JP2008145160A - Optical displacement sensor and its adjusting method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical displacement sensor and its adjusting method capable of easily performing adjusting operation. <P>SOLUTION: The displacement sensor holds the CCD slidably in the parallel direction to the light receiving surface 22A, and at the same time holds it rotatably while centering a pin 32 perpendicular to the light axis L2 of the reflection light from the object and the sliding direction of the light receiving surface 22A. The detection range is located between the first detection position P1 and the second detection position P2, and constituted so that the light axis L2 of the reflection light from the first detection position P1 and the rotary axis constituted by the pin 32 are intersecting. Thereby, after the position of the light receiving lens 23 is adjusted so as to focus the reflection light from the first detection position P1 on the light receiving surface 22A, by sliding or rotating the light receiving surface 22A, so as to focus the reflection light from the second detection position P2 on the light receiving surface 22A. The focus positions of the reflection light beams from the first detection position P1 and the second detection position P2 can be quickly adjusted. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an optical displacement sensor, and more particularly, to an optical displacement sensor that receives reflected light of light irradiated onto an object and detects the displacement of the object based on the amount of received light, and an adjustment method thereof. .

  An optical displacement sensor that can detect the displacement of an object using so-called triangulation by irradiating the object with light and receiving reflected light reflected at a predetermined angle with respect to the irradiation direction is known. (For example, Patent Document 1). This type of optical displacement sensor includes a light projecting unit that irradiates light on an object, a light receiving unit that receives reflected light from the object on a light receiving surface, and images the reflected light from the object on the light receiving surface. And a light receiving lens. When installing this type of optical displacement sensor, the light projecting unit, the light receiving unit, and the light receiving lens are usually arranged so as to follow a relationship called Scheinproof's law.

  FIG. 6 is a schematic diagram for explaining an aspect when adjusting the optical displacement sensor in accordance with Scheinproof's law. The light receiving surface 122A of the light receiving unit provided in the optical displacement sensor has a predetermined width, and only the light incident on the light receiving surface 122A is photoelectrically converted. Therefore, among the reflected light from the object arranged on the optical axis L from the light projecting unit 121, only the reflected light from the range where the reflected light is incident on the light receiving surface 122A is received by the light receiving surface 122A. The displacement of the object can be detected only within the range.

  In the schematic diagram of FIG. 6, the width of the light receiving surface 122A is represented by a line segment A1-A2, and the range on the optical axis L where the reflected light enters the light receiving surface 122A of this width is a line segment B1-B2. expressed. The light receiving lens 123 is arranged such that the central axis X passes through the intersection C between the line segment A1-B1 and the line segment A2-B2. At this time, the intersection D of the lens principal surface F orthogonal to the central axis X and the optical axis L from the light projecting unit 121 is located on the extension line of the light receiving surface 122A, that is, on the extension line E of the line segment A1-A2. Adjust as follows. Thereby, even if it is the light reflected from the target object in any point within the range of line segment B1-B2, the reflected light which passed the light receiving lens 123 is favorable on the light-receiving surface 122A represented by line segment A1-A2. The imaging position can be adjusted so as to form an image.

Conventionally, when adjusting the imaging position of an optical displacement sensor, the positions of the light projecting unit, the light receiving unit, and the light receiving lens are appropriately shifted so that each of these units is a Scheimpflug as shown in FIG. Adjustments were made to achieve an optical arrangement in accordance with the law.
Japanese Patent Laid-Open No. 9-257468

  However, when adjustment is performed by appropriately shifting the positions of the light projecting unit, the light receiving unit, and the light receiving lens as in the prior art, if the position of any part is shifted, it is necessary to shift the position of other parts as well. In some cases, the adjustment work becomes complicated. For such reasons, there has been a demand for a configuration that can easily adjust the imaging position.

  The present invention has been made in view of the above circumstances, and an object thereof is to provide an optical displacement sensor and an adjustment method thereof that can easily perform an adjustment operation of an imaging position.

  The optical displacement sensor according to the first aspect of the present invention irradiates light toward an object, and can detect displacement of the object between a first detection position and a second detection position at different positions in the irradiation direction. An optical displacement sensor having a light projecting unit that irradiates light in a certain irradiation direction, a light receiving lens that collects reflected light from the object, and a light receiving surface that is long in a certain direction. A light receiving unit that receives reflected light from an object on the light receiving surface via the light receiving lens, and outputs a signal corresponding to a position in the longitudinal direction of the received reflected light on the light receiving surface, and holds the light receiving unit And having a side surface parallel to the optical axis of each reflected light from the first detection position and the second detection position, the width in the minor axis direction perpendicular to the major axis along the longitudinal direction of the light receiving surface is A constant slot along the long axis is located in the side surface and A holding portion formed in the vicinity of the surface and a base surface facing the side surface, and having a diameter substantially the same as the width of the long hole, and is inserted into the long hole so that a slide mechanism and a rotation mechanism are provided. A cylindrical projection to be formed includes a base portion provided on the base surface, and a fixing means for fixing the holding portion and the base portion.

  According to such a structure, a long hole is formed in the side surface parallel to the optical axis of each reflected light from the 1st detection position and the 2nd detection position in the holding | maintenance part holding a light-receiving part, and a base member is formed in the long hole By inserting a protrusion provided on the slide mechanism, a slide mechanism and a rotation mechanism can be formed. Since the long hole and the protrusion inserted into the long hole are located in the vicinity of the light receiving surface, if the reflected light from the first detection position is adjusted so as to form an image on the light receiving surface, the light is received thereafter. Even when the part is slid or rotated, the amount of change in the imaging position of the reflected light from the first detection position can be reduced. Therefore, if the light receiving unit is slid or rotated so that the reflected light from the second detection position forms an image on the light receiving surface in this state, the imaging positions of the reflected light from the first detection position and the second detection position are determined. Since the optical arrangement according to the Scheinproof law can be made quickly, the image forming position can be easily adjusted.

  Further, the slide mechanism and the rotation mechanism can be formed with a simple configuration in which the protrusion is inserted into the long hole formed along the longitudinal direction of the light receiving surface. Therefore, a mechanism that can easily adjust the imaging position can be realized with a simple configuration. Further, since the light receiving unit can be slid and rotated simultaneously, the image forming position can be adjusted more easily.

  The adjustment method of the optical displacement sensor according to the second aspect of the invention differs in the irradiation direction by irradiating light in a certain irradiation direction and receiving reflected light from the object on the light receiving surface via the light receiving lens. The displacement of the object can be detected between a first detection position and a second detection position, and a slide mechanism that slides the light receiving surface in a parallel direction, an optical axis of reflected light from the object, and An optical displacement having a rotation mechanism for rotating the light receiving surface about a rotation axis orthogonal to the sliding direction of the light receiving surface, and the optical axis of the reflected light from the first detection position intersects the rotation axis A method for adjusting a sensor, the step of adjusting the position of the light receiving lens so that the reflected light from the first detection position forms an image on the light receiving surface; and the reflected light from the second detection position To form an image on the surface Configured the serial light-receiving surface and a step of sliding or rotating.

  According to such a configuration, after adjusting the reflected light from the first detection position to form an image on the light receiving surface, the reflected light from the second detection position is received by sliding or rotating the light receiving surface. Can be imaged. At this time, since the optical axis of the reflected light from the first detection position intersects with the rotation axis, the reflected light from the first detection position is imaged even when the light receiving surface is slid or rotated. The amount of change in position can be reduced. Therefore, the imaging position of the reflected light from the first detection position and the second detection position can be quickly adjusted, and an optical arrangement in accordance with the Scheinproof law can be achieved. It can be carried out.

  According to the present invention, after adjusting the reflected light from the first detection position to form an image on the light receiving surface, the light receiving unit is slid or rotated so that the reflected light from the second detection position forms an image on the light receiving surface. By doing so, the imaging position of the reflected light from the first detection position and the second detection position can be quickly adjusted, so that the adjustment operation of the imaging position can be easily performed.

  FIG. 1 is an exploded perspective view showing a configuration example of an optical displacement sensor 1 according to an embodiment of the present invention. This optical displacement sensor 1 emits light in a certain irradiation direction to an object and receives reflected light reflected at a predetermined angle with respect to the irradiation direction, thereby using a so-called triangulation. The displacement of an object can be detected. More specifically, by receiving scattered light reflected in a direction intersecting the orthogonal direction out of the reflected light irradiated in the orthogonal direction with respect to the detection surface of the object, the received light amount is reduced. Based on this, the distance to the object can be detected.

  In this optical displacement sensor 1, after the optical system 3 and various substrates 4 are accommodated in the casing 2, a front cover 6 is disposed with a packing 5 sandwiched between the front opening 2 </ b> A of the casing 2, and further on the front surface of the front cover 6. The cover member 9 is disposed between the packing 7 and the cover glass 8, and the front lid 6 and the cover member 9 are fixed to the casing 2 with screws 10. The front lid 6 and the cover member 9 are respectively provided with irradiation light openings 6A and 9A for allowing the irradiation light to pass through the object, and the reflected light opening for allowing the reflected light from the object to pass therethrough. 6B and 9B are formed. A disturbance light removing filter 11 is arranged between the front lid 6 and the optical system 3 so as to face the reflected light opening 6B, so that disturbance light other than the reflected light from the object enters the optical system 3. It is preventing.

  When the optical displacement sensor 1 is installed, the cover member 9 is installed so that the front surface of the cover member 9 faces the object and the irradiation light from the optical system 3 is irradiated in a direction orthogonal to the detection surface of the object. Is done. The reflected light opening 6B of the front cover 6 and the reflected light opening 9B of the cover member 9 are arranged at positions shifted from the optical axis of the irradiated light, and the reflected light from the object has a detection surface. On the other hand, the directly reflected light reflected in the orthogonal direction does not pass through the reflected light openings 6B and 9B, and the scattered light reflected at a predetermined angle with respect to the orthogonal direction passes through the reflected light openings 6B and 9B to be optical. Light is received by the system 3.

  FIG. 2 is a perspective view showing a configuration example of the optical system 3. FIG. 3 is a plan view of the optical system 3 shown in FIG. FIG. 4 is an exploded perspective view of the optical system 3 shown in FIG. Hereinafter, a configuration example of the optical system 3 will be specifically described with reference to FIGS. The optical system 3 is integrally formed by attaching various optical components including a laser diode 21, a CCD (Charge Coupled Device) 22, and a light receiving lens 23 to the base member 20.

  The laser diode 21 is a light projecting unit that irradiates light to an object, and is directly attached to the base member 20 to irradiate light in a certain irradiation direction when the optical displacement sensor 1 is fixed. On the optical axis L1 of the irradiation light from the laser diode 21, a collimator lens 24 and a slit plate 25 are arranged in this order along the irradiation direction. 2 and 3, the slit plate 25 is omitted.

  The collimator lens 24 is a condensing lens that condenses the irradiation light from the laser diode 21, and can be attached to the base member 20 with the spacer 26 interposed therebetween. Therefore, by changing the thickness of the spacer 26, the distance of the collimator lens 24 to the laser diode 21 can be adjusted, and the spot diameter of the irradiation light on the detection surface of the object can be adjusted. The slit plate 25 is formed with a circular slit, and the irradiation light is narrowed by passing the irradiation light from the laser diode 21 through the slit.

  The CCD 22 is a light receiving unit composed of a plurality of light receiving elements arranged in a straight line, and receives light incident on the light receiving surface 22A by each light receiving element and performs photoelectric conversion according to the amount of light received from each light receiving element. Output a signal. The optical axis L1 of the irradiation light from the laser diode 21 and the optical axis L2 of the reflected light from the object extend along a certain optical path surface, and the light receiving elements of the CCD 22 are arranged in parallel to the optical path surface. It has been. That is, the optical axis L1 of the irradiated light, the optical axis L2 of the reflected light, and the light receiving elements of the CCD 22 are located on the common optical path surface. The light receiving surface 22A is formed of a rectangular region facing the plurality of light receiving elements on the optical path surface, receives reflected light from an object in an arbitrary region in the longitudinal direction, and receives light from the light receiving element facing the region. By outputting a signal corresponding to the amount of received light, a signal corresponding to the position of the received reflected light in the longitudinal direction on the light receiving surface 22A is output.

  The light receiving lens 23 is an imaging lens that focuses the reflected light from the object and forms an image on the light receiving surface 22 </ b> A of the CCD 22. The light receiving lens 23 is attached to the light receiving lens holding portion 29 with the slit plate 27 and the disturbance light removing filter 28 interposed therebetween, and the light receiving lens holding portion 29 is fixed to the base member 20. The slit plate 27 is formed with a circular slit. After the reflected light from the object passing through the light receiving lens 23 is narrowed by the slit, the disturbance light other than the reflected light is removed by the disturbance light removing filter 28. The light enters the light receiving surface 22A of the CCD 22. A spacer 30 can be sandwiched between the light receiving lens 23 and the slit plate 27. By changing the thickness of the spacer 30, the distance of the light receiving lens 23 with respect to the light receiving surface 22A of the CCD 22 can be adjusted. Can do.

  The CCD 22 is mounted on a light receiving substrate 22B, and the light receiving substrate 22B is fixed to a CCD holding portion 31 attached to the base member 20 so as to be displaceable. The upper surface of the base member 20 forms a base surface that faces the CCD holding portion 31, and a pin 32 as a cylindrical protrusion that constitutes the rotation shaft is fixed to the upper surface. By inserting the pin 32 into the long hole 33 formed in the CCD holding portion 31, the CCD holding portion 31 can be rotatably held around the pin 32, and the pin 32 is held in the long hole 33. The CCD holding unit 31 can be slidably held so as to slide. That is, the pin 32 and the long hole 33 constitute a slide mechanism that slidably holds the CCD holding unit 31 and a rotation mechanism that rotatably holds the CCD holding unit 31. The CCD holding unit 31 can be attached to the base member 20 with the spacer 34 interposed therebetween. By changing the thickness of the spacer 34, the incident position of the reflected light on the light receiving surface 22A of the CCD 22 is changed to the light receiving surface. Adjustment can be made in a direction orthogonal to the longitudinal direction of 22A.

  The CCD holding part 31 is formed in a substantially L shape in a side view by integrally forming a mounting plate 35 to which the CCD 22 is mounted and a support plate 36 that supports the mounting plate 35. The mounting plate 35 is mounted so that the CCD 22 faces the surface, and a rectangular opening 35A is formed at a position facing the light receiving surface 22A of the CCD 22. Thereby, the reflected light from the object enters the light receiving surface 22A of the CCD 22 through the opening 35A. The support plate 36 protrudes from the end of the mounting plate 35 to the side opposite to the side on which the CCD 22 is mounted, and its lower surface forms a side surface facing the upper surface of the base member 20. This side surface is formed by a plane parallel to the above-described optical path surface.

  In the vicinity of the coupling position of the support plate 36 with the mounting plate 35, the elongated hole 33 is formed so as to extend in a direction parallel to the light receiving surface 22A of the CCD 22. The long hole 33 has a major axis along the longitudinal direction of the light receiving surface 22A, and the width in the minor axis direction perpendicular to the major axis is constant along the major axis. The diameter of the pin 32 inserted into the long hole 33 is substantially the same as the width of the long hole 33 in the short axis direction, and the pin 32 is inserted into the long hole 33 in the short axis direction. The diameter is such that rattling does not occur. By inserting the pin 32 into the long hole 33 and attaching the CCD holding portion 31 to the base member 20, the long hole 33 and the pin 32 can be disposed in the vicinity of the light receiving surface 22 </ b> A of the CCD 22.

  The CCD holding part 31 attached to the base member 20 in this way can slide in a direction parallel to the light receiving surface 22A of the CCD 22, and is in the sliding direction and the optical axis L2 of the reflected light from the object. It can be rotated around an orthogonal pin 32. Therefore, by rotating the CCD holding unit 31 around the pin 32, the distance of the light receiving surface 22A of the CCD 22 with respect to the reflected light from the object can be adjusted, and the reflected light can be imaged on the light receiving surface 22A. Further, by sliding the CCD holding unit 31 in a direction parallel to the light receiving surface 22A of the CCD 22, the imaging position of the reflected light in the longitudinal direction of the light receiving surface 22A can be adjusted. In the present embodiment, the imaging position means a position where the reflected light from the object is most focused, and at the imaging position, the unit area is larger than other positions in the optical axis L2 direction of the reflected light. There is a lot of light.

  As in this embodiment, in the case of a configuration in which scattered light is received as reflected light from an object and displacement of the object is detected, compared to a case in which direct reflected light from the object is received. The maximum amount of light received is small. Therefore, in order to detect the displacement of the object satisfactorily, it is necessary to adjust the imaging position of the reflected light with respect to the light receiving surface 22A of the CCD 22 with high accuracy, thereby increasing the maximum amount of received light as much as possible. For this purpose, it is preferable to arrange each optical component in accordance with the Scheinproof law.

  FIG. 5 is a schematic diagram for explaining a method of adjusting the optical displacement sensor 1 according to the Scheinproof law. In FIG. 5, the case where the light receiving surface 22A of the CCD 22 is located on the light receiving lens 23 side of the pin 32 will be described as an example. However, as described in FIGS. A configuration in which the light receiving surface 22A is located on the opposite side of the lens 23 may be employed. That is, as long as the pin 32 is arranged near the light receiving surface 22A, either the pin 32 or the light receiving surface 22A may be arranged on the light receiving lens 23 side. Further, the rotation axis constituted by the pins 32 may be positioned on the light receiving surface 22A of the CCD 22.

  The optical displacement sensor 1 can detect the displacement of the object between the first detection position P1 and the second detection position P2 that are at different positions in the irradiation direction of the light emitted from the laser diode 21. That is, as shown in FIG. 5C, the first detection position P1 that is far from the laser diode 21 on the optical axis L1 of the irradiation light and the second detection position P2 that is near from the laser diode 21 The range in between is preset as a detection range, and the reflected light from the detection surface W of the object within the range can be received by the light receiving surface 22A of the CCD 22. The optical axis L2 of each reflected light from the first detection position P1 and the second detection position P2 extends along the above-described optical path surface.

  As shown in FIG. 5A, in this optical displacement sensor 1, the optical axis L2 of the reflected light from the first detection position P1 intersects on the extension line of the pin 32 that rotatably supports the CCD holding unit 31. As described above, the position of the pin 32 is set in advance. Therefore, by shifting the position of the light receiving lens 23 from the state of FIG. 5A in the direction parallel to the optical axis L2 of the reflected light as indicated by an arrow in FIG. 5B, the first detection position P1. It is possible to adjust so that the reflected light from the light forms an image on the light receiving surface 22A of the CCD 22.

  Thus, in a state in which the reflected light from the first detection position P1 is adjusted to form an image on the light receiving surface 22A of the CCD 22, even if the CCD holding unit 31 is subsequently slid or rotated, the first The amount of change in the imaging position of the reflected light from the one detection position P1 can be reduced. That is, even if the CCD holding unit 31 is slid parallel to the light receiving surface 22A, the distance between the incident position of the reflected light on the light receiving surface 22A and the light receiving lens 23 does not change. Further, since the optical axis L2 of the reflected light from the first detection position P1 and the rotation axis constituted by the pins 32 intersect, even if the CCD holding unit 31 is rotated around the pins 32, the light receiving surface The amount of change in the distance between the incident position of the reflected light and the light receiving lens 23 in 22A is smaller than the amount of change in the distance between the portion other than the incident position and the light receiving lens 23. In particular, since the elongated hole 33 and the pin 32 inserted into the elongated hole 33 are disposed in the vicinity of the light receiving surface 22A, the amount of change in the imaging position of the reflected light from the first detection position P1 can be further reduced. Can do.

  After adjusting the reflected light from the first detection position P1 to form an image on the light receiving surface 22A of the CCD 22 as described above, the CCD holding unit 31 is slid or rotated as indicated by an arrow in FIG. Thus, the reflected light from the second detection position P2 can be adjusted to form an image on the light receiving surface 22A. That is, by sliding the CCD holding unit 31 with respect to the reflected light from the second detection position P2 that passes through the light receiving lens 23 at an angle different from the reflected light from the first detection position P1, the second detection position is obtained. The reflected light from P2 can be adjusted so as to enter the light receiving surface 22A. Further, by rotating the CCD holding unit 31, the distance between the incident position of the reflected light from the second detection position P2 on the light receiving surface 22A and the light receiving lens 23 is changed, and the reflected light from the second detection position P2 is received. The image can be adjusted so as to form an image on the surface 22A. Then, after adjusting the imaging position as described above, the adjustment work is completed by fixing the CCD holding portion 31 to the base member 20 using the fixing screw 37 (see FIG. 3) as a fixing means. To do.

  As described above, in the present embodiment, after adjusting the reflected light from the first detection position P1 to form an image on the light receiving surface 22A, the light receiving surface 22A is slid or rotated to move from the second detection position P2. Can be imaged on the light receiving surface 22A. At this time, as described above, the optical axis L2 of the reflected light from the first detection position P1 intersects with the rotation axis constituted by the pin 32, and the long hole 33 and the pin 32 are disposed in the vicinity of the light receiving surface 22A. Therefore, even when the light receiving surface 22A is slid or rotated, the amount of change in the imaging position of the reflected light from the first detection position P1 can be reduced. Therefore, the imaging position of the reflected light from the first detection position P1 and the second detection position P2 can be quickly adjusted and an optical arrangement in accordance with the Scheinproof law can be achieved. It can be done easily.

  In particular, the slide mechanism and the rotation mechanism can be formed with a simple configuration in which the pin 32 is slidably inserted into the long hole 33 formed along the longitudinal direction of the light receiving surface 22A. Therefore, a mechanism that can easily adjust the imaging position can be realized with a simple configuration. Further, since the light receiving surface 22A can be slid and rotated at the same time, the image forming position can be adjusted more easily.

  In the above description, the case where the irradiation light from the laser diode 21 is irradiated in a direction orthogonal to the detection surface W of the object has been described. However, as shown by the broken line in FIG. In some cases, the optical axis L1 of the irradiation light from 21 is deviated from the orthogonal direction. Even in such a case, since the distance between the light receiving surface 22A of the CCD 22 and the light receiving lens 23 is very short compared to the distance between the inspection surface W of the object and the light receiving lens 23, FIG. As is apparent, the deviation of the incident position of the reflected light on the light receiving surface 22A with respect to the deviation of the optical axis L1 of the irradiation light is very small. Therefore, even when the optical axis L1 of the irradiation light from the laser diode 21 is slightly shifted, the image forming position is adjusted by the adjustment method described with reference to FIG. Each optical component can be arranged in a state in compliance.

  Although not shown in the drawing, in the present embodiment, the light receiving lens holding portion 29 that holds the light receiving lens 23 is fixed to the base member 20 at a plurality of different positions on the optical axis L2 of the reflected light from the object. Can be done. Therefore, by changing the mounting position of the light receiving lens holding portion 29, the distance of the light receiving lens 23 to the light receiving surface 22A of the CCD 22 is changed, and the position of the object on which the reflected light is imaged on the light receiving surface 22A is changed. Can do. Even when the position of the object on which the reflected light is imaged on the light receiving surface 22A is changed in this way, in the present embodiment, the image is similarly formed by using the adjustment method described in FIG. The position can be adjusted. Therefore, the first detection position P1 can be easily changed by changing the mounting position of the light receiving lens holding portion 29, and the imaging position can be adjusted by the same adjustment method even after the change. Therefore, the optical displacement sensor 1 that can be used in various detection ranges can be configured.

  In the above embodiment, the detection range of the optical displacement sensor 1 includes the first detection position P1 that is far from the laser diode 21 on the optical axis L1 of the irradiation light and the second detection that is near the distance from the laser diode 21. The case where the range is between the position P2 has been described. However, the present invention is not limited to such a configuration, and a detection position with a shorter distance from the laser diode 21 on the optical axis L1 of the irradiation light is set as a first detection position, and a detection position with a longer distance from the laser diode 21 is set as a detection position. It is good also as a 2nd detection position.

  That is, the laser diode 21 is not limited to the configuration in which the optical axis of the reflected light from the detection position with the longest distance to the laser diode 21 in the detection range intersects the rotation axis constituted by the pins 32. A configuration in which the optical axis of the reflected light from the detection position with the closest distance to and the rotation axis intersect may be employed. In this case, by shifting the position of the light receiving lens 23 in the direction parallel to the optical axis of the reflected light, the reflected light from the detection position closest to the laser diode 21 within the detection range forms an image on the light receiving surface 22A. After the adjustment, the light receiving surface 22A is slid or rotated, and the reflected light from the detection position with the longest distance to the laser diode in the detection range is imaged on the light receiving surface 22A. Optical arrangement.

  Further, the first detection position and the second detection position are not limited to a predetermined configuration, and are configured by an optical axis of reflected light from an arbitrary detection position and a pin 32 by adjusting the angle of the light receiving lens 23 or the like. The structure which can be set so that it may cross | intersect with a rotating shaft.

  In the above embodiment, the configuration in which the pin 32 formed on the base member 20 is inserted into the long hole 33 formed in the CCD holding unit 31 is described. The slide mechanism for sliding the CCD 22 and the rotating mechanism for rotating the CCD 22 may be realized by using a mechanism other than the pin 32 and the long hole 33.

It is the disassembled perspective view which showed one structural example of the optical displacement sensor by embodiment of this invention. It is the perspective view which showed one structural example of the optical system. FIG. 3 is a plan view of the optical system shown in FIG. 2. FIG. 3 is an exploded perspective view of the optical system shown in FIG. 2. It is the schematic for demonstrating the method to adjust this optical displacement sensor according to Scheinproof's law. It is a schematic diagram for demonstrating the aspect at the time of adjusting an optical displacement sensor according to Scheinproof's law.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Optical displacement sensor 3 Optical system 20 Base member 21 Laser diode 22 CCD
22A Light-receiving surface 23 Light-receiving lens 24 Collimator lens 31 CCD holder 32 Pin 33 Slot 37 Fixing screw P1 First detection position P2 Second detection position W Detection surface

Claims (2)

An optical displacement sensor capable of irradiating light toward an object and detecting displacement of the object between a first detection position and a second detection position at different positions in the irradiation direction,
A light projecting unit that emits light in a certain irradiation direction;
A light receiving lens for collecting the reflected light from the object;
A light receiving surface having a long light receiving surface in a certain direction, light reflected from the object is received by the light receiving surface via the light receiving lens, and a signal corresponding to a position in the longitudinal direction of the received reflected light on the light receiving surface A light receiving unit that outputs
A short axis that holds the light receiving unit and has a side surface parallel to the optical axis of each reflected light from the first detection position and the second detection position and is orthogonal to the long axis along the longitudinal direction of the light receiving surface A long hole having a constant width along the major axis is formed in the side surface and in the vicinity of the light receiving surface; and
A cylindrical projection having a base surface facing the side surface and having a diameter substantially the same as the width of the long hole and inserted into the long hole to form a slide mechanism and a rotation mechanism is the base surface. A base portion provided in
An optical displacement sensor, comprising: a holding unit that fixes the holding unit and the base unit. By irradiating light in a certain irradiation direction and receiving reflected light from the object on the light receiving surface via the light receiving lens, between the first detection position and the second detection position at different positions in the irradiation direction. Displacement of the object can be detected, and a slide mechanism that slides the light receiving surface in a parallel direction, an optical axis of reflected light from the object, and a rotation axis orthogonal to the slide direction of the light receiving surface A method of adjusting an optical displacement sensor, wherein the optical axis of the reflected light from the first detection position intersects with the rotation axis.
Adjusting the position of the light receiving lens so that the reflected light from the first detection position forms an image on the light receiving surface;
And a step of sliding or rotating the light receiving surface so that reflected light from the second detection position forms an image on the light receiving surface.

Images