TWI383484B - Lead-free quad flat leadframe, lead-free quad flat package unit, and method for fabricating the same - Google Patents

Lead-free quad flat leadframe, lead-free quad flat package unit, and method for fabricating the same Download PDF

Info

Publication number
TWI383484B
TWI383484B TW097139690A TW97139690A TWI383484B TW I383484 B TWI383484 B TW I383484B TW 097139690 A TW097139690 A TW 097139690A TW 97139690 A TW97139690 A TW 97139690A TW I383484 B TWI383484 B TW I383484B
Authority
TW
Taiwan
Prior art keywords
wafer holder
recess
package unit
lead
lead frame
Prior art date
Application number
TW097139690A
Other languages
Chinese (zh)
Other versions
TW201017845A (en
Inventor
李春源
洪孝仁
Original Assignee
矽品精密工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 矽品精密工業股份有限公司 filed Critical 矽品精密工業股份有限公司
Priority to TW097139690A priority Critical patent/TWI383484B/en
Publication of TW201017845A publication Critical patent/TW201017845A/en
Application granted granted Critical
Publication of TWI383484B publication Critical patent/TWI383484B/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/91Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
    • H01L2224/92Specific sequence of method steps
    • H01L2224/922Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
    • H01L2224/9222Sequential connecting processes
    • H01L2224/92242Sequential connecting processes the first connecting process involving a layer connector
    • H01L2224/92247Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

Landscapes

  • Lead Frames For Integrated Circuits (AREA)

Description

四方平面無導腳之導線架、四方平面無導腳封裝單元及其製法Conductor frame with quadrilateral plane without lead, square plane non-lead package unit and preparation method thereof

本發明係有關於一種四方平面無導腳封裝單元,尤指一種具有增強銲料結合強度之接腳的四方平面無導腳封裝單元。The present invention relates to a tetragonal planar leadless package unit, and more particularly to a quad flat no-lead package unit having pins that enhance solder bonding strength.

四方平面無導腳封裝單元為一種使晶片座和接腳底面外露於封裝膠體底部表面的封裝單元,一般係採用表面耦接技術將封裝單元耦接至印刷電路板上,藉此形成一特定功能之電路模組。在表面耦接程序中,四方平面無導腳封裝單元的晶片座和接腳係直接銲結至印刷電路板上。The quadrilateral planar leadless package unit is a package unit for exposing the bottom surface of the wafer holder and the pin to the bottom surface of the encapsulant. Generally, the package unit is coupled to the printed circuit board by surface coupling technology, thereby forming a specific function. Circuit module. In the surface coupling process, the wafer pads and pins of the quad flat no-lead package unit are directly soldered to the printed circuit board.

舉例而言,第6,201,292和7,049,177號美國專利揭露一種習知四方平面無導腳封裝單元,以下配合第1圖,說明習知四方平面無導腳封裝單元至印刷電路板之耦接方法。For example, U.S. Patent Nos. 6,201,292 and 7,049,177 disclose a conventional quad flat no-lead package unit. The following is a description of a method for coupling a conventional quad flat unguided package unit to a printed circuit board in conjunction with FIG.

習知四方平面無導腳封裝單元100,包括以下構件:(a)導線架110,具有晶片座111和複數個接腳113,該晶片座111和該複數個接腳113分別具有第一表面120和相對的第二表面130;(b)晶片140,具有主動面150和相對的非主動面160,該主動面150上具有複數個銲墊151,其中,該晶片140之非主動面160接置於該晶片座111之第一表面120上;(c)複數個導線170,分別電性連接該些銲墊151和該些接腳113,且該些導線170接合於該些接腳113的第一表面120;以及(d)封裝膠體180, 包覆該晶片140、該些導線170和該導線架110,但使該晶片座111和該複數個接腳113的第二表面130顯露於外;其中,該晶片座111之第二表面130與該接腳113之第二表面130係呈現一平面。The conventional quad flat unguided package unit 100 includes the following components: (a) a lead frame 110 having a wafer holder 111 and a plurality of pins 113, the wafer holder 111 and the plurality of pins 113 having a first surface 120, respectively. And the opposite second surface 130; (b) the wafer 140 has an active surface 150 and an opposite inactive surface 160, the active surface 150 having a plurality of pads 151, wherein the inactive surface 160 of the wafer 140 is connected On the first surface 120 of the wafer holder 111; (c) a plurality of wires 170 electrically connected to the pads 151 and the pins 113, and the wires 170 are bonded to the pins 113 a surface 120; and (d) an encapsulant 180, The wafer 140, the wires 170 and the lead frame 110 are covered, but the wafer holder 111 and the second surface 130 of the plurality of pins 113 are exposed; wherein the second surface 130 of the wafer holder 111 is The second surface 130 of the pin 113 presents a plane.

印刷電路板190包括一基板191、接地部193、以及複數個導電部195。接地部193用以作為四方平面無導腳封裝單元100之晶片座111的安置區域,其面積大致等於晶片座之面積;而導電部195則作為印刷電路板190上的電性連接點,其面積大致等於四方平面無導腳封裝單元上的各個接腳之外露表面的面積。The printed circuit board 190 includes a substrate 191, a ground portion 193, and a plurality of conductive portions 195. The grounding portion 193 is used as a placement area of the wafer holder 111 of the quad flat planar leadless package unit 100, and the area thereof is substantially equal to the area of the wafer holder; and the conductive portion 195 serves as an electrical connection point on the printed circuit board 190, and the area thereof It is approximately equal to the area of the exposed surface of each pin on the quad flat no-lead package unit.

接著,進行塗銲程序,藉以將銲料197塗佈於接地部193和各個導電部195之表面上。之後再進行表面耦接程序,將四方平面無導腳封裝單元100安置於印刷電路板190上,並使各個接腳113和晶片座111分別對齊至對應的導電部195和接地部193。Next, a soldering process is performed to apply the solder 197 on the surface of the ground portion 193 and the respective conductive portions 195. Then, the surface coupling process is performed to place the quad flat unguided package unit 100 on the printed circuit board 190, and the respective pins 113 and the wafer holders 111 are respectively aligned to the corresponding conductive portions 195 and the ground portions 193.

最後,進行一迴銲程序(solder-reflow process),藉以將銲料迴銲於各個接腳和導電部之間以及晶片座和接地部之間,此即完成四方平面無導腳封裝單元至印刷電路板之耦接程序。Finally, a solder-reflow process is performed to reflow the solder between each of the pins and the conductive portion and between the wafer holder and the ground, thereby completing the quadrilateral planar leadless package unit to the printed circuit Board coupling program.

然而,由於迴銲程序中,熔化的銲料會向中心聚縮,因此會使迴銲後的銲料略為向上隆起,使得結合面積變小,且由於該晶片座之第二表面與該接腳之第二表面皆係平坦表面,該僅有的平面結合亦使得銲料結合強度較差,而產生可靠度不佳的問題。However, due to the reflow process, the molten solder will condense toward the center, so that the solder after the reflow is slightly raised upward, so that the bonding area becomes smaller, and since the second surface of the wafer holder and the pin are Both surfaces are flat surfaces, and the only planar bonding also results in poor solder bonding strength, resulting in poor reliability.

是以,如何解決上述習知銲料結合強度較差所產生之問題,並開發一種新穎的四方平面無導腳封裝單元,實為目前亟欲解決的課題。Therefore, how to solve the problem caused by the above-mentioned conventional solder joint strength is poor, and to develop a novel quadrilateral planar leadless package unit, which is currently a problem to be solved.

鑒於以上所述先前技術之缺點,本發明之一目的在於提供一種接腳底面具有凹部之四方平面無導腳封裝單元,以提升水平方向和垂直方向之銲料結合強度。In view of the above-mentioned shortcomings of the prior art, it is an object of the present invention to provide a quad flat no-lead package unit having a recess on the bottom surface of the pin to enhance the solder joint strength in the horizontal direction and the vertical direction.

為達上揭及其他目的,本發明揭露一種四方平面無導腳封裝單元,係包括:(a)導線架,包括晶片座和複數個接腳,該晶片座和該複數個接腳分別具有第一表面和相對的第二表面;(b)晶片,具有主動面和相對的非主動面,該主動面上具有複數個銲墊,其中,該晶片之非主動面接置於該晶片座之第一表面上;(c)複數個導線,分別電性連接該些銲墊和該些接腳,且該些導線接合於該些接腳的第一表面;以及(d)封裝膠體,包覆該晶片、該些導線和該導線架,但使該晶片座和該複數個接腳的第二表面顯露於外;其中,該導線架最外圍之接腳的第一表面處形成有延伸部,並向遠離第一表面的方向延伸,且相對之第二表面形成有凹部,用以於該四方平面無導腳封裝單元進行迴銲時,使該凹部容納銲料。In order to achieve the above and other objects, the present invention discloses a quad flat no-lead package unit, comprising: (a) a lead frame comprising a wafer holder and a plurality of pins, the wafer holder and the plurality of pins respectively having a first a surface and an opposite second surface; (b) a wafer having an active surface and an opposite inactive surface, the active surface having a plurality of pads, wherein the inactive surface of the wafer is placed first in the wafer holder (c) a plurality of wires electrically connected to the pads and the pins, and the wires are bonded to the first surfaces of the pins; and (d) an encapsulant covering the wafer The wire and the lead frame, but the second surface of the wafer holder and the plurality of pins are exposed; wherein the first surface of the outermost pin of the lead frame is formed with an extension portion and Extending away from the first surface, and forming a recess relative to the second surface for accommodating the solder when the quadrilateral planar leadless package unit is reflowed.

本發明亦揭露一種製作四方平面無導腳封裝單元之方法,包括:提供載板,該載板包括定義於該載板表面之複數切割線、形成於該切割線上之複數個凸塊、以及該複數個凸塊所圍繞之平坦部;於該具有凸塊的載板表面上形 成金屬層後,圖案化該金屬層以得到導線架,該導線架具有形成於該平坦部上之具有第一表面和相對的第二表面的晶片座和複數個接腳,其中,部分之接腳係形成於該凸塊處並包覆該凸塊,而形成於該凸塊處的接腳具有延伸部和凹部;接著將晶片接合於該晶片座上;再形成複數個導線,以電性連接晶片與接腳;形成封裝膠體於該載板上,以包覆該接腳、晶片座、晶片和導線;移除該載板,使外露出該導線架;以及沿著該些切割線切割分離以得到複數四方平面無導腳封裝單元。The invention also discloses a method for fabricating a quad flat no-lead package unit, comprising: providing a carrier board, the carrier board comprising a plurality of cutting lines defined on a surface of the carrier board, a plurality of bumps formed on the cutting line, and the a flat portion surrounded by a plurality of bumps; shaped on the surface of the carrier plate having the bumps After forming a metal layer, the metal layer is patterned to obtain a lead frame having a wafer holder having a first surface and an opposite second surface formed on the flat portion, and a plurality of pins, wherein a foot is formed at the bump and covers the bump, and the pin formed at the bump has an extension portion and a recess portion; then the wafer is bonded to the wafer holder; and a plurality of wires are formed to be electrically Connecting the wafer and the pin; forming an encapsulant on the carrier to cover the pin, the wafer holder, the wafer and the wire; removing the carrier to expose the lead frame; and cutting along the cutting lines Separate to obtain a plurality of quadrilateral planar leadless package units.

本發明另揭露一種四方平面無導腳之導線架,係包括:晶片座;以及複數個圍繞該晶片座之接腳,該晶片座和該複數個接腳分別具有第一表面和相對的第二表面;其中,該導線架最外圍之接腳的第一表面處形成有延伸部,並向遠離第一表面的方向延伸,且相對之第二表面形成有凹部,用以容納銲料。The present invention further discloses a quadrilateral planar leadless lead frame comprising: a wafer holder; and a plurality of pins surrounding the wafer holder, the wafer holder and the plurality of pins respectively having a first surface and an opposite second a surface; wherein the first surface of the pin of the outermost periphery of the lead frame is formed with an extension portion extending in a direction away from the first surface, and a recessed portion is formed on the opposite second surface for accommodating the solder.

本發明透過形成於接腳之第二表面之凹部,利用該凹部於該四方平面無導腳封裝單元進行迴銲時容納銲料,提供水平和垂直方向上的結合,並增加黏合的面積,以提升銲料結合強度。According to the present invention, the recess is formed on the second surface of the pin, and the recess is used to accommodate the solder during the reflow process of the four-plane non-lead package unit, thereby providing a combination of horizontal and vertical directions and increasing the bonding area to enhance Solder bond strength.

以下係藉由特定的具體實施例說明本創作之實施方式,所屬技術領域中具有通常知識者可由本說明書所揭示之內容輕易地瞭解本創作之其他優點與功效。The embodiments of the present invention are described below by way of specific embodiments, and those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in the present specification.

第一實施例First embodiment

請參閱第2A至2G圖,係為本發明之四方平面無導腳封裝單元及其製法之示意圖。Please refer to FIGS. 2A to 2G, which are schematic diagrams of the quadrilateral planar leadless package unit of the present invention and a method for manufacturing the same.

如第2A圖所示,提供一載板212,載板212的材質可為,例如,但不限於銅等金屬材料。該載板212的表面214包括一矩陣封膠區216,該矩陣封膠區216定義有複數個切割線218和矩陣單元219。As shown in FIG. 2A, a carrier 212 is provided. The material of the carrier 212 may be, for example, but not limited to, a metal material such as copper. The surface 214 of the carrier 212 includes a matrix encapsulation region 216 defining a plurality of dicing lines 218 and a matrix unit 219.

復參閱第2A'圖,該載板212每一矩陣單元219具有平坦部221和複數個凸塊223形成於該切割線218上並環繞該平坦部221,該些凸塊223環繞該平坦部221所得的面積大致等於一四方平面無導腳封裝單元200的面積;接著,在該載板212上利用電鍍和圖案化製程技術形成圖案化之金屬層,金屬層係具有,例如金/鈀/鎳/鈀層或金/鎳/銅/鈀層,並以該圖案化金屬層係作為導線架210,該導線架210具有晶片座211和複數個接腳213,其中,該晶片座211係形成於該平坦部221上且晶片座211的面積大致等於晶片的面積;部分之接腳213係形成於該晶片座211和該凸塊223之間以及部分之接腳213係形成於該凸塊223處並包覆該凸塊223,是以,相對於該凸塊,形成於該凸塊223處的接腳213具有延伸部225和凹部227。Referring to FIG. 2A', the carrier plate 212 has a flat portion 221 and a plurality of bumps 223 formed on the cutting line 218 and surrounding the flat portion 221. The bumps 223 surround the flat portion 221 The resulting area is approximately equal to the area of a quad flat no-lead package unit 200; then, a patterned metal layer is formed on the carrier 212 using electroplating and patterning techniques, such as gold/palladium/ a nickel/palladium layer or a gold/nickel/copper/palladium layer, and the patterned metal layer is used as a lead frame 210. The lead frame 210 has a wafer holder 211 and a plurality of pins 213, wherein the wafer holder 211 is formed. The area of the wafer holder 211 is substantially equal to the area of the wafer; a portion of the pin 213 is formed between the wafer holder 211 and the bump 223, and a portion of the pin 213 is formed on the bump 223. The bump 223 is covered and covered, so that the pin 213 formed at the bump 223 has an extension portion 225 and a recess portion 227 with respect to the bump.

或者,如第2A"圖所示,載板每一矩陣單元219之切割線218內側亦具有環繞該平坦部221之凸塊223,是以,該平坦部221的面積較第2A'圖所示者小。Alternatively, as shown in FIG. 2A", the inside of the cutting line 218 of each matrix unit 219 of the carrier also has a bump 223 surrounding the flat portion 221, so that the area of the flat portion 221 is smaller than that shown in FIG. 2A'. Small.

具體而言,參照第2A'圖,本發明所揭露之四方平面無導腳之導線架210,包括:晶片座211;以及複數個圍 繞該晶片座211之接腳213,該晶片座211和該複數個接腳213分別具有第一表面220和相對的第二表面230;其中,該導線架210最外圍之接腳213的第一表面220處形成有延伸部225,並向遠離第一表面220的方向延伸,且相對之第二表面230形成有凹部227,用以容納銲料。Specifically, referring to FIG. 2A', the quadrilateral planar leadless lead frame 210 of the present invention includes: a wafer holder 211; and a plurality of circumferences Around the pin 213 of the wafer holder 211, the wafer holder 211 and the plurality of pins 213 respectively have a first surface 220 and an opposite second surface 230; wherein, the first outermost pin 213 of the lead frame 210 is first An extension 225 is formed at the surface 220 and extends away from the first surface 220, and a recess 227 is formed opposite the second surface 230 for accommodating solder.

同樣地,根據第2A"圖所示,該導線架的全部接腳之第一表面處可形成有延伸部,並向遠離第一表面的方向延伸,且相對之第二表面形成有凹部。另外,該導線架之晶片座的第二表面可復形成有凹部,用以於該四方平面無導腳封裝單元進行迴銲時,使該凹部容納銲料。Similarly, according to the 2A" figure, the first surface of all the pins of the lead frame may be formed with an extension portion extending in a direction away from the first surface, and a concave portion is formed opposite to the second surface. The second surface of the wafer holder of the lead frame may be formed with a recess for accommodating the solder when the square planar non-lead package unit is reflowed.

如第2B圖所示,執行黏晶步驟,提供主動面250上具有複數個銲墊251之晶片240,並藉由膠黏劑241使晶片240之相對該主動面250的非主動面260接合該晶片座211。本發明中,膠黏劑的實例,包括但不限於銀膠。As shown in FIG. 2B, the die bonding step is performed to provide a wafer 240 having a plurality of pads 251 on the active surface 250, and bonding the inactive surface 260 of the wafer 240 relative to the active surface 250 by the adhesive 241. Wafer holder 211. In the present invention, examples of the adhesive include, but are not limited to, silver paste.

如第2C圖所示,執行晶片與接腳的電性連接步驟,其係利用打線(wire-bonding)的方式形成複數個導線270,該些導線270係電性連接晶片240之銲墊251與接腳213。As shown in FIG. 2C, an electrical connection step of the wafer and the pin is performed, and a plurality of wires 270 are formed by wire-bonding, and the wires 270 are electrically connected to the pad 251 of the wafer 240 and Pin 213.

如第2D圖所示,執行一封膠步驟,其係利用壓模或塗膠的方式形成封裝膠體,封裝膠體280形成於該載板212上,以包覆該接腳213、晶片座211、晶片240和導線270。As shown in FIG. 2D, a glue step is performed, which is formed by using a stamper or a glue to form an encapsulant. The encapsulant 280 is formed on the carrier 212 to cover the pin 213 and the wafer holder 211. Wafer 240 and wire 270.

如第2E圖所示,執行一如濕式蝕刻的蝕刻步驟,以移除該載板,俾使顯露出該導線架210的底面261和封裝 膠體280的底面261,且由於移除該具有凸塊的載板,是以,先前形成於該凸塊處的接腳213相對地具有凹部227。As shown in FIG. 2E, an etching step such as wet etching is performed to remove the carrier, such that the bottom surface 261 of the lead frame 210 and the package are exposed. The bottom surface 261 of the colloid 280, and because the carrier having the bumps is removed, the pins 213 previously formed at the bumps have opposite recesses 227.

如第2F圖所示,接著進行切割的步驟,其係沿著該些切割線218切割分離每一個矩陣單元,以得到本發明之四方平面無導腳封裝單元200。As shown in FIG. 2F, a step of cutting is then performed by cutting each of the matrix cells along the cutting lines 218 to obtain the quad flat unguided package unit 200 of the present invention.

透過前述製法,本發明復揭示一種四方平面無導腳封裝單元200,係包括:導線架210,包括晶片座211和複數個接腳213,該晶片座211和該複數個接腳213分別具有第一表面220和相對的第二表面230;晶片240,具有主動面250和相對的非主動面260,該主動面250上具有複數個銲墊251,其中,該晶片240之非主動面260接置於該晶片座211之第一表面220上;複數個導線270,分別電性連接該些銲墊251和該些接腳213,且該些導線270接合於該些接腳213的第一表面220;以及封裝膠體280,包覆該晶片240、該些導線270和該導線架210,但使該晶片座211和該複數個接腳213的第二表面230顯露於外;其中,該導線架210最外圍之接腳213的第一表面220處形成有延伸部225,並向遠離第一表面220的方向延伸,且相對之第二表面230形成有凹部227,用以於該四方平面無導腳封裝單元200進行迴銲時,使該凹部容納銲料。更具體而言,該些最外圍的接腳係具有階梯狀結構,且該接腳之凹部係位於該封裝單元之外側緣。The present invention discloses a quad flat planar leadless package unit 200, which includes a lead frame 210 including a wafer holder 211 and a plurality of pins 213, and the wafer holder 211 and the plurality of pins 213 have a a surface 220 and an opposite second surface 230; the wafer 240 has an active surface 250 and an opposite inactive surface 260 having a plurality of pads 251 thereon, wherein the inactive surface 260 of the wafer 240 is attached On the first surface 220 of the wafer holder 211, a plurality of wires 270 are electrically connected to the pads 251 and the pins 213, and the wires 270 are bonded to the first surface 220 of the pins 213. And the encapsulant 280, covering the wafer 240, the wires 270 and the lead frame 210, but exposing the wafer holder 211 and the second surface 230 of the plurality of pins 213 to the outside; wherein the lead frame 210 The first surface 220 of the outermost pin 213 is formed with an extending portion 225 extending away from the first surface 220, and opposite the second surface 230 is formed with a recess 227 for guiding the quadrilateral plane. When the package unit 200 performs reflow, the recess is made Carolina solder. More specifically, the outermost pins have a stepped structure, and the recesses of the pins are located at the outer edges of the package unit.

在本發明之另一具體實例中,全部接腳之第一表面處皆形成有延伸部,並向遠離第一表面的方向延伸,且相對之第二表面形成有凹部。In another embodiment of the present invention, the first surface of all of the pins is formed with an extension portion extending in a direction away from the first surface, and a recess is formed on the second surface opposite to the second surface.

如第2G圖所示,依序進行塗銲和迴銲步驟,係提供一印刷電路板290,該印刷電路板290具有預設的接地部293和導電部295,藉以將銲料297塗佈於接地部293和各個導電部295之表面上,之後再將四方平面無導腳封裝單元200安置於印刷電路板290上,並使各個接腳213和晶片座211分別對齊至對應的導電部295和接地部293。As shown in FIG. 2G, the soldering and reflowing steps are sequentially performed to provide a printed circuit board 290 having a predetermined grounding portion 293 and a conductive portion 295 for applying solder 297 to the ground. On the surface of the portion 293 and each of the conductive portions 295, the tetragonal planar leadless package unit 200 is then placed on the printed circuit board 290, and the respective pins 213 and the wafer holder 211 are respectively aligned to the corresponding conductive portions 295 and ground. Department 293.

最後,進行一迴銲程序(solder-reflow process),藉以將銲料297迴銲於各個接腳213和導電部295之間以及晶片座211和接地部293之間,此即完成本發明之四方平面無導腳封裝單元200至印刷電路板290之耦接程序,此外,由於本發明之四方平面無導腳封裝單元之具有凹部的接腳,係位於切割線上,故於迴銲之後,該銲料可包覆該封裝單元側邊的接腳,提供更佳的結合強度。Finally, a solder-reflow process is performed to reflow the solder 297 between the respective pins 213 and the conductive portions 295 and between the wafer holder 211 and the ground portion 293, thereby completing the tetragonal plane of the present invention. The coupling procedure of the lead-free package unit 200 to the printed circuit board 290, and further, since the quadrilateral planar lead-free package unit of the present invention has a recessed pin, which is located on the cutting line, the solder can be after reflowing. The pins on the sides of the package unit are provided to provide better bonding strength.

因此,本發明之四方平面無導腳封裝單元的接腳具有凹部,用以容納銲料,進而提升水平和垂直方向的結合強度,再者,該接腳的第一表面處形成有延伸部,並向遠離第一表面的方向延伸,故本發明之接腳提供更多與封裝膠體結合的面積,亦加強了接腳與封裝膠體的結合強度。Therefore, the pin of the quad flat no-lead package unit of the present invention has a recess for accommodating solder, thereby enhancing the bonding strength in the horizontal and vertical directions, and further, an extension portion is formed at the first surface of the pin, and The pin extends away from the first surface, so the pin of the present invention provides more area for bonding with the encapsulant, and also strengthens the bonding strength between the pin and the encapsulant.

第二實施例Second embodiment

請參閱第3A至3D圖,係為本發明之四方平面無導腳 封裝單元第二實施例之示意圖。同時為簡化本圖示,本實施例中對應前述相同或相似之元件係採用相同標號表示。Please refer to Figures 3A to 3D for the quadrilateral plane without the lead of the present invention. A schematic diagram of a second embodiment of a package unit. In the embodiment, the same or similar elements are denoted by the same reference numerals in the embodiment.

本實施例之四方平面無導腳封裝單元及其製法與前述實施例大致相同,主要差異在於該晶片座之第二表面復形成有凹部,用以於該四方平面無導腳封裝單元進行迴銲時,使該凹部容納銲料。該晶片座之第二表面的凹部的形成方法,可視需要在移除該載板後,在該晶片座之第二表面形成有凹部。The quadrilateral planar leadless package unit of the present embodiment and the manufacturing method thereof are substantially the same as those of the foregoing embodiment, and the main difference is that the second surface of the wafer holder is further formed with a concave portion for reflowing the quadrilateral planar leadless package unit. At this time, the recess is made to accommodate the solder. The method of forming the concave portion of the second surface of the wafer holder may be formed with a concave portion on the second surface of the wafer holder after removing the carrier.

如第3A圖所示,該晶片座211之凹部227係形成於該晶片座211第二表面230之中央位置。As shown in FIG. 3A, the recess 227 of the wafer holder 211 is formed at a central position of the second surface 230 of the wafer holder 211.

此外,如第3B和3C圖所示,該中央位置的凹部227為矩形或者該中央位置的凹部227為圓形。Further, as shown in FIGS. 3B and 3C, the concave portion 227 at the center position is rectangular or the concave portion 227 at the center position is circular.

如第3D圖所示,該晶片座211之凹部227亦可形成於該晶片座211第二表面230之週邊位置。As shown in FIG. 3D, the recess 227 of the wafer holder 211 may also be formed at a peripheral position of the second surface 230 of the wafer holder 211.

另一方面,由第3A至3D圖可知,本發明之四方平面無導腳之導線架所包括的晶片座之凹部可形成於該晶片座第二表面之中央位置,且該凹部的形狀未有特別限制,是以,該中央位置的凹部可為矩形或圓形。此外,該晶片座之凹部亦可形成於該晶片座第二表面之週邊位置。On the other hand, as can be seen from FIGS. 3A to 3D, the recess of the wafer holder included in the lead frame of the quadrilateral plane without lead can be formed at a central position of the second surface of the wafer holder, and the shape of the recess is not It is particularly limited that the recess in the central position may be rectangular or circular. In addition, the recess of the wafer holder may also be formed at a peripheral position of the second surface of the wafer holder.

本發明之四方平面無導腳封裝單元透過形成於接腳之第二表面之凹部,利用該凹部於該四方平面無導腳封裝單元進行迴銲時容納銲料,提供水平和垂直方向上的結合,並增加黏合的面積,此外,由於位在封裝單元外側緣的接腳向內形成有階梯狀結構,故可於迴銲時使銲料包覆 該外側緣的接腳,更可提升封裝單元結合強度。The quad flat no-lead package unit of the present invention transmits the solder in the recessed portion of the second surface of the pin through the concave portion, and the solder is provided during the reflow soldering of the square-sided non-lead package unit to provide a combination of horizontal and vertical directions. And increase the bonding area. In addition, since the legs located on the outer edge of the package unit are formed with a stepped structure inward, the solder can be coated during reflow. The pins on the outer edge can further improve the bonding strength of the package unit.

以上所述之具體實施例,僅係用以例釋本發明之特點及功效,而非用以限定本發明之可實施範疇,在未脫離本發明上揭之精神與技術範疇下,任何運用本發明所揭示內容而完成之等效改變及修飾,均仍應為下述之申請專利範圍所涵蓋。The specific embodiments described above are only used to illustrate the features and functions of the present invention, and are not intended to limit the scope of the present invention, and any application without departing from the spirit and scope of the present invention. Equivalent changes and modifications made to the disclosure of the invention are still covered by the scope of the following claims.

100、200‧‧‧四方平面無導腳封裝單元100,200‧‧‧tetragonal planar leadless package unit

110、210‧‧‧導線架110, 210‧‧‧ lead frame

111、211‧‧‧晶片座111, 211‧‧‧ wafer holder

113、213‧‧‧接腳113, 213‧‧‧ feet

120、220‧‧‧第一表面120, 220‧‧‧ first surface

130、230‧‧‧第二表面130, 230‧‧‧ second surface

140、240‧‧‧晶片140, 240‧‧‧ wafer

150、250‧‧‧主動面150, 250‧‧‧ active surface

151、251‧‧‧銲墊151, 251‧‧ ‧ pads

160、260‧‧‧非主動面160, 260‧‧‧ inactive surface

170、270‧‧‧導線170, 270‧‧‧ wires

180、280‧‧‧封裝膠體180, 280‧‧‧Package colloid

190、290‧‧‧印刷電路板190, 290‧‧‧ Printed circuit boards

191‧‧‧基板191‧‧‧Substrate

193、293‧‧‧接地部193, 293‧‧‧ Grounding Department

195、295‧‧‧導電部195, 295‧‧‧Electrical Department

197、297‧‧‧銲料197, 297‧‧‧ solder

212‧‧‧載板212‧‧‧ Carrier Board

214‧‧‧表面214‧‧‧ surface

216‧‧‧矩陣封膠區216‧‧‧Mask sealing area

218‧‧‧切割線218‧‧‧ cutting line

219‧‧‧矩陣單元219‧‧‧Matrix unit

221‧‧‧平坦部221‧‧‧flat

223‧‧‧凸塊223‧‧‧Bumps

225‧‧‧延伸部225‧‧‧Extension

227‧‧‧凹部227‧‧‧ recess

241‧‧‧膠黏劑241‧‧‧Adhesive

第1圖係為習知四方平面無導腳封裝單元之剖面示意圖;第2A至2G圖係為本發明之四方平面無導腳封裝單元及其製法之剖面示意圖;第2A'圖係顯示形成與載板上之導線架之剖面示意圖;第2A"圖係顯示另一形成於載板上之導線架之剖面示意圖;第3A圖係為本發明另一四方平面無導腳封裝單元之剖面示意圖;以及第3B至3D圖係顯示本發明之形成於晶片座第二表面之凹部示意圖。1 is a schematic cross-sectional view of a conventional quad flat no-lead package unit; FIGS. 2A to 2G are cross-sectional views of a tetragonal planar leadless package unit of the present invention and a method for manufacturing the same; FIG. 2A' shows a formation and A schematic cross-sectional view of a lead frame on a carrier board; a 2A" diagram showing a cross-sectional view of another lead frame formed on the carrier board; and FIG. 3A is a schematic cross-sectional view of another quad flat no-lead package unit of the present invention And 3B to 3D are schematic views showing the concave portion of the present invention formed on the second surface of the wafer holder.

200‧‧‧四方平面無導腳封裝單元200‧‧‧tetragonal planar leadless package unit

210‧‧‧導線架210‧‧‧ lead frame

211‧‧‧晶片座211‧‧‧ wafer holder

213‧‧‧接腳213‧‧‧ pins

220‧‧‧第一表面220‧‧‧ first surface

225‧‧‧延伸部225‧‧‧Extension

227‧‧‧凹部227‧‧‧ recess

230‧‧‧第二表面230‧‧‧ second surface

240‧‧‧晶片240‧‧‧ wafer

250‧‧‧主動面250‧‧‧Active surface

251‧‧‧銲墊251‧‧‧ solder pads

260‧‧‧非主動面260‧‧‧Inactive surface

270‧‧‧導線270‧‧‧ wire

280‧‧‧封裝膠體280‧‧‧Package colloid

Claims (22)

一種四方平面無導腳封裝單元,係包括:導線架,包括晶片座和複數個接腳,該晶片座和該複數個接腳分別具有第一表面和相對的第二表面;晶片,具有主動面和相對的非主動面,該主動面上具有複數個銲墊,其中,該晶片之非主動面接置於該晶片座之第一表面上;複數個導線,分別電性連接該些銲墊和該些接腳,且該些導線接合於該些接腳的第一表面;以及封裝膠體,包覆該晶片、該些導線和該導線架,但使該晶片座和該複數個接腳的第二表面顯露於外;其中,該導線架最外圍之接腳的第一表面處形成有延伸部,並向遠離第一表面的方向及向遠離該導線架外圍的方向延伸,使該最外圍的接腳具有階梯狀結構,且該延伸部相對之第二表面形成有凹部,用以於該四方平面無導腳封裝單元進行迴銲時,使該凹部容納銲料。 A quad flat planar leadless package unit includes: a lead frame including a wafer holder and a plurality of pins, the wafer holder and the plurality of pins respectively having a first surface and an opposite second surface; the wafer having an active surface And the opposite non-active surface, the active surface has a plurality of pads, wherein the inactive surface of the wafer is placed on the first surface of the wafer holder; a plurality of wires are electrically connected to the pads and the a plurality of pins, and the wires are bonded to the first surfaces of the pins; and an encapsulant covering the wafer, the wires and the lead frame, but the wafer holder and the plurality of pins are second The surface is exposed to the outside; wherein the first surface of the outermost pin of the lead frame is formed with an extension portion extending in a direction away from the first surface and away from a periphery of the lead frame, so that the outermost connection The leg has a stepped structure, and the extending portion is formed with a concave portion opposite to the second surface for accommodating the solder when the quadrilateral planar leadless package unit is reflowed. 如申請專利範圍第1項之四方平面無導腳封裝單元,其中,該最外圍的接腳之凹部係位於該四方平面無導腳封裝單元之外側緣。 The quadrilateral planar leadless package unit of claim 1, wherein the outermost leg recess is located at a side edge of the quad flat unguided package unit. 如申請專利範圍第1項之四方平面無導腳封裝單元,其中,該全部之接腳之第一表面處形成有延伸部,並向遠離第一表面的方向延伸,且相對之第二表面形成有凹部。 The quad flat non-lead package unit of claim 1, wherein the first surface of the pin is formed with an extension portion extending away from the first surface and formed opposite to the second surface. There are recesses. 如申請專利範圍第1項之四方平面無導腳封裝單元,其中,該晶片座之第二表面復形成有凹部,用以於該四方平面無導腳封裝單元進行迴銲時,使該凹部容納銲料。 The quadrilateral planar leadless package unit of claim 1, wherein the second surface of the wafer holder is further formed with a recess for accommodating the recess when the square-sided non-lead package unit is reflowed. solder. 如申請專利範圍第4項之四方平面無導腳封裝單元,其中,該晶片座之凹部係形成於該晶片座第二表面之中央位置。 The quadrilateral planar leadless package unit of claim 4, wherein the recess of the wafer holder is formed at a central position of the second surface of the wafer holder. 如申請專利範圍第5項之四方平面無導腳封裝單元,其中,該中央位置的凹部為矩形。 The quadrilateral planar leadless package unit of claim 5, wherein the central portion of the recess is rectangular. 如申請專利範圍第5項之四方平面無導腳封裝單元,其中,該中央位置的凹部為圓形。 The quadrilateral planar leadless package unit of claim 5, wherein the central portion of the recess is circular. 如申請專利範圍第4項之四方平面無導腳封裝單元,其中,該晶片座之凹部係形成於該晶片座第二表面之週邊位置。 The quadrilateral planar leadless package unit of claim 4, wherein the recess of the wafer holder is formed at a peripheral position of the second surface of the wafer holder. 如申請專利範圍第1項之四方平面無導腳封裝單元,復包括印刷電路板,用以藉由該銲料接合該晶片座和該接腳。 A quad flat no-lead package unit as claimed in claim 1 includes a printed circuit board for bonding the wafer holder and the pins by the solder. 一種四方平面無導腳之導線架,係包括:晶片座;以及複數個圍繞該晶片座之接腳,該晶片座和該複數個接腳分別具有第一表面和相對的第二表面;其中,該導線架最外圍之接腳的第一表面處形成有延伸部,並向遠離第一表面的方向及向遠離該導線架外圍的方向延伸,使該最外圍的接腳具有階梯狀結 構,且該延伸部相對之第二表面形成有凹部,用以容納銲料。 A quadrilateral planar leadless lead frame includes: a wafer holder; and a plurality of pins surrounding the wafer holder, the wafer holder and the plurality of pins respectively having a first surface and an opposite second surface; wherein An extension portion is formed at the first surface of the outermost pin of the lead frame, and extends away from the first surface and away from the periphery of the lead frame, so that the outermost pin has a stepped junction And the extension is formed with a recess relative to the second surface for accommodating the solder. 如申請專利範圍第10項之四方平面無導腳之導線架,其中,該全部之接腳之第一表面處形成有延伸部,並向遠離第一表面的方向延伸,且相對之第二表面形成有凹部。 A lead frame having no guide legs according to claim 10, wherein the first surface of the pin is formed with an extension portion extending in a direction away from the first surface and opposite to the second surface A recess is formed. 如申請專利範圍第10項之四方平面無導腳之導線架,其中,該晶片座之第二表面復形成有凹部,用以於該四方平面無導腳封裝單元進行迴銲時,使該凹部容納銲料。 The lead frame of the quadrilateral plane without a lead according to claim 10, wherein the second surface of the wafer holder is further formed with a recess for making the recess when the quadrilateral planar leadless package unit is reflowed. Contains solder. 如申請專利範圍第12項之四方平面無導腳之導線架,其中,該晶片座之凹部係形成於該晶片座第二表面之中央位置。 The lead frame of the quadrilateral plane without a lead according to claim 12, wherein the recess of the wafer holder is formed at a central position of the second surface of the wafer holder. 如申請專利範圍第13項之四方平面無導腳之導線架,其中,該中央位置的凹部為矩形。 A lead frame having no guide legs in a square plane as claimed in claim 13 wherein the central portion of the recess is rectangular. 如申請專利範圍第13項之四方平面無導腳之導線架,其中,該中央位置的凹部為圓形。 A lead frame having no guide legs in a square plane as claimed in claim 13 wherein the central portion of the recess is circular. 如申請專利範圍第12項之四方平面無導腳之導線架,其中,該晶片座之凹部係形成於該晶片座第二表面之週邊位置。 The lead frame of the quadrilateral plane without a lead according to claim 12, wherein the recess of the wafer holder is formed at a peripheral position of the second surface of the wafer holder. 一種四方平面無導腳封裝單元之製法,包括:提供載板,該載板包括定義於該載板表面之複數切割線、形成於該切割線上之複數個凸塊、以及該複數個凸塊所圍繞之平坦部; 於該具有凸塊的載板表面上形成金屬層後,圖案化該金屬層以得到導線架,該導線架具有形成於該平坦部上之具有第一表面和相對的第二表面的晶片座和複數個接腳,其中,部分之接腳係形成於該凸塊處並包覆該凸塊,而形成於該凸塊處的接腳具有延伸部和凹部,使該凸塊處的接腳構成階梯狀結構;將晶片接合於該晶片座上;形成複數個導線,以電性連接晶片與接腳;形成封裝膠體於該載板上,以包覆該接腳、晶片座、晶片和導線;移除該載板,使外露出該導線架;以及沿著該些切割線切割分離以得到複數四方平面無導腳封裝單元。 A method for manufacturing a tetragonal planar leadless package unit, comprising: providing a carrier board, the carrier board comprising a plurality of cutting lines defined on a surface of the carrier board, a plurality of bumps formed on the cutting line, and the plurality of bumps a flat portion around it; After forming a metal layer on the surface of the bumped carrier, patterning the metal layer to obtain a lead frame having a wafer holder having a first surface and an opposite second surface formed on the flat portion a plurality of pins, wherein a part of the pin is formed at the bump and covers the bump, and the pin formed at the bump has an extension and a recess, so that the pin at the bump forms a stepped structure; bonding a wafer to the wafer holder; forming a plurality of wires to electrically connect the wafer and the pins; forming an encapsulant on the carrier to cover the pins, the wafer holder, the wafer, and the wires; Removing the carrier to expose the lead frame; and cutting and separating along the cutting lines to obtain a plurality of square planar leadless package units. 如申請專利範圍第17項之四方平面無導腳封裝單元之製法,復包括藉由銲料將該四方平面無導腳封裝單元之晶片座和接腳接合於印刷電路板。 The method for fabricating a quad flat no-lead package unit of claim 17 includes bonding the wafer holder and the pins of the quad flat unguided package unit to the printed circuit board by solder. 如申請專利範圍第17項之四方平面無導腳封裝單元之製法,復包括在移除該載板後,在該晶片座之第二表面形成有凹部。 The method for manufacturing a quad flat no-lead package unit according to claim 17 of the patent application, further comprising forming a recess on the second surface of the wafer holder after removing the carrier. 如申請專利範圍第19項之四方平面無導腳封裝單元之製法,其中,該晶片座之凹部係形成於晶片座第二表面之中央位置,且該凹部為矩形。 The method for manufacturing a quad flat no-lead package unit according to claim 19, wherein the recess of the wafer holder is formed at a central position of the second surface of the wafer holder, and the recess is rectangular. 如申請專利範圍第19項之四方平面無導腳封裝單元之製法,其中,該晶片座之凹部係形成於晶片座第二 表面之中央位置,且該凹部為圓形。 The method for manufacturing a quadrilateral planar leadless package unit according to claim 19, wherein the recess of the wafer holder is formed in the wafer holder second The central position of the surface, and the recess is circular. 如申請專利範圍第19項之四方平面無導腳封裝單元之製法,該晶片座之凹部係形成於該晶片座第二表面之週邊位置。 For example, in the method of manufacturing the quadrilateral planar leadless package unit of claim 19, the recess of the wafer holder is formed at a peripheral position of the second surface of the wafer holder.
TW097139690A 2008-10-16 2008-10-16 Lead-free quad flat leadframe, lead-free quad flat package unit, and method for fabricating the same TWI383484B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW097139690A TWI383484B (en) 2008-10-16 2008-10-16 Lead-free quad flat leadframe, lead-free quad flat package unit, and method for fabricating the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW097139690A TWI383484B (en) 2008-10-16 2008-10-16 Lead-free quad flat leadframe, lead-free quad flat package unit, and method for fabricating the same

Publications (2)

Publication Number Publication Date
TW201017845A TW201017845A (en) 2010-05-01
TWI383484B true TWI383484B (en) 2013-01-21

Family

ID=44830990

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097139690A TWI383484B (en) 2008-10-16 2008-10-16 Lead-free quad flat leadframe, lead-free quad flat package unit, and method for fabricating the same

Country Status (1)

Country Link
TW (1) TWI383484B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103474358A (en) * 2013-09-29 2013-12-25 华进半导体封装先导技术研发中心有限公司 Multi-circle QFN package lead frame manufacturing method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9142426B2 (en) * 2011-06-20 2015-09-22 Cyntec Co., Ltd. Stack frame for electrical connections and the method to fabricate thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6650020B2 (en) * 2001-06-29 2003-11-18 Matsushia Electric Industrial Co., Ltd. Resin-sealed semiconductor device
TW200511535A (en) * 2003-09-01 2005-03-16 Advanced Semiconductor Eng Leadless semiconductor package and bump chip carrier semiconductor package
US6872599B1 (en) * 2002-12-10 2005-03-29 National Semiconductor Corporation Enhanced solder joint strength and ease of inspection of leadless leadframe package (LLP)
US20080102563A1 (en) * 2006-10-31 2008-05-01 Texas Instruments Incorporated Non-Pull Back Pad Package with an Additional Solder Standoff

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6650020B2 (en) * 2001-06-29 2003-11-18 Matsushia Electric Industrial Co., Ltd. Resin-sealed semiconductor device
US6872599B1 (en) * 2002-12-10 2005-03-29 National Semiconductor Corporation Enhanced solder joint strength and ease of inspection of leadless leadframe package (LLP)
TW200511535A (en) * 2003-09-01 2005-03-16 Advanced Semiconductor Eng Leadless semiconductor package and bump chip carrier semiconductor package
US20080102563A1 (en) * 2006-10-31 2008-05-01 Texas Instruments Incorporated Non-Pull Back Pad Package with an Additional Solder Standoff

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103474358A (en) * 2013-09-29 2013-12-25 华进半导体封装先导技术研发中心有限公司 Multi-circle QFN package lead frame manufacturing method

Also Published As

Publication number Publication date
TW201017845A (en) 2010-05-01

Similar Documents

Publication Publication Date Title
US7662672B2 (en) Manufacturing process of leadframe-based BGA packages
JP2840316B2 (en) Semiconductor device and manufacturing method thereof
US8067823B2 (en) Chip scale package having flip chip interconnect on die paddle
US8981575B2 (en) Semiconductor package structure
US8133759B2 (en) Leadframe
TW200818458A (en) Stackable packages for three-dimensional packaging of semiconductor dice
KR101563911B1 (en) Semiconductor package
JPH11312706A (en) Resin encapsulating semiconductor device and its manufacture, and lead frame
TWI455213B (en) Non-leaded package structure and manufacturing method thereof
TWI420630B (en) Semiconductor package structure and semiconductor package process
TWI453844B (en) Quad flat no-lead package and method for forming the same
TWI431728B (en) Semiconductor package with reinforced base
TWI479580B (en) Quad flat no-lead package and method for forming the same
CN101740539B (en) Square planar pin-free encapsulating unit and manufacturing method and lead frame thereof
US7368809B2 (en) Pillar grid array package
TWI383484B (en) Lead-free quad flat leadframe, lead-free quad flat package unit, and method for fabricating the same
US20080303134A1 (en) Semiconductor package and method for fabricating the same
CN101944520B (en) Semiconductor packaging structure and semiconductor packaging process
TWI447879B (en) Prefabricated lead frame and method for fabricating semiconductor package and the prefabricated lead frame
TWI460837B (en) Semiconductor package and lead frame thereof
JP3670371B2 (en) Semiconductor device and manufacturing method thereof
TWM589900U (en) Semiconductor package element with convex micro pins
JP2006269719A (en) Electronic device
TWI556359B (en) Quad flat non-leaded package structure and leadframe thereof
JPH11260850A (en) Semiconductor device and its manufacture