1312835' 九、發明說明： 【發明所屬之技術領域】 本發明係關於-種真空承载設備，尤指—種可提升基板吸附與 釋放效率之真空承載設備。 【先前技術】 在液晶顯示面板的自動化生產中，如何快速自動傳送、固定、 ♦移載基板為提升效率的-重要環結’而現行面板廠主要係使用真 空承載設備作為基板承載與固定之工具。請參考第1圖，第i圖 為習知真空承載設備之示意圖。如第丨圖所示，習知真空承載設 備10包含有-真空承載+台12，以及一傳輸管路2〇it接至真 承載平台12。真空承載平台12具有複數個通孔14，通孔Μ之— 端與傳輸管路20連通，而另一端則開孔在真空承載平台以之一 承載面心傳輸管路20具有三個端點，其中第一端21°係與通孔 ρ !4連通’而第二端22與第三端23則分別與—真空㈣與一去離 子水源26連接。 真空承載賴H)射_鱗放二_倾式。在吸附模式 下，真空承载平台12之通孔14係與真空栗24連通，此時真空果 24會開始減使傳輸管路2G形顧空狀§，肤賴較置放於 真空承載平台12之承加6縣板18以進行製程。在釋放模式 下，真空承載平台12之通孔ί4係與去離子水源％連通，此時真 空狀態會鱗，m去離子水會注人傳輪管路2()中’並由真空承 1312835 之通孔⑽，細ΐδ 之承載面16而釋放。 丹&承戰千台！2 然而，習知真空承載設備1〇於操作上且 於吸附模式下由於傳齡路2G 因首先， 耗費相當長的時間村達到足以_基板Μ之真=須 果％亦f具備較大辨。再者，於觀模式了: &_=空 成效率不彰。 咖^___€時，而造 【發明内容】 本發伙目的之—在於_種衫域賴，崎真空 平台可快輕_繼紐，_斯鱗並減少成本。 根據本發明之-較佳實關，係提供-種真空承觀備，用以 承載與固定—基板，並與—真找及-去離子水源連接。上述真 空承載設備包含有-真空承載平台、―傳輸管路、—真空槽、一 儲水槽與至J/ -閥門。該真空承截平台，具有複數個通孔。該傳 輸管路’包含有-第-端、—第二端以及—第三端，該第一端連 接至該真空承載平台之料通孔，鮮二端連接至該真空果，且 該第三端連接至該去離子水源。該真空槽，連接於該傳輸管路之 °亥第&與5亥第一端之間，而該儲水槽，則連接於該傳輸管路之 該第一端與該第三端之間。該閥門，連接於該第一端、該真空槽 1312835 與該儲水槽之間，藉 第一端之啟閉狀態。 以控制該真空槽與該第1或該儲水槽與該 【實施方式】 ^參考第2 ®第2圖為本發明—較佳實施例之 之不意圖。如第2圖所千，士由 昇工K載a又備 真空承載平^2實施歡真料做備3g包含有一 載千口以及—傳輸管路40。真空承栽平 承載面36 ’靠承賴固定―紐34 1真空傾^ 3^一 多孔性結構設計，其包含有細輯孔％ — 口為轉 輪管路4叫f軸嶋姆 ^傳輸管路4。包含有—第—端41、一第二端42以及_ = 43，其中第一端41連接至真空承載平台32之通孔38，第二端们 連接至-真空泵44 ’第三端43 _接至—去離子水源奶。 • 本實施例之真空承載設備3G包含有-真^：槽(vacuum tank)48 ’連接於傳輸管路40之第一端41與第二端幻之間，一儲 水槽(論rtan_，連接於傳輸管路4〇之第一端“與第曰王端“ 之間，以及至少一閥門52·，連接於第一端4卜真空槽仙與儲水 槽50之間，藉以控制真空槽48與第—端41或儲水槽％與第一 端41之啟_態。本實補之真空承載設備，另包含有—麼縮空 氣源(compressed dry air，CDA)54，連通於儲水槽5〇，並可連通於 真空槽48。在真空承載設備30運轉期間，真空槽48係隨時保持 在預抽真空的狀態’同時儲水槽50内亦預先儲存有去離子水。另 1312835 …二........... …… 外，在本實施例中真空槽48與儲水槽50皆係連接於靠近第一端 41之傳輸管路40,且在設置真空槽48與儲水槽刈之位置時，莫 空槽48與儲水槽50的位置以愈靠近傳輸管路4〇之第一端41，亦 即愈菲近真空承載平台32’於進行基板34的吸附或釋放時的效果 較佳。本實施例之真空承載設備30亦另可包含有一第一旁通管路 (bypasspipe)56 ’連接真空槽48與真空泵44，以及一第二旁通管 路58，連接儲水槽50與去離子水源46。此外，傳輸管路4〇另可 籲設錢數個閥門6〇，分別設於真空承載設備％之各單元之間，藉 以於操作過程中控制空氣或去離子水之流動路徑或流量。 5月參考第3圖，第3圖繪示了本實施例之真空承載設備於吸附 模式下之示意圖，其巾於圖示巾粗線部分係表示氣體或液晶之流 動路線。如第3圖所示，在設定為吸附模式時，閥門52會調整為 對真空槽48開啟而對儲水槽50關閉的狀態，亦即傳輸管路4〇的 肇第k 1係與真空槽48(第二端42)導通，而由於真空槽48已預 抽真二真空承載平台32之通孔38可短時間内即達到真空熊 以吸附基板34。此外，於吸附模式下，第一旁通管路％與真空槽 招間之間門60係為開啟，藉此於真空泵私抽真空時可經由第一 旁通管路56，而避免吸人真空槽48底部可能積存之水。 請辦第4圖與第5圖，第4圖與第5圖繪示了本實施例之真 二載又備於釋放模式下之示意圖，其中於圖示中粗線部分係表 减體或液日日日之流動路線。如第4圖所示，於_放模式下的第— 1312835 5叫咖職球48為酬， 内預先儲存了去財k a •二神胸，補咒 氣，儲水样1 猎由壓縮空氣源54所注入之壓縮空 出以使基i 34 k絲子水會經域空承載平台32之通孔38渴 與真空i 48脫離真空承載平台32。另外，位於壓縮空氣源54 空样間之閥門6G亦可被開啟，藉此壓㈣氣亦可注入真 日，將真空槽48底部之積存水經由真空果44贼出去。 離子717 ’於釋賴式下的第二隨，儲賴5〇内之去 通其路民水位時’去離子水源48會開始供水，並經由第二旁 2^8轉將去軒樣人真空承載平台32之触別内，以 j Μ ’同時去離子水源48亦可於此時持續補充儲水㈣ 巧之去離子水至高水位。 接由上述可知，本發明藉由於傳輸管路内設置預抽真空之真空 、、及預先财之儲水;ff ’可有效域賴基板觸放基板的 速度而可提升真空承載設備的效率。值得說明的是，本發明之 真空承載設備的顧並秘於上述實施例之設計配置，而可依實 際需要加以變更設計。舉例來說’在成本與效率的考量下，本發 明之真空承載設備亦可單獨設置真空槽料妓儲賴，或是^ 獨設«I水槽而不設置真空槽。另外，傳輸管路之閱門的設置亦 不為上述實關所_ ’例如_馨_模式鱗放模式之閱 門’可不限於上述實施例之圖式所繪示之單—可㈣門，而可為 912835 任何具有轉向之閥門或由複數個閥門所組合而成。此外值得說明 的是，本發明之真空承載設備可應用於液晶韻示面概之各類褽 程，例如彩色濾光片基板的研磨製程，或是任何可利用真空吸附 加以承載固定之基板製程。 以上所述僅為本發明之較佳實施例，凡依本發明申請專利範 圍所做之均等變化與修飾，皆應屬本發明之涵蓋範圍。 【圖式簡單說明】 第1圖為習知真空承載設備之示意圊。 第2圖為本發明一較佳實施例之真空承載設備之示意圖。 第3圖繪示了本實施例之真空承載設備於吸附模式下之示意圖。 第4圖與第5圖繪示了本實施例之真空承載設備於釋放模式下之 示意圖。 _ 【主要元件符號說明】 10 真空承載設備 12 真空承載平台 14 通孔 16 承載面 18 基板 20 傳輸管路 21 第一端 22 第二端 23 第三端 24 真空泵 26 去離子水源 30 真空承載設備 32 真空承載平台 34 基板 1312835 36 承載面 38 通孔 40 傳輸管路 41 第一端 42 第二端 43 第三端 44 真空泵 46 去離子水源 48 真空槽 50 儲水槽 52 閥門 54 壓縮空氣源 56 第一旁通管路 58 第二旁通管路 60 閥門1312835' IX. Description of the Invention: [Technical Field] The present invention relates to a vacuum carrying device, and more particularly to a vacuum carrying device capable of improving the adsorption and release efficiency of a substrate. [Prior Art] In the automated production of liquid crystal display panels, how to quickly and automatically transfer, fix, and ♦ transfer substrates to improve efficiency - important loop junctions. The current panel factory mainly uses vacuum bearing equipment as a substrate carrying and fixing tool. . Please refer to Figure 1, which is a schematic diagram of a conventional vacuum carrying device. As shown in the figure, the conventional vacuum carrying device 10 includes a vacuum carrying unit 12 and a transfer line 2〇it connected to the true carrying platform 12. The vacuum bearing platform 12 has a plurality of through holes 14 communicating with the transfer line 20 at the other end, and the other end opening the hole at the vacuum carrying platform with one of the three end points of the transfer center line. The first end 21° is in communication with the through hole ρ ! 4 and the second end 22 and the third end 23 are respectively connected to the vacuum (four) and a deionized water source 26 . Vacuum bearing 赖H) shot _ scale put two _ tilt type. In the adsorption mode, the through hole 14 of the vacuum bearing platform 12 is in communication with the vacuum pump 24, at which time the vacuum fruit 24 will begin to reduce the shape of the transmission line 2G, and the skin is placed on the vacuum bearing platform 12 Take the 6-county board 18 for the process. In the release mode, the through hole ί4 of the vacuum bearing platform 12 is in communication with the deionized water source. At this time, the vacuum state will scale, and the m deionized water will be injected into the transfer line 2 () and is vacuumed by 1312835. The through hole (10) is released by the bearing surface 16 of the fine ΐδ. Dan & battle against thousands! 2 However, the conventional vacuum carrying device 1 is in operation and in the adsorption mode, because the ageing road 2G is first, it takes a long time for the village to reach a sufficient level. Furthermore, in the view mode: &_=void efficiency is not good. Coffee ^___€, and create [invention content] This is the purpose of the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ In accordance with the present invention, a preferred vacuum closure is provided for carrying and securing the substrate and for connecting to a source of deionized water. The above vacuum bearing device comprises a vacuum carrying platform, a "transport line, a vacuum chamber, a water storage tank and a J/-valve. The vacuum bearing platform has a plurality of through holes. The transmission line 'including a - first end, a second end and a third end, the first end is connected to the material through hole of the vacuum bearing platform, the fresh end is connected to the vacuum fruit, and the third end The end is connected to the deionized water source. The vacuum tank is connected between the first end of the transfer line and the first end of the 5H, and the water storage tank is connected between the first end and the third end of the transfer line. The valve is connected between the first end, the vacuum tank 1312835 and the water storage tank, and is opened and closed by the first end. The control of the vacuum chamber and the first or the water storage tank and the [embodiment] of the present invention are referred to as the second embodiment and the second embodiment of the present invention. As shown in Fig. 2, the syllabus is upgraded and loaded with a vacuum. The vacuum load is carried out. The 2g contains a thousand ports and a transmission line 40. Vacuum bearing flat bearing surface 36 'depending on the fixed - New 34 1 vacuum tilting ^ 3 ^ a porous structure design, which contains a fine hole % - the mouth is the runner line 4 called f axis 嶋 ^ transmission Line 4. The first end 41 is connected to the through hole 38 of the vacuum bearing platform 32, and the second end is connected to the vacuum pump 44' third end 43 _ To - deionized water source milk. The vacuum carrying device 3G of the present embodiment includes a vacuum tank 48' connected between the first end 41 of the transmission line 40 and the second end, and a water storage tank (on the rtan_, connected to The first end of the transmission line 4〇 is “between the second end” and the at least one valve 52· is connected between the first end 4 and the vacuum tank and the water storage tank 50, thereby controlling the vacuum tank 48 and the first The end 41 or the water storage tank % and the first end 41. The vacuum bearing device of the present invention further comprises a compressed dry air (CDA) 54 connected to the water storage tank 5〇, and It can be connected to the vacuum tank 48. During the operation of the vacuum carrying device 30, the vacuum tank 48 is kept in a pre-vacuum state at the same time. At the same time, the deionized water is also pre-stored in the water storage tank 50. Another 1312835 ... two..... In addition, in the present embodiment, the vacuum chamber 48 and the water storage tank 50 are connected to the transfer line 40 near the first end 41, and when the vacuum tank 48 and the water tank 刈 are disposed. The position of the vacant tank 48 and the water storage tank 50 is closer to the first end 41 of the transmission line 4, that is, the Philippine near vacuum bearing platform 32 The effect of the adsorption or release of the substrate 34 is better. The vacuum carrying device 30 of the embodiment may further include a first bypass pipe 56' connecting the vacuum tank 48 and the vacuum pump 44, and a second The bypass line 58 connects the water storage tank 50 and the deionized water source 46. In addition, the transmission line 4〇 can also call a plurality of valves 6〇, which are respectively disposed between the units of the vacuum carrying equipment, so as to operate In the process, the flow path or flow rate of the air or deionized water is controlled. Referring to FIG. 3 in FIG. 5, FIG. 3 is a schematic view showing the vacuum carrying device of the embodiment in the adsorption mode, and the towel is in the thick line portion of the illustrated towel. Indicates the flow path of gas or liquid crystal. As shown in Fig. 3, when set to the adsorption mode, the valve 52 is adjusted to open the vacuum chamber 48 and close the water storage tank 50, that is, the transfer line 4 The k1th line is electrically connected to the vacuum chamber 48 (the second end 42), and since the vacuum groove 48 has pre-extracted the through hole 38 of the vacuum carrying platform 32, the vacuum bear can be reached in a short time to adsorb the substrate 34. In the adsorption mode, the first bypass line is % The door 60 is opened between the vacuum chamber and the vacuum pump, so that the vacuum pump can be vacuumed through the first bypass line 56, thereby avoiding the possibility of water being trapped at the bottom of the vacuum chamber 48. Please refer to Fig. 4 FIG. 5, FIG. 4 and FIG. 5 are schematic diagrams showing the true two-load and the release mode in the present embodiment, wherein the thick line portion in the figure is a flow path of the body reduction or liquid day and day. As shown in Figure 4, the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The compression injected by the source 54 is vacated so that the base water will escape from the vacuum bearing platform 32 through the through hole 38 of the domain carrying platform 32. In addition, the valve 6G located between the empty sample of the compressed air source 54 can also be opened, whereby the pressure (4) gas can also be injected into the true day, and the accumulated water at the bottom of the vacuum chamber 48 is discharged through the vacuum fruit 44 thief. Ion 717 'Second in the release of the Lai, the storage of the water inside the 5 〇 其 其 其 路 路 路 路 路 路 路 路 路 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' 去 去 去 去 去 去 去 去 去 去 去 去Within the touch of the carrying platform 32, j Μ 'the simultaneous deionized water source 48 can also continue to replenish the water at this time (4) the deionized water to the high water level. As can be seen from the above, the present invention can improve the efficiency of the vacuum carrying device by providing a pre-vacuum vacuum in the transmission line and pre-storing the water; ff' can effectively increase the speed at which the substrate touches the substrate. It should be noted that the vacuum carrying device of the present invention is not limited to the design configuration of the above embodiment, and can be modified according to actual needs. For example, in terms of cost and efficiency, the vacuum carrying device of the present invention can also be provided with a separate vacuum tank or a vacuum tank without a vacuum tank. In addition, the setting of the reading line of the transmission pipeline is not the above-mentioned real-time gateway, and the reading of the door is not limited to the single-four (four) door shown in the drawings of the above embodiment. It can be 912835 any valve with steering or a combination of multiple valves. In addition, it is worth noting that the vacuum carrying device of the present invention can be applied to various processes of the liquid crystal display surface, such as a polishing process of a color filter substrate, or any substrate process which can be carried by vacuum adsorption. The above are only the preferred embodiments of the present invention, and all changes and modifications made to the scope of the present invention should fall within the scope of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic diagram of a conventional vacuum carrying device. 2 is a schematic view of a vacuum carrying device according to a preferred embodiment of the present invention. FIG. 3 is a schematic view showing the vacuum carrying device of the embodiment in an adsorption mode. Fig. 4 and Fig. 5 are schematic views showing the vacuum carrying device of the embodiment in a release mode. _ [Main component symbol description] 10 Vacuum carrying device 12 Vacuum bearing platform 14 Through hole 16 Bearing surface 18 Substrate 20 Transfer line 21 First end 22 Second end 23 Third end 24 Vacuum pump 26 Deionized water source 30 Vacuum carrying device 32 Vacuum bearing platform 34 Substrate 1312835 36 Bearing surface 38 Through hole 40 Transmission line 41 First end 42 Second end 43 Third end 44 Vacuum pump 46 Deionized water source 48 Vacuum tank 50 Water storage tank 52 Valve 54 Compressed air source 56 First side Through line 58 second bypass line 60 valve
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