TWI379732B - - Google Patents
Download PDFInfo
- Publication number
- TWI379732B TWI379732B TW98145728A TW98145728A TWI379732B TW I379732 B TWI379732 B TW I379732B TW 98145728 A TW98145728 A TW 98145728A TW 98145728 A TW98145728 A TW 98145728A TW I379732 B TWI379732 B TW I379732B
- Authority
- TW
- Taiwan
- Prior art keywords
- platform
- seat
- group
- mirror
- stroke
- Prior art date
Links
Landscapes
- Control Of Position Or Direction (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW98145728A TW201121702A (en) | 2009-12-30 | 2009-12-30 | Two stage type long stroke nano-scale precision positioning system. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW98145728A TW201121702A (en) | 2009-12-30 | 2009-12-30 | Two stage type long stroke nano-scale precision positioning system. |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201121702A TW201121702A (en) | 2011-07-01 |
TWI379732B true TWI379732B (ko) | 2012-12-21 |
Family
ID=45045739
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW98145728A TW201121702A (en) | 2009-12-30 | 2009-12-30 | Two stage type long stroke nano-scale precision positioning system. |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW201121702A (ko) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201321125A (zh) * | 2011-11-25 | 2013-06-01 | Metal Ind Res & Dev Ct | 高頻振盪主軸裝置 |
TWI476065B (zh) * | 2012-11-01 | 2015-03-11 | Univ Southern Taiwan Sci & Tec | 共平面平台機構 |
CN105116834B (zh) * | 2015-04-14 | 2018-09-04 | 宁波职业技术学院 | 一种精密控制台 |
-
2009
- 2009-12-30 TW TW98145728A patent/TW201121702A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
TW201121702A (en) | 2011-07-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN103252761B (zh) | 具有角度补偿功能的大行程二维纳米工作台系统 | |
CN103225728B (zh) | 一种压电陶瓷驱动的二维并联微动平台 | |
CN104364893B (zh) | 一种平面定位系统与使用该平面定位系统的方法 | |
CN103592824B (zh) | 一种二自由度高精度大行程气浮工件台 | |
Torralba et al. | Large range nanopositioning stage design: A three-layer and two-stage platform | |
TW200936299A (en) | Integrated large XY rotary positioning table with virtual center of rotation | |
CN203245845U (zh) | 具有角度补偿功能的大行程二维纳米工作台系统 | |
CN103309009B (zh) | 应用于光学系统的压电陶瓷直线电机调焦装置 | |
CN102528472A (zh) | 垂直轴宏微复合直线运动平台装置 | |
CN102004027B (zh) | 一种激光两坐标装置 | |
CN102528473A (zh) | 同轴宏微复合直线运动平台装置 | |
US20120156320A1 (en) | Manufacturing-process equipment | |
TWI379732B (ko) | ||
CN104895913A (zh) | 两自由度运动解耦柔性铰链机构 | |
CN202599978U (zh) | 一种三扫描器原子力显微扫描检测装置 | |
CN102069201B (zh) | 一种自由曲面超精密车削的两自由度动态误差抵消装置 | |
CN110246537A (zh) | 用于空间三自由度纳米定位平台的传动机构 | |
CN202438847U (zh) | 一种同轴宏微复合直线运动平台装置 | |
CN115388771A (zh) | 基于反射镜测头一体化设计的超精密形位误差测量仪 | |
CN212567655U (zh) | 多弹簧连接双移动板弯曲扭转耦合振动控制装置 | |
CN102841507A (zh) | 激光直写式纳米周期性结构图案制造设备 | |
TWI425334B (zh) | Hybrid six - degree - of - freedom nano - level precision positioning platform system | |
CN102722086A (zh) | 一种无接触式单自由度定位装置及其同步运动控制方法 | |
CN115388772A (zh) | 十字运动面及动态符合阿贝原则的超精密形位误差测量仪 | |
CN201950226U (zh) | 一种自由曲面超精密车削的两自由度动态误差抵消装置 |