TWI313371B - - Google Patents
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- Publication number
- TWI313371B TWI313371B TW94136532A TW94136532A TWI313371B TW I313371 B TWI313371 B TW I313371B TW 94136532 A TW94136532 A TW 94136532A TW 94136532 A TW94136532 A TW 94136532A TW I313371 B TWI313371 B TW I313371B
- Authority
- TW
- Taiwan
- Prior art keywords
- furnace body
- panel
- gas
- furnace
- valve
- Prior art date
Links
- 239000007789 gas Substances 0.000 claims description 73
- 238000000034 method Methods 0.000 claims description 64
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 11
- 238000004891 communication Methods 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 239000003570 air Substances 0.000 claims 1
- 229910052786 argon Inorganic materials 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 238000007872 degassing Methods 0.000 description 17
- 230000007246 mechanism Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 3
- 238000010410 dusting Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000007723 transport mechanism Effects 0.000 description 2
- 239000002912 waste gas Substances 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- UNLRVSBRNJYNHN-UHFFFAOYSA-N [cyano-(3-phenoxyphenyl)methyl] 2-(4-chlorophenyl)-3-methylbutanoate;dimethoxy-(4-nitrophenoxy)-sulfanylidene-$l^{5}-phosphane Chemical compound COP(=S)(OC)OC1=CC=C([N+]([O-])=O)C=C1.C=1C=C(Cl)C=CC=1C(C(C)C)C(=O)OC(C#N)C(C=1)=CC=CC=1OC1=CC=CC=C1 UNLRVSBRNJYNHN-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000013022 venting Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Curing Cements, Concrete, And Artificial Stone (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW094136532A TW200717070A (en) | 2005-10-19 | 2005-10-19 | Autoclave furnace and applications thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW094136532A TW200717070A (en) | 2005-10-19 | 2005-10-19 | Autoclave furnace and applications thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200717070A TW200717070A (en) | 2007-05-01 |
| TWI313371B true TWI313371B (enrdf_load_stackoverflow) | 2009-08-11 |
Family
ID=45072759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW094136532A TW200717070A (en) | 2005-10-19 | 2005-10-19 | Autoclave furnace and applications thereof |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200717070A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI738490B (zh) | 2020-07-27 | 2021-09-01 | 劉劭祺 | 材料處理設備及其操作方法 |
-
2005
- 2005-10-19 TW TW094136532A patent/TW200717070A/zh unknown
Also Published As
| Publication number | Publication date |
|---|---|
| TW200717070A (en) | 2007-05-01 |
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