TWI373084B - - Google Patents

Info

Publication number
TWI373084B
TWI373084B TW094116910A TW94116910A TWI373084B TW I373084 B TWI373084 B TW I373084B TW 094116910 A TW094116910 A TW 094116910A TW 94116910 A TW94116910 A TW 94116910A TW I373084 B TWI373084 B TW I373084B
Authority
TW
Taiwan
Application number
TW094116910A
Other languages
Chinese (zh)
Other versions
TW200620519A (en
Inventor
Jun Mochizuki
Hisatomi Hosaka
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of TW200620519A publication Critical patent/TW200620519A/en
Application granted granted Critical
Publication of TWI373084B publication Critical patent/TWI373084B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0271—Arrangements for reducing stress or warp in rigid printed circuit boards, e.g. caused by loads, vibrations or differences in thermal expansion
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4688—Composite multilayer circuits, i.e. comprising insulating layers having different properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433—Sockets for IC's or transistors
    • G01R1/0441—Details
    • G01R1/0458—Details related to environmental aspects, e.g. temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07357—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with flexible bodies, e.g. buckling beams
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/06—Thermal details
    • H05K2201/068—Thermal details wherein the coefficient of thermal expansion is important
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09009—Substrate related
    • H05K2201/09036—Recesses or grooves in insulating substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
TW094116910A 2004-05-24 2005-05-24 Laminated board and probe card TW200620519A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004153231A JP4727948B2 (en) 2004-05-24 2004-05-24 Multilayer substrate used for probe card

Publications (2)

Publication Number Publication Date
TW200620519A TW200620519A (en) 2006-06-16
TWI373084B true TWI373084B (en) 2012-09-21

Family

ID=35428494

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094116910A TW200620519A (en) 2004-05-24 2005-05-24 Laminated board and probe card

Country Status (5)

Country Link
US (1) US7750655B2 (en)
JP (1) JP4727948B2 (en)
KR (1) KR100812418B1 (en)
TW (1) TW200620519A (en)
WO (1) WO2005114228A1 (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1959260B1 (en) 2005-12-05 2019-05-29 NHK Spring Company Limited Probe card
JP4823667B2 (en) 2005-12-05 2011-11-24 日本発條株式会社 Probe card
JP4842640B2 (en) * 2005-12-28 2011-12-21 日本発條株式会社 Probe card and inspection method
KR100904388B1 (en) * 2007-05-08 2009-06-26 주식회사 파이컴 Multi layer board and apparatus for inspecting electric condition having the same
JP5194215B2 (en) * 2008-03-21 2013-05-08 豊丸産業株式会社 Pachinko machine
KR20100019885A (en) * 2008-08-11 2010-02-19 삼성전기주식회사 Method of probe card
KR20100025900A (en) * 2008-08-28 2010-03-10 삼성전기주식회사 Probe card and manufaturing method thereof
JP2010243303A (en) * 2009-04-04 2010-10-28 Advanced Systems Japan Inc Low-thermal-expansion interposer
JP2010243302A (en) * 2009-04-04 2010-10-28 Advanced Systems Japan Inc Interference prevention structure probe card
CN102033144B (en) * 2009-09-30 2013-10-23 株式会社神户制钢所 Electric contact member
KR101048497B1 (en) * 2010-07-19 2011-07-12 (주) 마이크로프랜드 Probe card and method for manufacturing the same
WO2012011627A1 (en) * 2010-07-19 2012-01-26 (주) 마이크로프랜드 Probe card and manufacturing method therefor
JP5079890B2 (en) * 2011-01-05 2012-11-21 東京エレクトロン株式会社 Multilayer substrate and probe card
JPWO2013061486A1 (en) * 2011-10-26 2015-04-02 ユニテクノ株式会社 Contact probe and inspection socket with the same
US10371719B2 (en) * 2016-04-17 2019-08-06 Kinsus Interconnect Technology Corp. Printed circuit board circuit test fixture with adjustable density of test probes mounted thereon
JP2019160937A (en) * 2018-03-09 2019-09-19 東京エレクトロン株式会社 Position correction method, inspection device, and probe card
US11262401B2 (en) * 2020-04-22 2022-03-01 Mpi Corporation Wafer probe station

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05218149A (en) * 1992-02-04 1993-08-27 Tokyo Electron Ltd Probe device
JP3066784B2 (en) * 1992-12-14 2000-07-17 東京エレクトロン株式会社 Probe card and manufacturing method thereof
DE69416200T2 (en) 1993-06-16 1999-06-02 Nitto Denko Corp., Ibaraki, Osaka Probe construction
JPH0763787A (en) * 1993-06-16 1995-03-10 Nitto Denko Corp Probe structure
JPH0763786A (en) 1993-06-16 1995-03-10 Nitto Denko Corp Probe structure
JPH07263863A (en) * 1994-03-24 1995-10-13 Matsushita Electric Ind Co Ltd Thick film multilayer substrate
JP4108784B2 (en) * 1997-05-19 2008-06-25 松下電器産業株式会社 Circuit board
JP3365612B2 (en) * 1998-01-30 2003-01-14 富士通株式会社 Test equipment for electronic equipment
JP3565086B2 (en) * 1999-04-16 2004-09-15 富士通株式会社 Probe card and method for testing semiconductor device
EP1183604A2 (en) 1999-05-27 2002-03-06 Nanonexus, Inc. Test interface for electronic circuirts
JP2003506686A (en) 1999-07-28 2003-02-18 ナノネクサス インコーポレイテッド Structure and manufacturing method of integrated circuit wafer probe card assembly
JP2001056346A (en) * 1999-08-19 2001-02-27 Fujitsu Ltd Probe card and method for testing wafer on which a plurality of semiconductor device are formed
ATE311604T1 (en) 2000-06-20 2005-12-15 Nanonexus Inc INTEGRATED CIRCUIT TEST SYSTEM
JP4476467B2 (en) * 2000-11-06 2010-06-09 東京エレクトロン株式会社 Contactor assembly apparatus and assembly method
KR100445077B1 (en) * 2001-06-28 2004-08-21 동부전자 주식회사 Manufacturing Method For Semiconductor Device
CN1288450C (en) * 2001-07-11 2006-12-06 佛姆法克特股份有限公司 Method of manufacturing a probe card
US7071714B2 (en) * 2001-11-02 2006-07-04 Formfactor, Inc. Method and system for compensating for thermally induced motion of probe cards
JP4391717B2 (en) * 2002-01-09 2009-12-24 富士通マイクロエレクトロニクス株式会社 Contactor, manufacturing method thereof and contact method
JP2003279594A (en) * 2002-03-26 2003-10-02 Toray Ind Inc Circuit board for prober and its manufacturing method
JP4099412B2 (en) * 2003-03-19 2008-06-11 株式会社ルネサステクノロジ Manufacturing method of semiconductor integrated circuit device
US7446544B2 (en) * 2004-03-31 2008-11-04 Jsr Corporation Probe apparatus, wafer inspecting apparatus provided with the probe apparatus and wafer inspecting method

Also Published As

Publication number Publication date
KR20070026632A (en) 2007-03-08
US20080191720A1 (en) 2008-08-14
KR100812418B1 (en) 2008-03-10
WO2005114228A1 (en) 2005-12-01
JP2005337737A (en) 2005-12-08
TW200620519A (en) 2006-06-16
JP4727948B2 (en) 2011-07-20
US7750655B2 (en) 2010-07-06

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees