TWI348026B - Testing devices under test by an automatic test apparatus having a multisite probe card - Google Patents

Testing devices under test by an automatic test apparatus having a multisite probe card

Info

Publication number
TWI348026B
TWI348026B TW096104425A TW96104425A TWI348026B TW I348026 B TWI348026 B TW I348026B TW 096104425 A TW096104425 A TW 096104425A TW 96104425 A TW96104425 A TW 96104425A TW I348026 B TWI348026 B TW I348026B
Authority
TW
Taiwan
Prior art keywords
multisite
probe card
devices under
testing devices
under test
Prior art date
Application number
TW096104425A
Other languages
English (en)
Other versions
TW200741213A (en
Inventor
Domenico Bertoncelli
Fabrizio Arca
Stefano Ermolli
Original Assignee
Verigy Pte Ltd Singapore
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Verigy Pte Ltd Singapore filed Critical Verigy Pte Ltd Singapore
Publication of TW200741213A publication Critical patent/TW200741213A/zh
Application granted granted Critical
Publication of TWI348026B publication Critical patent/TWI348026B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2834—Automated test systems [ATE]; using microprocessors or computers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31901—Analysis of tester Performance; Tester characterization
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
TW096104425A 2006-02-08 2007-02-07 Testing devices under test by an automatic test apparatus having a multisite probe card TWI348026B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2006/050745 WO2007090465A1 (en) 2006-02-08 2006-02-08 Testing devices under test by an automatic test apparatus having a multisite probe card

Publications (2)

Publication Number Publication Date
TW200741213A TW200741213A (en) 2007-11-01
TWI348026B true TWI348026B (en) 2011-09-01

Family

ID=37056860

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096104425A TWI348026B (en) 2006-02-08 2007-02-07 Testing devices under test by an automatic test apparatus having a multisite probe card

Country Status (2)

Country Link
TW (1) TWI348026B (zh)
WO (1) WO2007090465A1 (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI491896B (zh) * 2011-11-23 2015-07-11 Yang Electronic Systems Co Ltd 具複數檢測頭之陳列檢測裝置
TWI773140B (zh) * 2020-03-05 2022-08-01 日商愛德萬測試股份有限公司 用於流量捕獲及除錯工具之圖形使用者介面

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103869108B (zh) * 2014-03-17 2016-08-17 上海华虹宏力半导体制造有限公司 持卡器装置及多功位测试装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0763788A (ja) * 1993-08-21 1995-03-10 Hewlett Packard Co <Hp> プローブおよび電気部品／回路検査装置ならびに電気部品／回路検査方法
US6741085B1 (en) * 1993-11-16 2004-05-25 Formfactor, Inc. Contact carriers (tiles) for populating larger substrates with spring contacts
US5726920A (en) * 1995-09-29 1998-03-10 Advanced Micro Devices, Inc. Watchdog system having data differentiating means for use in monitoring of semiconductor wafer testing line
US6113646A (en) * 1997-12-04 2000-09-05 Micron Technology, Inc. Method of selecting layout of integrated circuit probe card
US7307433B2 (en) * 2004-04-21 2007-12-11 Formfactor, Inc. Intelligent probe card architecture

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI491896B (zh) * 2011-11-23 2015-07-11 Yang Electronic Systems Co Ltd 具複數檢測頭之陳列檢測裝置
TWI773140B (zh) * 2020-03-05 2022-08-01 日商愛德萬測試股份有限公司 用於流量捕獲及除錯工具之圖形使用者介面

Also Published As

Publication number Publication date
TW200741213A (en) 2007-11-01
WO2007090465A1 (en) 2007-08-16

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