TWI383832B - Defoaming device - Google Patents

Defoaming device Download PDF

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TWI383832B
TWI383832B TW99132325A TW99132325A TWI383832B TW I383832 B TWI383832 B TW I383832B TW 99132325 A TW99132325 A TW 99132325A TW 99132325 A TW99132325 A TW 99132325A TW I383832 B TWI383832 B TW I383832B
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liquid
foam
plate body
plate
groove
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TW99132325A
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TW201212992A (en
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Li-Guo Hu
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Zhen Ding Technology Co Ltd
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除泡裝置Defoaming device

本發明涉及電路板製作領域,尤其涉及一種能夠有效去除泡沫之除泡裝置。The present invention relates to the field of circuit board manufacturing, and in particular to a defoaming device capable of effectively removing foam.

隨著科學技術進步,印刷電路板於電子領域得到廣泛應用。關於電路板之應用請參見文獻Takahashi, A. Ooki, N. Nagai, A. Akahoshi, H. Mukoh, A. Wajima, M. Res. Lab, High density multilayer printed circuit board for HITAC M-880,IEEE Trans. on Components, Packaging, and Manufacturing Technology, 1992, 15(4): 418-425。With the advancement of science and technology, printed circuit boards are widely used in the field of electronics. For application of the circuit board, please refer to the literature Takahashi, A. Ooki, N. Nagai, A. Akahoshi, H. Mukoh, A. Wajima, M. Res. Lab, High density multilayer printed circuit board for HITAC M-880, IEEE Trans On Components, Packaging, and Manufacturing Technology, 1992, 15(4): 418-425.

於電路板之生產過程中,通常採用蝕刻銅箔形成導電線路。於蝕刻形成導電線路之前,需要先於銅箔表面形成光致抗蝕劑層,然後對光致抗蝕劑層進行曝光及顯影,從而使得光致抗蝕劑層圖案化。進行顯影時,通常採用顯影液如碳酸鉀溶液進行顯影,顯影液與曝光過程中未發生化學反應之光致抗蝕劑發生反應,使得發生反應之光致抗蝕劑從銅箔表面脫離。於上述之顯影液與光致抗蝕劑層反應過程中,通常會產生大量之泡沫,隨著反應持續進行,產生之泡沫逐漸增多,從而使得泡沫從顯影機台中流出,影響正常顯影製程。In the production process of the circuit board, an etched copper foil is usually used to form a conductive line. Before etching to form a conductive line, it is necessary to form a photoresist layer before the surface of the copper foil, and then expose and develop the photoresist layer, thereby patterning the photoresist layer. When developing, development is usually carried out using a developing solution such as a potassium carbonate solution, and the developing solution reacts with a photoresist which does not undergo a chemical reaction during exposure, so that the reacting photoresist is detached from the surface of the copper foil. During the reaction between the developer and the photoresist layer described above, a large amount of foam is usually generated, and as the reaction proceeds, the foam is gradually increased, so that the foam flows out of the developing machine, which affects the normal developing process.

先前技術中,通常採用化學藥品來去除產生之泡沫,上述之除泡化學藥品會給環境帶來污染,並且價格昂貴,不利於降低電路板之生產成本。In the prior art, chemicals are usually used to remove the generated foam, and the above-mentioned defoaming chemicals cause environmental pollution and are expensive, which is disadvantageous for reducing the production cost of the circuit board.

有鑑於此,提供一種能夠有效將泡沫去除之除泡裝置實屬必要。In view of this, it is necessary to provide a defoaming device capable of effectively removing foam.

以下將以實施例說明一種除泡裝置。A defoaming device will be described below by way of examples.

一種除泡裝置,其包括收容槽、碎泡槽、儲液槽及回收泵。所述收容槽用於收容帶有泡沫之液體。所述碎泡槽與收容槽相連通,用於收容從所述收容槽流入之泡沫與液體之混合物或者液體,所述碎泡槽具有與收容槽相鄰接之第一側板,所述第一側板於豎直方向具有至少一階梯結構,所述收容槽中帶有泡沫之液體沿所述第一側板流入所述碎泡槽,所述至少一階梯結構用於使所述泡沫沿所述第一側板流入所述碎泡槽之過程中破碎轉化為液體。所述儲液槽與碎泡槽相連通,用於收容從碎泡槽流入之泡沫與液體之混合物或者液體。所述回收泵連接於所述儲液槽與所述收容槽之間,用於將儲液槽內之泡沫與液體之混合物或者液體輸送至所述收容槽。A defoaming device includes a receiving tank, a foaming tank, a liquid storage tank and a recovery pump. The receiving slot is for receiving a liquid with a foam. The squeezing tank is connected to the accommodating groove for accommodating a mixture or a liquid of a foam and a liquid flowing from the accommodating groove, and the squeezing tank has a first side plate adjacent to the receiving groove, the first The side panel has at least one stepped structure in a vertical direction, and the liquid with foam in the receiving groove flows into the blistering groove along the first side plate, and the at least one stepped structure is used to make the foam along the first The one side plate is broken into liquid when it flows into the snubber groove. The liquid storage tank is in communication with the foaming tank for accommodating a mixture or liquid of foam and liquid flowing from the foaming tank. The recovery pump is connected between the liquid storage tank and the receiving tank for conveying a mixture or liquid of foam and liquid in the liquid storage tank to the receiving tank.

相較於先前技術,本實施例提供之除泡裝置,泡沫可以通過沿著具有階梯之第一側板流動而使得大部分泡沫破碎,並且通過回收泵之葉輪使得泡沫全部轉化為液體。從而,除泡裝置可以使得大部分泡沫通過流經階梯狀之第一側板實現將泡沫破碎,可以節省能源,並且,可以實現泡沫轉化之液體可以迴圈利用。Compared to the prior art, the defoaming device provided by the present embodiment, the foam can cause most of the foam to be broken by flowing along the first side plate having the step, and the foam is completely converted into a liquid by the impeller of the recovery pump. Thus, the defoaming device can cause most of the foam to break the foam by flowing through the stepped first side plate, which can save energy, and the liquid which can realize foam conversion can be recycled.

下面結合附圖及多個實施例對本技術方案提供之除泡裝置作進一步之詳細說明。The defoaming device provided by the technical solution will be further described in detail below with reference to the accompanying drawings and embodiments.

請一併參閱圖1及圖2,本技術方案第一實施例提供除泡裝置100包括收容槽110、碎泡槽120、第一連接管130、儲液槽140、第二連接管150、回收泵160、第三連接管170、液面高度檢測裝置180及控制器190。Referring to FIG. 1 and FIG. 2 together, the first embodiment of the present invention provides a defoaming device 100 including a receiving slot 110, a foaming tank 120, a first connecting pipe 130, a liquid storage tank 140, a second connecting pipe 150, and recycling. The pump 160, the third connecting pipe 170, the liquid level detecting device 180, and the controller 190.

收容槽110內收容帶有泡沫之液體,其可以為用於收容顯影、蝕刻或者剝膜後之藥水之槽體,隨著顯影、蝕刻或者剝膜等處理之進行,收容槽110內不斷有泡沫產生。本實施例中,收容槽110為頂部具有開口113之長方體形槽體,其具有底壁111和與垂直於並與底壁111相連接之四個側壁112。開口113之上方通常設置有顯影、蝕刻或者剝膜裝置,使得處理後具有泡沫之液體從開口113注入收容槽110中。於收容槽110之一個側壁112靠近開口113之一側,開設有第一通孔114。本實施例中,第一通孔114形狀為長方形,其長度方向平行於底壁111。優選地,第一通孔114開設之位置應與收容槽110收容之泡沫之位置相對應。即,收容槽110內液體之液面高度位於第一通孔114最低處之下,以僅使得泡沫可以從第一通孔114流出。收容槽110之形狀不限於本實施例中提供之形狀,其可以根據實際需要設計為其他適合收容液體之形狀。The receiving tank 110 accommodates a liquid with a foam, which may be a tank for accommodating the developing, etching or stripping of the syrup. With the processing such as development, etching or stripping, the receiving tank 110 is continuously foamed. produce. In this embodiment, the receiving groove 110 is a rectangular parallelepiped groove having an opening 113 at the top, and has a bottom wall 111 and four side walls 112 connected to and perpendicular to the bottom wall 111. Above the opening 113, a developing, etching or stripping device is usually provided so that the liquid having the foam after the treatment is injected into the receiving groove 110 from the opening 113. A first through hole 114 is defined in a side wall 112 of the receiving groove 110 near one side of the opening 113. In this embodiment, the first through hole 114 has a rectangular shape and a longitudinal direction parallel to the bottom wall 111. Preferably, the first through hole 114 is opened at a position corresponding to the position of the foam accommodated in the receiving groove 110. That is, the liquid level of the liquid in the receiving groove 110 is below the lowest point of the first through hole 114 so that only the foam can flow out from the first through hole 114. The shape of the receiving groove 110 is not limited to the shape provided in the embodiment, and may be designed to be other shapes suitable for accommodating liquid according to actual needs.

本實施例中,為了方便收容槽110與碎泡槽120相互連通,收容槽110還具有延伸部115。延伸部115之縱截面之形狀與第一通孔114之形狀相對應。延伸部115環繞第一通孔114,並且垂直於開設有第一通孔114之側壁112。延伸部115包括第一延伸板1151、與第一延伸板1151相對之第二延伸板1152以及垂直連接於第一延伸板1151和第二延伸板1152之間之兩個第三延伸板1153。第一延伸板1151和第二延伸板1152均平行於底壁111,其中,第一延伸板1151遠離底壁111,第二延伸板1152靠近底壁111,收容槽110內之泡沫可以通過第一通孔114和延伸部115流出。In this embodiment, in order to facilitate communication between the receiving groove 110 and the foaming groove 120, the receiving groove 110 further has an extending portion 115. The shape of the longitudinal section of the extension portion 115 corresponds to the shape of the first through hole 114. The extension portion 115 surrounds the first through hole 114 and is perpendicular to the sidewall 112 of the first through hole 114. The extension portion 115 includes a first extension plate 1151, a second extension plate 1152 opposite to the first extension plate 1151, and two third extension plates 1153 vertically connected between the first extension plate 1151 and the second extension plate 1152. The first extension plate 1151 and the second extension plate 1152 are both parallel to the bottom wall 111. The first extension plate 1151 is away from the bottom wall 111, and the second extension plate 1152 is adjacent to the bottom wall 111. The foam in the receiving groove 110 can pass through the first The through hole 114 and the extension portion 115 flow out.

碎泡槽120與收容槽110相鄰設置。碎泡槽120用於收容從收容槽110流入之泡沫,並使得泡沫於碎泡槽120內進行消除處理,以使得泡沫轉化為液體。本實施例中,碎泡槽120與延伸部115相互連通,收容槽110內之泡沫通過第一通孔114和延伸部115流出後可以直接流入至碎泡槽120內。The foaming groove 120 is disposed adjacent to the receiving groove 110. The foaming tank 120 is for accommodating the foam flowing from the accommodating tank 110, and causes the foam to be removed in the snubber 120 to convert the foam into a liquid. In this embodiment, the foaming groove 120 and the extending portion 115 communicate with each other, and the foam in the receiving groove 110 can flow directly into the foaming groove 120 through the first through hole 114 and the extending portion 115.

本實施例中,碎泡槽120大致為長方體形槽體,其包括底板121、第一側板122及三個第二側板123。其中,第一側板122及三個第二側板123均與底板121相互垂直連接。本實施例中,第一側板122與收容槽110相鄰,並與延伸部115之第二延伸板1152相互連接。第一側板122呈階梯狀結構,其包括依次相互連接之第一板體1221、第二板體1222、第三板體1223、第四板體1224及第五板體1225。其中,第一板體1221與第二延伸板1152相互連接,第一板體1221之長度應大於或者等於第二延伸板1152之長度,第一板體1221大致垂直於第二延伸板1152。第二板體1222大致垂直於第一板體1221,第三板體1223垂直連接於第二板體1222和第四板體1224之間。第二板體1222與第二延伸板1152之間之距離,即第一板體1221之於豎直方向上之長度應大於2釐米。第三板體1223之於豎直方向上之長度應大於8釐米。第一板體1221、第二板體1222和第三板體1223構成第一階梯,第三板體1223、第四板體1224和第五板體1225構成第二階梯。由於第一側板122設置為包括有至少一個階梯之結構,泡沫流經第一側板122時可以增加泡沫流經之距離,從而增加泡沫流動過程中與第一側板122接觸之幾率,使得泡沫於此流動過程中能夠有更多之泡沫破碎。In this embodiment, the foaming groove 120 is substantially a rectangular parallelepiped body, and includes a bottom plate 121, a first side plate 122 and three second side plates 123. The first side plate 122 and the three second side plates 123 are perpendicularly connected to the bottom plate 121. In this embodiment, the first side plate 122 is adjacent to the receiving groove 110 and is connected to the second extending plate 1152 of the extending portion 115. The first side plate 122 has a stepped structure, and includes a first plate body 1221, a second plate body 1222, a third plate body 1223, a fourth plate body 1224, and a fifth plate body 1225 which are sequentially connected to each other. The first plate body 1221 and the second extension plate 1152 are connected to each other. The length of the first plate body 1221 should be greater than or equal to the length of the second extension plate 1152. The first plate body 1221 is substantially perpendicular to the second extension plate 1152. The second plate body 1222 is substantially perpendicular to the first plate body 1221, and the third plate body 1223 is vertically connected between the second plate body 1222 and the fourth plate body 1224. The distance between the second plate body 1222 and the second extension plate 1152, that is, the length of the first plate body 1221 in the vertical direction should be greater than 2 cm. The length of the third plate 1223 in the vertical direction should be greater than 8 cm. The first plate body 1221, the second plate body 1222, and the third plate body 1223 constitute a first step, and the third plate body 1223, the fourth plate body 1224, and the fifth plate body 1225 constitute a second step. Since the first side plate 122 is disposed to include at least one stepped structure, the flow of the foam through the first side plate 122 can increase the distance through which the foam flows, thereby increasing the probability of contact with the first side plate 122 during the foam flow, so that the foam is present here. There can be more foam breakage during the flow.

可以理解,當泡沫流入速率較小時,第一側板122亦可以只包括有一個階梯。為了使得泡沫能夠具有更好之破碎效果,可以增加第一側板122設置之階梯之個數或者增加第一側板122之高度。It can be understood that when the foam inflow rate is small, the first side panel 122 may also include only one step. In order to enable the foam to have a better crushing effect, the number of steps provided by the first side panel 122 may be increased or the height of the first side panel 122 may be increased.

儲液槽140用於收容經過碎泡槽120處理後之液體或者泡沫與液體之混合物。碎泡槽120與儲液槽140之間通過第一連接管130相互連接。優選地,第一連接管130連接於碎泡槽120靠近底板121之一側。The liquid storage tank 140 is for accommodating a liquid treated by the septic tank 120 or a mixture of a foam and a liquid. The foaming tank 120 and the liquid storage tank 140 are connected to each other by a first connecting pipe 130. Preferably, the first connecting pipe 130 is connected to one side of the foaming groove 120 near the bottom plate 121.

儲液槽140亦大致為長方體形槽體,其包括頂板141、四個第三側板142及一個第二底板143。第二底板143與四個第三側板142相連接,頂板141與第二底板143相對。第一連接管130通過儲液槽140之一個第三側板142與儲液槽140相連通。第一連接管130與儲液槽140相連通之一端與第二底板143具有一高度差,從而使得泡沫與液體之混合物或者液體可以沿著該第三側板142流至儲液槽140內,使得泡沫與第三側板142流動接觸。The liquid storage tank 140 is also substantially a rectangular parallelepiped tank body, and includes a top plate 141, four third side plates 142 and a second bottom plate 143. The second bottom plate 143 is connected to the four third side plates 142, and the top plate 141 is opposed to the second bottom plate 143. The first connecting pipe 130 communicates with the liquid storage tank 140 through a third side plate 142 of the liquid storage tank 140. One end of the first connecting pipe 130 communicating with the liquid storage tank 140 has a height difference from the second bottom plate 143, so that a mixture of foam and liquid or liquid can flow into the liquid storage tank 140 along the third side plate 142, so that The foam is in flow contact with the third side panel 142.

第二連接管150連接於儲液槽140與回收泵160之間,用於將儲液槽140內之液體或者液體與泡沫之混合物流至回收泵160。本實施例中,回收泵160為具有耐腐蝕性能之磁力泵。回收泵160用於將儲液槽140內之液體或者泡沫與液體之混合物從儲液槽140抽出。並且,於採用回收泵160抽出泡沫與液體之混合物時,回收泵160中快速旋轉之葉輪可以將泡沫破碎而轉化為液體,從而使得從回收泵160流出之全部為液體。The second connecting pipe 150 is connected between the liquid storage tank 140 and the recovery pump 160 for flowing the liquid or liquid mixture in the liquid storage tank 140 to the recovery pump 160. In the present embodiment, the recovery pump 160 is a magnetic pump having corrosion resistance. The recovery pump 160 is used to withdraw the liquid or the mixture of foam and liquid in the reservoir 140 from the reservoir 140. Also, when the recovery pump 160 is used to extract the mixture of foam and liquid, the rapidly rotating impeller in the recovery pump 160 can break the foam and convert it into a liquid, so that all of the flow from the recovery pump 160 is liquid.

第三連接管170連接於回收泵160與收容槽110之間,用於將回收泵160流出之去除泡沫之液體注入收容槽110內,以便再進行使用。The third connecting pipe 170 is connected between the recovery pump 160 and the receiving tank 110, and is used for injecting the foam removing liquid flowing out of the recovery pump 160 into the receiving groove 110 for reuse.

液面高度檢測裝置180用於檢測儲液槽140內之液面高度。本實施例中,液面高度檢測裝置180安裝於頂板141並延伸至儲液槽140內,以檢測儲液槽140內液面或者泡沫之高度。The liquid level detecting device 180 is for detecting the liquid level in the liquid storage tank 140. In the present embodiment, the liquid level detecting device 180 is mounted on the top plate 141 and extends into the liquid storage tank 140 to detect the liquid level or the height of the foam in the liquid storage tank 140.

控制器190與液面高度檢測裝置180及回收泵160相連接,用於根據液面高度檢測裝置180檢測之信號,控制回收泵160是否進運轉以將儲液槽140內之液體或者液體與泡沫之混合物抽出。The controller 190 is connected to the liquid level detecting device 180 and the recovery pump 160 for controlling whether the recovery pump 160 is operated to change the liquid or liquid in the liquid storage tank 140 with the foam according to the signal detected by the liquid level detecting device 180. The mixture is withdrawn.

請參閱圖3,本實施例提供之除泡裝置100進行除泡通過如下方式。當收容槽110內之泡沫高度達到第一通孔114高度時,泡沫從通過第一通孔114及延伸部115流出。當泡沫通過第二延伸板1152流至第一側板122時,泡沫依次經過第一板體1221、第二板體1222、第三板體1223、第四板體1224及第五板體1225,即依次經過第一側板122之兩個階梯,於流動之過程中,泡沫之間相互摩擦並且與第一側板122相互摩擦,從而使得一部分泡沫破碎轉化為液體。當泡沫流動之速率較少時,通過沿著第一側板122流動,可以將所有之泡沫破碎轉化為液體。當泡沫和液體之混合物或者液體經過第一連接管130流入至儲液槽140內,泡沫從第一連接管130流出時,第一連接管130與儲液槽140之第二底板143有高度差,泡沫可以沿著儲液槽140之第三側板142流動,從而可以使得未破碎之泡沫進一步破碎。當儲液槽140之泡沫之高度或者液體之液面高度達到預定值時,液面高度檢測裝置180向控制器190發出信號,從而控制器190控制回收泵160工作,將儲液槽140內之泡沫與液體之混合物或者液體抽出並供應至收容槽110,以便再次使用。於回收泵160將泡沫與液體之混合物抽出之過程中,由於回收泵160之葉輪快速旋轉,從而使得泡沫被打碎轉化為液體,從而回收泵160供應至收容槽110之幾乎全部為液體。Referring to FIG. 3, the defoaming device 100 provided in this embodiment performs defoaming as follows. When the foam height in the receiving groove 110 reaches the height of the first through hole 114, the foam flows out through the first through hole 114 and the extending portion 115. When the foam flows through the second extension plate 1152 to the first side plate 122, the foam sequentially passes through the first plate body 1221, the second plate body 1222, the third plate body 1223, the fourth plate body 1224, and the fifth plate body 1225, that is, The two steps of the first side plate 122 are sequentially passed through, and during the flow, the foams rub against each other and rub against the first side plates 122, so that a part of the foam is broken into liquid. When the rate of foam flow is small, all of the foam breakage can be converted to a liquid by flowing along the first side panel 122. When the mixture of the foam and the liquid or the liquid flows into the liquid storage tank 140 through the first connecting pipe 130, the first connecting pipe 130 and the second bottom plate 143 of the liquid storage tank 140 have a height difference when the foam flows out from the first connecting pipe 130. The foam can flow along the third side panel 142 of the reservoir 140 so that the unbroken foam can be further broken. When the height of the foam of the liquid storage tank 140 or the liquid level of the liquid reaches a predetermined value, the liquid level detecting device 180 sends a signal to the controller 190, so that the controller 190 controls the recovery pump 160 to operate, and the liquid storage tank 140 is operated. The mixture of foam and liquid or liquid is withdrawn and supplied to the receiving tank 110 for reuse. In the process in which the recovery pump 160 draws out the mixture of the foam and the liquid, the impeller of the recovery pump 160 is rapidly rotated, so that the foam is broken and converted into a liquid, so that almost all of the supply of the recovery pump 160 to the storage tank 110 is liquid.

本實施例提供之除泡裝置100,泡沫可以通過沿著具有階梯之第一側板122流動而使得大部分泡沫破碎,並且通過回收泵160之葉輪使得泡沫全部轉化為液體。從而,除泡裝置100可以使得大部分泡沫通過流動實現將泡沫破碎,可以節省能源,並且,可以實現泡沫轉化之液體可以迴圈利用。In the defoaming device 100 provided in this embodiment, the foam can cause most of the foam to be broken by flowing along the first side plate 122 having the step, and the foam is completely converted into a liquid by the impeller of the recovery pump 160. Thereby, the defoaming device 100 can cause most of the foam to break the foam by the flow, energy can be saved, and the liquid which can realize the foam conversion can be recycled.

綜上所述,本發明確已符合發明專利之要件,遂依法提出專利申請。惟,以上所述者僅為本發明之較佳實施方式,自不能以此限制本案之申請專利範圍。舉凡熟悉本案技藝之人士援依本發明之精神所作之等效修飾或變化,皆應涵蓋於以下申請專利範圍內。In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.

100‧‧‧除泡裝置100‧‧‧Defoaming device

110‧‧‧收容槽110‧‧‧ receiving trough

111‧‧‧底壁111‧‧‧ bottom wall

112‧‧‧側壁112‧‧‧ side wall

113‧‧‧開口113‧‧‧ openings

114‧‧‧第一通孔114‧‧‧First through hole

115‧‧‧延伸部115‧‧‧Extension

1151‧‧‧第一延伸板1151‧‧‧First extension board

1152‧‧‧第二延伸板1152‧‧‧Second extension board

1153‧‧‧第三延伸板1153‧‧‧ Third extension board

120‧‧‧碎泡槽120‧‧‧ broken bubble tank

121‧‧‧底板121‧‧‧floor

122‧‧‧第一側板122‧‧‧First side panel

1221‧‧‧第一板體1221‧‧‧ first board

1222‧‧‧第二板體1222‧‧‧Second plate

1223‧‧‧第三板體1223‧‧‧ Third plate

1224‧‧‧第四板體1224‧‧‧4th plate

1225‧‧‧第五板體1225‧‧‧ fifth plate

123‧‧‧第二側板123‧‧‧Second side panel

130‧‧‧第一連接管130‧‧‧First connecting pipe

140‧‧‧儲液槽140‧‧‧ liquid storage tank

141‧‧‧頂板141‧‧‧ top board

142‧‧‧第三側板142‧‧‧ third side panel

143‧‧‧底板143‧‧‧floor

150‧‧‧第二連接管150‧‧‧Second connection tube

160‧‧‧回收泵160‧‧‧Recycling pump

170‧‧‧第三連接管170‧‧‧ Third connecting pipe

180‧‧‧液面高度檢測裝置180‧‧‧Liquid height detecting device

190‧‧‧控制器190‧‧‧ Controller

圖1係本技術方案實施例提供之除泡裝置之立體示意圖。FIG. 1 is a schematic perspective view of a defoaming device provided by an embodiment of the present technical solution.

圖2係圖1沿ΙΙ-ΙΙ線之剖視圖。Figure 2 is a cross-sectional view of Figure 1 taken along the ΙΙ-ΙΙ line.

圖3係本技術方案實施例提供之除泡裝置用於除泡時之示意圖。FIG. 3 is a schematic diagram of a defoaming device provided by an embodiment of the present technical solution for defoaming.

100‧‧‧除泡裝置 100‧‧‧Defoaming device

110‧‧‧收容槽 110‧‧‧ receiving trough

115‧‧‧延伸部 115‧‧‧Extension

1151‧‧‧第一延伸板 1151‧‧‧First extension board

1152‧‧‧第二延伸板 1152‧‧‧Second extension board

1153‧‧‧第三延伸板 1153‧‧‧ Third extension board

120‧‧‧碎泡槽 120‧‧‧ broken bubble tank

121‧‧‧底板 121‧‧‧floor

122‧‧‧第一側板 122‧‧‧First side panel

1221‧‧‧第一板體 1221‧‧‧ first board

1222‧‧‧第二板體 1222‧‧‧Second plate

1223‧‧‧第三板體 1223‧‧‧ Third plate

1224‧‧‧第四板體 1224‧‧‧4th plate

1225‧‧‧第五板體 1225‧‧‧ fifth plate

123‧‧‧第二側板 123‧‧‧Second side panel

130‧‧‧第一連接管 130‧‧‧First connecting pipe

140‧‧‧儲液槽 140‧‧‧ liquid storage tank

141‧‧‧頂板 141‧‧‧ top board

142‧‧‧第三側板 142‧‧‧ third side panel

150‧‧‧第二連接管 150‧‧‧Second connection tube

160‧‧‧回收泵 160‧‧‧Recycling pump

170‧‧‧第三連接管 170‧‧‧ Third connecting pipe

180‧‧‧液面高度檢測裝置 180‧‧‧Liquid height detecting device

190‧‧‧控制器 190‧‧‧ Controller

Claims (7)

一種除泡裝置,其包括:
收容槽,所述收容槽用於收容帶有泡沫之液體;
碎泡槽,所述碎泡槽與收容槽相連通,用於收容從所述收容槽流入之泡沫與液體之混合物或者液體,所述碎泡槽具有與收容槽相鄰接之第一側板,所述第一側板於豎直方向具有至少一階梯結構,所述收容槽中帶有泡沫之液體沿所述第一側板流入所述碎泡槽,所述至少一階梯結構用於使所述泡沫沿所述第一側板流入所述碎泡槽之過程中破碎轉化為液體;
儲液槽,所述儲液槽與碎泡槽相連通,用於收容從碎泡槽流入之泡沫與液體之混合物或者液體;以及
回收泵,所述回收泵連接於所述儲液槽與所述收容槽之間,用於將儲液槽內之泡沫與液體之混合物或者液體輸送至所述收容槽。
A defoaming device comprising:
a receiving groove for receiving a liquid with foam;
a snubber groove, the snubber groove is in communication with the accommodating groove, and is configured to receive a mixture or a liquid of a foam and a liquid flowing from the accommodating groove, the squeezing groove having a first side plate adjacent to the receiving groove, The first side plate has at least one stepped structure in a vertical direction, and a liquid with foam in the receiving groove flows into the blistering groove along the first side plate, and the at least one stepped structure is used to make the foam Breaking into a liquid during the process of flowing the first side plate into the snubber groove;
a liquid storage tank communicating with the foaming tank for containing a mixture or liquid of foam and liquid flowing from the foaming tank; and a recovery pump connected to the liquid storage tank and the storage tank Between the storage tanks, the mixture or liquid of the foam and the liquid in the liquid storage tank is transported to the receiving tank.
如申請專利範圍第1項所述之除泡裝置,其中,所述除泡裝置還包括液面高度檢測裝置和控制器,所述液面高度檢測裝置及所述回收泵均與所述控制器電連接,所述液面高度檢測裝置用於檢測儲液槽內之液面高度,並將該檢測到之液面高度傳遞至控制器,所述控制器用於根據液面高度檢測器之檢測結果,控制回收泵是否啟動。The defoaming device of claim 1, wherein the defoaming device further comprises a liquid level detecting device and a controller, wherein the liquid level detecting device and the recovery pump are both coupled to the controller Electrically connected, the liquid level detecting device is configured to detect a liquid level in the liquid storage tank, and transmit the detected liquid level height to a controller, wherein the controller is configured to detect the liquid level detector according to the liquid level , control whether the recovery pump is activated. 如申請專利範圍第1項所述之除泡裝置,其中,所述收容槽包括一個側壁及一個沿水準方向設置之延伸部,所述側壁開設有第一通孔,所述延伸部環繞所述第一通孔並自所述側壁向遠離所述側壁之方向延伸,所述延伸部與所述碎泡槽之第一側板相連接以使得收容槽與碎泡槽相互連通。The defoaming device of claim 1, wherein the receiving groove comprises a side wall and an extending portion disposed in a horizontal direction, the side wall is provided with a first through hole, and the extending portion surrounds the The first through hole extends from the side wall away from the side wall, and the extending portion is connected to the first side plate of the blistering groove such that the receiving groove and the squeezing groove communicate with each other. 如申請專利範圍第3項所述之除泡裝置,其中,所述第一側板包括相互連接之第一板體、第二板體及第三板體,所述第一板體垂直連接於延伸部,所述第二板體垂直連接於第一板體和第三板體之間,所述第一板體、第二板體及第三板體形成第一階梯。The defoaming device of claim 3, wherein the first side plate comprises a first plate body, a second plate body and a third plate body connected to each other, the first plate body being vertically connected to the extension The second plate body is vertically connected between the first plate body and the third plate body, and the first plate body, the second plate body and the third plate body form a first step. 如申請專利範圍第4項所述之除泡裝置,其中,所述第一側板還包括相互連接之第四板體和第五板體,所述第四板體垂直連接於第三板體與第五板體之間,所述第三板體、第四板體及第五板體形成第二階梯。The defoaming device of claim 4, wherein the first side panel further comprises a fourth plate body and a fifth plate body connected to each other, the fourth plate body being vertically connected to the third plate body and Between the fifth plates, the third plate, the fourth plate, and the fifth plate form a second step. 如申請專利範圍第1項所述之除泡裝置,其中,所述回收泵為磁力泵。The defoaming device of claim 1, wherein the recovery pump is a magnetic pump. 如申請專利範圍第6項所述之除泡裝置,其中,所述回收泵包括葉輪,所述葉輪用於於回收泵將儲液槽內之泡沫與液體之混合物或者液體輸送至所述收容槽時,將泡沫與液體之混合物中之泡沫破碎。The defoaming device of claim 6, wherein the recovery pump comprises an impeller for conveying a mixture or liquid of a foam and a liquid in the liquid storage tank to the receiving tank in a recovery pump The foam in the mixture of foam and liquid is broken.
TW99132325A 2010-09-24 2010-09-24 Defoaming device TWI383832B (en)

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Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7317504B2 (en) * 2004-04-08 2008-01-08 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
TWM328739U (en) * 2007-09-11 2008-03-11 Schmid Taiwan Ltd De-foaming and solution recycling equipment
CN201260903Y (en) * 2008-06-12 2009-06-24 欧阳智友 Full automatic foam-eliminating machine

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7317504B2 (en) * 2004-04-08 2008-01-08 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
TWM328739U (en) * 2007-09-11 2008-03-11 Schmid Taiwan Ltd De-foaming and solution recycling equipment
CN201260903Y (en) * 2008-06-12 2009-06-24 欧阳智友 Full automatic foam-eliminating machine

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