1316467 九、發明說明 【發明所屬之技術領域】 本發明係有關一種印刷銲劑膏等的網版印刷裝置，特 別是有關一種即使進行微細的印刷，在版分離時，也不會 造成銲劑的形狀受損的網版印刷裝置、和使用其之印刷方 法。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a screen printing apparatus for printing a solder paste or the like, and more particularly to a shape of a solder which does not cause a shape of a solder even when fine printing is performed. Damaged screen printing apparatus, and printing method using the same.
【先前技術】 在以往的網版印刷裝置中，如日本特開平6-297680 號公報所記載’揭示有在印刷後使遮罩版分離，然後在乾 燥劑中加熱’使銲劑膏（亦有簡稱爲銲劑或電糊之情況） 乾燥的方法’又，在日本特開平5-116274號公報中，爲 了將所使用之電糊的溫度保持爲一定，及爲了將所塗敷之 電糊的溫度保持爲一定，而計測遮罩的溫度，而對於放置 在印刷裝置的反應室內，供給溫風來進行印刷的網版印刷 機。 又，在日本特開平1 0-7 1 695號公報中，揭示有印刷 銲劑膏，而以加熱光僅加熱充塡在遮罩開口部的銲劑，在 電路基板上溶融轉印銲劑膏。 然而，最近隨著搭載於印刷基板之元件的微細化，所 印刷之電糊的形狀也微細化，而從遮罩上對於基板面以特 定的圖案形狀塗敷電糊之後，使遮罩從基板面剝離之際， 電糊無法從遮罩順利除去，在遮罩側附著殘留電糊的一部 分，導致所塗敷之電糊的量不足，因此最後成爲不良品的 -5- 1316467 可能性提高。在日本特開平6-297680號公報、及日本特 開平5-116274號公報中，並未揭示該等問題或解決手段 。又，在日本特開平10-71695號公報中，係使充塡在遮 罩開口部的銲劑整體溶融而固接之後，使遮罩剝離者，因 遮罩的材質，會有溶融之銲劑會附著在遮罩側和無法傳熱 到遮罩之狀況，實際上已溶融的銲劑會與遮罩接觸，而有 無法防止遮罩的熱變形等的問題。[Prior Art] In the conventional screen printing apparatus, as disclosed in Japanese Laid-Open Patent Publication No. Hei 6-297680, it is disclosed that "the mask is separated after printing, and then heated in a desiccant" to make a solder paste (also referred to as a shorthand). In the case of a flux or an electric paste, the method of drying is further described in Japanese Laid-Open Patent Publication No. Hei 5-116274, in order to maintain the temperature of the used electric paste constant, and to maintain the temperature of the applied electric paste. The temperature of the mask is measured to be constant, and a screen printing machine that supplies warm air to perform printing in a reaction chamber placed in the printing apparatus. In Japanese Laid-Open Patent Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. However, recently, as the components mounted on the printed circuit board are miniaturized, the shape of the printed paste is also fined, and after the mask is applied to the substrate surface in a specific pattern shape, the mask is applied from the substrate. When the surface is peeled off, the electric paste cannot be smoothly removed from the mask, and a part of the residual electric paste adheres to the mask side, resulting in an insufficient amount of the applied electric paste. Therefore, the possibility of the defective product - 5-13 16467 is improved. These problems or solutions are not disclosed in Japanese Laid-Open Patent Publication No. Hei 6-297680, and Japanese Patent Application Laid-Open No. Hei No. Hei No. 5-116274. In Japanese Laid-Open Patent Publication No. Hei 10-71695, the flux which is filled in the opening of the mask is melted and fixed, and then the mask is peeled off, and the molten solder adheres due to the material of the mask. In the case of the mask side and the inability to transfer heat to the mask, the actually melted flux is in contact with the mask, and there is a problem that thermal deformation of the mask cannot be prevented.
【發明內容】 [發明之揭示] 因此，本發明之目的，係提供一種即使印刷圖案高密 度化、微細化，亦可進行高精確度之印刷的網版印刷裝置 、和其之印刷方法。 該網版印刷裝置，係具備：用以對被載置於載置台上 之基板的電極部印刷電糊，載置台上部之電極部位置具備 開口的遮罩；及將電糊擠入至開口部的刮刀，其特徵爲： 設置有在將電糊擠入至前述遮罩的開口部之後，使開口部 的電糊表面乾燥的表面乾燥手段。 【實施方式】 第1圖係掲示將本發明適用於網版印刷機的整體構造 〇 在第1圖中，於網板印刷機的本體框架1的上部，設 置有藉由一對的導引軌2加以導引’而可朝向圖上前後方 -6 - 1316467 . 向移動之刮刀頭3。刮刀頭3係藉由未圖示的伺服電動機 而旋動的滾珠螺桿4朝向圖上前後方向驅動。 於刮刀頭3係搭載有刮刀20。刮刀20係藉由載置台 升降汽缸6可朝向上下方向移動。再者，在本體框架1設 置有版框承受部7，於版框承受部7係以設置用以拉伸作 爲開口部而具有印刷圖案的網版（遮罩）8的版框9之方 式來構成。印刷載置台10係具備：具備可朝向ΧΥΘ方向 φ 移動的移動機構的ΧΥ6»載置台11、以及載置台升降機構 (無特別圖示）。於印刷載置台1 〇的上面係設置有基板 接收輸送帶12，基板接收輸送帶12接收藉由基板搬入輸 . 送帶1 3所搬送的基板1 5，並從基板接收輸送帶1 2轉送到 ' 印刷載置台1 〇上。當結束印刷載置台1 〇上之基板15的 ' 印刷時，基板接收輸送帶1 2接受印刷載置台1 0上的基板 ，並轉送到基板搬出輸送帶14，而藉由基板搬出輸送帶 14排出基板15。在全自動網版印刷機中，係具備自動進 φ 行遮罩8和基板15之對位的功能。因此，藉由可拍攝上 下兩方向的CCD攝影機16’拍攝分別設置在遮罩8和基 板1 5的對位用遮罩，而在未圖示的控制部中，對畫像結 果進行畫像處理且辨識該等的位置’僅以檢測出的位置偏 移量來驅動並修正ΧΥ0載置台。 ' 又，於刮刀頭3安裝有溫風產生器’係作爲用以使擠 入至設置於遮罩面之開口部的銲劑膏表面乾燥的乾燥手段 於第2圖係揭示該刮刀頭部的槪略構造。刮刀頭3係 1316467[Disclosure of the Invention] Accordingly, it is an object of the present invention to provide a screen printing apparatus capable of performing high-precision printing even when the printing pattern is made denser and finer, and a printing method therefor. The screen printing apparatus includes: a mask for printing an electric paste on an electrode portion of a substrate placed on the mounting table; a mask having an opening at an electrode portion at the upper portion of the mounting table; and pressing the electric paste into the opening portion The scraper is characterized in that a surface drying means for drying the surface of the electric paste of the opening after the electric paste is pushed into the opening of the mask is provided. [Embodiment] Fig. 1 is a view showing an overall configuration of the present invention applied to a screen printing machine. In Fig. 1, in the upper portion of the main body frame 1 of the screen printing machine, a pair of guide rails are provided. 2 Guided 'can be oriented toward the front and rear of the figure -6 - 1316467. Move the scraper head 3. The scraper head 3 is driven by a ball screw 4 that is rotated by a servo motor (not shown) in the front-rear direction in the drawing. A scraper blade 20 is mounted on the doctor blade head 3. The doctor blade 20 is movable in the vertical direction by the stage lifting cylinder 6. Further, the main body frame 1 is provided with a frame receiving portion 7, and the frame receiving portion 7 is provided with a frame 9 for stretching a screen (mask) 8 having a printing pattern as an opening portion. Composition. The printing stage 10 includes a »6» mounting table 11 having a moving mechanism movable in the ΧΥΘ direction φ, and a mounting table elevating mechanism (not shown). A substrate receiving conveyor belt 12 is disposed on the upper surface of the printing mounting table 1 , and the substrate receiving conveyor belt 12 receives the substrate 15 transported by the substrate loading and unloading belt 1 and is transferred from the substrate receiving conveyor belt 12 . ' Print the mounting table 1 on the 。. When the printing of the substrate 15 on the printing stage 1 is completed, the substrate receiving conveyor 12 receives the substrate on the printing stage 10, transfers it to the substrate carrying-out belt 14, and discharges it by the substrate carrying-out belt 14. Substrate 15. In the fully automatic screen printing machine, the function of automatically aligning the alignment mask 8 and the substrate 15 is provided. Therefore, the aligning masks provided on the mask 8 and the substrate 15 are imaged by the CCD camera 16' that can capture both the upper and lower directions, and the image processing is performed on the image of the image in the control unit (not shown). These positions 'only drive and correct the 载0 mounting table with the detected position shift amount. In addition, a warm air generator is attached to the doctor blade 3 as a drying means for drying the surface of the solder paste which is pushed into the opening of the mask surface, and the blade of the doctor blade is disclosed in FIG. Slightly structured. Scraper head 3 series 1316467
分別設置有因應刮刀頭3的移動方向而上下移動的刮刀 20a’ 20b。爲了使刮刀20上下移動，因此於支持板21安 裝有驅動刮刀上下移動的活塞22a，22b，於該支持板21 係設置溫風產生器24，該溫風產生器24係具備有：以刮 刀將銲劑23擠入遮罩8面的開口部之後，對於遮罩面吹 送溫風，用以使開口部之電糊表面乾燥的吹送噴嘴25。再 者，吹送噴嘴的寬度亦設爲與刮刀頭的寬度（與刮刀頭的 移動方向相對稱爲直角方向的長度）大致相同的寬度。 該溫風產生器24係以可依據使用之電糊種類而複數 段切換吹送之溫風的溫度之方式所構成，其設定溫度係可 切換控制在l〇°C至50°C的範圍。亦即，由於只要是可使銲 劑的表面乾燥的熱量即可，因此不需融溶銲劑整體，而以 該程度的加熱溫度即可。 於第3圖係揭示吹送溫風而使電糊表面乾燥之情況和 未吹送溫風時之遮罩版分離的狀態。 印刷銲劑膏的基板1 5係一般的印刷基板，如圖所示 ，在基板15於電極30和電極的周圍形成抗蝕膜31，更於 抗蝕膜31上成爲形成有絲網印刷部3 2的構造。於遮罩8 係對應設置基板1 5之電極部的位置，而設置有開口部， 利用從該開口部藉由刮刀20擠入銲劑膏23，在基板1 5的 電極部印刷銲劑膏2 3。 不吹送溫風，塗敷銲劑膏（電糊）23而使版分離時， 係如第3圖（a )所示’在遮罩8側會殘留有銲劑2 3 a，不 會對基板1 5側供給期望之量的銲劑23b，而導致印刷不良 1316467Blades 20a' to 20b that move up and down in response to the moving direction of the blade head 3 are provided, respectively. In order to move the blade 20 up and down, the support plate 21 is provided with pistons 22a and 22b for driving the blade to move up and down, and a heater generator 24 is provided on the support plate 21, and the warm air generator 24 is provided with a blade After the flux 23 is pushed into the opening of the mask 8 surface, the blowing nozzle 25 for drying the surface of the electric paste of the opening is blown to the mask surface. Further, the width of the blowing nozzle is also set to be substantially the same width as the width of the blade head (the length which is referred to as a direction perpendicular to the moving direction of the blade head). The warm air generator 24 is configured to switch the temperature of the blown warm air in a plurality of stages depending on the type of the electric paste to be used, and the set temperature can be switched between 10 ° C and 50 ° C. That is, since it is only necessary to heat the surface of the solder, it is not necessary to melt the entire flux, and the heating temperature may be such a degree. Fig. 3 shows a state in which the warm air is blown to dry the surface of the electric paste and the mask is separated when the warm air is not blown. The substrate 15 for printing a solder paste is a general printed substrate. As shown in the drawing, a resist film 31 is formed on the substrate 15 around the electrode 30 and the electrode, and a screen printing portion 3 is formed on the resist film 31. Construction. The mask 8 is provided at a position corresponding to the electrode portion of the substrate 150, and an opening is provided. The solder paste 23 is extruded from the opening by the doctor blade 20, and the solder paste 23 is printed on the electrode portion of the substrate 15. When the hot air is not blown and the solder paste (electric paste) 23 is applied to separate the plates, as shown in Fig. 3(a), the flux 2 3 a remains on the side of the mask 8 and the substrate 15 is not left. The side supplies the desired amount of flux 23b, resulting in poor printing 1316467
。該現象由於不使遮罩和基板密接，或從基板1 5面剝離 遮罩8時，因遮罩8與銲劑膏23之間隙的影響，而導致 在遮罩側一部分產生銲劑膏23剝離。因此，在本發明中 ，爲了抑制前述現象的產生，如第3圖（b )所示，於遮 罩8的開口部以刮刀20擠入銲劑膏的處理結束之後，不 使遮罩8與基板15馬上分離，而僅使刮刀20與遮罩8分 離。然後，一邊移動刮刀頭3，一邊使利用設置在刮刀頭 3的溫風產生器24所產生的溫風26，從噴嘴25吹送到遮 罩面。藉此，使擠入至開口部之銲劑23的表面乾燥，然 後，利用從基板1 5剝離遮罩8，而不會發生在遮罩側附著 銲劑而剩餘之狀況。 此外，在前述的構造中，雖然設爲將溫風產生器24 設置於刮刀頭3的構造，但亦可爲將溫風產生器24與刮 刀頭3分開設置，而可朝向刮刀頭3的移動方向移動之構 造。 又，在前述實施例中，以刮刀2 0擠入銲劑膏2 3的工 程結束，在使刮刀20從遮罩8分離的狀態下，使溫風產 生器2 4動作，但是，在刮刀2 0將銲劑膏2 3擠入遮罩開 孔的工程中，使設置於刮刀20後方的溫風產生器24動作 亦可。此時，必須將刮刀部和溫風產生器的位置以從噴嘴 噴出的溫風不會到達刮刀側的銲劑膏之方式，保有距離而 安裝於支持板2 1。 此外’在此’雖然於銲劑膏表面的乾燥使用來自溫風 產生器的溫風作爲乾燥手段，但只要是可使銲劑膏的表面 -9 - 1316467 乾燥’則設爲吹送常溫的空氣、或N2氣體來取代产風的 構造亦可。 【圖式簡單說明】 第1圖係揭示印刷裝置的整體構造之圖。 第2圖係揭示於刮刀頭部設置溫風產生器的構造之圖. In this case, when the mask is not adhered to the substrate or the mask 8 is peeled off from the surface of the substrate, the solder paste 23 is peeled off in a part of the mask side due to the influence of the gap between the mask 8 and the solder paste 23. Therefore, in the present invention, in order to suppress the occurrence of the above-described phenomenon, as shown in Fig. 3(b), after the treatment of the solder paste by the blade 20 is completed in the opening portion of the mask 8, the mask 8 and the substrate are not caused. 15 is immediately separated, and only the blade 20 is separated from the mask 8. Then, while moving the doctor blade 3, the warm air 26 generated by the warm air generator 24 provided in the blade head 3 is blown from the nozzle 25 to the mask surface. Thereby, the surface of the flux 23 extruded into the opening portion is dried, and then the mask 8 is peeled off from the substrate 15 without leaving a flux adhered to the mask side. Further, in the above-described configuration, although the configuration in which the warm air generator 24 is provided to the blade head 3 is provided, the warm air generator 24 may be provided separately from the blade head 3 so as to be movable toward the blade head 3. The structure of the direction movement. Further, in the above-described embodiment, the process of squeezing the solder paste 23 by the blade 20 is completed, and the warm air generator 24 is operated while the blade 20 is separated from the mask 8, but the blade 20 is operated. The flux paste 23 is squeezed into the opening of the mask to move the warm air generator 24 disposed behind the blade 20. At this time, the position of the blade portion and the warm air generator must be attached to the support plate 21 with a distance so that the warm air discharged from the nozzle does not reach the flux paste on the blade side. In addition, 'dry here', although the surface of the solder paste is dried using warm air from a warm air generator as a means of drying, as long as the surface of the solder paste can be dried -9 - 1316467, it is set to blow air at room temperature, or N2. Gas can also replace the structure of the wind. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view showing the overall structure of a printing apparatus. Figure 2 is a diagram showing the construction of a warm air generator on the blade head.
第3圖係揭示溫風吹抵或不吹抵遮罩開口部時之板分 離狀態的圖。 [&要元件之符號說明】 1 :本體框架 2 :導引軌 3 :刮刀頭 4 :滾珠螺桿 6 :載置台升降汽缸 7 :版框承受部 8 :遮罩 9 :版框 1 0 :印刷載置台 1 1 : XY 0載置台 基板接受輸送帶 :基板搬入輸送帶 基板搬出輸送帶 -10- 1316467 15 :基板 16 : CCD攝影機 20、20a、20b ：舌丨J 刀 21 :支持板 22a ' 22b ：活塞 23 :銲劑膏 23a :銲劑Fig. 3 is a view showing a state in which the plate is separated when the warm air is blown or not blown against the opening of the mask. [& symbol description of the component] 1 : body frame 2 : guide rail 3 : doctor blade 4 : ball screw 6 : mounting table lifting cylinder 7 : frame receiving portion 8 : mask 9 : frame 1 0 : printing Mounting table 1 1 : XY 0 mounting table substrate receiving conveyor belt: substrate loading conveyor belt substrate carrying conveyor belt -10- 1316467 15 : substrate 16 : CCD camera 20, 20a, 20b: tongue 丨 J blade 21 : support plate 22a ' 22b : Piston 23: Solder paste 23a: flux
24 :溫風產生器 25 :吹送噴嘴 2 6 :溫風 3 0 :電極 3 1 :抗鈾劑層 3 2 :絲網印刷部24: warm air generator 25: blowing nozzle 2 6 : warm wind 3 0 : electrode 3 1 : anti-uranium layer 3 2 : screen printing department
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