite substrate is a glass substrate or a color filter substrate.

在本發明之一實施例中,上述之單晶矽液晶元件更包括一液晶層,配置於矽基板與對向基板之間。In an embodiment of the invention, the single crystal germanium liquid crystal device further includes a liquid crystal layer disposed between the germanium substrate and the opposite substrate.

本發明另提出一種單晶矽液晶元件與線路板的組裝結構,其包括一線路板、一導電膠體以及上述之單晶矽液晶元件。導電膠體是配置於線路板與單晶矽液晶元件之間,且單晶矽液晶元件的第二表面是連接於導電膠體。The invention further provides an assembly structure of a single crystal germanium liquid crystal element and a circuit board, which comprises a circuit board, a conductive paste and the above single crystal germanium liquid crystal element. The conductive paste is disposed between the circuit board and the single crystal germanium liquid crystal element, and the second surface of the single crystal germanium liquid crystal element is connected to the conductive paste.

在本發明之一實施例中,上述之線路板為一可撓性印刷電路板。In an embodiment of the invention, the circuit board is a flexible printed circuit board.

在本發明之單晶矽液晶元件中,由於對向基板是完全覆蓋矽基板,且未突出於矽基板外,所以在分離晶圓上的多個單晶矽液晶元件時,只需進行一次晶圓切割製程。因此,相較於習知技術,本發明之單晶矽液晶元件具有容易製作的優點。此外,本發明之單晶矽液晶元件與線路板的組裝結構中,由於單晶矽液晶元件的線路層是透過導通孔與導電膠體而電性連接至線路板,所以不需進行打線製程。因此,相較於習知技術,本發明之單晶矽液晶元件與線路板的組裝結構具有容易組裝的優點。In the single crystal germanium liquid crystal device of the present invention, since the opposite substrate completely covers the germanium substrate and does not protrude beyond the germanium substrate, when a plurality of single crystal germanium liquid crystal devices on the wafer are separated, only one crystal is required to be performed. Round cutting process. Therefore, the single crystal germanium liquid crystal cell of the present invention has an advantage of being easy to manufacture as compared with the prior art. Further, in the assembled structure of the single crystal germanium liquid crystal element and the wiring board of the present invention, since the wiring layer of the single crystal germanium liquid crystal element is electrically connected to the wiring board through the via hole and the conductive paste, the wire bonding process is not required. Therefore, the assembled structure of the single crystal germanium liquid crystal element and the wiring board of the present invention has an advantage of being easy to assemble as compared with the prior art.

為讓本發明之上述和其他目的、特徵和優點能更明顯易懂,下文特舉較佳實施例,並配合所附圖式,作詳細說明如下。The above and other objects, features and advantages of the present invention will become more <RTIgt;

圖4是本發明一實施例之一種單晶矽液晶元件的示意圖。請參照圖4,本實施例之單晶矽液晶元件300包括一矽基板310以及一對向基板320。矽基板310具有相對的一第一表面312與一第二表面314,其中第一表面312設有一線路層316。矽基板310更具有多個導通孔318,這些導通孔318是從第一表面312貫穿矽基板310而至第二表面314。對向基板 320是配置於第一表面312,且對向基板320是完全覆蓋第一表面312。4 is a schematic view of a single crystal germanium liquid crystal cell according to an embodiment of the present invention. Referring to FIG. 4, the single crystal germanium liquid crystal element 300 of the present embodiment includes a germanium substrate 310 and a pair of substrates 320. The substrate 310 has a first surface 312 and a second surface 314 opposite to each other, wherein the first surface 312 is provided with a wiring layer 316. The germanium substrate 310 further has a plurality of vias 318 that extend from the first surface 312 through the germanium substrate 310 to the second surface 314. Counter substrate 320 is disposed on the first surface 312, and the opposite substrate 320 completely covers the first surface 312.

承上述,對向基板320可為一玻璃基板或一彩色濾光基板。此外,對向基板320之一第三表面322的尺寸與矽基板310之第一表面312的尺寸相同,且第三表面322是面向第一表面312。換言之,對向基板320是完全覆蓋第一表面312及線路層316,且未突出於矽基板310外。此外,單晶矽液晶元件300可更包括一液晶層330,其配置於矽基板310與對向基板320之間。In the above, the opposite substrate 320 can be a glass substrate or a color filter substrate. Moreover, the size of one of the third surfaces 322 of the counter substrate 320 is the same as the size of the first surface 312 of the germanium substrate 310, and the third surface 322 is facing the first surface 312. In other words, the opposite substrate 320 completely covers the first surface 312 and the wiring layer 316 and does not protrude beyond the ruthenium substrate 310. In addition, the single crystal germanium liquid crystal element 300 may further include a liquid crystal layer 330 disposed between the germanium substrate 310 and the opposite substrate 320.

在本實施例之單晶矽液晶元件300中,矽基板310具有導通孔318,且線路層316可透過導通孔318而與其他元件電性連接。相較於習知技術,由於本實施例之單晶矽液晶元件300不需於矽基板310的第一表面312設置焊墊,所以對向基板320不需突出於矽基板310外,以暴露出焊墊。因此,在本實施例中,對向基板320可完全覆蓋第一表面312及線路層316,且不需突出於矽基板310外。如此,在將晶圓上的多個單晶矽液晶元件300分離時,只需進行一次切割製程,且在晶圓上不需切割線。相較於習知技術需進行兩次切割及裂片製程,本實施例之單晶矽液晶元件300具有易於製作的優點。此外,由於不需進行裂片製程,所以可避免發生裂片不良的情形,進而提高單晶矽液晶元件300的生產良率。In the single crystal germanium liquid crystal element 300 of the present embodiment, the germanium substrate 310 has via holes 318, and the wiring layer 316 can be electrically connected to other elements through the via holes 318. Compared with the prior art, since the single crystal germanium liquid crystal element 300 of the present embodiment does not need to be provided with a solder pad on the first surface 312 of the germanium substrate 310, the opposite substrate 320 does not need to protrude beyond the germanium substrate 310 to expose Solder pad. Therefore, in the embodiment, the opposite substrate 320 can completely cover the first surface 312 and the wiring layer 316 without protruding beyond the germanium substrate 310. Thus, when a plurality of single crystal germanium liquid crystal cells 300 on a wafer are separated, only one cutting process is required, and no cutting lines are required on the wafer. The single crystal germanium liquid crystal cell 300 of the present embodiment has an advantage of being easy to manufacture, as compared with the prior art, which requires two cutting and splitting processes. Further, since the splicing process is not required, the occurrence of cracking failure can be avoided, and the production yield of the single crystal germanium liquid crystal element 300 can be improved.

圖5是本發明一實施例之單晶矽液晶元件與線路板的組裝結構示意圖。請參照圖5,本實施例之單晶矽液晶元件與線路板的組裝結構400包括一線路板410、一導電膠體420以及上述之單晶矽液晶元件300。導電膠體420是配置於線路板410與單晶矽液晶元件300之間,且單晶矽液晶元件300的第二表 面314是連接於導電膠體420。此外,線路板410可為一可撓性印刷電路板,但不以此為限。Fig. 5 is a view showing the assembled structure of a single crystal germanium liquid crystal element and a wiring board according to an embodiment of the present invention. Referring to FIG. 5, the assembled structure 400 of the single crystal germanium liquid crystal device and the circuit board of the present embodiment includes a circuit board 410, a conductive paste 420, and the above-described single crystal germanium liquid crystal element 300. The conductive paste 420 is disposed between the circuit board 410 and the single crystal germanium liquid crystal element 300, and the second table of the single crystal germanium liquid crystal element 300 The face 314 is connected to the conductive paste 420. In addition, the circuit board 410 can be a flexible printed circuit board, but is not limited thereto.

在本實施例中,將單晶矽液晶元件300與線路板410組裝的方法是藉由導電膠體420將單晶矽液晶元件300固著於線路板410。矽基板310的線路層316可透過導通孔318及導電膠體420而與線路板410電性連接。相較於習知技術,由於本實施例不需進行打線製程,所以可提高單晶矽液晶元件與線路板的組裝結構400之組裝效率。In the present embodiment, the method of assembling the single crystal germanium liquid crystal element 300 and the wiring board 410 is to fix the single crystal germanium liquid crystal element 300 to the wiring board 410 by the conductive paste 420. The circuit layer 316 of the substrate 310 can be electrically connected to the circuit board 410 through the via 318 and the conductive paste 420. Compared with the prior art, since the wire bonding process is not required in the embodiment, the assembly efficiency of the assembled structure 400 of the single crystal germanium liquid crystal element and the circuit board can be improved.

綜上所述,本發明至少具有下列優點:1.在本發明之單晶矽液晶元件中,由於對向基板是完全覆蓋矽基板,且未突出於矽基板外,所以在將晶圓上的多個單晶矽液晶元件分離時,只需進行一次晶圓切割製程。因此,相較於習知技術,本發明之單晶矽液晶元件具有容易製作的優點。In summary, the present invention has at least the following advantages: 1. In the single crystal germanium liquid crystal device of the present invention, since the opposite substrate completely covers the germanium substrate and does not protrude beyond the germanium substrate, When a plurality of single crystal germanium liquid crystal elements are separated, only one wafer cutting process is required. Therefore, the single crystal germanium liquid crystal cell of the present invention has an advantage of being easy to manufacture as compared with the prior art.

2.本發明之單晶矽液晶元件與線路板的組裝結構中,由於單晶矽液晶元件的線路層是透過導通孔與導電膠體而電性連接至線路板,所以不需進行打線製程,如此可使本發明之單晶矽液晶元件與線路板的組裝結構具有容易組裝的優點。2. In the assembled structure of the single crystal germanium liquid crystal element and the circuit board of the present invention, since the wiring layer of the single crystal germanium liquid crystal element is electrically connected to the wiring board through the via hole and the conductive paste, the wire bonding process is not required. The assembly structure of the single crystal germanium liquid crystal element of the present invention and the wiring board can be easily assembled.

雖然本發明已以較佳實施例揭露如上,然其並非用以限定本發明,所屬技術領域中具有通常知識者,在不脫離本發明之精神和範圍內,當可作些許之更動與潤飾,因此本發明之保護範圍當視後附之申請專利範圍所界定者為準。While the present invention has been described above in terms of the preferred embodiments, it is not intended to limit the invention, and those of ordinary skill in the art can make a few changes and modifications without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the scope of the appended claims.

50‧‧‧導熱膠體50‧‧‧thermally conductive colloid

60‧‧‧可撓性印刷電路板60‧‧‧Flexible printed circuit boards

62、116a‧‧‧焊墊62, 116a‧‧‧ pads

70‧‧‧焊線70‧‧‧welding line

100、300‧‧‧單晶矽液晶元件100, 300‧‧‧ single crystal germanium liquid crystal components

110、310‧‧‧矽基板110, 310‧‧‧矽 substrate

112、312‧‧‧第一表面112, 312‧‧‧ first surface

114、314‧‧‧第二表面114, 314‧‧‧ second surface

116、316‧‧‧線路層116, 316‧‧‧ circuit layer

120‧‧‧彩色濾光基板120‧‧‧Color filter substrate

200‧‧‧晶圓200‧‧‧ wafer

210‧‧‧切割指示線210‧‧‧ cutting indicator line

318‧‧‧導通孔318‧‧‧through holes

320‧‧‧對向基板320‧‧‧ opposite substrate

322‧‧‧第三表面322‧‧‧ third surface

330‧‧‧液晶層330‧‧‧Liquid layer

400‧‧‧單晶矽液晶元件與線路板的組裝結構400‧‧‧Assembly structure of single crystal germanium liquid crystal element and circuit board

410‧‧‧線路板410‧‧‧ circuit board

420‧‧‧導電膠體420‧‧‧Electrical colloid

圖1是習知一種單晶矽液晶元件與可撓性線路板的組裝結構示意圖。1 is a schematic view showing the assembly structure of a conventional single crystal germanium liquid crystal element and a flexible wiring board.

圖2是製作於一晶圓上的單晶矽液晶元件的示意圖。2 is a schematic view of a single crystal germanium liquid crystal cell fabricated on a wafer.

圖3是圖2中部分單晶矽液晶元件的示意圖。Figure 3 is a schematic illustration of a portion of a single crystal germanium liquid crystal cell of Figure 2.

圖4是本發明一實施例之一種單晶矽液晶元件的示意圖。4 is a schematic view of a single crystal germanium liquid crystal cell according to an embodiment of the present invention.

圖5是本發明一實施例之單晶矽液晶元件與線路板的組裝結構示意圖。Fig. 5 is a view showing the assembled structure of a single crystal germanium liquid crystal element and a wiring board according to an embodiment of the present invention.

300‧‧‧單晶矽液晶元件300‧‧‧ Single crystal germanium liquid crystal element

310‧‧‧矽基板310‧‧‧矽 substrate

312‧‧‧第一表面312‧‧‧ first surface

314‧‧‧第二表面314‧‧‧ second surface

316‧‧‧線路層316‧‧‧Line layer

318‧‧‧導通孔318‧‧‧through holes

320‧‧‧對向基板320‧‧‧ opposite substrate

322‧‧‧第三表面322‧‧‧ third surface

330‧‧‧液晶層330‧‧‧Liquid layer

Claims (8)

一種單晶矽液晶元件,包括:一矽基板,具有相對的一第一表面與一第二表面,其中該第一表面設有一線路層,而該矽基板更具有多個導通孔,從該第一表面貫穿該矽基板而至該第二表面;以及一對向基板,具有與該第一表面相對之一第三表面,且該對向基板是完全覆蓋該第一表面,其中該對向基板之該第三表面的尺寸與該矽基板之該第一表面的尺寸相同。 A single crystal germanium liquid crystal element comprising: a germanium substrate having a first surface and a second surface, wherein the first surface is provided with a circuit layer, and the germanium substrate further has a plurality of via holes, a surface extending through the substrate to the second surface; and a pair of substrates having a third surface opposite the first surface, and the opposite substrate completely covers the first surface, wherein the opposite substrate The third surface has the same size as the first surface of the crucible substrate. 如申請專利範圍第1項所述之單晶矽液晶元件,其中該對向基板為一波璃基板或一彩色濾光基板。 The single crystal germanium liquid crystal device according to claim 1, wherein the opposite substrate is a glass substrate or a color filter substrate. 如申請專利範圍第1項所述之單晶矽液晶元件,更包括一液晶層,配置於該矽基板與該對向基板之間。 The single crystal germanium liquid crystal device according to claim 1, further comprising a liquid crystal layer disposed between the germanium substrate and the opposite substrate. 一種單晶矽液晶元件與線路板的組裝結構,包括:一單晶矽液晶元件,包括:一矽基板,具有相對的一第一表面與一第二表面,其中該第一表面設有一線路層,而該矽基板更具有多個導通孔,從該第一表面貫穿該矽基板而至該第二表面;一對向基板,與該第一表面相對,且該對向基板是完全覆蓋該第一表面;一線路板;以及一導電膠體,配置於該線路板與該單晶矽液晶元件之間,且該單晶矽液晶元件的該第二表面是連接於該導電膠體。 An assembly structure of a single crystal germanium liquid crystal element and a circuit board, comprising: a single crystal germanium liquid crystal element, comprising: a germanium substrate having an opposite first surface and a second surface, wherein the first surface is provided with a circuit layer The 矽 substrate further has a plurality of via holes extending from the first surface to the second surface; the pair of substrates facing the first surface, and the opposite substrate completely covering the first surface a surface; a conductive paste disposed between the circuit board and the single crystal germanium liquid crystal cell, and the second surface of the single crystal germanium liquid crystal cell is connected to the conductive paste. 如申請專利範圍第4項所述之單晶矽液晶元件與線路板的組裝結構,其中該對向基板之一第三表面的尺寸與該矽基板之該第一表面的尺寸相同,且該第三表面面向該第一表面。 The assembly structure of a single crystal germanium liquid crystal element and a circuit board according to claim 4, wherein a size of a third surface of the opposite substrate is the same as a size of the first surface of the germanium substrate, and the first The three surfaces face the first surface. 如申請專利範圍第4項所述之單晶矽液晶元件與線路板 的組裝結構,其中該對向基板為一玻璃基板或一彩色濾光基板。 The single crystal germanium liquid crystal element and the circuit board as described in claim 4 of the patent application scope The assembled structure, wherein the opposite substrate is a glass substrate or a color filter substrate. 如申請專利範圍第4項所述之單晶矽液晶元件與線路板的組裝結構,其中該單晶矽液晶元件更包括一液晶層,配置於該矽基板與該對向基板之間。 The assembly structure of the single crystal germanium liquid crystal element and the wiring board according to the fourth aspect of the invention, wherein the single crystal germanium liquid crystal element further comprises a liquid crystal layer disposed between the germanium substrate and the opposite substrate. 如申請專利範圍第4項所述之單晶矽液晶元件與線路板的組裝結構,其中該線路板為一可撓性印刷電路板。The assembly structure of the single crystal germanium liquid crystal element and the circuit board according to claim 4, wherein the circuit board is a flexible printed circuit board.
TW97117065A 2008-05-08 2008-05-08 Lcos device and assembly of lcos device and circuit board TWI385435B (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW478020B (en) * 1999-10-29 2002-03-01 Intel Corp Integrated circuit with opposed spatial light modulator and processor
US20030197816A1 (en) * 2002-04-22 2003-10-23 Paul Winer Liquid crystal display devices having fill holes and electrical contacts on the back side of the die
TWI289700B (en) * 2001-12-06 2007-11-11 United Microelectronics Corp Method of fabricating a liquid crystal-on-silicon backplane

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW478020B (en) * 1999-10-29 2002-03-01 Intel Corp Integrated circuit with opposed spatial light modulator and processor
TWI289700B (en) * 2001-12-06 2007-11-11 United Microelectronics Corp Method of fabricating a liquid crystal-on-silicon backplane
US20030197816A1 (en) * 2002-04-22 2003-10-23 Paul Winer Liquid crystal display devices having fill holes and electrical contacts on the back side of the die

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