TWI297326B - The process exhausted water reclaim system and thereof method - Google Patents

Description

1297326 n --- Case No. 9210519^ V. Description of invention (1) Year April 丨 9 曰 _ correction

FIELD OF THE INVENTION The present invention relates to a drainage recovery system and method, and more particularly to a process drainage recovery system and method. Prior Art In the process of integrating circuit components, the most frequent process step is wafer cleaning. The purpose of wafer cleaning is to remove organic compounds, metal impurities or particles (par t i c 1 es ) attached to the wafer surface. However, wafer washing and competition require a lot of water resources, which is likely to cause a large increase in production costs. Therefore, it is important to recycle the process equipment for pure water, process cooling water, cooling towers, etc. 2 ^ times. . Moreover, if the drainage of the sputum device can be effectively controlled to be effectively recycled, the water consumption, production cost and industrial competitiveness can be reduced. "', However, if the recycled water only pays attention to the requirement that 'the use of recycled water will be limited, the production capacity will be reduced, and the damage control design will effectively improve the way of the process of recycling the process. The drainage of each process is first used for different purposes. This type of recovery of recovered water is not effective for water collection. Moreover, when a certain process is unable to recover from all the drainage, the content of the invention increases, and the quality of the polluted ultrapure water is neglected, and the quality of the contaminated ultrapure water is greatly reduced. Therefore, it is necessary to recover the water quality by good. The way of water is collected and then pooled together, and according to the method of water quality and drainage, although it can increase the quality of the recovered water, it may limit the problem of drainage.

In view of the above, one aspect of the present invention provides a process device drainage

L〇221pifl.ptc Page 5 1297326 __Case No. 921051Q0 V. Invention Description (2) Correct the recycling system and recycling method, using a conductivity meter for individual machines to classify and recycle, so that it will not be a single machine There is a problem with the drainage water quality of the platform, which causes all drainage to be unrecoverable. Another object of the present invention is to provide a process unit drainage recovery system and a recovery method for utilizing a conductivity meter and a total organic carbon analyzer (T0C) in conjunction with an intermediate tank level control to determine the water quality of the recovered water. W receiving water, effective k liter according to the present invention includes a process device, a tank, a buffer tank, a second valve, a first pump valve system connected to the process splitting and the three-way valve controller electrical connection device signal control The signal of the device determines that the recovery tank is connected to the water collection. The buffer tank is connected to the T0C analysis c-position measuring device, and the tank is connected to the intermediate tank, and a second valve is arranged between the raw water tanks. Between the second valve. Main road Φ ν Γ 住 Suction column device drainage recovery system 3; installation, three-way reading, controller, recovery i, ί: original water tank, second raw water tank, first valve, first pump and total organic carbon analysis ^ The drain of the device. Conductive ^. In the pipeline between the middle and the middle, the action of the three-way valve is set in the three-way valve and the conductivity of the three-way valve, and the flow is discharged according to the conductivity. According to the conductivity, it is divided into the drain port of the three-way valve, connected to the recovery tank, so that the C step is selected, the middle tank is connected to the buffer sample, and the recovered water of V1 is buffered to measure the liquid level in the middle tank. It is arranged to collect only the different grades of the original water tank and the second original first valve, and collect water by σ. The intermediate carbon tank is connected to the intermediate tank and the pump and the -1-8th tank and the second raw water tank.

1297326 α η \0 β Correction 5, invention description (3) and ^: n: r content of water recovered t〇c, and electrically connected to the -m Z ^7 1 , 1 control of the first valve and the second valve Turn it on and off. The process J is placed on the pipeline between the tank and the intermediate tank. The diode is connected to the buffer tank and electrically connected to the following::::::::: and closed. The device discharges the upper conductivity water recovery system, which is used to add different pipelines to individual machines. ::::=The process of discharge with the same conductivity is discharged into the production of all the drainage helmets. There is a problem with the quality of the drainage water and the analyzer (TOC) is equipped with 'into the middle door 梓 / reuse conductivity meter and total organic carbon, and various types of recycled water are discharged to the appropriate one to strictly use the efficiency of the official system. The purpose of the process of draining the water is to provide a method for draining and recycling the process device, - returning to the m; controlling the three-way valve to introduce the drainage - and introducing the drainage into the buffer tank into an intermediate d*-in-buffer tank The analysis device analyzes the drainage in the buffer tank to control; = two total organic carbon raw water tanks or a second raw water tank. The drainage of the intermediate water is introduced into the first organic water analysis device to analyze the drainage of the first original sink or Second original ', = water: to control the intermediate slot The steps are (a) on the row 1297326

--_ Case number lost inRiQn V. Invention description (4) "Total organic carbon content detection, detecting the total organic carbon content of the drainage is not the standard value; (b) When the total organic carbon content of the drainage is lower than the standard: the door groove Whether the liquid level is higher than or equal to - the first - high liquid level when the liquid level surface of the middle tank is equal to m, open a first spot wide, read, so that the drainage is introduced into the first raw water tank; (4) the drainage into - r / quantity detection, * Measure whether the total organic carbon content of the drainage is T-thickness or not equal to the second highest liquid level of the second high liquid; (f) when the first liquid level of the middle _ is at -^ ^ μ, #V Λ ^ ^ When the total organic carbon content of the drainage is higher than the standard value, 'II/a) is higher than or equal to the middle liquid level; (8) when the middle tank is at the middle tank, the second raw water tank; (i)斟μ ★> 咕一J will introduce the amount of drainage below the standard value, the test ": two of the total organic;: the first =) when the intermediate tank ... is less than or equal to the process of the invention Recycling: No individual machine is equipped with a conductivity meter for early selection, so that the water is opened early: the water quality of the machine is problematic and all the two methods are caused; = will shape. And use the lei 丄 丄 丄 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 Recycling = Appropriate w-slots to improve the reuse efficiency of the process drainage. In order to make the above-mentioned objects and features of the present invention a preferred embodiment, and with the help of ., , , , , , The schematic diagram of the mode is described as follows. The figure f 1 is a schematic diagram of the drainage recovery of a process device not according to the embodiment of the present invention. The process drainage drainage is prepared by 102ϋ彳 110, the intermediate slot 112, Original water tank U 4: original port 2, buffer tank pump 122 and = 24 ' and total organic carbon analysis τ 〇 C; rb 〇;; T, C) 126 ° . Name, such as process drainage from the machine row to the work The water tank of the equipment. It is located in Gongmayu Μ > Μ A, 卩 槽 trough, and then recycled to the factory factory 1 spare end # k μ 0, ϊ β, sink έ is commonly called buffer tank, and is located in 掀 0 0 The water tank is called the original water tank. The three-way valve 102 is connected to the drain of the process device 1 , and the degree analysis device 1 04 The signal determines the flow conductivity of the drainage channel. The 104 is set in the process device 100 and the three-way 阙10. The guide 庐 丨 J π Β in the drainage is used to electrically connect the two components to the divider 106. I〇6. Controlling the recovery tank 108 to control the operation of the one-way valve 1〇2. Recover the recovered water; the slow-acting two-way valve 1 广 wide mouth 128 ‘collection preliminary selection ^ The buffer tank 110 is connected to the recovery tank 108, so that · 10221pifl.ptc Page 9 1297326

The recovered water in the tank 108 is subjected to T〇c analysis in the buffer tank 11〇. The intermediate groove ι 2 is connected to the buffer groove 11 〇 ' and a valve 130 is disposed on the tube between the intermediate groove 112 and the buffer groove 110. The conductivity analyzing device 132 is connected to the buffer tank 1 () and is electrically connected to the valve 130 to control the opening and closing of the valve 130. A liquid level measuring device 134 is disposed in the intermediate tank 11 2 to measure the liquid level of the intermediate tank 112. The original water tank 114 is connected to the other raw water tank 116 to the intermediate tank 112 to collect different levels of recycled water. A valve 1 丨 8 is provided between the intermediate tank 2 and the raw water tank 丨丨 4, and a valve 1 2 〇 is provided between the intermediate tank 11 2 and the other raw water tank 11 6 . Further, a pump 118 and a pump are respectively disposed between the intermediate portion =112 and the valve ii8 and the valve 12A, and the recovered water is pumped to the original water tank 丨丨4 or the raw water tank 丨丨6 by the intermediate tank 11 2 . There is always a knife-discharging device 1 26 connected to the buffer tank 11 〇 to analyze the τος ^ of the recovered water in the tank and electrically connect the valve 11 8 with the valve 1 2 0 to control the opening and closing of the valve 11 8 and the valve 1 2 。. 〃 In the present embodiment, the process drainage recovery system is configured to set up a recovery tank, and it is of course possible to set up a recovery tank according to the spirit of the recovery water of the present invention, and connect it to the three-way valve 丨〇2. The drain outlet, for example, is provided with another return tank 1 3 6 'connected to the other drain port 1 3 of the three-way valve 1 〇 2 for subsequent recovery water sorting process. Therefore, as described above, the process drainage recovery system provided by the present invention is advantageous in that the conductivity meter is installed on the other machine to prepare the conductivity meter for the prior selection, and the controller is used to discharge the discharge of the different machine △ to the different pipelines. Therefore, it will not be possible to recover all the drainage due to problems with single use and drainage water quality. Then, the electric meter and the total organic carbon analyzer (T〇c) can be combined with the intermediate tank to recover large π Θ K W-knife R I ’ can strictly control the recovery water of various qualities.

1297326

Corrected to the S, the original sink to improve the reuse efficiency of the process drainage. Referring to Figure 1 for a recovery of the process drainage of the preferred embodiment of the present invention, the method of recovering the drainage of the process is first performed from the handle; iil > discharging the drain to be discarded, followed by conductivity analysis. The device 104 is divided into the electric energy of # iife k, according to the conductivity of the drainage water to control the three-way valve 10 2 V into the recovery tank 1 0 8 or other recovery tank, for example, the recovery tank 36. After the door is introduced into the recovery tank 1 0 8 and the drainage is introduced into the buffer tank 1 1 , the drainage is introduced into the tank 112, and the total organic carbon analyzer 126 analyzes the row j in the buffer tank u to control the drainage of the intermediate tank 112. The raw water tank 114 or the raw water tank 116 is introduced. The receiver' explains the control method of the intermediate slot 2. FIG. 2 is a view showing an intermediate tank liquid level control map according to an embodiment of the present invention, that is, an area surrounded by a broken line in FIG. 1. In FIG. 2, the same reference numerals are given to the same members as in the second drawing, and the same is omitted. Detailed description. A liquid level measuring device 134 is disposed in the intermediate tank 1 12 to measure the liquid level of the intermediate tank "2, in this embodiment, for example, the liquid level in the intermediate tank 112 is divided into five liquid levels, respectively , L liquid level, Μ liquid level, Η liquid level and HH liquid level, for example, the five liquid levels are respectively from the bottom of the groove 0.40, 〇·55, 1. 2, 1. 7 and 2.15 meters. The diameter of the T〇C test line 140 is, for example, 〇·9 cm, and the cross-sectional area of the T〇c test official line 140 is, for example, 〇·65 square centimeters, and the total length of the T〇c test line 140 is, for example, 10 meters. The flow rate of the recovered water flowing from the buffer tank 11 to the T〇c analyzer 126 is, for example, 20 ml/min, so the time required for the recovered water to flow from the buffer tank 110 to the TOC analyzer 126 is 3.5 minutes, and T〇 c Analytical instrument 1 2 6 The test time is, for example, about 3 to 5 minutes, so the T〇c analyzer is 1 2 6 test including sampling and analysis takes about 6 to 8 minutes in total.

1297326 n - Case No. 92105190 & year g month / day of the day Kai ^_ five, invention description (8) '" -- bell. While the TOC analysis instrument 126 performs the analysis, the recovered water also flows from the buffer tank 110 to the intermediate tank 112. When the TOC analyzer 126 detects that the T〇C value is greater than 曰lOOppb, the TOC value is greater than l〇〇〇ppb. The water may have been discharged into the original sink 114 slot with a preset standard value of less than 1000 ppb. Therefore, if the water of the T0C greater than 10 ppb is not effectively x, the discharged water of the T0C greater than 10 ppb is discharged to the original sink with a preset standard value greater than equal to 100 ppb. In 116, the recovered water having a T0C value greater than 1 〇〇〇 ppb will dye the water quality of the original water tank 1 14 .彳 Preventing the above-mentioned recycled water from polluting the water quality of the raw water tank 4 is to effectively control the water recovery system by defining the appropriate operating liquid level of the intermediate tank 112 and the TOC control program. Assuming that the bottom area of the intermediate tank 2 is, for example, 5 〇 square meters, the distance of the recovered water flowing from the sputum level to the LL level is, for example, 〇·8 meters, and only one set of the pump 122 is activated. Pumping rate is 52 m ^ 3 / h, liquid level drop 1 speed (52 m ^ 3 / h) / (5 · 〇 m ^ 2 ) = 1 〇 · 4 m / min %, in more severe conditions Calculate, the recovery of water from the liquid elbow to the liquid level needs = time (0.8 meters) / (10 · 4 meters / hour) - _ 〇〇 77 hours is equal to 4.6 knife =. Although the amount of water in and out is similar, and the liquid level is kept above the μ level, it is replaced by the liquid returning flow to the ll level for about 4·6 minutes, and the T0C test signal = the required time is about 6 to 8 minutes. When the recovered water T〇c test is not in the case of ι°ι, and the pump 122, the pump 124 and the valve 120 are not set to be turned on, and the closed water is discharged into the original water tank 丨丨6, the T〇c test is unqualified. Recycling 7. The machine is in the original water tank 11 4 for about 2 minutes, and pollutes the water quality of the original water tank 丨丨4. If the total organic carbon content of the recovered water is higher than the preset value, it is necessary to check whether the middle "liquid level is equal to the M liquid level, and if it is higher than or equal to the liquid level, the pump 1 22, the pump is turned on. 1 24 and valve

1297326 Case No. 92105190 V ‘Inventive Note (9) Λ 修正 Amendment I 20, close valve 11 8 to make TOC test not eight II 6. The recovered water of the pump 1 2 2 and the pump 1 2 4 is discharged into the original water tank meter/hour, and other assumptions are made up and down, and the pumping rate becomes 83 cubic meters from the liquid level to the LL liquid level. · The 9-minute access conditions are the same. At this time, the recovered water from the recovered water grid is discharged into the original water tank 116.罝 — — 次 次 , , — — 请 请 请 及 及 及 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' 总 总 总 总 总 总 总 总 总 总 总 总 总 总 总 总 总 总 总 总 总0 0, in the buffer tank > sister is stepping, if there is no machine, if it is :2:: whether the liquid level of the intermediate tank 112 is higher than or equal to the h level, the total organic content of water is 4. 'If otherwise step 300 is continued to detect the buffer tank is raw water' turn on pump 122 and valve 118, close valve 120, so that drainage guide 7 妯k ^ Π6 'to the second total organic carbon content of the drainage test' judge the drainage ~ organic Whether the carbon content is lower than the preset standard 308, otherwise proceed to step 312. ·^ Right mussels! Step 308 is performed to detect whether the liquid level of the intermediate tank 112 is higher than or equal to the hh liquid level, and the right side proceeds to step 31 0. Otherwise, step 326 is performed. Step 310 'turn on another pump 124 to accelerate the drainage into the raw water tank 114.曰 Step 312, detecting whether the liquid level of the intermediate tank 112 is higher than or equal to % liquid

1297326 曰Revision ------ 92105·_April ί V. Invention description---- ΐNo 2=Liquid: Step 314, otherwise continue inspection (4) Drainage tank: "122, fruit 124 and valve 12 °, close 阙 118, so that the drainage 1 'mountain for human drainage to conduct a second total organic carbon content detection 'detect κ ~ organic slave content is lower than the preset step 318, otherwise proceed to step 322. If the head is tilted to the right, then if the liquid level of the middle tank 112 is lower than or equal to the L level, enter the V step 3 2 0, otherwise proceed to step 3 2 4 . At step 320, the two sets of pumps are turned off. Step 322, detecting whether the liquid level of the intermediate tank 112 is lower than or equal to the liquid level, and right-handling step 320, if otherwise, the total organic carbon content of the bovine water. Step 316 continues to detect the buffer tank row 324, so that the two sets of fruit run time is, for example, 15 minutes. Step 3 2 6 Check if the liquid level of the intermediate tank J J 2 is lower. If yes, proceed to step 328, otherwise proceed to the step. Level Step 328, shut down both sets of pumps. Step 330' performs a third total organic carbon content detection on the buffer tank draining state: whether the total organic carbon content of the crucible is lower than a preset standard value, and if so, step 332 is performed, otherwise step 312 is performed. The early value is right 疋 step 332 'detects the intermediate slot U2. If yes, step 304 is performed, and if not, step 31Q is performed. , H liquid level, therefore, as explained above, the store (T〇c) with the intermediate tank liquid level two with eight guide & electricity meter and total organic carbon analyzer to control the classification of recycled water, can strictly control each 10221pifl.pt〇 14 pages 1297326

Case No. 921051Qil V. INSTRUCTIONS (11) The quality of the recovered water is discharged to a suitable raw water tank to improve efficiency. The re-profit of Chen Cheng Drainage uses a system of $:::^: to collect the drainage system and method, and the k is used in the +conductor manufacturing process, such as the RCA wafer cleaning process. Taking the RCA wafer cleaning process as an example, the RCA process is applied to the recycling of the present invention. According to the different chemicals used in the RCA process and the difference in the cleaning process, the conductivity meter is used to detect the conductivity value in the process drainage, which can be classified and controlled for recycling. It can be roughly divided into pure water recovery/drainage recovery and drainage. Recycling / acid ^ water recovery, drainage recovery / hydrofluoric acid drainage recovery and acid drainage recovery / fluoride acid drainage recovery four categories. Please refer to Figure 4A. Figure 4A shows the flow chart of the RCA wafer cleaning process drainage selection mechanism. The waste SPM cleaning liquid 400, the waste SCI cleaning liquid 402 and the waste SC2 cleaning liquid 404 are generally discharged to the acid drainage collecting tank 406; following the rapid cleaning process after the SPM cleaning liquid, the S C1 cleaning liquid and the s C 2 cleaning liquid, A large amount of overflow deionized water is used to clean the wastewater after the wafer is cleaned, and the conductivity value is measured by a conductivity meter 41. If the conductivity value is between 1 〇 and 1 〇〇〇 mS/cm, the wastewater is discharged into the wastewater. Recycling

The tank 412 is discharged into the acid drainage recovery tank 414 if it is between 1 〇〇〇 and 2 〇〇〇ms/cm; the dilute hydrofluoric acid (DHF) 416 wastewater needs to be split according to the requirements of the subsequent wastewater treatment unit. The fluoric acid drainage recovery tank 4 1 8 is transported to the wastewater treatment plant for treatment; the overflow of the cleaning wafer after the dilute hydrofluoric acid DHF cleaning process (〇verf 1 〇w ) is deionized water 420 recovery, and the wastewater is recovered/fluoric acid Drainage classification, if the conductivity value is between 10 and 100 mS/cm, it is discharged into the wastewater recovery tank 412, and if it is between 1000 and 200 0 mS/cm, it is discharged into the hydrofluoric acid drainage recovery tank 418; Final rinse (Final Rinse, FR) tank

10221pifl.ptc Page 15 1297326

Corrected 4^^^\Yimen pure/recycling/wastewater recycling classification. If the conductivity value is between 0 m, it will be discharged into pure water recovery tank 424. If it is between 10 and 1〇〇〇, it will be discharged into wastewater. Recovery tank 412. In addition, the time and time of the drying process and the treatment are, for example, condensed by isopropanol (IPA) tank 426 to recover isopropyl/π-rolled to isopropyl alcohol recovery system 428, and waste isopropyl alcohol collection tank 430. # /, ,, and then refer to Figure 4B, Figure 4B is a flow chart of the recovery water T〇c selected after the initial completion of the 4A drawing and the process drainage selection mechanism. After the preliminary classification of the washing and draining of the 7G Japanese yen washing machine, the recovered water classified by the machine is collected, for example, in the pure water recovery tank 4 2 4, the waste water recovery tank 4丨2 or the acid drainage recovery tank 41 4 And through the conductivity and total organic carbon analysis (T〇tai Ofganic Carbon, TOC), control the classification to the pure water recovery, drainage recovery or acid drainage recovery recovery system for pure water and process cooling water system reuse. Among them, the conductivity of pure water recovery is between 〇10, the conductivity of drainage recovery is between 1〇1〇〇〇1SS/cm, and the conductivity of acid drainage is between 1000 and 2000. Between mS/cm. The recovered water recovered by the sorting is flowed from the pure water recovery tank 4 24 to the buffer tank 4 3 2, and the conductivity value of the recovered water is first measured by the conductivity meter 434, and if it is less than 1 〇 mS/cm, it is discharged to the intermediate tank 436. If it is greater than or equal to 10 mS/cm, it is discharged to the intermediate tank 438. Then, the total organic carbon content of the recovered water is analyzed by the TOC analyzer 440. When the TOC < 500 ppb is discharged into the pure water recovery filter tank 442, when the TOC value is between 500 and 1000 ppb, it is discharged to the drainage recovery raw water tank 444. When T0C > 1 0 0 0ppb is discharged to the acid drainage recovery raw water tank 446. Another recovered water that has been sorted and recycled flows to the buffer tank 448.

10221pifl.ptc Page 16 MM 92105190 α) Year Q <7 曰1297326 Amendment 5, invention description (13) The electric meter 450 measures the conductivity value of the recovered water, if it is less than 1 000 mS/cm, it is discharged to the middle tank. 438, if it is greater than or equal to 1 〇〇〇 mS/cm, is discharged to the intermediate tank 452. The TOC analyzer 454 is then used to analyze the total organic carbon content of the recovered water, when t〇c < 1 000 ppb is discharged into another drainage recovery raw water tank 456, and when T〇c^1〇〇〇ppb is discharged to another acid Drain the original water tank 4 5 8. For the recovered water that has been sorted and recycled, the conductivity value of the recovered water is measured by the conductivity meter 460. If it is less than 2 〇〇〇 discharged to the middle tank, = g = sink 462, if it is greater than or equal to 200 0 - then Sorting by im: using the conductivity meter on the individual machine, and then using the process of the conductive clock 2 to discharge the drain to different tube level control, and eight _ ^ ~ organic carbon analyzer (t〇c With the advantages of the quality of the intermediate tank, the recovered water in different pipelines can be used to raise and recycle the water. It can also be used in any of the rca wafer washing process drainage sorting and recycling. Although the present invention has been limited to the present invention, any of the above-described embodiments has been disclosed as above, but it is not intended to be used in the scope of the present invention, without departing from the spirit and scope of the present invention. ^ ^ Movement and retouching, so the scope of the patent scope of the invention is defined. L〇22lpifi,ptc Page 17 1297326

Figures 4A and 4B show a flow chart of the RCA wafer cleaning process drainage system. < 〜 machine diagram indication: 1 0 0 : process device 1 0 2 : three-way valve 104, 132, 410, 434, 450, 460: conductivity analysis device I 0 6 : controller 108, 136: recovery tank 110, 432, 448: buffer tank 112, 436, 438, 452: middle;): Cao II 4, 11 6: raw water tank 11 8 , 1 2 0, 1 3 0 : wide 122, 124: pump 1 2 6 4 4 0, 4 5 4 : total organic carbon analysis device 128, 138 : drain port 1 3 4 : level measuring device 140 : TOC test line 300 , 302 , 304 , 306 , 308 , 310 , 312 , 314 , 316 , 318, 320, 322, 32 4, 326, 328, 330, 332: Step 40 0: SPM cleaning solution

10221pifl.ptc Page 18 1297326 Case No. 92105190 Corrective Description 402 404 406 408 412 414 416 418 422 424 426 428 430 442 444 446 464 S C1 Cleaning Fluid SC 2 Cleaning Solution Acid Drain Collection Tank 4 2 0 : Overflow Deionized water drainage recovery tank acid drainage recovery tank dilute hydrogen acid fluoric acid drainage recovery tank pure water pure water recovery tank isopropyl alcohol tank isopropyl alcohol recovery system waste isopropyl alcohol collection tank pure water recovery filter tank 4 5 6 : drainage recovery Original water tank 4 5 8 , 4 6 2 : acid drainage recovery original water tank acid test drainage original sink

10221pifl.ptc Page 19

Claims (1)

J2105190 曰 曰 丨 丨 制 制 : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : : The device is disposed in the process device and the first analysis device, and: the current n-three-way valve and the first-conductivity three-way 阙; according to the signal of the first conductivity analysis, the first valve is controlled a first drain port; a first recovery tank connected to the first buffer tank, connected to the first recovery tank, the first intermediate tank is connected to the buffer tank; - a first raw water tank and a second raw water tank, connected m, disposed between the intermediate tank and the first raw water tank: a first pump and a second pump are disposed between the middle and the second valve; and r π 钇 and 忒 the first valve, the Total: the machine carbon analysis device is connected to the buffer tank 'a valve and the second valve to control the first connection to close the first. ...Hai-Valve Opening and Closing 2. As described in the scope of the patent application, there is further included a second recovery tank connecting the 7 7 _ recycling system to the second drain. Lianyi first two-way valve system 3. As described in the first paragraph of the patent application, which further includes - the third 阙, set in two, the drainage recovery system 4 ^ rushing groove and the intermediate groove of 10221pifl.ptc 20 pages 1297326 VI. Pipes between patent applications 4 · If the scope of patent application is 3 The process device is drained back to the J-wave system, and further includes a second conductivity analysis device connected to the buffer tank, and the second valve is connected to control the opening and closing of the third valve. The drainage device of the process unit of claim 1, wherein the process unit draining system further comprises a liquid level measuring device, and the liquid level of the intermediate tank is measured in the intermediate tank. 6) a method for recovering drainage of a private device, wherein a drainage is discharged from a process device; a conductivity of the drainage is analyzed by a conductivity analysis device, and the drainage is introduced according to the conductivity to control the drainage The drain introduced into the recovery tank is introduced into a buffer tank; the drain introduced into the buffer tank is introduced into an intermediate tank; and the drain in the buffer tank is analyzed by a total organic carbon analyzer to control the drain of the intermediate tank Introduce a first raw water tank or a second raw water tank. 7. The method for recovering drainage of a process device according to claim 6, wherein the total organic carbon is used to analyze the drainage in the buffer tank, > controlling the drainage guide or the second raw water tank of the intermediate tank The steps include: (a) detecting the total organic carbon content of the drainage, detecting whether the total organic carbon content of the drainage is lower than a standard value; (b) when the total organic carbon content of the drainage is lower than the standard value And detecting whether the liquid level of the intermediate tank is higher than or equal to a first high liquid level; the method comprises: returning the volume to the tank 1〇22lpifi.ptc page 21! 297326 -~--- Case No. 92105190 (2) When the liquid level of the intermediate tank is higher than or equal to the first-high liquid level, opening: trough and - first-reading, closing a second chamber, so that the drainage is introduced into the opening-to-f draining-- 2. The total organic matter content of the water is detected, whether the total organic carbon content of the water is lower than the standard value; the total organic carbon content of the drainage gate (:)/the drainage is lower than the standard value, and the liquid level of the intermediate tank is detected. Whether it is higher than or equal to one, no. The first high liquid level in the sea; π brother - liquid level , the level of the two sides of the 5 haidi is higher than (f) when the liquid level of the intermediate tank is higher than or equal to the second high liquid level, the pump is turned on to accelerate the drainage into the first raw water tank; (g) at v In step (a), when the total organic breaking content of the drainage is higher than the standard, the liquid level of the intermediate tank is higher than or equal to the middle liquid level; (h\ when the liquid level of the intermediate tank is higher than or equal to the medium liquid Positioning, opening the first first fruit and the second valve, closing the first valve to introduce the drainage into the raw water tank; the first pump of the first month correction (1) performing a third total organic carbon on the drainage Content detection, detecting whether the total organic carbon content of the drainage is lower than the standard value; (j) when the total organic carbon content of the drainage is lower than the standard value, detecting whether the liquid level of the intermediate tank is lower than or equal to a low liquid level And (k) when the liquid level of the intermediate tank is lower than or equal to the low liquid level, the first fruit and the first fruit are closed. 8. The recycling of the process device as described in claim 7 a method, wherein in step (d), when the total organic carbon content of the drainage is higher than the standard value, The steps of: 10221pifl.ptc Page 22 1297326 _t No. 921051Q (1) Correction of the scope of application (l) Detecting the liquid level of the intermediate tank (m) When the middle slot is asked for a liquid level, ^ The liquid level is exclusively for the middle liquid level, the first pump, the second pump and the second switch are opened, and the second raw water tank is closed; the first valve is closed, and the drain is introduced into the first (n) to drain the water; ^ ^ ^ 7k ^ Μ φ ^ e Fourth, ,, heart organic carbon content detection, detecting whether the drainage w has f / anti a I is lower than the standard value; (〇) Tian 4 drainage of low total organic carbon content In the standard value, it is detected whether the liquid level of the intermediate tank is lower than a low liquid level of the stupid ^ ^ ^ ^ 义寺; and (P \田. The liquid level of the middle tank is lower than or equal to the low liquid level, and the The second pump and the first pump. The method of recovering the drainage of the process device as described in claim 8 wherein, in the step (n), when the total organic carbon content of the drainage is higher than the standard value, Then performing the following steps; f measuring whether the liquid level of the intermediate tank is lower than or equal to a low liquid level; and when the liquid level of the intermediate tank is approximately lower When the liquid level is equal to the low liquid level, the first pump and the second fruit are closed. I 〇 The method for recovering the drainage of the process device according to claim 8 of the patent application, wherein in the step (0), the intermediate tank When the liquid level is higher than the low liquid level, the following steps are performed; the first pump and the second pump are operated for a period of time; and the first pump and the second pump are closed. In the step (f), when the liquid level of the intermediate tank is lower than the second high liquid level, the following steps are performed. 10221pifl.ptc Page 23 1297326 ^ 0 __塞号 92105190年q 曰丨 / I ^ .τ_ 6. Applying for the patent scope to detect whether the liquid level of the intermediate tank is lower than or equal to the middle liquid level; and when the liquid level of the intermediate tank is lower than or equal to the medium liquid The first pump is turned off. 1 2 · The method for recovering drainage of the process device as described in claim 7 wherein, in step (i), when the total organic carbon content of the drainage is higher than the standard value, Then carry out the following steps; detecting the liquid level of the δhai intermediate tank Whether it is lower than a low liquid level; and when the liquid level of the 5H intermediate tank is slightly lower than or equal to the low liquid level, the first pump and the second pump are turned off. 1 3 · As claimed in the patent scope 7 And the method for recovering drainage of the process device, wherein in the step (j), when the liquid level of the intermediate tank is higher than the low liquid level, the following steps are performed; and the first pump and the second pump are operated And a method of recovering the drainage of the process device according to claim 7, wherein the following step is further included after the step (f); The drain of the buffer tank performs a fifth total organic carbon content detection to determine whether the total organic carbon content of the drain is lower than a preset standard value, and if so, whether the liquid level of the intermediate tank is higher than or equal to δ The first two liquid levels, if otherwise proceeding to step (g); and detecting whether the liquid level of the intermediate tank is higher than or equal to the first high liquid level, if yes, proceeding to step (C), otherwise if step (f) is performed. 1 5 · A method for recovering drainage of a process device, the method comprising: (a) discharging a drain from a process device; 1297326 - No. 921〇mQn VI. Scope of application for patent (b) According to the conductivity of one of the drainage, the recovery tank is introduced into the recovery tank; _ which drainage should be introduced (c) to drain the drainage into the recovery tank (d) The drain J is introduced into the buffer tank into the buffer tank; detecting the row detection, the opening is enabled, the draining is detected, and the row is detected. (e) The drain is subjected to a first total of two or two: Interstitial; whether the total organic carbon content of water is lower than a standard value. έ昼 ( (f) When the total organic carbon content of the drainage is 'the level of the tank is higher than or equal to the medium level; Value (g) When the liquid level of the middle tank is higher than or equal to the middle liquid level, a pump, a first pump and a second valve, close the first raw water tank, ^ (h) a second total organic carbon content detecting whether the total organic carbon content of the water is lower than the standard value; (i) when the total organic carbon content of the drainage is lower than the standard value, whether the liquid level of the tank is lower than or equal to a low liquid level And (j) ^ the level of the middle tank of the δH is lower than or equal to the low level, and the pump is turned off and The first pump. 1 6· The method for recovering the drainage of the process unit as described in claim 15 of the patent application, wherein in the step (e), when the total organic carbon content of the drainage is lower than the standard value, the following steps are performed: k) detecting whether the liquid level of the intermediate tank is higher than or equal to a first high liquid level; (1) when the liquid level of the intermediate tank is higher than or equal to the first high liquid level, opening a first pump and a first valve Closing a second valve to introduce the drainage into the first 10221pif1.ptc Page 25 I297326 Car g month (9曰_ Amendment ^----ΖΛΜ 92105190,, apply for a patent range of the original water tank; (m) Perform a third total organic carbon content test on the drainage to detect the total of the row 7 Whether the organic carbon content is lower than the standard value; (η) when the total organic carbon content of the drainage is lower than the standard value, detecting whether the liquid level is higher than or equal to a second high liquid level, the second high liquid The bit is higher than the first high liquid level; and, (0) when the liquid level of the intermediate tank is higher than or equal to the second high liquid level, the second pump is turned on to accelerate the drainage into a first raw water tank. 1 7· The method for recovering drainage of a process device as described in claim 16 of the patent application, wherein in the step (n), when the liquid level of the intermediate tank is lower than the second high liquid level, the following steps are performed : detecting whether the liquid level of the intermediate tank is lower than or equal to a middle liquid level; and when the liquid level of the intermediate tank is lower than or equal to the middle liquid level, the first pump is turned off. 1 8·Recovering the process device drainage as described in item 15 of the patent application scope, wherein in step (h), when the total organic carbon content of the drainage is higher than the standard value, the following steps are performed; Whether the liquid level of the intermediate tank is lower than or equal to a low liquid level; and when the liquid level of the intermediate tank is approximately lower than the low liquid level, the first pump and the second pump are turned off. 1 9 · Recycling of the process unit drainage as described in item 5 of the patent application, wherein in step (i), when the liquid level of the intermediate tank is higher than the low level, the following steps are performed; Operating the first pump and the second pump for a period of time; 1297326 Case No. 92105190 Amendment VI. Patent application scope Close the first pump and the second pump 111« Page 27 10221pifl.ptc