TWI314645B - - Google Patents

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Publication number
TWI314645B
TWI314645B TW95139934A TW95139934A TWI314645B TW I314645 B TWI314645 B TW I314645B TW 95139934 A TW95139934 A TW 95139934A TW 95139934 A TW95139934 A TW 95139934A TW I314645 B TWI314645 B TW I314645B
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TW
Taiwan
Prior art keywords
layer
manufacturing
substrate
electrode
electrode layer
Prior art date
Application number
TW95139934A
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English (en)
Chinese (zh)
Other versions
TW200819740A (en
Inventor
Yi-You Huang
Yue-Yu Li
Original Assignee
Yi-You Huang
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Filing date
Publication date
Application filed by Yi-You Huang filed Critical Yi-You Huang
Priority to TW95139934A priority Critical patent/TW200819740A/zh
Publication of TW200819740A publication Critical patent/TW200819740A/zh
Application granted granted Critical
Publication of TWI314645B publication Critical patent/TWI314645B/zh

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  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
TW95139934A 2006-10-27 2006-10-27 Fabrication method of miniatured humidity sensor with double polyimide thin films TW200819740A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95139934A TW200819740A (en) 2006-10-27 2006-10-27 Fabrication method of miniatured humidity sensor with double polyimide thin films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95139934A TW200819740A (en) 2006-10-27 2006-10-27 Fabrication method of miniatured humidity sensor with double polyimide thin films

Publications (2)

Publication Number Publication Date
TW200819740A TW200819740A (en) 2008-05-01
TWI314645B true TWI314645B (ja) 2009-09-11

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW95139934A TW200819740A (en) 2006-10-27 2006-10-27 Fabrication method of miniatured humidity sensor with double polyimide thin films

Country Status (1)

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TW (1) TW200819740A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10843919B2 (en) 2018-12-28 2020-11-24 Industrial Technology Research Institute Microelectromechanical system apparatus with heater

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MY147700A (en) * 2008-09-10 2013-01-15 Mimos Berhad Improved capacitive sensor and method for making the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10843919B2 (en) 2018-12-28 2020-11-24 Industrial Technology Research Institute Microelectromechanical system apparatus with heater

Also Published As

Publication number Publication date
TW200819740A (en) 2008-05-01

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MM4A Annulment or lapse of patent due to non-payment of fees