TWI380871B - XY stage device - Google Patents
XY stage device Download PDFInfo
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- TWI380871B TWI380871B TW097147115A TW97147115A TWI380871B TW I380871 B TWI380871 B TW I380871B TW 097147115 A TW097147115 A TW 097147115A TW 97147115 A TW97147115 A TW 97147115A TW I380871 B TWI380871 B TW I380871B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/01—Frames, beds, pillars or like members; Arrangement of ways
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
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- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Machine Tool Units (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
本發明特別是有關利用在大型液晶顯示器等之製造的XY載台裝置。More particularly, the present invention relates to an XY stage device that is manufactured using a large liquid crystal display or the like.
以往這種領域的技術有日本專利特開2007-216349號公報。該公報所記載之XY載台裝置具備：一對之石定盤，係朝Y軸(第1軸線)方向延伸；一對之導引件，係在各石定盤的上面朝Y軸方向延伸；一對之滑動件(第1滑動件)，係沿著各導引件移動，剖面為型；氣墊(第1氣體軸承)，係設在各滑動件的上壁部，對導引件的上面噴出空氣，支撐滑動件；Y載台(導引構件)，係朝X軸(第2軸線)方向延伸，且兩端連結在各滑動件；X載台(第2滑動件)，係沿著Y載台移動；氣墊(第2氣體軸承)，係設在X載台下面的四隅，對各石定盤的上面噴出空氣，支撐X載台；吸附盤，係配置在X載台上，真空吸附液晶顯示器用玻璃基板等工件(對象物)。藉由這種構成，隨著X載台及Y載台之移動，工件在水平面內移動。In the prior art, there is Japanese Patent Laid-Open Publication No. 2007-216349. The XY stage device described in the publication includes a pair of stone fixing plates extending in the Y-axis (first axis) direction, and a pair of guiding members extending in the Y-axis direction on the upper surface of each stone fixing plate. a pair of sliding members (the first sliding member) are moved along the respective guiding members, and the cross section is The air cushion (the first gas bearing) is provided on the upper wall portion of each slider, and ejects air to the upper surface of the guide member to support the slider; the Y stage (guide member) is directed to the X-axis (2nd) The axis extends in the direction of the axis, and the ends are connected to the respective sliders; the X stage (the second slider) moves along the Y stage; the air cushion (the second gas bearing) is disposed under the X stage. The air is ejected to the upper surface of each of the stone plates to support the X stage, and the suction plate is placed on the X stage, and a workpiece (object) such as a glass substrate for liquid crystal display is vacuum-adsorbed. With this configuration, the workpiece moves in the horizontal plane as the X stage and the Y stage move.
[專利文献1]日本專利特開2007-216349號公報[Patent Document 1] Japanese Patent Laid-Open Publication No. 2007-216349
其中，在上述XY載台裝置，為了必須確保在石定盤的上面裝設滑動件專用的導引件所需用的空間，更因為近年來因液晶顯示器等大型化使得工件也有變大的傾向，隨之使得石定盤必須變大，在石材的確保、石材加工、及石材的輸送等方面產生問題，並且產生裝置大型化之問題。In the above-described XY stage device, it is necessary to secure a space for mounting a guide for a slider on the upper surface of the stone plate, and in recent years, the workpiece tends to become larger due to an increase in size such as a liquid crystal display. With this, the stone plate must be enlarged, causing problems in the securing of the stone, the processing of the stone, and the transportation of the stone, and the problem of enlargement of the device.
本發明之目的在於提供可謀求縮小定盤且裝置小型化之XY載台裝置。An object of the present invention is to provide an XY stage device which can reduce the size of a fixed disk and reduce the size of the device.
本發明所相關之XY載台裝置，其特徵為具備：定盤，其上面被當作滑行面；第1滑動件，係沿著滑行面朝第1軸線的方向移動；導引構件，係連結在第1滑動件，且在水平面內朝與第1軸線正交的第2軸線之方向延伸；第2滑動件，係沿著導引構件朝第2軸線的延伸方向移動；及腳部，具有對滑行面噴出氣體的第2氣體軸承，且支撐第2滑動件；在第1滑動件形成有貫通部，腳部通過前述貫通部。An XY stage device according to the present invention is characterized in that: the fixed plate has a fixed surface on which a top surface is regarded as a sliding surface; and the first sliding member moves along a sliding surface in a direction of the first axis; and the guiding member is coupled The first slider extends in a horizontal plane toward a second axis orthogonal to the first axis; the second slider moves along a direction in which the guiding member extends in the second axis; and the leg has The second gas bearing that ejects gas to the sliding surface supports the second slider; the first slider has a penetration portion through which the leg portion passes.
在該XY載台裝置，第1氣體軸承可將定盤上面當作滑行面來支撐第1滑動件，腳部藉由通過形成在第1滑動件的貫通部之方式，將定盤上面當作第2氣體軸承的滑行面來支撐第2滑動件。如此地，藉由使第1氣體軸承和第2氣體軸承共有滑行面的方式，不須在定盤上面裝設第1滑動件專用的導引件，藉此可謀求縮小定盤且裝置小型化。In the XY stage device, the first gas bearing can support the first slider as a sliding surface on the upper surface of the fixed plate, and the foot portion can be regarded as a through surface formed by the first sliding member. The sliding surface of the second gas bearing supports the second slider. In this way, by arranging the sliding surfaces of the first gas bearing and the second gas bearing, it is not necessary to mount the guide for the first slider on the surface of the fixed plate, thereby reducing the size of the disk and miniaturizing the device. .
又，第1滑動件由三個第1氣體軸承支撐為佳。藉由第1滑動件由三個第1氣體軸承所支撐，可提高第1滑動件的安定性。Further, it is preferable that the first slider is supported by three first gas bearings. By the first slider being supported by the three first gas bearings, the stability of the first slider can be improved.
又，各具備一對之定盤及第1滑動件，在導引構件的兩端側各自連結著第1滑動件為佳。在一對之定盤的任一個，皆不須在上面裝設第1滑動件專用的導引件，藉此可謀求縮小各定盤且裝置更小型化。Further, it is preferable that each of the pair of fixed plates and the first sliding members is provided with a first sliding member connected to both end sides of the guiding member. In any one of the pair of fixed plates, it is not necessary to provide a guide for the first slider, and it is possible to reduce the size of each of the fixed plates and to reduce the size of the device.
又，較佳為進而具備：吸附盤，係配置在第2滑動件上，用於吸附上面所載置的對象物；及第3氣體軸承，藉由對滑行面噴出氣體的方式支撐吸附盤。藉由使第1氣體軸承和第2氣體軸承和第3氣體軸承共有滑行面的方式，不須另外裝設第3氣體軸承用的滑行面，藉此謀求縮小定盤且裝置小型化。Further, it is preferable to further include: a suction disk disposed on the second slider for adsorbing the object placed thereon; and a third gas bearing supporting the suction disk by ejecting gas to the sliding surface. By arranging the sliding surfaces of the first gas bearing, the second gas bearing, and the third gas bearing, it is not necessary to separately mount the sliding surface for the third gas bearing, thereby reducing the size of the disk and miniaturizing the device.
根據本發明所相關之XY載台裝置，可謀求縮小定盤且裝置小型化。According to the XY stage device according to the present invention, it is possible to reduce the size of the fixed disk and to reduce the size of the device.
以下，參照附圖說明本發明之XY載台裝置之較佳實施形態。Hereinafter, preferred embodiments of the XY stage apparatus of the present invention will be described with reference to the drawings.
如第1~5圖所示，XY載台裝置1具備：並設在基座2上且朝Y軸方向延伸的一對之石定盤(定盤)3、4、沿著石定盤3、4朝Y軸方向移動的Y軸載台6、當作Y軸載台6的驅動部之功能的一對之Y軸線型馬達7、8、在Y軸載台6上朝X軸方向移動的X軸載台9、當作X軸載台9的驅動部之功能的X軸線型馬達10、及配置在X軸載台9上的吸附盤11。此外，如第1、2圖所示，X軸(第2軸線)及Y軸(第1軸線)係於水平面上互相形成90度，將垂直方向定為Z軸方向，以下必要時使用X軸、Y軸、Z軸。As shown in FIGS. 1 to 5, the XY stage device 1 includes a pair of stone fixing plates (fixing plates) 3 and 4 which are provided on the susceptor 2 and extend in the Y-axis direction, and along the stone fixing plate 3 a Y-axis stage 6 moving in the Y-axis direction, a pair of Y-axis type motors 7 and 8 functioning as a driving unit of the Y-axis stage 6, and moving in the X-axis direction on the Y-axis stage 6. The X-axis stage 9 and the X-axis type motor 10 functioning as a driving portion of the X-axis stage 9 and the suction disk 11 disposed on the X-axis stage 9 are provided. Further, as shown in Figs. 1 and 2, the X-axis (second axis) and the Y-axis (first axis) are formed at 90 degrees on each other on the horizontal plane, and the vertical direction is defined as the Z-axis direction, and the X-axis is used as necessary. , Y axis, Z axis.
一方之石定盤3係由角柱狀的石材構成，在其上面藉由施行平面加工而形成有空氣軸承滑行用的上面側滑行面3a。又，在沿著Y軸方向延伸的兩側面也與上面同様地藉由施行平面加工而形成有空氣軸承滑行用的側面側滑行面3b、3c。同樣地，另一方之石定盤4的上面及兩側面也藉由施行平面加工而形成有上面側滑行面4a及側面側滑行面4b、4c。The one stone fixing plate 3 is composed of a columnar stone material, and an upper side sliding surface 3a for air bearing sliding is formed on the upper surface thereof by performing planar processing. Further, the side surface side sliding surfaces 3b and 3c for air bearing sliding are formed on both side surfaces extending in the Y-axis direction in the same manner as the upper surface by performing the planar processing. Similarly, the upper side sliding surface 4a and the side surface side sliding surfaces 4b and 4c are formed by performing planar processing on the upper surface and both side surfaces of the other stone fixing plate 4.
如第3圖及第4圖所示，Y軸載台6具備：被石定盤3、4導引而各自朝Y軸方向移動的一對之Y軸滑動件(第1滑動件)12、13、用於在石定盤3、4的上面側滑行面3a、4a將Y軸滑動件12、13各自朝Z軸方向支撐的Y軸升降空氣軸承(第1氣體軸承)14、16、用於在石定盤3、4的側面側滑行面3b、3c、4b、4c將Y軸滑動件12、13各自朝水平方向(X軸方向)支撐的Y軸偏轉空氣軸承17、18、及以架設在Y軸滑動件12、13的方式朝X軸方向延伸的導引構件19。As shown in FIGS. 3 and 4, the Y-axis stage 6 includes a pair of Y-axis sliders (first sliders) 12 that are guided by the stone fixing plates 3 and 4 and moved in the Y-axis direction. 13. Y-axis lifting air bearing (first gas bearing) 14, 16 for supporting the Y-axis sliders 12, 13 in the Z-axis direction on the upper side sliding surfaces 3a, 4a of the stone fixing plates 3, 4, respectively. Y-axis deflecting air bearings 17, 18 which support the Y-axis slides 12, 13 in the horizontal direction (X-axis direction) on the side-side sliding surfaces 3b, 3c, 4b, 4c of the stone fixing plates 3, 4, and A guide member 19 that extends in the X-axis direction is mounted on the Y-axis slides 12 and 13.
被一方之石定盤3導引件的Y軸滑動件12係剖面大致形構件，具備：與石定盤3的上面側滑行面3a相對向之構成上壁部的滑動部12a、和各自與石定盤3的側面側滑行面3b、3c相對向的一對之側壁部12b、12c，在滑動部12a上面之Y軸方向的中央位置連結著導引構件19的一端部。又，在Y軸滑動件12的滑動部12a形成各自挾持着導引構件19的朝X軸方向延伸的長圖狀之貫通孔(貫通部)21、22。The Y-axis slider 12 of the one-side stone fixing plate 3 is roughly cross-sectionally The shape member includes a sliding portion 12a that faces the upper side sliding surface 3a of the stone fixing plate 3, and a pair of side walls that face the side surface side sliding surfaces 3b and 3c of the stone fixing plate 3, respectively. The portions 12b and 12c are connected to one end portion of the guide member 19 at a central position in the Y-axis direction of the upper surface of the sliding portion 12a. Further, in the sliding portion 12a of the Y-axis slider 12, through-holes (through portions) 21 and 22 each extending in the X-axis direction of the guide member 19 are formed.
將Y軸滑動件12朝Z軸方向支撐的Y軸升降空氣軸承14，係在Y軸滑動件12的滑動部12a下面的Y軸方向之兩端部各有一個、和在Y軸方向的中央位置有一個，合計由三個構成，配置成三角點。再者，Y軸升降空氣軸承14係藉由以對上面側滑行面3a噴出空氣等氣體的方式所產生的向上力和Y軸滑動件12等本身的重量所產生的向下力之平衡的方式，而一面在與上面側滑行面3a之間保持數μm程度之間隙，一面以非接觸狀態支撐Y軸滑動件12。此外，Y軸升降空氣軸承14不僅噴出氣體，也具有吸引功能。The Y-axis lifting air bearing 14 that supports the Y-axis slider 12 in the Z-axis direction has one end at each of the Y-axis directions below the sliding portion 12a of the Y-axis slider 12, and a center in the Y-axis direction. There is one position, and the total consists of three, which are configured as triangle points. Further, the Y-axis lift air bearing 14 is a balance of the downward force generated by the upward force generated by ejecting a gas such as air to the upper side sliding surface 3a and the weight of the Y-axis slide 12 itself. On the other hand, the Y-axis slider 12 is supported in a non-contact state while maintaining a gap of about several μm between the upper side sliding surface 3a. Further, the Y-axis lift air bearing 14 not only emits gas but also has a suction function.
將Y軸滑動件12朝水平方向支撐的Y軸偏轉空氣軸承17，係在Y軸滑動件12的兩方之側壁部12b、12c各自設有二個(參照第5圖)，藉由以對側面側滑行面3b、3c各自噴出空氣等氣體的方式所產生的推斥力彼此互相平衡的方式，在與側面側滑行面3b、3c之間一面保持各數μm程度的間隙，一面以非接觸狀態支撐Y軸滑動件12。The Y-axis yaw air bearing 17 that supports the Y-axis slider 12 in the horizontal direction is provided in each of the side wall portions 12b and 12c of the Y-axis slider 12 (see FIG. 5), by In a manner in which the repulsive forces generated by the gas such as air are balanced with each other, the side-side sliding surfaces 3b and 3c are kept in a non-contact state while maintaining a gap of several μm between the side sliding surfaces 3b and 3c. The Y-axis slide 12 is supported.
被另一方之石定盤4導引的Y軸滑動件13、Y軸升降空氣軸承16及Y軸偏轉空氣軸承18，係與Y軸滑動件12、Y軸升降空氣軸承14及Y軸偏轉空氣軸承17，從Y軸方向看來形成左右對象之構成。即，Y軸滑動件13具有形成上壁部的滑動部13a、側壁部13b、13c及貫通孔23、24且連結導引構件19的另一端部，Y軸升降空氣軸承16對上面側滑行面4a噴出氣體，Y軸偏轉空氣軸承18對側面側滑行面4b、4c噴出氣體。The Y-axis slide 13 , the Y-axis lift air bearing 16 and the Y-axis deflecting air bearing 18 guided by the other stone fixing plate 4 are connected to the Y-axis slide 12 , the Y-axis lift air bearing 14 and the Y-axis deflected air. The bearing 17 is formed as a right and left object from the Y-axis direction. That is, the Y-axis slider 13 has the sliding portion 13a forming the upper wall portion, the side wall portions 13b and 13c, and the through holes 23, 24 and connecting the other end portion of the guiding member 19, and the Y-axis lifting air bearing 16 to the upper side sliding surface 4a ejects gas, and the Y-axis yaw air bearing 18 ejects gas to the side side sliding surfaces 4b, 4c.
導引X軸載台9的導引構件19形成向上開口的剖面形，而沿X軸方向延伸的導引構件19的外側兩側面被施以平面加工，該面被利用作為空氣軸承滑行所用的滑行面19a、19b(參照第5圖)。The guiding member 19 guiding the X-axis stage 9 forms an upwardly open section In the shape, the outer side surfaces of the guide members 19 extending in the X-axis direction are subjected to planar processing, which is used as the sliding surfaces 19a and 19b for air bearing sliding (see Fig. 5).
當作Y軸載台6驅動部之功能的Y軸線型馬達7、8包含：Y軸磁軛26、27，係於Y軸滑動件12、13的X軸方向之兩外側各自朝Y軸方向延伸；及Y軸線圈單元28、29，係各自設在Y軸滑動件12、13。The Y-axis type motors 7 and 8 which function as the drive unit of the Y-axis stage 6 include Y-axis yokes 26 and 27 which are respectively oriented in the Y-axis direction on both outer sides of the Y-axis slides 12 and 13 in the X-axis direction. The extension and the Y-axis coil units 28, 29 are each provided on the Y-axis slides 12, 13.
當作Y軸線型馬達7、8固定子之功能的Y軸磁軛26、27，係各自固定在配置於基座2的X軸方向之兩側的框部31、32上端，形成剖面形。在Y軸磁軛26、27內壁面固定著連設成沿Y軸方向反覆S極和N極型態的複數永久磁鐵。The Y-axis yokes 26 and 27 functioning as the stators of the Y-axis type motors 7 and 8 are fixed to the upper ends of the frame portions 31 and 32 disposed on both sides of the susceptor 2 in the X-axis direction to form a cross section. shape. A plurality of permanent magnets connected to the S-pole and N-pole forms in the Y-axis direction are fixed to the inner wall surfaces of the Y-axis yokes 26 and 27.
當作Y軸線型馬達7、8可動子之功能的Y軸線圈單元28、29，係各自固定在從Y軸滑動件12的滑動部12a朝向上方突出之支撐壁部12d上端部及Y軸滑動件13的支撐壁部13d上端部，且插入Y軸磁軛26、27內。Y軸線圈單元28、29具有複數線圈，該等複數線圈係朝Y軸方向被連結且被殼體覆蓋。又，在Y軸線圈單元28、29的線圈被通電，使其配合Y軸磁軛26、27的永久磁鐵之S極和N極型態改變磁極，在與Y軸磁軛26、27之間使各推斥力產生而獲得推力，藉此使Y軸載台6可朝Y軸方向移動。The Y-axis coil units 28 and 29, which function as the movable members of the Y-axis type motors 7, 8 are fixed to the upper end portion and the Y-axis of the support wall portion 12d which protrude upward from the sliding portion 12a of the Y-axis slider 12, respectively. The upper end portion of the support wall portion 13d of the member 13 is inserted into the Y-axis yokes 26, 27. The Y-axis coil units 28 and 29 have a plurality of coils that are coupled in the Y-axis direction and covered by the casing. Further, the coils of the Y-axis coil units 28 and 29 are energized to match the S-pole and N-pole type magnetic poles of the permanent magnets of the Y-axis yokes 26 and 27, and between the Y-axis yokes 26 and 27 The thrust force is generated to obtain the thrust, whereby the Y-axis stage 6 can be moved in the Y-axis direction.
如第3圖及第5圖所示，X軸載台9具備：X軸滑動件(第2滑動件)33，係以環繞導引構件19的方式形成向下開口的剖面形，且沿著導引構件19朝X軸方向移動；X軸腳部(腳部)34，係用於在石定盤3、4的上面側滑行面3a、4a將X軸滑動件33朝Z軸方向支撐；X軸偏轉空氣軸承36，係用於在導引構件19的滑行面19a、19b將X軸滑動件33朝水平方向(Y軸方向)支撐；及θ載台37，係設在X軸滑動件33上，使吸附盤11在Z軸周圍轉動。此外，X軸滑動件33不限於剖面形，也可形成環繞導引構件19之剖面口形。As shown in FIGS. 3 and 5, the X-axis stage 9 is provided with an X-axis slide (second slide) 33 which is formed to have a downwardly open profile so as to surround the guide member 19. Shaped and moved along the guiding member 19 in the X-axis direction; the X-axis foot portion (foot portion) 34 is used to slide the X-axis slide member 33 toward the upper side sliding surfaces 3a, 4a of the stone fixing plates 3, 4 Z-axis direction support; X-axis deflection air bearing 36 for supporting the X-axis slide 33 in the horizontal direction (Y-axis direction) on the sliding surfaces 19a, 19b of the guide member 19; and the θ stage 37, On the X-axis slide 33, the suction disk 11 is rotated around the Z-axis. In addition, the X-axis slide 33 is not limited to a section The shape may also form a cross-sectional shape surrounding the guiding member 19.
將X軸滑動件33朝Z軸方向支撐的各X軸腳部34係固定在X軸滑動件33四隅，在朝向下方延伸的支柱38之端部設有X軸升降空氣軸承(第2氣體軸承)39，支柱38分別貫通Y軸滑動件12的貫通孔21、22及Y軸滑動件13的貫通孔23、24。X軸升降空氣軸承39係藉由以對上面側滑行面3a、4a噴出空氣等氣體的方式所產生的向上力和X軸滑動件33等本身重量造成的向下力之平衡的方式，一面在與上面側滑行面3a、4a之間保持數μm程度的間隙，一面以非接觸狀態分別支撐X軸滑動件33。X軸載台9朝X軸方向移動時，X軸升降空氣軸承39可在長圓狀之貫通孔21~24內移動，且和Y軸滑動件12、13的滑動部12a、13a不會互相干涉。此外，X軸升降空氣軸承39不僅噴出氣體，亦可具有吸引功能。Each of the X-axis leg portions 34 that supports the X-axis slide 33 in the Z-axis direction is fixed to the X-axis slide 33, and an X-axis lift air bearing (second gas bearing) is provided at the end of the stay 38 that extends downward. 39, the pillars 38 penetrate the through holes 21 and 22 of the Y-axis slider 12 and the through holes 23 and 24 of the Y-axis slider 13, respectively. The X-axis lifting air bearing 39 is in a manner of balancing the upward force generated by ejecting a gas such as air to the upper side sliding surfaces 3a, 4a and the downward force caused by the weight of the X-axis slider 33 or the like itself. The X-axis slider 33 is supported in a non-contact state while maintaining a gap of about several μm between the upper side sliding surfaces 3a and 4a. When the X-axis stage 9 is moved in the X-axis direction, the X-axis lift air bearing 39 can move in the oblong through holes 21 to 24, and the sliding portions 12a, 13a of the Y-axis slides 12, 13 do not interfere with each other. . Further, the X-axis lift air bearing 39 not only emits gas but also has a suction function.
將X軸滑動件33朝水平方向支撐的X軸偏轉空氣軸承36，係在X軸滑動件33的兩方側壁部各設有二個(參照第4圖)，藉由對導引構件19的滑行面19a、19b分別噴出空氣等氣體所產生的推斥力彼此互相平衡的方式，一面在與滑行面19a、19b之間各保持數μm程度之間隙，一面以非接觸狀態支撐X軸滑動件33。The X-axis yaw air bearing 36 that supports the X-axis slider 33 in the horizontal direction is provided in each of both side wall portions of the X-axis slider 33 (refer to FIG. 4) by the pair of guiding members 19 Each of the sliding surfaces 19a and 19b is configured such that the repulsive force generated by the gas such as air is balanced with each other, and the X-axis slide 33 is supported in a non-contact state while maintaining a gap of several μm between the sliding surfaces 19a and 19b. .
當作X軸載台9驅動部之功能的X軸線型馬達10，係由在導引構件19上朝X軸方向延伸的X軸磁軛41、和設在X軸滑動件33上壁部之下方的X軸線圈單元42所構成。The X-axis type motor 10 functioning as a driving portion of the X-axis stage 9 is provided by an X-axis yoke 41 extending in the X-axis direction on the guiding member 19, and a wall portion provided on the X-axis slider 33. The lower X-axis coil unit 42 is constructed.
當作X軸線型馬達10固定子之功能的X軸磁軛41，係形成橫向開口的剖面形。在X軸磁軛41內壁面固定著連設成沿著X軸方向反覆S極和N極型態的複數永久磁鐵。The X-axis yoke 41 functioning as a stator of the X-axis type motor 10 is formed as a cross section of the lateral opening shape. On the inner wall surface of the X-axis yoke 41, a plurality of permanent magnets that are connected to overlap the S pole and the N pole type along the X-axis direction are fixed.
當作X軸線型馬達10可動子之功能的X軸線圈單元42，係固定在從X軸滑動件33上壁部朝向下方突出的支撐壁部，且插入在X軸磁軛41內。X軸線圈單元42具有複數線圈，該等複數線圈係朝X軸方向被連結且被殼體覆蓋。又，X軸線圈單元42的線圈被通電，使其配合X軸磁軛41的永久磁鐵之S極和N極型態而改變磁極，藉由在與X軸磁軛41之間產生推斥力而獲得推力的方式使X軸載台9朝X軸方向移動。The X-axis coil unit 42 functioning as a movable member of the X-axis type motor 10 is fixed to a support wall portion that protrudes downward from the upper wall portion of the X-axis slide 33, and is inserted into the X-axis yoke 41. The X-axis coil unit 42 has a plurality of coils that are coupled in the X-axis direction and covered by the casing. Further, the coil of the X-axis coil unit 42 is energized to match the S pole and the N pole type of the permanent magnet of the X-axis yoke 41 to change the magnetic pole, and a repulsive force is generated between the X-axis yoke 41 and the X-axis yoke 41. The manner in which the thrust is obtained causes the X-axis stage 9 to move in the X-axis direction.
載置有對象物的吸附盤11係Y軸方向寬度比Y軸滑動件12、13大、X軸方向寬度比X軸滑動件33大的矩形板狀構件，吸附盤11係藉由吸附盤腳部43而被支撐著。又，在吸附盤11上面例如形成多數吸附孔，用於真空吸附液晶顯示器用玻璃基板等對象物。The suction disk 11 on which the object is placed is a rectangular plate-shaped member having a larger width in the Y-axis direction than the Y-axis sliders 12 and 13 and a larger width in the X-axis direction than the X-axis slider 33, and the suction disk 11 is adsorbed by the disc. The part 43 is supported. Further, for example, a plurality of adsorption holes are formed on the upper surface of the adsorption disk 11, and an object such as a glass substrate for liquid crystal display is vacuum-adsorbed.
支撐吸附盤11的各吸附盤腳部43，係於固定在吸附盤11四隅而朝向下方延伸的支柱40下端設有吸附盤升降空氣軸承(第3氣體軸承)44。四個之吸附盤升降空氣軸承44係於上面側滑行面3a上配置有二個且於上面側滑行面4a上配置有二個，藉由以對上面側滑行面3a、4a噴出空氣等氣體的方式所產生的向上力和吸附盤11等本身重量造成的向下力之平衡的方式，一面在與上面側滑行面3a、4a之間保持數μm程度之間隙，一面以非接觸狀態各自支撐吸附盤11。吸附盤11隨著Y軸載台6及X軸載台9移動時，吸附盤升降空氣軸承44在上面側滑行面3a、4a內移動。此外，吸附盤升降空氣軸承44不僅噴出氣體，亦可具有吸引功能。Each of the suction leg portions 43 that support the suction disk 11 is provided with a suction disk lifting air bearing (third gas bearing) 44 at a lower end of the column 40 that is fixed to the suction disk 11 and extends downward. The four suction-plate lifting air bearings 44 are disposed on the upper side sliding surface 3a and two on the upper side sliding surface 4a, and the air is ejected from the upper side sliding surfaces 3a, 4a. The manner in which the upward force generated by the mode and the downward force caused by the weight of the suction disk 11 and the like are balanced, while maintaining a gap of several μm between the upper sliding surfaces 3a and 4a, and supporting the adsorption in a non-contact state. Disk 11. When the suction disk 11 moves with the Y-axis stage 6 and the X-axis stage 9, the suction-plate lift air bearing 44 moves in the upper side sliding surfaces 3a, 4a. Further, the suction-plate lift air bearing 44 not only emits gas but also has a suction function.
根據以上，XY載台裝置1係Y軸升降空氣軸承14將石定盤3上面當作滑行面且Y軸升降空氣軸承16將石定盤4上面當作滑行面，而可各自支撐Y軸滑動件12、13，X軸腳部34藉由各自通過形成在Y軸滑動件12的滑動部12a的貫通孔21、22及形成在Y軸滑動件13的滑動部13a的貫通孔23、24之方式，可將石定盤3、4上面當作X軸升降空氣軸承39的滑行面來支撐X軸滑動件33。如此地，藉由使Y軸升降空氣軸承14和X軸升降空氣軸承39共有滑行面且使Y軸升降空氣軸承16和X軸升降空氣軸承39共有滑行面的方式，而不須在石定盤3、4上面各自裝設Y軸滑動件12、13專用的導引件，藉此可謀求縮小石定盤3、4且裝置小型化。According to the above, the XY stage device 1 is a Y-axis lifting air bearing 14 which uses the upper surface of the stone fixing plate 3 as a sliding surface and the Y-axis lifting air bearing 16 serves as a sliding surface for the upper surface of the stone fixing plate 4, and can respectively support the Y-axis sliding. The members 12 and 13 and the X-axis leg portions 34 pass through the through holes 21 and 22 formed in the sliding portion 12a of the Y-axis slider 12 and the through holes 23 and 24 formed in the sliding portion 13a of the Y-axis slider 13 Alternatively, the upper surface of the stone fixing plates 3, 4 can be used as the sliding surface of the X-axis lifting air bearing 39 to support the X-axis sliding member 33. Thus, by having the Y-axis lift air bearing 14 and the X-axis lift air bearing 39 share a sliding surface and the Y-axis lift air bearing 16 and the X-axis lift air bearing 39 share a sliding surface, it is not necessary to be in the stone plate. 3 and 4 are respectively provided with guides dedicated to the Y-axis slides 12 and 13, whereby the stone fixing plates 3 and 4 can be reduced and the apparatus can be miniaturized.
又，Y軸滑動件12的滑動部12a係由三個之Y軸升降空氣軸承14所支撐，Y軸滑動件13的滑動部13a係由三個之Y軸升降空氣軸承16所支撐，因此可提高Y軸滑動件12、13之安定性。Further, the sliding portion 12a of the Y-axis slider 12 is supported by three Y-axis lifting air bearings 14, and the sliding portion 13a of the Y-axis slider 13 is supported by three Y-axis lifting air bearings 16, so The stability of the Y-axis slides 12, 13 is improved.
又，由於具備一對之石定盤3、4及Y軸滑動件12、13，在導引構件19兩端側各自連結著Y軸滑動件12、13，因此在一對之石定盤3、4之任一個皆不須在上面裝設Y軸滑動件12、13專用的導引件，藉此可謀求縮小各石定盤3、4且裝置更小型化。Further, since the pair of stone fixing plates 3, 4 and the Y-axis slide members 12, 13 are provided, the Y-axis slide members 12, 13 are coupled to the both end sides of the guide member 19, so that the pair of stone fixing plates 3 are provided. In any of the four, it is not necessary to provide a guide for the Y-axis slides 12 and 13 on the top, whereby the stone fixing plates 3 and 4 can be reduced and the apparatus can be further miniaturized.
又，藉由使Y軸升降空氣軸承14和X軸升降空氣軸承39和吸附盤升降空氣軸承44共有滑行面且使Y軸升降空氣軸承16和X軸升降空氣軸承39和吸附盤升降空氣軸承44共有滑行面的方式，不須另外裝設吸附盤升降空氣軸承44所需的滑行面，藉此可謀求縮小石定盤且裝置小型化。Further, the Y-axis lift air bearing 14 and the X-axis lift air bearing 39 and the suction-plate lift air bearing 44 share a sliding surface and the Y-axis lift air bearing 16 and the X-axis lift air bearing 39 and the suction-plate lift air bearing 44 are provided. In the manner of sharing the sliding surface, it is not necessary to separately mount the sliding surface required for the suction disk lifting air bearing 44, thereby reducing the size of the stone fixing plate and miniaturizing the device.
本發明並非受限於上述實施形態者。The present invention is not limited to the above embodiments.
例如X軸升降空氣軸承39被配置在貫通孔21~24內，但取代之，讓支柱38通過貫通孔21~24，而在貫通孔21~24下方配置X軸升降空氣軸承39之構成亦可。For example, the X-axis lifting air bearing 39 is disposed in the through holes 21 to 24, but instead of allowing the column 38 to pass through the through holes 21 to 24, the X-axis lifting air bearing 39 may be disposed below the through holes 21 to 24. .
又，Y軸滑動件12、13上壁部係形成滑動部12a、13a，但不設該上壁部，而在Y軸滑動件12、13配置與石定盤3、4的上面側滑行面3a、4a相對向的格子狀構件且將該格子狀構件當作滑動部亦可。Further, the upper wall portions of the Y-axis slides 12 and 13 are formed with the sliding portions 12a and 13a. However, the upper wall portions are not provided, and the Y-axis slide members 12 and 13 are disposed on the upper side sliding surfaces of the stone fixing plates 3 and 4. The lattice-shaped members facing the 3a and 4a may be used as the sliding portion.
1．．．XY載台裝置1. . . XY stage device
3、4．．．石定盤(定盤)3, 4. . . Stone plate (fixing plate)
3a、4a．．．上面側滑行面3a, 4a. . . Upper side sliding surface
11．．．吸附盤11. . . Adsorption plate
12、13Y．．．軸滑動件(第1滑動件)12, 13Y. . . Shaft slide (1st slide)
12a、13a．．．滑動部12a, 13a. . . Sliding portion
14、16Y．．．軸升降空氣軸承(第1氣體軸承)14, 16Y. . . Shaft lift air bearing (1st gas bearing)
19．．．導引構件19. . . Guide member
21、22、23、24．．．貫通孔(貫通部)21, 22, 23, 24. . . Through hole (through portion)
33．．．X軸滑動件(第2滑動件)33. . . X-axis slide (2nd slide)
34．．．X軸腳部(腳部)34. . . X-axis foot (foot)
39．．．X軸升降空氣軸承(第2氣體軸承)39. . . X-axis lifting air bearing (2nd gas bearing)
44．．．吸附盤升降空氣軸承(第3氣體軸承)44. . . Adsorption disc lifting air bearing (third gas bearing)
第1圖顯示本發明之實施形態所相關之XY載台裝置之立體圖。Fig. 1 is a perspective view showing an XY stage device according to an embodiment of the present invention.
第2圖係從第1圖所示之XY載台裝置拿掉吸附盤後的立體圖。Fig. 2 is a perspective view of the XY stage device shown in Fig. 1 with the suction disk removed.
第3圖係第1圖所示之XY載台裝置之俯視圖。Fig. 3 is a plan view of the XY stage device shown in Fig. 1.
第4圖係沿第3圖之Ⅳ-Ⅳ線之剖面圖。Figure 4 is a cross-sectional view taken along line IV-IV of Figure 3.
第5圖係沿第3圖之Ⅴ-Ⅴ線之剖面圖。Fig. 5 is a cross-sectional view taken along line V-V of Fig. 3.
1．．．XY載台裝置1. . . XY stage device
2．．．基座2. . . Pedestal
3、4．．．石定盤(定盤)3, 4. . . Stone plate (fixing plate)
3a、4a．．．上面側滑行面3a, 4a. . . Upper side sliding surface
3b、3c、4b、4c．．．側面側滑行面3b, 3c, 4b, 4c. . . Side sliding surface
6．．．Y軸載台6. . . Y-axis stage
7、8．．．Y軸線型馬達7, 8. . . Y-axis motor
9．．．X軸載台9. . . X-axis stage
11．．．吸附盤11. . . Adsorption plate
12、13．．．Y軸滑動件(第1滑動件)12, 13. . . Y-axis slide (1st slide)
12a、13a．．．滑動部12a, 13a. . . Sliding portion
12b、12c、13b、13c．．．側壁部12b, 12c, 13b, 13c. . . Side wall
12d、13d．．．支撐壁部12d, 13d. . . Support wall
14、16．．．Y軸升降空氣軸承(第1氣體軸承)14,16. . . Y-axis lifting air bearing (1st gas bearing)
17、18．．．Y軸軛空氣軸承17, 18. . . Y-axis yoke air bearing
19．．．導引構件19. . . Guide member
21、23．．．貫通孔(貫通部)21, 23. . . Through hole (through portion)
26、27．．．Y軸磁軛26, 27. . . Y-axis yoke
28、29．．．Y軸線圈單元28, 29. . . Y-axis coil unit
31、32．．．框部31, 32. . . Frame
33．．．X軸滑動件(第2滑動件)33. . . X-axis slide (2nd slide)
34．．．X軸脚部(脚部)34. . . X-axis foot (foot)
36．．．X軸軛空氣軸承36. . . X-axis yoke air bearing
37．．．θ載台37. . . θ stage
38．．．支柱38. . . pillar
39．．．X軸升降空氣軸承(第2氣體軸承)39. . . X-axis lifting air bearing (2nd gas bearing)
Claims (4)
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008090068A JP5242218B2 (en) | 2008-03-31 | 2008-03-31 | XY stage device |
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| TW200940235A TW200940235A (en) | 2009-10-01 |
| TWI380871B true TWI380871B (en) | 2013-01-01 |
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| TWI427577B (en) * | 2010-03-29 | 2014-02-21 | Hon Hai Prec Ind Co Ltd | Electronic device with double display screens and control method thereof |
| TWI457566B (en) * | 2012-08-07 | 2014-10-21 | Wistron Corp | Specimen apparatus |
| CN109760418B (en) * | 2017-11-10 | 2020-12-11 | 松下知识产权经营株式会社 | Conveyance stage and inkjet device using the same |
| WO2020044685A1 (en) * | 2018-08-30 | 2020-03-05 | 住友重機械工業株式会社 | Stage device |
| CN112548595A (en) * | 2020-12-25 | 2021-03-26 | 中国工程物理研究院机械制造工艺研究所 | Series composite throttling closed type hydrostatic guide rail |
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| TW511148B (en) * | 2000-07-25 | 2002-11-21 | Nikon Corp | Stage device and exposure system |
| US20030213135A1 (en) * | 2002-05-15 | 2003-11-20 | Makoto Kaneko | X-Y stage apparatus |
| US6859265B2 (en) * | 2002-04-24 | 2005-02-22 | Canon Kabushiki Kaisha | Stage device, method of controlling same, and exposure apparatus |
| TWI259550B (en) * | 2004-01-30 | 2006-08-01 | Tokyo Electron Ltd | Surfacing type substrate transportation processing apparatus |
| US7257902B2 (en) * | 2004-03-19 | 2007-08-21 | Sumitomo Heavy Industries, Ltd. | Stage device |
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| JP3687362B2 (en) * | 1998-03-31 | 2005-08-24 | 日本精工株式会社 | 2-axis moving device |
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| JP2001307983A (en) | 2000-04-20 | 2001-11-02 | Nikon Corp | Stage device and aligner |
| JP4323087B2 (en) | 2000-12-22 | 2009-09-02 | 住友重機械工業株式会社 | XY stage device |
| JP4231436B2 (en) * | 2003-03-20 | 2009-02-25 | 株式会社日立ハイテクノロジーズ | Moving stage, XY stage, head carriage, magnetic head or magnetic disk tester |
| JP4335704B2 (en) | 2003-03-28 | 2009-09-30 | 住友重機械工業株式会社 | XY stage device |
| JP4627640B2 (en) | 2004-07-09 | 2011-02-09 | Ｈｏｙａ株式会社 | Stage device and camera shake correction device using the stage device |
| JP4545697B2 (en) * | 2006-02-17 | 2010-09-15 | 住友重機械工業株式会社 | Stage equipment |
| JP4782710B2 (en) * | 2006-03-02 | 2011-09-28 | 住友重機械工業株式会社 | Stage equipment |
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2008
- 2008-03-31 JP JP2008090068A patent/JP5242218B2/en active Active
- 2008-12-04 TW TW097147115A patent/TWI380871B/en not_active IP Right Cessation
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2009
- 2009-03-31 KR KR1020090027359A patent/KR101049722B1/en not_active IP Right Cessation
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW451360B (en) * | 1998-12-11 | 2001-08-21 | Steag Rtp Systems Gmbh | Gas driven rotating susceptor for rapid thermal processing (RTP) system |
| TW511148B (en) * | 2000-07-25 | 2002-11-21 | Nikon Corp | Stage device and exposure system |
| US6859265B2 (en) * | 2002-04-24 | 2005-02-22 | Canon Kabushiki Kaisha | Stage device, method of controlling same, and exposure apparatus |
| US20030213135A1 (en) * | 2002-05-15 | 2003-11-20 | Makoto Kaneko | X-Y stage apparatus |
| TWI259550B (en) * | 2004-01-30 | 2006-08-01 | Tokyo Electron Ltd | Surfacing type substrate transportation processing apparatus |
| US7257902B2 (en) * | 2004-03-19 | 2007-08-21 | Sumitomo Heavy Industries, Ltd. | Stage device |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20090104753A (en) | 2009-10-06 |
| TW200940235A (en) | 2009-10-01 |
| JP5242218B2 (en) | 2013-07-24 |
| JP2009241192A (en) | 2009-10-22 |
| KR101049722B1 (en) | 2011-07-19 |
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| MM4A | Annulment or lapse of patent due to non-payment of fees |