TWI345624B - - Google Patents

Download PDF

Info

Publication number
TWI345624B
TWI345624B TW96123465A TW96123465A TWI345624B TW I345624 B TWI345624 B TW I345624B TW 96123465 A TW96123465 A TW 96123465A TW 96123465 A TW96123465 A TW 96123465A TW I345624 B TWI345624 B TW I345624B
Authority
TW
Taiwan
Prior art keywords
reflector
parallel
light
photodetector
transparent body
Prior art date
Application number
TW96123465A
Other languages
English (en)
Chinese (zh)
Other versions
TW200900729A (en
Inventor
Chien Hong Liu
Wen Yuh Jywe
Original Assignee
Univ Nat Formosa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Formosa filed Critical Univ Nat Formosa
Priority to TW96123465A priority Critical patent/TW200900729A/zh
Publication of TW200900729A publication Critical patent/TW200900729A/zh
Application granted granted Critical
Publication of TWI345624B publication Critical patent/TWI345624B/zh

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
TW96123465A 2007-06-28 2007-06-28 Parallel measuring apparatus among transparent body and reflection body and method thereof TW200900729A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW96123465A TW200900729A (en) 2007-06-28 2007-06-28 Parallel measuring apparatus among transparent body and reflection body and method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW96123465A TW200900729A (en) 2007-06-28 2007-06-28 Parallel measuring apparatus among transparent body and reflection body and method thereof

Publications (2)

Publication Number Publication Date
TW200900729A TW200900729A (en) 2009-01-01
TWI345624B true TWI345624B (enExample) 2011-07-21

Family

ID=44721451

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96123465A TW200900729A (en) 2007-06-28 2007-06-28 Parallel measuring apparatus among transparent body and reflection body and method thereof

Country Status (1)

Country Link
TW (1) TW200900729A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114383822B (zh) * 2022-01-04 2024-02-09 中国科学院微电子研究所 用于光学系统调焦调平的检测装置及方法

Also Published As

Publication number Publication date
TW200900729A (en) 2009-01-01

Similar Documents

Publication Publication Date Title
CN100535767C (zh) 一种调焦调平测量方法和装置
US9250059B2 (en) Detection devices and methods using diffraction wavefront of a pinhole stitching measurement of surface shape
CN111044260B (zh) 显微物镜畸变测试装置及测试方法
CN102589851B (zh) 反射式共焦透镜焦距测量方法
CN103543135B (zh) 一种基于荧光寿命分布的纳米精度光斑对准方法和装置
CN1687702A (zh) 基于动态差动补偿方法的二维光电自准直装置和测量方法
JP6576435B2 (ja) ビーム誘導光学系から誘導される光線を分析するためのシステム及び方法
TWI411860B (zh) 聚焦定位判定方法
CN107643055A (zh) 基于偏振光束的自参考准直光路系统及计算被测角度方法
CN109470177A (zh) 基于双光栅的三维角度测量方法与装置
CN103091681A (zh) 基于重反射技术的调频连续波干涉仪
US9945656B2 (en) Multi-function spectroscopic device
CN111272083B (zh) 一种离轴抛物面镜离轴量的测量装置及测量方法
US7330278B2 (en) Optical displacement measurement device
TWI699842B (zh) 使用用於半導體檢查及度量之差分偵測技術而改善高度感測器之橫向解析度之方法
TWI345624B (enExample)
JP2018040748A (ja) レーザー距離計測装置
TWI557405B (zh) 光學檢測系統
CN103486980A (zh) 基于数字微镜器件的跨尺度测量方法
CN109579744A (zh) 基于光栅的跟随式三维光电自准直方法与装置
CN101236304A (zh) 一种光线平行调整的装置与方法
CN119148373A (zh) 用于自动对焦传感器的中继系统、传感器、系统以及方法
JP2006343595A (ja) 共焦点型検査装置
TWI274139B (en) Optical measurement unit for real-time measuring angular error of platform and the method thereof
JP2005017257A (ja) 光学測定装置

Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees