KR20100056590A - Stage apparatus - Google Patents

Abstract

PURPOSE: A stage apparatus is provided to simplify a structure by installing a repulsive force generating unit on one side of a Y-axis moving body in order to maintain balance. CONSTITUTION: A stage apparatus(1) comprises a Y-axis moving body(4) and a Y-axis driving unit(3). The Y-axis driving unit transfers the Y-axis moving body The Y-axis driving unit is composed of a Y-axis shaft(8A,8B) and Y-axis movers(9A,9B) The Y-axis shaft has a magnet inside The Y-axis movers is composed of a coil that surrounds the Y-axis shaft.

Description

Stage Apparatus {Stage Apparatus}

This invention relates to the stage apparatus which a moving body moves to a XY direction on a base.

Background Art Conventionally, as a stage device, a base plate, a fixing guide fixed to one side surface extending in the Y-axis direction of the surface plate, a stator attached to an outer surface of the fixing guide, and one side surface of the surface plate The linear motor (Y-axis drive part) which consists of a stator mounted on the side of the opposite side, and a pair of movable bodies which move along the Y-axis direction opposite the upper part of each stator, and a pair of movable members Y stage (Y-axis moving body) connected and moving in the Y-axis direction, a static pressure air bearing mounting plate which is fixed to the lower part of the Y stage and disposed inward from both sides of the base, and X moving in the X-axis direction along the Y stage A stage apparatus provided with a stage (X-axis moving body) is known (see Patent Document 1, for example).

[Patent Document 1] Japanese Patent Application Laid-Open No. 03-245932

However, in the stage apparatus, the area (footprint) occupied by the apparatus in the X axis direction in which the surface plate, the fixing guide, and the stator are placed together is large, which may cause a space problem during transportation or installation of the apparatus.

This invention is made | formed in order to solve such a subject, and an object of this invention is to provide the stage apparatus which can reduce a footprint and can make device compact.

The stage device according to the present invention includes a base consisting of a base having a slide surface having an upper surface and a side surface extending in the Y-axis direction, and a pair of Y-axis shafts and a Y-axis extending along the Y-axis direction with a magnet therein. A Y-axis drive unit having a pair of Y-axis movers each formed by a coil surrounding the shaft, a main body connected to a pair of Y-axis movers on the upper surface of the base, and a Y-axis mover connected to the base side. A Y-axis moving body having opposite sides and moving in the Y-axis direction along the base upper surface and the base side surface, and an X-axis moving body moving along the main body part in the X-axis direction, which is a horizontal direction orthogonal to the Y-axis direction, The side portion is disposed below the Y-axis mover.

According to such a stage apparatus, since the Y-axis drive part which moves a Y-axis moving body uses the Y-axis movable body which consists of the Y-axis shaft which has a magnet inside, and the coil surrounding the said Y-axis shaft, a linear motor etc. Compared with the Y-axis drive part, the side part of the Y-axis movable body which opposes the base side surface can be arrange | positioned below one Y-axis mover, and the side part occupies the side of the Y-axis drive part when arrange | positioned transversely. You can omit the footprint. As a result, the footprint can be reduced, and the device can be made compact.

Further, it is preferable to have a attraction force generating means for generating attraction force between the base side surface and the side portion of the Y-axis moving body. According to such a configuration, when the repulsive force generating means (gas bearing, etc.) corresponding to the attractive force generating means is provided on one side of the Y-axis moving body, and thus balanced, the repulsive force generating means is provided on both sides to balance it. Compared with this, the device can be made compact.

The attraction force means is preferably provided on one side of the magnet or magnetic body provided on the side of the base and extending along the Y-axis direction, and on the other side of the magnet or magnetic body provided on the side of the Y-axis moving body.

Moreover, it is preferable that the side part of a Y-axis moving body supports the gas bearing which blows gas with respect to a base side surface from the outside of a side part. According to such a structure, since a gas bearing is supported by the exterior of a side part, manufacture and maintenance are easy compared with the structure in which a gas bearing is embedded in the side part.

It is preferable that the side part of a Y-axis moving body has a support part which supports the gas bearing rotatably. According to such a structure, even if the base and the moving body have low precision, even when the support part is inclined with respect to the base side surface, the reaction force and suction force between the base side surface and the gas bearing are balanced while the gas bearing rotates. The movable body can move while maintaining the clearance gap between the gas bearing and the gas bearing. By the above, it is unnecessary to give the processing precision and the assembly precision of a base and a mobile body, and can process and assemble easily.

Moreover, it is preferable that a support part supports a gas bearing through a spherical shape part. Thereby, since the gas bearing is supported by the support part which comprises the side part of a movable body through a spherical part, it can rotate freely in a three-dimensional direction centering on the contact part with a spherical part.

Moreover, it is preferable that a base bearing is supported by a support part by providing elastic force from the elastic elastic force provision part provided around the spherical-shaped part. As a result, the gas bearing can be supported by contacting the spherical shape with the optimal force, and the elastic force is imparted to allow it when the gas bearing rotates in the three-dimensional direction around the contact portion with the spherical shape. The expansion and contraction ensures that the support can be securely supported without disturbing the movement of the gas bearing.

According to the stage device according to the present invention, the footprint can be reduced, and the device can be made compact.

Best Mode for Carrying Out the Invention Preferred embodiments of the stage apparatus according to the present invention will be described below with reference to the accompanying drawings.

1 is a perspective view showing a stage device according to an embodiment of the present invention, FIG. 2 is a plan view of the stage device shown in FIG. 1, FIG. 3 is a side view of the stage device shown in FIG. 1, and FIG. 4, It is sectional drawing along the IV-IV line | wire of FIG.

As shown in FIG. 1, the stage device 1 includes a base 2, a Y-axis drive unit 3 composed of a pair of Y-axis shaft motors 3A, 3B, and a Y-axis drive unit 3. X-axis drive unit 6 and X-axis drive unit 6 each comprising a Y-axis moving body 4 moving in the Y-axis direction, a pair of X-axis shaft motors 6A, 6B provided on the Y-axis moving body 4. It is provided with the X-axis moving body 7 which moves to an X-axis direction by the. Here, in the drawing, the direction in which the X-axis shaft motors 6A and 6B extend is called the X-axis direction, and the horizontal direction orthogonal to the X-axis direction is referred to as the Y-axis direction.

The base 2 is made of a rectangular plate-like stone, and the upper surface side slide surface (upper surface) 2b for sliding the air bearing is formed on the upper surface thereof by plane processing. In addition, one side of the side surfaces extending along the Y-axis direction is subjected to planar processing similarly to the upper surface, whereby a side side sliding surface (side surface) 2d for air bearing to slide is formed. A groove portion 2e extending along the Y-axis direction is formed on this side surface sliding surface 2d. In this groove portion 2e, a magnetic material (human force generating means) 33 extending in the Y-axis direction is provided (see Fig. 5).

The Y-axis shaft motors 3A and 3B constituting the Y-axis drive unit 3 include a pair of Y-axis shafts 8A and 8B extending along the Y-axis direction with a magnet inside, and a Y-axis shaft 8A. And Y-axis movers 9A and 9B provided to surround a portion extending in the axial direction of 8B.

As shown to FIG. 1 and FIG. 2, Y-axis shaft 8A, 8B is formed by providing a some magnet along the Y-axis direction on both sides of the X-axis direction above the base 2, respectively. These magnets are joined by N poles and S poles, and these are parallel. The Y-axis shaft 8A on the side of the side slide surface 2d is supported at both ends by a pair of support members 11A fixed to both sides in the longitudinal direction of the side slide surface 2d, respectively. It is arrange | positioned at the outer side of the base 2 as seen from above. Similarly, the other Y-axis shaft 8B is supported at both ends by a pair of support members 11B standing in the base 2.

The Y-axis movers 9A and 9B are each configured by accommodating the coils surrounding the Y-axis shafts 8A and 8B in the housing. The Y-axis movers 9A and 9B cause a current to flow through the coil to generate an electromagnetic force between the Y-axis shafts 8A and 8B made of magnets, and the Y-axis direction is caused by electron interaction. Move to each.

As shown in FIGS. 1-3, the Y-axis moving body 4 opposes the main-body part 4a which opposes the upper surface side sliding surface 2b of the base 2, and the side part which opposes the side surface sliding surface 2d. Has (4b). The main body part 4a and the side part 4b are comprised by separate components, and manufacture and maintenance are easy. The main body portion 4a of the Y-axis moving body 4 is connected to the X-axis driving unit 6 and the Y-axis movable members 9A and 9B to guide beams 12 for guiding the X-axis moving body 7. And a Y-axis lift air bearing 14 for supporting the Y-axis moving body 4 in the vertical direction.

The X-axis shaft motors 6A and 6B constituting the X-axis drive unit 6 include a pair of X-axis shafts 18A and 18B extending along the X-axis direction with a magnet inside, and an X-axis shaft 18A. And X-axis movers 19A and 19B provided to surround a portion extending in the axial direction of 18B.

The X-axis shafts 18A and 18B are formed by providing a plurality of magnets along the X-axis direction, and are connected to the Y-axis movable members 9A and 9B via the supporting members 13A and 13B. These magnets are joined by N poles and S poles, and these are parallel.

The X-axis movers 19A and 19B are each configured by accommodating the coils surrounding the X-axis shafts 18A and 18B in the housing. The X-axis movers 19A and 19B cause electric current to flow through the coil, generate an electromagnetic force between the X-axis shafts 18A and 18B made of magnets, and move in the X-axis direction by electron interaction, respectively. .

As shown in Figs. 1 to 4, the guide beam 12 has a cross-section C-shape opened upward, and plane processing is performed on both sides of the outer side extending along the X-axis direction, thereby providing air bearing. Slide surfaces 12a and 12b for sliding are formed. Moreover, the guide beam 12 is arrange | positioned between the X-axis shaft 18A and the X-axis shaft 18B from the upper side, and is located so that it may be accommodated in the inside of the rectangular ring-shaped X-axis moving body 7, Both ends in the longitudinal direction are connected to the Y-axis movers 9A and 9B through the supporting members 13A and 13B, respectively.

Two Y-axis lift air bearings 14 are spaced apart in the Y-axis direction from an end portion on the side portion 4b side of the main body portion 4a of the Y-axis moving body 4 in the center of the other end portion. One is provided, and the balance between the repulsive force generated by blowing a gas such as air to the upper surface side slide surface 2b and the downward force due to the self-weight of the Y-axis moving body 4 is balanced. The Y-axis moving body 4 is supported in a non-contact state while providing a gap of about several μm between the slide surface 2b. Here, the gas bearing may not only blow out gas but also have a suction function.

As shown in FIG. 1 and FIG. 4, the X-axis moving body 7 is provided in the rectangular ring-shaped moving member 26 which surrounds the guide beam 12, and is provided in the upper surface of the moving member 26, and carries a wafer etc. The stage 24 which mounts is provided. As shown in FIG. 4, the moving member 26 has the side parts 26c and 26d which oppose the sliding surfaces 12a and 12b of the guide beam 12, and the outer surface of the side part 26c is X-axis movable. It is connected to the ruler 19A, and the outer side of the side part 26d is connected to the X-axis mover 19B, and moves with X-axis movers 19A and 19B. In this way, the positional relationship between the X-axis moving body 7 and the X-axis driving unit 6 is that the X-axis shafts 18A and 18B and the X-axis movers 19A and 19B are respectively located on both outer sides of the X-axis moving body 7. It is arranged to be arranged. In addition, the height of the center G of the X-axis moving body 7 is equal to the height of the axis center of X-axis shaft 18A, 18B and X-axis movable bodies 19A, 19B.

The X-axis moving body 7 has two X-axis yaw air bearings 27a and 27b which blow off gas to the slide surfaces 12a and 12b inside the side portions 26c and 26d of the moving member 26, respectively. Each one (see Fig. 3). In addition, the X-axis moving body 7 ejects gas to the upper surface-side sliding surface 2b of the base 2 on the lower surface 26e side of the moving member 26. 3 pieces (refer FIG. 2). Two are spaced apart in the X-axis direction at the side part 26d, and one is provided in the center of the X-axis direction of the side part 26c. The X-axis yaw air bearings 27a and 27b balance the repulsive forces from the slide surfaces 12a and 12b of the guide beam 12 with each other, so that they are several micrometers apart from the slide surfaces 12a and 12b, respectively. The X-axis moving body 7 is supported in a non-contact state while providing a gap of. Moreover, the X-axis lift air bearing 28 balances the repulsive force from the upper surface side slide surface 2b of the base 2, and the downward force by the self-weight of the X-axis moving body 7, and the base 2 The X-axis moving body 7 is supported in a non-contact state while providing a gap of about several micrometers between the upper surface side sliding surface 2b of the top surface).

Here, FIG. 5 is an enlarged view which looked at the side part of the Y-axis movable body in FIG. 1 from the Y-axis direction. As shown to FIG. 1 and FIG. 5, the side part 4b of the Y-axis movable body 4 is provided in the lower surface of 9 A of movable shafts 9A, and opposes the side surface sliding surface 2d of the base 2 The support part 16 is provided. In addition, as shown in FIG. 5, the side part 4b was provided in the Y-axis direction which blows gas toward the side surface sliding surface 2d from the blowing surface 17a which opposes the side surface sliding surface 2d. Two flat Y-axis yaw air bearings (gas bearings, see FIG. 1) 17 are supported from the outside of the side portion 4b. This Y-axis yaw air bearing 17 is supported by the support part 16 so that rotational movement is possible. Here, the gas supply pipe which is not shown in figure is connected to the Y-axis yaw air bearing 17, and gas is supplied from an external supply apparatus.

On the end face 16a of the support portion 16 on the Y-axis yaw air bearing 17 side, a spherical shape 29 having a spherical shape at its tip and contacting the back surface of the Y-axis yaw air bearing 17 is provided. Is installed. In addition, a plurality of recesses 16c are provided around the spherical portion 29 at the end face 16b opposite to the end face 16a, and the recesses 16c are through holes provided in the support 16. It opens to the end surface 16a side by this. Then, a pin 31 protruding from the back surface of the Y-axis yaw air bearing 17 is disposed so as to enter the recess 16c through the through hole. Moreover, the recessed part 17b provided with the inclination narrowing toward the ejection surface 17a side is provided in the center part of the back surface of the Y-axis yaw air bearing 17, and the spherical-shaped part 29 is provided in this recessed part 17b. Has entered the state. And the elastic spring (elastic force provision part) 32 is arrange | positioned in the compressed state between the bottom face of the recessed part 16c of the support part 16, and the flange-shaped end part 31a of the pin 31, and, thereby, The spring 32 provides an elastic force in the direction opposite to the side surface sliding surface 2d. As a result, a force pushing the Y-axis yaw air bearing 17 to the spherical shape portion 29 is applied to the support portion 16 through the recessed portion 17b and the spherical shape portion 29 at a desired pressure. do.

Further, at the center of the jetting surface 17a, a magnet (human force generating means) 17c protruding toward the groove 2e formed in the side sliding surface 2d is provided. The magnet 17c generates a suction force between the magnetic body 33 extending along the Y-axis direction at the bottom surface of the groove portion 2e of the side sliding surface 2d. Here, by adjusting the protrusion amount of the magnet 17c, the gap between the magnet 17c and the magnetic body 33 is adjusted, thereby balancing the repulsive force of the Y-axis yaw air bearing 17 and the suction force of the magnet 17c. The clearance between the Y-axis yaw air bearing 17 and the side surface sliding surface 2d is adjusted.

In the stage apparatus 1 comprised as mentioned above, the X-axis is moved by the movement of the Y-axis moving body 4 and the X-axis moving body 7 accompanying the drive of the Y-axis drive part 3 and the X-axis drive part 6. The stage 24 of the movable body 7 can be freely moved in the biaxial direction.

And according to the stage apparatus 1 of this embodiment, as the Y-axis drive part 3 which moves the Y-axis moving body 4, Y-axis shaft 8A, 8B which has a magnet inside, and this Y-axis shaft 8A Since the Y-axis movers 9A and 9B made of coils surrounding the 8B are used, the driving portion can be made smaller than the linear motor or the like, and therefore, the Y-axis movable body facing the side-side sliding surface 2d. The side part 4b of (4) can be arrange | positioned under one Y-axis mover 9A, and the footprint of the X-axis direction which the side part 4b occupies when it arrange | positions horizontally with the Y-axis drive part 3A. Can be omitted. As a result, the footprint can be reduced, and the device can be made compact.

In addition, when the Y-axis yaw air bearing 17 corresponding to the attraction force by the magnet 17c and the magnetic body 33 is provided on one side of the Y-axis moving body 4, thereby balancing The apparatus can be made more compact than in the case where the Y-axis yaw air bearing 17 is provided and balanced.

In addition, since the Y-axis yaw air bearing 17 is structured to be supported from the outside of the side portion 4b, the manufacturing and maintenance of the Y-axis yaw air bearing is embedded in the inside of the side portion 4b. It is easy. In particular, when the Y-axis yaw air bearing 17 is embedded in the support 16, the gas supply pipe must pass through the support 16, and manufacturing and maintenance are difficult. It is easy to manufacture and maintain, because the gas supply pipe can be passed from outside.

In addition, even when the base 2 and the Y-axis moving body 4 have low precision, and the support part 16 is inclined with respect to the side surface sliding surface 2d of the base 2, the Y-axis yaw air bearing 17 ), The repulsion force and the suction force between the side side slide surface 2d and the Y-axis yaw air bearing 17 are balanced, so that the gap between the side side slide surface 2d and the Y-axis yaw air bearing 17 is balanced. The Y-axis moving body 4 can move while the spacing is properly maintained. By the above, it is unnecessary to give the processing precision and the assembly precision of the base 2 and the Y-axis moving body 4, and it can process and assemble easily.

Moreover, since the Y-axis yaw air bearing 17 is supported by the support part 16 which comprises the side part 4b of the Y-axis moving body 4 through the spherical shape part 29, the spherical shape part 29 It can rotate freely in the three-dimensional direction about the contact portion with the.

In addition, since the Y-axis yaw air bearing 17 is supported by the support portion 16 by applying an elastic force from the elastic spring 32 provided around the spherical portion 29, the Y-axis yaw air bearing has an optimal force. The air bearing 17 can be supported by contacting the spherical shape 29 and the Y-axis yaw air bearing 17 rotates in a three-dimensional direction around the contact portion with the spherical shape 29. In this case, the spring 32 is stretched to allow this, and can be reliably supported against the support 16 without disturbing the movement of the Y-axis yaw air bearing 17.

Moreover, in the present Example, the following effects are exhibited. That is, a pair of X-axis shafts 18A and 18B and X-axis movers 19A and 19B constituting the X-axis driving unit 6 of the X-axis moving body 7 on both outer sides of the X-axis moving body 7. Since the X-axis movable body 7 is disposed, the position of the X-axis movable body 7 can be lowered downward in the vertical direction as compared with the prior art in which the X-axis moving body is placed on the X-axis movable body, and the X-axis shafts 18A and 18B and X are The center position of the X-axis moving body 7 can be close to the height position of the X-axis driving unit 6 having the shaft movers 19A and 19B. Thereby, the X-axis moving body 7 can be stabilized and supported by the X-axis drive part 6, and the X-axis moving body 7 can be moved without generating pitching.

In addition, a pair of X-axis shafts 18A and 18B and X-axis movers 19A and 19B are disposed outside the side portions 26c and 26d of the moving member 26 of the X-axis movable body 7, respectively. Therefore, compared with the case where it arrange | positions inside the X-axis movable body 7, the X-axis movable body 7 can be reduced in size and weight.

In addition, since the height of the center G of the X-axis moving body 7 coincides with the height of the axis centers of the X-axis shafts 18A and 18B and the X-axis movers 19A and 19B, the X-axis driving unit 6 The X-axis moving body 7 can be stabilized and supported further, and the X-axis moving body 7 can be moved without generating pitching further.

As mentioned above, although this invention was demonstrated concretely based on the Example, this invention is not limited to the said Example, For example, in the said Example, the magnet 17c of the X-axis yaw air bearing 17 is carried out, for example. Although the magnetic body 33 is provided in the side of the side surface sliding surface 2d of the base 2, although the magnetic body 33 is provided in the injection surface 17a side, arrangement | positioning of a magnet and a magnetic body may be reversed.

1 is a perspective view showing a stage device according to an embodiment of the present invention.

FIG. 2 is a plan view of the stage apparatus shown in FIG. 1.

3 is a side view of the stage device shown in FIG. 1.

4 is a cross-sectional view taken along line IV-IV of FIG. 3.

FIG. 5 is an enlarged view of the side of the Y-axis moving body in FIG. 1 viewed from the Y-axis direction. FIG.

* Description of the sign *

1: Stage device

2: Base

2b: Slide surface of upper surface (upper surface)

2d: side sliding surface (side)

3: Y axis drive part

4: Y axis moving body

4a: main body

4b: side

7: X axis moving body

8A, 8B: Y axis shaft

9A, 9B: Y axis mover

16 support

17: Y axis yaw air bearing (gas bearing)

17c: magnet (human force generating means)

32: spring (elastic force imparting part)

33: magnetic material (gravitation means)

39: spherical shape

Claims (7)

A base consisting of a slide surface having an upper surface and a side surface extending along the Y-axis direction, A Y-axis driving unit having a pair of Y-axis movers each formed by a pair of Y-axis shafts extending along the Y-axis direction with a magnet therein and a coil surrounding the Y-axis shafts; A main body portion connected to the pair of Y-axis movers and a side portion opposite to the base side surface on the base upper surface, and connected to the Y-axis mover, in the Y-axis direction along the base upper surface and the base side surface; Moving Y-axis moving body, An X-axis moving body moving along the main body in the X-axis direction, which is a horizontal direction orthogonal to the Y-axis direction, The said side part is arrange | positioned under the said Y-axis mover, The stage apparatus characterized by the above-mentioned. The method according to claim 1, And a attraction force generating means for generating attraction force between the base side surface and the side portion of the Y-axis moving body. The method according to claim 2, The manpower generating means, Any one of a magnet or a magnetic body provided on the side of the base, extending along the Y-axis direction, And a magnet provided on the side of the Y-axis moving body or the other side of the magnetic body. The method according to any one of claims 1 to 3, The side part of the said Y-axis moving body supports the gas bearing which blows off gas with respect to the said base side surface from the outside of the said side part. The method according to claim 4, And said side portion of said Y-axis moving body has a support portion for supporting said gas bearing in a rotatable manner. The method according to claim 5, And said support portion supports said gas bearing through a spherical shape portion. The method according to claim 6, And the gas bearing is supported on the support portion by applying elastic force from a stretchable elastic force applying portion provided around the spherical portion.

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