1351386 (1) 九、發明說明 【發明所屬之技術領域】 本發明是關於，根據藉由需要預定時間進行測定的感 應器所測定的水質指標，將排廢水進行分類的排廢水分類 方法及裝置。 【先前技術】 例如，在半導體製造領域，將矽的單結晶晶塊切片的 晶圓，經過硏磨處理然後予以淸洗，淸洗時所供應的淸洗 水，會當作排廢水而因應於其水質分類回收。 例如，在專利文獻1中，是揭示了：作爲晶圓淸洗裝 置的排廢水分類回收裝置，是從由淸洗處理槽所導出的共 通排廢水管線，使複數的排廢水管線分歧出來，在各排廢 水管線設置自動閥，因應於藉由水質感應器所檢測的排廢 水的水質，將上述自動閥進行開閉控制，因應水質來將排 廢水分類回收的構造。 〔專利文獻1〕 日本專利第3 3 3 69 52號公報 【發明內容】 〔發明欲解決的課題〕 可是，上述排廢水分類回收裝置，是以··其作爲排廢 水的分類的判斷基準所使用的水質指標’是藉由水質感應 -4- (2) (2)1351386 器瞬間所檢測得到的資料’爲前提而成立的技術，水質指 標，例如像T〇c(全有機碳）濃度等，其測量需要預定的 時間的情況’由於測定動作會有時間遲滯現象，所以需要 儲存排廢水。 由於排廢水通常是連續排出，所以要求要有效地利用 儲存排廢水用的水槽，來提高分類精度。 本發明鑒於上述情況，其目的是要提供一種排廢水分 類方法及裝置，根據藉由需要預定時間進行測定的感應器 所測定的水質指標，而能將排廢水高精度且高效率地進行 分類。 〔用以解決課題的手段〕 爲了達成上述目的’第1發明，作爲根據藉由需要預 定時間進行測定的感應器所測定的水質指標，而將排廢水 進行分類的排廢水分類方法，是以複數個水槽分別反覆地 進行：將接收動作、測定動作、排出動作 '循環動作、及 待機動作作爲一個週期的處理，並且針對各水槽，將各週 期的接收動作開始時機，分別錯開接收動作時間的時間長 度。 第2發明，是針對第1發明’上述水質指標，是TOC 濃度。 第3發明，是針對第1或2發明，各週期的測定動 作，是從接收動作的中途開始進行。 第4發明，是針對第】、2或3發明，上述複數的水 ^5- (3) (3)1351386 槽是以A、B、及C三個槽部所構成，在水槽A，從排出 動作完成至下一個水槽B的測定動作完成的期間，使排廢 水進行循環動作，在水槽C的接收動作完成之前進行待機 動作。 第5發明，根據藉由需要預定時間進行測定的感應器 所測定的水質指標，將排廢水進行分類的排廢水分類裝 置，其構造是包含有：三個水槽 '針對各水槽所設置的接 收管線與測定管線及排出管線 '設置在各管線的自動閥、 分別設置在構成封閉迴圈的上述測定管線與上述排出管線 的泵浦、以及根據藉由上述感應器所測定的水質指標來控 制上述自動閥的開閉的控制手段。 第6發明，是針對第5發明，將排廢水管線與回收管 線連接到上述排出管線，並且將自動閥分別設置在這些排 廢水管線與回收管線，藉由上述控制手段來控制這些自動 閥的開閉動作，讓排廢水流向排廢水管線或回收管線的其 中一方。 第7發明，是針對第5或第6發明，上述感應器，是 TOC濃度計。 〔發明效果〕 藉由本發明，當根據藉由需要預定時間來進行測定的 感應器所測定的水質指標，來將排廢水進行分類的情況， 是藉由感應器來測定儲存於各水槽的排廢水的水質指標， 能根據其測定結果將水槽內的排廢水分類排出，所以能將 -6- (4) (4)1351386 排廢水高精度地進行分類。 由於是以複數個水槽分別反覆地進行：將接收動作、 測定動作、排出動作、循環動作、及待機動作作爲一個週 期的處理，並且針對各水槽，將各週期的接收動作開始時 機，分別錯開接收動作時間的時間長度，將測定出水質指 標的排廢水，從複數的水槽依序排出分類，所以在時間上 不會產生很大的損失，能有效率地進行排廢水的分類及排 出。 【實施方式】 以下根據圖面來說明本發明的實施方式。 第1圖是本發明的排廢水分類裝置的系統構成圖，第 2圖是本發明的排廢水分類方法的說明圖。 第1圖所示的排廢水分類方法，是將供應於半導體晶 圓的淸洗動作（沖洗淸洗）的沖洗排廢水進行分類的裝 置，其作爲分類的判斷基準的水質指標，是使用需要預定 時間（例如6分鐘）進行測定的TOC (全有機碳）濃度。 本實施方式的排廢水分類裝置，是具備有三個水槽 A、B、C，在各水槽A、B、C是分別連接有：接收管線 L1、測定管線L2、以及排出管線L3。 上述接收管線L]，是用來將從沒有圖示的晶圓淸洗 裝置所排出的沖洗排廢水導入到各水槽A、B、C的管 線，在其中途處，各個水槽A、B、C是分別設置有自動 閥V】。各水槽A、B ' C，是分別設置有：用來檢測出在 (5) (5)1351386 各水槽 A、B、C內所儲存的沖洗排廢水的水位的水位感 應器（LS ) S1。 上述測定管線L2，在每個水槽A'B、C是構成一個 封閉迴圈，在其中途部是設置有泵浦P1與TOC濃度計 S 2，並且在泵浦P1的上流側與下流側，對每個水槽A ' B' C各設置有自動閥V2與V3。 上述排出管線L3，毎個水槽A、B'C是構成一個封 閉迴圈，在其中途是設置有泵浦P2，並且在該泵浦P2的 上流側與下流測是在每個水槽A、B、C分別設置有自動 閥V4與V5。在其排出管線L3，是連接有排廢水管線L4 與回收管線L5，在其排廢水管線L4與回收管線L3是分 別設置有自動閥V6、V7。 上述水位感應器S1與TOC濃度計S2以及自動閥VI 〜V7，是電連接著作爲控制手段的沒有圖示的控制器，控 制器，會根據：藉由水位感應器S 1所檢測的沖洗排廢水 的水位、以及藉由TOC濃度計S2所測定的沖洗排廢水的 TOC濃度，而分別控制自動閥V ]〜V7的開閉。 接著，針對使用具有以上構造的排廢水分類裝置所實 施的排廢水分類方法來進行說明》 本發明的排廢水分類方法，是以複數個水槽（在本實 施方式，是三個水槽A、B、C )分別反覆地進行：將接收 動作、測定動作、排出動作、循環動作、及待機動作作爲 一個週期的處理，並且針對各水槽A、B、C，將各週期的 接收動作開始時機，分別錯開接收動作時間的時間長度。 -8- (6) (6)1351386 這裡根據第1圖及第2圖來說明，以水槽A進行：將 接收動作、測定動作、排出動作、循環動作、及待機動作 作爲一個週期的處理與水槽B的關聯。第2圖是顯示本發 明的排廢水分類方法的順序的時序流程圖。 例如，在水槽A的接收處理，將自動閥VI開啓，其 他的自動閥V2〜5全部關閉，沖洗排廢水會從接收管線 L1被導入到水槽A而儲存起來，當藉由水位感應器S1所 檢測出的水槽A的沖洗排廢水的水位到達Η (高）水位 時’會開始進行下一個水槽Β的沖洗排廢水的接收動作 (參照第2圖的運轉（1))。 在水槽Α的沖洗排廢水的接收動作的中途，會開始進 行沖洗排廢水的TOC濃度的測定動作。在該TOC濃度的 測定動作，會將自動閥 VI關閉，將自動閥 V2、V3開 啓’並且驅動泵浦P1，使儲存於水槽A的沖洗排廢水循 環於測定管線L2，從藉由水位感應器S 1所檢測的在水槽 A的沖洗排廢水的水位到達Η水位起，在經過預定時間 (例如，從接收動作完成到測定結果出現的時間（6分 鐘）相同的時間）的時間點，檢查TOC濃度計S2的測定 結果，同時開始進行下個水槽Β的沖洗排廢水的TOC濃 度的測定動作（參照第2圖的運轉（2 ))，並且開始進 行水槽Α的沖洗排廢水的排出動作（參照第2圖的運轉 (3 ))。由於TOC濃度計S2的TOC測定需要預定的時 間（例如6分鐘），該預定時間部分的沖洗排廢水，是使 其循環於測定管線L2，藉由TOC濃度計S2所測定的 (7) (7)1351386 TOC濃度，是被輸入到沒有圖示的控制器。 在水槽A的排廢水動作，是將自動閥V2、V3關閉， 將自動閥V4、V5開啓，驅動泵浦P2，並且因應於沖洗排 廢水的TOC濃度選擇性地將自動閥V6、V7開啓，儲存於 水槽A的沖洗排廢水，是從排廢水管線L4排出、或者經 過回收管線L5回收再利用。具體來說，控制器，如果沖 洗排廢水的TO C濃度超過預定値的話，會將自動閥V6開 啓，將沖洗排廢水從排廢水管線L4排出，當TOC濃度爲 預定値以下時，會將自動閥V7開啓，經過回收管線L5回 收沖洗排廢水。 藉由水槽 A的沖洗排廢水的排出動作，當在該水槽 A，以水位感應器S 1所檢測出的沖洗排廢水的水位下降到 L (低）水位時，處理會切換到循環動作（參照第2圖的 運轉（4))，該循環動作，會進行直到下個水槽B的沖 洗排廢水的排出動作開始爲止。在該沖洗排廢水的循環動 作’與TOC濃度測定時同樣地，會將自動閥V 1關閉，自 動閥V2、V3會開啓，並且驅動泵浦P]，來使水槽a內的 沖洗排廢水循環於測定管線L2。 在水槽A，直到水槽C的接收動作結束爲止（進行排 出動作的期間），會成爲待機狀態（參照第2圖的運轉 (5 ))，完成了以接收動作、測定動作、排出動作、循 環動作、及待機動作作爲一週期的處理，接著進行下一個 週期，開始進行對於水槽A的沖洗排廢水的接收動作（參 照第2圖的運轉（1 ))。 -10- (8) (8)1351386 以上特別是以與水槽B的關聯，以在水槽a的處理爲 中心來說明，水槽B及水槽c的處理，也以與水槽a的 處理同樣的方式進行。 而用以上的接收動作 '測定動作 '排出動作、循環動 作、及待機動作作爲一個週期的處理，是在各水槽A、 B' C分別連續性地進行，而如上述，各週期的接收動作 開始時機’是針對各水槽A、B、C分別錯開接收動作時 間的長度。而週期的測定動作則是從接收動作的中途開始 進行。 從在水槽A排出動作結束到下個水槽b的測定動作結 束的期間，會使排廢水進行循環，直到水槽C的接收動作 結束之前會進行待機動作。同樣地，從在水槽B排出動作 結束到下個水槽C的測定動作結束的期間，會使排廢水進 行循環動作，直到水槽A的接收動作結束之前會進行待機 動作；從在水槽C排出動作結束到下個水槽a的測定動作 結束的期間’會使排廢水進行循環動作，直到水槽B的接 收動作結束之前會進行待機動作。 如上述，藉由本實施方式’在根據藉由需要預定時間 進行測定的τ 0 c濃度計s 2所測定的T 0 C濃度，將沖洗排 廢水進行分類的情況’是藉由TOC濃度計S2來測定各水 槽A'B、c所儲存的排廢水的TOC濃度，根據其測定結 果，將各水槽A、B、C內的沖洗排廢水分類而進行排出 或回收，所以能局精度地將沖洗排廢水進行分類。 由於是以三個水槽A、B ' c分別反覆地進行：將接 -11 - (9) (9)1351386 收動作、測定動作、排出動作、循環動作' 及待機動作作 爲~個週期的處理，並且針對各水槽A' B、C，將各週期 的接收動作開始時機，分別錯開接收動作時間的時間長 度’將測定出TOC濃度的沖洗排廢水，從複數的水槽a、 B、C依序排出分類，所以在時間上不會產生很大的損 失’能有效率地進行沖洗排廢水的分類及排出。 在本實施方式中’雖然是使用作爲將沖洗排廢水分類 的判斷指標也就是水質指標的TOC濃度，而當然也可以 使用其他需要預定時間進行測定的水質指標來進行分類。 〔產業上的可利用性〕 本發明不僅適用於用來將供應於晶圓的淸洗的沖洗排 廢水的分類，當然也可適用於其他任意的排廢水的分類。 【圖式簡單說明】 第1圖是本發明的排廢水分類裝置的系統構造圖。 第2圖是顯示本發明的排廢水分類方法的處理順序的 時序流程圖。 【主要元件符號說明】 A ' B、C :水槽 L1 :接收管線 L2 :測定管線 L3 :排出管線 -12- (10) (10)1351386 L4 :排廢水管線 L5 :回收管線 PI ' P2 :泵浦 S 1 :水位感應器 S2 : TOC濃度計（感應器） V 1〜V7 :自動閥1351386 (1) Description of the Invention [Technical Field] The present invention relates to a waste water classification method and apparatus for classifying discharged wastewater based on a water quality index measured by an inductor that requires measurement for a predetermined period of time. [Prior Art] For example, in the field of semiconductor manufacturing, a wafer in which a single crystal ingot is sliced is subjected to honing treatment and then rinsed, and the washing water supplied during the rinsing is treated as waste water. Its water quality is classified and recovered. For example, in Patent Document 1, it is disclosed that a waste water separation and recovery device as a wafer scrubbing device divides a plurality of waste water lines from a common waste water line derived from a washing treatment tank. Each of the waste water lines is provided with an automatic valve, and the automatic valve is opened and closed according to the water quality of the discharged waste water detected by the water quality sensor, and the waste water is classified and recovered according to the water quality. [Patent Document 1] Japanese Patent No. 3 3 3 69 52 [Invention] [The problem to be solved by the invention] The above-described waste water separation and collection device is used as a criterion for determining the classification of discharged wastewater. The water quality indicator 'is a technology established by the water quality sensing -4- (2) (2) 1351386 device to detect the data, water quality indicators, such as T〇c (all organic carbon) concentration, etc. The case where the measurement requires a predetermined time 'There is a time lag in the measurement operation, so it is necessary to store the waste water. Since the waste water is usually discharged continuously, it is required to effectively use the water tank for storing waste water to improve the classification accuracy. The present invention has been made in view of the above circumstances, and an object thereof is to provide a method and apparatus for discharging waste water, which can classify waste water with high precision and high efficiency based on a water quality index measured by an inductor that requires measurement for a predetermined period of time. [Means for Solving the Problem] In order to achieve the above-described object, the first aspect of the invention is to classify a wastewater discharged by classifying waste water based on a water quality index measured by an inductor that requires measurement for a predetermined period of time. Each of the water tanks is repeatedly performed: the receiving operation, the measuring operation, the discharging operation, the "circulation operation", and the standby operation are performed as one cycle, and the reception operation timing of each cycle is shifted for each sink, and the reception operation time is shifted. length. According to a second aspect of the invention, the water quality index of the first invention is a TOC concentration. According to a third aspect of the invention, in the first or second aspect of the invention, the measurement operation of each cycle is performed from the middle of the receiving operation. According to a fourth aspect of the invention, in the second, third or third invention, the plurality of water-5-(3) (3) 1351386 grooves are formed by three groove portions A, B, and C, and are discharged from the water tank A. When the operation is completed until the measurement operation of the next water tank B is completed, the drainage water is circulated, and the standby operation is performed before the reception operation of the water tank C is completed. According to a fifth aspect of the invention, a waste water sorting device for classifying waste water by a water quality index measured by an inductor that requires measurement for a predetermined period of time has a structure including three water tanks: a receiving line provided for each water tank Controlling the automatic line with the measuring line and the discharge line 'automatic valves provided in the respective lines, the pumps respectively provided in the measuring line and the discharge line constituting the closed loop, and the water quality index measured by the above-mentioned inductor Control means for opening and closing the valve. According to a sixth aspect of the invention, in the fifth aspect of the invention, the waste water line and the recovery line are connected to the discharge line, and the automatic valves are respectively disposed in the waste water line and the recovery line, and the automatic opening and closing of the automatic valves is controlled by the above control means. Action, let the waste water flow to one of the waste water line or the recovery line. According to a seventh aspect of the invention, in the fifth or sixth aspect of the invention, the inductor is a TOC concentration meter. [Effect of the Invention] According to the present invention, when the wastewater discharged is classified based on the water quality index measured by the sensor that requires measurement for a predetermined period of time, the exhaust water stored in each water tank is measured by an inductor. The water quality index can classify the wastewater discharged from the water tank according to the measurement results, so the wastewater of -6-(4) (4) 1351386 can be classified with high precision. The processing is repeated in a plurality of water tanks: the receiving operation, the measuring operation, the discharging operation, the circulating operation, and the standby operation are performed as one cycle, and the receiving operation timings of the respective cycles are respectively shifted and received for each water tank. The length of the operation time, the waste water from which the water quality index is measured, is sequentially discharged from the plurality of water tanks, so that there is no significant loss in time, and the discharge and discharge of the waste water can be efficiently performed. [Embodiment] Hereinafter, embodiments of the present invention will be described based on the drawings. Fig. 1 is a system configuration diagram of a waste water sorting apparatus of the present invention, and Fig. 2 is an explanatory view of a waste water sorting method of the present invention. The waste water classification method shown in Fig. 1 is a device for classifying the flushing waste water supplied to the semiconductor wafer for washing operation (flushing and washing), and the water quality index as a criterion for classification is used for reservation. The measured TOC (total organic carbon) concentration was measured at time (for example, 6 minutes). The waste water sorting device of the present embodiment includes three water tanks A, B, and C, and each of the water tanks A, B, and C is connected to a receiving line L1, a measuring line L2, and a discharge line L3. The receiving line L] is a line for introducing flushing waste water discharged from a wafer washing apparatus (not shown) into each of the water tanks A, B, and C. In the middle, each of the water tanks A, B, and C The automatic valve V is set separately. Each of the water tanks A, B'C is provided with a water level sensor (LS) S1 for detecting the water level of the flushing waste water stored in the water tanks A, B, and C of the (5) (5) 1351386. The above-mentioned measuring line L2 constitutes a closed loop in each of the water tanks A'B, C, and is provided with a pump P1 and a TOC concentration meter S 2 in the middle thereof, and on the upstream side and the downstream side of the pump P1, Automatic valves V2 and V3 are provided for each of the water tanks A'B'C. In the above discharge line L3, one of the water tanks A, B'C constitutes a closed loop, in which the pump P2 is disposed, and the upstream side and the down flow measurement of the pump P2 are in each of the water tanks A, B And C are respectively provided with automatic valves V4 and V5. In the discharge line L3, the discharge waste water line L4 and the recovery line L5 are connected, and the discharge water line L4 and the recovery line L3 are respectively provided with automatic valves V6 and V7. The water level sensor S1, the TOC concentration meter S2, and the automatic valves VI to V7 are controllers (not shown) electrically connected to the control means, and the controller is based on the flushing line detected by the water level sensor S1. The water level of the wastewater and the TOC concentration of the flushing wastewater measured by the TOC concentration meter S2 control the opening and closing of the automatic valves V] to V7, respectively. Next, the waste water classification method performed by using the waste water classification device having the above configuration will be described. The waste water classification method of the present invention is a plurality of water tanks (in the present embodiment, three water tanks A, B, C) Repeatingly: the receiving operation, the measuring operation, the discharging operation, the circulating operation, and the standby operation are performed as one cycle, and the start timings of the receiving operations of the respective cycles are shifted for the respective water tanks A, B, and C, respectively. The length of time to receive the action time. -8- (6) (6) 1351386 Here, according to Fig. 1 and Fig. 2, the water tank A is used: the receiving operation, the measuring operation, the discharging operation, the circulating operation, and the standby operation as one cycle of processing and the sink The association of B. Fig. 2 is a timing chart showing the sequence of the waste water classification method of the present invention. For example, in the receiving process of the water tank A, the automatic valve VI is opened, and the other automatic valves V2 to 5 are all closed, and the flushing waste water is introduced into the water tank A from the receiving line L1 and stored, by the water level sensor S1. When the detected water level of the flushing wastewater of the water tank A reaches the Η (high) water level, the receiving operation of the flushing wastewater in the next water tank is started (refer to the operation (1) in Fig. 2). In the middle of the receiving operation of the flushing wastewater in the water tank, the measurement of the TOC concentration of the flushing wastewater is started. In the measurement of the TOC concentration, the automatic valve VI is closed, the automatic valves V2, V3 are turned on and the pump P1 is driven, so that the flushing waste water stored in the water tank A is circulated to the measuring line L2, from the water level sensor. When the water level of the flushing discharge water in the water tank A reaches the water level detected by S1, the TOC is checked at a time point when a predetermined time (for example, the same time from the completion of the receiving operation to the time when the measurement result appears (6 minutes)) is detected. As a result of the measurement of the concentration meter S2, the measurement of the TOC concentration of the flushing wastewater in the next tank is started (see the operation (2) in Fig. 2), and the discharge operation of the flushing wastewater in the water tank is started (refer to Operation (3) of Fig. 2). Since the TOC measurement of the TOC concentration meter S2 requires a predetermined time (for example, 6 minutes), the flushing waste water of the predetermined time portion is circulated to the measuring line L2, which is determined by the TOC concentration meter S2 (7) (7) ) The 1351386 TOC concentration is input to a controller that is not shown. In the draining operation of the water tank A, the automatic valves V2 and V3 are closed, the automatic valves V4 and V5 are opened, the pump P2 is driven, and the automatic valves V6 and V7 are selectively opened according to the TOC concentration of the flushing waste water. The flushing waste water stored in the water tank A is discharged from the waste water line L4 or recovered through the recovery line L5. Specifically, if the TO C concentration of the flushing wastewater exceeds the predetermined threshold, the controller will open the automatic valve V6 and discharge the flushing waste water from the waste water line L4. When the TOC concentration is below the predetermined threshold, it will automatically The valve V7 is opened, and the flushing wastewater is recovered through the recovery line L5. By the discharge operation of the flushing waste water in the water tank A, when the water level of the flushing waste water detected by the water level sensor S1 in the water tank A drops to the L (low) water level, the processing is switched to the circulation operation (refer to In the operation (4) of Fig. 2, the circulation operation is performed until the discharge operation of the flushing wastewater in the next water tank B is started. In the same cycle as the TOC concentration measurement, the automatic valve V1 is closed, the automatic valves V2 and V3 are turned on, and the pump P is driven to circulate the flushing wastewater in the water tank a. In the determination of the line L2. In the water tank A, until the receiving operation of the water tank C is completed (during the discharge operation), the standby state is reached (refer to the operation (5) in Fig. 2), and the receiving operation, the measuring operation, the discharging operation, and the circulating operation are completed. And the standby operation is a one-cycle process, and then the next cycle is started, and the receiving operation of the flushing wastewater for the water tank A is started (refer to the operation (1) of Fig. 2). -10- (8) (8) 1351386 In the above, the treatment of the water tank a is mainly described in association with the water tank B, and the treatment of the water tank B and the water tank c is performed in the same manner as the processing of the water tank a. . In the above-described receiving operation, the "measurement operation" discharge operation, the circulation operation, and the standby operation are successively performed in the respective water tanks A and B' C, and as described above, the reception operation of each cycle starts. The timing 'is the length of the receiving operation time for each of the water tanks A, B, and C. The measurement operation of the cycle is started from the middle of the reception operation. During the period from the end of the discharge operation of the water tank A to the end of the measurement operation of the next water tank b, the drain water is circulated until the standby operation of the water tank C is completed. In the same manner, during the period from the end of the discharge operation of the water tank B to the completion of the measurement operation of the next water tank C, the waste water is circulated until the receiving operation of the water tank A is completed, and the standby operation is performed. When the measurement operation of the next water tank a is completed, the waste water is circulated, and the standby operation is performed until the receiving operation of the water tank B is completed. As described above, the case where the flushing wastewater is classified according to the T 0 C concentration measured by the τ 0 c concentration meter s 2 measured by a predetermined time required in the present embodiment is described by the TOC concentration meter S2. The TOC concentration of the discharged wastewater stored in each of the water tanks A'B and c is measured, and according to the measurement result, the flushing wastewater in each of the water tanks A, B, and C is sorted and discharged or collected, so that the flushing row can be accurately adjusted. Waste water is classified. Since the three water tanks A and B' c are respectively reversed: the -11 - (9) (9) 1351386 receiving operation, the measuring operation, the discharging operation, the circulating operation ', and the standby operation are treated as ~ cycles. In addition, for each of the water tanks A' B and C, the timing of the reception operation of each cycle is shifted by the length of the reception operation time, and the wastewater discharged from the TOC concentration is sequentially discharged from the plurality of water tanks a, B, and C. Classification, so there is no significant loss in time's ability to efficiently classify and discharge the flushing wastewater. In the present embodiment, the TOC concentration which is a water quality index which is a determination index for classifying the flushing wastewater is used, and of course, it is also possible to classify the water quality index which is measured by using a predetermined time. [Industrial Applicability] The present invention is applicable not only to the classification of the flushing waste water used for washing the wafer, but also to the classification of any other waste water. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a system configuration diagram of a waste water sorting device of the present invention. Fig. 2 is a timing chart showing the processing sequence of the waste water classification method of the present invention. [Description of main component symbols] A ' B, C : Sink L1 : Receiving line L2 : Measuring line L3 : Discharge line -12- (10) (10) 1351386 L4 : Discharge line L5 : Recycling line PI ' P2 : Pump S 1 : Water level sensor S2 : TOC concentration meter (inductor) V 1 to V7 : automatic valve
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