TWI355760B - - Google Patents
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- Publication number
- TWI355760B TWI355760B TW97104206A TW97104206A TWI355760B TW I355760 B TWI355760 B TW I355760B TW 97104206 A TW97104206 A TW 97104206A TW 97104206 A TW97104206 A TW 97104206A TW I355760 B TWI355760 B TW I355760B
- Authority
- TW
- Taiwan
- Prior art keywords
- light
- substrate
- film
- conductive
- epitaxial
- Prior art date
Links
- 239000000758 substrate Substances 0.000 claims description 76
- 239000010410 layer Substances 0.000 claims description 55
- 238000000034 method Methods 0.000 claims description 33
- 238000004519 manufacturing process Methods 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 23
- 239000013078 crystal Substances 0.000 claims description 19
- 230000008569 process Effects 0.000 claims description 17
- 238000007788 roughening Methods 0.000 claims description 15
- 230000000694 effects Effects 0.000 claims description 14
- 239000000853 adhesive Substances 0.000 claims description 12
- 230000001070 adhesive effect Effects 0.000 claims description 12
- 239000012790 adhesive layer Substances 0.000 claims description 12
- 241000238631 Hexapoda Species 0.000 claims description 9
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical class [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 8
- 239000007788 liquid Substances 0.000 claims description 7
- 238000002310 reflectometry Methods 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 3
- 239000002023 wood Substances 0.000 claims 1
- 238000005253 cladding Methods 0.000 description 19
- 238000000605 extraction Methods 0.000 description 5
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910002601 GaN Inorganic materials 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000000407 epitaxy Methods 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 238000005215 recombination Methods 0.000 description 3
- 230000006798 recombination Effects 0.000 description 3
- 229910001020 Au alloy Inorganic materials 0.000 description 2
- 229910001128 Sn alloy Inorganic materials 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical group [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005250 beta ray Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 210000003746 feather Anatomy 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 239000002918 waste heat Substances 0.000 description 1
Landscapes
- Led Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW97104206A TW200935619A (en) | 2008-02-04 | 2008-02-04 | Fabrication method for vertical conductive type LED having double coarse faces and its product |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW97104206A TW200935619A (en) | 2008-02-04 | 2008-02-04 | Fabrication method for vertical conductive type LED having double coarse faces and its product |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200935619A TW200935619A (en) | 2009-08-16 |
| TWI355760B true TWI355760B (enExample) | 2012-01-01 |
Family
ID=44866624
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW97104206A TW200935619A (en) | 2008-02-04 | 2008-02-04 | Fabrication method for vertical conductive type LED having double coarse faces and its product |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200935619A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104465899A (zh) * | 2014-11-28 | 2015-03-25 | 西安神光皓瑞光电科技有限公司 | 一种led垂直结构的制备方法 |
-
2008
- 2008-02-04 TW TW97104206A patent/TW200935619A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TW200935619A (en) | 2009-08-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |