TWI378005B - Automatic focusing apparatus and method - Google Patents

Automatic focusing apparatus and method Download PDF

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TWI378005B
TWI378005B TW98143988A TW98143988A TWI378005B TW I378005 B TWI378005 B TW I378005B TW 98143988 A TW98143988 A TW 98143988A TW 98143988 A TW98143988 A TW 98143988A TW I378005 B TWI378005 B TW I378005B
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Taiwan
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focusing
spot
focusing element
tested
size
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TW98143988A
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Chinese (zh)
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TW201121689A (en
Inventor
Yung Hsing Wang
Pin Hao Hu
Meng Che Tsai
Shun Sheng Ke
Yang Cheng Lin
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Ind Tech Res Inst
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Description

1378005 TW5699PA1 六、發明說明: 【發明所屬之技術領域】 本發明是有關於一種聚隹租 自動聚焦裝置與方法。焦裝置,且特別是有關於-種 【先前技術】 近年來隨著電子業的蓮勃發展,許多消費 如手機、相機、投影機等’走向精緻 已 趨勢。為因應此電子產孝的^ i化已疋市%主流 方式則顯得重要。鍵零組件之加工成形 先電產業上也伴隨許多微製程, 工、切割督鑽孔、材料改質等===加 方式受祕刀片大小與機構限制,逐漸不械加工 目别取代機械加工方式的是精度高、速度快的 工方,,如雷射鑽孔、雷射切 口 度不因加工件表面之古供b 予々使田射加工之精 時聚焦點皆需==而f響’必須使雷射在加工 而my、加工表面上,如此方能避 工处旦 足而失效,或是光點面積過大產生加工尺寸嗜差=不 功效需搭配自動聚焦模組來達成精密加工之目的。為達此 傳統上自動聚焦方式多以光學式自動 主’以取代舊有機械式偵測之破壞卫件 ^二·:·' ::'=輕焦式(一)自動聚焦方式,::;隹見 式通常需要較多的光學元件’因此會有成本較高:=焦 大及組裝對位較複雜等問題。 —貝#父 3 13780051378005 TW5699PA1 VI. Description of the Invention: [Technical Field] The present invention relates to a polyimaging automatic focusing device and method. The coke device, and especially related to the species [Prior Art] In recent years, with the development of the electronics industry, many consumers such as mobile phones, cameras, projectors, etc. have become more sophisticated. In order to cope with this e-productive filial piety, it is important to have a mainstream market. The processing of key components is also accompanied by many micro-processes, such as drilling, material drilling, material modification, etc. ===plus mode is limited by the size and mechanism of the blade, and gradually replaces the machining method. It is a high-precision, high-speed work, such as laser drilling, laser cutting degree is not due to the ancient surface of the workpiece, b to make the fine focus of the field processing need to == and f ring ' The laser must be processed on the my surface, so that it can be avoided by the work, or the spot area is too large to produce the processing size. The inefficiency needs to be matched with the autofocus module to achieve precision machining. . In order to achieve this, the automatic autofocus method mostly replaces the old mechanical detection to destroy the guardian ^ 2·:·' ::'=light focus (a) auto focus mode, ::; The glimpse usually requires more optical components', so there will be higher costs: = large coke and complicated assembly alignment. —贝#父 3 1378005

TW5699PA 【發明内容】 | ,發:係有關於—種自動聚焦裝置與方法,透過簡單 之、..α構,又计即可判斷待測物之離焦 容易、體積小且製作成本低。 ^置之、、且裝 好本:二提出:種自動聚焦裝置,其包括-光源、-聚 光:用以產Π、一第一聚焦元件與一第二聚焦元件。 :偵測光束聚焦為-聚焦光束,其中,聚焦光束入射至: 待測物後,係被待測物反射以形成一反 :以感測光訊號。第-聚焦元件具有-第-焦距=: 將反射Μ之-料聚焦並在 點。第二聚焦元件具有一第二焦距,並用以將反射Li 光感測器上以形成—第二光點。光感測器 ,根據第-先點之尺寸變化與第二光點之尺寸變化 斷待測物之一離焦距離與一離焦方向。 -ttfr另提出—種自動聚焦方法,其包括步驟:提供 伯測先束,使㈣測光束經過—聚焦鏡以形成 ί射:,!、光束入射至一待測物’以經由待測物形成-反射先束,使该反射光束通過不重疊之一 聚焦元件,以在一光感測器上分別形成—第、:= ”-第二光點’·以及,根據第—光點之尺寸變化與第二朵 點之尺寸變化去判斷待測物之一離焦距離與—離隹 為讓本發明之上述内容能更明顯易懂,了文特、二二 例,並配合所附圖式,作詳細說明如下:、+實施 1378005TW5699PA [Summary of the Invention] |, hair: There is a kind of auto-focusing device and method, which can judge the defocus of the object to be tested, the volume is small, and the manufacturing cost is low through simple . ^, and installed: two proposed: a kind of autofocus device, including - light source, - concentrating: for sputum, a first focusing element and a second focusing element. The detecting beam is focused into a focused beam, wherein the focused beam is incident on the object to be tested, and is reflected by the object to be reflected to form a reverse: to sense the optical signal. The first focusing element has a -th-focal length =: the material of the reflecting pupil is focused and at the point. The second focusing element has a second focal length and is used to reflect the Li light sensor to form a second spot. The photo sensor cuts off one of the defocus distance and one defocus direction of the object to be tested according to the size change of the first-first point and the size of the second spot. - ttfr further proposes an autofocus method comprising the steps of: providing a primary beam, such that the (four) beam passes through a focusing mirror to form a radiance:,!, the beam is incident on a sample to be detected to form via the object to be tested. Reflecting the beam so that the reflected beam passes through one of the focusing elements without overlapping, to form a -, := "-second spot" on a photosensor, and according to the size of the first spot And the change of the size of the second dot to determine the defocus distance of the object to be tested and the separation of the above-mentioned contents of the present invention is more obvious and easy to understand, the Wente, the 22nd case, and the drawing, Detailed description is as follows: + implementation 137805

I k 、 · TW5699PA' 【實施方式】 請參照第1圖,其係依照本發明之實施例的一種自動 聚焦方法之流程圖,此方法包括步驟S11至S15。並請參 照第2圖’其係依照本發明之實施例的一種自動聚焦裝置 之示意圖。如第2圖所示,自動聚焦裝置1 〇包括一光源 110、一聚焦鏡120、一光感測器130、一第一聚焦元件14〇、 一第二聚焦元件150與一分光鏡160。以下係以第2圖所 示之自動聚焦裝置10說明自動聚焦方法。I k · · TW5699PA' [Embodiment] Please refer to Fig. 1, which is a flowchart of an autofocus method according to an embodiment of the present invention, the method including steps S11 to S15. Referring to Figure 2, there is shown a schematic diagram of an autofocus device in accordance with an embodiment of the present invention. As shown in Fig. 2, the autofocus device 1 includes a light source 110, a focusing mirror 120, a light sensor 130, a first focusing element 14A, a second focusing element 150 and a beam splitter 160. The autofocus method will be described below with the autofocus device 10 shown in Fig. 2.

如步驟S 11所示,先提供一偵測光束。如第2圖所示, 光源110用以產生偵測光束此光源11〇可為同調光光 源或非同調光光源,舉例來說,可為雷射光源、發光二極 體光源或白織光源。 ,接著,如步驟S12所示,使偵測光束經過一聚焦鏡以 形成-聚焦光束。如第2圖所示,分光鏡16〇設置在光源 110至光感測器130 fa1的光傳播路徑上。分光鏡160會將 偵、測光線L1折射至聚焦鏡12()。聚 — 鏡:20用以將偵測光束L1聚焦為-聚焦光束L2。 物!I後’如步驟S13所示,使聚焦光束人射至一待測 光束^由待測物形成一反射光束。如第2圖所示,聚焦 以形成㈣杨後’隨即被待測物細反射 160。 3。之後,反射光束L3再通過分光鏡 第一 ίΓ元^驟814所示,使反射光束通過不重叠之一 、弟一先點。如第2圖所示,第一聚焦 5 1378005 TW5699PA - , 元件140與第二聚焦元件150設置在分光鏡160與光感測 器130之間,並較佳地位在光感測器130之前側入光處。 另外,第一聚焦元件140與第二聚焦元件150相鄰設置, 且第一聚焦元件140及第二聚焦元件150與光感測器130 之距離相同。 光感測器130係可感測反射光束L3經過第一聚焦元 件140與第二聚焦元件150後之光訊號。較佳地,光感測 器 130 可為光二極體陣列(photo diode array, PD Array)、 電荷耗合元件(charge-coupled device, CCD)或互補金屬 氧化半導體(complementary metal oxide semiconductor, CMOS)光感測器。 並請參照第3圖,其係光束經過第一聚焦元件140與 第二聚焦元件150聚焦在光感測器130上形成光點之示意 圖。第一聚焦元件140具有第一焦距fl,並用以將反射光 束L3之一部份聚焦並在光感測器130上形成一第一光點 A。第二聚焦元件150具有第二焦距f2,並用以將反射光 束L3之另一部份聚焦在光感測器130上以形成一第二光 點B。 於自動聚焦裝置10中,第一聚焦元件140與第二聚 焦元件150相鄰設置,且第一聚焦元件140及第二聚焦元 件150與光感測器130之距離相同。為使第一光點A與第 二光點B具有明顯的尺寸差異,可設定第一焦距fl不等 於第二焦距f2。較佳地,如第2、3圖所示,第一焦距fl 小於第二焦距f2,當光感測器130與第一聚焦元件140及 第二聚焦元件150之距離恰好等於第一焦距fl之大小時, 1378005 'TW5699PA' 第光點A係為最小尺寸,而第-氺 -光點A之尺寸。 W —先點8之尺寸則大於第 第一 #後^ ^驟Sl5所不’根據第—光點之尺寸變化盘 第一先點之尺寸變化去判斷待測物之—離隹距一齙 焦方向。再如第2圖所示,…一離 預設距離係為聚焦鏡120之焦距二小。^光感測益130之 位置有可能位在聚焦鏡12Q t 於待測物200之 焦點上變動,因此第—光點;焦點後側或是在 待:物雇之位置產生變化。光感測器13〇因此可;=As shown in step S11, a detection beam is first provided. As shown in Fig. 2, the light source 110 is used to generate a detection beam. The light source 11 can be a dimming light source or a non-coherent light source. For example, it can be a laser source, a light emitting diode source or a white ray source. Then, as shown in step S12, the detection beam is passed through a focusing mirror to form a focused beam. As shown in Fig. 2, the beam splitter 16 is disposed on the light propagation path of the light source 110 to the photo sensor 130 fa1. The beam splitter 160 refracts the detected and measured light L1 to the focusing mirror 12(). Polyscope: 20 is used to focus the detection beam L1 into a -focus beam L2. Things! After I is as shown in step S13, the focused beam is directed to a beam to be measured, and a reflected beam is formed by the object to be tested. As shown in Fig. 2, the focus is formed to form (4) the posterior yang, which is then finely reflected 160 by the object to be tested. 3. Then, the reflected light beam L3 is again passed through the first mirror 814, so that the reflected light beam passes through one of the non-overlapping ones. As shown in FIG. 2, the first focus 5 1378005 TW5699PA - , the element 140 and the second focusing element 150 are disposed between the beam splitter 160 and the photo sensor 130, and preferably position in front of the photo sensor 130. Light. In addition, the first focusing element 140 is disposed adjacent to the second focusing element 150, and the first focusing element 140 and the second focusing element 150 are the same distance from the photo sensor 130. The photo sensor 130 senses the optical signal after the reflected beam L3 passes through the first focusing element 140 and the second focusing element 150. Preferably, the photo sensor 130 can be a photo diode array (PD Array), a charge-coupled device (CCD) or a complementary metal oxide semiconductor (CMOS) light. Sensor. Referring to Fig. 3, the light beam is focused on the photo sensor 130 through the first focusing element 140 and the second focusing element 150 to form a light spot. The first focusing element 140 has a first focal length fl and is used to focus a portion of the reflected beam L3 and form a first spot A on the photo sensor 130. The second focusing element 150 has a second focal length f2 and is used to focus another portion of the reflected beam L3 on the photo sensor 130 to form a second spot B. In the autofocus device 10, the first focusing element 140 is disposed adjacent to the second focusing element 150, and the first focusing element 140 and the second focusing element 150 are at the same distance from the photo sensor 130. In order to make the first spot A and the second spot B have significant dimensional differences, the first focal length fl can be set to be unequal to the second focal length f2. Preferably, as shown in FIGS. 2 and 3, the first focal length fl is smaller than the second focal length f2, and the distance between the photo sensor 130 and the first focusing component 140 and the second focusing component 150 is exactly equal to the first focal length fl Large hour, 1378005 'TW5699PA' The first light spot A is the smallest size, and the first - 氺 - the size of the light spot A. W - the size of the first point 8 is greater than the first # after ^ ^ step Sl5 does not 'according to the size of the first light spot to change the size of the first point of the disk to determine the object to be tested - from the pupil distance direction. As shown in Fig. 2, the distance from the preset distance is two smaller than the focal length of the focusing mirror 120. ^ The position of the light sensing profit 130 may be located at the focus of the focusing mirror 12Q t at the object to be tested 200, so the first light spot; the back side of the focus or the position at which the object is hired changes. The light sensor 13 is therefore available;

二Γ之尺寸變化與第二光點13之尺寸變化以判斷待两 物200之一離焦距離與一離焦方向。 、J 肺IT請參照第4、5圖,第4圖係待測物的離‘隹狀離 對應先f測器上光點之尺寸變化圖,第5圖係光點; 離焦狀蚊不意圖。第一聚焦元件 距離設定為第-聚焦元件⑽之焦距大小二:: 位在聚焦鏡120之焦點位置時,=„ 測器130上之第一丼點Λ “ 弟4圖所不,光感 ~ - 先Α之先點尺寸為最小值。如第2 Η 所不,當待測物200移動到焦點位置之 第^圖 物200與聚焦鏡12〇之 ' 「待測 時待測物扇之離隹狀能焦鏡之焦距時’此 與聚焦、鏡態。反之’當待娜物 待測物200之離焦狀態稱::’:12〇:焦距時’此時 卜丄一土 崎遇焦狀怨。如第4、5圖所+ …、确在边焦狀態或近焦狀態,第— ’ 變大。如此—來m * 尤占a之光點尺寸皆會 知待測物之離光點尺寸變化即可得 7 1378005The size change of the second pupil and the size change of the second spot 13 are used to determine the defocus distance and a defocus direction of one of the objects 200. For the J lung IT, please refer to the 4th and 5th figures. The 4th figure is the change of the size of the object to be measured from the corresponding spot of the first f detector. The fifth picture is the light spot; intention. The distance of the first focusing element is set to the focal length of the first focusing element (10). Two: When the focus is at the focus position of the focusing mirror 120, the first point on the measuring device 130 is Λ "Different from the figure 4, light perception~ - The first point size is the minimum value. If the second object is not moved, when the object to be tested 200 moves to the focus image of the object 200 and the focusing mirror 12 ' 'the distance of the object to be tested when the object to be tested is away from the focal length of the focal lens' Focus, mirror state. Conversely 'When the defocused state of the object to be tested 200 is said to be:: ':12〇: focal length' at this time, the divination of the earthworms is a bit of resentment. As shown in Figures 4 and 5... Indeed, in the edge-focus state or near-focus state, the first - 'gets bigger. So - the m* occupies a spot size will know the change of the spot size of the object to be measured. 7 1378005

TW5699PA 然而如第4、5圖所示,由於第一光點A之光點尺寸 同時對應到近焦與遠焦各一個離焦位置,因此僅分析第一 光點A之尺寸變化將只能求得待測物2〇〇之離焦距離,並 無法彳于知待測物200之離焦方向。透過適當的光學設計, 可使待測物200位於聚焦鏡12〇之一離焦位置時,此時光 感測器130上所接收到之第二光點B之尺寸^最小值。如 第4圖所示,當待測物2〇〇位於近焦父距離處時第二光 點B之尺寸為最小值。換言之,當待測物2〇〇相對該離焦 位置X於聚焦鏡120之光軸方向作前後移動時,光感測器 120上之第二光點b之尺寸將會變大。 因此在步驟S15之判斷待測物2〇〇的離焦距離與離焦 方向之步驟中,可先提供待測物位在聚f、鏡丨20之隹 點時,第-聚焦元件14〇在光感測器13()上形成光點之;: 第預°又尺寸,以及第二聚焦元件150在光感測器! 3〇上 形成光點之-第二預設尺寸n設尺寸例如是第4圖 _第-光點A於焦點上之光點尺寸S1,第二預設尺寸則 為第二光點B於焦點上之光點尺寸S2。 接著’比對所量_的第—光點尺寸與第—預設尺τ (光點尺寸SI )以推估該待測物之離焦距離。舉濟 說’可根㈣—絲財與第—預設尺寸之差值去計算注 待測物200之實際離焦距離。 ^ 然後,根據第二光點尺寸與第二預設尺寸(光 S2)之關係以判斷待測物細之離焦方向。如第4、$圖 :::當待測物200位在遠焦位置時,第二光點β之光: 係大於光點尺寸S2。因此,當第二光點尺寸大於第二 • TW5699PA' 時:則可判斷待測物2〇〇係位在一遠焦位置反 物‘二^點尺寸小於第二預設尺寸時’則可判斷待測 〇係位在—近焦位置。 由於第-聚焦元件140之第一光點Α與第 ΐ二第二光點B個別的尺寸變化對應待測物2〇〇:離 :3不相同’因此第-光點A與第二光點B之尺寸變 辦:形:互補分析,如此一來’透過綜合分析雙光點尺寸 文:主將可”快速求得待測物2〇〇之離焦距離與離焦方向。 —請參照们’其紀錄光學模擬時第-聚焦元件140盘 2聚焦元件15G個別之透鏡參數。另外,光源u〇係使 用同調性較佳之雷射_,人射光束直徑約為5咖,第一 t焦凡件M0、第三聚焦元件15〇 =者與光感測器⑽之 距離約為8.5_,聚焦鏡! 2〇之後焦距(⑽帥) 約為2_6_,聚焦鏡12〇與待側物之距離約為2杨。 iJ.TW5699PA However, as shown in Figures 4 and 5, since the spot size of the first spot A corresponds to one defocus position of the near focus and the far focus at the same time, only analyzing the size change of the first spot A will only be able to The defocus distance of the object to be tested is not enough to know the direction of defocus of the object to be tested 200. Through the appropriate optical design, the object 200 can be placed at a defocus position of the focusing mirror 12, at which time the second spot B of the photosensor 130 receives the minimum value. As shown in Fig. 4, the size of the second spot B is the minimum when the object to be tested 2 is located at a near-focal distance. In other words, when the object to be tested 2 is moved back and forth with respect to the defocus position X in the optical axis direction of the focusing mirror 120, the size of the second spot b on the photo sensor 120 will become large. Therefore, in the step of determining the defocusing distance and the defocusing direction of the object to be tested 2 in step S15, the first focusing element 14 may be provided when the object to be tested is at the point of the poly f and the mirror 20 A light spot is formed on the photo sensor 13 (); the first pre-size is again, and the second focusing element 150 is in the photo sensor! The second predetermined size n is set to be the light spot size S1 of the fourth image_the first light spot A at the focus, and the second predetermined size is the second light spot B of the focus point. The spot size on the spot is S2. Then, the first light spot size and the first predetermined ruler τ (light spot size SI) are compared to estimate the defocus distance of the object to be tested. Let's say 'Kogen' (4) - the difference between the silk and the first - preset size to calculate the actual defocus distance of the object to be tested 200. Then, according to the relationship between the second spot size and the second preset size (light S2), the fine defocus direction of the object to be tested is judged. For example, 4th, $Fig ::: When the object to be tested is at the far focus position, the light of the second spot β is greater than the spot size S2. Therefore, when the second spot size is larger than the second TW5699PA': it can be judged that the object 2 〇〇 is in a far focus position and the object 'two points are smaller than the second preset size' The sputum is in the near-focus position. Since the size change of the first spot Α of the first focusing element 140 and the second spot B of the second focusing point corresponds to the object to be tested 2: from: 3 is not the same 'the first light spot A and the second light spot The size of B changes: shape: complementary analysis, so that 'through the comprehensive analysis of the double-spot size text: the main will be able to quickly find the defocus distance and defocus direction of the object to be measured 2 —. - Please refer to them' In the optical simulation of the recording, the first focusing element 140 disc 2 focuses the individual lens parameters of the component 15G. In addition, the light source u〇 uses a better coherent laser _, the human beam diameter is about 5 coffee, the first t focal unit M0, the third focusing element 15〇=the distance from the photo sensor (10) is about 8.5_, the focusing mirror! After 2〇, the focal length ((10) handsome) is about 2_6_, and the distance between the focusing mirror 12〇 and the object to be side is about 2 Yang. iJ.

第一聚焦元件 150 根據實驗結果’當待測物2〇〇位在焦點位置上,第 光點A之光點尺寸直徑約為丨格〇格長度為 2mm),第 光點B之光點尺寸直徑約為4格。當待測物雇位在遠 位置約働叫處時,第-光點A之光點直徑約為2格 1378005 TW5699PA · * 第二光點B之光點直徑約為5格。當待測物200位在近焦 位置約400μιη處時,第一光點A之光點直徑亦為2格, 第二光點B之光點直徑約為3格。因此,透過光學模擬與 實驗驗證,本實施例之自動聚焦裝置與方法確實為可行之 技術。 本實施例上述說明雖然是以第2圖之結構為主,然本 發明之自動聚焦裝置與方法並不限定於此。請參照第6 圖,其係自動聚焦裝置具有其他光路設計之示意圖。第6 圖之自動聚焦裝置20之分光鏡260設計與分光鏡160不 同。如第2圖所示,聚焦鏡120設置在分光鏡160之一側, 第一聚焦元件140與第二聚焦元件150則設置在相反該聚 焦鏡120之另一側。然而在第6圖中,聚焦鏡120設置在 分光鏡260之一側,光源110則設置在相反於該聚焦鏡120 之另一側。偵測光束L1可穿透分光鏡260,再透過聚焦鏡 120形成聚焦光束L2。之後聚焦光束L2入射至待測物200 上,隨即被待測物200反射以形成反射光束L3。之後,反 射光束L3再被分光鏡260折射至第一聚焦元件140與第 二聚焦元件150,並透過第一聚焦元件140與第二聚焦元 件150在光感測器130上形成不同的光點。 上述實施例雖是以第一聚焦元件140與第二聚焦元 件150具有不同焦距大小作說明,然本發明並不限定於 此。請參照第7圖,其係自動聚焦裝置具有其他聚焦元件 配置之示意圖。自動聚焦裝置30之第一聚焦元件340與 第二聚焦元件350具有相同的焦距大小,然而,第一聚焦 元件340、第二聚焦元件350與光感測器130之距離不同, 1378005The first focusing element 150 according to the experimental result 'When the object to be tested 2 is clamped at the focus position, the spot size of the light spot A is about 2 mm in length, and the spot size of the light spot B is The diameter is about 4 grids. When the object to be tested is hired at a far position, the spot diameter of the first spot A is about 2 grids. 1378005 TW5699PA · * The spot diameter of the second spot B is about 5 grids. When the object to be tested is 200 bits at a near focus position of about 400 μm, the spot diameter of the first spot A is also 2 cells, and the spot diameter of the second spot B is about 3 grids. Therefore, the optical focusing apparatus and method of the present embodiment are indeed feasible techniques through optical simulation and experimental verification. The above description of the present embodiment is mainly based on the structure of Fig. 2, but the autofocus apparatus and method of the present invention are not limited thereto. Please refer to Figure 6, which is a schematic diagram of the autofocus device with other optical path designs. The beam splitter 260 of the autofocus device 20 of Fig. 6 is different in design from the beam splitter 160. As shown in Fig. 2, the focusing mirror 120 is disposed on one side of the beam splitter 160, and the first focusing element 140 and the second focusing element 150 are disposed on the opposite side of the focusing mirror 120. However, in Fig. 6, the focusing mirror 120 is disposed on one side of the dichroic mirror 260, and the light source 110 is disposed on the opposite side of the focusing mirror 120. The detecting beam L1 can penetrate the beam splitter 260 and then pass through the focusing mirror 120 to form a focused beam L2. The focused beam L2 is then incident on the object to be tested 200, and then reflected by the object to be tested 200 to form a reflected beam L3. Thereafter, the reflected light beam L3 is refracted by the beam splitter 260 to the first focusing element 140 and the second focusing element 150, and the first focusing element 140 and the second focusing element 150 form different spots on the photo sensor 130. Although the above embodiment has been described with different focal lengths of the first focusing element 140 and the second focusing element 150, the present invention is not limited thereto. Please refer to Fig. 7, which is a schematic diagram of the autofocus device with other focusing component configurations. The first focusing element 340 of the autofocus device 30 has the same focal length as the second focusing element 350. However, the distance between the first focusing element 340 and the second focusing element 350 is different from that of the photo sensor 130, 1378005

TW5699PA 藉此以產生不同井點 200之離焦狀陣… 效果’因此也可判斷待測物 聚焦元件更可視襄置需求構成-微透^陣歹^ 將一 ^:士述實施例所揭露之自動聚焦裝置與方法,係 井戾二、έ Α射到待測物上,經由該待測物產生之反射 兩個隹辟:由兩個相鄰排列且焦距不同之聚焦元件,或是 …距相同但與光感測器距離不同之聚焦元件,在光感 測'上形成兩個大小不一之光點,藉由兩個光點尺寸變; 2同去判斷待測物之離焦程度與離焦方向。由於在光路 聚焦元件即可判斷待測物之離焦狀 : 付 *焦裝置之結構簡單卻仍可提供高量測精 、也使仔裝置之組裝更為容易’且能夠達到有效 細減體積以及降低成本的功效。 综上所述,雖然本發明已揭露實施例如上,然其並非 用以限^本發明。本發明所屬技術領域中具有通常知識 者,在不脫離本發明之精神和範圍内,當可作各種之更^ 與潤飾。因此,本發明之保護範圍當視後附之申請專利μ 圍所界定者為準。 【圖式簡單說明】 第1圖係依照本發明之實施例的一種自動聚焦方法 之流程圖。 “' / 第2圖係依照本發明之實施例的—種自動聚焦妒置 之示意圖。 义 第3圖係光束經過第一聚焦元件與第二聚焦元件俨 1378005 TW5699PA 1 1 焦在光感測器上形成光點之示意圖。 第4圖係待測物的離焦狀態對應光感測器上光點之 尺寸變化圖。 第5圖係光點於不同離焦狀態之示意圖。 第6圖係自動聚焦裝置具有其他光路設計之示意圖。 第7圖係自動聚焦裝置具有其他聚焦元件配置之示 意圖。 【主要元件符號說明】 10、20、30 :自動聚焦裝置 110 :光源 120 :聚焦鏡 130 :光感測器 140、340 :第一聚焦元件 150、350 :第二聚焦元件 160、260 :分光鏡 200 :待測物 A :第一光點 B :第二光點 L1 偵測光束 L2 聚焦光束 L3 反射光束TW5699PA is used to generate the defocusing array of different well points 200. The effect 'Therefore, it can also be judged that the focusing component of the object to be tested is more visible to the needs of the device - the micro-transparent ^ ^ ^ ^ ^: The embodiment disclosed in the article The autofocus device and method are directed to the object to be tested, and the reflection generated by the object to be tested is two reflections: two adjacent focusing elements with different focal lengths, or The same focusing element with different distance from the light sensor forms two light spots of different sizes on the light sensing, which are changed by the two spot sizes; 2 to determine the degree of defocus of the object to be tested Defocus direction. Since the focusing component of the optical path can judge the defocusing of the object to be tested: the structure of the paying and focusing device is simple, but still provides high-precision measurement, and makes assembly of the device easier, and can achieve effective volume reduction and Reduce the cost. In summary, although the invention has been disclosed, for example, it is not intended to limit the invention. It will be apparent to those skilled in the art that the present invention can be practiced in various ways without departing from the spirit and scope of the invention. Therefore, the scope of the invention is defined by the appended claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart showing an autofocus method in accordance with an embodiment of the present invention. "' / Figure 2 is a schematic diagram of an autofocus device in accordance with an embodiment of the present invention. Figure 3 shows a beam passing through a first focusing element and a second focusing element 俨1378005 TW5699PA 1 1 coke formed on the photo sensor Schematic diagram of the light spot. Fig. 4 is a diagram showing the change of the size of the light spot on the photosensor according to the defocus state of the object to be tested. Fig. 5 is a schematic view of the light spot in different defocus states. Fig. 6 is an autofocus device Schematic diagram of other optical path design. Fig. 7 is a schematic diagram of the autofocus device with other focusing component configurations. [Main component symbol description] 10, 20, 30: autofocus device 110: light source 120: focusing mirror 130: photo sensor 140, 340: first focusing element 150, 350: second focusing element 160, 260: beam splitter 200: object to be tested A: first spot B: second spot L1 detecting beam L2 focusing beam L3 reflecting beam

Claims (1)

1378005 101年.07月24日修正替換頁 2012/7/24_la 申復 & 修正 七、申請專利範圍: 1. 一種自動聚焦裝置,包括: 一光源,用以產生一偵測光束; 一聚焦鏡,用以將該偵測光束聚焦為一聚焦光束,其 中,該聚焦鏡具有一焦點,該聚焦光束係入射至一待測 物,並被該待測物反射以形成一反射光束; 一光感測器,用以感測光訊號;1378005 101. 07.24.24 Revision replacement page 2012/7/24_la Application & Amendment 7. Scope of application: 1. An autofocus device comprising: a light source for generating a detection beam; a focusing mirror And focusing the detection beam into a focused beam, wherein the focusing mirror has a focus, the focused beam is incident on an object to be tested, and is reflected by the object to be reflected to form a reflected beam; a detector for sensing an optical signal; 一第一聚焦元件,具有一第一焦距,該第一聚焦元件 用以將該反射光束之一部份聚焦,以在該光感測器上形成 一第一光點;以及 一第二聚焦元件,具有一第二焦距,該第二聚焦元件 用以將該反射光束之另一部份聚焦,以在該光感測器上形 成一第二光點,其中,該光感測器係根據該第一光點之尺 寸變化與該第二光點之尺寸變化以判斷該待測物之一離 焦距離與一離焦方向,且該第一聚焦元件與該第二聚焦元 件相鄰設置。a first focusing element having a first focal length, the first focusing element for focusing a portion of the reflected beam to form a first spot on the photo sensor; and a second focusing element Having a second focal length, the second focusing element is configured to focus another portion of the reflected beam to form a second spot on the photo sensor, wherein the photo sensor is configured according to the photo sensor The size change of the first spot and the size change of the second spot determine a defocus distance and a defocus direction of the object to be tested, and the first focusing element is disposed adjacent to the second focusing element. 2. 如申請專利範圍第1項所述之自動聚焦裝置,其 中,該待測物之位置係在該聚焦鏡之該焦點前側、該焦點 後側或是該焦點上。 3. 如申請專利範圍第1項所述之自動聚焦裝置,更 包括一分光鏡,其設置在該光源至該光感測器之一光傳播 路徑上。 4.如申請專利範圍第3項所述之自動聚焦裝置,其 中,該聚焦鏡設置在該分光鏡之一側,該第一聚焦元件與 該第二聚焦元件則設置在相反該聚焦鏡之另一側。 098143988- 1013282538-0 13 1378005 _ 101年07月24日梭正畚換亩 2012/7/24_la 申復 & 修正 5. 如申請專利範圍第3項所述之自動聚焦裝置,其 中,該聚焦鏡設置在該分光鏡之一側,該光源則設置在相 反於該聚焦鏡之另一侧。 6. 如申請專利範圍第1項所述之自動聚焦裝置,其 中該第一聚焦元件及該第二聚焦元件與該光感測器之距 離相同,而該第一焦距不等於該第二焦距。 7. 如申請專利範圍第6項所述之自動聚焦裝置,其 中,該第一焦距小於該第二焦距。2. The autofocus device of claim 1, wherein the position of the object to be tested is at a front side of the focus of the focusing mirror, a rear side of the focus, or the focus. 3. The autofocus device of claim 1, further comprising a beam splitter disposed on the light propagation path of the light source to the light sensor. 4. The autofocus device of claim 3, wherein the focusing mirror is disposed on one side of the beam splitter, and the first focusing element and the second focusing element are disposed opposite to the focusing mirror One side. 098 143 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098 098. It is disposed on one side of the beam splitter, and the light source is disposed on the opposite side of the focusing mirror. 6. The autofocus device of claim 1, wherein the first focusing element and the second focusing element are at the same distance from the photo sensor, and the first focal length is not equal to the second focal length. 7. The autofocus device of claim 6, wherein the first focal length is less than the second focal length. 8. 如申請專利範圍第1項所述之自動聚焦裝置,其 中,該第一聚焦元件與該光感測器之距離不等於該第二聚 焦元件與該光感測器之距離,而該第一焦距等於該第二焦 距0 9. 如申請專利範圍第1項所述之自動聚焦裝置,其 中,該光源係為一同調光光源或一非同調光光源。 10. 如申請專利範圍第1項所述之自動聚焦裝置,其 中,該光源係為一雷射光源、一發光二極體光源或一白熾 光源。 11. 如申請專利範圍第1項所述之自動聚焦裝置,其 中,該光感測器係為光二極體陣列(photo diode array, PD Array)、電荷搞合元件(charge-coupled device, CCD)或 互補金屬氧化半導體(complementary metal oxide semiconductor, CMOS)光感測器。 12. 如申請專利範圍第1項所述之自動聚焦裝置,其 中,該第一聚焦元件與該第二聚焦元件係構成一微透鏡陣 列。 14 098143988 1013282538-0 I.37S0058. The autofocus device of claim 1, wherein the distance between the first focusing element and the photo sensor is not equal to the distance between the second focusing element and the photo sensor, and the A focal length is equal to the second focal length. The autofocus device of claim 1, wherein the light source is a dimming light source or a non-coinciding light source. 10. The autofocus device of claim 1, wherein the light source is a laser source, a light emitting diode source or an incandescent source. 11. The autofocus device of claim 1, wherein the photo sensor is a photo diode array (PD Array), a charge-coupled device (CCD) Or a complementary metal oxide semiconductor (CMOS) photosensor. 12. The autofocus device of claim 1, wherein the first focusing element and the second focusing element form a microlens array. 14 098143988 1013282538-0 I.37S005 101年07月24日修正替換頁 2012/7/24_la 申復 & 修正 , 13. —種自動聚焦方法,包括: 提供一偵測光束; 使該偵測光束經過一聚焦鏡以形成一聚焦光束; 使該聚焦光束入射至一待測物,以經由該待測物形成 一反射光束; 使該反射光束通過不重疊之一第一聚焦元件與一第 二聚焦元件,以在一光感測器上分別形成一第一光點與一 第二光點;以及 根據該第一光點之尺寸變化與該第二光點之尺寸變 化去判斷該待測物之一離焦距離與一離焦方向,其中,該 判斷該待測物之該離焦距離與該離焦方向之步驟包括: 提供該待測物位在該聚焦鏡之一焦點時,該第一 聚焦元件在該光感測器上形成光點之一第一預設尺寸,以 及該第二聚焦元件在該光感測器上形成之光點之一第二 預設尺寸; 比對該第一光點尺寸與該第一預設尺寸以推估 該待測物之該離焦距離; 根據該第二光點尺寸與該第二預設尺寸之關係 以判斷該待測物之該離焦方向。 14.如申請專利範圍第13項所述之自動聚焦方法, 其中,該第一聚焦元件之一第一焦距小於該第二聚焦元件 之一第二焦距,於該判斷該待測物之該離焦方向之步驟 中: 當該第二光點尺寸大於該第二預設尺寸時,則判斷該 待測物係位在一遠焦位置; 15 098143988 1013282538-0 ····.· · 1378005 __v 101年07月24 B梭正春换亩· 2012/7/24_lsl 申復&修正 當該第二光點尺寸小於該第二預設尺寸時,則判斷該 待測物係位在一近焦位置。Amendment page 2012/7/24_la, Reb. & Amendment, 13. Autofocus method, comprising: providing a detection beam; passing the detection beam through a focusing mirror to form a focused beam Causing the focused beam to an object to be tested to form a reflected beam through the object to be tested; causing the reflected beam to pass through one of the first focusing element and a second focusing element without overlapping one of the photo sensors Forming a first light spot and a second light spot respectively; and determining a defocus distance and a defocusing direction of the object to be tested according to a change in the size of the first spot and a change in the size of the second spot The step of determining the defocus distance and the defocus direction of the object to be tested includes: providing the object to be tested at a focus of the focusing mirror, the first focusing component being on the photo sensor Forming a first predetermined size of one of the light spots, and a second predetermined size of the light spot formed by the second focusing element on the light sensor; comparing the first spot size with the first preset Dimension to estimate the defocus distance of the object to be tested According to the second spot size the size relationship with the second predetermined power to determine the direction of the object to be measured from. The autofocus method of claim 13, wherein the first focal length of one of the first focusing elements is smaller than the second focal length of the second focusing element, and the determination of the object to be tested is determined In the step of focusing direction: when the second spot size is larger than the second preset size, determining that the object to be tested is in a far focus position; 15 098143988 1013282538-0 ········ 1378005 __v On July 24, 101, B shuttle spring change for mu · 2012/7/24_lsl Shen Fu & correction, when the second spot size is smaller than the second preset size, it is judged that the object to be tested is in a near focus position . 098143988· 1013282538-0 16098143988· 1013282538-0 16
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