CN110206975A - A kind of three-shaft linkage fine adjustment stage - Google Patents
A kind of three-shaft linkage fine adjustment stage Download PDFInfo
- Publication number
- CN110206975A CN110206975A CN201910564400.8A CN201910564400A CN110206975A CN 110206975 A CN110206975 A CN 110206975A CN 201910564400 A CN201910564400 A CN 201910564400A CN 110206975 A CN110206975 A CN 110206975A
- Authority
- CN
- China
- Prior art keywords
- axis
- pedestal
- fine adjustment
- mover
- moved
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 56
- 241000446313 Lamella Species 0.000 claims abstract description 32
- 239000004020 conductor Substances 0.000 claims abstract description 18
- 230000001360 synchronised effect Effects 0.000 claims abstract description 5
- 238000009966 trimming Methods 0.000 abstract description 5
- 230000004308 accommodation Effects 0.000 abstract description 2
- 230000001105 regulatory effect Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 2
- 230000013011 mating Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/043—Allowing translations
- F16M11/045—Allowing translations adapted to left-right translation movement
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/043—Allowing translations
- F16M11/048—Allowing translations adapted to forward-backward translation movement
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/06—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting
- F16M11/08—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand allowing pivoting around a vertical axis, e.g. panoramic heads
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/18—Heads with mechanism for moving the apparatus relatively to the stand
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electromagnetism (AREA)
- Power Engineering (AREA)
- Details Of Measuring And Other Instruments (AREA)
Abstract
The invention discloses a kind of three-shaft linkage fine adjustment stage, the three-shaft linkage fine adjustment stage includes X-axis platform, can be along the Y-axis platform that X-axis land lengths direction is moved and can be along the rotating platform that Y-axis land lengths direction is moved；Wherein: the X-axis platform includes X-axis pedestal and can be electric conductor along the X-axis mover that X-axis base length direction is moved, the X-axis pedestal；The Y-axis platform includes Y-axis pedestal and can synchronize and be moved with the X-axis mover along the Y-axis mover that Y-axis base length direction is moved, the Y-axis pedestal, and the Y-axis pedestal is electric conductor；The rotating platform includes fixed station and several rotatable lamellas on the fixed station, and the fixed station is permanent magnet, and the fixed station can be synchronized with the Y-axis mover and be moved, and the rotatable lamella is able to carry out rotation.Trimming precision of the present invention is high, and the amplitude of accommodation is wider, and the scope of application is larger.
Description
Technical field
The invention belongs to precision machinery and Instrument technology field more particularly to a kind of three-shaft linkage fine adjustment stages.
Background technique
With the development of science and technology, there is an urgent need to high-precision in numerous technical fields such as electronics, optics, machine-building
Degree, high-resolution, the fine adjustment stage that can flexibly control are directly to be worked or be cooperated the completion of other instruments equipment high-precision
Degree positioning and measurement.
Traditional fine adjustment stage is usually X, Y twin shaft fine adjustment stage, and the amplitude of accommodation is limited, smaller scope of application, and passes
The fine adjustment stage of system is mostly that manually-operated mode or the mode being driven by motor are finely adjusted operation, cause degree of regulation compared with
It is low, the degree of regulation of fine adjustment stage will eventually be reduced.
Summary of the invention
The present invention overcomes the deficiencies in the prior art, provide a kind of three-shaft linkage fine adjustment stage, and trimming precision is high, adjusts width
Degree is wider, and the scope of application is larger.
In order to achieve the above objectives, the technical solution adopted by the present invention are as follows: a kind of three-shaft linkage fine adjustment stage, the three axis connection
Dynamic fine adjustment stage includes X-axis platform, can be along the Y-axis platform that X-axis land lengths direction is moved and can be along institute
State the rotating platform that Y-axis land lengths direction is moved；Wherein: the X-axis platform includes X-axis pedestal and can be along described
The X-axis mover that X-axis base length direction is moved, the X-axis pedestal are electric conductor；The Y-axis platform include Y-axis pedestal with
And it can be synchronized with the X-axis mover along the Y-axis mover that Y-axis base length direction is moved, the Y-axis pedestal
It is moved, the Y-axis pedestal is electric conductor；The rotating platform includes fixed station and several turns on the fixed station
Movable plate, the fixed station are permanent magnet, and the fixed station can be synchronized with the Y-axis mover and be moved, the rotatable lamella energy
Enough carry out rotation.
In a preferred embodiment of the present invention, electrical connection is provided on the X-axis pedestal, Y-axis pedestal and rotatable lamella
Part.
In a preferred embodiment of the present invention, the X-axis mover and the Y-axis mover are permanent magnet, the rotatable lamella
For electric conductor.
In a preferred embodiment of the present invention, X-axis guide rail is provided on the X-axis pedestal, the X-axis mover is located at described
In X-axis guide rail and straight reciprocating motion can be carried out along the X-axis guide rail length direction.
In a preferred embodiment of the present invention, Y-axis guide rail is provided on the Y-axis pedestal, the Y-axis mover passes through several
Sliding shoe is connect with the Y-axis guide rail.
In a preferred embodiment of the present invention, the fixed station is cylindrical structure body, and the rotatable lamella quantity is two
And be sector structure body, the rotatable lamella and the fixed station are coaxial arrangement.
In a preferred embodiment of the present invention, limited block is provided on the fixed station, the limited block can be to described
Rotatable lamella rotational angle is defined.
In a preferred embodiment of the present invention, the X-axis pedestal and Y-axis pedestal both ends are provided with limit plate.
The invention solves the defect existing in the background technology, the present invention have it is following the utility model has the advantages that
The present invention under the mating reaction of X-axis platform, Y-axis platform and rotating platform, due to electric conductor in magnetic field by
It is acted on to magnetic field force, by changing the size of corresponding current, position tune can be carried out to X-axis mover, Y-axis mover and rotatable lamella
It is whole, it realizes the fine tuning operation at each position, is controllable due to whether being passed through electric current in electric conductor, so the present invention can pass through control
Whether electric conductor is powered, and then is respectively controlled to X-axis platform, Y-axis platform, rotating platform three, and the present invention can distinguish
Operation is finely adjusted to X-axis platform, Y-axis platform, rotating platform, so that trimming precision is high, adjustable range is wide, with strong applicability.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples；
Fig. 1 is the overall structure diagram of the preferred embodiment of the present invention；
Fig. 2 is the partial exploded view of the preferred embodiment of the present invention；
In figure: 1, X-axis platform；11, X-axis pedestal；12, X-axis mover；13, X-axis guide rail；2, Y-axis platform；21, Y-axis pedestal；
22, Y-axis mover；23, Y-axis guide rail；3, rotating platform；31, fixed station；32, rotatable lamella；4, electrical connector；5, sliding shoe；6, it limits
Position block；7, limit plate.
Specific embodiment
Presently in connection with drawings and examples, the present invention is described in further detail, these attached drawings are simplified signal
Figure, the basic structure of the invention will be illustrated schematically only, therefore it only shows the composition relevant to the invention.
As shown in Figures 1 and 2, a kind of three-shaft linkage fine adjustment stage, three-shaft linkage fine adjustment stage includes X-axis platform 1, can
The Y-axis platform 2 that is moved along 1 length direction of X-axis platform and can be along the rotation that 2 length direction of Y-axis platform is moved
Platform 3；Wherein: X-axis platform 1 includes X-axis pedestal 11 and can be along the X-axis mover that 11 length direction of X-axis pedestal is moved
12, X-axis pedestal 11 is electric conductor；Y-axis platform 2 includes Y-axis pedestal 21 and can be moved along 21 length direction of Y-axis pedestal
Y-axis mover 22, Y-axis pedestal 21 can synchronize with X-axis mover 12 and be moved, and Y-axis pedestal 21 is electric conductor；Rotating platform 3
Including fixed station 31 and several rotatable lamellas 32 being located on fixed station 31, fixed station 31 is permanent magnet, and fixed station 31 can be with Y-axis
Mover 22, which synchronizes, to be moved, and rotatable lamella 32 is able to carry out rotation, and in the present invention, part to be regulated is located on rotatable lamella 32, works as X
When axis pedestal 11 is powered, Y-axis pedestal 21 and the equal no power of rotatable lamella 32, at this point, since X-axis mover 12 is permanent magnet, due to logical
Electric conductor will receive electromagnetic force in magnetic field, and X-axis pedestal 11 is stationary state, so X-axis mover 12 will be along X-axis bottom
11 length directions of seat are moved, and the fine tuning of part to be regulated in the X-axis direction is realized, when Y-axis pedestal 21 is powered, X-axis bottom
Seat 11 and the equal no power of rotatable lamella 32, at this point, since Y-axis mover 22 is permanent magnet, since electrical conductor will receive in magnetic field
Electromagnetic force, and Y-axis pedestal 21 is stationary state, so Y-axis mover 22 will be transported along 21 length direction of Y-axis pedestal
It is dynamic, the fine tuning of part to be regulated in the Y-axis direction is realized, when rotatable lamella 32 is powered, X-axis pedestal 11 and Y-axis pedestal 21 are not
Be powered, at this point, since fixed station 31 is permanent magnet, the rotatable lamella 32 of energization in magnetic field by electromagnetic force, so rotation
Piece 32 can be swung using the center of circle of fixed station 31 as axle center, and the rotary fine adjustment operation of part to be regulated is realized, noticeable
It is that in the present invention, X-axis pedestal 11, Y-axis pedestal 21 and rotatable lamella 32 can not be powered simultaneously two-by-two or three are powered simultaneously,
As being powered simultaneously, it will generate more magnetic field force, influence trimming precision, carry out X-direction fine tuning when needing to treat regulating part
When, the mode that X-axis pedestal 11 is powered can be used, when needing to treat regulating part progress Y direction fine tuning, can be used Y-axis
The mode of the energization of rotatable lamella 32, this hair can be used when needing to treat regulating part progress rotary fine adjustment in the mode that pedestal 21 is powered
It is bright in use, X-axis pedestal 11, Y-axis pedestal 21 and rotatable lamella 32 are all made of ironware and are made, it is ensured that conductive effect.
Further, electrical connector 4, electrical connector 4 are provided on X-axis pedestal 11, Y-axis pedestal 21 and rotatable lamella 32
Using copper piece, guarantee conductive effect.
Specifically, X-axis mover 12 and Y-axis mover 22 are permanent magnet, and rotatable lamella 32 is electric conductor, so that it is guaranteed that each platform
Fine tuning operation is gone on smoothly.
Further, X-axis guide rail 13 is provided on X-axis pedestal 11, X-axis mover 12 is located in X-axis guide rail 13 and can be along X
13 length direction of axis rail carries out straight reciprocating motion.
Specifically, Y-axis guide rail 23 is provided on Y-axis pedestal 21, Y-axis mover 22 passes through several sliding shoes 5 and Y-axis guide rail 23
Connection.
Specifically, fixed station 31 is cylindrical structure body, 32 quantity of rotatable lamella is two and is sector structure body, is rotated
Piece 32 and fixed station 31 are coaxial arrangement.
Further, limited block 6 is provided on fixed station 31, limited block 6 can limit 32 rotational angle of rotatable lamella
It is fixed.
Further, X-axis pedestal 11 and 21 both ends of Y-axis pedestal are provided with limit plate 7, the presence of limit plate 7, Neng Goufen
It is other that X-axis mover 12 and the stroke of Y-axis mover 22 are defined.
To sum up, the present invention is under the mating reaction of X-axis platform 1, Y-axis platform 2 and rotating platform 3, due to conduction
Body in magnetic field by magnetic field force act on, by change corresponding current size, can to X-axis mover 12, Y-axis mover 22 and
Rotatable lamella 32 carries out position adjustment, realizes the fine tuning operation at each position, is controllable due to whether being passed through electric current in electric conductor, therefore
And the present invention can by control electric conductor whether be powered, and then to X-axis platform 1, Y-axis platform 2,3 three of rotating platform respectively into
Row control, the present invention can be finely adjusted operation to X-axis platform 1, Y-axis platform 2, rotating platform 3 respectively, thus trimming precision
Height, adjustable range is wide, with strong applicability.
Based on the above description of the preferred embodiments of the present invention, through the above description, related personnel completely can be with
Without departing from the scope of the technological thought of the present invention', various changes and amendments are carried out.The technical scope of this invention
It is not limited to the contents of the specification, it is necessary to determine the technical scope according to the scope of the claims.
Claims (8)
1. a kind of three-shaft linkage fine adjustment stage, which is characterized in that the three-shaft linkage fine adjustment stage includes X-axis platform, Neng Gouyan
Y-axis platform that X-axis land lengths direction is moved and can be along the rotation that Y-axis land lengths direction is moved
Turn platform；Wherein:
The X-axis platform includes X-axis pedestal and can be described along the X-axis mover that X-axis base length direction is moved
X-axis pedestal is electric conductor；
The Y-axis platform includes Y-axis pedestal and can be described along the Y-axis mover that Y-axis base length direction is moved
Y-axis pedestal can be synchronized with the X-axis mover and be moved, and the Y-axis pedestal is electric conductor；
The rotating platform includes fixed station and several rotatable lamellas on the fixed station, and the fixed station is permanent magnet,
The fixed station can be synchronized with the Y-axis mover and be moved, and the rotatable lamella is able to carry out rotation.
2. a kind of three-shaft linkage fine adjustment stage according to claim 1, which is characterized in that the X-axis pedestal, Y-axis pedestal
And electrical connector is provided on rotatable lamella.
3. a kind of three-shaft linkage fine adjustment stage according to claim 1, which is characterized in that the X-axis mover and the Y-axis
Mover is permanent magnet, and the rotatable lamella is electric conductor.
4. a kind of three-shaft linkage fine adjustment stage according to claim 1, which is characterized in that be provided with X on the X-axis pedestal
Axis rail, the X-axis mover are located in the X-axis guide rail and can carry out linear reciprocation fortune along the X-axis guide rail length direction
It is dynamic.
5. a kind of three-shaft linkage fine adjustment stage according to claim 1, which is characterized in that be provided with Y on the Y-axis pedestal
Axis rail, the Y-axis mover are connect by several sliding shoes with the Y-axis guide rail.
6. a kind of three-shaft linkage fine adjustment stage according to claim 1, which is characterized in that the fixed station is cylindrical knot
Structure body, the rotatable lamella quantity is two and is sector structure body, and the rotatable lamella and the fixed station are coaxial arrangement.
7. a kind of three-shaft linkage fine adjustment stage according to claim 1, which is characterized in that be arranged on the fixed station limited
Position block, the limited block can be defined the rotatable lamella rotational angle.
8. a kind of three-shaft linkage fine adjustment stage according to claim 1, which is characterized in that the X-axis pedestal and the Y-axis
Pedestal both ends are provided with limit plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910564400.8A CN110206975A (en) | 2019-06-27 | 2019-06-27 | A kind of three-shaft linkage fine adjustment stage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910564400.8A CN110206975A (en) | 2019-06-27 | 2019-06-27 | A kind of three-shaft linkage fine adjustment stage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110206975A true CN110206975A (en) | 2019-09-06 |
Family
ID=67794823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910564400.8A Pending CN110206975A (en) | 2019-06-27 | 2019-06-27 | A kind of three-shaft linkage fine adjustment stage |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110206975A (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20100056590A (en) * | 2008-11-20 | 2010-05-28 | 스미도모쥬기가이고교 가부시키가이샤 | Stage apparatus |
| KR101474696B1 (en) * | 2014-09-18 | 2014-12-18 | (주)삼정오토메이션 | Xy theta stage |
| CN105485481A (en) * | 2015-12-20 | 2016-04-13 | 华南理工大学 | Displacement-adjustable precision locating platform |
| CN108173408A (en) * | 2018-01-18 | 2018-06-15 | 苏州大学 | A kind of Three Degree Of Freedom locating platform |
| CN208584013U (en) * | 2018-06-28 | 2019-03-08 | 东莞市星纳特机械设备科技有限公司 | A kind of three axis drilling machines with Z axis spring buffer structure |
| CN109449116A (en) * | 2018-12-26 | 2019-03-08 | 苏州镭明激光科技有限公司 | A kind of three-shaft linkage precision surface plate applied to LOW-K fluting apparatus |
| CN210950464U (en) * | 2019-06-27 | 2020-07-07 | 苏州泰科贝尔直驱电机有限公司 | Three-axis linkage fine adjustment platform |
-
2019
- 2019-06-27 CN CN201910564400.8A patent/CN110206975A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20100056590A (en) * | 2008-11-20 | 2010-05-28 | 스미도모쥬기가이고교 가부시키가이샤 | Stage apparatus |
| KR101474696B1 (en) * | 2014-09-18 | 2014-12-18 | (주)삼정오토메이션 | Xy theta stage |
| CN105485481A (en) * | 2015-12-20 | 2016-04-13 | 华南理工大学 | Displacement-adjustable precision locating platform |
| CN108173408A (en) * | 2018-01-18 | 2018-06-15 | 苏州大学 | A kind of Three Degree Of Freedom locating platform |
| CN208584013U (en) * | 2018-06-28 | 2019-03-08 | 东莞市星纳特机械设备科技有限公司 | A kind of three axis drilling machines with Z axis spring buffer structure |
| CN109449116A (en) * | 2018-12-26 | 2019-03-08 | 苏州镭明激光科技有限公司 | A kind of three-shaft linkage precision surface plate applied to LOW-K fluting apparatus |
| CN210950464U (en) * | 2019-06-27 | 2020-07-07 | 苏州泰科贝尔直驱电机有限公司 | Three-axis linkage fine adjustment platform |
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