1311281 九、發明說明： 【發明所屬之技術領域】 本發明係關於機器人之控制裝置。 【先前技術】 根據日本特開平11 17 9 6 91號公報來說明f知_ „ 人之控制裝置。該公報係揭示具備有制 、機益 人之控制裝置，該% p / °。（brake)之機器1311281 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a control device for a robot. [Prior Art] According to Japanese Laid-Open Patent Publication No. Hei 11 17 9 6 91, the human control device is disclosed. This publication discloses a control device having a system and a machine, and the % p / ° (brake) Machine
機器人夕:f 伺服控制部的動作而H ，人之手#的位置，並於伺服控制部不 ：制 動，該控制裝置中具備有設定制動器的 f不 間設定部、及設定制動器的解除時間之解除時 亚具備有制動器控制部，在有來自操作的°又疋邻’ 時，按照鎖定時間設定部與解除間&解除指令 互地進行制動器的較與解除。的設定時間交 依據該種機器人之控制裝置，由於 =的指令時，根據制動器的解除時間 二疋：的設定值’而間歇性地進行制 除盘】 二=可抑制機器人手臂本身的重量所招致的過= 亚此達成該手臂的微調整或順暢的移動。 作並的機^人之控㈣置雖具有複數個馬達， 考慮到猎由該馬達來使—個可動部動作的串聯式 a二em type)^^因此’即使制動器信號的 相同，也會由於各制動器的產生轉矩日; 夂=:間的不一致而使馬達的移動量相異。因而有使 了動。卩移動的量不同之問題點。 吏 315715 5 1311281 f發明内容j 本發明係為解決上述問題點而 供一種能以使各馬達的移動量相=在、目的在於提 器人之控制裝置。 方式控制制動器之機 機器人之控制裝置的特徵為具備有·了/ 軸方向移動之可動部；分別透過第卜可在2 動該可動部的—端部與另一端 a機構而驅 檢測該第1、第2馬達的旋轉位置並產生分別 測信號之第1、第2位置檢測機構 I1;卓2饭置檢 第卜第4達的旋轉之第卜 ^開放前述 第卜第2馬達之第】、第2控 =^別驅動前述 制部無效，並可使前述第卜胃’H第卜第2控 y之，;以及依照該指令機構：，= m2制動器的限制時間或開放時間的乍：更:述 依照本m wmii調整機構。 作，來變更=Γ?: 構係依照指令機構的動 少任* 制動斋的限制時間或開放時間的至 W壬一…使第」、第2位置檢測信號—致。，此方二 可使驅動可動部的—端部與另—端部之第】 =㈣相等。因此’可動部的一端部與另一端= 的=:之位置變成相等。所以在維㈣In the robot eve: f the operation of the servo control unit and the position of the hand # of the person, and the servo control unit does not: brake, the control device includes the f setting unit for setting the brake and the release time of the setting brake. When the release is performed, the brake control unit is provided, and when there is a "going from the operation", the brake is reset and the brake is released in accordance with the lock time setting unit and the release room & release command. The setting time is based on the control device of the robot. When the command is =, the disk is intermittently removed according to the setting value of the brake release time: 2. The weight of the robot arm itself is suppressed. Over = Sub-achieves the slight adjustment or smooth movement of the arm. The control of the machine is performed. (4) Although there are a plurality of motors, considering the hunting of the motor, the series type a em type of the movable part is operated, so that even if the brake signals are the same, The torque generation day of the brake; 夂 =: the inconsistency between the two causes the amount of movement of the motor to be different. Therefore, there is a move.卩 The amount of movement is different. 315 315715 5 1311281 f SUMMARY OF THE INVENTION The present invention is directed to a control device which is capable of causing the amount of movement of each motor to be phased at the purpose of solving the above problem. The control device for controlling the brake robot is characterized in that it has a movable portion that moves in the axial direction, and transmits the first portion through the end portion and the other end a mechanism of the movable portion. The first and second position detecting means I1 for respectively detecting the rotational position of the second motor, and the second rotation of the first and second positions of the first and second positions of the second test. The second control = ^ does not drive the above-mentioned system to be invalid, and can make the aforementioned first stomach 'H Dib second control y;; and according to the instruction mechanism:, = m2 brake limit time or opening time 乍: more : According to this m wmii adjustment mechanism. To change, Γ?: The structure is based on the limit of the command mechanism*, the limit time of the brake, or the opening time to the first and second position detection signals. This two sides can make the end of the driving movable portion equal to the other end of the other end portion = (four). Therefore, the position of the one end portion of the movable portion and the other end = = becomes equal. So in the dimension (four)
再者’本發明最好更具備：求出 2位置檢測信號的差，並判斷該差 第1位置檢測信號與 是否較預定的臨界值 315715 6 1311281 判斷機構；以及當該判斷機構判斷為較大時 器调整機構動作之控制機構。 依照本發明，控制機構僅在第1位置檢測信號血第2 號的差較臨界值大的情況才使制動器㈣機構 口此，制動器調整機構的控制變得簡易。 再者，本發明最好具備有比較第丨位 2位置檢測信號的比較機 二:一第 或於z軸方向上方的馬達相對應的第丨 ^ 制動盗的限制時間或開放時間之至少任一方。 與位於Z軸方二㈣動盗5周整機構係根據該比較而僅變更 、1Z軸方向上方的馬達相 夂灵 等。亦即變更與位於上方的J對之：二限制時間 二等。藉此作法，可防止可動部的==:的限制時 更加確保安全性。 心虞）文低。因此可 再者，本發明最好有根據第】、 求取可動部的一端部之卓位置檢測信號來 移動量，並比較第i移動量盥第；移另-端部之第2 :二:動器調整機構係根據該比較 :㈣對應的制動器的限制時間或開放 依如本發明，制動哭纲敕她^ 與移動量小的馬達相對庫；動哭二根據該比較而僅變更 更與位於上方的馬達相；庫二：：限制時間等。亦即變 作法，可防止可動部的位置 二的限制時間等。藉此 置急劇變低。因此可更加確保安 3J5715 7 1311281 全性。 [實施方式】 第J實施制. 鮮=第丄圖至第3圖說明具體化本發明的機-人之$ 制裝置的一實施例。第】 』馎时人之才工 玻璃基板搬運機器人(以下;爯為1「:本上:―貫施例之液晶 的透視圖，第2圖係顯示一實：::板搬運機器人」) 整體構造圖13圖係顯示==晶；板搬運機器人的 人之電氣系統的方塊圖。 ®斤不液晶基板搬運機器 第1圖至第3圖中，液曰ϋ 1側面部2，第2側面部4機器人1係具有第 第2侧面部4的上端之頂板9二：:第1侧面部2、 ::在弟2侧面部4的内部具有直接連接到久 且為立设的滾珠螺桿之第2軸5;並 ’達 第1軸看！移動機構），另一端部;=7a螺合於 ^移動叫藉由第…及第…::::二⑽ 同’亦即第1圖所示之上下方向移動之由平轴方 成，並為可承載液晶玻璃基板之可動部7 :材所構 構成為可在第1圖所示箭號A方向移動。動部7係 第1馬達η、第2馬達m係分 ?、第⑽動器113,㈣動器13、第；制動器 分別結合有第i位置檢測器12 w U3係 1制動哭n、楚。弟2位置祆測器112，第 動』第2制動器113係分別限制/開放第!馬達u弟 335715 8 1311281 第2馬達111的旋轉，作為第J位置檢測機構之第！位置 檢測器12、作為冑2位置檢測機構之第2位置檢測器⑴ 係：別檢測第！馬達U、第2馬達⑴的旋轉位置「而產 生第1、第2位置檢測信號P丨、P2。 液晶基板搬運機器人丨係具有：取得 位置檢測信號㈣以控制第！馬達u及;^ 與第1制動◎ 13及第2制動器113之控制裝置3〇，以及 使第1伺服控制部33及第2伺服控制部133為有效 =咧’並藉由使作為指令機構的解除操作開關42為 使ί 1及* 2飼服控制部33、133無效叫 動以二及弟2制動器13、113開放(0Ν)/限制(OFF)之手 動刼作裝置40。 7 丁 控制裝i30中係具有共通部、控制第 =部:控制第2馬達⑴之第2控制部 弟: 解析亚處理使可動部7 “ 器13、113之⑽門访、I動作知式亚且執行各制重 3 i ^ 、〇FF(限制)控制等之中央處理部 31’以及,己憶動作程式等之記憶部”。 哭係具有：作為控制第1馬達…第^制動 、工制邛之弗1伺服控制部33昭 控制部33的驅動指令而 依…、末自弟1伽 部35;為了控制第〗馬達11之第1伺服放大Furthermore, the present invention preferably further includes: determining a difference between the two position detection signals, and determining whether the difference first position detection signal is greater than a predetermined threshold value 315715 6 1311281; and determining that the judgment mechanism is larger The timing adjusts the control mechanism of the mechanism action. According to the present invention, the control means only makes the brake (four) mechanism and the control of the brake adjustment mechanism simple when the difference of the first position detection signal blood No. 2 is larger than the critical value. Furthermore, the present invention preferably includes at least one of a limiter time or an open time of the comparator 2 that compares the position detection signals of the second position: one or the motor corresponding to the motor above the z-axis direction. . According to the comparison, only the motor in the Z-axis side (four) thief is changed, and the motor in the 1Z-axis direction is changed. That is, the change is with the J pair located above: the second limit time is second. By doing so, it is possible to prevent safety when the limit of the ==: of the movable portion is prevented. Heart palpitations) low. Therefore, in the present invention, it is preferable to obtain the amount of movement based on the position detection signal of the one end portion of the movable portion, and compare the ith movement amount 盥; and shift the other end portion 2: 2: The actuator adjustment mechanism is based on the comparison: (4) the time limit or opening of the corresponding brake is as in the present invention, the brake is crying, and the motor is opposite to the motor with a small amount of movement; the crying 2 is only changed and located according to the comparison. Motor phase above; Library 2: Limit time and so on. That is, the change method can prevent the position of the movable portion from being limited. By this, the setting is drastically low. Therefore, it is possible to ensure the integrity of An 3J5715 7 1311281. [Embodiment] The Jth implementation system. Freshness = Fig. 3 to Fig. 3 illustrates an embodiment of the machine-human device of the present invention. The 】 馎 人 人 人 玻璃 玻璃 玻璃 玻璃 玻璃 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( Figure 13 is a block diagram showing the electrical system of the person handling the robot. In the first to third figures of the liquid crystal substrate transporting apparatus, the liquid helium 1 side surface portion 2, the second side surface portion 4, the robot 1 has the top plate 9 of the upper end portion of the second side surface portion 4: the first side surface Part 2: :: Inside the side portion 4 of the younger brother 2 has a second shaft 5 that is directly connected to the ball screw that is standing for a long time; and 'sees the first axis! Moving mechanism), the other end; =7a screwed to ^moving by the ... and ...:::: two (10) with 'that is, the upper and lower directions shown in Fig. 1 are moved by the flat axis, and The movable portion 7 that can carry the liquid crystal glass substrate is configured to be movable in the direction of the arrow A shown in Fig. 1 . The moving portion 7 is a first motor η, a second motor m, a third (10) actuator 113, a (four) actuator 13, and a second brake. The brake is coupled to the i-th position detector 12 w U3 system 1 to brake the brakes. The second position detector 112 is activated, and the second brake 113 is limited/opened. The motor 335715 8 1311281 The rotation of the second motor 111 is the first position of the J position detecting mechanism! The position detector 12 and the second position detector (1) as the 胄2 position detecting mechanism are: The rotation position of the motor U and the second motor (1) generates the first and second position detection signals P丨 and P2. The liquid crystal substrate transport robot has a position detection signal (4) to control the motor and the motor. 1 brake ◎ 13 and the control device 3 of the second brake 113, and the first servo control unit 33 and the second servo control unit 133 are enabled = 咧 ' and the release operation switch 42 as the command means is made ί 1 and * 2 The feeding service control units 33 and 133 are inactivated by the manual operation device 40 in which the second and second brakes 13 and 113 are open (0Ν)/restricted (OFF). 7 The control unit i30 has a common portion. Control the second part: control the second control unit of the second motor (1): Analyze the sub-process to make the (10) access of the movable unit 7 "the 13", "I", and perform the respective weights 3 i ^ , 〇 FF (Restriction) The central processing unit 31' of the control and the like, and the memory unit such as the operating program. The crying system has the control unit 33 as the first motor, the second brake, and the servo control unit. The drive command of 33 is based on ..., the last self-different 1 gamma part 35; in order to control the first servo amplification of the first motor 11
的第1制動器信號之作=13的〇=OFF而產生0N/ 〇FF 器控制部37;以及、掳：》1制動器控制機構之第1制動 器13之第}制動。》1制動器信號而驅動第1制動 制動益驅動部3 9。 315715 9 1311281 113二;工广係具有：控制第2馬達111、第2制動界 113之弟2伺服控制部13 利勒器 的驅動指令而驅動第2气=來自第2飼服控制部133 為了控制第2制==1之第2舰放大部I· 2制叙 勺〇N/OFF而產生ΟΝ/OFF的第 制2制動器控制機構之第2制動器控 二制動器信號而驅動第2制動器 號為叫各制動器13、113:0=，:各制'器信 號為OFF時，各制動哭η ''幵 各制動态信 吋各制動态13、m為0FF(限制）。 :用第4圖至第6圖說明上述構造的機器人之控 圖，第5圖及第Z 控制裝置的動作之流程 、， 圖係顯不制動器相關動作之時序圖。 以手1^在維修時等中，中央處理部31判斷操作者是否 〇渺驟工使手動操作裝置4〇的解馀操作開關42轉為 ^ sioi)。在此，若使解除操作開關42為⑽的時 則中央處理部31使從帛Η司服控制部33、第2 ^控制部133送往第1及第2伺服放大部35、 供電給第〗馬達u、第2馬達叫步驟-苐1制動器控制部37係透過第】伺服控制 而從第1位置檢測器12取入第！位置檢測信號p 2 係透過第2飼服控制部133而從第2位 ^ J益】12取入第2位置檢測信號P2(步驟81〇5)，第】、 第2制動器控制部37、137,係分別將第】、f : 號供應給制動器13、113以控制制動器13、n3的〇n— 315715 10 ^11281 :::此操作，可動部 驟51〇7)。亦即，徒 卜 乙釉方向下方移動（步 使0N時間ta與⑽士及弟2制動器信號的周期為丁，並 器信號及第2制動哭日守間化相同。在此，即使第1制動 的制動轉矩、：=同’各制動器13,所產生 開放為止的開放時間 動為：至各制動器13、U 3 !3、113限制A， 足制動盗化號為0FF起至各制動哭 異。因此，各制動時間亦會依各制動器13、113而 各馬達、n3的開放時間、限制時間不同， 的移動量也不同。如 下降的可動部7之 I在2軸方向 差。 W7a與另-端部7C的位置會有偏 置於、31係求出帛1位置檢測信號P1盘第2位 置私測信號P2的差 ，、弟2位 做比較以進行丨Pe丨：;對值广’並舆預定的位置偏差Pr 即為判斷機構=:之中：步驟_)。此步驟_ 在時Η 一中央處理部31在P1>p2時， 137 M、調整信號輸人到第1及第2制動器控制部37、 〇m日士ΡΓ制動器控制部m將第2制動器信號的⑽、 ta=0^f, tb)^af fBUb (duty),, } i斋控制部37將第1制動器信號的ON、OFF之時間比 “（步驟SU3)。亦即在維持第1制動器信號的周期Τ於 疋的情況下，加長ON時間tc。因此〇FF時間td變短。 在此二位置檢測信號值n、P2係設定成其值大時可動部7 位於π位置。藉此’使第！制動器！ 3所控制的第^馬達 11之速度較第2馬達111之速度略為上昇，以使控制馬達 315715 11 1311281 11、Ui的旋轉位置一致。亦即 -端〜位置一致而成水平了動一7的、部7a與另 調整二;=P2>P1’則中央處理部31在時間t。將 ::號“到幻及第2制動器控制部37、i 制動态控制部37將黛 弟 時 夺弟1制動則吕號的ON、OFF(時間ta= 時間比維持於一定，使第2制動器控制部i37 二。： 的的0N、0FF之時間比提高(步驟 此’步驟S113或S115為制動器調整機構。 下=即，在維持第2㈣11㈣的射IT於-定的情況 下’使ON時間tc屮H士門μ、乂 ln ^ 〇-時間鳴比==0Ν時間“長。因此 if η沾、* ☆ 所&制的弟2馬達1U之速度較第！馬 一致、因此又略為上昇’以使控制馬^1、111的旋轉位置 ㈣^ 動部7的一端部7a與另一端部7c以不合 傾斜的平行狀態在z軸方向下降。 9 詈的方式執行步驟S1G3〜SU5，直到手動操作震 置40的解除操作開關42被附。之後’制動器η、⑴ 再者’於上述實施例的步驟S109中，係使用位置檢測 aPl、P2來判斷可動部7的一端部乃與另一端部乃 之位置，但亦可求出累計第1位置檢測信號Ρ1而得之第] 移動量P1L、累計第2位置檢測信號ρ2而得之第2移動旦 ^，再以以下的方式求出第1移動量机和第2移動量里 315715 12 1311281 此即為移 p2L之差的絕對值PeL並與預定的作比較。 動量比較機構。The first brake signal = 13 = OFF = OFF, and the 0N / 〇 FF controller control unit 37; and 掳: "1" brake of the first brake 13 of the brake control mechanism. The first brake brake drive unit 39 is driven by the 1 brake signal. 315715 9 1311281 113 2; the industrial wide system includes: controlling the second motor 111 and the second brake sector 113, the second servo control unit 13 drives the driver command of the Liller to drive the second gas = from the second feeding service control unit 133 The second brake control two brake signals of the second brake control mechanism of the second brake control unit that controls the second ship======================================================================== Calling each of the brakes 13, 113: 0 =,: When the respective device signals are OFF, each brake is crying ' '', and the dynamics of each system 13 and m are 0FF (restricted). : Fig. 4 to Fig. 6 will be used to explain the control chart of the above-described structure, the flow chart of the operation of Fig. 5 and the Zth control device, and the timing chart of the operation related to the brake. At the time of maintenance or the like, the central processing unit 31 determines whether or not the operator has slammed the untwisting operation switch 42 of the manual operation device 4 to ^ sioi. When the release operation switch 42 is (10), the central processing unit 31 sends the slave control unit 33 and the second control unit 133 to the first and second servo amplifiers 35, and supplies the power to the first stage. The motor u and the second motor are called steps - 苐 1 and the brake control unit 37 is taken in from the first position detector 12 by the first servo control. The position detection signal p 2 is taken in from the second position control unit 133 by the second position detection signal P2 (step 81〇5), and the second brake control unit 37, 137 The 第n-315715 10^11281::: the operation, the movable part 51〇7) is supplied to the brakes 13, 113 respectively to control the brakes 13, n3. That is, the movement of the glaze direction downwards (the step of making the 0N time ta and the (10) Shi and the 2 brake signals is the same, and the parallel signal is the same as the second brake crying day. Here, even the first brake Braking torque, := Same as the 'opening brakes 13', the opening time of the opening is: to the brakes 13, U 3 ! 3, 113 limit A, the foot brake stealing number is 0FF to the brakes Therefore, the braking time varies depending on the opening time and the time limit of each of the motors and n3 for each of the brakes 13, 113. The I of the movable portion 7 that is lowered is in the two-axis direction. W7a and the other - The position of the end portion 7C is offset, 31 is the difference between the 私1 position detection signal P1 and the second position of the private measurement signal P2, and the second is compared to perform 丨Pe丨:; And the predetermined position deviation Pr is the judgment mechanism =: among: step _). When the central processing unit 31 is at P1 > p2, 137 M, the adjustment signal is input to the first and second brake control units 37, and the 〇m 日士ΡΓ brake control unit m sets the second brake signal. (10), ta=0^f, tb)^af fBUb (duty),, } i The control unit 37 compares the time between the ON and OFF of the first brake signal (step SU3), that is, maintains the first brake signal. When the period is 疋, the ON time tc is lengthened. Therefore, the 〇FF time td becomes shorter. When the two position detection signal values n and P2 are set to have their values large, the movable portion 7 is located at the π position. The speed of the first motor 11 controlled by the third brake is slightly higher than the speed of the second motor 111, so that the rotational positions of the control motors 315715 11 1311281 11 and Ui are the same. The unit 7a and the other adjustment 2; = P2 > P1 'the central processing unit 31 at time t. The :: "to the magic and the second brake control unit 37, the i-system dynamic control unit 37 will be the younger brother. When the brother 1 is braked, the Lu number is turned ON and OFF (the time ta = the time ratio is maintained constant, so that the second brake control unit i37 two.: The time ratio of 0FF is increased (step "Step S113 or S115 is the brake adjustment mechanism. Lower = that is, while maintaining the second (fourth) 11 (four) shot IT in the case of - set the 'on time tc 屮 H 门 door μ, 乂 ln ^ 〇 - Time ratio = 0 Ν time "long. Therefore, if η 、, * ☆ & & 的 2 2 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达 马达Position (4) The one end portion 7a of the movable portion 7 and the other end portion 7c are lowered in the z-axis direction in a state in which the tilting is not inclined. 9 詈 The steps S1G3 to SU5 are executed until the release operation switch 42 of the manual operation 40 is attached. Then, in the step S109 of the above-described embodiment, the position of the one end portion of the movable portion 7 and the other end portion are determined by the position detections aP1 and P2, but the cumulative number can be obtained. The first movement amount P1L and the second movement detection signal ρ2 are obtained by the first position detection signal Ρ1, and the first movement amount and the second movement amount 315715 are obtained as follows. 1311281 This is the absolute value PeL of the difference of shifting p2L and compared with the predetermined one. Momentum compare institutions.
I P1L-P2L | =PeL>PrL 然後’在步驟Sill中，比較P1L>P2L並在結果為「θ 寺執行步驟s 113 ’結果為「否」時則執行步驟s出。 (產業上的利用可能性） 如上所述，本發明之機器人之控制裝置係適用於機器 人控制。 °° 【圖式簡單說明】 第1圖係顯示本發明一實施例的液晶基板搬運機 之透視圖。 ° 第2圖係顯示本發明一實施例的液晶基板 之整體方塊圖。 咬铽时人 第3圖係第2圖所示機器人之控制裝置的方塊圖。 第4圖係顯示第2圖所示機器人之控制襄置的動作之 流程圖。 初之 第5圖係顯示第2圖所示機器人之控制 時序圖。 」切作之 弟6圖係顯示第 時序圖。 2圖所示機器人之控制裝置的動作之 【主要元件符號說明】 液晶基板搬運機器人 '苐1侧面部 3 第1 4由 [第2側面部 5 第2軸 315715 13 可 動 部 7a 一端部 另 — 端部 9 頂板 第 1 馬達 12 第1位 置檢測器 第 1 制動器 30 控制裝 置 中 央處理部 32 記憶部 第 1 伺服控制部 第 1 伺服放大部 第 1 制動器控制部 第 1 制動器驅動部 手動操作裝置 42 解除操 作開關 第 2 馬達 112 第2位 置檢測器 第 2 制動器 133 第2伺服控制部 第 2 伺服放大部 第 2 制動器控制部 第 2 制動器驅動部 14 315715I P1L - P2L | = PeL > PrL Then, in step Sill, P1L > P2L is compared and when the result is "the θ temple execution step s 113 ”, the result is "NO", and then step s is performed. (Industrial Applicability) As described above, the robot control device of the present invention is suitable for robot control. °° BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing a liquid crystal substrate transporter according to an embodiment of the present invention. Fig. 2 is an overall block diagram showing a liquid crystal substrate according to an embodiment of the present invention. Figure 3 is a block diagram of the robot control device shown in Figure 2. Fig. 4 is a flow chart showing the operation of the control device of the robot shown in Fig. 2. The first picture shows the control timing chart of the robot shown in Fig. 2. The cut-off brother 6 shows the timing chart. (2) The operation of the control device of the robot [Description of the main components] The liquid crystal substrate transfer robot '苐1 side portion 3 1st 4th [2nd side surface part 5 2nd axis 315715 13 movable part 7a one end part other end Part 9 Top plate first motor 12 First position detector First brake 30 Control device central processing unit 32 Memory unit First servo control unit First servo amplifier unit First brake control unit First brake drive unit Manual operation device 42 Release operation Switch second motor 112 second position detector second brake 133 second servo control unit second servo amplifier unit second brake control unit second brake drive unit 14 315715