TWI333987B - - Google Patents
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- Publication number
- TWI333987B TWI333987B TW96106111A TW96106111A TWI333987B TW I333987 B TWI333987 B TW I333987B TW 96106111 A TW96106111 A TW 96106111A TW 96106111 A TW96106111 A TW 96106111A TW I333987 B TWI333987 B TW I333987B
- Authority
- TW
- Taiwan
- Prior art keywords
- workpiece
- unit
- anode
- plating
- electroplating
- Prior art date
Links
- 238000007747 plating Methods 0.000 claims description 62
- 239000007788 liquid Substances 0.000 claims description 52
- 238000003860 storage Methods 0.000 claims description 30
- 238000009713 electroplating Methods 0.000 claims description 29
- 238000000034 method Methods 0.000 claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 238000004140 cleaning Methods 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 238000005242 forging Methods 0.000 claims description 3
- 238000005086 pumping Methods 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000004332 silver Substances 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 238000007664 blowing Methods 0.000 claims 3
- 206010036790 Productive cough Diseases 0.000 claims 1
- 238000004891 communication Methods 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
- 229910052734 helium Inorganic materials 0.000 claims 1
- 239000001307 helium Substances 0.000 claims 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 1
- 230000028161 membrane depolarization Effects 0.000 claims 1
- 150000002739 metals Chemical class 0.000 claims 1
- 229920000728 polyester Polymers 0.000 claims 1
- 210000003802 sputum Anatomy 0.000 claims 1
- 208000024794 sputum Diseases 0.000 claims 1
- 238000013022 venting Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 229910052500 inorganic mineral Inorganic materials 0.000 description 2
- 239000011707 mineral Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000037396 body weight Effects 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013527 degreasing agent Substances 0.000 description 1
- 238000005363 electrowinning Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000002386 leaching Methods 0.000 description 1
- 238000005065 mining Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Electroplating Methods And Accessories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96106111A TW200835817A (en) | 2007-02-16 | 2007-02-16 | Electroplating apparatus capable of carrying out electroplating onto local area of workpiece and its method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96106111A TW200835817A (en) | 2007-02-16 | 2007-02-16 | Electroplating apparatus capable of carrying out electroplating onto local area of workpiece and its method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200835817A TW200835817A (en) | 2008-09-01 |
| TWI333987B true TWI333987B (OSRAM) | 2010-12-01 |
Family
ID=44209643
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW96106111A TW200835817A (en) | 2007-02-16 | 2007-02-16 | Electroplating apparatus capable of carrying out electroplating onto local area of workpiece and its method |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200835817A (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105350038A (zh) * | 2014-08-22 | 2016-02-24 | 王元谷 | 局部电镀装置及局部电镀方法 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019047086A1 (en) * | 2017-09-07 | 2019-03-14 | Acm Research (Shanghai) Inc. | PLATE CHUCK |
| TWI791785B (zh) * | 2019-03-06 | 2023-02-11 | 大陸商盛美半導體設備（上海）股份有限公司 | 電鍍夾盤 |
-
2007
- 2007-02-16 TW TW96106111A patent/TW200835817A/zh not_active IP Right Cessation
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105350038A (zh) * | 2014-08-22 | 2016-02-24 | 王元谷 | 局部电镀装置及局部电镀方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TW200835817A (en) | 2008-09-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |