TWI330711B - - Google Patents

Description

UJU711 IX. Description of the Invention: [Technical Field] The present invention relates to an impurity detection and detection method, and more particularly to a method for stably applying and smearing on a substrate A device for detecting impurities on an upper surface or a bottom surface of a substrate and a method therefor. [Prior Art] In the current information society, the importance of display devices as visual media is more important than ever. The current mainstream cathode ray tube (Cathode Ray Tube, also known as the Brown tube) has a large problem in terms of weight and volume. Currently, many flat panel display devices (FUt panei Display) that can overcome this limitation of cathode ray tubes are being developed. ° Flat panel display devices include liquid crystal display (LCD: Liquid Crystal DisPlay), field emission display (Field Emission Display), plasma display panel (Plasma Display Panel) and electroluminescence (Electr〇luminescence) devices. Most of them have been made into products and sold on the market. The liquid helium display panel can meet the trend of thin and light electronic products, and the recent mass production capacity has been improved, which has rapidly replaced cathode ray tubes in many applications. In particular, a liquid crystal display panel that uses a thin film transistor (hereinafter referred to as "TFT") to drive a liquid crystal cell has the advantages of excellent quality and low power consumption, and has recently been effectively improved and developed with mass production technology. New results Liquid crystal display panels are rapidly moving toward large-scale and high-resolution 112066.doc 1330711 degrees. Liquid crystal display devices that display images by such liquid crystal display panels use an electric field to adjust the transmittance of liquid crystals to display images. Therefore, the liquid crystal display device includes a liquid crystal display panel in which liquid crystal cells are arranged in a matrix form and a driving circuit for driving the liquid crystal display panel. Fig. 1 is a schematic view showing a general liquid crystal display panel. In the display panel 1, the color filter array substrate 20 and the TFT array substrate 30 are bonded to each other with the liquid crystal layer 10 interposed therebetween. The liquid crystal display panel 1 shown in Fig. j is a part of all effective screens. In the upper portion of the color filter array substrate 20 The color filter 24 and the common electrode 26 are formed on the back surface of the glass substrate 22. The upper glass substrate 22 is attached to the front surface. Light plate 28. A color filter of red (R), green, and blue (B) is disposed in the color filter 24, and the color is displayed by light passing through a special wavelength region. Between the color patches 24 of adjacent colors A black matrix (mack matrix) is formed. The black matrix 睁δ is not disposed between the red (R), green (g), and blue (b) color filters 24 for separating red (R), green (G), blue (Β) color filter 24, and preventing the decrease in contrast by absorbing light incident from an adjacent unit. The TFT array substrate 30 has a plurality of data lines on the front surface of the lower glass substrate 32. 34 and the gate lines 40 are disposed to overlap each other, and a TFT (38) is formed on the intersection portion thereof. Further, a pixel electrode is formed on the front surface of the lower glass substrate 32 on the front surface of the data line "with the gate line 40". 36. Ding Ding (38) is composed of a gate connected to the gate line 4, a source connected to the data line 34, and a drain opposite to the source via the channel. The TFT (38) is connected to the pixel electrode 36 through a contact hole penetrating through the drain. The TFT (38) selectively supplies the data signal eTFT (38) transmitted by the data line 34 to the pixel electrode 36 by means of a gate signal transmitted from the gate 112066.doc 1330711 pole line 4〇 by responding to the daytime The scanning signal transmitted by the polar line 4 switches the data transmission path between the data line 34 and the pixel electrode 36, so that the polarizing plate 42 is attached to the back surface of the county pixel electrode WTFT array (4) (4). • The pixel electrode 36 is located in a cell region divided by the data line 34 and the gate line 40. It is composed of a transparent conductive material having a high light transmittance. The pixel electrode 36 has a potential difference from the common electrode 26 formed on the upper glass substrate 22 based on the data signal supplied through the drain. The liquid crystal layer 1 调节 adjusts the amount of light transmitted through the light incident on the TFT array substrate 30 in response to an electric field applied to itself. When a potential difference occurs between the pixel electrode 36 and the common electrode 26, the liquid crystal of the liquid crystal layer 1 located between the lower glass substrate 32 and the upper glass substrate 22 rotates in accordance with the dielectric anisotropy. Accordingly, light supplied from the light source through the pixel electrode 36 is incident on the upper glass substrate 22. The polarizing plates | 28, 42 attached to the color filter array substrate 20 and the TFT array substrate 30 can only transmit light polarized in a certain direction, and the liquid crystal of the liquid crystal layer 1 is 90 degrees twisted nematic (TN) In the mode, the polarization directions are perpendicular to each other. An alignment film (not shown) is formed on the surface of the color filter array substrate 20 and the TFT array substrate 30 facing the liquid crystal. In order to form a pattern on the color filter array substrate 20 and the TFT array substrate 30, a photoresist (PR: photoresist) is applied on the glass substrate 22 and the lower glass substrate 32 on which the electrode and the wire material are formed, and then light is used. The resist process is formed by a development process in which the cover selectively irradiates the exposure process of the ultraviolet light and the photoresist of the development exposure. Then, a pattern is formed by etching the electrode and the line material by using the photoresist pattern as etch 2066.doc 1330711 for the etching process of the mask. Fig. 2 is a schematic view showing a photoresist layer coating apparatus for mounting a conventional surface detecting apparatus. The photoresist layer coating apparatus shown in FIG. 2 includes a support table 5 for placing the upper glass substrate 22 and the lower glass substrate 32, a slit nozzle 52 for applying a light-resistance substance on the glass substrate, and a slit nozzle 52. Surface detecting means 54 for detecting impurities ^ on the nozzle 52. φ The slit nozzle 52 has a distance of 150 μm or less from the glass substrate, and applies light on the surface of the substrate during the movement to the length of the glass substrate. The photoresist layer 56 is formed by a resist material. The surface detecting means 54 is attached to the front end of the slit nozzle 52 in the moving direction. If the photoresist layer 56 is applied in the state where impurities are present on the support table 50 or the upper glass substrate 22 and the lower glass substrate 32, the impurities not only damage the slit nozzle 52' but also damage the glass substrate, resulting in a liquid crystal display panel. A defect has occurred. φ To prevent this problem, the surface detecting device 54 is mounted at the front end of the slit nozzle 52 in the moving direction so that the laser beam 60' is generated when the slit nozzle 52 moves to detect the support table 5, the upper glass substrate 22, and the lower glass. Impurities on the substrate, as shown in Figure 2. A general photoresist layer coating apparatus is shown in Fig. 2. The laser beam 60 generated from the surface detecting device 54 scans the surfaces of the upper glass substrate 22 and the lower glass substrate 32 by light contact points. However, the existing coating apparatus as described above has a very narrow scanning area of the laser beam 60 generated from the surface detecting device 54, and thus cannot detect impurities located outside the swept area of 112066.doc 1330711, so that the support cannot be completely detected. The impurities on the top 5 or the upper glass substrate 22 and the lower glass substrate 32. To solve the problem, it is necessary to provide a plurality of surface detecting devices 54 for scanning the entire surface of the support table 50 or the upper glass substrate 22 and the lower glass substrate 32. However, providing a plurality of surface detecting devices 54 not only increases the production cost, but also increases the production cost. It also makes the structure very complicated. SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object thereof is to provide a surface detecting device capable of accurately detecting all impurities on a support table or a substrate by a simpler structure and using the same Surface detection method. In order to achieve the above object, a surface detecting apparatus according to the present invention includes: a light sensor having a light emitting portion and a light receiving portion for being parallel to a detecting surface of a detecting object at a predetermined interval from a detecting surface of the detecting object The light is transmitted and received in a direction; the driving portion is configured to transfer the light sensor relative to the detection object in a direction parallel to the detection surface of the detection object but intersecting the light emission direction of the light sensor. Further, the light-emitting portion and the light-receiving portion of the light sensor are disposed outside the both side ends of the surface to be detected and emit light in a direction perpendicular to the transfer direction so that the light traverses the detection surface of the detection target. Moreover, the surface detecting device according to the present invention further includes: a position adjuster 'for adjusting the height between the detecting surface of the detecting object and the light emitting path of the light sensor, and is isolated from the detecting surface of the detecting object. The transfer rod is provided, and the light-emitting portion and the light-receiving portion are combined at both ends thereof. At this time, the position adjustment 112066.doc -10- 1330711 is configured as the structure of the material transfer rod, and the space between the rods is sent, and the transfer of the inspection surface and the movement is used for the detection. The slit nozzle of the object coating liquid can be formed in one body. Moreover, the watch---------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------- Used to cause disturbance when an external force is applied;

In this case, the disturbing state 'drive portion' for detecting the strip is used to transfer the transfer lever relative to the detection target in a direction parallel to the detection surface of the detection object. Further, the other end of the strip has a detecting rod whose longitudinal direction is parallel to the detecting surface of the detecting object, and at this time, the detecting rod is elongated to form a shape across the both ends of the detecting surface of the detecting object. At this time, the detecting unit may use a strain gauge coupled to the strip, or may use a contact sensor that contacts with the strip. Further, the surface detecting device provided in accordance with the present invention also includes a position adjuster 'for adjusting the distance between the detecting surface of the detecting object and the other end of the strip. Further, the transfer lever and the slit nozzle for applying a coating liquid to the detection target may be integrally formed. According to the surface detecting method of the present invention, there is provided a step of illuminating in a direction parallel to the detecting surface of the detecting object by using a light sensor having a light emitting portion and a light receiving portion at a predetermined interval from the detecting surface of the detecting object. And receiving light; moving the light sensor relative to the detecting object in a direction parallel to the detecting surface of the detecting object but intersecting the light emitting direction of the light sensor; when the light receiving portion of the light sensor cannot receive the light, stopping for 112066 .doc The operation of applying a slit nozzle to the test object to the test object. Further, the surface detecting method according to the present invention also includes the step of transferring the slit nozzle to the application initial position • _ termination position after the operation of stopping the slit nozzle. When the slit nozzle is transferred to the coating end position, the slit nozzle is lifted and transferred to the front. And the surface detecting method according to the present invention may further include a step of transferring an external force with respect to the detecting object in a direction parallel to the detecting surface of the measuring object at a predetermined interval from the detecting surface of the detecting object. A strip of disturbed band occurs; the disturbed state of the strip is detected; and when the disturbed state of the strip is detected, the operation of the slit nozzle for applying the coating liquid to the detecting object is stopped. Further, the surface detecting method according to the present invention also includes the step of transferring the strip and the slit nozzle to a coating initial position or a coating end position after the operation of stopping the slit nozzle. When the strip and the slit nozzle are transferred to the application end position, the strip and the slit nozzle are lifted and transferred to the front. [Embodiment] Hereinafter, an embodiment of a surface to be detected according to the present invention will be described in detail with reference to the accompanying drawings. 3 is a front view of a surface detecting device according to a first embodiment of the present invention, FIG. 4 is a front view of a surface detecting device according to a first embodiment of the present invention, and FIG. 5 is a line along line AA of FIG. A partial cross-sectional view of the surface detecting device provided by the first embodiment of the present invention is taken. The surface detection H2066.doc 1330711 device 100 provided in the circle 3 and the first embodiment of the present invention shown in FIG. 4 is located in front of the moving direction of the slit nozzle 400, and the slit nozzle 4 is used for mounting on the branch station 200. The substrate 300 is coated with a photoresist layer 4 ΐ〇» such a surface detecting device 100 includes: a transfer rod 11 长 which is longer than the substrate 300 and spaced upward from the upper surface of the substrate 3 一定, and has a separate transfer to the transfer a light-emitting portion 132 at both ends of the rod 110 and a light sensor 13B of the light-receiving portion 134 for transmitting and receiving light in a direction parallel to the upper surface of the substrate 300 at a predetermined interval from the upper surface of the substrate 3A; A driving portion (not shown) having a moving bracket 120 connected to both ends of the transfer lever 110 for transferring the transfer lever 11 in a direction parallel to the upper surface of the substrate 300 but different from the light emitting direction of the light sensor 13? . And, a position adjuster 122 for adjusting the height of the transfer lever 110 is provided at a joint portion of the transfer lever 110 and the moving bracket 120, so that the interval between the upper surface of the substrate 3〇〇 and the light-emitting path of the light sensor 130 can be adjusted. Therefore, by adjusting the distance between the upper surface of the substrate 300 and the light-emitting path of the light sensor 13, the detecting means can be set to detect only impurities exceeding a certain size. That is, the 'right impurity is too small, which will greatly affect the substrate 3 ,, and the impurity light-emitting device can also detect fine impurities by shortening the distance between the upper surface of the substrate 300 and the light-emitting path of the light sensor 13 . If the impurity smaller than the reference value does not affect the substrate 300, the impurity light-emitting device detects only the reference value by setting the pitch between the upper surface of the substrate 3 and the light-emitting path of the light sensor 130 as a reference value. Impurities. As shown in FIG. 4 and FIG. 5, when there is no impurity on the upper surface or the bottom surface of the substrate 300, the light incident from the light-emitting portion U2 is normally transmitted to the light-receiving portion 134. However, when there is an impurity on the upper surface of the substrate 300, self-luminous light is emitted. The light transmitted by the portion 132 is blocked by the impurity 112066.doc -13· 1330711 and cannot be transmitted to the light collecting portion 134. When there is an impurity on the bottom surface of the substrate 300, since the substrate 300 protrudes at the same height as the impurity, the light transmitted from the light-emitting portion 132 is blocked by the substrate 3 and cannot be transmitted to the light-receiving portion 134. As described above, when the light-emitting unit 132 is caused to emit light and receive light between the light-emitting portion 132 and the light-receiving portion 134, the transfer rod 11 is transferred in a direction perpendicular to the light-emitting direction of the light sensor 13A. Simultaneously scan the entire substrate 3〇〇. If the light sensor 130 normally emits light and receives light, the transfer rod 11〇 continues to be transferred, and the slit nozzle mounted behind the transfer rod 11〇 applies a photoresist layer 410 to the upper surface of the substrate 3〇〇. When the light receiving unit 〇4 of the light sensor π〇 cannot normally receive light, the surface detecting device 1 determines that there is an impurity on the substrate 3, so that the driving unit stops the transfer operation of the transfer rod, and the slit nozzle The coating work was also stopped. When the transfer of the transfer lever 110 and the coating operation of the slit nozzle are stopped, the slit nozzle is transferred to the front or the rear. When the slit nozzle is moved to the front, the slit nozzle is lifted and then moved forward to prevent the impurities from damaging the end of the slit nozzle. Then, the substrate 300 of the unfinished coating process is taken back from the support table 200 to perform a washing process. The substrate 300 which has been restored to the initial state by the washing process is again subjected to the coating process. When there is an impurity on the bottom surface of the substrate, if the slit nozzle is transferred toward the front without lifting the slit nozzle, the slit nozzle and the substrate may be in contact with each other to cause scratches on the substrate, and the slit nozzle end of the high price may be The part is damaged by impurities. When there is an impurity on the upper surface of the substrate, if the slit nozzle is transferred toward the front without lifting the slit nozzle, the slit nozzle moves the impurities forward and may cause scratches on the substrate, and the slit nozzle itself It may also be damaged by impurities. Since the scratches may cause the substrate to be unusable, and the slit nozzle price is M2066.doc -14·1330711 is relatively south, thus the protective substrate and the slit nozzle need to be moved to the front after lifting the slit nozzle. If the transfer rod 110 can receive light normally when the light receiving portion 134 of the light sensor 130 is normally received by the upper surface of the substrate 3, it is considered that the upper surface or the bottom surface of the substrate 3 has no impurities. The coating on the upper surface works. As described above, the surface detecting device 1 according to the present invention can detect the entire upper surface and the bottom surface of the substrate 3 by using a light sensor 130. Thus, not only the production cost but also the structure can be changed. It's simple. Further, the surface detecting apparatus 100 according to the present invention can detect not only the impurities on the upper surface and the bottom surface of the substrate 300 but also the defective substrate 300 on which the surface is formed to be convex. In this embodiment, the entire substrate 300 ′ can be scanned when the transfer rod 1 移 is transferred once, so that the distance between the light-emitting portion 132 and the light-receiving portion 134 is greater than the width of the substrate 300, but the distance between the light-emitting portion 132 and the light-receiving portion 134 can be as needed. The size of the scan is adjusted to adjust the size. In addition, in this embodiment, the transfer direction of the transfer rod 11 is perpendicular to the light-emitting path of the light sensor 130, but the transfer direction of the transfer rod 11 can also be set to be inclined at a certain angle to the light-emitting path of the light sensor 13A. Figure 6 is a perspective view of a surface detecting apparatus according to a second embodiment of the present invention, and Figure 7 is a front elevational view of a surface detecting apparatus according to a second embodiment of the present invention. As shown in FIG. 6 and FIG. 7, the surface detecting device 1GG according to the second embodiment of the present invention is extended by the upper end to the lower end of the transfer rod 11()' toward the substrate, and the upper surface of the table 112066.doc -15· 1330711 is extended. A belt 140 is provided in place of the light sensor 13A of the first embodiment for detecting the presence or absence of impurities. The transfer tray 110 is combined with a plurality of strips 140, and the lower ends of the strips 14 are connected to the detecting rod 150. The detecting rod 15 is long in shape and spans the surface of the substrate 3, and the substrate The upper surface of 300 is spaced apart by a predetermined distance. Thanks to the detector! 50 • (4) Longer and across the upper surface of the substrate 3〇〇, so that the impurity can interfere with the impurity at any position of the substrate • I00', and the strip 140 will be interfered by the interference between the detection # 150 and the impurity Disturbed. Therefore, the surface detecting apparatus provided in accordance with the present invention can measure the presence or absence of impurities on the entire substrate 300 by transferring the transfer rod 11 一次 once. At this time, the length of the detecting lever 150 can be increased or decreased as needed to determine whether or not there is a range of impurities, and if the width of the strip Μ0 is made to span the substrate 300, the detecting lever 150 can be omitted. And the height of the transfer lever 110 can be changed by operating the position adjuster m provided between the transfer lever 11A and the moving holder 12A, thereby adjusting the distance between the substrate 3 and the detecting lever 15g. Since the purpose and effect of adjusting the pitch of the substrate 3 (10) and the detecting lever 15 are the same as those of the first embodiment for adjusting the pitch between the substrate period and the light-emitting path of the inductor, they are omitted and described herein. ', FIG. 8 is a cross-sectional view of the surface of the present invention taken along the line B-B of FIG. 7 : the surface of the surface inspection provided by the embodiment, and FIG. 9 is a section of the substrate when impurities are present on the surface of the substrate due to impurities. A partial cross-sectional view of a surface detecting device provided by a second embodiment of the present invention. Since the strip 140 is subjected to a small amount of force, the force is also disturbed, and if the impurity 5 〇〇 attached to the upper surface of the base H2066.doc •16- dome 711 plate 300 interferes with the detecting rod 15〇, the continuation is continued. The transfer action of the transfer lever 110, the strip 14〇 will be disturbed as shown in FIG. At this time, the extent to which the strip 140 is disturbed is measured by the damper 16G attached to the strip 14 ,, and is driven when the strip 14G is disturbed to a greater extent than the reference.卩The transfer operation of the transfer lever 110 is stopped, and the coating process of the slit nozzle is also interrupted. When the transfer operation of the transfer lever 110 and the coating operation of the slit nozzle are stopped, the transfer lever 110 and the slit nozzle are transferred to the front or the rear. . The subsequent Φ process is the same as that described in the first embodiment of the present invention. FIG. 10 is a partial view of a surface detecting apparatus according to a third embodiment of the present invention, and FIG. 11 is a strip when the upper surface of the substrate has impurities. A partial cross-sectional view of a surface detecting apparatus according to a third embodiment of the present invention which is disturbed by impurities. As shown in the figure, the surface detecting apparatus 1 provided by the present invention can constitute a detecting unit for detecting the degree of disturbance of the strip 140 by using the blanket I sensor J70 which is contacted by the strip 140. The terminals of the contact sensor 17 are respectively disposed at positions corresponding to the transfer rods 110 and the strips 140, and are in contact with each other when the strips 14 are intertwined by the impurities 500 attached to the upper surface of the substrate 3, as shown in the figure. 11 is shown. As described above, when the two terminals of the contact sensor 1 70 are in contact with each other, the surface detecting device 100 detects that there is an impurity on the substrate 300 and stops the transfer operation of the transfer lever 11, and the slit nozzle also stops the coating operation. When the transfer operation of the transfer lever 11 and the coating operation of the slit nozzle are stopped, the transfer lever 110 and the slit nozzle are transferred to the front or the rear. The subsequent process is the same as that described in the first embodiment of the present invention. 3 to 11 show an embodiment in which the slit nozzle 400 and the detecting device 1 are respectively driven by a driving unit not U2066.doc -17-1330711, but referring to the first embodiment of the present invention shown in FIG. As shown in Fig. 12 of a modification of the surface detecting device provided in the example, it is known that the slit nozzle 400 and the detecting device 1 can be integrally formed by the connecting rod 600. Therefore, the slit nozzle 400 and the detecting means 1' can be controlled by a single driving unit as compared with the embodiment shown in Figs. 3 to 11 so that impurities can be detected with a simpler structure. And the single structure realized by the connecting rod 6〇〇 can also be applied to the second embodiment and the third embodiment shown in Figs. 8 to 11 .

The present invention has been described in detail with reference to the preferred embodiments thereof, but the scope of the present invention is not limited to the specific embodiments, but is construed in accordance with the scope of the claims. In particular, although the surface detecting device in this embodiment is mainly used to detect whether there is impurity on the substrate before the coating process of the substrate, the surface detecting device provided by the present invention can also be used to detect whether there are impurities on various products other than the substrate. Or determine the roughness of the product. In addition, those skilled in the art will appreciate that various modifications and changes can be made without departing from the scope of the invention. According to the surface inspection apparatus provided by the present invention, not only the impurities on the upper surface or the bottom surface of the substrate can be accurately detected, but also the defective substrate on which the protrusion is formed on the surface can be detected, and the production cost can be reduced due to the simple internal structure. Further, according to the surface inspection provided by the present invention, the apparatus is formed into a body by a slit nozzle for applying a coating liquid to the measuring object, whereby the impurities can be detected more simply. Moreover, the surface inspection method provided in accordance with the present invention has the advantage that a 112066.doc light sensor can be utilized to detect the presence or absence of impurities on the entire substrate. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing a general liquid crystal display panel; FIG. 2 is a schematic view showing a photoresist layer coating device for mounting an existing surface detecting device; FIG. 3 is a view showing a first embodiment of the present invention. 4 is a front view of a surface detecting device according to a first embodiment of the present invention; FIG. 5 is a front view of the first embodiment of the present invention taken along line AA of FIG. Figure 6 is a schematic view of a surface detecting device according to a second embodiment of the present invention; Figure 7 is a front elevational view of a surface detecting device according to a second embodiment of the present invention; A partial cross-sectional view of a surface detecting apparatus according to a second embodiment of the present invention taken along line B_B of FIG. 7; FIG. 9 is a surface of the second embodiment of the present invention in which the strip is disturbed by impurities when there is an impurity on the upper surface of the substrate. FIG. 10 is a partial cross-sectional view of a surface detecting device according to a third embodiment of the present invention; FIG. 11 is a view showing a state when an upper surface of the substrate has impurities. Months because of flexing occurring impurities present - the cross-sectional view of a portion of a surface detection apparatus provided by embodiments of the embodiment; FIG. 12 is a diagram shown in FIG. 3 | table 112066.doc embodiment a first embodiment of the invention provided

Claims (1)

, the application for double multi-fm private day correction replacement - page 丨 · : ten, the scope of patent application · · a kind of surface detection device to detect one of the impurities on one of the detection surfaces of a substrate 'its contain: transfer to know' One of the substrates has a long width and is spaced apart from the detection surface of the substrate; an inductor unit for detecting across the base along a width direction a plurality of predetermined portions of the detecting surface of the board, the sensor unit being coupled to the transfer rod; a position adjusting unit for adjusting a distance between the sensor unit and the substrate, the position adjusting unit and The transfer rod is coupled; and a drive unit 'for transferring the sensor unit and the position adjustment unit relative to the substrate in a direction intersecting the width direction. 2. The surface detecting device of the requester, wherein the sensor celite comprises a light sensor for transmitting/receiving light in one direction parallel to the detecting surface of the substrate and perpendicular to the moving direction - The direction of illumination causes light to traverse the detection surface of the substrate. The surface detecting device of claim 2, wherein the light sensor including portion and a light receiving portion are outside the one end of the detecting surface of the substrate. 4_ As the surface of the request item 3 is detected and attached ["曰,, 中中" The light-receiving portion is coupled to the ends of the shifting rod. 5. The surface detecting device of claim 4, wherein the transfer rod is used for coating the surface of the inspection surface - The coating liquid-slit (four) is formed as two 6. The surface detecting device of claim 1, wherein the sensor unit comprises: I12066-990426.doc 丄, /11 silly strips ▼, formed into a long shape for one The width direction spans the base I-, * slave, and is disturbed by an interference of one of the full widths of the substrate; and a detecting unit for detecting a disturbing state of the one of the disturbing strips. The surface detecting device of claim 6, wherein an upper end of the disturbing strip is spaced apart from the detecting surface of the substrate and with the transfer rod (4); the lower end of the strip 8 faces the detecting surface of the substrate Extending; and the disturbing strip is disturbed when an external force is applied. The surface detecting device of the item 7 of the month, the white ϋ 衣 进步 进步 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 包含 衣 衣 衣 衣 衣 衣 衣 衣 衣 衣 衣 衣 衣 衣 衣 衣 衣 衣 衣 衣 衣 衣 衣 衣The direction of the detection surface traverses the detection table 9, and the surface of the substrate is separated by the detection surface of the substrate. (4) The surface detection device 1 of the item 8 (4) is placed with the detection rod extended to form a span.两端 两端 忒 忒 忒 忒 忒 忒 忒 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 如 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面 表面U. The surface detecting device element according to any one of claims 7 to 9 includes a contact sensor, the gossip, and the contact end of the contact end 13⁄4 & y ^ 3 . And the surface of the sending rod and the disturbing strip facing each other, and the disturbing strip is disturbed. 12. The surface detecting device of claim 7, wherein: two contacts: point contact. _ coating material and used to the substrate. θ a narrow nozzle formed as a J12066-990426 .doc 2.