TWI379732B - - Google Patents

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Publication number
TWI379732B
TWI379732B TW98145728A TW98145728A TWI379732B TW I379732 B TWI379732 B TW I379732B TW 98145728 A TW98145728 A TW 98145728A TW 98145728 A TW98145728 A TW 98145728A TW I379732 B TWI379732 B TW I379732B
Authority
TW
Taiwan
Prior art keywords
platform
seat
group
mirror
stroke
Prior art date
Application number
TW98145728A
Other languages
English (en)
Chinese (zh)
Other versions
TW201121702A (en
Original Assignee
Univ Nat Formosa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Formosa filed Critical Univ Nat Formosa
Priority to TW98145728A priority Critical patent/TW201121702A/zh
Publication of TW201121702A publication Critical patent/TW201121702A/zh
Application granted granted Critical
Publication of TWI379732B publication Critical patent/TWI379732B/zh

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  • Control Of Position Or Direction (AREA)
  • Length Measuring Devices By Optical Means (AREA)
TW98145728A 2009-12-30 2009-12-30 Two stage type long stroke nano-scale precision positioning system. TW201121702A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW98145728A TW201121702A (en) 2009-12-30 2009-12-30 Two stage type long stroke nano-scale precision positioning system.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW98145728A TW201121702A (en) 2009-12-30 2009-12-30 Two stage type long stroke nano-scale precision positioning system.

Publications (2)

Publication Number Publication Date
TW201121702A TW201121702A (en) 2011-07-01
TWI379732B true TWI379732B (ko) 2012-12-21

Family

ID=45045739

Family Applications (1)

Application Number Title Priority Date Filing Date
TW98145728A TW201121702A (en) 2009-12-30 2009-12-30 Two stage type long stroke nano-scale precision positioning system.

Country Status (1)

Country Link
TW (1) TW201121702A (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201321125A (zh) * 2011-11-25 2013-06-01 Metal Ind Res & Dev Ct 高頻振盪主軸裝置
TWI476065B (zh) * 2012-11-01 2015-03-11 Univ Southern Taiwan Sci & Tec 共平面平台機構
CN105116834B (zh) * 2015-04-14 2018-09-04 宁波职业技术学院 一种精密控制台

Also Published As

Publication number Publication date
TW201121702A (en) 2011-07-01

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