TWI221100B - Process method and system for saving cleaning water - Google Patents

Abstract

The present invention provides a process method and a system for saving cleaning water. A cleaning unit provides a cleaning device for performing a rapid discharge cleaning process or a laminar flow cleaning process, and a control device capable of controlling the whole cleaning process. A recycle unit is capable of recycling and simultaneously filtering the cleaning waste solution generated during the rear section of the rapid discharge cleaning process or the laminar flow cleaning process in the cleaning unit. A detection unit uses a detection device thereof to determine the degree of contamination for the liquid filtered by the recycle unit in order to determine whether the filtered liquid is a waste solution to be discharged or a recycle cleaning solution capable of being recycled. A waste liquid discharge unit is used to discharge the cleaning waste solution generated in the front section of the rapid discharge cleaning process in the cleaning unit and the cleaning waste solution determined to be discharged by the detection unit. A storage unit stores the recycle cleaning solution determined to be recycled by the detection unit for use by a subsequent process. A recycle cleaning solution supply unit provides the recycle cleaning solution stored by the storage unit to be used by the front section of the rapid discharge cleaning process of the cleaning unit.

Description

1221100

91110033 V. Description of the invention (1) [Field of invention] Health, first 5 ί::: a kind of cleaning technology, especially refers to through repeated use; two to save the consumption of cleaning fluid *, even reduce the discharge of cleaning waste fluid at the same time By. [Background of the Invention] According to the wet cleaning method 4 in the conventional semiconductor manufacturing process, it can be divided into two categories: one is the quick drain (QD) method, which is mainly used to clean impurities of larger particles. Gravity is used to quickly drain water out, and at the same time drag impurities out to achieve the effect of washing; the other is laminar washing method (rinse), which is mainly used to wash small particles of suspended impurities. The laminar flow (1 amina Γ f 1 〇w) brings out tiny impurities suspended in water to achieve the effect of washing. «Refer to the first figure, which shows the architecture diagram of the conventional cleaning technology process system, which mainly includes a cleaning liquid supply unit 10, a cleaning unit 20, and a waste liquid discharge unit 30. The cleaning liquid supply unit 10 is a device capable of supplying enough cleaning liquid to the cleaning unit 20, such as providing DI water; the cleaning unit 20 has a cleaning device for rapid discharge flushing method and a A control device that controls the entire cleaning process; the waste liquid discharge unit 30 is an appropriate device that discharges the cleaning liquid after cleaning to another place. In the foregoing cleaning unit 20, the rapid discharge flushing method cleaning device may be replaced by a laminar flow cleaning method cleaning device or a cleaning device having both a rapid discharge flushing method and a laminar flow cleaning method according to requirements. Reference to the second figure is a flow chart showing a conventional cleaning technology process method using rapid discharge flushing = and laminar flow cleaning method ′, which refers to a complete

Side I Page 5 1221100 Case No. 91110033_ Year Month a Amendment V. Description of Invention (2) Process of cleaning procedure. Step 5 0 is to inject the cleaning liquid generated by the cleaning liquid supply unit 10 into the cleaning unit 20; Step 50 2 is the cleaning unit 2 0 to use the cleaning liquid injected in Step 5 0 and quickly pass through it Discharge the cleaning device of the flushing method and enter the cleaning procedure of the rapid discharge flushing method, and finally send the used cleaning liquid waste liquid to the waste liquid discharge unit 30; step 504 is the waste liquid discharge unit 30 and step 50 2 The transported waste liquid is guided to other places for storage or discharge; step 50 6 is to judge whether the rapid discharge flushing process has been performed five times through the control device in the cleaning unit 20, and if it is less than five times, it will be repeated. Repeat steps 500, 502, 5 04, and 506. If it has reached five times, it will go to step 5 0; Step 5 0 8 is to inject the cleaning liquid produced by the cleaning liquid supply unit 10 into the cleaning unit 2 0 Step 5 1 0 The cleaning unit 20 uses the cleaning liquid injected in step 5 8 and enters the laminar flow cleaning process through the laminar flow cleaning method of the cleaning device, and finally the used cleaning liquid is discarded. Liquid to the waste liquid discharge unit 30; step The 512-based effluent discharge waste liquid guide unit 30 in step 510 it is transported to the place of storage or vented. The reference to the third figure is a schematic diagram showing the water consumption and drainage volume of a conventional cleaning process using a rapid discharge flushing method and a laminar flow cleaning method. Among them, the rapid discharge flushing method 600 in the first stage refers to the process performed in steps 500, 502, 504, and 506 in the second figure above, and the five flushes of the process are respectively A, B, C, and D and E unit cleaning liquids 6 2 1, 6, 2 2, 6 2 3, 6 2 4 and 6 2 5 The fast discharge flushing process is performed, and the waste liquid 631, 632, 633, 634, and 6 discharged each flush 3 5 volumes are A ', B', C ', D', and E 'units respectively; the second-stage laminar flow washing method 610 refers to the process performed in steps 508, 510, and 51 2 of the second figure above, And the process i ^ i A ^ ll〇〇

----- 911 Hum V. Description of the invention (3) The laminar flow washing process is performed through the cleaning liquid 6 2 6 whose volume is F units, and the volume of waste liquid 6 3 6 discharged is f, the unit. Therefore, in a complete cleaning process, the total volume of the cleaning liquid supply required by the cleaning liquid supply unit 丨 〇 is A + B + C + D + E + F units, and the waste liquid discharge unit 30 needs to discharge The total volume of waste ^ 63 0 is eight '+ 6, + (:, + 〇, + £, + ?, unit, so that in each complete cleaning process, a large amount of cleaning liquid must be provided, and also It is necessary to & manage a large amount of cleaning waste liquid. This will not only cause a cost burden, but also a waste of water resources, and may also cause environmental problems. [Summary of the Invention]

_ The purpose of the present invention is to design a cleaning process method and system that can save water resources and relatively reduce the discharge of waste liquid by recovering the cleaning solution. In order to achieve the above purpose, the present invention provides a processing system that saves cleaning water. : A cleaning liquid supply unit 10 that can provide the cleaning liquid required for the rapid discharge of the latter part of the washing process or the laminar flow cleaning process, a washing unit with a rapid discharge washing method or a laminar flow washing method cleaning device 2 A waste liquid discharge unit 30 for discharging the cleaning waste liquid generated in the manufacturing process, a recovery unit 40 that can recover and filter part of the cleaning waste liquid at the same time, and a detection and judgment to determine whether the recovered cleaning waste liquid is a waste liquid to be discharged or can be recycled A detection unit 50 for the used regenerating cleaning solution, a storage unit 60 storing the recovered regenerating cleaning solution, and a regenerating cleaning solution supply unit 70 which can provide a quick discharge of the regenerating cleaning solution required in the first stage of the washing process. The cleaning process of the present invention is designed according to different cleaning degree requirements. Therefore, the amount of cleaning waste liquid recovered is designed according to the cleaning process, the filtering capacity of the recycling unit 40 and the detection unit 50 checking the cleaning waste fluid of the recycling unit.

Page 7 1221100 Case No. 91110033_year month g___ 5. Description of the invention (4) Determined by the test standard. The more times the regeneration cleaning liquid is used for cleaning, the better the filtration capacity of the recovery unit 40 and the lower the detection standard of the cleaning waste liquid of the recovery unit by the detection unit 50 is. Save the amount of new cleaning fluid. In order to make those skilled in the art understand the purpose, features, and effects of the present invention, the following specific embodiments and the accompanying drawings' are used to explain the present invention in detail as follows. [Detailed description of the invention] Referring to the fourth figure, a system architecture diagram showing a process for saving cleaning water according to the present invention is provided, which includes a cleaning liquid supply unit 10, a cleaning unit 20, a waste liquid discharge unit 30, a recovery unit 40, a The detection unit 50, a storage unit 60 and a regeneration cleaning liquid supply unit 70. The cleaning liquid supply unit 10 can provide the cleaning liquid required for the rapid discharge of the flushing process or the laminar flow cleaning process. The cleaning liquid can be DI water; the cleaning unit 20 has the function of providing rapid discharge flushing. Cleaning unit or laminar flow cleaning method and a control device that can control the entire cleaning process; the recovery unit 40 is recyclable and simultaneously transitions to the rear part of the rapid discharge flushing process in the cleaning unit 20 or the laminar flow cleaning process station The generated cleaning waste liquid is finally delivered to the detection unit 50; the detection unit 50 judges the pollution degree of the cleaning waste liquid recovered by the recovery unit 40 through its sensing device. It is determined that it is a waste liquid to be discharged or a recyclable cleaning liquid that can be recycled; the waste liquid discharge unit 30 is used to discharge the cleaning waste liquid generated in the previous stage of the rapid discharge flushing process of the aforementioned cleaning unit 20 and the detection The cleaning waste liquid to be discharged determined by the unit 50; the storage unit 60 stores the detection unit 50

1221100 Case No. 5. Description of the invention (5) 91110033 means revising the recyclable cleaning fluid that can be recycled and storing it for use in subsequent processes; the regenerating cleaning fluid supply unit 70 uses the regenerating cleaning stored in the storage unit 60 The liquid k is used in the front part of the rapid discharge flushing process of the cleaning guide 20 described above. In the aforementioned cleaning unit 20, the rapid discharge flushing method cleaning device may be replaced by a laminar flow method cleaning device or a cleaning device having both a rapid discharge flushing method and a laminar flow cleaning method according to requirements. The front part of the rapid discharge flushing process in the aforementioned cleaning unit 20 uses the recycled regenerating cleaning solution.

In the aforementioned cleaning unit 20, the latter part of the rapid discharge flushing process or the laminar flow cleaning process uses a pure cleaning solution. The aforementioned detection unit 50 has a device for measuring the conductivity or ohmic value of the recovered waste liquid, or a device for detecting the content of organic compounds. Figures 5A and 5B illustrate a flowchart of the first embodiment of the present invention. The cleaning process is designed as a laminar flow cleaning process after five rapid discharge flushing processes. The first three rapid discharge flushing processes use regeneration cleaning. liquid. Step 70 is to inject the regeneration cleaning liquid into the cleaning unit 20 through the regeneration cleaning liquid supply unit 70; Step 702 is the cleaning unit 20 uses the regeneration cleaning liquid injected in step 70 to pass through the rapid cleaning method. Wash the device and enter the cleaning process of the rapid discharge flushing method, and finally send the used cleaning liquid waste liquid to the waste liquid discharge unit 30; step 70 4 is the waste liquid discharge unit 30 and transfer it in step 70 2 The waste liquid is guided to other places for storage or discharge. Step 706 is to determine whether the rapid discharge flushing process has been performed three times through the control device in the cleaning unit 20, and if it is less than three times, it will be repeated. Steps 700, 702, 704, and 706 'if three have been reached

Page 9 1221100 ΜΆ 5. Description of the invention (6)

Then, it will go to step 70 8; step 708 is to inject the β washing liquid generated by the cleaning liquid supply unit 10 into the cleaning unit 2 0; step 7 1 0 is the cleaning unit 2 0 to use step 7 〇8 Injected cleaning liquid, and through its rapid discharge flushing method π, the device enters the rapid discharge flushing process, and the generated cleaning waste liquid is transferred to the recovery unit 40; step 712 is the recovery unit 40. Recover the waste liquid transported in step 710 and perform appropriate filtration; step 7Η is the detection unit 50 detects the filtrate recovered and filtered in step 712 to determine whether the filtrate is to be recycled; step η5 is The waste liquid discharged unit 30 is used to guide the filtrate that was judged as not to be recycled in step 7 to 2 for storage or discharge, and at this time, it may indicate that the cleaning is incomplete. Therefore, it will return to step 7 08 to continue cleaning; step 71 6 is to store the filtrate judged to be recyclable in step 7 12 through the storage unit 60; step 71 8 is to store the filtrate stored in the storage unit 60 The regeneration cleaning liquid is sent to the regeneration cleaning liquid supply unit 70; step 720 is a rapid discharge flushing process of steps 708, 710, and 71 2 judged through the control device in the cleaning unit 20 疋No twice, if less than twice, then go back to step 7 0 8 to continue the fast discharge flushing process. If it has reached twice, then go to step 7 2 2; step 7 2 2 is to supply the cleaning liquid The cleaning liquid generated by the unit 丨 is injected into the cleaning unit 20; step 724 is that the cleaning unit 20 uses the cleaning liquid injected in step 7 2 2 to enter the laminar flow cleaning process through the laminar flow cleaning method of the cleaning device. And the generated cleaning waste liquid is sent to the return unit 40; step 726 is the recovery unit 40 recovers the waste liquid sent in step 724 and performs appropriate filtering; step 728 is the detection unit 50 for step 7 2 6 The recovered filtrate is filtered Perform a test to determine whether the liquid is to be recycled; Step 7 2 9 is through the waste liquid discharge unit 3 〇

Page 10 1221100 i No. 91〗 10033 Amendment _η V. Description of the invention (7) The filtrate judged to be unused in step 728 is led to be stored or discharged elsewhere 'and may indicate that the cleaning is incomplete, so Will return to step 7 2 2 to continue cleaning; step 7 3 0 stores the filtrate judged to be recyclable in step 7 2 8 through the storage unit 60; step 7 3 2 stores the filtrate stored in the storage unit 60 The regenerated cleaning liquid is delivered to the regenerated cleaning liquid supply unit 70. The method used in the foregoing step 71 4 and step 728 is to measure the ohmic value of the recovered waste liquid through a conductivity meter of the detection unit 50 to determine the cleanliness of the recovered waste liquid, and whether to use the recovered waste liquid as a recycling device. The basis of judgment. The sixth diagram illustrates the water consumption and drainage volume of the first embodiment. The first stage of the process of the rapid discharge flushing method 8 0 of the first stage refers to steps 700, 702, 704, and 70 in the fifth A above. 6 process, and the three washings of this process are through the regeneration cleaning liquid supply unit 7 respectively to provide the volume of A, B and C units of regeneration cleaning liquid 8 4 1, 8 4 2 and 8 4 3 for rapid discharge The flushing process, and the volume of waste liquid discharged from each flush 8 3 1, 8, 32, and 833 are each A ', B', and C 'units; the first stage of the rapid discharge flushing method 80 0 refers to the foregoing The process performed in steps 708, 710, 712, 714, 715, 716, 718, and 72 0 in the fifth figure A, and the two rinses of this process are respectively passed through the cleaning liquid supply unit 10 to provide volumes D and E, respectively. The unit's cleaning liquid 8 2 1 and 8 2 2 are subjected to a rapid discharge washing process, and the waste liquid discharged from each washing is filtered through the recovery unit 40 and passed through the detection unit 50 and the recycled cleaning liquid 8 5 is recovered. 1 and 8 5 2 volumes are D 'and E' units respectively; The flow cleaning method 8 1 0 refers to the process performed in steps 722, 724, 72 6, 728, 729, 73 0, and 732 in the fifth figure B, and the process provides a volume of F through the cleaning liquid supply unit 10 unit

Η Page 11 1221100 Case No. 911100 A laminar flow washes along with the cleaning solution 823 of the description of the invention (8) through the recovery unit 40 transition and pass. The discharged waste liquid from the flushing was passed through the regeneration cleaning liquid 8 5 3 with a volume of F, and the dry level recovered after the test was performed by the test unit 50. So in a complete mastership

Among the cleaning liquids to be supplied, 80% of the waste liquids discharged by the cleaning liquid supply unit U unit 30 are ^ = ^ + E + F units, and the waste liquids are discharged early in each cycle of the cleaning process. All A + B + C units. In order to supply a new cleaning solution, the system of the present invention has a reduced recovery unit, a storage unit, an additional recovery unit, a detection of babies as early as 70, and a regeneration cleaning solution for storage. The water supply policy is early and the supply is early, but it is actually only an increase and change; the complete system is: this only needs to repair the conventional system locally. The cleaning process of the present invention can be designed and based on different equipment and cost considerations. * It is required that the sample cleaning agent and the main 4 be used. The whole cleaning system has a multi-month design process to meet different needs. However, the present invention has been disclosed as above with a specific embodiment. However, the present invention is based on the present invention. Anyone who is familiar with this skill, ^ God and range β, can make various changes. :: The essence of the present invention Wei Dang shall be determined by the scope of the attached patent application. Bao 1221100 Case No. 91110033 Month-Day Amendment Schematic Description [Schematic Description] The first diagram is a system architecture diagram showing the process of conventional cleaning technology; the second diagram is a flowchart showing the process of conventional cleaning technology process; the third diagram is A diagram showing the water consumption and drainage volume of the conventional cleaning technology process. Figure IX. Figure 4 shows the system architecture diagram of the cleaning water saving process of the present invention. Figures 5A and 5B illustrate the flowchart of the first embodiment of the present invention; The sixth figure illustrates the water consumption and drainage volume of the first embodiment. [Illustration of drawing number] Cleaning liquid supply unit 1 0 Cleaning unit 2 0 Waste liquid discharge unit 30 Recovery unit 40 Detection unit 50 Storage unit 6 0 Regenerative cleaning liquid supply unit 7 0

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Claims (1)

1221100 Prime No. 91110033 — year, month, and day of amendment _ 6. Application scope of patent / A method for saving cleaning water, the method includes the following steps: (a) injecting a regeneration cleaning liquid into the cleaning unit through a regeneration cleaning liquid supply unit, (b) The cleaning unit uses the regenerated cleaning liquid injected in step (a), enters the cleaning process of the rapid discharge flushing method through the cleaning device of the rapid discharge flushing method, and finally sends the used cleaning solution waste liquid to A waste liquid discharge unit; (c) the waste liquid discharge unit directs the waste liquid transported in step (b) to be stored or discharged there; (d) injects the cleaning liquid generated by a cleaning liquid supply unit into the Cleaning unit; (e) the cleaning unit uses the cleaning liquid injected in step (d) and enters the rapid discharge washing process through its fast cleaning device, and sends the generated cleaning waste liquid to a recovery Unit · (f) The recovery unit filters steps r and Shi; The waste liquid transported in) is recovered and appropriate (g)-The detection unit performs step-by-step inspection to determine whether the filtered filtrate is to be recovered and completed. The waste liquid discharge unit: The funnel liquid recovery enables washing ^ ^; Bring the filtrate that was judged as not to be recycled in g) for storage or discharge, and go back to step u) to continue cleaning i) a storage unit to store j) to store the storage-" light) as recyclable Use Xi, Quan ★ The regenerating cleaning liquid stored in the wrong place is sent to the regeneration ^ first 1221100 month Case No. 91110033 6. Scope of patent application In the supply unit. 5. According to the method of saving and clearing up as described in item 1 of the scope of patent application, after step (j) is completed, a dream step is added, so that the process control device of the main and main water determines the steps (d) to (e) If the number of repetitions set in the rapid flushing and washing unit is less than this number, will the clothes return process be continued. Stomach ° to step (d) Following 6. According to the saving cleaning method described in item 5 of the scope of patent application, then step (j) to complete the process of setting the number of rinses and water: Steps (k) The cleaning liquid supply unit generates the cleaning liquid and injects it into the main cleaning unit using the cleaning unit injected in step (k); the cleaning device of the cleaning method enters the laminar flow cleaning process, and is transported to the laminar flow waste liquid through the The recovery unit; the generated cleaning (m) the filtration that the recovery unit sends in step 0), ..., recovery and appropriate (η) the detection unit for the step (recovery and detection to determine whether) The filtrate is used for 4/4 to recycle the data, · I 〇) ¾Waste liquid discharge stay-guide to other places for storage and two steps out vn): r is the mash liquid that is not recycled for use; fly discharge And return to step (k) to continue cleaning (P) the storage unit (q) and the filtrate determined to be recyclable in the storage load step (n); the regeneration cleaning liquid stored in the supply unit earlier is sent to The regeneration cleaning liquid % Profit-making process described in item 3 of the cleaning method 1221100 __Case No. 91110033 Amended on June 6, Patent Application Law, after step (j) is completed, a step is added to make the control device in the cleaning unit It is determined whether the processes of steps (d) to (e) have reached the set number of repetitions. If it is less than this number, it will return to step (d) to continue execution. 8. A processing system for saving cleaning water, comprising: a cleaning liquid supply unit, which can provide the cleaning liquid required for the rapid discharge of the latter part of the flushing process or the laminar flow cleaning process; 〆 a cleaning unit, which has provided Cleaning device for rapid discharge flushing method or laminar flow cleaning method and a control device capable of controlling the entire cleaning process; a recovery unit which can recover and simultaneously filter the latter part of the rapid discharge flushing process or laminar flow cleaning process in the cleaning unit The generated cleaning waste liquid; a detection unit that judges the pollution degree of the cleaning waste liquid recovered by the recovery unit through its sensing device, and determines whether it is a waste liquid to be discharged or a recyclable cleaning liquid that can be recycled; A waste liquid discharge unit, which is used to discharge the cleaning waste liquid generated in the previous stage of the rapid discharge flushing process of the aforementioned cleaning unit and the cleaning waste liquid determined to be discharged by the detection unit; a storage unit, which stores the determination of the detection unit The recyclable cleaning fluid can be recycled and stored for subsequent process use; a regenerating cleaning fluid supply list Which system use of the storage unit to store a cleaning liquid reproducing the washing unit to provide rapid discharge of the rinsing process using the pre-stage. 9. According to the process system for saving washing water described in item 8 of the scope of the patent application, the washing liquid is deionized water. 10. The process of saving cleaning water according to item 8 of the scope of patent application 1221100 Case No. 91110033 Amendment VI. Patent Application System The detection unit has a device for measuring the conductivity or ohmic value of the recovered waste liquid. 1 1. According to the process system for saving washing water as described in item 8 of the scope of patent application, the detection unit has a device for detecting the content of organic compounds. Page 18