1323330 九、發明說明： 【發明所屬之技術領域】 本發明係關於以冷媒將熱源冷卻之冷卻系統、其運轉方 法及使用該冷卻系統之電漿處理系統。 【先前技術】[Technical Field] The present invention relates to a cooling system for cooling a heat source by a refrigerant, a method of operating the same, and a plasma processing system using the same. [Prior Art]
以往，係使用熱泵。熱泵係指進行冷卻或加熱之系統。 熱泵中係使用汽化熱。汽化熱係指冷媒從液體變化為氣體 時’冷媒從周圍吸收之熱。此外，熱泵中，亦使用凝縮 熱。凝縮熱係指冷媒從氣體變化為液體時，冷媒釋放至周 圍之熱。另外，熱泵中，為使用前述之汽化熱及凝縮熱， 係使用壓縮機及熱交換器等。 更具體而言，前述熱泵係用於内燃機關或冷藏庫等。該 等中，通常係内藏有封閉回路所構成之冷卻系統。冷卻系 統中，氟氣烷氣體等的液體冷媒會因絕熱膨脹而汽化。藉 此’產生吸熱作用。再者，壓縮機在絕熱狀態將汽化的冷 媒I缩。藉此’將汽化的冷媒凝縮而恢復液體冷媒。重覆 該種熱交換循環。根據如前述的熱交換循環，可有效進行 大熱量交換。 另方面，大型工廢之爐、槽及煙固等的表面積係非常 敎：^ f表面之大型卫廠之冷卻’係、使用冷媒的汽化 熱’其係流動於沿荖发志二 者具表面而蛇行設置之冷媒配管 時’靠近冷媒配管入口 s八口附近的位置，係進行汽化埶 冷卻，但在靠近冷媒配普φ U匕熱之急遽 ▽烯配管出口附近的位置， 冷媒汽化H ^ ^ Θ L 1將液體 進仃α化熱之冷卻。因此，大型工廠等 114754.doc 1323330 使用如前述之伴隨液體與氣體之態相變化之熱交換循環而 冷卻者，在其表面溫度分佈會產生極端差異。因此，用以 冷卻特定大型工廠設備之熱泵的冷媒，係使用比熱小的氮 或非活性氣體的氬等氣體。 [專利文獻1]曰本特開平1·193561號公報 [專利文獻2]日本特開2003-329355號公報 [發明所欲解決之問題] • 使用將如上述的氣體作為冷媒用之以往之汽化熱及凝縮 熱之熱泵，係具有以下幾個問題點。 首先，考慮在熱泵的封閉回路中考慮使用氣體作為冷卻 熱源的冷媒用之情況。此時，使用汽化熱及凝縮熱而進行 ‘冷卻時，從冷卻管的入口至出口之間，氣體會全部變化為 :液體。此時，因冷卻管的位置而使冷媒的吸熱能力有很大 差異。因此，冷卻管内的溫度分佈會產生很大的不均。因 此’無法均勻地將熱源冷卻。 秦其次，考慮以下情況：氣體不循環於封閉回路，而流動 於開放回路後，II &依序排出之方式，冷卻熱源。—般而 言，氣體與水之類的液體相比，其比熱極小。因此，在前 述之情況，因開放回路的形態而必須排出大量氣體。= 此氣體的消耗量極大。其結*，熱栗的繼 增加:另外，該氣艘可再利用於其他用途，但因= 用的"X備係大規模，故成本面上經濟效益差。 其次，考慮使用通常的冷卻水作為冷媒來冷卻熱源之情 況。此時，因水的比熱大，故大型熱源的表面溫度分佈: 114754.doc 非常零散。因此，使用水作為該種冷媒之冷卻系統並不適 於作為均勻冷卻熱源之冷卻系統。此外，在熱源設置於真 空氣體環境内之情況及易於與水反應之物質存在於周邊氣 體環境之情況中，當水從冷卻管漏洩時，可能會發生將真 空槽加壓至大氣壓以上所產生水蒸氣爆發及漏洩的水與周 邊氣體環境相反應所造成冷卻系統周邊部的破損等。 此外，如同模具保溫器，考量使用加壓水控制溫度之情 況°此時’原理上不可能將160°C以上溫度的熱源冷卻。 再者，與上述相同，可能有水蒸氣爆發及冷卻系統周邊部 破損等。 本發明係鑑於上述問題而成者，其目的在於提供可將大 型熱源均勻冷卻之冷卻系統、其運轉方法及使用該冷卻系 統之電漿處理系統。 【發明内容】 本發明之冷卻系統’係包含以下構件：壓縮機，其將空 氣以外的氣體冷媒壓縮為不會液化程度而送出；及熱源， 其係從壓縮機送出之氣體冷媒通過時，由氣體冷媒冷卻 之。此外，該系統係包含以下構件：熱交換器，其使從熱 源吸收熱後的氣體冷媒將熱釋放至外部；緩衝槽，其暫時 儲存熱交換器中將熱釋放至外部後的氣體冷媒；及配管， 其構成依序將壓縮機、熱源、熱交換器及缓衝槽連結之封 閉回路，並循環氣體冷媒。 根據上述構成，由於使用比熱小的氣體冷媒冷卻熱源， 將具大表面之熱源冷卻時’與使用比熱大的液體冷媒冷卻 114754.doc 1323330 熱源之冷卻系統或藉由冷媒的態相變化而冷卻熱源之冷卻 系統相比，可減低熱源表面溫度分佈產生不均的比例。此 外，使用氣體作為冷料，可能會產生因氣體與其他物質 相反應所造成的缺點。但是，根據上述構成，因氣趙冷媒 循環於封閉回路内，故可能不會產生前述之缺點。 再者，冷卻系、統進—步包含其他緩衝槽，用以暫時於麼In the past, heat pumps were used. A heat pump is a system that performs cooling or heating. The heat of vaporization is used in the heat pump. Vaporization heat refers to the heat absorbed by the refrigerant from the surroundings when the refrigerant changes from liquid to gas. In addition, condensing heat is also used in the heat pump. Condensation heat refers to the release of refrigerant to the surrounding heat when the refrigerant changes from gas to liquid. Further, in the heat pump, a compressor, a heat exchanger, or the like is used to use the above-described vaporization heat and condensation heat. More specifically, the aforementioned heat pump is used for an internal combustion engine or a refrigerator or the like. In these cases, a cooling system consisting of a closed circuit is usually included. In the cooling system, a liquid refrigerant such as a fluorine a gas gas is vaporized by adiabatic expansion. By this, it produces an endothermic effect. Further, the compressor shrinks the vaporized refrigerant I in an adiabatic state. Thereby, the vaporized refrigerant is condensed to recover the liquid refrigerant. Repeat this heat exchange cycle. According to the heat exchange cycle as described above, large heat exchange can be performed efficiently. On the other hand, the surface area of large-scale industrial waste furnaces, tanks and smoke solids is very high: the cooling of the large-scale factory of the surface of the surface, the heat of vaporization using the refrigerant, and the flow of the surface of the furnace In the case of the refrigerant piping provided by the snake line, the position near the eight inlets of the refrigerant piping inlet is cooled by vaporization, but the refrigerant is vaporized near the outlet of the refrigerant outlet of the refrigerant. Θ L 1 cools the liquid into the heat of 仃α. Therefore, large factories, etc. 114754.doc 1323330 use a heat exchange cycle as described above with a change in the phase of the liquid and the gas, and the surface temperature distribution is extremely different. Therefore, a refrigerant for cooling a heat pump of a specific large-scale plant equipment uses a gas such as argon which is smaller than heat or nitrogen or an inert gas. [Patent Document 1] JP-A-2003-329355 (Patent Document 2) [Problems to be Solved by the Invention] • Conventional heat of vaporization using a gas as described above as a refrigerant And the condensing heat heat pump has the following problems. First, consider the case of using a gas as a cooling heat source in a closed circuit of a heat pump. At this time, the heat of vaporization and the heat of condensation are used. When cooling, the gas changes from the inlet to the outlet of the cooling pipe to be: liquid. At this time, the heat absorbing ability of the refrigerant varies greatly depending on the position of the cooling pipe. Therefore, the temperature distribution in the cooling pipe causes a large unevenness. Therefore, it is impossible to uniformly cool the heat source. Qin Qiji, consider the following situation: the gas does not circulate in the closed loop, but after flowing in the open loop, II & sequentially discharges the heat source. In general, gas is extremely cold compared to liquids such as water. Therefore, in the above-described case, a large amount of gas must be discharged due to the form of the open circuit. = This gas is consumed in a very large amount. The knot*, the heat chest continued: In addition, the gas ship can be reused for other purposes, but because the use of the "X" system is large, the cost is economically poor. Next, consider the use of normal cooling water as a refrigerant to cool the heat source. At this time, due to the large specific heat of water, the surface temperature distribution of the large heat source: 114754.doc is very scattered. Therefore, the use of water as a cooling system for such a refrigerant is not suitable for a cooling system as a uniform cooling heat source. Further, in the case where the heat source is disposed in the vacuum gas atmosphere and the substance which is liable to react with water exists in the surrounding gas environment, when the water leaks from the cooling pipe, water generated by pressurizing the vacuum chamber to above atmospheric pressure may occur. The steam explosion and the leaked water react with the surrounding gas environment to cause damage to the peripheral portion of the cooling system. In addition, as with the mold warmer, it is considered to use pressurized water to control the temperature. At this time, it is impossible to cool the heat source at a temperature of 160 ° C or higher. Further, as described above, there may be a steam explosion and damage to the peripheral portion of the cooling system. The present invention has been made in view of the above problems, and an object thereof is to provide a cooling system capable of uniformly cooling a large heat source, a method of operating the same, and a plasma processing system using the same. SUMMARY OF THE INVENTION The cooling system of the present invention includes a compressor that compresses a gas refrigerant other than air to a degree that does not liquefy, and a heat source that passes through a gas refrigerant that is sent from a compressor. The gas refrigerant is cooled. Further, the system includes a heat exchanger that releases heat from the heat source that has absorbed heat from the heat source to the outside, and a buffer tank that temporarily stores the gas refrigerant in the heat exchanger that releases heat to the outside; The piping is configured to sequentially close a closed circuit connecting the compressor, the heat source, the heat exchanger and the buffer tank, and circulate the gas refrigerant. According to the above configuration, since a heat source having a smaller specific heat is used to cool the heat source, when the heat source having a large surface is cooled, the cooling system is cooled by using a liquid refrigerant having a larger specific heat to cool the cooling system of the heat source or the phase of the refrigerant. Compared with the cooling system, the uneven distribution of the temperature distribution of the heat source surface can be reduced. In addition, the use of gas as a cold material may cause disadvantages caused by the reaction of gases with other substances. However, according to the above configuration, since the gas refrigerant is circulated in the closed circuit, the above disadvantages may not occur. In addition, the cooling system, the integration step - contains other buffer slots, for temporary use?
縮機與熱源之間儲存氣體冷媒’可使供應至熱源之氣體流 量穩定。 此外右則述緩衝槽的容量為在氣體冷媒一次循環於封 閉回路所需時間内屋縮機所喷出氣體冷媒量以上，可減低 壓縮機所喷出氣體冷媒耗盡的可能性。 再者’冷卻系統最好進-步包含：補充用配管，其係連 接緩衝槽’用以從外部補充氣體冷媒；及排出用配管，其 係連接緩衝槽，用以將氣體冷媒排出至外部。The storage of the gas refrigerant between the compressor and the heat source stabilizes the flow of gas supplied to the heat source. Further, the capacity of the buffer tank on the right side is equal to or higher than the amount of gas refrigerant ejected from the aerator at the time when the gas refrigerant circulates in the closed circuit once, which reduces the possibility of exhausting the refrigerant gas discharged from the compressor. Further, the cooling system preferably includes a replenishing pipe which is connected to the buffer tank to replenish the gas refrigerant from the outside, and a discharge pipe which is connected to the buffer tank for discharging the gas refrigerant to the outside.
的氣體冷媒量過少時，經由補 冷媒補充至緩衝槽；緩衝槽内 排出用配管’可從緩衝槽將氣 根據上述構成，緩衝槽内 充用配管，可從外部將氣體 的氣體冷媒量過多時，經由 體冷媒排出至外部。 此外’壓縮機具有以下能力：嘴出數量比將熱源冷卻至 目標溫度所需氣體冷媒循環量大的氣體冷媒，故不會產生 供應至熱源之氣體冷媒不足的事態。 =氣體冷媒最好包含氮、；、二氧化碳或非活性氣 :二專氣體冷媒因與其他物質相反應的可能性低，故氣 媒漏$至封閉回路的外部時，㈣冷媒對·環境造 114754.doc 成不良影響的可能性低。 外配官在熱源係作為冷卻管使用，若冷卻管的表面 積為每1 m3熱源20 cm2以上且75〇 cm2以下，可進行充分的 熱交換。 再者若熱父換器之氣體冷媒的壓力損失為封閉回路全 體之氣體冷媒壓力損失的1/1(mir ’熱交換器無法阻礙熱 源冷卻所需的氣體冷媒流動。 此外’本發明之冷卻系統，除封閉回路外，進一步包含 冷媒供應路徑，其起動壓縮機後，在氣體冷媒一次循環於 封閉回路内之間將壓縮機所噴出的氣體冷媒量供應至壓縮 機’使壓縮機起動後運轉穩定。 再者，本發明之冷卻系統，進一步包含：排氣閥，其在 緩衝槽内的氣體冷媒壓力為壓縮機吸入壓力的大致上限值 壓力情形下，自動排出緩衝槽内的氣體冷媒；及吸氣閥， 其在緩衝槽内的氣體冷媒壓力為壓縮機吸入壓力的大致下 限值壓力情形下，自動將氣體冷媒吸氣至緩衝槽内。根據 其，可自動確保緩衝槽的安全性及壓縮機的適當運轉狀 態。 本發明之電漿處理系統，係包含以下構件：壓縮機，其 將空氣以外的氣體冷媒壓縮為不會液化程度而送出；及電 漿處理裝置，其係使用電漿處理用氣體而在進行特定處理 時產生熱之裝置，從壓縮機送出之氣體冷媒通過時，由氣 體冷媒冷卻之。此外，該系統係包含以下構件：熱交換 器，其使從電漿處理裝置吸收熱後之前述氣體冷媒將熱釋 I14754.doc 放至外部；及緩衝槽’其暫時儲存熱交換器中將熱釋放至 外部後的前述氣體冷媒。再者，該系统係包含配管，其構 成依序將壓縮機、熱源、熱交換器及緩衝槽連結之封閉回 路’並在該封閉回路中循環氣體冷媒…氣體冷媒係包 3不與電漿處理用氣體相反應之一種或二種以上氣體。 本發明之冷卻系統之運轉方法係前述冷卻系統之運轉方 法，其包含以下步驟：起動壓縮機時，只以緩衝槽内的氣 體冷媒壓力降低之程度’將氣體冷媒吸引至緩衝槽内之步 及封閉回路中，經過一次循環氣體冷媒所需時間以上 的時間後’將緩衝槽内的氣體冷媒壓力維持在不損傷壓縮 機程度之值之步驟。根據其’由於*會發生氣體冷媒無法 供應至壓縮機之狀態，故可防止壓縮機受損。 [發明之效果] 根據本發明，由於使用比熱小的氣體作為冷媒，故孰源 的溫度表面難以產生差異。此外，因氣體冷媒循環於封閉 回路内，可抑制繼續成本的增加，，因可任意選擇氣 體種類，故依據熱源㈣的氣體環境，使用危險性低的氣 體’可安全地將熱源冷卻。x，因本發明之冷卻系統並非 使用氣體與液體之態相變化者，故可比較簡單地調整冷卻 能力。 、局面及優點，從有 明之以下詳細說明， 闕 即 本發明之上述及其他目的、特徵 與添附圖面相關連而可理解之本發 可明白。 【實施方式】 I14754.doc • 10· 1323330 • 參照圖面，說明本發明實施形態之冷卻系統。 實施形態之冷卻系統係用於必須邊均勾维持表面溫度分 佈邊冷卻之熱源，例如，用於大型加熱器之冷卻。此外， 實施形態中’冷卻之熱源係設置於易與氧相反應之氣體環 境中。因此’該冷卻系統的冷媒，考慮氮或氮等。但是， 冷媒係依據熱源周圍的氣體環境而適當選擇，氣體方面， 並非揭限於前述的冷媒。再者，本實施形態之冷卻系統中 • 戶斤使用的各機器係一例，用於本發明之冷卻系統的各機器 並不侷限於以下說明者。 使用圖1，說明實施形態之冷卻系統1〇〇的全體構成。 如圖1所示，本實施形態之冷卻系統1〇〇係包含壓縮機 1 ’其吸入緩衝槽4内所儲存的冷媒，並將該冷媒壓縮而送 出。壓縮機1所送出的冷媒，考慮價格及熱傳導率，可使 用氮。氮通過熱源2時，從熱源2奪取熱，並將熱源2冷 卻。從熱源2奪取熱之氮到達熱交換器熱交換器3中， • E將熱釋放至外部。藉此，氮的溫度降低。之後，氮到達 緩衝槽4，暫時將之儲存。 此外，本實施形態中，壓縮機丨、熱源2、熱交換器3及 緩衝槽4係依序以流動氮之配管5而連接，以構成氮不接觸 外面空氣而循環之封閉回路。另外。循環在封閉回路内之 冷媒係空氣以外的氣體，在封閉回路循環時，不用液化， 只要從熱源吸收熱，並將該熱釋放至外部之氣體，任何氣 體均可》 根據如前述之本實施形態之冷卻系統，由於使用比熱小 114754.docWhen the amount of the gas refrigerant is too small, it is replenished to the buffer tank via the replenishing refrigerant, and the piping for discharging in the buffer tank can be configured from the buffer tank according to the above configuration, and the buffer tank is filled with the piping, and when the amount of the gas refrigerant of the gas is excessive from the outside, It is discharged to the outside via the body refrigerant. Further, the compressor has the ability to discharge a gas refrigerant having a larger amount of gas refrigerant than that required to cool the heat source to the target temperature, so that there is no shortage of gas refrigerant supplied to the heat source. = gas refrigerant preferably contains nitrogen, carbon dioxide or non-reactive gas: the secondary gas refrigerant is less likely to react with other substances, so the gas medium leaks to the outside of the closed circuit, (4) refrigerant to the environment 114754 .doc has a low probability of adverse effects. The external supplier is used as a cooling pipe in the heat source system. If the surface area of the cooling pipe is 20 cm2 or more and 75 〇 cm2 or less per 1 m3 of heat source, sufficient heat exchange can be performed. Furthermore, if the pressure loss of the gas refrigerant of the hot parent converter is 1/1 of the gas refrigerant pressure loss of the entire closed circuit (mir 'heat exchanger cannot prevent the flow of the gas refrigerant required for the heat source to cool. Further, the cooling system of the present invention In addition to the closed circuit, the refrigerant supply path is further included, and after the compressor is started, the gas refrigerant discharged from the compressor is supplied to the compressor between the gas refrigerant circulating in the closed circuit at one time to make the compressor stable after starting the compressor. Furthermore, the cooling system of the present invention further includes: an exhaust valve that automatically discharges the gas refrigerant in the buffer tank when the gas refrigerant pressure in the buffer tank is a substantially upper limit pressure of the compressor suction pressure; The intake valve automatically inhales the gas refrigerant into the buffer tank when the gas refrigerant pressure in the buffer tank is a substantially lower limit pressure of the suction pressure of the compressor, thereby automatically ensuring the safety of the buffer tank and The proper operating state of the compressor. The plasma processing system of the present invention comprises the following components: a compressor, which is other than air. The body refrigerant is compressed so as not to be liquefied; and the plasma processing apparatus is a device that generates heat when a specific treatment is performed using a gas for plasma treatment, and is cooled by a gas refrigerant when a gas refrigerant sent from the compressor passes. In addition, the system includes the following components: a heat exchanger that causes the aforementioned gas refrigerant to absorb heat from the plasma processing device to discharge the pyrolysis I14754.doc to the outside; and a buffer tank that temporarily stores the heat exchanger The gas refrigerant is released from the outside to the outside. Further, the system includes a pipe, which constitutes a closed circuit in which a compressor, a heat source, a heat exchanger, and a buffer tank are sequentially connected, and a gas refrigerant is circulated in the closed circuit. The gas refrigerant package 3 does not react with the gas for plasma treatment. The operation method of the cooling system of the present invention is the operation method of the cooling system described above, and includes the following steps: when the compressor is started, only To reduce the pressure of the gas refrigerant in the buffer tank, the process of drawing the gas refrigerant into the buffer tank and the closed loop, after one cycle After the time required for the gas refrigerant, the pressure of the gas refrigerant in the buffer tank is maintained at a value that does not damage the compressor. According to the fact that the gas refrigerant cannot be supplied to the compressor due to *, it can be prevented. [Effect of the Invention] According to the present invention, since a gas having a smaller specific heat is used as the refrigerant, it is difficult to cause a difference in the temperature surface of the helium source. Further, since the gas refrigerant is circulated in the closed circuit, the increase in the continuing cost can be suppressed. Because the gas type can be arbitrarily selected, the heat source can be safely cooled by using a low-risk gas according to the gas environment of the heat source (4). x, since the cooling system of the present invention does not use a gas-liquid phase change, It is to be understood that the above-described and other objects and features of the present invention will be apparent from the following description. [Embodiment] I14754.doc • 10· 1323330 • A cooling system according to an embodiment of the present invention will be described with reference to the drawings. The cooling system of the embodiment is used for a heat source that must be cooled while maintaining the surface temperature distribution, for example, for cooling of a large heater. Further, in the embodiment, the heat source for cooling is provided in a gas atmosphere which is easily reacted with oxygen. Therefore, the refrigerant of the cooling system is considered to be nitrogen or nitrogen. However, the refrigerant is appropriately selected depending on the gas atmosphere around the heat source, and the gas is not limited to the aforementioned refrigerant. Further, in the cooling system of the present embodiment, each of the machines used in the charging system is an example, and each device used in the cooling system of the present invention is not limited to the following description. The overall configuration of the cooling system 1A of the embodiment will be described with reference to Fig. 1 . As shown in Fig. 1, the cooling system 1 of the present embodiment includes a refrigerant stored in a suction buffer tank 4 of a compressor 1', and the refrigerant is compressed and sent. The refrigerant sent from the compressor 1 can be nitrogen in consideration of price and thermal conductivity. When nitrogen passes through the heat source 2, heat is taken from the heat source 2, and the heat source 2 is cooled. The hot nitrogen is taken from the heat source 2 and reaches the heat exchanger heat exchanger 3, and • E releases the heat to the outside. Thereby, the temperature of nitrogen is lowered. Thereafter, the nitrogen reaches the buffer tank 4 and is temporarily stored. Further, in the present embodiment, the compressor crucible, the heat source 2, the heat exchanger 3, and the buffer tank 4 are sequentially connected by a flowing nitrogen pipe 5 to constitute a closed circuit in which nitrogen does not contact the outside air and circulates. Also. The gas other than the refrigerant-based air circulating in the closed circuit does not need to be liquefied when circulating in the closed circuit, and it is possible to absorb heat from the heat source and release the heat to the outside gas, and any gas can be according to the present embodiment as described above. Cooling system, due to the use of specific heat 114754.doc
MO 的氮將表面積大的熱源2冷卻，與使用比熱大的液體之情 況或以冷媒的態相變化將熱源冷卻之情況相比，可減低熱 源2表面溫度分佈產生不均之比率。再者，在與氮相反應 之氣體環境中使用氮時，可能會產生因氮與其他物質相反 應而發生問題之缺點，但本實施形態中，因氮在封閉回路 内循環，故不會產生前述的缺點。 例如，壓縮機1中’如圖2所示，藉由曲柄等，將以馬達 (未圖示）等轉動之轉動體的轉動傳達至活塞lae藉此， 在π缸le内，來回運動活塞lae此外，如圖箭頭所 不，流動於配管5之氮係從吸入口 if吸入汽缸“内。在汽 缸le内，以活塞ia壓縮氮。其結果，利用壓力增加之氮將 板片彈簧閥Id開放。藉此，如圖2中箭頭所示，從喷出口 lg將汽紅le内的氮喷出至配管5。壓縮機1所噴出之氮係氣 體。換言之，壓縮機1係將氮氣壓縮至未液化程度而喷 出。 再者，壓縮機1具有以下能力：喷出數量比將熱源2冷卻 至目標溫度所需氣體循環量大的氣體。因此’不會產生供 應至熱源2之氮不足的情況。 此外，本實施形態之冷卻系統，除封閉回路，另外包含 其他氮供應路徑，其係於起動壓縮機1後，在氮一次循環 於封閉回路内之間將壓縮機i所喷出的氮量供應至壓縮機 1。具體而言，如圖1所示，其他氮供應路徑係連接有緩衝 槽4之氮補充用配管8a。因此，壓縮機！起動後，打開氮補 充控制閥80a，將氮從氮槽2〇〇供應至緩衝槽4内，並依序 114754.doc 12 1323330 將氮送入壓縮機〗。因此， 另外’圖1所示封閉回路内 時間係6秒。 本實施形態中’必須從作為熱源2之大型加熱器均勾除 去約5〇⑸1“2/11的熱量。因此，大型加熱器與作為冷媒 之氮的溫度差（At)為i5〇°c瞎，以范丨、，，3/ . 野必須以/min速度將氮時 常循環於封閉回路内。因此，屋縮機!係選擇可以“-ηThe nitrogen of MO cools the heat source 2 having a large surface area, and the ratio of unevenness in the surface temperature distribution of the heat source 2 can be reduced as compared with the case where the heat source is used in a state where the heat is large or the state of the refrigerant is changed. Further, when nitrogen is used in a gas atmosphere which reacts with a nitrogen phase, there is a possibility that a problem occurs due to the reaction of nitrogen with another substance. However, in the present embodiment, since nitrogen circulates in the closed circuit, it does not occur. The aforementioned shortcomings. For example, in the compressor 1, as shown in FIG. 2, the rotation of the rotating body that is rotated by a motor (not shown) or the like is transmitted to the piston lae by a crank or the like, thereby moving the piston lae back and forth in the π cylinder. Further, as shown by the arrows, the nitrogen flowing through the pipe 5 is sucked into the cylinder "from the suction port if. In the cylinder le, the nitrogen is compressed by the piston ia. As a result, the plate spring valve Id is opened by the nitrogen having a pressure increase. Thereby, as shown by the arrow in Fig. 2, the nitrogen in the steam red le is discharged from the discharge port lg to the pipe 5. The nitrogen gas discharged from the compressor 1. In other words, the compressor 1 compresses the nitrogen gas to the unheated gas. Further, the compressor 1 has the ability to discharge a gas having a larger amount of gas circulation than that required to cool the heat source 2 to the target temperature. Therefore, 'there is no shortage of nitrogen supplied to the heat source 2 Further, in the cooling system of the present embodiment, in addition to the closed circuit, another nitrogen supply path is included, which is the amount of nitrogen that is ejected from the compressor i after the nitrogen is once circulated in the closed circuit after the compressor 1 is started. Supply to compressor 1. Specifically As shown in Fig. 1, the other nitrogen supply path is connected to the nitrogen replenishing pipe 8a of the buffer tank 4. Therefore, after the compressor! is started, the nitrogen replenishing control valve 80a is opened to supply nitrogen from the nitrogen tank 2 to the buffer. In the tank 4, the nitrogen is sent to the compressor in the order of 114754.doc 12 1323330. Therefore, the time in the closed loop shown in Fig. 1 is 6 seconds. In the present embodiment, it is necessary to use a large heater as the heat source 2. Both hooks remove about 5 〇 (5) 1 "2/11 of heat. Therefore, the temperature difference (At) between the large heater and the nitrogen as the refrigerant is i5 〇 ° c 瞎, and the nitrogen must be circulated in the closed loop at a rate of /min. Therefore, the house shrinking machine! The choice can be "-η
以上的喷出量循環氮者q旦是，壓縮機i的喷出量必須考 慮配管5全體的壓力損失而決定1此，壓縮⑴的氮喷出 量最好至少為氮必要循環量的12倍以上，其值以^倍以 上為佳。根據其，考慮因配管5的曲部及設於配管5之閥等 所引起的壓力損失量，可確保充分氮的循環流量。The discharge amount of the above-mentioned discharge amount is determined by the fact that the discharge amount of the compressor i must be determined in consideration of the pressure loss of the entire piping 5, and the nitrogen discharge amount of the compression (1) is preferably at least 12 times the necessary circulation amount of nitrogen. Above, the value is preferably ^ times or more. According to this, it is considered that the amount of pressure loss caused by the curved portion of the pipe 5 and the valve provided in the pipe 5 can ensure a sufficient circulation flow rate of nitrogen.
使壓縮機1起動後的運轉穩定。 ，以1 m3/min逮度一次循環氮之 另外。如目3所示’為緩和依據有負荷變動之壓縮機㈣ 稼動率的變動，也可設置其他緩衝槽6 ’其在壓縮機丨與熱 源2之間暫時儲存氣體且耐得住高壓。根據其，使供應至 熱源2之氣體流量穩定。但是，緩衝槽6係依必要而設置 者，在本發明非必要構成。 此外，如圖4所示，熱源2，因其表面積大，故以蛇行方 式設置用以循環氮之配管5。將氮從壓縮機！經由入口 2&而 送入熱源2内蛇行的配管5。此外，通過熱源2内之氮，經 由出口 2b，送出至配管5。根據本實施形態之冷卻系統 1〇〇，由於使用比熱小的氮作為冷媒，故熱源2的入口 2&附 近的氮之熱交換能力與熱源2的出口 2b附近的氮之熱交換 能力幾乎沒有差距。因此，熱源2的表面溫度分佈不會產 114754.doc -13- ^23330 生不均。 再者’如圖5所示，在熱交換器3，以蛇行方式設置配管 5。通過熱源2之氮經由入口 3a而送入在熱交換器3内蛇行 的配s 5 ’流動於蛇行的配管5内之間，將熱釋放至外部。 熱交換器3内’氮之熱係傳達至從入口配管朝出口配管 几流動的冷卻水。此外’流動於熱交換器3内之氮係經由 出口 3b而排出至配管5。 再者如圖1所示，冷卻水係儲存於冷卻水槽3〇〇，利用 冷部水泵310而循環於冷卻水槽3〇〇與熱交換器3之間。因 此，通過熱交換器3之氮會降低溫度，再度通過熱源2時， 形成可從熱源2奪取熱程度的溫度。另外，冷卻水泵31〇的 控制係由控制裝置30進行。此外，冷卻水槽3〇〇中，係設 置冷卻扇’在空氣與冷卻水之間進行熱交換。 再者’熱交換器3之氮壓力損失係封閉回路全體之氮壓 力損失的1/10以下。因此，熱交換器3不會阻礙熱源2冷卻 所需氣的流動。 此外’作為熱源2内的冷卻管之配管5的表面積係每1 m3 熱源20 cm2以上且750 cm2以下。因此，熱源2係具有充分 的熱交換能力。 一般而言，熱交換器3必須進行配管5的氮散熱量除外之 量的熱交換。但是，本實施形態中，無視配管5的散熱量 時’熱交換器3必須可進行約50 kcal/cm2/h以上的熱交換。 此外，由於多量的氮氣必須流動於熱交換器3内的配管5， 故必須減少配管5的壓力損失。再者，必序順暢進行熱交 114754.doc :::此’配管5最好由熱傳導率大的銅或鋁等材料構 藉此’可縮小熱交換器3的尺寸。 处：者’如圖6所示’配管5亦連接缓衝槽4,以熱交換器3 :熱交換之氮經由入口 4a而導入緩衝槽4,並儲存於緩 ▲二4内。之後，藉由壓縮機丨的活塞u的來回運動，於每 人π kle内的空間形成負壓，將氮從緩衝槽4吸入壓縮機 1。又’緩衝槽4内的氮係經由出口4b而送出至配管5。 —此外，前述緩衝槽4的容量係氮在封閉回路一次循環所 而時間内壓縮機1所喷出之氮量以上。更具體而言，緩衝 槽4的容量係i〇〇L以上。再者，因該緩衝槽4的容量對封閉 回路的穩定性造成很大影響，故其安全率最好报高。具體 而言，緩衝槽4的安全率最好係2以上。另外，安全率為2 係指相對於必要容量100L，確保2〇〇L容量之意義。根據前 述構成’壓縮機1噴出之氮不會在緩衝槽4内消失。因此， 即使氮未供應至壓縮機1，也不會發生持續驅動壓縮機1之 狀態°因此，減少可能損傷壓縮機1。 再者’如圖6所示，緩衝槽4係連接用以從外部補充氮之 氮補充用配管8a及用以將氣體排出外部之氮排出用配管 8b。此外’如圖i所示，氮補充用配管仏及氮排出用配管 8b係連接氮槽2〇〇。在氮補充用配管8a係設置氮補充用泵 21〇。在氮排出用配管8b係設置氮排出用泵220 » 再者’在氮補充用配管8a及氮排出用配管8b係分別設置 氮補充控制閥80a及氮排出控制閥80b。氮補充控制閥80a 及氮排出控制閥80b、氮補充用泵210及氮排出用泵220係 114754.doc 15 1323330 分別由控制裝置30所控制。控制裝置3〇接收可將設於緩衝 槽4内之壓力感測器20的檢測值特定之信號，並依據該信 號，控制氮補充控制閥80a及氮排出控制閥8〇1)、氮補充用 泵210及氮排出用泵220。另外，控制裝置3〇亦進行壓縮機 1的控制。 本實施形態之冷卻系統運轉時’控制裝置3〇在起動壓縮 機1後’為只以因壓縮機1的起動造成緩衝槽4内的氣體壓 力降低程度而將氮供應至緩衝槽4内，打開氮補充控制閥 80a，且驅動氮補充用泵210»此外，控制裝置3〇在封閉回 路經過一次循環氮所需時間以上的時間後，控制氮補充控 制閥80a及氮排出控制閥80b的開關’及氮補充用泵21〇及 氮排出用泵220的驅動狀態’以將緩衝槽4内氣體壓力設定 在不損傷壓縮機1的程度之值，例如，正壓〇 · 5氣壓以下。 換言之，緩衝槽4内的氮量過少時，控制裝置3 〇會打開 氮補充控制閥80a，且驅動氮補充用泵21〇，再經由氮補充 用配管8a，將氮從氮槽200補充至緩衝槽4。此外，緩衝槽 4内的氮量過多時’控制裝置3〇會打開氮排出控制閥8〇b， 且驅動氮排出用泵220 ’再經由氮排出用配管8b，將氮從 緩衝槽4排出至氮槽200。因此，由於不會發生氮無法供應 至壓縮機1的之狀態，故可防止壓縮機1受損。 此外，控制裝置30藉由接收來自壓力感測器20的信號， 檢出緩衝槽4内的氮壓力為壓縮機1的吸入壓力的大致上限 值麼力情形下’關閉氮補充控制閥80a且打開氮排出控制 閥80b ’並驅動氮排出用泵22〇 ’可自動排出缓衝槽*内的 Π 4754.doc •16·The operation after starting the compressor 1 is stabilized. At a rate of 1 m3/min, one cycle of nitrogen is added. As shown in Fig. 3, in order to alleviate the change in the rate of the compressor according to the load fluctuation, the other buffer tank 6' may be provided to temporarily store the gas between the compressor 丨 and the heat source 2 and to withstand the high pressure. According to this, the flow rate of the gas supplied to the heat source 2 is stabilized. However, the buffer tank 6 is provided as necessary, and is not necessarily required in the present invention. Further, as shown in Fig. 4, since the heat source 2 has a large surface area, the piping 5 for circulating nitrogen is provided in a meandering manner. Put nitrogen from the compressor! The piping 5 that is meandering in the heat source 2 is sent through the inlet 2& Further, the nitrogen in the heat source 2 is sent to the pipe 5 via the outlet 2b. According to the cooling system 1 of the present embodiment, since nitrogen having a smaller specific heat is used as the refrigerant, there is almost no difference in the heat exchange capacity between the heat in the vicinity of the inlet 2 & and the heat exchange capacity in the vicinity of the outlet 2b of the heat source 2 . Therefore, the surface temperature distribution of the heat source 2 does not produce 114754.doc -13-^23330 unevenness. Further, as shown in Fig. 5, the pipe 5 is provided in a meandering manner in the heat exchanger 3. The nitrogen supplied to the heat exchanger 3 through the inlet 3a through the inlet 3a flows between the meandering pipes 5, and the heat is released to the outside. In the heat exchanger 3, the heat of nitrogen is transmitted to the cooling water flowing from the inlet pipe to the outlet pipe. Further, the nitrogen flowing in the heat exchanger 3 is discharged to the pipe 5 via the outlet 3b. Further, as shown in Fig. 1, the cooling water is stored in the cooling water tank 3, and is circulated between the cooling water tank 3 and the heat exchanger 3 by the cold water pump 310. Therefore, the nitrogen passing through the heat exchanger 3 lowers the temperature, and when it passes through the heat source 2 again, a temperature at which heat can be taken from the heat source 2 is formed. Further, the control of the cooling water pump 31 is performed by the control device 30. Further, in the cooling water tank 3, a cooling fan is provided to exchange heat between the air and the cooling water. Further, the nitrogen pressure loss of the heat exchanger 3 is 1/10 or less of the nitrogen pressure loss of the entire closed circuit. Therefore, the heat exchanger 3 does not hinder the flow of the gas required for the heat source 2 to cool. Further, the surface area of the piping 5 as the cooling pipe in the heat source 2 is 20 cm 2 or more and 750 cm 2 or less per 1 m 3 of the heat source. Therefore, the heat source 2 has sufficient heat exchange capability. In general, the heat exchanger 3 must perform heat exchange in excess of the amount of nitrogen heat dissipated by the piping 5. However, in the present embodiment, the heat exchanger 3 must be capable of performing heat exchange of about 50 kcal/cm2/h or more regardless of the amount of heat radiation of the pipe 5. Further, since a large amount of nitrogen gas must flow through the piping 5 in the heat exchanger 3, it is necessary to reduce the pressure loss of the piping 5. Further, the heat transfer is performed smoothly. 114754.doc:: This pipe 5 is preferably made of a material such as copper or aluminum having a large thermal conductivity, whereby the size of the heat exchanger 3 can be reduced. The pipe is connected to the buffer tank 4, and the heat exchanger 3 is introduced into the buffer tank 4 through the inlet 4a, and is stored in the buffer 2-4. Thereafter, by the back and forth movement of the piston u of the compressor crucible, a negative pressure is formed in the space within each person π kle, and nitrogen is sucked into the compressor 1 from the buffer tank 4. Further, nitrogen in the buffer tank 4 is sent to the pipe 5 via the outlet 4b. Further, the capacity of the buffer tank 4 is greater than or equal to the amount of nitrogen ejected from the compressor 1 during the time when the closed circuit is once cycled. More specifically, the capacity of the buffer tank 4 is i 〇〇 L or more. Furthermore, since the capacity of the buffer tank 4 greatly affects the stability of the closed loop, the safety rate is preferably reported to be high. Specifically, the safety ratio of the buffer tank 4 is preferably 2 or more. In addition, the safety ratio of 2 means the meaning of 2 〇〇L capacity with respect to the required capacity of 100L. According to the above configuration, the nitrogen ejected from the compressor 1 does not disappear in the buffer tank 4. Therefore, even if nitrogen is not supplied to the compressor 1, the state in which the compressor 1 is continuously driven does not occur. Therefore, the reduction may damage the compressor 1. Further, as shown in Fig. 6, the buffer tank 4 is connected to a nitrogen replenishing pipe 8a for supplying nitrogen from the outside and a nitrogen discharging pipe 8b for discharging the gas to the outside. Further, as shown in Fig. 1, the nitrogen supply pipe and the nitrogen discharge pipe 8b are connected to the nitrogen tank. A nitrogen replenishing pump 21 is provided in the nitrogen replenishing pipe 8a. The nitrogen discharge pump 220 is provided in the nitrogen discharge pipe 8b. Further, the nitrogen supply control pipe 80a and the nitrogen discharge control valve 80b are provided in the nitrogen supply pipe 8a and the nitrogen discharge pipe 8b, respectively. The nitrogen supplemental control valve 80a, the nitrogen discharge control valve 80b, the nitrogen replenishing pump 210, and the nitrogen discharge pump 220 are 114754.doc 15 1323330, respectively, which are controlled by the control device 30. The control device 3 receives a signal that can specify the detection value of the pressure sensor 20 provided in the buffer tank 4, and controls the nitrogen supplemental control valve 80a and the nitrogen discharge control valve 8〇1) according to the signal, and nitrogen supplementation. The pump 210 and the nitrogen discharge pump 220. Further, the control device 3 is also controlled by the compressor 1. When the cooling system of the present embodiment is operated, the "control device 3 starts the compressor 1", the nitrogen is supplied to the buffer tank 4 only by the degree of gas pressure drop in the buffer tank 4 due to the start of the compressor 1, and is opened. The nitrogen supplement control valve 80a and drives the nitrogen replenishing pump 210» In addition, the control device 3 controls the switch of the nitrogen replenishing control valve 80a and the nitrogen discharge control valve 80b after the time required for the closed circuit to pass the nitrogen for one cycle. The driving state of the nitrogen replenishing pump 21 and the nitrogen discharge pump 220 is set such that the gas pressure in the buffer tank 4 is not damaged by the compressor 1, for example, a positive pressure of 5 Torr or less. In other words, when the amount of nitrogen in the buffer tank 4 is too small, the control device 3 opens the nitrogen replenishing control valve 80a, drives the nitrogen replenishing pump 21, and replenishes the nitrogen from the nitrogen tank 200 to the buffer via the nitrogen replenishing pipe 8a. Slot 4. When the amount of nitrogen in the buffer tank 4 is too large, the control device 3 turns on the nitrogen discharge control valve 8〇b, and drives the nitrogen discharge pump 220' to discharge the nitrogen from the buffer tank 4 through the nitrogen discharge pipe 8b. Nitrogen tank 200. Therefore, since the state in which nitrogen cannot be supplied to the compressor 1 does not occur, the compressor 1 can be prevented from being damaged. Further, the control device 30 detects that the nitrogen pressure in the buffer tank 4 is a substantially upper limit value of the suction pressure of the compressor 1 by receiving a signal from the pressure sensor 20, and in the case of the force, the nitrogen supplement control valve 80a is closed. Opening the nitrogen discharge control valve 80b' and driving the nitrogen discharge pump 22〇' can automatically discharge the 缓冲 in the buffer tank* 4754.doc •16·