TWI364062B - - Google Patents
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- TWI364062B TWI364062B TW093102825A TW93102825A TWI364062B TW I364062 B TWI364062 B TW I364062B TW 093102825 A TW093102825 A TW 093102825A TW 93102825 A TW93102825 A TW 93102825A TW I364062 B TWI364062 B TW I364062B
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- 239000000758 substrate Substances 0.000 claims description 36
- 239000007788 liquid Substances 0.000 claims description 19
- 238000012545 processing Methods 0.000 claims description 17
- 238000005096 rolling process Methods 0.000 claims description 17
- 239000002023 wood Substances 0.000 claims description 11
- 238000005507 spraying Methods 0.000 claims description 3
- 238000012546 transfer Methods 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 2
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 239000011521 glass Substances 0.000 description 9
- 238000011161 development Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 3
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 238000012993 chemical processing Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000005457 ice water Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000011179 visual inspection Methods 0.000 description 1
Classifications
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- E—FIXED CONSTRUCTIONS
- E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
- E01F—ADDITIONAL WORK, SUCH AS EQUIPPING ROADS OR THE CONSTRUCTION OF PLATFORMS, HELICOPTER LANDING STAGES, SIGNS, SNOW FENCES, OR THE LIKE
- E01F9/00—Arrangement of road signs or traffic signals; Arrangements for enforcing caution
- E01F9/60—Upright bodies, e.g. marker posts or bollards; Supports for road signs
- E01F9/604—Upright bodies, e.g. marker posts or bollards; Supports for road signs specially adapted for particular signalling purposes, e.g. for indicating curves, road works or pedestrian crossings
- E01F9/608—Upright bodies, e.g. marker posts or bollards; Supports for road signs specially adapted for particular signalling purposes, e.g. for indicating curves, road works or pedestrian crossings for guiding, warning or controlling traffic, e.g. delineator posts or milestones
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- E—FIXED CONSTRUCTIONS
- E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
- E01F—ADDITIONAL WORK, SUCH AS EQUIPPING ROADS OR THE CONSTRUCTION OF PLATFORMS, HELICOPTER LANDING STAGES, SIGNS, SNOW FENCES, OR THE LIKE
- E01F15/00—Safety arrangements for slowing, redirecting or stopping errant vehicles, e.g. guard posts or bollards; Arrangements for reducing damage to roadside structures due to vehicular impact
- E01F15/003—Individual devices arranged in spaced relationship, e.g. buffer bollards
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- E—FIXED CONSTRUCTIONS
- E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
- E01F—ADDITIONAL WORK, SUCH AS EQUIPPING ROADS OR THE CONSTRUCTION OF PLATFORMS, HELICOPTER LANDING STAGES, SIGNS, SNOW FENCES, OR THE LIKE
- E01F9/00—Arrangement of road signs or traffic signals; Arrangements for enforcing caution
- E01F9/60—Upright bodies, e.g. marker posts or bollards; Supports for road signs
- E01F9/604—Upright bodies, e.g. marker posts or bollards; Supports for road signs specially adapted for particular signalling purposes, e.g. for indicating curves, road works or pedestrian crossings
- E01F9/619—Upright bodies, e.g. marker posts or bollards; Supports for road signs specially adapted for particular signalling purposes, e.g. for indicating curves, road works or pedestrian crossings with reflectors; with means for keeping reflectors clean
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- E—FIXED CONSTRUCTIONS
- E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
- E01F—ADDITIONAL WORK, SUCH AS EQUIPPING ROADS OR THE CONSTRUCTION OF PLATFORMS, HELICOPTER LANDING STAGES, SIGNS, SNOW FENCES, OR THE LIKE
- E01F9/00—Arrangement of road signs or traffic signals; Arrangements for enforcing caution
- E01F9/60—Upright bodies, e.g. marker posts or bollards; Supports for road signs
- E01F9/623—Upright bodies, e.g. marker posts or bollards; Supports for road signs characterised by form or by structural features, e.g. for enabling displacement or deflection
- E01F9/627—Upright bodies, e.g. marker posts or bollards; Supports for road signs characterised by form or by structural features, e.g. for enabling displacement or deflection self-righting after deflection or displacement
- E01F9/629—Traffic guidance, warning or control posts, bollards, pillars or like upstanding bodies or structures
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- E—FIXED CONSTRUCTIONS
- E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
- E01F—ADDITIONAL WORK, SUCH AS EQUIPPING ROADS OR THE CONSTRUCTION OF PLATFORMS, HELICOPTER LANDING STAGES, SIGNS, SNOW FENCES, OR THE LIKE
- E01F9/00—Arrangement of road signs or traffic signals; Arrangements for enforcing caution
- E01F9/60—Upright bodies, e.g. marker posts or bollards; Supports for road signs
- E01F9/658—Upright bodies, e.g. marker posts or bollards; Supports for road signs characterised by means for fixing
Landscapes
- Engineering & Computer Science (AREA)
- Architecture (AREA)
- Civil Engineering (AREA)
- Structural Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Rollers For Roller Conveyors For Transfer (AREA)
- Coating Apparatus (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Surface Treatment Of Glass (AREA)
Description
1364062 (1) 玖、發明說明 【發明所屬之技術領域】 本發明係有關一種具有玻璃基板等的基板溫度之調整 功能的線內式處理裝置。 【先前技術】 例如，在使塗敷於玻璃基板的抗蝕液曝光時，當玻璃 基板的表面有溫度差，基板表面的處理液之揮發速度部分 性改變’因其影響使表面的抗蝕顯影化學處理速度產生差 値，導致不均。 爲了改善上述情況，習知提案一種：將與冰水主機單 元（chi.l]er unit)連接的溫調夾盤設計在淸洗室內，雖使玻 璃基板與該溫調夾盤密接，惟在此花費過多時間。在此， 於玻璃基板的表面與背面的前後配置左右保留間隔以噴出 溫調空氣的噴嘴（專利文獻1 )。 【專利文獻】 (專利文獻1) 特開2002-72492 段落0002-0006 【發明內容】 〔發明所欲解決的課題〕 如專利文獻1所揭示，將溫調空氣噴塗於玻璃基板的 表面及背面，在短時間內可使玻璃基板的表面溫度均勻。 然而，在該方法中，捲起微粒（Particle)，產生微粒 附著於基板表面的新問題。特別是在玻璃基板大型化的今 -4 - (2) 1364062 .. 天，不均的產生將導致大的問題。 〔用以解決課題之方案〕 爲了解決上述課題，本發明之線內式處理裝置係藉由 以多數條滾木構成的搬送線一邊搬送基板一邊進行處理者 ’係在上述搬送線的下方設置從滾木間將溫調用液體噴塗 於基板背面的溫度調整手段。 不使用空氣而藉著使用液體，不僅可抑制微粒的產生 ’亦可縮短溫調所需要的時間。 又’從上述溫度調整手段噴出的液體之溫度與供給至 基板表面的處理液大致相同，在防止處理不均（顯影不均） 等方面最爲理想。 又’在基板背面全體供給溫調用液體，進行迅速且均 句的溫調’以具有與所搬送的基板之寬度大致相等的長度 之液體噴出用縫隙較佳。 再者’搬送滾木（滾子）雖具有：與基板背面接觸的部 分與軸向分離而設置的不連續型滾木、以及在全面應與基 丰反胃面接觸的軸向上設爲相同徑的連續型滾木，惟由於藉 I $ 連續型滾木使供給至基板背面的溫調液普及到基板 胃®全體’因此必須配置一部分連續型滾木作爲搬送滾木 較爲理想。 【實施方式】 &下’依據添附圖面說明本發明的實施形態。第1圖 -5- (4) (4)1364062 滚木7’在此等不連續型滾木7之間配置連續型滾木2<) 如此，藉著設置不連續型滾木7謀求成本降低，而間隔配 置連續型滾木2，亦可使溫調液普及到基板背面的全面。 此外’在實施例中，雖將本發明之線內式處理裝置用 於顯影處理之際的基板溫度調整，但並不限定於此。例如 ’亦可作爲抗蝕劑塗敷之前處理。 〔發明的功效〕 根據以上所說明之本發明的線內式處理裝置，由於在 搬送線的下方設置從滾木之間將溫調用的液體噴塗於基板 背面之溫度調整手段，因此可抑制微粒的產生，且可在短 時間內進行均勻的溫調。 特別是，將所供給的溫調用液體的溫度供給至基板表 面的處理液（顯影液等）設爲大致相同，又藉著全面供給至 基板背面，更可抑制處理不均。 一般顯影不均雖以使用鈉光燈之目視檢查判斷，惟使 用本發明裝置進行顯影時，以上述檢査無法辨識出不均。 【圖式簡要說明】 第】圖係有關本發明之線內式處理裝置的斜視圖。 第2圖係該線內式處理裝置的側面圖。 第3圖係其他實施例的線內式處理裝置的平面圖。 〔元件符號說明〕 (5) (5)1364062 1 :搬送線 2 :連續型滾木 3 :溫度調整手段 4 :溫調液體噴出噴嘴 4 a :縫隙 5 :冰水主機 6 :顯影液供給噴嘴 7a :與玻璃基板的背面接觸的部分 7 :不連續型滾木 -8 -
Claims (1)
1364062 拾、申請專利範圍 第93 1 02825號專利申請案 中文申請專利範圍修正本
民國99年1月6日修正 I 一種線內式處理裝置，係藉由以多數條滾木構成 的搬送線一邊搬送基板一邊進行處理者，其特徵在於：在 上述搬送線的下方設置從滾木間將溫調用的液體噴塗於基 板背面的溫度調整手段， i述溫度調整手段係噴出與供給至基板表面的處理液 大致相同溫度的液體，且以上述基板的搬送方向爲基準， 在比被供給於基板表面的處理液的位置更上流側配置溫度 調整手段， 上述搬送線係與基板背面接觸的部分爲在軸向分離設 置的不連續型滾木、及全面應與基板背面接觸之於軸向設 爲相同徑的連續型滾木的混合，上述不連續型滾木係滾木 的部分以彼此成鋸齒狀的方式配置，其間配置連續型滾木 2.如申請專利範圍第1項的線內式處理裝置’其中 ’上述溫度調整手段係具有與所搬送的基板之寬度大致相 等長度的液體噴出用縫隙。 1364062 751569
第2圖 W 〇 p onoTO υ ^ υ 2 4 —I溫調水 2 1364062
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003032454A JP3949065B2 (ja) | 2003-02-10 | 2003-02-10 | インライン式処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200416830A TW200416830A (en) | 2004-09-01 |
| TWI364062B true TWI364062B (zh) | 2012-05-11 |
Family
ID=33018796
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW093102825A TW200416830A (en) | 2003-02-10 | 2004-02-06 | In-line processing apparatus |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP3949065B2 (zh) |
| KR (1) | KR101078908B1 (zh) |
| TW (1) | TW200416830A (zh) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7576835B2 (en) * | 2005-07-06 | 2009-08-18 | Asml Netherlands B.V. | Substrate handler, lithographic apparatus and device manufacturing method |
| JP4370363B1 (ja) * | 2009-03-16 | 2009-11-25 | 株式会社幸和 | 加熱及び冷却機能を備えたコンベア |
| TWI421203B (zh) * | 2008-08-05 | 2014-01-01 | Kowa Co | 具加熱功能之輸送帶 |
| JP4675401B2 (ja) * | 2008-08-29 | 2011-04-20 | 東京エレクトロン株式会社 | 基板搬送装置 |
| JP4920765B2 (ja) * | 2010-05-21 | 2012-04-18 | 株式会社朝日工業社 | ガラス基板温調用ノズル構造 |
| JP4975180B2 (ja) * | 2011-08-29 | 2012-07-11 | 株式会社朝日工業社 | ガラス基板温調用ノズル構造 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3701007B2 (ja) * | 2000-08-31 | 2005-09-28 | 株式会社朝日工業社 | ガラス基板の温度制御方法及びその装置 |
| JP4653897B2 (ja) * | 2001-03-23 | 2011-03-16 | 株式会社リコー | 液体現像剤の塗布装置、液体現像装置及び画像形成装置 |
-
2003
- 2003-02-10 JP JP2003032454A patent/JP3949065B2/ja not_active Expired - Fee Related
-
2004
- 2004-02-06 TW TW093102825A patent/TW200416830A/zh not_active IP Right Cessation
- 2004-02-09 KR KR1020040008248A patent/KR101078908B1/ko active IP Right Grant
Also Published As
| Publication number | Publication date |
|---|---|
| KR20040073314A (ko) | 2004-08-19 |
| KR101078908B1 (ko) | 2011-11-01 |
| TW200416830A (en) | 2004-09-01 |
| JP2004247335A (ja) | 2004-09-02 |
| JP3949065B2 (ja) | 2007-07-25 |
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| MM4A | Annulment or lapse of patent due to non-payment of fees |