JP2006132972A - Defect detecting method and defect detecting device of optical part - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a defect detecting method and a defect detecting device of an optical part, capable of detecting a defect of the optical part constituted by laminating a plurality of light transmissive layers, without highly accurately positioning the optical part and an incident position of the detecting light. <P>SOLUTION: A determining part 13 makes the light incident so that a dimension L1 in the laminating direction of an incident area 19 becomes larger than the layer thickness L2 of a light conductive layer 22 of the optical part 14. Even if positioning accuracy of the incident position of the detecting light 18 is low, the light can be made incident on the light conductive layer 22. The determining part 13 makes the detecting light 18 incident so as to become smaller than a dimension 13 in the laminating direction of the optical part 14. A scattering factor of both end surfaces in the laminating direction Z of the optical part 14, for example, scattering of the detecting light 18 by dust or a flaw, can be prevented. Thus, the defect 25 of the optical part 14 can be highly accurately detected by detecting the light emitted from the optical part 14. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an optical component defect detection method and a defect detection device for detecting a defect of an optical component configured by laminating a plurality of layers having translucency.

  FIG. 8 is a perspective view showing a transparent substrate defect detection apparatus 1 according to the first prior art. The first conventional technique is described in Patent Document 1. The laser 2 emits laser light 2 a toward the mirror 3. The mirror 3 guides the laser beam 2 a from the laser 2 to the condenser lens 4. The condenser lens 4 guides the laser light 2 a from the mirror 3 to the transparent substrate 5. The light incident on the transparent substrate 5 is repeatedly reflected on both end surfaces in the thickness direction of the transparent substrate 5. When the transparent substrate 5 has a defect, light is scattered due to the defect, and the scattered light is emitted to the outside of the transparent substrate 5. The imaging lens 6 guides the light emitted outward to the CCD 7. The CCD 7 determines the presence or absence of a defect based on the amount of received light. As a second conventional technique, a technique similar to the technique of Patent Document 1 is described in Patent Document 2.

Japanese Patent Laid-Open No. 11-190700 JP 2001-305072 A

  FIG. 9 is a front view showing the optical component 8 to be inspected for defects. As shown in FIG. 9, in the optical component 8 formed by laminating a plurality of light-transmitting layers, when laser light is incident as in the first conventional technique, the number of layers is larger in the inspection target layer 8a. The incident position is controlled so that the laser beam is incident. When the layer thickness t of the layer 8a to be inspected is extremely thin, for example, about 10 to 20 μm, in order to guide the laser beam only to the layer 8a to be inspected at the end face of the optical component 8, the layer to be inspected It is necessary to position 8a and the laser beam with almost the same accuracy as the layer thickness t. As shown in FIG. 9, it is preferable to position the irradiation region 9 of the laser light within the layer 8a to be inspected because more light is guided and it is preferable for defect inspection. Accuracy is required.

  Therefore, an object of the present invention is to detect a defect of an optical component formed by laminating a plurality of light-transmitting layers without accurately positioning the optical component and the incident position of light for detection. It is an object to provide a defect detection method and a defect detection apparatus for an optical component that can be performed.

The present invention detects light emitted from an optical component by causing detection light to enter an optical component configured by laminating a plurality of light-transmitting layers from an end surface in a direction intersecting the stacking direction. A method for detecting defects in optical components,
Detection is performed such that the dimension in the stacking direction of the detection light incident area at the end face where the detection light is incident is larger than the layer thickness of the layer for detecting the defect and smaller than the dimension in the stacking direction of the optical component. This is a method for detecting a defect in an optical component, characterized in that light for use is incident.

  According to the present invention, the detection light is incident so that the dimension in the stacking direction of the detection light incident area is larger than the layer thickness of the layer for detecting the defect. Accordingly, even if the positioning accuracy of the incident position of the detection light is low, it can be incident on the layer for detecting the defect. In addition, the detection light is incident so that the dimension in the stacking direction of the incident region of the detection light is smaller than the dimension in the stacking direction of the optical component. Accordingly, it is possible to prevent the detection light from being scattered by scattering factors on both end surfaces of the optical component in the stacking direction, for example, dust or scratches. Therefore, the defect of the optical component can be detected with high accuracy by detecting the light emitted from the optical component.

  In addition, the present invention is characterized in that the detection light is incident by controlling the wavelength of the detection light and the numerical aperture of the optical system that collects the detection light.

  According to the present invention, the wavelength of the detection light and the numerical aperture of the optical system that collects the detection light are controlled. Thereby, the dimension in the stacking direction of the incident region of the detection light can be adjusted. Therefore, it is possible to suitably adjust the dimension of the incident region in the stacking direction so that the detection light is incident on the optical component.

  Furthermore, the present invention is characterized in that the detection light is incident by controlling the positions of the optical system and the optical component that collect the detection light.

  According to the present invention, the position of the optical system that collects the light for detection and the optical component is controlled to make the light for detection incident. Thereby, the dimension in the stacking direction of the incident region of the detection light can be adjusted. Since the positions of the optical system and the optical component are controlled, the incident region can be individually adjusted for a plurality of optical components or each layer constituting the optical component. Therefore, it is possible to suitably adjust the dimension of the incident region in the stacking direction so that the detection light is incident on the optical component.

Furthermore, the present invention is an apparatus for detecting a defect in an optical component formed by laminating a plurality of layers having translucency,
A light source that emits detection light toward an end surface in a direction that intersects the stacking direction of the optical components;
The dimension in the stacking direction of the detection light incident region at the end face where the detection light is incident is larger than the layer thickness of the layer for detecting the defect of the optical component and smaller than the dimension in the stacking direction of the optical component. An incident control means for making the detection light incident,
An optical component defect detection apparatus comprising: a light detection unit configured to detect light emitted from the optical component.

  According to the present invention, in the input control means, the dimension in the stacking direction of the detection light incident area on the end face on which the detection light is incident is larger than the layer thickness of the layer for detecting the defect of the optical component. So that it is incident. As a result, even if the positioning accuracy of the incident position of the detection light is low, it can be incident on the predetermined layer. Further, the input control means makes the detection light incident so as to be smaller than the dimension of the optical component in the stacking direction. As a result, it is possible to prevent the detection light from being scattered due to scattering factors at both end surfaces of the optical component in the stacking direction. Therefore, the defect of the optical component can be detected with high accuracy by detecting the light emitted from the optical component.

The present invention further includes a condensing optical system that is provided between the optical component and the light source and condenses the light for detection,
The input control means controls the wavelength of light for detection and the numerical aperture of the condensing optical system.

  According to the present invention, the input control means controls the wavelength of the detection light and the numerical aperture of the condensing optical system. Thereby, the dimension in the stacking direction of the incident region of the detection light can be adjusted. Therefore, it is possible to suitably adjust the dimension of the incident region in the stacking direction so that the detection light is incident on the optical component.

  Furthermore, the present invention is characterized in that the input control means controls the position of the condensing optical system.

  According to the present invention, the input control means controls the position of the condensing optical system. Thereby, the dimension in the stacking direction of the incident region of the detection light can be adjusted. Since the positions of the condensing optical system and the optical component are controlled, the incident region can be individually adjusted for a plurality of optical components or each layer constituting the optical component. Therefore, it is possible to suitably adjust the dimension of the incident region in the stacking direction so that the detection light is incident on the optical component.

  According to the present invention, even if the positioning accuracy of the incident position of the detection light is low, the detection light can be incident on the layer for detecting the defect, and the detection light is scattered by the scattering factor at both end surfaces of the optical component in the stacking direction. Can be prevented. Therefore, the defect of the optical component can be detected with high accuracy by detecting the light emitted from the optical component.

  Further, according to the present invention, it is possible to suitably adjust the dimension of the incident region in the stacking direction so that the detection light is incident on the optical component.

  Furthermore, according to the present invention, it is possible to adjust the dimension in the stacking direction of the incident region of the detection light. Since the positions of the optical system and the optical component are controlled, the incident region can be individually adjusted for a plurality of optical components or each layer constituting the optical component. Therefore, it is possible to suitably adjust the dimension of the incident region in the stacking direction so that the detection light is incident on the optical component.

  Furthermore, according to the present invention, even if the positioning accuracy of the incident position of the detection light is low, the detection light can be incident on the layer for detecting the defect, and the detection light is caused by scattering factors at both end surfaces in the stacking direction of the optical component. Scattering can be prevented. Therefore, the defect of the optical component can be detected with high accuracy by detecting the light emitted from the optical component. The accuracy required for the inspection apparatus parts can be moderated, and the manufacturing cost of the apparatus can be reduced. Furthermore, since the maintenance and adjustment of the apparatus are simplified, the running cost of the apparatus 10 can be reduced.

  Furthermore, according to the present invention, it is possible to adjust the dimension in the stacking direction of the incident region of the detection light. Therefore, it is possible to suitably adjust the dimension of the incident region in the stacking direction so that the detection light is incident on the optical component.

  Furthermore, according to the present invention, it is possible to adjust the dimension in the stacking direction of the incident region of the detection light. Since the positions of the condensing optical system and the optical component are controlled, the incident region can be individually adjusted for a plurality of optical components or each layer constituting the optical component. Therefore, it is possible to suitably adjust the dimension of the incident region in the stacking direction so that the detection light is incident on the optical component.

  FIG. 1 is a front view showing a part of an optical component defect detection apparatus 10 according to an embodiment of the present invention. FIG. 2 is a side view showing the optical component defect detection apparatus 10. An optical component defect detection apparatus (hereinafter, also simply referred to as “defect detection apparatus”) 10 includes a laser light source 11, a light detection unit 12, a determination unit 13, and an incident unit 15. The defect detection apparatus 10 is an apparatus that detects a defect 25 of the optical component 14 configured by laminating a plurality of layers having translucency.

  The optical component 14 is composed of a plurality of materials, and in the present embodiment, a plurality of sheet-like materials having different thickness dimensions are laminated in the thickness direction to have a multilayer structure. The optical component 14 is provided with a protective film 16 that covers both end surfaces of the stacking direction Z. The protective film 16 is a sheet having translucency, and protects the optical component 14 from being damaged by an external force.

  The laser light source 11 is a light source, and emits detection light 18 toward an end surface 14 a in a direction intersecting with the stacking direction Z of the optical components 14. The laser light source 11 is arranged so that the optical axis of the detection light 18 is substantially parallel to the length direction X substantially orthogonal to the stacking direction Z of the optical components. The detection light 18 is applied to the length direction X one end face 14 a of the optical component 14. The laser light source 11 is realized by a semiconductor laser device, for example.

  The incident portion 15 is a condensing optical system and is provided between the optical component 14 and the laser light source 11 and condenses the detection light 18. The incident unit 15 includes a collimator lens 20 and an objective lens 21. The collimator lens 20 converts divergent light from the laser light source 11 into parallel light. The objective lens 21 condenses the parallel light from the collimator lens 20 on the length direction X one end surface 14a of the optical component 14 and makes the detection light 18 from the laser light source 11 enter.

  The light detection unit 12 is a light detection unit and detects light emitted from the optical component 14. The light detection unit 12 detects light emitted from one surface in the stacking direction Z of the optical component 14. The light detection unit 12 is realized by, for example, a light receiving element and a charge coupled device (abbreviated as CCD). The light detection unit 12 gives information based on the detected light to the determination unit 13.

  The determination unit 13 determines the presence / absence of the defect 25 of the optical component 14 based on the information given from the light detection unit 12. The determination unit 13 provides information indicating the determination result to a notification unit, for example, a display device or a sound generation unit, so that information based on the presence or absence of a defect is notified.

  The determination unit 13 has a function as an incident control unit, and the dimension L1 in the stacking direction Z of the incident region 19 of the detection light 18 on the end surface 14a on which the detection light 18 is incident is determined in advance of the optical component 14. The detection light 18 is incident so as to be larger than the layer thickness L2 of the light guide layer 22, which is a predetermined layer, and smaller than the dimension L3 of the optical component 14 in the stacking direction Z. The determination unit 13 controls the wavelength of the detection light 18 and the numerical aperture (abbreviation NA) of the objective lens 21. The determination unit 13 controls the position of the incident unit 15.

  As shown in FIG. 1, the detection light 18 is collected in a circular shape by an objective lens 21. The dimension L1 in the stacking direction Z of the incident region 19 of the detection light 18 is controlled by the determination unit 13 so as to be larger than the layer thickness L2 of the light guide layer 22 which is a predetermined layer. The position of the incident region 19 in the stacking direction Z is controlled by the determination unit 13 so that a large amount of the detection light 18 is guided to the light guide layer 22. The light guide layer 22 is a layer for detecting the defect 25, and a layer that guides light with the smallest attenuation is preferable.

  When the defect 25 exists in the light guide layer 22, the refractive index, the transmittance, and the reflectance are optically changed near the defect 25. When the detection light 18 passes through the defect 25, the detection light 18 is scattered in the vicinity of the defect 25. By detecting the scattered light by the photodetector 12, the determination unit 13 determines the defect 25 when the light amount difference between the defect 25 and its surroundings is greater than or equal to a predetermined value based on the detected scattered light. As a result, the determination unit 13 can detect the defect 25.

  The detection light 18 squeezed to a predetermined size by the incident portion 15 is positioned so as to be approximately at the center in the stacking direction Z with respect to the light guide layer 22 on the one end surface 14a in the length direction X of the optical component 14. Adjusted. The relationship between the beam diameter L1 that is the diameter of the incident region 19 in the detection light 18 and the layer thickness L2 of the light guide layer 22 is determined by the design of the incident portion 15. In this embodiment, the optical component 14 having a seven-layer structure having a thickness of 10 to 80 μm is used, and light is guided to the light guide layer 22 having a thickness of 20 μm to detect defects.

  The dimension L1 of the incident area 19 in the stacking direction Z is equal to the beam diameter L1 because the incident area 19 is circular. The beam diameter L1 is determined by, for example, the laser wavelength to be used and the numerical aperture (abbreviation NA) of the objective lens 21. Table 1 shows an example of the relationship between the beam diameter L1 and NA. The detection light 18 emitted from the laser light source 11 is converted into parallel light by a collimator lens 20 and then condensed using an objective lens 21 having an NA shown in Table 1. Here, the wavelength of the detection light 18 is set to about 650 nm.

  As shown in Table 1, depending on the NA of the objective lens 20, when the beam diameter L1 is 6 μm and smaller than the layer thickness L2 with respect to the layer thickness L2 of the light guide layer 22, the beam diameter L1 is 15 μm and the layer thickness L2 In the case where the beam diameter L1 is 75 μm and is larger than the layer thickness L2.

  FIG. 3 is a graph showing the relationship between the position of the optical axis of the detection light 18 and the amount of light transmitted through the light guide layer 22 using the incident portions 15 of the three types of objective lens 20 shown in Table 1. The horizontal axis of the graph represents the amount of displacement in the stacking direction Z of the optical axis from the position where the center of the light guide layer 22 and the optical axis of the detection light 18 coincide, and the vertical axis of the graph represents the transmission of the light guide layer 22. Represents the amount of light. In the optical component 14, the distance from the incident end face 14a to the outgoing end face where the transmitted light quantity is measured is 16 cm, and the transmitted light quantity is measured using an optical power meter at the outgoing end face.

  As shown in FIG. 3, the amount of transmitted light is the largest when the beam diameter L1 at the incident end face 14a and the layer thickness L2 of the light guide layer 22 are substantially the same. When a mismatch occurs in the optical axis of the light 18, the amount of transmitted light rapidly decreases. The amount of transmitted light when the beam diameter L1 increases and the optical axis of the detection light 18 coincides with the center of the light guide layer 22 is smaller than that when the beam diameter L1 is small. When the center and the optical axis of the detection light 18 are inconsistent, the amount of transmitted light is gradually reduced.

  As a result, when the deviation is about 5 μm or more, the amount of transmitted light increases when the beam diameter L1 is large. It is also clear that the mechanical accuracy of the center of the light guide layer 22 and the optical axis of the detection light 18 becomes less dependent as the beam diameter L1 is larger. If the detection light 18 is further narrowed down from the layer thickness L2 of the light guide layer 22, both the decrease in the transmitted light amount and the decrease in the transmitted light amount due to the positional deviation are large, and it can be seen that it is not suitable for detecting the defect 25.

  When the beam diameter L1 is further increased, since the protective film 16 is provided on the surface of the optical component 14, the detection light 18 enters the protective film 16 or the surface of the protective film 16. As a result, dust or dirt in the air adhering to the surface of the protective film 16 is shined, which prevents detection of scattered light from the defect 25 in the light guide layer 22. Therefore, the limit of the beam diameter L1 is the dimension L3 of the optical component 14 in the stacking direction Z.

  As described above, the beam diameter L1 needs to be equal to or smaller than the dimension L3 of the optical component 14 in the stacking direction Z since it substantially coincides with the layer thickness L2 of the light guide layer 22. In the defect detection device 10, it is desirable not to adjust the position of the optical axis of the detection light 18 and the center of the light guide layer 22, so the dimension L 3 of the optical component 14 in the stacking direction Z and the protective film 16 The beam diameter L1 may be determined in consideration of the thickness dimension. As a result, the positional accuracy of the light guide layer 22 and the optical axis of the detection light 18 can be set gently.

  The beam diameter L1 is determined by the positions of the optical component 14 and the objective lens 21, for example. In the incident portion 15, the distance between the objective lens 21 and the length direction X one end face 14 a of the optical component 14 is changed. In the length direction X one end surface 14a of the optical component 14, if an offset is given to the focal position, in other words, if the distance between the objective lens 21 and the optical component 14 is increased, the length direction X of the optical component 14 is equal to one. The beam diameter L1 can be made larger than when the end surface 14a is set to the focal position. Table 2 shows the relationship between the offset amount, which is a deviation amount from the focal position, and the beam diameter L1, for example, when NA is 0.25 and the wavelength of the detection light 18 is about 650 nm.

  As shown in Table 2, the beam diameter L1 is proportional to the offset amount. When the offset amount is 100 μm, the beam diameter L1 is 50 μm.

  FIG. 4 is a graph showing the relationship between the position of the optical axis of the detection light 18 and the amount of light transmitted through the light guide layer 22 using the incident portions 15 having different offset amounts. The horizontal axis of the graph represents the amount of displacement in the stacking direction Z of the optical axis from the position where the center of the light guide layer 22 and the optical axis of the detection light 18 coincide, and the vertical axis of the graph represents the transmission of the light guide layer 22. Represents the amount of light. In the optical component 14, the distance from the incident end face to the outgoing end face where the transmitted light amount is measured is 16 cm, and the transmitted light quantity is measured using an optical power meter at the outgoing end face.

  Similar to the case where the NA described with reference to FIG. 3 is changed, the beam diameter L1 is substantially equal to the layer thickness L2 of the light guide layer 22, and therefore is less than or equal to the dimension L3 of the optical component 14 in the stacking direction Z. It is necessary to. In the defect detection device 10, it is desirable not to adjust the position of the optical axis of the detection light 18 and the center of the light guide layer 22, so the dimension L3 of the optical component 14 in the stacking direction Z and the protective film 16 The beam diameter L1 may be determined in consideration of the thickness dimension. As a result, the positional accuracy between the light guide layer 22 and the optical axis of the detection light 18 can be set gently.

  When the beam diameter L1 is increased, the amount of light guided through the light guide layer 22 is smaller than when the beam diameter L1 is small. Therefore, by increasing the amount of incident light, the amount of light to be guided necessary for defect inspection is ensured. Need to be configured. Therefore, it is necessary to select the amount of light emitted from the laser light source 11 so that the entire optical component 14 can be inspected.

FIG. 5 is a flowchart illustrating a defect detection method for the optical component 14. In step a0, the optical component 14 is disposed at a predetermined position, and the process proceeds to step a1. In step a1,
The dimension L1 in the stacking direction Z of the incident region 19 of the detection light 18 on the end face on which the detection light 18 is incident is larger than the layer thickness L2 of the light guide layer 22 of the optical component 14, and the stack of the optical component 14 The detection light 18 is incident so as to be smaller than the dimension L3 in the direction Z, and the process proceeds to step a2. In step a2, the light detection unit 12 detects the scattered light emitted from the optical component 14, and the process proceeds to step a3. In step a3, the determination part 13 determines the presence or absence of the defect 25 based on the scattered light intensity detected by the light detection part 12, and proceeds to step a4. In step a4, the series of detection procedures from step a1 is terminated. The defect 25 is detected by such a detection procedure.

  As described above, according to the present embodiment, the determination unit 13 determines that the dimension L1 in the stacking direction Z of the incident region 19 of the detection light 18 on the end surface 14a on which the detection light 18 is incident is the optical component. The light guide layer 22 is incident so as to be larger than the layer thickness L2. As a result, even if the positioning accuracy of the incident position of the detection light 18 is low, it can be made incident on the light guide layer 22. Further, the determination unit 13 causes the detection light 18 to be incident so as to be smaller than the dimension L3 of the optical component 14 in the stacking direction Z. Accordingly, it is possible to prevent the detection light 18 from being scattered by scattering factors such as dust or scratches on both end surfaces of the optical component 14 in the stacking direction Z. Therefore, the defect 25 of the optical component 14 can be detected with high accuracy by detecting the light emitted from the optical component 14.

  In the defect detection of the optical component 14, by optimizing the beam shape at the end face 14a, the optical axis of the detection light 18 and the light guide layer can be obtained even in the optical component 14 in which the layer thickness L2 of the light guide layer 22 is extremely thin. The alignment accuracy with the center of 22 can be relaxed. As a result, the accuracy required for the device parts can be moderated, and the manufacturing cost of the defect detection device 10 can be reduced. Furthermore, since maintenance and adjustment of the defect detection apparatus 10 are simplified, the running cost of the defect detection apparatus 10 can be reduced.

  In the present embodiment, the determination unit 13 controls the wavelength of the detection light 18 and the numerical aperture of the objective lens 22. Accordingly, the dimension L1 in the stacking direction of the incident region 19 of the detection light 18 can be adjusted. Accordingly, the dimension L1 of the incident region 19 in the stacking direction can be suitably adjusted so that the detection light 18 can enter the optical component 14.

  In the present embodiment, the determination unit 13 controls the position of the incident unit 15. Accordingly, the dimension L1 in the stacking direction of the incident region 19 of the detection light 18 can be adjusted. Since the positions of the incident portion 15 and the optical component 14 are controlled, the incident region 19 can be individually adjusted with respect to the plurality of optical components 14 or each layer constituting the optical component 14. Accordingly, the dimension L1 of the incident region 19 in the stacking direction can be suitably adjusted so that the detection light 18 can enter the optical component 14.

  In the present embodiment, since scattered light is detected from one side in the stacking direction Z, the position, number, or size of the scattered light caused by the defect 25 can be detected. Thereby, the optical component 14 from which the defect 25 is removed can be processed and produced. Therefore, the optical component 14 without the defect 25 can be manufactured. That is, the productivity of the optical component 14 can be improved. When an optical device including the optical component 14 is configured, the optical component 14 including a defect can be removed in advance, so that the yield of the optical device can be improved and the productivity of the optical device can be improved.

  3 and 4, the dimension L1 of the incident region 19 in the stacking direction Z is slightly larger than the layer thickness L2 of the light guide layer 22, and is preferably about 1 to 3 times, for example, 4 times or more. As a result, the attenuation of the light amount becomes considerably large. By selecting the shape of the incident region 19 in this way, the positioning accuracy can be relaxed, and as much detection light 18 as possible can be guided to the light guide layer 22, and the accuracy of detecting the defect 25 can be improved. Can be improved.

Moreover, it is preferable that the beam diameter L1, the positioning accuracy x of the optical axis of the detection light 18 of the apparatus, and the layer thickness L2 of the light guide layer 22 are in the relationship of the following equation (1).
L2 ≦ L1 ≦ (L2 + x) (1)

  As shown in FIGS. 3 and 4, the most suitable for defect detection is when L1 = L2. Basically, since the positioning accuracy x of the apparatus exists, the beam diameter L1 is set to (L2 + x). It is preferable to set the following. By setting the beam diameter L1 in this way, even if the optical axis of the detection light 18 is moved in any of the stacking directions Z by the positioning accuracy x, the incident beam is incident. The region can cover the entire light guide layer 22.

  If the beam diameter L1 becomes too large, the amount of light guided to the light guide layer 22 decreases. Therefore, the positioning accuracy x is not more than twice the layer thickness L2 of the light guide layer, in other words, the beam diameter L1 is less than the light guide layer. It is preferable to set it to 3 times or less of the layer thickness L2. By setting in this way, even if the optical element is replaced for inspection and the positioning accuracy x of the apparatus varies within a certain range, the range is less than twice the layer thickness L2 of the light guide layer. A light amount necessary for detecting a defect can be incident on the light guide layer 22, and the defect can be reliably detected.

  FIG. 6 is a side view showing an optical component defect detection apparatus 10a according to another embodiment of the present invention. The defect detection apparatus 10a of the present embodiment is similar to the defect detection apparatus 10 of FIGS. 1 to 5 described above, and the configuration of the present embodiment is the same as the corresponding configuration of the defect detection apparatus 10 described above. Reference numerals are attached, only different configurations are described, and description of similar configurations is omitted. In the present embodiment, the incident part 15 further includes a shaping prism 30. The shaping prism 30 is provided between the collimator lens 20 and the objective lens 21. By providing the shaping prism 30 in this way, the shape of the incident region 19 can be changed.

  In the present embodiment, the shape of the incident region 19 of the detection light 18 on the end surface 14a of the optical component 14 is different. As described above, since the incident region 19 is limited only in the dimension L1 in the stacking direction, other shapes are not specified. The shape of the incident region 19 may be elliptical, for example.

  FIG. 7 is a front view showing a part of the optical component defect detection apparatus 10a. As shown in FIG. 7 (1), the incident region 19 is condensed with respect to the stacking direction Z and the width direction Y perpendicular to the length direction X using the shaping prism 30. In FIG. 7 (2), the incident region 19 is condensed in the stacking direction Z using the shaping prism 30. Even in such an incident region 19, the effect can be achieved as in the above-described embodiment.

  The incident portion 15 can also be realized by eliminating the collimating lens 20 and causing the detection light 18 from the laser light source 11 to directly enter the shaping prism 30. Further, the light may be condensed into an ellipse by using a collimator lens 20 and a cylindrical lens.

  Further, in each of the above-described embodiments, the defect detection apparatus is configured with one laser light source 11. However, when the entire surface of the optical component 14 is inspected for defects, the optical component 14 is fed by a feed mechanism to the laser light source 11. It is necessary to configure so as to be displaced relative to. Further, a plurality of laser light sources 11 may be arranged to inspect the entire surface of the optical component 14 at a time.

  The above-described embodiment is merely an example of the present invention, and the configuration can be changed within the scope of the present invention.

1 is a front view illustrating a part of an optical component defect detection apparatus 10 according to an embodiment of the present invention. It is a side view which shows the defect detection apparatus 10 of an optical component. 6 is a graph showing the relationship between the position of the optical axis of the detection light 18 and the amount of light transmitted through the light guide layer 22 using the incident portions of the three types of objective lenses 20 shown in Table 1. It is a graph which shows the relationship between the position of the optical axis of the light 18 for a detection, and the transmitted light quantity of the light guide layer 22 using the incident part 15 from which offset amount differs. It is a flowchart which shows the defect detection method of the optical component. It is a side view which shows the defect detection apparatus 10a of the optical component of other form of implementation of this invention. It is a front view which shows a part of defect detection apparatus 10a of an optical component. It is a perspective view which shows the defect detection apparatus 1 of the transparent substrate of the 1st prior art. It is a front view which shows the optical component used as the object of a defect inspection.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10, 10a Optical component defect detection apparatus 11 Laser light source 12 Light detection part 13 Judgment part 14 Optical component 15 Incident part 16 Protective film 18 Light for detection 19 Incident area 22 Light guide layer 25 Defect

Claims (6)

An optical component is formed by making detection light incident on an optical component configured by laminating a plurality of light-transmitting layers from an end face in a direction intersecting the stacking direction, and detecting light emitted from the optical component. A method for detecting defects in
Detection is performed such that the dimension in the stacking direction of the detection light incident area at the end face where the detection light is incident is larger than the layer thickness of the layer for detecting the defect and smaller than the dimension in the stacking direction of the optical component. A method for detecting a defect in an optical component, characterized in that light for use is incident.   The optical component defect detection method according to claim 1, wherein the detection light is incident by controlling the wavelength of the detection light and the numerical aperture of the optical system that collects the detection light.   3. The optical component defect detection method according to claim 1, wherein the position of the optical system for condensing the detection light and the position of the optical component is controlled to cause the detection light to enter. An apparatus for detecting a defect in an optical component formed by laminating a plurality of layers having translucency,
A light source that emits detection light toward an end surface in a direction that intersects the stacking direction of the optical components;
The dimension in the stacking direction of the detection light incident area at the end face where the detection light is incident is larger than the layer thickness of the layer for detecting the defect of the optical component and smaller than the dimension in the stacking direction of the optical component. An incident control means for making the detection light incident,
An optical component defect detection apparatus comprising: a light detection unit configured to detect light emitted from the optical component. A condensing optical system that is provided between the optical component and the light source and condenses the light for detection;
5. The optical component defect detection apparatus according to claim 4, wherein the input control means controls the wavelength of the light for detection and the numerical aperture of the condensing optical system.   6. The optical component defect detection apparatus according to claim 5, wherein the input control means controls the position of the condensing optical system.

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