TWI321101B - Ink-jet device and process thereof - Google Patents

Description

IX. Description of the Invention: [Technical Field] The present invention relates to an ink jet apparatus, and more particularly to an ink jet apparatus and method applied to a substrate. [Prior Art] A high-precision inkjet device drives an inkjet head or an inkjet element with an inkjet controller to generate an inkjet system to generate an inkjet behavior with respect to a first-point inkjet position, in general, The first inkjet position is to locate an inkjet position by trial and error, that is, to find the position of the inkjet signal activation. Different inkjet substrates will have different inkjet signal activation positions, so the inkjet substrate needs to be repositioned when it is replaced, which takes time and labor. 1 is a schematic view of a conventional inkjet process. After the nozzle device 31 receives the inkjet signal, the ink droplet 32 is sprayed onto the inkjet pattern 81 of the substrate 80, and the position of the inkjet is relative to one. The position of the inkjet starting point (not shown) depends on the position. Once the inkjet starting point is wrong, the position of all the ink droplets 32 is also wrong, so the inkjet starting point plays an important role in the inkjet process of the nozzle device 31, but the current inkjet starting point is determined by trial and error, different substrates It also needs to be repositioned 'very time consuming and costly. Secondly, in the inkjet process, it is necessary to control the speed of the substrate stage, determine the position of the inkjet starting point, and the inkjet frequency. As shown in Fig. 2, the inkjet control flow of the general inkjet device is as follows: 92 step 91, setting the substrate stage speed and setting the ink ejection starting point. Step 1 ejects ink onto the ink jet pattern of the substrate, and ejects ink to the set ink ejection region in accordance with the set ink ejection frequency. In step 93, it is determined that the first ink ejection position is correct. 'The first ink ejection position affects whether the inkjet can be correctly ejected on the inkjet image (3) 1101. If it is an error, it will affect all subsequent ejection methods to find its inkjet. The starting point 1 is the mouth ink starting fine now with a trial error 9 92. In step 94, when the ink ejection start point = then the step is re-executed. From the above, it is known that the development of new nozzle ink devices and new inkjet processes is an important issue. In addition, in order to solve the above problems, in order to solve the above problems, the object of the present invention, instead of the conventional trial and error method, uses the inkjet package %. The ink-jet line is used to activate the ink-jet line. Another object of the present invention is to provide a stage speed, a nozzle ink frequency, and a control ink-jet behavior according to the ink method in high-precision ink jet. In order to achieve the above purpose, the present invention - the main controller; - image sensing controller setting 2: inkjet device 'including between the devices for controlling the image sensing device: - f - between the image sensing system and the - nozzle to control the ink ejection behavior of the nozzle; placed in the main control and - scale receiving 嗔 ink fresh control benefit attack (four). Control frequency reception 11 to produce inkjet «'-based The platform control (four) connection, the rib bearing substrate; the motor position feedback controller includes a known position sense wire, is disposed between the main control and the position sensor to calculate the position and rotation angle of the substrate stage, and generate the position The motor drive circuit includes a plurality of motors corresponding to the position sensors, disposed between the main controller and the motor, and is configured to move the substrate stage and rotate to the correct position and angle according to the position adjustment signal. 6 The upper 21L is a position sensing device for the substrate stage of the embodiment of the present invention for detecting the position and direction of the substrate spray, and generally has four position sensing devices for respectively marking, second, gamma, z and At an angle, a plurality of motors are respectively disposed corresponding to the position sensing device to move the substrate stage to the correct position and orientation by the motor drive circuit. The inkjet method according to an embodiment of the present invention is based on an inkjet label: "providing" a substrate having an inkjet pattern and an inkjet marking, and setting an ink-like output (4) Movement rate. __ spray secrets produced - inkjet signal and spray black ^ charm scales to produce inkjet fresh. The radiance rate signal generation 2: The ink frequency is the distance between the moving speed of the substrate stage and the two inkjet markings, and if the frequency doubling drive is used, it is an integral multiple of the ratio. - Extension of the Invention - The inkjet markings in the examples may represent the position and orientation, and generally the ferrule I array pattern is used as an inkjet marking. The ink-jet pattern is an ink-jet region, and if it is applied to a thin film, it is a pattern of a thin film transistor; if it is a color filter substrate, it is a pattern of a halogen array. The trial and error method t (10) uses the kind of inkjet marking to start the ink behavior, avoiding the need to constantly correct and reset the steps, and the complicated steps of the 3D error method for the whole inkjet method. . [Embodiment] The ink technology requires an ink jet apparatus and ink jet. The following is a description of the present invention by way of an embodiment and a drawing in which a spray pattern and an ink jet method are carried out by using a start-up ink jet label. Controlling the entire blackout:: Inventing an inkjet device according to an embodiment, the main controller 100 and the master image sensing controller 200 are disposed on the image sensing device, and the image sensing device 210 is controlled. , image, used to capture the image of the inkjet pattern on the substrate. Next, the ink jet controller 300 is disposed between the nozzle 310 and the main controller 100 for controlling the nozzle 310 to perform the ink ejection behavior. The inkjet frequency controller 400 is disposed between the frequency receiver 410 and the main controller 100 to control the frequency receiver 410. The frequency receiver 410 detects the ink jet mark on a substrate to detect the correct position of the ink jet start, and calculates the ink jet frequency and generates an ink jet frequency signal. In one embodiment, frequency receiver 410 is a sensing device, such as a contact sensing device or a non-contact sensing device. A touch sensing device, such as a probe sensing device, is in direct contact with the substrate to sense the ink jet marking. A non-contact sensing device, such as an optical sensing device or a magnetic sensing device, that is in direct contact with the substrate to sense the ink jet marking with optical sensing or magnetic field. Furthermore, referring to FIG. 3, the motor position return controller 500 includes a plurality of position sensors disposed between the main controller 1 and the position sensor for calculating the displacement of the substrate stage 7 and The correction amount of the rotation angle is generated, and the movement and rotation signals of the substrate stage 700 are generated. In the figure, the X, Y, and Z position sensors 510, 520, and 530 and the rotational position sensor 540 respectively sense the X, Y, and the substrate. Z and the angle of rotation, and calculate the correction amount and generate the position adjustment signal. Next, the motor drive circuit 600 includes a plurality of motors corresponding to the position sensors, and is disposed between the main controller 100 and the motor for controlling the motor, and the substrate drive table 700 is driven to move to the correct position by the motor, as shown in the figure. The X, Υ, and Ζ motors 610, 620, and 630 and the rotary motor 640 drive the substrate stage 7 to move the substrate to the correct position in accordance with the position correction amount. The substrate stage 700 is used to carry a substrate, wherein the substrate comprises an inkjet pattern and an inkjet marking. Referring to FIG. 4, a structure of a substrate 800 according to an embodiment of the present invention will be described. The substrate 800 includes an inkjet pattern 812 and an inkjet marking 811. The inkjet pattern 812 of this embodiment is a pixel matrix pattern. If applied to a thin film transistor array substrate, it is a pattern of a thin film transistor array on a thin film transistor array substrate; 1321101, if applied to a color filter substrate, It is the pattern of the pixel array. The inkjet marking 81 of the embodiment is disposed beside the inkjet pattern 812, indicating the inkjet starting position, because the relative position of the inkjet marking 811 and the inkjet pattern 812 is fixed, and the inkjet starting position and direction are accurately indicated, so Can replace the traditional trial and error method, one inkjet is a one-pixel inkjet. Referring to Fig. 5, the structure of the substrate coffee according to another embodiment of the present invention will be described. The difference from the embodiment of Fig. 4 is that the pixels in the ink jet pattern 812 and the ink jet markings 811 do not correspond one-to-one. When inkjetting a large-sized substrate, one

The secondary ink jet can span several pixels, so the distance between the ink jet marks 811 means that the distance of one ink jet contains the length of several pixels. 〜 The following describes the fabrication of the ink-jet substrate. Please refer to Figs. 6A to 6c for explaining the manufacturing process of the nozzle ink mark (4) on the substrate of the present invention-embodiment, and the steps of the embodiment will be described below.苐6AFig.*, a film 810 is formed on the substrate 80〇, and if it is applied to the thin film transistor array (4), its gate layer should be formed, if it is corresponding to its clock layer, and in the film (10) (4) #1 color, the light substrate A photoresist layer 82 is formed on the joint. Such as

As shown in Fig. 6B, using a photomask having an ink jet pattern and a nozzle ink mark, the 800 is subjected to a process of exposing and soiling under the mask, and the photoresist layer 820 is formed into a spray of a halogen matrix. Ink pattern and inkjet Zen! Know the pattern. As shown in Fig. 0C, the substrate 800 after the shirt is subjected to the process of engraving, the inkjet pattern of the thin matrix of the thin matrix and the pattern of the inkjet label n^ are taken, and the photoresist is removed to complete the inkjet substrate. For the production, the top view is as shown in the seventh pattern as shown in Fig. 7.帛 and 5 图' and - inkjet marking Figure 7 illustrates the invention - starting point 丨 + ', f ^-r 811 -fi® - u, - the inkjet marking 811 pattern, inkjet shows no 811 The ink jet label 811 in the position of the No. Hextus S12 is a pattern comprising four rectangular arrays of four "Shaben embodiment 3", which can indicate the relative position and the 苴 array of the 9 ink jet pattern 812. The number of rectangles is not limited to ', but ^ is less than the moment in the ink mark 811. FIG. 8 is a view showing the flow of the inkjet method of the substrate. The length D, the two inkjet markings include an array of early 3.., and the substrate is placed in the inkjet device, and the steps of the method are as follows: on the substrate stage, the inkjet step 911 is described below, setting The number of ink droplets in the inkjet device is swollen 2,3.·., that is, the breath of the feed and the ratio of the mother-subject inkjet f to the relationship between M and V are as follows: the frequency of the frequency drive is selected. 'In which the moving distance of one inkjet, the moving distance of the secondary black jet is about two inkjet markings, and the soil is running away from nD, so the following Line: R = nD, where η = ι, 2, 3..., such as the flute $ Λ by the ink mark containing the length of 3 pixels n = 3 in the two sprays 'two inkjet marks only contain one pixel Length (4) (ie: = d) The ink frequency of the ink D's is set to mm to determine the frequency of the inspection. Step 912, the substrate is moved by the substrate to allow the substrate to enter the nozzle of the inkjet step 913, generating a spray The ink signal indicates that the ink signal is generated. The ink receiver frequency detecting step 914 is used to generate the ink jet frequency signal, and the ink jet frequency controller receives the ink jet signal, and the ink jet frequency is calculated according to the set value of the setting step 911. And generating an inkjet frequency signal. Step 915, starting the inkjet, the main controller starts the inkjet controller by receiving the signal of the inkjet frequency controller to drive the nozzle to perform an inkjet behavior. 1321101 Step 916, stop the inkjet, the main control The device stops the inkjet behavior according to the setting value of the setting step 911. Step 917, detecting whether the substrate carrier continues to move, and whether the main console continues to move according to whether the substrate carrier continues to move as the basis for whether the entire inkjet behavior ends. Load It continues to move, the ink jet does not represent the entire end, wait for the next signal is an ink-jet ink jet behavior, i.e., signal 913 is generated by repeating a step of inkjet ink jet behavior.

At step 918, the ink ejection is ended, and when the substrate stage stops moving, it is judged that the entire ink ejection behavior is ended. The invention can be applied to the fabrication of a thin film transistor array substrate and a color filter substrate. Especially when applied to a color filter substrate, each pixel contains three sub-crystals (ie, RGB), and generally uses a process of three masks, and By using the invention, the process of the three masks is not required, and the inkjet method is used instead, so that the fabrication of the color filter substrate is completed, and the manufacturing cost is greatly reduced.

The embodiments described above are merely illustrative of the technical spirit and the features of the present invention, and the objects of the present invention can be understood by those skilled in the art, and the scope of the present invention cannot be limited thereto. That is, the equivalent variations or modifications made by the spirit of the present invention should still be included in the scope of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the ink jet of a conventional ink jet device. Figure 2 is a flow chart showing a conventional ink jet method. Figure 3 is a schematic view of an ink jet apparatus in accordance with an embodiment of the present invention. Fig. 4 is a top plan view showing an ink jet substrate according to an embodiment of the present invention. Fig. 5 is a top plan view showing an ink jet substrate according to another embodiment of the present invention. 6th, 6th, and 6C are schematic views of the side view of the same stage. The ink-jet substrate process of the invention is not shown in FIG. 7 and is a schematic diagram of the ink-jet marking pattern of the present invention. . Figure 8 is a flow chart showing a method of no method according to the embodiment of the present invention. [Main component symbol description]

31 32 80 81

Nozzle device ink droplet substrate inkjet pattern step main controller image sensing controller image sensing device nozzle ink controller nozzle inkjet frequency controller frequency receiver motor position feedback controller χ position sensor γ position sensor ζ position Sensor Rotation Position Sensor Motor Drive Circuit X Motor Υ Motor 91, 92, 93, 94 100 200 210 300 310 400 410 510 520 530 530 540 600 610 620 12 1321101 630 Z Motor 640 Rotary Motor 700 Substrate Stage 800 Substrate 810 Film 820 photoresist layer 811 inkjet marking 812 inkjet pattern 911 '912 '913 ' 914 steps 915, 916, 917, 918

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Claims (1)

X. Patent application scope: 】 An inkjet device comprising: a main controller; an image sensing device; and an image sensing controller disposed between the main controller and the image sensing device To control the image sensing device; a nozzle; an inkjet controller ' disposed between the main controller and the nozzle for controlling the nozzle; a frequency receiver;, '-inkjet frequency controller, disposed on The main controller and the frequency receiver, the frequency receiver; a substrate carrier, connected to the main controller for carrying a substrate; a motor position feedback controller comprising a plurality of position sensors, disposed on The main controller -. Between the position sensors, 'the position of the substrate stage is used to calculate the position and the angle of rotation is adjusted; and the X main button is the 'driver' road, &amp; the plurality of motors corresponding to the position sensors , set in the 2. for i, to control the touch of the silk plate stage and the rotation of the sensing, wherein the position sensors comprise -X position detector. S sensor, a Z position sensor and - rotational position sense = item 1 said m, wherein the motor - 4: 2, a Z motor and a rotating motor. </ RTI> </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; The inkjet marker comprises a rectangular array pattern. Wherein the rectangular array pattern comprises at least one moment 1321101. 7. The ink jet apparatus of claim 4, wherein the ink jet pattern comprises a thin film transistor array pattern. The ink-jet device of claim 4, wherein the ink-jet pattern comprises a pixel array pattern of colored luminescent filaments. 9. The ink-receiving device of claim 1, wherein the frequency receiver comprises a contact-sensing device 8 10·= 4 the spray device 4 of claim 9 wherein the contact device comprises a probe Sensing device. 11. An ink jet device as claimed in claim i, wherein the frequency comprises a non-contact sensing device. 12. The inkjet implant of claim n, wherein the non-contact sensing device comprises an optical sensing device. 13. The inkjet device of the above-mentioned item n wherein the non-contact sensing device comprises a magnetic sensing device. 14. An inkjet method comprising: providing a substrate having at least one inkjet on the substrate a pattern and at least one inkjet label; setting a movement rate of the substrate stage, and placing the substrate on the wire stage; testing the inkjet markings to generate at least one inkjet signal; The signal generates at least one inkjet frequency; and the inkjet method of the substrate is driven by the nozzle according to the inkjet frequencies. The inkjet method of claim 14, wherein any of the inkjet frequencies is The ratio of the movement rate of the substrate stage to the distance between any two adjacent ink jet marks. 16. The ink jet method of claim 1, wherein any of the ink jet frequencies comprises a multiple frequency Driving, any of the inkjet frequencies is an integer multiple of the ratio of the moving speed of the substrate stage to the distance between any two inkjet markings.