1355323 九、發明說明 【發明所屬之技術領域】 本發明是關於液晶用的玻璃基板或半導體晶圓等 狀工件出入保管庫用的多關節機械人。 【先前技術】 習知的多關節機械人，已提案有2個機械人。 第1個提案的多關節機械人，是藉由肩關節部旋 心和台座旋轉中心的偏置以在轉動台座時可讓多關節 人的旋繞半徑變小（例如參照專利文獻1 )。 第2個提案的多關節機械人，是蛙腳型機械人（ 參照專利文獻2 )。 習知第1個提案的多關節機械人1，如第4圖所 具備有由關節部3、4、5連結成可旋轉，由旋轉驅動 達旋轉力可進行所期望動作的二組臂2，構成將設置 組多關節臂2基端的關節部3的旋轉中心軸配置在上 或軸方向）。 多關節機械人1，具備有二組臂2，一方的臂驅 裝置2爲供應用，另一方爲取出用，可同時執行工件 供應動作和另一工件9的取出動作。 此外，習知的多關節機械人1，其利用臂2得以 件9加保持的手部8是構成可朝圖中箭頭符號X所示 件9取出、供應方向直線移動。 另外’習知的多關節機械人1，具備可使設有臂 薄板 轉中 機械 例如 示， 源傳 在二 下（ 動式 9的 對工 的工 2的 -5- 1355323 支撐構件10上下移動的移動構件11(以下，稱上下移動 構件11)，構成可調整臂2的上下位置。此外，上下移動 構件Π的台座13是設置成可轉動，可使多關節機械人1 旋繞改變方向。 再加上，本實施形態的多關節機械人1，其台座13是 設置成可朝圖中箭頭符號Y所示方向，即可朝分別正交於 手部8移動方向和支撐構件10上下移動方向的方向移動 在基座台14上藉此可調整上下移動構件11的位置。 此外，習知的多關節機械人1所具備的二組臂2，例 如具有複數的關節部，即多關節機械人1是構成爲水平關 節式機械人。本實施形態的多關節臂2，具備：第一臂6 (以下，稱上腕6)，和與上腕6連結的第二臂7(以下 ，稱前腕7)，及與前腕7連結可保持著工件9的手部8 〇 上腕6的基端是透過驅動軸連結在支撐構件10，構成 可轉動的關節部3(以下，稱肩關節部3)。該肩關節部3 是成爲多關節臂2基端的關節部3。此外，上腕6前端和 前腕7基端是透過驅動軸連結著，構成可轉動的關節部4 (以下，稱肘關節部4)。另外，前腕7前端和手部8是 透過驅動軸連結著，構成可轉動的關節部5(以下，稱手 關節部5)。該等構件是配置成可使肩關節部3的旋轉中 心軸位於同軸上地成對面配置在上下方向。 多關節臂2是利用未圖示的旋轉驅動源轉動肩關節部 3和肘關節部4和手關節部5，朝工件取出、供應方向移 -6- 1355323 動手部8。此時’多關節臂2’其機構上，是執行伸縮動 作讓手部8朝一方向直線移動在伸直上腕6和前腕7的伸 長位置’及上腕ό和前腕7成爲摺疊狀態的縮回位置之間 〇 其次’針對第2個習知多關節機械人進行說明。如第 5圖所示’臂101’具備：第一臂ill (以下，稱上腕ηι );和上腕HI連結的第二臂112(以下，稱前腕112) :及和前腕112連結可保持著工件109的手部113。 接著，上腕111的基端是連結於基台1〇2的驅動軸， 構成可轉動的關節部114(以下，稱肩關節部114)。此 外’上腕111的前端和前腕112的基端是透過驅動軸形成 連結’構成可轉動的關節部1 1 5 (以下，稱肘關節部！ i 5 )。另外’前腕112的前端和手部113的基部即橫柱117a 、117b分別是透過驅動軸形成連結，構成可轉動的關節部 116 (以下'稱手關卽部116)。 〔專利文獻1〕日本特開2001-274218號公報（第4 頁〜第5頁、第1圖、第2圖） 〔專利文獻2〕日本特開平π_333768號公報第4頁 、第4圖） 【發明內容】 〔發明欲解決之課題〕 液晶用玻璃基板或半導體晶圓等薄板狀工件出入保管 庫用的多關節機械人隨著大型化的趨勢，其處理基板的片 1355323 數也被要求增加的同時還被要求能以短時間進行處理。因 此，對於機械人的要求，是不管基板配置用保管庫已經變 高到達天花板所造成的設備本身大型化，要實現高速、高 精度才是較大的課題。此外，爲了讓上述機械人能夠在無 塵室中工作，爲了提昇製造設備的配置密度，對於多關節 機械人的要求是希望足跡小，同時也希望旋轉半徑小避免 干涉到配置在作業場的裝置。 此外，液晶基板或半導體晶圓的生產片數年年增加， 爲了提高生產性，保管庫內從地面至幾乎達到作業場天花 板的高度爲止配置有基板，因此對於多關節機械人的要求 ，是希望能夠擴張可執行保管庫內的基板出入的傳遞路程 和提高搬運生產量。然而，就機械人而言，擴張傳遞路程. 勢必造成高層化，爲了縮小足跡，可採各式各樣的解決手 段，但也會產生高速驅動造成的機械零件破損等問題。 習知第1個提案的多關節機械人，其配置在上下的2 個臂的肘關節的伸出方向是驅動成相對於立柱成相反方向 伸出，因此於配備在立柱的移動機構的支撐部就會有較大 的彎矩荷重作用，重覆執行年年增加的基板處理片數操作 時，移動機構的支撐部會產生過度荷重造成的疲勞問題， 需要進行頻繁的維修，以致產生所謂因爲需要維修而降低 年度製造生產量的問題。 另外，習知第2個提案的多關節機械人，在兩臂縮回 時兩肘關節部會突出成左右對稱，以致會有雙臂式機械人 旋繞半徑區域變大的問題。再加上，爲避免2個手部接觸[Technical Field] The present invention relates to a multi-joint robot for entering and leaving a storage such as a glass substrate or a semiconductor wafer for liquid crystal. [Prior Art] A conventional multi-joint robot has proposed two robots. In the multi-joint robot of the first proposal, the rotation of the shoulder joint portion and the rotation center of the pedestal can reduce the winding radius of the multi-joint when the pedestal is rotated (see, for example, Patent Document 1). The multi-joint robot of the second proposal is a frog-foot type robot (refer to Patent Document 2). The multi-joint robot 1 of the first proposal has a second set of arms 2 that are coupled to each other by the joint portions 3, 4, and 5 so as to be rotatable, and that can be rotated by a rotational force to perform a desired operation. The rotation center axis of the joint portion 3 that sets the proximal end of the group multi-joint arm 2 is arranged in the upper or axial direction). The multi-joint robot 1 has two sets of arms 2, one of which is for supply and the other for take-out, and can simultaneously perform a workpiece supply operation and a take-out operation of another workpiece 9. Further, the conventional multi-joint robot 1 is configured such that the hand 8 held by the arm 2 can be taken out in the direction indicated by the arrow X in the figure and linearly moved in the supply direction. In addition, the conventional multi-joint robot 1 is provided with a 5 to 1355323 support member 10 that can be moved up and down by a machine that is provided with an arm thin plate, for example, and the source is transmitted twice (moving 9). The moving member 11 (hereinafter referred to as the up-and-down moving member 11) constitutes an up-and-down position of the adjustable arm 2. Further, the pedestal 13 of the vertical moving member 是 is rotatably provided so that the multi-joint robot 1 can be rotated and changed direction. In the multi-joint robot 1 of the present embodiment, the pedestal 13 is provided in a direction indicated by an arrow Y in the figure, that is, a direction orthogonal to the moving direction of the hand 8 and a direction in which the support member 10 moves up and down. The position of the vertical movement member 11 can be adjusted by moving on the base 14 . Further, the two sets of arms 2 provided in the conventional multi-joint robot 1 have, for example, a plurality of joint portions, that is, the multi-joint robot 1 is The multi-joint arm 2 of the present embodiment includes a first arm 6 (hereinafter referred to as an upper wrist 6) and a second arm 7 (hereinafter referred to as a front wrist 7) coupled to the upper wrist 6 and Attached to the front wrist 7 to hold the workpiece 9 The base end of the upper arm 6 is connected to the support member 10 via a drive shaft, and constitutes a rotatable joint portion 3 (hereinafter referred to as a shoulder joint portion 3). The shoulder joint portion 3 is a joint that becomes the base end of the multi-joint arm 2 The front end of the upper wrist 6 and the base end of the front wrist 7 are coupled to each other via a drive shaft to constitute a rotatable joint portion 4 (hereinafter referred to as an elbow joint portion 4). Further, the front end of the front wrist 7 and the hand 8 are transmitted through the drive shaft. The joint portion 5 (hereinafter referred to as the hand joint portion 5) that is rotatable is configured to be disposed. The members are arranged such that the central axis of rotation of the shoulder joint portion 3 is disposed on the coaxial surface in a vertical direction. 2, the shoulder joint portion 3, the elbow joint portion 4, and the hand joint portion 5 are rotated by a rotary drive source (not shown), and are taken out toward the workpiece, and the supply direction is shifted by -6 - 1355323. The hand 8 is at this time. In the mechanism, the telescopic action is performed to move the hand 8 linearly in one direction between the extended position of the upper wrist 6 and the front wrist 7 and the retracted position where the upper wrist and the front wrist 7 are in a folded state. Know the multi-joint robot to explain. As shown in Figure 5. The 'arm 101' includes a first arm ill (hereinafter referred to as an upper wrist ηι), a second arm 112 coupled to the upper wrist HI (hereinafter referred to as a front wrist 112), and a hand 113 that is coupled to the front wrist 112 to hold the workpiece 109. Next, the proximal end of the upper wrist 111 is a drive shaft coupled to the base 1〇2, and constitutes a rotatable joint portion 114 (hereinafter referred to as a shoulder joint portion 114). Further, the front end of the upper wrist 111 and the base end of the front wrist 112 are The connecting shaft constituting the drive shaft constitutes a rotatable joint portion 1 15 (hereinafter referred to as an elbow joint portion ! i 5 ). Further, the front end of the front wrist 112 and the base portion of the hand 113, that is, the horizontal columns 117a and 117b are respectively transmitted through the drive shaft. The connection is formed to constitute a rotatable joint portion 116 (hereinafter referred to as a "handle portion 116"). [Patent Document 1] Japanese Laid-Open Patent Publication No. 2001-274218 (page 4 to page 5, FIG. 1 and FIG. 2) [Patent Document 2] Japanese Patent Laid-Open No. π-333768 (page 4, FIG. 4) DISCLOSURE OF THE INVENTION PROBLEMS TO BE SOLVED BY THE INVENTION A multi-joint robot for entering and leaving a thin plate-shaped workpiece such as a liquid crystal glass substrate or a semiconductor wafer is required to increase in size as a result of increasing the size of a multi-joint robot for processing a substrate. At the same time, it is also required to be processed in a short time. Therefore, the demand for the robot is that the high-speed and high-precision of the equipment itself is a large problem regardless of the size of the equipment itself that has become higher in the storage space for the substrate. Further, in order to allow the above-mentioned robot to operate in a clean room, in order to increase the arrangement density of the manufacturing equipment, it is desirable for the multi-joint robot to have a small footprint, and it is also desirable to have a small radius of rotation to avoid interference with the device disposed in the work site. In addition, the number of productions of liquid crystal substrates or semiconductor wafers has increased year by year. In order to improve productivity, substrates are placed in the storage compartment from the ground to the height of the ceiling of the work site. Therefore, it is desirable for multi-joint robots. The expansion can carry out the transfer path of the substrate in and out of the storage and increase the throughput. However, as far as the robots are concerned, the expansion of the transmission path is bound to result in high-rises. In order to reduce the footprint, various solutions can be adopted, but problems such as damage to mechanical parts caused by high-speed driving are also generated. In the multi-joint robot of the first proposal, the extension direction of the elbow joints of the two arms disposed above and below is driven to extend in opposite directions with respect to the column, and thus the support portion of the moving mechanism provided on the column There will be a large bending moment load, and when the number of substrates processed by the number of substrates is increased repeatedly, the support portion of the moving mechanism will have fatigue problems caused by excessive load, and frequent maintenance is required, so that the so-called because of the need Maintenance reduces the problem of annual manufacturing throughput. Further, in the multi-joint robot of the second proposal, when the two arms are retracted, the two elbow joint portions are protruded to be bilaterally symmetrical, so that there is a problem that the two-armed robot has a large radius of the winding radius. Plus, to avoid 2 hand touches
-8- 1355323 是將逆C字型柱朝基台上部的旋繞中心的外側形成突出， 以致雙臂式機械人旋繞半徑變更大。此外，逆C字型柱的 重量大，會產生所謂的雙臂式機械人大型化的問題。 相對於此，爲避免碰撞到其他的裝置，雙臂式機械人 的周圍需要設置充分的空間，因此需要大型的無塵室和該 無塵室附帶的大型淨化設備等導致成本變高。此外，會產 生所謂無塵室內的雙臂式機械人佔有空間變大的問題。 接著，針對第2個提案的多關節機械人的2個臂換成 第1提案的多關節機械人的臂時的狀況進行檢討。於該狀 況時’基於其一方的臂爲轉內圈，因此能夠降低作用在立 柱所配備的移動機構支撐部的彎矩荷重。不過，由於—方 的臂爲轉內圈’所以可以想像到臂的肘關節和立柱會接觸 ’因此爲避免該現象產生會加長支撐部，藉此讓立柱不進 入臂的肘關節旋繞半徑內。此時，爲了讓手部朝一方向取 出或納入保管庫內的基板’是必須讓配置在上下的臂的支 撐構件的旋轉中心成爲一致，因此也需要加長轉外圈的臂 的支撐構件。如此一來’多關節機械人的旋繞半徑就變大 ，導致佔有空間變大的問題。 本發明是有鑑於上述問題點所硏創的發明，目的是提 供一種可使作用在立柱所配備之移動機構支撐部的彎矩荷 重小的同時，可使多關節機械人佔有空間小的多關節機械 人。 〔用以解決課題之手段〕 -9- 1355323 爲解決上述問題，本發明的構成如下述。 申請專利範圍第1項所記載的發明，多關節機械人，是由 :搬運物載放用的手部；與上述手部連結，至少具備2個 以上的旋轉關節，可使上述手部朝一方向伸縮移動，成上 下配置的一對多關節臂；安裝於立柱可在上下方向移動的 移動機構；分別連結上述一對多關節臂與上述移動機構用 的一對支撐構件；及配備在上述移動機構具有旋繞功能的 台座所構成，上述一對多關節臂之中的一方的多關節臂， 在上述手部從上述多關節臂縮回位置往復移動在伸張位置 之間時，可使上述的一方多關節臂的肘關節部在水平方向 且接近立柱的方向旋繞，上述一對多關節臂之中的另一方 的多關節臂，在上述手部從上述多關節臂縮回位置往復移. 動在伸張位置之間時，可使上述的另一方多關節臂的肘關 節部在水平方向且遠離立柱的方向旋繞。 申請專利範圍第2項所記載的發明，上述移動機構是 和上述多關節臂伸張方向同方向配置在上述立柱，配置在 上述移動機構的上述一對支撐構件之中的一方的支撐構件 是朝上述多關節臂伸張方向和正交於上述移動機構移動方 向的方向突出形成，另一方的支撐構件是形成爲朝伸張方 向前方伸長的形狀。 申請專利範圍第3項所記載的發明，上述一對多關節 臂之中的下臂的上述支撐構件是形成爲上述手部移動方向 的偏移（offset )形狀以在利用上述移動機構移動至上述 立柱最下位置時不會干涉到上述台座。-8- 1355323 is formed by projecting the reverse C-shaped column toward the outer side of the winding center of the upper portion of the base, so that the two-armed robot has a large change in the winding radius. Further, the weight of the reverse C-shaped column is large, which causes a problem that the so-called double-arm type robot is enlarged. On the other hand, in order to avoid collision with other devices, it is necessary to provide a sufficient space around the two-armed robot. Therefore, a large clean room and a large-scale purification device attached to the clean room are required, resulting in high cost. In addition, there is a problem that the space occupied by the two-armed robot in the so-called clean room becomes large. Next, the situation in which the arms of the multi-joint robot of the second proposal are replaced with the arms of the multi-joint robot of the first proposal is reviewed. In this case, the arm based on one of the arms is the inner ring, so that the bending load acting on the support portion of the moving mechanism provided in the column can be reduced. However, since the arm of the square is the inner ring, it is conceivable that the elbow joint and the column of the arm will contact each other. Therefore, in order to avoid this phenomenon, the support portion is lengthened, so that the column does not enter the elbow joint radius of the arm. At this time, in order to remove or insert the hand in one direction into the substrate in the storage, it is necessary to make the rotation centers of the supporting members disposed on the upper and lower arms uniform. Therefore, it is necessary to lengthen the supporting members of the arms of the outer ring. As a result, the radius of the winding of the multi-joint robot becomes larger, resulting in a problem that the occupied space becomes larger. The present invention has been made in view of the above problems, and an object of the invention is to provide a multi-joint that can make a multi-joint robot occupy a small space while the bending load applied to the moving mechanism supporting portion provided in the column is small. Robot. [Means for Solving the Problem] -9- 1355323 In order to solve the above problems, the configuration of the present invention is as follows. According to the invention of the first aspect of the invention, the multi-joint robot is a hand for carrying a load, and is connected to the hand, and has at least two or more rotating joints, and the hand can be oriented in one direction. a pair of multi-joint arms arranged to be vertically moved, a pair of multi-joint arms arranged to be vertically movable, a pair of support members for connecting the pair of multi-joint arms and the moving mechanism, and a moving mechanism a pedestal having a winding function, wherein the multi-joint arm of one of the pair of multi-joint arms can be reciprocated between the extension positions when the hand is retracted from the multi-joint arm retracted position The elbow joint portion of the joint arm is wound in a horizontal direction and in a direction close to the column, and the other multi-joint arm of the one-to-multi-joint arm is reciprocated from the retracted position of the multi-joint arm at the hand. When the position is between, the elbow joint portion of the other multi-joint arm described above can be wound in the horizontal direction and away from the column. According to the invention of the second aspect of the invention, the moving mechanism is disposed in the column in the same direction as the extending direction of the multi-joint arm, and one of the pair of supporting members disposed in the moving mechanism faces the The multi-joint arm extending direction and the direction orthogonal to the moving direction of the moving mechanism are formed to protrude, and the other supporting member is formed to be elongated forward in the extending direction. According to the invention of the third aspect of the invention, the support member of the lower arm of the one-to-multi-joint arm is formed in an offset shape of the hand movement direction, and is moved to the above by the moving mechanism. The pedestal will not interfere with the lowermost position of the column.
S -10- 1355323 申請專利範圍第4項所記載的發明，分別連接在上述 一對的上述支撐構件的上述旋轉關節是配置在上述多關節 臂伸張方向的偏移位置。 申請專利範圍第5項所記載的發明，分別連接在上述 —對的上述支撐構件的上述旋轉關節的任一方是相對配置 在上述手部移動方向的偏移位置。 申請專利範圍第6項所記載的發明，分別連接在上述 一對的上述支撐構件的上述旋轉關節之中，配置在上側的 上述旋轉關節是針對下側的上述旋轉關節，配置在上述多 關節臂伸張方向的偏移位置。 申請專利範圍第7項所記載的發明，分別配置在上述 支撐構件的各上述旋轉關節的旋轉中心，和手部的旋轉中 心’和台座的旋轉中心，是偏移成一致位於手部移動方向 的軸線上。 申請專利範圍第8項所記載的發明，上述旋轉關節的 旋轉中心和上述手部的旋轉中心和上述台座的旋轉中心的 位置關係，在上述手部移動成爲縮入時，形成爲從上述伸 張位置側依順序配置上述旋轉關節旋轉中心、上述台座的 旋轉中心、上述手部的旋轉中心在上述手部移動方向的軸 線上。 〔發明效果〕 根據申請專利範圍第1項及第5項所記載的發明時 -11 - 1355323 上述移動機構是和上述多關節臂伸張方向同方向配置在立 柱，配置在上述移動機構的上述多關節臂的任一支撐構件 ，是朝上述多關節臂伸張方向和正交於上述移動機構移動 方向的方向突出形成，另一個上述多關節臂的支撐構件是 形成朝伸張方向前方伸長的形狀，因此來自於滑動部的生 塵不會直接堆積在液晶基板或半導體晶圓，能夠降低污染 液晶基板或半導體晶圓的同時，能夠提昇基板或晶圓生產 上的成品良率。此外，支撐構件不會和台座衝突，能夠移 動至上下移動機構的最下面，能夠擴大支撐構件的活動範 圍。因此，即使液晶基板或半導體晶圓出入用的保管庫高 度不加高，還是能夠在保管庫下部配置液晶基板或半導體 晶圓，由於上下移動機構的活動變廣，所以能夠配置較务 的基板或晶圓片數。因此，能夠提高作業場全體的生產性 〇 根據申請專利範圍第3項至第5項所記載的發明時， 配置在上下的上述支撐構件的上述旋轉關節是相對配置在 偏移位置，所以旋轉關節所具備的機構零件其維修就變容 易’不用卸下多關節臂本體就能夠進行維修，因此能夠提 昇已考慮到維修時間的生產能力，能夠提高生產性。 根據申請專利範圍第6項及第7項所記載的發明時， 配置在上述支撐構件的上述旋轉關節的旋轉中心，和手部 的旋轉中心’和台座的旋轉中心，是偏移成一致位於手部 移動方向的軸線上，當機械人的手到達可縮回液晶基板或 半導體晶圓的位置時’利用台座的旋轉功能即使讓手部旋 -12- 1355323 繞還是能夠旋繞成不會突出基板或晶圓的旋繞半徑，能夠 縮小足跡，將機械人配置成不會干涉到配置在作業場的裝 置。此外，手部的旋轉中心和台座的旋轉中心在軸線上成 爲一致，基板或手部的荷重是均等作用，所以在多關節臂 往伸張或縮回位置移動時，就成爲不會產生偏荷重造成的 滾動或偏搖的構成，能夠高速並且高精度搬運基板。 根據申請專利範圍第8項所記載的發明時，配置在上 下的上述多關節臂其中任一多關節臂，在上述手部從上述 多關節臂縮回位置往復移動在伸張位置之間時，可使上述 多關節臂的肘關節部隨著上述手部的移動成旋繞移動在水 平方向並且接近立柱，所以能夠使作用在立柱上配備的移 動機構上所設置的支撐部的彎矩荷重變小，不會產生過度 荷重造成的疲勞問題，因此能夠不用頻繁進行維修，能夠 提昇年度的製造生產能力。 【實施方式】 〔發明之最佳實施形態〕 以下’參照圖面對本發明的實施形態進行說明。 〔實施例1〕 第1圖是本發明多關節機械人的上面圖。第2圖是本 發明多關節機械人的正面圖。 本發明的多關節機械人1，具備有由關節部3、4、5 連結成可旋轉’由旋轉驅動源傳達有旋轉力可進行所期望 之動作配置成相向的二組多關節臂2。此外，利用多關節 -13- 1355323 臂2得以保持著工件9的手部8是構成可朝圖中箭頭符號 X所示的工件9取出、供應方向直線移動。即，手部8是 朝一方向，從多關節臂2的縮回位置往復移動在伸張位置 之間。此時，上臂21的關節部4是隨著手部8的移動， 朝水平方向旋繞成接近立柱12，從工件9取出位置（上臂 21伸張位置）移動至上臂21縮回位置。另外，下臂22的 關節部4是隨著手部8的移動，朝水平方向旋繞成遠離立 柱12，從工件9取出位置（上臂21伸張位置）移動至上 臂2 1縮回位置。 此外，設置在二組多關節臂2基端的關節部3旋轉中 心軸的關係是如第2圖所示，構成爲相對於下臂22基端 的關節部3在工件9取出暨供應方向錯開位置配置上臂21 基端的關節部3。因此，安裝有上臂21基端關節部3的支 撐構件10，是形成從安裝在立柱12的上下移動構件11朝 手部8取出暨供應方向即上臂21伸張方向前方伸出的形 狀。藉由採用上述構成，使上臂21的關節部4即使旋繞 成接近立柱12，還是能夠旋轉而不接觸立柱12。另外， 由於上臂21的關節部4是可旋繞成接近立柱12,所以就 能夠使作用在立柱12上配備的上下移動構件11上所設置 的未圖示支撐部的彎矩荷重變小，同時不會造成多關節機 械人習知的旋繞半徑大的問題，因此，多關節機械人的佔 有空間就不會大。 另外，可使設有多關節臂2的支撐構件10上下移動 的上下移動構件11是配備在立柱12，構成爲可調整多關In the invention described in the fourth aspect of the invention, the rotary joints respectively connected to the pair of support members are disposed at offset positions in the extending direction of the multi-joint arms. According to the invention of the fifth aspect of the invention, the one of the rotary joints connected to the pair of support members is disposed at an offset position in the moving direction of the hand. The invention according to the sixth aspect of the invention is connected to the rotating joint of the pair of support members, and the rotating joint disposed on the upper side is disposed on the lower side of the rotating joint, and is disposed on the multi-joint arm The offset position of the extension direction. According to the invention of claim 7, the invention is disposed in the center of rotation of each of the rotating joints of the support member, and the center of rotation of the hand and the center of rotation of the pedestal are offset so as to be in the direction of movement of the hand. On the axis. According to the invention of claim 8, the positional relationship between the rotation center of the rotary joint and the rotation center of the hand and the rotation center of the pedestal is formed from the extension position when the hand movement is retracted. The rotation joint center of the rotation joint, the rotation center of the pedestal, and the rotation center of the hand are arranged on the axis of the hand movement direction. According to the invention described in the first and fifth aspects of the invention, the moving mechanism is disposed in the column in the same direction as the extending direction of the multi-joint arm, and is disposed in the plurality of joints of the moving mechanism. Any one of the support members of the arm is formed to protrude in a direction in which the multi-joint arm is extended and a direction orthogonal to the moving direction of the moving mechanism, and the support member of the other multi-joint arm is formed in a shape elongated in a forward direction in the extending direction, and thus The dust generated in the sliding portion is not directly deposited on the liquid crystal substrate or the semiconductor wafer, and the liquid crystal substrate or the semiconductor wafer can be reduced, and the yield of the substrate or the wafer can be improved. Further, the support member does not collide with the pedestal, and can be moved to the lowermost position of the vertical movement mechanism, and the movable range of the support member can be enlarged. Therefore, even if the height of the storage of the liquid crystal substrate or the semiconductor wafer is not increased, the liquid crystal substrate or the semiconductor wafer can be disposed under the storage, and since the movement of the vertical movement mechanism is widened, the substrate or the substrate can be disposed. The number of wafers. Therefore, it is possible to improve the productivity of the entire work site. According to the invention described in the third to fifth aspects of the patent application, the rotary joints of the support members disposed above and below are disposed at opposite positions, so that the joints are rotated. The mechanical parts that are provided are easy to maintain. 'The maintenance can be performed without removing the multi-joint arm body. Therefore, the productivity that has taken into consideration the maintenance time can be improved, and productivity can be improved. According to the invention described in the sixth and seventh aspects of the patent application, the center of rotation of the rotary joint disposed on the support member and the center of rotation of the hand and the center of rotation of the pedestal are offset to each other. On the axis of the moving direction, when the robot's hand reaches the position where the liquid crystal substrate or the semiconductor wafer can be retracted, 'the rotation function of the pedestal can be wound even if the hand is rotated 12-1355323 or not to protrude the substrate or The winding radius of the wafer can reduce the footprint and configure the robot to not interfere with the device disposed in the work field. In addition, the center of rotation of the hand and the center of rotation of the pedestal are aligned on the axis, and the load on the substrate or the hand is equal. Therefore, when the multi-joint arm moves to the extended or retracted position, the load is not generated. The rolling or tilting configuration enables the substrate to be transported at high speed and with high precision. According to the invention of the eighth aspect of the invention, the multi-joint arm disposed on the upper and lower multi-joint arms is reciprocally moved between the extension positions when the hand is retracted from the multi-joint arm retracted position. The elbow joint portion of the multi-joint arm is moved in a horizontal direction and close to the column in accordance with the movement of the hand, so that the bending load of the support portion provided on the moving mechanism provided on the column can be made small. There is no fatigue problem caused by excessive load, so it is possible to increase the annual manufacturing capacity without frequent maintenance. [Embodiment] BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the drawings. [Embodiment 1] Fig. 1 is a top view of a multi-joint robot of the present invention. Fig. 2 is a front elevational view of the multi-joint robot of the present invention. The multi-joint robot 1 of the present invention includes two sets of the multi-joint arms 2 that are coupled to each other by the joint portions 3, 4, and 5 so as to be rotatable by the rotational driving source, and the desired operation is arranged to face each other. Further, the hand 8 holding the workpiece 9 by the multi-joint -13-1355323 arm 2 is configured to be taken out from the workpiece 9 indicated by the arrow symbol X in the drawing, and linearly moved in the supply direction. That is, the hand 8 is reciprocated from the retracted position of the multi-joint arm 2 in the one-direction direction between the extended positions. At this time, the joint portion 4 of the upper arm 21 is wound in the horizontal direction to approach the column 12 as the hand 8 moves, and is moved from the workpiece 9 take-out position (the upper arm 21 extended position) to the retracted position of the upper arm 21. Further, the joint portion 4 of the lower arm 22 is wound away from the column 12 in the horizontal direction in accordance with the movement of the hand 8, and is moved from the workpiece 9 take-out position (the upper arm 21 extended position) to the retracted position of the upper arm 2 1 . Further, the relationship between the central axes of rotation of the joint portions 3 provided at the proximal ends of the two sets of the multi-joint arms 2 is as shown in Fig. 2, and the joint portion 3 of the base end of the lower arm 22 is disposed in the position where the workpiece 9 is taken out and the direction of the supply is shifted. The joint portion 3 at the base end of the upper arm 21. Therefore, the support member 10 to which the proximal end joint portion 3 of the upper arm 21 is attached is formed in a shape that protrudes from the upper and lower moving members 11 attached to the column 12 toward the hand 8 and protrudes forward in the direction in which the upper arm 21 extends. According to the above configuration, even if the joint portion 4 of the upper arm 21 is wound close to the column 12, it can be rotated without contacting the column 12. Further, since the joint portion 4 of the upper arm 21 is rotatably close to the column 12, the bending load of the unillustrated support portion provided on the vertical moving member 11 provided on the column 12 can be made small, and It will cause a problem that the multi-joint robot has a large winding radius. Therefore, the space occupied by the multi-joint robot will not be large. Further, the up-and-down moving member 11 that can move the support member 10 provided with the multi-joint arm 2 up and down can be provided on the column 12, and can be configured to be adjustable.
S -14- 1355323 節臂2的上下位置。此外，上下移動構件11的ΐ 設置成可轉動，構成爲可旋繞多關節機械人1改 於此，上下移動構件11是和手部8的移動方向 取出暨供應方向（多關節臂2伸張方向）成同方 下臂22的支撐構件10是從上下移動構件11對 動方向朝正交方向突出，連結在多關節臂2基端 3。另外，支撐構件10是形成如第1圖所示手部 向即工件9取出暨供應方向（多關節臂2伸張方 移形狀以在多關節臂2由上下移動構件11移動 不會干涉到台座1 3 » 本發明和專利文獻1不同的部份，是在於連 動構件1 1和下臂22基端關節部3的支撐構件] 成正交於手部的移動方向，並且和下臂22連結 件1 〇是以不會干涉到台座1 3的形態形成爲偏移 動方向的形狀，構成爲上臂21基端的關節部3 下臂22基端的關節部3配置在錯開工件9的取 方向’上臂21的關節部4是隨著手部8的移動 方向旋繞成接近立柱12從工件9取出位置（上臂 位置）移動至上臂21縮回位置。 其次，針對動作進行說明。本發明的多關節 所具備的二組多關節臂2，例如是具有複數的關 ’多關節機械人1是水平多關節機械人的構成。 態的多關節臂2具備和習知多關節臂2相同的構支 上腕6的基端是透過驅動軸連結於支撐構件 Ϊ座13是 變方向。 即工件9 向配置， 手部8移 的關節部 8移動方 向）的偏 至下方時 結上下移 〇是突出 的支撐構 在手部移 是相對於 出暨供應 ，朝水平 f 21伸張 機械人1 節部，即 本實施形 眚。 10，構成 -15- 1355323 可轉動的肩關節部3。該肩關節部3是成爲多關節臂2基 端的關節部3。此外，上腕6的前端和前腕7的基端是透 過驅動軸形成連結，構成可轉動的肘關節部4。另外，前 腕7的前端和手部8是透過驅動軸形成連結著，構成可轉 動的手關節部5。 多關節臂2是利用未圖示的旋轉驅動源轉動肩關節部 3和肘關節部4和手關節部5，使手部8朝工件取出、供 應方向移動。此時，多關節臂2，其機構上，執行伸縮動 作使手部8朝一方向直線移動在伸直上腕6和前腕7的伸 長位置，及上腕6和前腕7成爲摺疊狀態的縮回位置之間 〇 於此，針對本實施例的多關節機械人1的旋繞半徑使 用下臂22進行說明。於第3圖所示的下臂22縮回位置， 由手部8保持的工件9其中心是設計成和台座13旋轉中 心一致。再加上’肩關節部3的旋轉中心，和手關節部5 的旋轉中心，和台座13的旋轉中心，是偏移成一致位於 手部8移動方向軸線上，使肘關節部4或手部8於台座13 轉動時不會突出多關節機械人1周圍所需的最小區域圓15 ，因此就能夠縮小多關節機械人1的旋繞半徑。 其次’針對上下方向的動作進行說明。多關節臂2是 安裝在支撐構件10,根據未圖示的控制器指令由上下移動 構件11朝上下方向移動。如第2圖及第3圖所示，在朝 下方移動時，因支撐構件10是以不會和台座13衝突的形 態構成爲偏移在手部8移動方向的形狀，所以支擦構件1〇S -14- 1355323 The upper and lower positions of the arm 2. Further, the ΐ of the up-and-down moving member 11 is provided to be rotatable, and is configured such that the slewing multi-joint robot 1 is changed thereto, and the up-and-down moving member 11 is taken out in the moving direction of the hand 8 and the supply direction (the multi-joint arm 2 extending direction) The support member 10 of the identical lower arm 22 protrudes in the orthogonal direction from the direction in which the vertical movement member 11 moves, and is coupled to the proximal end 3 of the multi-joint arm 2. Further, the support member 10 is formed by taking out the hand-feeding direction of the workpiece 9 as shown in Fig. 1 (the multi-joint arm 2 is stretched in a square shape to move the multi-joint arm 2 by the vertical moving member 11 without interfering with the pedestal 1 3 » The difference between the present invention and Patent Document 1 is that the supporting members of the joint member 1 and the base end joint portion 3 of the lower arm 22 are orthogonal to the moving direction of the hand, and the lower arm 22 is coupled to the member 1 〇 is formed in a shape that does not interfere with the pedestal 13 in a direction in which the yoke 13 is formed, and the joint portion 3 at the proximal end of the lower arm 21 is disposed at the joint of the lower end of the upper arm 22 in the direction of the upper arm 21 of the workpiece 9 The portion 4 is wound around the moving direction of the hand 8 so as to move from the workpiece 9 take-out position (upper arm position) to the retracted position of the upper arm 21. Next, the operation will be described. The multi-joint of the present invention has two groups. The articulated arm 2 is, for example, a configuration in which a plurality of articulated robots 1 are horizontal multi-joint robots. The articulated arm 2 has the same configuration as the conventional articulated arm 2, and the base end of the wrist 6 is transmitted through The shaft is connected to the branch The support member shank 13 is in a variable direction. That is, when the workpiece 9 is disposed in the direction in which the hand 8 is moved, the joint portion 8 is moved downward, and the knot is moved up and down. The protruding support structure is in the hand movement and is relative to the cum supply. To the level f 21, the extension of the robot 1 section, that is, the implementation of the shape. 10, constitutes -15- 1355323 rotatable shoulder joint 3. The shoulder joint portion 3 is a joint portion 3 that serves as a base end of the multi-joint arm 2. Further, the front end of the upper wrist 6 and the proximal end of the front wrist 7 are coupled to each other via a drive shaft to constitute a rotatable elbow joint portion 4. Further, the front end of the front wrist 7 and the hand 8 are coupled to each other through a drive shaft to constitute a rotatable hand joint portion 5. The multi-joint arm 2 rotates the shoulder joint portion 3, the elbow joint portion 4, and the hand joint portion 5 by a rotational driving source (not shown), and the hand 8 is taken out toward the workpiece and moved in the supply direction. At this time, the multi-joint arm 2, on its mechanism, performs a telescopic movement to linearly move the hand 8 in one direction between the extended position of the upper wrist 6 and the front wrist 7, and the retracted position where the upper wrist 6 and the front wrist 7 are in a folded state. Here, the lower arm 22 will be described with respect to the winding radius of the multi-joint robot 1 of the present embodiment. At the retracted position of the lower arm 22 shown in Fig. 3, the center of the workpiece 9 held by the hand 8 is designed to coincide with the center of rotation of the pedestal 13. Further, the center of rotation of the shoulder joint portion 3, and the center of rotation of the hand joint portion 5, and the center of rotation of the pedestal 13 are offset so as to coincide with the axis of movement of the hand 8, so that the elbow joint portion 4 or the hand portion 8 When the pedestal 13 is rotated, the minimum area circle 15 required around the multi-joint robot 1 is not protruded, so that the winding radius of the multi-joint robot 1 can be reduced. Next, the operation in the vertical direction will be described. The multi-joint arm 2 is attached to the support member 10, and is moved in the vertical direction by the vertical movement member 11 in accordance with a controller command (not shown). As shown in Fig. 2 and Fig. 3, when the support member 10 is moved downward, the support member 10 is configured to be offset from the pedestal 13 so as to be shifted in the direction in which the hand 8 moves. Therefore, the rubbing member 1〇
-16- 1355323 是可下降至上下移動構件11最下點的移動位置。 另’本發明是針對具有肩關節、肘關節和手關節等旋 轉關節的多關節機械人進行了說明，但對於手關節部爲固 定的多關節機械人當然是具有同樣的作用及效果。 【圖式簡單說明】 第1圖爲表示本發明實施例的多關節機械人的上面圖 〇 胃2 II爲表示本發明實施例的多關節機械人的正面圖 〇 第3圖爲表示本發明實施例的多關節機械人的旋繞半 徑圖。 第4圖爲習知第1的多關節機械人的透視圖。 第5圖爲習知第2的多關節機械人的上面圖。 【主要元件符號說明】 1 :多關節機械人 2 :多關節臂 21 :上臂 22 :下臂 3 :肩關節部 4 :肘關節部 5 :手關節部 6 :上腕 -17- 1355323 7 :前腕 8 :手部 9 :工件 1 〇 :支撐構件 1 1 :上下移動機構 1 2 :立柱 13 :台座 14 :基座台 1 5 :最小區域圓-16- 1355323 is a moving position that can be lowered to the lowest point of the upper and lower moving members 11. Further, the present invention has been described with respect to a multi-joint robot having a rotation joint such as a shoulder joint, an elbow joint, and a hand joint. However, the multi-joint robot having a fixed hand joint portion certainly has the same action and effect. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a front view of a multi-joint robot showing an embodiment of the present invention. FIG. 3 is a front view showing a multi-joint robot according to an embodiment of the present invention. FIG. 3 is a view showing the implementation of the present invention. An example of a winding radius of a multi-joint robot. Fig. 4 is a perspective view of a conventional multi-joint robot. Fig. 5 is a top view of a second articulated robot of the prior art. [Main component symbol description] 1 : Multi-joint robot 2 : Multi-joint arm 21 : Upper arm 22 : Lower arm 3 : Shoulder joint 4 : Elbow joint 5 : Hand joint 6 : Upper wrist -17 - 1355323 7 : Front wrist 8 : Hand 9 : Workpiece 1 〇: Support member 1 1 : Up and down moving mechanism 1 2 : Column 13 : pedestal 14 : Base table 1 5 : Minimum area circle
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