TWI374786B - - Google Patents
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- Publication number
- TWI374786B TWI374786B TW095120975A TW95120975A TWI374786B TW I374786 B TWI374786 B TW I374786B TW 095120975 A TW095120975 A TW 095120975A TW 95120975 A TW95120975 A TW 95120975A TW I374786 B TWI374786 B TW I374786B
- Authority
- TW
- Taiwan
- Prior art keywords
- optical axis
- laser light
- position detector
- axis position
- laser
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 claims description 212
- 238000012545 processing Methods 0.000 claims description 51
- 230000010354 integration Effects 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 14
- 230000008569 process Effects 0.000 claims description 9
- 238000004886 process control Methods 0.000 claims 1
- 238000004364 calculation method Methods 0.000 description 8
- 230000008859 change Effects 0.000 description 8
- 239000011159 matrix material Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000002131 composite material Substances 0.000 description 4
- 230000005484 gravity Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000002265 prevention Effects 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 230000002194 synthesizing effect Effects 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 239000000470 constituent Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Lasers (AREA)
- Laser Beam Processing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005114024A JP2006289443A (ja) | 2005-04-11 | 2005-04-11 | レーザ加工装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200800459A TW200800459A (en) | 2008-01-01 |
| TWI374786B true TWI374786B (enrdf_load_stackoverflow) | 2012-10-21 |
Family
ID=37410601
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095120975A TW200800459A (en) | 2005-04-11 | 2006-06-13 | Laser beam machining device |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2006289443A (enrdf_load_stackoverflow) |
| TW (1) | TW200800459A (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5545830B2 (ja) * | 2010-03-31 | 2014-07-09 | 協和ファインテック株式会社 | 各段がモジュール化された多段増幅式レーザーシステムの自動最適化システム |
| JP5931537B2 (ja) * | 2012-03-28 | 2016-06-08 | 東レエンジニアリング株式会社 | レーザの光軸アライメント方法およびそれを用いたレーザ加工装置 |
| WO2020241783A1 (ja) * | 2019-05-30 | 2020-12-03 | パナソニックＩｐマネジメント株式会社 | 変動要因特定方法及びレーザ加工装置 |
| WO2021210104A1 (ja) * | 2020-04-15 | 2021-10-21 | 株式会社ニコン | 加工システム及び計測部材 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2800949B2 (ja) * | 1990-05-11 | 1998-09-21 | 株式会社アマダ | レーザ加工機のノズル芯出し装置 |
| JP3003731B2 (ja) * | 1991-11-14 | 2000-01-31 | 日本電気株式会社 | レーザ加工装置の光軸調整方法 |
| JP3162458B2 (ja) * | 1992-02-17 | 2001-04-25 | レーザー濃縮技術研究組合 | 自動アライメント調整装置 |
| JP2809064B2 (ja) * | 1993-10-22 | 1998-10-08 | 株式会社新潟鉄工所 | レーザ加工機の制御方法及び装置 |
| JPH11202110A (ja) * | 1998-01-20 | 1999-07-30 | Nippon Steel Corp | 可変形反射鏡 |
| JP2000167683A (ja) * | 1998-12-03 | 2000-06-20 | Mitsubishi Electric Corp | 反射鏡による光路調整装置 |
| JP2004066300A (ja) * | 2002-08-07 | 2004-03-04 | Matsushita Electric Ind Co Ltd | レーザ加工装置およびレーザ加工方法 |
-
2005
- 2005-04-11 JP JP2005114024A patent/JP2006289443A/ja active Pending
-
2006
- 2006-06-13 TW TW095120975A patent/TW200800459A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TW200800459A (en) | 2008-01-01 |
| JP2006289443A (ja) | 2006-10-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |