KR101529890B1 - magnetic apparatus using variable permanent magnet - Google Patents

magnetic apparatus using variable permanent magnet Download PDF

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Publication number
KR101529890B1
KR101529890B1 KR1020130168537A KR20130168537A KR101529890B1 KR 101529890 B1 KR101529890 B1 KR 101529890B1 KR 1020130168537 A KR1020130168537 A KR 1020130168537A KR 20130168537 A KR20130168537 A KR 20130168537A KR 101529890 B1 KR101529890 B1 KR 101529890B1
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KR
South Korea
Prior art keywords
permanent magnet
magnetic field
unit
rail
coupling
Prior art date
Application number
KR1020130168537A
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Korean (ko)
Inventor
엄규섭
권혁중
조용섭
Original Assignee
한국원자력연구원
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Application filed by 한국원자력연구원 filed Critical 한국원자력연구원
Priority to KR1020130168537A priority Critical patent/KR101529890B1/en
Application granted granted Critical
Publication of KR101529890B1 publication Critical patent/KR101529890B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/02—Permanent magnets [PM]
    • H01F7/0205—Magnetic circuits with PM in general
    • H01F7/021—Construction of PM
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/02—Permanent magnets [PM]
    • H01F7/0231—Magnetic circuits with PM for power or force generation
    • H01F7/0242—Magnetic drives, magnetic coupling devices

Abstract

An existing magnetic device using a permanent magnet cannot adjust an intensity of magnetic field since the permanent magnet is fixed and only the determined magnetic field is applied. In addition, in order to find an optimal magnetic field distribution condition, countless test products have to be made and tested. In order to solve such a problem, the present invention relates to a magnetic field device in which a permanent magnet is movable. The magnetic field device in which the permanent magnet is movable has an effect capable of adjusting the intensity of the magnetic field in a plasma generating technique requiring magnetic field, and is directly applicable to all devices requiring magnetic field such as a semiconductor processing device and an accelerator ion source. In addition, resistance heat of I_2R is generated due to a high current DC power supply system necessary to allow electric current to flow in an electronic magnet and a flow of high current which are problems represented in an electronic magnetic field device, and a separate cooling device is not necessary in the present invention.

Description

[0001] The present invention relates to a permanent magnet type permanent magnet device,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for applying a magnetic field using a permanent magnet, and more particularly, to a permanent magnet type permanent magnet device capable of moving a permanent magnet so as to control the intensity of an applied magnetic field.

A device using all magnetic fields such as a helicon plasma ion source, an accelerator ion source, an ECR plasma device, and a plasma torch can be classified into a device using an electromagnet and a device using a permanent magnet.

A device for applying a magnetic field can be classified into a device using an electromagnet and a device using a permanent magnet. At this time, an apparatus using an electromagnet is a device that can control an applied magnetic field by controlling the intensity of a current flowing in a wire by using a principle that a magnetic field is formed around a current conductor. On the other hand, in a magnetic field apparatus using a permanent magnet, a permanent magnet is fixed and applies a magnetic field.

The electromagnet magnetic field apparatus using an electromagnet utilizes the principle that a magnetic field is formed around a current-carrying conductor. By controlling the intensity of the current flowing through the conductor, it is possible to control the applied magnetic field and use functions such as process control and plasma control . However, the electromagnet magnetic field device requires a power supply system and a cooling system, and the apparatus is complicatedly configured, which causes a problem that the initial investment cost and maintenance are time-consuming and costly.

On the other hand, since the permanent magnet magnetic field device using the permanent magnet uses a fixed permanent magnet, there is no need of a power supply system or a cooling system device, and the device is simple, which is advantageous in initial investment cost and maintenance. However, since the permanent magnet magnetic field device applies only a fixed magnetic field, it can not use the functions of the process control and plasma control of the electromagnet magnetic field device and can not control the intensity of the magnetic field. In order to find the optimum magnetic field distribution condition, Problems have arisen to create and test prototypes.

SUMMARY OF THE INVENTION The present invention has been made in order to solve the above-mentioned problems, and an object of the present invention is to provide a permanent magnet type permanent magnet device capable of moving a permanent magnet so as to minimize a change in a field profile, By using the functions of plasma control, process control, etc., which are advantages of the magnetic field variable of the electromagnet magnetic field device by changing the intensity, and simplifying the device by removing the configuration of the power supply system and the cooling system in the entire system required for the electromagnet magnetic field device And it is an object of the present invention to provide a variable permanent magnet device.

The present invention relates to a permanent magnet variable permanent magnet device, comprising: a body (100) formed of a circular plate; A plurality of permanent magnet units 200 provided on one surface of the body 100 and formed radially with respect to the center of the body 100; A rail 300 for guiding the permanent magnet 210 to radially move the permanent magnet 200 in the radial direction of the body 100 and to linearly reciprocate the permanent magnet 200 in the radial direction, ); A driving unit 400 connected to the permanent magnet unit 200 to move the permanent magnet unit 200 along the path of the rail 300; An operation part 500 provided on an outer periphery of the body 100 and connected to the driving part 400 and capable of rotating about the center of the body 100; And a control unit.

The body 100 includes a fixing pin 411 fixed to the outside of the body 100 and the rail 300 and connected to the driving unit 400; The driving unit 400 includes a sliding groove 430 through which the fixing pin 411 can be moved along a predetermined path. The sliding groove 430 is formed through a predetermined path on one side of the driving unit 400 and is fitted to the fixing pin 411. A driving tooth 412 which is in contact with and rotates in contact with the inside of the actuating part 500 on one side; A rotating pin 421 connected to the permanent magnet unit 200 and rotatable on the other side; And the operation unit 500 includes an operation tooth 510 formed inside the operation unit 500 and engaged with the drive tooth 412, And a control unit.

Also, the permanent magnet unit 200 includes a permanent magnet 210; An upper frame 220 coupled to the rail 300 to move along the path of the rail 300 and to support the permanent magnet 210; An upper frame 230 coupled with the lower frame 220 to fix the permanent magnet 210; And a control unit.

The fixing pin 411 may include a pin blade 440 for preventing the sliding groove 430 from being separated from the fixing pin 411. And a control unit.

In addition, the pin blade 440 is formed at least one.

In addition, the lower frame 220 includes first coupling means 221 for coupling with the rail 300; And further comprising:

Also, the rail 300 may include second coupling means 320 for coupling with the first coupling means 221; And third engaging means (310) for engaging one surface of the body (100);

And further comprising:

The upper frame 230 includes a first coupling portion 231 for coupling with the lower frame 220; The lower frame 220 includes a second engaging portion 222 for engaging with the upper frame 230; And further comprising:

The permanent magnet 210 has a polarity N / S of the permanent magnet 210 in a radial direction of the body 100.

The permanent magnet 210 has a polarity N / S of the permanent magnet 210 in the axial direction of the body 100.

According to the present invention, the effect of varying the magnetic field of the permanent magnet type permanent magnet device has the effect of controlling the intensity of the magnetic field in a plasma generation technique requiring a magnetic field. In the electromagnetic field application device, I 2 R resistance heat is generated due to the power system and high current flow, and a separate cooling device is required, but it is not necessary in this method.

In addition, there is an effect that can be directly applied to all devices requiring a magnetic field, such as semiconductor processing equipment and accelerator ion source.

Further, in the case of the ECR method, the electron cyclotron resonance region can be arbitrarily adjusted by changing the intensity of the magnetic field, the beam characteristic such as the beam current drawn can be adjusted by changing the density distribution of the generated plasma, Even in the case of an unused microwave ion source, the plasma state can be controlled through the change of the magnetic field.

1 is a schematic diagram of a permanent magnet variable permanent magnet apparatus according to the present invention.
2 is a schematic diagram of a permanent magnet variable permanent magnet apparatus according to the present invention.
3 is an embodiment of the driving part of the present invention.
4 is a sectional view of a permanent magnet portion and a rail of the present invention.
5 is an embodiment of the permanent magnet portion and the rail of the present invention.
6 is an embodiment of the permanent magnet variable permanent magnet apparatus of the present invention.
7 is a perspective view of a permanent magnet portion and a driving portion of an embodiment of the permanent magnet variable permanent magnet device of the present invention.

Hereinafter, the technical idea of the present invention will be described more specifically with reference to the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are included to provide a further understanding of the technical concept of the present invention, are incorporated in and constitute a part of the specification, and are not intended to limit the scope of the present invention.

The present invention relates to a device for applying a magnetic field using a permanent magnet, and a conventional magnetic device using a permanent magnet can not control the strength of a magnetic field by fixing a permanent magnet and applying only a predetermined magnetic field. In addition, it has been pointed out that it is necessary to make many prototypes and test them in order to find the optimum magnetic field distribution condition. In order to overcome such a problem, the present invention relates to a magnetic field-variable permanent magnet apparatus capable of moving a permanent magnet movably to adjust a magnetic field strength, and a magnetic field- variable effect of a permanent- It has the effect of controlling the intensity of the magnetic field in the plasma generation technology and can be directly applied to all devices requiring magnetic fields such as semiconductor processing equipment and accelerator ion source. Further, a DC power supply system of a high current required to flow a current to the electromagnet, which is a problem in the electromagnet magnetic field device, and a separate cooling device for cooling by generating resistance heat of I 2 R due to high current flow, There is no effect.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a permanent magnet type permanent magnet apparatus according to the present invention; FIG. The permanent magnet type permanent magnet apparatus of the present invention includes a body 100 formed of a circular plate and a rail 300 coupled to one surface of the body 100. The rails 300 are formed in a plurality of radial directions with respect to the center of the body 100. The rail 300 is coupled to the permanent magnet unit 200 and the permanent magnet unit 200 is moved along the path of the rail 300 to be reciprocated in a radial direction of the body 100, work out. The permanent magnet unit 200 is connected to the driving unit 400 and the permanent magnet unit 200 moves by the operation of the driving unit 400. An actuating part 500 is rotatably formed on the outer circumference of the body 100 and is connected to the driving part 400 in a cylindrical manner.

In more detail, the body 100 is formed of a circular plate, and the rails 300 are radially coupled to one surface of the body 100 in a radial manner with respect to the center of the body 100. The rail 300 is provided with a third coupling means 310 for coupling with the body 100.

The third coupling means 310 may have various embodiments, and the rail 300 may be formed at one side of the rail 300 and may have a hole through which a screw can be inserted.

The permanent magnet unit 200 includes a permanent magnet 210 having a polarity (N / S pole), a lower frame 220 coupled with the rail 300 and moving along the path of the rail 300, And an upper frame 230 coupled with the frame 220 to fix the permanent magnet 210. The upper frame 230 is provided with a rotation pin 421 connected to the driving unit 400 and one side of the lower frame 220 is coupled with a first coupling unit 221 .

The first engaging means 221 may have a variety of embodiments, and the lower frame 220 may protrude from one side of the lower frame 220, and the rail 300 coupled to the lower frame 220 may be recessed and coupled with each other. In addition, the lower frame 220 is formed with a hole passing through one side thereof, and the rail 300 is provided with a rod through which the lower frame 220 can move. This embodiment is a part of the first coupling means 221 and can be variously configured depending on the apparatus to which it is applied.

The driving unit 400 is connected to a rotation pin 421 provided on the upper frame 230 and the other side is connected to the operation unit 500 to receive the movement of the operation unit 500 do. The driving unit 400 receives the motion of the actuating unit 500 and drives the permanent magnet unit 200.

The actuating part 500 includes an operating tooth 510 formed on an inner side thereof to be engaged with the driving part 400 so as to receive a movement, The driving unit 400 receives the motion and drives the permanent magnet to move the permanent magnet.

When the actuating part 500 rotates in the clockwise direction, the driving part 400 rotates clockwise with respect to the actuating part 500 by the actuating teeth 510, The magnet unit 200 is moved in either the center direction or the outward direction of the body 100. When the actuating part 500 rotates in the counterclockwise direction, the driving part 400 rotates counterclockwise with the actuating part 500 by the actuating tooth 510, To move the permanent magnet unit (200) connected to the body (100) in one of the center direction or the outward direction of the body (100).

The magnetic field-modifying permanent magnet 210 apparatus of the present invention must simultaneously move the frames supporting the permanent magnets 210 to the same distance in order to change only the intensity of the magnetic field while minimizing the influence on the effective magnetic field distribution in the plasma generation. In addition, the direction of movement of the mold moves in the radial direction to change the magnetic field. At this time, the polarities of the permanent magnets 210 (N and S poles) may be different depending on how the magnetic field is applied. When the permanent magnet 210 desires a magnetic field in the radial direction, the N / S poles are arranged in the radial direction, and when the magnetic field in the axial direction is desired, the N / S poles are arranged in the axial direction. That is, when the N poles of one permanent magnet 210 are arranged in the center direction of the body 100, the S poles are disposed in the outward direction of the body 100, and the S poles are formed on both sides of the permanent magnet 210 The other permanent magnets 210 are arranged such that the center of the body 100 is disposed at an S pole and the outer direction of the body 100 is disposed at an N pole.

When the magnetic field is applied in the axial direction of the body 100, the N / S poles of the permanent magnet 210 are arranged in the axial direction and the polarities of the permanent magnets 210 are the same. That is, when the N pole of the permanent magnet 210 is disposed in the upper direction of the axis of the body 100, the S pole should be arranged in the lower direction of the axis of the body 100. At this time, if all of the upper axes of the permanent magnets 210 are arranged at N poles, all of the lower axes should be arranged at S poles.

In addition, the permanent magnets 210 may include a plurality of permanent magnets 210 in one of the lower frames 220, and all the polarities of the permanent magnets 210 are the same.

The upper frame 230 may include a rotation pin 421 connected to the driving unit 400. When the rotation pin 421 is connected to the permanent magnet 210, The intensity of the magnetic field is not constant. Therefore, the permanent magnet 210 is not machined for connection or other coupling of the rotation pin 421, and the rotation pin 421 is connected to the upper frame 230 for fixing the permanent magnet 210 .

Next, the operation principle of the magnetic field variable permanent magnet 210 device of the present invention will be described. The operation unit 500 includes a motor or a handle for rotating the operation unit 500 and is provided with an operation tooth 510 in the inner direction, And is formed to engage with the driving part 400. The driving unit 400 is connected to the permanent magnet unit 200 and the permanent magnet unit 200 moves along the path of the rail 300 by the operation of the driving unit 400. When the operating part 500 is rotated by a motor or a handle connected to the operating part 500, the operating teeth 510 formed inside the operating part 500 are engaged with the driving part 400 and rotated, The connected permanent magnet unit 200 moves along the path of the rail 300 by the operation of the driving unit 400.

When the actuating part 500 rotates in a clockwise direction, the driving part 400 connected to the actuating part 500 rotates in a clockwise direction, and the permanent magnet part 200 connected to the driving part 400 rotates in a clockwise direction, And moves in either the center or outward direction of the body 100 along the path of the body 300. When the actuating part 500 rotates counterclockwise, the driving part 400 connected to the actuating part 500 rotates counterclockwise and the permanent magnet part 400 connected to the driving part 400 200 move along the path of the rail 300 in one of the center direction or the outward direction of the body 100.

The permanent magnets 210 have the same distance with respect to the center of the body 100, and the intensity of the magnetic field varies with the change of the center distance of the body 100.

Next, the driving unit 400 will be described. The driving unit 400 connects the actuating unit 500 and the permanent magnet unit 200 to move the permanent magnet 210 according to the operation of the actuating unit 500. For this, the driving unit 400 may be configured in various forms.

3 is a schematic diagram of an example in which the driving unit 400 of the present invention is cranked. The crank is connected to the permanent magnet unit 200 and the operation unit 500 to connect the operation unit 500 to the permanent magnet unit 200, It acts as a sieve. In addition, the crank is coupled to the plurality of permanent magnet units 200, and simultaneously moves the permanent magnet units 200.

The crank is connected to a fixed pin formed between the outer side of the body 100 and the rail 300 and has a slide groove formed at one side of the crank through a curved line. The other side of the crank is rotatably connected to a rotary pin (421) formed on the upper frame (230). The crank is provided with a drive tooth (412) which is formed by a sawtooth portion connected to the operation portion (500). The driving teeth 412 are engaged with the operating teeth 510 provided inside the actuating part 500.

When the actuating part 500 is rotated, the driving tooth 412 and the actuating tooth 510 are engaged with each other and the crank is moved . At this time, the crank rotates about the rotation pin 421, and the fixing pin moves along the path of the slide groove. Further, when the fixing pin reaches one end of the slide groove, the driving unit 400 stops rotating.

3, a and b are indicated in the slide groove. When the crank rotates and the fixing pin is located at a, the permanent magnet unit 200 moves in the outer direction of the body 100 along the path of the rail 300, and when the fixing pin is located at b, The permanent magnet unit 200 moves in the direction of the center of the body 100 along the path of the rail 300. That is, the distance that the permanent magnet 210 can move is equal to the distance that the fixing pin moves along the path of the slide grooves a and b.

Further, the fixing pin is formed with at least one pin blade for preventing detachment from the slide groove.

6 to 7 show still another embodiment of the permanent magnet variable permanent magnet apparatus.

The driving unit 400 includes a rotating unit 410 connected to the operating unit 500 and a connecting unit 420 connecting the rotating unit 410 and the permanent magnet unit 200. The rotation means 410 has a circular outer shape with a driving tooth 412 and engages and contacts with an operation tooth 510 provided inside the operation portion 500. The center of the rotating means 410 is connected to a fixing pin 411 connected to the body 100 and rotates around the fixing pin 411. The other end of the connecting means 420 is connected to one end of the rotating means 410 and the other end of the connecting means 420 is connected to one end of the connecting means 420, (421).

When the operating part 500 rotates about the center of the body 100, the operating teeth 510 and the driving teeth 412 are engaged with each other to rotate the rotating means 410. [ When the rotating means 410 rotates, the connecting means 420 changes the rotational motion of the rotating means 410 to linear motion and transmits the linear motion to the permanent magnet unit 200. The permanent magnet unit 200 moves along the path of the rail 300 so as to repeatedly move the center and outward directions of the body 100 to adjust the intensity of the magnetic field.

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

100: Body
200: permanent magnet part 210: permanent magnet
220: lower frame 221: first engaging means
222:
230: upper frame 231: first coupling part
300: rail 310: third engagement means
320: second engaging means
400: driving unit 410: rotating means
411: Fixing pin 412: Drive tooth
413: Connecting pin
420: connecting means 421: rotating pin
500: operating part 510: operating tooth

Claims (10)

A body 100 formed of a circular plate;
A plurality of permanent magnet units 200 provided on one surface of the body 100 and formed radially with respect to the center of the body 100;
A rail 300 for guiding the permanent magnet 210 to radially move the permanent magnet 200 in the radial direction of the body 100 and to linearly reciprocate the permanent magnet 200 in the radial direction, );
A driving unit 400 connected to the permanent magnet unit 200 to move the permanent magnet unit 200 along the path of the rail 300; And
An actuating part 500 provided on the outer periphery of the body 100 and connected to the driving part 400 and capable of rotating about the center of the body 100; To
Wherein the permanent magnet device is a permanent magnet device.
The method according to claim 1,
The body 100 is
A fixing pin 411 fixed to the outside of the body 100 and the rail 300 and connected to the driving unit 400;
The driving unit 400
A sliding groove 430 formed to penetrate through a predetermined path on one surface and fitted to the fixing pin 411 and configured to move the fixing pin 411 along a predetermined path; and
A drive tooth (412) which is in contact with the inner side of the actuating part (500) and rotates in engagement;
A rotating pin 421 connected to the permanent magnet unit 200 and rotatable on the other side; And
The operation unit 500 includes an operation tooth 510 formed inside the operation unit 500 and engaged with the drive tooth 412, To
Wherein the permanent magnet device is a permanent magnet device.
3. The method of claim 2,
The permanent magnet unit 200 includes:
Permanent magnet (210);
An upper frame 220 coupled to the rail 300 to move along the path of the rail 300 and to support the permanent magnet 210; And
An upper frame 230 coupled with the lower frame 220 to fix the permanent magnet 210; Wherein the permanent magnet device is a permanent magnet device.
3. The method of claim 2,
The fixing pin 411
A pin blade (440) for preventing the sliding groove (430) from coming off from one side; To
Wherein the permanent magnet device is a permanent magnet.
5. The method of claim 4,
The pin blades 440
Wherein the at least one permanent magnet device is formed of at least one permanent magnet.
4. The apparatus of claim 3, wherein the lower frame (220)
First coupling means (221) for coupling with the rail (300);
The permanent magnet device further comprising:
7. The apparatus of claim 6, wherein the rail (300)
Second coupling means (320) for coupling with the first coupling means (221); And
Third coupling means 310 for coupling with one surface of the body 100;
The permanent magnet device further comprising:
The method of claim 3,
The upper frame 230
A first coupling portion 231 for coupling with the lower frame 220; Respectively,
The lower frame (220)
A second engaging portion 222 for engaging with the upper frame 230;
The permanent magnet device further comprising:
The magnetron of claim 2, wherein the permanent magnet (210)
Wherein a polarity (N / S) of the permanent magnet (210) is arranged in a radial direction of the body (100).
The magnetron of claim 2, wherein the permanent magnet (210)
Wherein a polarity (N / S) of the permanent magnet (210) is disposed in an axial direction of the body (100).
KR1020130168537A 2013-12-31 2013-12-31 magnetic apparatus using variable permanent magnet KR101529890B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020130168537A KR101529890B1 (en) 2013-12-31 2013-12-31 magnetic apparatus using variable permanent magnet

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020130168537A KR101529890B1 (en) 2013-12-31 2013-12-31 magnetic apparatus using variable permanent magnet

Publications (1)

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KR101529890B1 true KR101529890B1 (en) 2015-06-18

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Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030005241A (en) * 2000-03-27 2003-01-17 램 리서치 코포레이션 Method and apparatus for varying a magnetic field to control a volume of a plasma
JP2010232646A (en) * 2009-03-02 2010-10-14 Shin-Etsu Chemical Co Ltd Permanent magnet magnetic field generator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030005241A (en) * 2000-03-27 2003-01-17 램 리서치 코포레이션 Method and apparatus for varying a magnetic field to control a volume of a plasma
JP2010232646A (en) * 2009-03-02 2010-10-14 Shin-Etsu Chemical Co Ltd Permanent magnet magnetic field generator

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