TWI371821B - Apparatus and method for bonding substrates - Google Patents
Apparatus and method for bonding substratesInfo
- Publication number
- TWI371821B TWI371821B TW096124848A TW96124848A TWI371821B TW I371821 B TWI371821 B TW I371821B TW 096124848 A TW096124848 A TW 096124848A TW 96124848 A TW96124848 A TW 96124848A TW I371821 B TWI371821 B TW I371821B
- Authority
- TW
- Taiwan
- Prior art keywords
- bonding substrates
- substrates
- bonding
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
- B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/70—Determining position or orientation of objects or cameras
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133354—Arrangements for aligning or assembling substrates
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Theoretical Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Fluid Mechanics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006222666 | 2006-08-17 | ||
JP2007138902A JP5117109B2 (en) | 2006-08-17 | 2007-05-25 | Bonded substrate manufacturing method and bonded substrate manufacturing apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200811987A TW200811987A (en) | 2008-03-01 |
TWI371821B true TWI371821B (en) | 2012-09-01 |
Family
ID=39292439
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW096124848A TWI371821B (en) | 2006-08-17 | 2007-07-09 | Apparatus and method for bonding substrates |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5117109B2 (en) |
KR (1) | KR100838684B1 (en) |
TW (1) | TWI371821B (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009157154A1 (en) * | 2008-06-26 | 2009-12-30 | 株式会社ニコン | Method and apparatus for manufacturing display element |
KR101116322B1 (en) * | 2009-08-17 | 2012-03-09 | 에이피시스템 주식회사 | Method of aligning substrate |
TWI449005B (en) * | 2010-12-31 | 2014-08-11 | Au Optronics Corp | Functional film lamination method, lamination device and film positioning method |
JP5710761B2 (en) * | 2011-06-15 | 2015-04-30 | クライムプロダクツ株式会社 | Workpiece precision laminating apparatus and workpiece precision laminating method |
KR102045234B1 (en) * | 2013-02-13 | 2019-11-18 | 삼성디스플레이 주식회사 | Method of verifying display lamination aligns |
EP3011589B9 (en) * | 2013-06-17 | 2018-09-05 | Ev Group E. Thallner GmbH | Device and method for aligning substrates |
CN105702881B (en) * | 2016-01-21 | 2017-11-07 | 京东方科技集团股份有限公司 | A kind of substrate jacking system, substrate package device and method |
JP7186632B2 (en) * | 2019-02-13 | 2022-12-09 | 三菱電機株式会社 | Measuring device and method |
CN110767589B (en) * | 2019-10-31 | 2021-11-19 | 长春长光圆辰微电子技术有限公司 | SOI silicon wafer alignment bonding method |
CN112908172A (en) * | 2021-02-01 | 2021-06-04 | 深圳市冠运智控科技有限公司 | Full-automatic mobile phone screen laminating system and laminating method thereof |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0778029A (en) * | 1993-09-08 | 1995-03-20 | Matsushita Electric Ind Co Ltd | Panel positioning device |
JP3363308B2 (en) * | 1996-04-18 | 2003-01-08 | 株式会社日立製作所 | Substrate assembling method and liquid crystal display cell manufacturing method |
JPH11183860A (en) | 1997-12-19 | 1999-07-09 | Fujitsu Ltd | Method and device for mutually superposing substrates |
JP2001264723A (en) | 2000-03-17 | 2001-09-26 | Seiko Epson Corp | Optoelectronic device, its manufacturing method and projection type display device |
JP2003066466A (en) * | 2001-08-23 | 2003-03-05 | Internatl Business Mach Corp <Ibm> | Substrate superposing device, substrate sticking method and manufacturing method for liquid crystal cell |
JP2004205530A (en) * | 2002-10-28 | 2004-07-22 | Matsushita Electric Ind Co Ltd | Device and method for aligning panel |
-
2007
- 2007-05-25 JP JP2007138902A patent/JP5117109B2/en not_active Expired - Fee Related
- 2007-07-09 TW TW096124848A patent/TWI371821B/en not_active IP Right Cessation
- 2007-07-24 KR KR1020070073866A patent/KR100838684B1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR100838684B1 (en) | 2008-06-16 |
JP2008070857A (en) | 2008-03-27 |
JP5117109B2 (en) | 2013-01-09 |
TW200811987A (en) | 2008-03-01 |
KR20080016449A (en) | 2008-02-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |