TWI367331B - Probe card assembly and probes therein - Google Patents
Probe card assembly and probes thereinInfo
- Publication number
- TWI367331B TWI367331B TW097122940A TW97122940A TWI367331B TW I367331 B TWI367331 B TW I367331B TW 097122940 A TW097122940 A TW 097122940A TW 97122940 A TW97122940 A TW 97122940A TW I367331 B TWI367331 B TW I367331B
- Authority
- TW
- Taiwan
- Prior art keywords
- probes
- probe card
- card assembly
- assembly
- probe
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06772—High frequency probes
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW097122940A TWI367331B (en) | 2008-06-19 | 2008-06-19 | Probe card assembly and probes therein |
US12/199,828 US7629803B1 (en) | 2008-06-19 | 2008-08-28 | Probe card assembly and test probes therein |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW097122940A TWI367331B (en) | 2008-06-19 | 2008-06-19 | Probe card assembly and probes therein |
Publications (2)
Publication Number | Publication Date |
---|---|
TW201000913A TW201000913A (en) | 2010-01-01 |
TWI367331B true TWI367331B (en) | 2012-07-01 |
Family
ID=41394271
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW097122940A TWI367331B (en) | 2008-06-19 | 2008-06-19 | Probe card assembly and probes therein |
Country Status (2)
Country | Link |
---|---|
US (1) | US7629803B1 (zh) |
TW (1) | TWI367331B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI641841B (zh) * | 2013-12-31 | 2018-11-21 | 美商色拉頓系統公司 | 用於測試一受試裝置之探針設備、經結構設計以在用於測試一受試裝置之一探針設備中使用之探針心及用於將一探針心閂至一裝置之方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI367329B (en) * | 2008-06-19 | 2012-07-01 | King Yuan Electronics Co Ltd | Probe card assembly |
TWI368743B (en) * | 2008-11-04 | 2012-07-21 | King Yuan Electronics Co Ltd | Probe card assembly and probes therein |
TWI425220B (zh) * | 2011-03-11 | 2014-02-01 | Mpi Corp | Cantilever probe card |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2632136B2 (ja) | 1994-10-17 | 1997-07-23 | 日本電子材料株式会社 | 高温測定用プローブカード |
US6143668A (en) | 1997-09-30 | 2000-11-07 | Intel Corporation | KLXX technology with integrated passivation process, probe geometry and probing process |
US6478596B2 (en) | 1998-07-09 | 2002-11-12 | Advantest Corporation | Semiconductor component mounting apparatus |
US6137297A (en) | 1999-01-06 | 2000-10-24 | Vertest Systemsn Corp. | Electronic test probe interface assembly and method of manufacture |
AU2003233659A1 (en) | 2002-05-23 | 2003-12-12 | Cascade Microtech, Inc. | Probe for testing a device under test |
US7057404B2 (en) | 2003-05-23 | 2006-06-06 | Sharp Laboratories Of America, Inc. | Shielded probe for testing a device under test |
TWM259163U (en) | 2004-05-14 | 2005-03-11 | Via Tech Inc | Covering structure of probe card |
US7451646B2 (en) * | 2005-07-28 | 2008-11-18 | The Regents Of The University Of California | Device and method for resonant high-speed microscopic impedance probe |
-
2008
- 2008-06-19 TW TW097122940A patent/TWI367331B/zh active
- 2008-08-28 US US12/199,828 patent/US7629803B1/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI641841B (zh) * | 2013-12-31 | 2018-11-21 | 美商色拉頓系統公司 | 用於測試一受試裝置之探針設備、經結構設計以在用於測試一受試裝置之一探針設備中使用之探針心及用於將一探針心閂至一裝置之方法 |
Also Published As
Publication number | Publication date |
---|---|
US20090315576A1 (en) | 2009-12-24 |
TW201000913A (en) | 2010-01-01 |
US7629803B1 (en) | 2009-12-08 |
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