I345283 九、發明說明： 【發明所屬之技術領域】 本發明與玻璃基板的存放與取用設備有關’特別是關於一種 用來裝載玻璃基板之基板移載機及其基板收納匿。 【先前技術】 近年來，隨著大尺寸液晶顯示器的量產，使得液晶顯示面板I345283 IX. Description of the Invention: [Technical Field] The present invention relates to a storage and retrieval device for a glass substrate, and particularly relates to a substrate transfer machine for loading a glass substrate and a substrate thereof. [Prior Art] In recent years, with the mass production of large-sized liquid crystal displays, liquid crystal display panels have been made.
的尺寸跟著增大，而玻璃基板的尺寸與產能需求也不斷的加大。 所以，在生產液晶顯示面板的繁複製程中，如何能夠有效率地搬 移及存放大尺寸的玻璃基板就成為面板製造廠首先面對的問題。 一般而言，破璃基板在每道製程完成後都會先被存放在架子上， 然後等到要進行下一道製程時再由機械手臂自架子上取出。目前 業界較常用來存放玻璃基板的架子有標準式卡匣架 cassette)、鋼索式卡g架（wire cassette)及托架式卡厘架（如^ cassette)。 :積 標準式卡E架為-種内部具有多層載板的匿箱，而且每個载 板上面還^置有多個垂直的雜。玻璃基板放在每-層裁板上 面，並且被頂柱撐起而與載板的表面保持一適當間隙。因此，要 由払準式卡匣架中取放玻璃基板時，機械手臂前端的牙又可以直 接伸入頂柱之間而將玻璃基板迅速取出或放回。但是，標準式卡 昆架卻因為職⑽置使每個載板之間f預留較大的‘，^但 限制了卡ϋ架存放玻璃基板的數量，而且也增加了相架本身二 5 1345283 鋼索式卡匣架為一種内部具有多層鋼索的匣箱，其中玻璃基 板就是存放於每一層鋼索上。鋼索式卡匣架主要是由多個皮帶傳 送帶伸入每一層鋼索，而依序一層一層地取放玻璃基板。因此， 鋼索式卡匣架中每層鋼索間所需預留的間隔就可以縮小，可在同 樣的大小的卡匣架中存放更多的玻璃基板。但是，皮帶傳送帶只 能夠由下而上依序地取放玻璃基板，而直接由卡匣架上特定的一 層鋼索上取出玻璃基板，取放相當不方便。 # 托架式卡匣架為一種内部具有多層托盤的匣箱，其中每個托 盤互相堆疊，而且每個托盤上都可以放置玻璃基板。托架式卡匣 架主要是先m-升降機將特定之托盤上方的所有托盤都升高， 然後再糊另—升降機將特定之減升高，以空出供機械手臂伸 入托盤間之空間。因此，機械手臂可以糊伸人匿箱巾取出特定 的破璃基板，而且滅__:也可以削、，使E箱存放更多玻 璃基板。雜絲式卡轉擁有鮮式卡轉與射式卡时的 1 降機將_升高時，托盤上的灰塵會掉到下方托 ^上的玻璃基板，而污染到下層的玻璃基板。這樣的話，可能會 ^^致液晶顯示面板的良率卩备供 板。 艮待低，賴辦糾崎洗玻璃基 此外’在鮮式卡㈣與絲式讨財，因為 須正個伸入卡匣架中才能夠 ·、 往過長。如此-來，機械手臂^錄板，使機械手臂的尺寸往 移動行程，使得控制機械手臂== 目當大的操作空間與很長的 手仏動的機具也跟著加大，會導致機 6 1345283 械手煮與其周邊機具太過魔大，而不利於廢房空間的利用。 【發明内容】 先前技術中用來存取玻璃基板的機械手臂伸入卡匣架的行程 過長，導致機械手臂及其周邊機具會佔用太多空間，有鑒於此， 本發明係提供一種基板移載機及其基板收納匣，以解決現有用來 存取玻璃基板之卡匣架所存在的問題。The size has increased, and the size and capacity requirements of glass substrates have continued to increase. Therefore, in the complicated reproduction process for producing a liquid crystal display panel, how to efficiently transport and store a large-sized glass substrate becomes a problem faced firstly by the panel manufacturer. In general, the glass substrate is first stored on the shelf after each process is completed, and then removed from the shelf by the robot arm when the next process is to be performed. At present, the racks commonly used in the industry for storing glass substrates are standard cassette holders, wire cassettes, and bracket type cassettes (such as ^ cassette). : The standard card E-frame is a type of hidden box with a multi-layer carrier inside, and each carrier plate is also provided with a plurality of vertical impurities. The glass substrate is placed on each of the layers of the panel and is supported by the pillars to maintain a suitable gap with the surface of the carrier. Therefore, when the glass substrate is taken from the cymbal truss, the teeth at the front end of the robot arm can be directly inserted between the top posts to quickly take out or return the glass substrate. However, the standard card cage is because of the position (10), so that each carrier plate has a large 'f reserved', but it limits the number of glass substrates stored in the card holder, and also increases the photo frame itself 2 5 1345283 The cable-type card truss is a box with a multi-layer steel cable inside, in which the glass substrate is stored on each layer of steel cable. The steel cable truss mainly consists of a plurality of belt conveyor belts extending into each layer of steel cables, and the glass substrates are sequentially taken one by one. Therefore, the required space between each layer of cable ties in the cable truss can be reduced, and more glass substrates can be stored in the same size truss. However, the belt conveyor can only take the glass substrate sequentially from bottom to top, and the glass substrate is directly taken out from a specific layer of the cable on the card holder, which is quite inconvenient to pick and place. The # cradle cassette truss is a cassette with a multi-layer tray inside, where each tray is stacked on top of each other, and a glass substrate can be placed on each tray. The cradle type cradle is mainly an m-lift that raises all the trays above the specific tray, and then pastes the hoist to raise the specific height to free the space for the robot to extend into the tray. Therefore, the robot arm can stick out the box towel to take out the specific glass substrate, and the __: can also be cut, so that the E box can store more glass substrates. When the hybrid card is turned into a fresh card and a shooting card, the lowering machine will raise the dust on the tray to the glass substrate on the lower tray and contaminate the lower glass substrate. In this case, the yield of the liquid crystal display panel may be supplied to the board. Waiting for the low, I will do the anti-seal glass-washing base. In addition, the fresh card (four) and the silk-style bargaining, because it must be stretched into the card truss can be long. So - come, the robot arm ^ recording board, so that the size of the robot arm moves to the stroke, so that the control robot arm == the large operation space and the long hand movement of the machine also increase, which will lead to the machine 6 1345283 The robotic cooking and its peripheral machines are too big, which is not conducive to the use of waste space. SUMMARY OF THE INVENTION In the prior art, the mechanical arm used to access the glass substrate extends into the cassette truss for too long, which causes the robot arm and its peripheral implements to occupy too much space. In view of the above, the present invention provides a substrate shift. The carrier and its substrate are housed to solve the problems of the existing card truss for accessing the glass substrate.
為解決前述之問題，本發日聽提供―錄板移載機及其基板 收納E，制时載基板’其巾基板可為但不侷限於液晶顯示面 板之玻璃基板。基板移載機包括有基板I幢及取出裝置，適用 於收納或傳送紐。基板I纟包含有框架及複數錄輪。框架 上設置有承載盤’而且框架具有取出σ及相對於取出口之抵靠 邊。滾輪係設胁承賴上，而且雜係由取出叫向抵靠和 水平線湖’其巾滾輪_財載基板，並料基板移動放置^ 定位。這些滾輪具有-公切線，且此公域勤取.朝抵 傾斜，並與水平線之間具有夾角。取蚊置係通過取出口，而由 基板收納H中取出基板，或是將基板置人基板收納"。當取出 裝置將基《人基減幢時，雜會導祕板移朗定:。 本發明之频在於’裝設於基板收紐巾之各滾輪係且 斜的公切線，使滾輪能解引置人基触_之基板自動移、 疋位’能誠少手臂本身的長度及移動行程，並使基板 體積縮小，而減少基板移_所侧的空間。 幾的 以下在貫财射詳細敘述本剌之詳細特徵以及優點，其 7 7容足以使任何熟f侧技藝者了解本發狀技術内容並據以實 L且根據本说明書所揭露之内容、巾請專利範圍及圖式，任何 熱習相關技藝者可㈣地理解本發日贈述之目的及優點。 、t上之關於本發明内容之說明及以下之實施方式之說明係用 、Γ、範/、解釋本發明之原理，並a提供本發明之專利申 進一步之解釋。 又 【實施方式】 ， ”為使對本發明的目的、構造、特徵、及其功能有進一步的瞭 解，茲配合實施例詳細說明如下。 Θ月-閱第1圖」及「第2圖」所示，為本發明第一實施例 。斤提供之-種基板移載機，_於收納或傳送基板如。基板％ y為但不侷限於液晶顯示面板之玻璃基板。在本實施利中之基板 私載機包括有硬數個基板收納g η及取出裝置如。每一個基板 η S互相上下堆疊組合而成，而且基板收_ η可以被 拆卸Τ來細f洗。在本發明的其他實施方式巾，基板收納 也可以是僅设置單一個來存放與取用基板。 ^閱「第3圖」、「第4圖」及「第5圖」所示。基板收納 '丁'用以存放基板3〇，其中各基板收納匠U包含有框架I]， :框架12上設置有承她13。框架U的-側具有取出口 m， =架12的另一側具有相對於取出口 a之抵靠邊i22。抵靠 裝設魏衝件123，㈣賴13上設置有複數個滾輪 滾輪131係_於承麵13上，使各雜131可以在承 1345283 載盤13上原地轉動。滾輪131係用以承載基板3〇，並導引基板 30相對於承載盤13移動。各滚輪131得'由取出口 121朝向抵靠 邊122沿水平線L1排列’而且相鄰兩個滾輪131設置的間隔距離 D1介於50 mm至100mm，其中水平線乙}是一條大致與地面平 打的假想線。各滾輪Π1之下半部分係位於承載盤^之上表面 m的下方，且各滾輪131之上半部分係突出於承健13之上表 面I32。各滾輪m之上半部分的凸出高度H1介於5 至 K)mm，即滾輪131頂端與承健13之上表面132的距離介於5 mm至Khnm，而且凸出高度H1的值由框架12之取出口 i2i朝 抵靠邊122遞減。承載盤13上之各滾輪131的頂端係連接形成公 切線L2，而且公切線L2位於承载盤13之上表面132的上方。公 切線U係由框扣之取出口⑵朝抵靠邊⑵傾斜且向下延伸， 亚與水平線L1之間具有夾角A1，其中夾角ai為3度至$度。 緩衝件123為具有緩衝作用的物件，例如海綿、橡膠等等，係用 以在抵赤邊122上承接基板3Q，而提供基板％適當的保護。 滾輪⑶設置的間隔距離m可以是％麵、乃麵或是 100mm ’係以基板30的尺寸作為設置間隔距離以的主要考量， 只要是使基板3G在承_ 上祕時不會相下_個滾輪⑶ 即可。浪輪1M之上半部分的凸出高度hi高度介於$咖 K)腿’例如最靠近取出口 121的滾輪131上半部分的高度 Γ而且越遠躲w121的秘⑶上半部分的高度沿著公切 4 L2越來越小’錄板W喊端不會撞縣健Η的上表面 P可A切線L2與水平線L1間之夾角A1可以是3度、4度 1345283 • f 5度’只要使基板3G可以藉由滾輪131在承_ 13上自動移 動即可，而且基板30碰撞，緩衝件123的力道也不會太大。 、月同8寸茶閱第4圖」及「第6圖」所示，取出裝置2〇設置 •;基板收納厘11的—側，且分別面對於各取出口 121。取出裝置 .2〇包含有移動㈣及手臂23，係用以將基板％由基板收納厘 ^中取出’或者是將基板30放入基板收納匣11中。移動盤21 #可以相對於各基板收 11上下移動，而對應到每-個基板收納 之取出口 121。手臂23係可移動地設置於移動盤21上，而 且可以在移動盤21上左右移動。吸盤231設置於手臂之端部， 而且位於手臂23端部之底面上^手臂23前端可以通過取出口 而伸入基板收納g n中利用其吸盤231吸住基板如，狹後 域板收納Ε 11中取出基板。手臂23以其吸盤別吸住基板 州―而將基板30置入基板收納£ u中並釋放。移動盤21上設置 個滾輪22 ’滾輪22係肋承載手臂23由基板收納昆u 出之基板3〇，並支撐基板3〇在移動盤U上跟隨手臂2 動到定位。 請參閱「第7圖」'「第8圖」及「第9圖」所示。當移動盤 私動而對準其中一個基板收魄11時，手臂23就可以由取出 伸入基板收納g n中，然後利用吸盤231持取基板％。 ^ 、手臂23可以移動退出取出口 121，使基板3()藉由滚輪⑶ 載盤13上移動。當手臂23將基板3〇拉出取出口⑵後，義 =〇會4由滚輪22在移動盤21上跟隨手臂23移動到定位，然 矛夕動i2l就可以聽板％賴到其他地方 。相反地，手臂^3 1345283 可以利用吸盤231持取基板30，並一起由取出口 121伸入基板收 納匣11，然後將基板30放置在承載盤13的滾輪131上，並使吸 盤231釋放基板30。此時，基板30會在重力的作用下被滾輪131 導引而在承載盤13上朝抵靠邊122自行移動，直到基板3〇碰到 緩衝件123才會停止。 印蒼閱「第10圖」及「第u圖」所示，為本發明第二實施 例所提供之-餘板及應用I纟·之基板移賴，其具體 貫施方式與前述第-實施例大致相同，其巾第二實施例與第一實 施例的差異處如下。本發明之第二實施例中手臂23具有—夹爪 说，而夾爪232設置於手臂23之端部上。夹爪说^以由取出 口 121伸人基板收納£ n中，而夾住基板％並將基板％由取出 口⑵拉出基扳收_ n外。手臂23也能以其央爪说夹住基 板30，而將基板30置入基板收納匣11中並釋放。In order to solve the above problems, the present invention provides a tablet transfer machine and a substrate storage unit E. The substrate substrate can be a glass substrate of a liquid crystal display panel. The substrate transfer machine includes a substrate I and a take-up device, which is suitable for housing or transferring buttons. The substrate I纟 includes a frame and a plurality of recording wheels. The frame is provided with a carrier disc' and the frame has a take-up σ and an abutment edge with respect to the take-out opening. The roller system is placed on the yoke, and the miscellaneous system is positioned by abutting and abutting the horizontal line lake's towel roll _ the carrier substrate, and the substrate is moved and placed. These rollers have a --column tangent, and this common area is taken from the ground and tilted toward it, and has an angle with the horizontal line. The mosquito collection system removes the substrate from the substrate housing H or the substrate is placed on the substrate. When the removal device is used, the basic guideline will be moved to the base. The frequency of the invention lies in 'the common tangent line which is installed on the roller system of the substrate receiving towel, so that the roller can de-emphasize the substrate of the human base to automatically move, and the position of the arm can be less than the length and movement of the arm itself. The stroke and the volume of the substrate are reduced, and the space on the side of the substrate is reduced. The following detailed description of the detailed features and advantages of the present invention is sufficient to enable any skilled person to understand the technical content of the present invention and to disclose the contents according to the present disclosure. For the scope and schema of the patent, any person skilled in the art may (4) understand the purpose and advantages of the gift on this date. The description of the present invention and the following description of the embodiments of the present invention are intended to explain the principles of the present invention and to provide a further explanation of the patent application of the present invention. Further, in order to further understand the objects, structures, features, and functions of the present invention, the following detailed description will be given in conjunction with the embodiments. The following is shown in Figure 1 and Figure 2 It is the first embodiment of the present invention. The substrate transfer device provided by the jin is used to store or transport the substrate. The substrate % y is, but not limited to, a glass substrate of a liquid crystal display panel. The substrate private carrier in the present embodiment includes a plurality of substrate housings η and a take-up device such as. Each of the substrates η S is stacked on top of each other, and the substrate _ η can be removed and washed. In another embodiment of the present invention, the substrate may be stored in a single substrate for storage and retrieval. ^See "Figure 3", "Figure 4" and "Figure 5". The substrate housing 'D' is used to store the substrate 3, wherein each substrate storage unit U includes a frame I], and the frame 12 is provided with a carrier 13. The side of the frame U has a take-out opening m, and the other side of the frame 12 has an abutment edge i22 with respect to the take-out port a. A plurality of roller rollers 131 are disposed on the bearing surface 13 so as to be able to rotate on the carrier 13 of the carrier 1345283. The roller 131 is for carrying the substrate 3 and guiding the substrate 30 to move relative to the carrier 13. Each of the rollers 131 is 'arranged from the take-out port 121 toward the abutting edge 122 along the horizontal line L1' and the spacing distance D1 of the adjacent two rollers 131 is between 50 mm and 100 mm, wherein the horizontal line B is an imaginary line roughly flush with the ground. . The lower half of each roller Π1 is located below the upper surface m of the carrier disk, and the upper half of each roller 131 protrudes above the surface I32 of the bearing 13. The convex height H1 of the upper half of each roller m is between 5 and K) mm, that is, the distance between the top end of the roller 131 and the upper surface 132 of the bearing 13 is between 5 mm and Khnm, and the value of the convex height H1 is determined by the frame. The exit i2i of 12 is decremented toward the edge 122. The top ends of the rollers 131 on the carrier 13 are connected to form a common tangent L2, and the common tangent L2 is located above the upper surface 132 of the carrier 13. The tangential line U is inclined by the outlet of the frame buckle (2) toward the abutting edge (2) and extends downward, and has an angle A1 between the sub-level and the horizontal line L1, wherein the angle ai is 3 degrees to $ degrees. The cushioning member 123 is a cushioning member such as sponge, rubber or the like for receiving the substrate 3Q on the blunt edge 122 to provide appropriate protection of the substrate. The spacing distance m set by the roller (3) may be a % surface, a surface or a 100 mm 'as the main consideration of the size of the substrate 30 as the spacing distance is set, as long as the substrate 3G is not in the same time. Just press the wheel (3). The height of the convex height hi of the upper half of the wave wheel 1M is between the height of the upper portion of the roller 131, which is closest to the take-out opening 121, and the farther away from the height of the upper half of the secret (3) of the w121 The public cut 4 L2 is getting smaller and smaller 'the recording board W shouting will not hit the upper surface of the county health P can be A. The angle between the line L2 and the horizontal line L1 can be 3 degrees, 4 degrees 1345283 • f 5 degrees ' The substrate 3G can be automatically moved by the roller 131 on the carrier 13, and the substrate 30 collides, and the force of the buffer member 123 is not too large. In the same month, as shown in Fig. 4 and Fig. 6 of the 8-inch tea, the take-out device 2 is disposed on the side of the substrate storage PCT 11 and faces each of the take-out ports 121. The take-out device 2 〇 includes a movement (4) and an arm 23 for taking out the substrate % from the substrate storage ’ or placing the substrate 30 in the substrate storage cassette 11 . The movable disk 21 # can be moved up and down with respect to each of the substrates, and corresponds to the take-out port 121 accommodated in each of the substrates. The arm 23 is movably disposed on the moving tray 21, and is movable left and right on the moving tray 21. The suction cup 231 is disposed at the end of the arm, and is located on the bottom surface of the end of the arm 23. The front end of the arm 23 can be inserted into the substrate storage gn through the take-out port, and the substrate can be sucked by the suction cup 231. Remove the substrate. The arm 23 sucks the substrate state with its suction cup, and the substrate 30 is placed in the substrate storage and released. The moving plate 21 is provided with a roller 22' roller 22 for supporting the arm 23, and the substrate 3 is received by the substrate, and the supporting substrate 3 is moved to follow the arm 2 on the moving plate U. Please refer to "Figure 7" - "Figure 8" and "Figure 9". When the moving disk is privately aligned with one of the substrate holders 11, the arm 23 can be taken out into the substrate housing gn, and then the substrate % is taken up by the suction cup 231. ^, the arm 23 can be moved out of the take-out port 121 to move the substrate 3() on the carrier 13 by the roller (3). After the arm 23 pulls the substrate 3 out of the take-out opening (2), the right side 4 is moved by the roller 22 on the moving plate 21 to follow the arm 23 to the position, but the i2l can be used to listen to the other places. Conversely, the arm ^3 1345283 can hold the substrate 30 by the suction cup 231, and together with the take-out opening 121, protrude into the substrate receiving cassette 11, and then place the substrate 30 on the roller 131 of the carrier 13 and release the substrate 231. . At this time, the substrate 30 is guided by the roller 131 under the action of gravity and moves on the carrier disk 13 toward the abutting edge 122 until the substrate 3 hits the buffer member 123. The image of the remaining plate and the application of the substrate provided by the second embodiment of the present invention is shown in FIG. 10 and the first embodiment of the present invention. The example is substantially the same, and the difference between the second embodiment of the towel and the first embodiment is as follows. In the second embodiment of the invention, the arm 23 has a jaw and the jaw 232 is disposed on the end of the arm 23. The gripper says that the substrate is received by the take-out opening 121, and the substrate % is clamped, and the substrate % is pulled out of the base by the take-out port (2). The arm 23 can also hold the substrate 30 with its central claws, and the substrate 30 is placed in the substrate housing 11 and released.
本發明中裝設於基板收納g U令之各滚輪1S1係具有傾斜 公切線L2，使滾輪⑶能夠導引置入基板收納g n之基板如 動移動並放置到定位，能夠減少手臂Μ本身的長度及移動行程 亚使基^移載機的體積縮小，而減少基板移載機所佔用的空間 ==置2G在取編的基板料錢移轉他的基她 不但可以避免灰塵污染下層的基板3〇，In the present invention, each of the rollers 1S1 mounted on the substrate housing g has an inclined common tangent line L2, so that the roller (3) can guide the substrate placed in the substrate storage gn to move and be placed in the positioning, thereby reducing the length of the arm sleeve itself. And the moving stroke sub-base reduces the volume of the transfer machine, and reduces the space occupied by the substrate transfer machine == set 2G in the borrowed substrate material money to transfer his base, she can not only avoid dust pollution of the lower layer of the substrate 3 Oh,
板3〇的便利性與存放大量基板30的空間優勢。、、疋J 發明 隹…、本發仙㈣之實施例揭露如上，然其並翻以限定 。在不脫離本發明之精神和範_，所為之更動與潤飾 11 1345283 關於本發明所界定之保護範圍請參考 屬本發明之專利保護範圍。 所附之申請專利範圍。 【圖式簡單說明】 第1圖為本發明第一實施例中基板移載機之示意圖。 第2圖為第1圖中複數個基板收納昆之分解示意圖。 第3圖為本發明中基板收納匣之示意圖。 第4圖為本發明中基板收納匣之示意圖。 第5圖為本發明中基板放置於基板收納匿之示意圖。 第6圖為本發明第—實施例中取出|置由基板移载機取 板之示意圖。 巷 第7圖為本發明第—實施例中取㈣置由基板移载機取 板之示意圖。 泰The convenience of the board 3 is advantageous with the space for storing a large number of substrates 30. The invention of the invention, the invention of the present invention, and the embodiment of the present invention are disclosed above. It is to be understood that the scope of protection defined by the present invention is within the scope of the patent protection of the present invention without departing from the spirit and scope of the present invention. The scope of the attached patent application. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a substrate transfer machine in a first embodiment of the present invention. Fig. 2 is a schematic exploded view of a plurality of substrates in the first drawing. Fig. 3 is a schematic view showing the substrate housing cassette in the present invention. Fig. 4 is a schematic view showing the substrate housing cassette in the present invention. Fig. 5 is a schematic view showing the substrate placed on the substrate in the present invention. Fig. 6 is a schematic view showing the take-out of the substrate transfer machine in the first embodiment of the present invention. Lane 7 is a schematic view of the fourth embodiment of the present invention taken from the substrate transfer machine. Thai
第8圖為本發明第—實施例中取—置由基板賴機取 板之示意圖。 土 第9圖為本發明第一實施例中取出裝置將基減人 機之示賴。 ㈣ 第10圖為本發明第二實施例中取出裝置由基板 基板之示意®。 Μ 第11圖為本發明第二實施例中取出裝置由基板移裁機 基板之示意圖。 扣 【主要元件符號說明】 11 基板收納匣 12 1345283Fig. 8 is a schematic view showing the take-up of the substrate by the substrate in the first embodiment of the present invention. Figure 9 is a representation of the removal device in the first embodiment of the present invention. (4) Fig. 10 is a schematic view of the take-out device from the substrate substrate in the second embodiment of the present invention. Figure 11 is a schematic view showing the take-out device of the substrate transfer machine substrate in the second embodiment of the present invention. Buckle [Main component symbol description] 11 Substrate storage 匣 12 1345283
12............... ...............框架 121............. ..............取出口 122............. ..............抵靠邊 123............. ..............緩衝件 13............... ..............承載盤 131............. ..............滚輪 132............. ..............上表面 20................ ..............取出裝置 21................ ..............移動盤 22................ ..............ί袞輪 23................ ..............手臂 231.............. ..............吸盤 232.............. .............夾爪 30................ .............基板 A1............... .............夾角 D1............... .............間距 HI............... .............凸出南度 LI................ .............水平線 L2................ .............公切線 1312.................................Frame 121................... .......... take the exit 122...............................but the edge 123....... ........................ cushioning parts 13........................... .. Carrier Disk 131...............................Roller wheel 132.................. ...........Upper surface 20..................................Removal device 21... ...............................Mobile disk 22.................... ..........ί衮轮23..................................arm 231.... ............................ sucker 232.......................... ...claws 30..................................substrate A1............. .. .............Angle angle D1.................................pitch HI... ..............................prominent south degree LI................ ......... horizontal line L2..................................public tangent 13