1306369 玖、發明說明： 【發明所屬之技術領域】 本發明係關於一種當於層合物或塑膠板中製作孔洞時 設置於層合物或塑膠板之表面上之鑽孔用潤滑劑片材，及 一種使用以上之鑽孔用潤滑劑片材的鑽孔方法。在印刷布 線板之製造中使用以上之鑽孔用潤滑劑片材製得之穿孔主 要適合使用作為印刷布線板諸如半導體塑膠封裝或主機板 之通孑L ( t h r 〇 u g h hole)。此外，可將本發明所提供之鑽孔 用潤滑劑片材應用至其他精密鑽孔應用，例如，將硬塑膠 板諸如眼鏡用透鏡鑽孔之應用。 【先前技術】 習知之鋁片材係使用作為利用金屬鑽將使用於印刷布 線板之層合物鑽孔的入口片材。近年來，在使用於半導體 塑膠封裝或其類似物之高密度印刷布線板中，通孔的直徑 變得愈來愈小，且具有0 . 1 5毫米Φ以下之最小通孔直徑 的印刷布線板逐漸增加。當單獨使用鋁入口片材製作此一 小直徑孔洞時，會有鑽子之壽命短，孔洞壁之糙度大及孔 洞位置準確度差的問題。因此，經由將潤滑劑樹脂層形成 於金屬箔諸如鋁之一表面上而製得之鑽孔用潤滑劑片材係 用以延長鑽子之壽命、改良孔洞位置準確度及改良孔洞壁 之糙度。舉例來說，J P - A _ 5 - 1 6 9 4 0 0公告提出一種可經由 將厚度0 · 1至3 . 0毫米之潤滑劑樹脂組成物層形成於金屬 箔之一表面上而製得的潤滑劑片材。以上之潤滑劑樹脂組 成物層的色相係天然的顏色。因此，當潤滑劑樹脂層之厚 312/發明說明書(補件)/93-04/93101839 1306369 度小時，很難區別潤滑劑片材的兩表面，故很難判斷應使 哪一表面與層合物或塑膠板接觸。以上的困難會產生諸如 誤將潤滑劑片材放反或孔洞品質減低的問題。此外，當使 用小直徑鑽子，尤其係直徑〇. 1毫米以下之鑽子時，會產 生鑽子易斷裂及孔洞位置準確度視存在於潤滑劑樹脂組成 物層中之空氣泡之大小而變得不足夠的問題。 【發明内容】 本發明之一目的為提供一種可克服由誤將潤滑劑片材 放反所產生之不良孔洞品質之問題的潤滑劑片材。 本發明之另一目的為提供一種可防止當使用小直徑鑽 子時發生任何鑽子斷裂的潤滑劑片材。 本發明之再一目的為提供一種可克服由存在於潤滑劑 片材之樹脂中之微小空氣泡所造成之孔洞位置準確度不足 之問題的潤滑劑片材。 根據本發明，提供一種鑽孔用潤滑劑片材，其包括金屬 箔或有機薄膜，及潤滑劑樹脂組成物層或底塗層及潤滑劑 樹脂組成物層，此潤滑劑樹脂組成物層或底塗層及潤滑劑 樹脂組成物層係形成於金屬箔或有機薄膜之至少一表面 上，其中底塗層及潤滑劑樹脂組成物層之至少一層包含著 色劑。 此外，根據本發明，提供一種根據以上潤滑劑片材之鑽 孔用潤滑劑片材，其中有機薄膜於其之一表面上具有0 · 5 至1 5微米之糙度，及在糙度之外凸部分之間的距離為1 至50微米。 312/發明說明書(補件)/93-04/93101839 1306369 再者，根據本發明，提供一種將層合物或塑膠板鑽孔之 方法，此方法包括將鑽孔用潤滑劑片材設置於層合物或塑 膠板上，及自潤滑劑樹脂組成物層側鑽孔。 再者，根據本發明，提供一種由潤滑劑樹脂組成物形成 之潤滑劑片材，此片材適用於將層合物或塑膠板鑽孔之方 法，其中包含於潤滑劑片材中之空氣泡具有3 0微米以下之 直徑。 【實施方式】 在本發明，術語「層合物」係指用於印刷板之具有絕緣 層之塑膠板，且以上術語包括除絕緣層之外，尚進一步具 有導體層之塑膠板。術語「塑膠板」係指由包含有機聚合 化合物為主成分之組成物所形成的板狀物件，且其包括具 有玻璃基材或無機填料之板狀物件。 關於經由將潤滑劑樹脂組成物層或底塗層及潤滑劑樹 脂組成物層形成於金屬箔或有機薄膜之至少一表面上而製 得之鑽孔用潤滑劑片材，本發明經由將著色劑，較佳為非 鹵素著色劑，加入底塗層及潤滑劑樹脂層之至少一層中， 而使潤滑劑片材之兩表面可彼此明顯地區別，因此，本發 明可防止在鑽孔時將潤滑劑片材誤置。此外，加入非鹵素 著色劑可提供環保的鑽孔用潤滑劑片材。此外，在潤滑劑 樹脂組成物中使用水溶性樹脂較佳，由於如此當潤滑劑樹 脂組成物黏著至層合物或塑膠板時，其將可容易地被移 除。在此情況，使用水溶性著色劑作為著色劑亦較佳。 此外，關於將潤滑劑樹脂組成物層或底塗層及潤滑劑樹 7 312/發明說明書(補件)/93-04/93101839 1306369 脂組成物層形成於有機薄膜之至少一表面上而製得之潤滑 劑片材，本發明提供具有預定尺寸之糙度的有機薄膜，而 防止任何鑽子斷裂及改良孔洞位置準確度。 再者，本發明經由控制包含於潤滑劑片材之潤滑劑樹脂 組成物層中之空氣泡的大小，而顯著改良孔洞位置準確度。 使用於本發明之潤滑劑片材中之潤滑劑樹脂組成物可 選自已知之用於鑽孔用潤滑劑片材之樹脂組成物的樹脂組 成物。其例子包括水溶性樹脂、熱塑性樹脂、熱固性樹脂 及潤滑劑和此等樹脂之任何一者的混合物等等。其可單獨 或結合使用。使用包含水溶性樹脂為主成分之潤滑劑樹脂 組成物為較佳。以上之水溶性樹脂當於鑽孔過程中殘留於 穿孔中時，可經由以熱水洗滌而容易地移除，以致可得到 可靠度優異的孔洞。 可將各種添加劑加至潤滑劑樹脂組成物。舉例來說，可 視用途需要而加入各種有機或無機填料。 使用於本發明之潤滑劑樹脂組成物中之水溶性樹脂的 較佳例子包括聚氧化乙烯、聚丙二醇、聚氧化丙烯、聚乙 烯醇、聚丙烯酸鈉、聚丙烯醯胺、聚乙烯基吡咯啶酮、羧 曱基纖維素、聚丁二醇、聚醚酯等‘等。其可單獨或結合使 用。 使用於本發明之潤滑劑樹脂組成物中之熱塑性樹脂的 較佳例子包括聚乙烯、聚丙烯、聚苯乙烯、聚酯、聚對苯 二曱酸乙二酯、聚醯胺、聚碳酸酯、聚砜、聚醚砜、聚烯 丙酸酯、聚醚醚酮、聚苯硫等等。此等熱塑性樹脂可單獨 8 312/發明說明書(補件)/93-04/93101839 1306369 或結合使用。 使用於本發明之潤滑劑樹脂組成物中之熱固性樹脂的 較佳例子包括酚樹脂、環氧樹脂、三聚氰胺樹脂、脲樹脂、 丙烯酸系樹脂、不飽和聚酯樹脂、聚胺基曱酸酯樹脂、醇 酸樹脂、聚矽氧樹脂、氰酸酯樹脂、順丁烯二醯亞胺樹脂 等等。此等熱固性樹脂可單獨或結合使用。 使用於本發明之潤滑劑樹脂組成物中之水溶性潤滑劑 的較佳例子包括聚氧伸乙基之單元醚諸如聚乙二醇、聚氧 伸乙基油基醚、聚氧伸乙基黥蠟基醚、聚氧伸乙基硬脂基 醚、聚氧伸乙基月桂基醚、聚氧伸乙基十二基醚、聚氧伸 乙基壬基醚及聚氧伸乙基辛苯基醚，聚氧伸乙基之酯諸如 聚氧伸乙基單月桂酸酯、聚氧伸乙基單硬脂酸酯及聚氧伸 乙基單油酸酯，聚氧伸乙基脫水山梨糖醇之單元酯，聚甘 油單硬脂酸酯諸如六甘油單硬脂酸酯及十甘油單硬脂酸 酯，聚氧伸乙基伸丙基嵌段聚合物等等。其可單獨或結合 使用。 使用於本發明之潤滑劑樹脂組成物中之水溶性潤滑劑 的例子包括醯胺化合物諸如伸乙基雙硬脂醯胺、油酸醯 胺、硬脂酸醯胺及亞曱基雙硬脂醯胺，脂肪酸化合物諸如 月桂酸、硬脂酸、棕櫚酸及油酸，脂肪酸酯化合物諸如硬 脂酸丁酯、油酸丁酯及乙二醇月桂酸酯，脂族烴化合物諸 如液態石蠟及聚乙烯蠟，及高碳脂族醇諸如油醇等等。其 可單獨或結合使用。 由本發明所提供之經由將以上潤滑劑樹脂組成物之潤 9 312/發明說明書(補件)/93-04/93101839 1306369 滑劑樹脂組成物層形成於金屬箔或有機薄膜上而製造鑽孔 用潤滑劑片材之方法並無特殊之限制。以上之方法可選自 一般知曉的方法。舉例來說，可採用在高溫下利用捏合機 等等不使用溶劑而將潤滑劑樹脂組成物捏合，將經捏合之 樹脂組成物擠塑以製備片材，及將片材壓於金屬箔或有機 薄膜上，而製造鑽孔用潤滑劑月材之方法；及將潤滑劑樹 脂組成物溶解於溶劑或水中以製備塗布組成物，將塗布組 成物塗布至金屬箔或有機薄膜之表面，及將經塗布之塗布 組成物乾燥，而製得鑽孔用潤滑劑片材之方法。潤滑劑樹 脂組成物層之厚度並無特殊之限制，然而其係5至1 0 0微 米較佳。可將潤滑劑樹脂組成物層形成於金屬箔或有機薄 膜之各表面上。舉例來說，當將樹脂層形成於金屬箔之兩 表面上時，將用於防止毛刺的硬樹脂設置於作為鑽孔標的 材料側之表面上，及將包含潤滑劑之軟樹脂設置於作為鑽 子侧的另一表面上。以此方式，可使兩表面上之樹脂扮演 不同的角色。當使用以上類型之潤滑劑片材時，兩表面之 間的區別尤其重要。 當在金屬箔或有機薄膜與潤滑劑樹脂組成物之間的黏 著不足時，將一般由熱固性樹脂或熱塑性樹脂所形成，且 具0 . 5至1 5微米較佳之厚度的底塗層形成於金屬箔或有機 薄膜表面上，以改良黏著強度。於金屬箔或有機薄膜表面 上形成底塗層之方法並無特殊之限制。其可選自已知之方 法。舉例來說，可採用將沒有溶劑之底塗料樹脂或經由將 底塗料樹脂溶解於溶劑中而得之塗布組成物塗布至金屬箔 10 312/發明說明書(補件)/93-04/93丨01839 1306369 或有機薄膜表面，及將其乾燥形成底塗層之方法；或將以 上之塗布組成物直接喷塗於金屬箔或有機薄膜表面上之方 法。在本發明中，當潤滑劑片材具有底塗層時，較佳係將 著色劑加入底塗層中，以使潤滑劑片材之兩表面明顯地區 別。在此情況，亦可將著色劑加入至形成於底塗層上之潤 滑劑樹脂層中。 使用於本發明之著色劑可選自一般知曉的有機及無機 顏料及有機及無機染料。明確言之，有機顏料包括偶氮顏 料諸如色淀紅（1 a k e r e d )、漢沙黃（h a n s a y e 1 1 〇 w )、/3 -萘盼、萘紛A S、苯并°米σ坐酮、雙偶氮黃及°比n坐酮、醜青素、 '奎吖咬酮、二°丼、艮、硫敏藍、蔥鼓蔥酿·（ a n t h a n t h r ο n e )、 異吲哚啉、異吲哚琳酮、陰丹士林、噎菲酮 (quinophtharone) '金屬錯合物、0比略并0比0各、S太青綠、 銅S太青藍、鎳賦青藍、铭狄青藍、驗藍、天空藍（skyblue)、 鐵藍、群青藍、靛藍、單偶氮黃、苯并咪唑酮黃及蔥醌黃。 此等著色劑可單獨或結合使用，以獲致預期的色相。 有機染料係以食用著色物質較佳。大多數的食用著色物 質為水溶性且具極低毒性，因此由此等特徵來看使用食用 著色物質為較佳。明確言之，食用著色物質包括黃色著色 物質、紅色著色物質及藍色著色物質。黃色著色物質包括 111-°比唑-3_羧酸、4，5-二氫-5-氧-1-（4-績醯基）-4-[(4-石黃醯基）偶氮基]三鈉鹽（黃色4號）、2 -萘績酸、6 -經基 -5 - [( 4 -磺醯基）偶氮基]二鈉鹽（黃色5號）等等。紅色著色 物質包括2，7_秦二石黃酸、3-經基_4-[(4_續酸基秦）偶 11 312/發明說明書(補件)/93-04/93101839 1306369 氮基]三鈉鹽（紅色2號）、螺-[異苯并呋喃-1 ( 3 Η )，9 ’ - [ 9 Η ] 山酮]-3 -酮- 3，，6，-二羥基- 2，，4，，5，，7，-四碘二鈉鹽（紅色 3號）、6 -羥基-5 - [( 2 -甲氧基-5 -甲基-4 -磺酸苯基）偶氮基 ]-2 -萘磺酸二鈉鹽（紅色4 0號）、1，3 -萘二磺酸、7 -羥基-8 - [( 4 -磺酸基-1 -萘）偶氮基]三鈉鹽（紅色1 0 2號）、螺-[ 異苯并呋喃-1 ( 3 Η )， 9 ’ - [ 9 Η ] ϋ山]-3 -酮-2，，4，，5，，7，-四溴- 4，5，6 , 7 -四氣-3 ’，6 ’ -二羥基二鈉鹽（紅色1 0 4號）及螺-[ 異苯并呋喃-1 ( 3 Η )， 9，- [ 9 Η ] D山]-3 -酮-4，5，6 , 7 -四氣-3 ’， 6二羥基_2’，4’，5’，7’-四碘二鉀鹽（紅色105號）等等。藍 色著色物質包括苯曱胺_(匕6112611611161；}1&113111111111111)、！'}-乙 基-Ν-[4-[[4-[乙基[(3 -疏苯基）曱基]胺基]苯基](2 -石黃酸 苯基）亞曱基]-2,5-環己二烯-1-丙啶（11^(^1^)]-3-磺酸 基氫氧化物内鹽二鈉鹽（藍色1號）、1 Η -吲°朵-5 -續酸、 2-(1,3 -二羥基-3-酮基-5-磺酸基- 2Η-吲哚-2-丙啶）-2,3-二氫-3 -酮基二鈉鹽等等。此等著色劑可為含鹵素著色劑或 非鹵素著色劑。由環境觀點來看，不含鹵素之著色劑為較 佳。此外，由於水溶性著色劑當殘留於孔洞部分中時可經 由以熱水洗蘇而移除，因而著色劑為水溶性著色劑較佳。 著色劑之量並無特殊之限制。潤滑劑樹脂組成物中之著色 劑的量為0 . 1至5重量％較佳。 無機顏料包括二氧化鈦等等。當然，可使用有機顏料及 無機顏料之混合物。此外，可使用已知之染料。 潤滑劑樹脂組成物及著色劑之組合並無特殊之限制。明 確言之，其例子包括（1 )其中潤滑劑樹脂為不溶於水之樹脂 12 312/發明說明書(補件)/93-04/93101839 1306369 及著色劑為水溶性或不溶於水之著色劑之方法，（2 )其中潤 滑劑樹脂為水溶性樹脂及著色劑為水溶性或不溶於水之著 色劑之方法，及（3 )其中潤滑劑樹脂為水溶性或不溶於水之 樹脂之混合物及著色劑為水溶性或不溶於水之著色劑之方 法。 底塗料樹脂及著色劑之組合並無特殊之限制。明確言 之，其例子包括（1)其中底塗料樹脂為不溶於水之樹脂及著 色劑為水溶性或不溶於水之著色劑之方法，（2 )其中底塗料 樹脂為水溶性樹脂及著色劑為水溶性或不溶於水之著色劑 之方法，（3 )其中底塗料樹脂為水溶性或不溶於水之樹脂之 混合物及著色劑為水溶性或不溶於水之著色劑之方法，及 (4 )其中底塗料樹脂之本身為有色樹脂之方法。 關於將潤滑劑樹脂組成物層形成於金屬箔上之潤滑劑 片材，由使用後之金屬箔之回收及再循環的觀點來看，水 溶性樹脂及水溶性著色劑之組合為較佳。在本發明，術語 「非函素」係指其中各氣之含量及溴之含量根據說明於 J P C A標準中之測量方法（J P C A - E S - 0 1 - 1 9 9 9 )分別為 0 _ 0 9 % ( 9 0 0 ρ ρ η])以下之化合物。 將以上之顏料或染料與濶滑劑樹脂組成物或底塗料樹 脂混合之方法可為已知之方法。關於顏料，使用具有微細 顆粒之顏料，及將顏料分散或溶解於潤滑劑樹脂組成物、 底塗料樹脂、溶劑或其類似物中。將染料溶解或分散於溶 劑及/或水中，然後將所得之溶液或分散液加至潤滑劑樹 脂組成物或底塗料樹脂。或者，將染料直接分散或溶解於 13 3丨2/發明說明書(補件)/93-04/93101839 1306369 潤滑劑樹脂組成物或底塗料樹脂中。 其上要形成潤滑劑樹脂組成物層之金屬箔可選自已知 之使用作為鑽孔用潤滑劑片材之金屬箔的金屬箔。明確言 之，可使用硬鋁、軟鋁、經退火之鋁、高純度鋁、鎳、銅 等等、及其合金。使用厚度50至5 0 0微米，更佳為80至 2 0 ◦微米之硬、軟或經退火鋁箔，或經由結合此等箔而製 得，且具50至5 0 0微米，更佳為80至2 0 0微米厚度的鋁 箔較佳。金屬箔可經底塗料處理作表面處理。此外，使用 表面經由已知之方法諸如物理或化學處理而具有0· 5至3 微米糙度之金屬箔較佳。 其上要形成潤滑劑樹脂組成物層之有機薄膜並無特殊 之限制，只要其係本身可模塑成薄膜之聚合化合物即可。 明確言之，其例子包括聚對苯二甲酸乙二酯、聚對苯二曱 酸丁二酯、聚丙烯、聚乙烯、聚醯胺、聚碳酸酯等等、及 此等聚合化合物之至少兩者的混合物。此等聚合化合物係 考慮时熱性、水溶解度、黏性、鑽孔加工性、操縱能力等 等視需要的孔洞加工步驟而視需要適當地選擇及使用。有 機薄膜之厚度為5 0至5 0 0微米較佳，8 0至2 0 0微米更佳。 有機薄膜之表面糙度如下，外凸部分之間之距離為1至50 微米，較佳為3至3 0微米。此外，深度方向中之糙度為 0. 5至1 5微米，較佳為1至3微米。潤滑劑樹脂組成物層 係形成於以上具有糙度之有機薄膜的至少一表面上。當有 機薄膜為透明時，很難區別潤滑劑薄膜的兩表面，因此分 別將不同的著色劑加至潤滑劑樹脂組成物層及有機薄膜。 14 312/發明說明書(補件)/93-04/93101839 1306369 由本發明所提供之其中包含於潤滑劑樹脂組成物層之 樹脂中之空氣泡之直徑為3 0微米以下之鑽孔用潤滑劑片 材係將潤滑劑樹脂組成物層形成於金屬箔之至少一表面上 之片材，單獨由潤滑劑.樹脂形成之片材，或將潤滑劑樹脂 組成物層形成於有機薄膜之至少一表面上之片材。 控制空氣泡大小之使用於本發明中之金屬箔或有機薄 膜可選自前述的金屬箔及有機薄膜。有機薄膜可經物理或 化學表面處理成具有糙度。表面處理係利用一般知曉的方 法諸如電漿處理、電暈處理、化學試劑處理或喷砂處理進 行。 本發明之鑽孔用潤滑劑片材需要包含於潤滑劑樹脂組 成物層中之空氣泡的直徑為3 0微米以下，及潤滑劑樹脂組 成物層不含具大於鑽錐直徑之1 / 1 0之直徑的空氣泡更 佳。當潤滑劑樹脂組成物層包含直徑大於3 0微米之空氣泡 或當空氣泡之直徑大於鑽錐直徑之1 / 1 0時，鑽錐易受到空 氣泡的影響而在鑽孔過程中滑動。在此情況，待堆疊之層 合物或塑膠板的數目愈大，則在下側之板中之孔洞的錯位 (n] i s r e g i s t r a t i ο η )變得愈大，以致孑L洞位置準確度減低。 所使用之鑽錐的直徑並無特殊之限制。然而，當鑽錐直徑 為3 0 0微米以下，或為1 5 0微米以下時，由於鑽錐薄，因 而鑽錐易彎曲。孔洞位置準確度僅由於鑽錐之些微彎曲即 大大減低。 將本發明之鑽孔用潤滑劑片材設置於層合物或塑膠板 之至少上表面上，及自潤滑劑片材之潤滑劑樹脂組成物層 15 312/發明說明書(補件)/93-04/93101839 1306369 側鑽孔。使用於以上鑽孔中之層合物或塑膠板並無特殊之 限制。明確言之，層合物或塑膠板之例子包括不具有銅箔 之層合物、單面或雙面銅面層合物、使用以上之銅面層合 物製得之多層板、銅面撓性片材、軟硬合板（r i g i d - f 1 e X board)、聚碳酸酯板、丙稀酸系板等等。 (發明效果） 根據本發明所提供之鑽孔用潤滑劑片材，可設置潤滑劑 片材，而不會錯誤辨識兩表面。關於使用水溶性樹脂之潤 滑劑片材，即使當樹脂黏著至孔洞壁時，亦可經由在後續 的步驟中以水洗滌，而容易地將樹脂移除。可製得具高工 業實用性之入口片材。 根據本發明所提供之有色鑽孔用潤滑劑片材，可容易地 區別其之兩表面，因此可防止由將潤滑劑片材放反所造成 的不良孔洞品質。 根據本發明所提供之將樹脂組成物層形成於具有糙度 之有機薄膜上之鑽孔用潤滑劑片材，鑽子斷裂速率大大地 改良，且可製得孔洞位置準確度等等優異的孔洞。 根據本發明所提供之控制空氣泡大小之鑽孔用潤滑劑 片材，可製得鑽孔位置準確度優異的孔洞。 (實施例） 本發明將參照以下之實施例及比較例作具體說明，其中 「份」代表「重量份數」。 (實施例1 ) 將1份不含鹵素之藍色水溶性染料（食用著色物質藍色1 16 312/發明說明書(補件)/93-04/93101839 1306369 號）加至3 5份具5 0 0 , 0 0 0之分子量的聚氧化乙烯及6 5份具 9 0 0之分子量的聚甘油單硬脂酸酯中。利用 合機在1 3 0 °C在氮氣密封下將其捏合1小時，而得具1 6 0，0 0 0泊（ρ 〇 i s e ) 黏度之混合物。使混合物通過在1 3 0 °C下之加熱輥，而製-得厚度0. 0 5毫米之藍色片材。 另外將1 0份於端基具有羥基及具2 0，0 0 0之分子量及 8 0 0泊之熔體黏度（在2 0 0 °C下）的飽和聚酯樹脂及3份二異 氰酸己二酯溶解於甲苯/甲基乙基酮=3 / 1之混合溶劑 中，而得具1 0重量％濃度之溶液。將溶液塗布至厚度1 0 0 微米之硬鋁箔的一表面，並將塗布溶液在1 0 0 °C下乾燥1 小時，而形成於鋁箔上具5微米厚度之底塗層。將以上之 藍色片材置於鋁箔之底塗層上，及利用加熱輥將片材及鋁 箔加壓及整合，而製得其中一表面為藍色之鑽孔用潤滑劑 片材（其之兩表面可明顯地區別）。然後堆疊兩1 . 6毫米厚 之雙順丁烯二醯亞胺-氰酸酯樹脂（B T樹脂）型銅面六層 板。將以上之潤滑劑片材設置於堆疊板之上表面上，使潤 滑劑片材之樹脂組成物層面向上，及將1 . 6毫米厚之紙盼 層合物設置於堆疊六層板之下表面上。利用在每分鐘 1 5 0，0 0 0轉（1 5 0，0 0 0 r p m )在2 5微米/轉之進給速度旋轉 下之具0 . 2 5毫米Φ鑽錐直徑之鑽子製作孔洞。評估孔洞。 表1顯示其結果。 (實施例2 ) 將1 0份作為潤滑劑之聚乙二醇加至2 0 0份之聚乙烯縮 醛樹脂、4 0 0份之環氧樹脂及4 0 0份之酚樹脂中，及將2 17 3丨2/發明說明書(補件)/93-04/93101839 1306369 份作為著色劑之食用著色物質黃色5號加至混合物中，而 製得熱固性樹脂組成物。將熱固性樹脂組成物黏合至厚度 1 0 0微米之硬鋁箔（表面糙度平均1 . 6微米，最大2 . 7微米） 的一表面，而製得具有厚度1 0 0微米之樹脂組成物層的鑽 孔用潤滑劑片材（潤滑劑片材之兩表面可明顯地作區別）。 然後堆疊兩1 . 6毫米厚之玻璃環氧銅面六層板。將以上之 潤滑劑片材設置於堆疊板之上表面上，使潤滑劑片材之樹 脂組成物層面向上，及將1 . 5毫米厚之紙基材料紛樹脂層 合物設置於堆疊六層板之下表面上。利用在每分鐘8 0 , 0 0 0 轉在2 0微米/轉之進給速度旋轉下之具0 . 3毫米Φ鑽錐 直徑之鑽子製作孔洞。評估孔洞。表1顯示其結果。 (比較例1及2 ) 以與實施例1及2相同之方式製備鑽孔用潤滑劑片材， 除了未使用實施例1及2中所使用之著色劑。將各潤滑劑 片材分別設置於兩堆疊銅面六層板之上表面上，使潤滑劑 片材之鋁箔側面向上。以與實施例1及2相同之條件製作 孔洞。表1顯示評估結果。 (比較例3 ) 在與實施例1相同之條件下製作孔洞，除了未使用實施 例1中所使用之鑽孔用潤滑劑片材。表1顯示評估結果。 (比較例4 ) 在與實施例1相同之條件下製作孔洞，除了以鋁箔取代實 施例1中所使用之鑽孔用潤滑劑片材。表1顯示評估結果。 18 312/發明說明書(補件)/93-04/93101839 1306369 (表1 ) 項目 實施例 比較例 1 2 1 2 3 4 暈圈（um) 上表面 131 147 222 267 491 450 下表面 110 129 165 212 400 383 污點 2，0 0 0擊 平均 9. 9 9. 4 9. 0 8. 7 8. 4 8.5 最小 (9. 4) (8. 8) (8. 5) (8. 0) (7. 3) (7. 7) 5，0 0 0擊 平均 9.3 8.9 8. 4 8. 3 7. 7 8. 0 最小 (8. 6) (8. 2) (7. 8) (7. 5) (6. 5) (7. 0) 孔洞位置準確度 (最大μπ〇 27 20 67 69 75 71 孔洞壁之糙度（最 大 μπι) 8 13 12 17 29 27 〈測量方法〉 1 )暈圈：於六層板中鑽孔3 , 0 0 0擊，然後將六層板於2 5 °C下之4 N - H C 1中浸泡5分鐘。測量内層之黑色氧化物部分 中之暈圈的最大距離。 2 )污點：分別鑽孔2 , 0 0 0擊及5，0 0 0擊，觀察經鑽孔 2，0 0 0擊之1 0個孔洞及經鑽孔5，0 0 0擊之1 0個孔洞的截 面，及評估污點的產生狀態。當未發現污點時給1 0分，及 當全部發現污點時給0分。 3 )孔洞位置準確度及孔洞壁之糙度：於在兩堆疊六層板 中鑽孔3 , 0 0 0擊後，測量在兩堆疊六層板之下方板之背面 中之孔洞位置之導引位置與鑽孔位置之間的錯位。顯示最 大值。此外，關於孔洞壁之糙度，測量經鑽孔3，0 0 0擊之 1 0個孔洞的壁糙度，及顯示最大值。 (實施例3 ) 利用捏合機在1 3 Ot在氮氣密封下將3 5份具5 0 0，0 0 0之 19 312/發明說明書(補件)/93-04/9310 ] 839 1306369 分子量的聚氧化乙烯及6 5份具9 0 0之分子量的聚甘油單硬 脂酸酯捏合1小時，而得具1 6 0，0 0 0泊黏度之混合物。使 混合物通過在1 3 0 °C下之加熱輥，而製得厚度〇 . 〇 5毫米之 片材。 另外將1 0份於端基具有羥基及具2 0，0 0 0之分子量及 8 0 0泊之熔體黏度（在2 0 0 °C下）的飽和聚酯樹脂及3份二異 氰酸己二酯溶解於曱苯/曱基乙基酮=3 / 1之混合溶劑 中，而得具1 0重量％濃度之溶液。將3份不含i素之藍色 顏料（酞青素藍）加至溶液，及將藍色顏料均勻溶解及混合 於溶液中。將所得之溶液塗布至厚度1 0 0微米之硬鋁箔的 一表面，及將塗布溶液在1 0 0 °C下乾燥1小時，而形成厚 度5微米之底塗層。將以上製得之片材置於鋁箔之底塗層 上，及利用加熱輥將片材及鋁箔加壓及整合，而製得其中 一表面為藍色之鑽孔用潤滑劑片材（其之兩表面可明顯地 區別）。然後堆疊三個0 . 4毫米厚之B T樹脂銅面層合物。 將潤滑劑片材設置於堆疊層合物之上表面上，使潤滑劑片 材之樹脂組成物層面向上，及將1 . 5毫米厚之紙紛層合物 設置於堆疊層合物之下表面上。利用在每分鐘1 6 0，0 0 0轉 在1 5微米/轉之進給速度旋轉下之具0 . 1 5毫米Φ鑽錐直 徑之鑽子製作孔洞。評估孔洞。表2顯示其結果。 (實施例4 ) 將2份紅色之非鹵素著色劑（食用紅色2號）加至1 0 0份 之水溶性聚胺基曱酸酯樹脂中，而得樹脂組成物。將樹脂 組成物塗布至厚度1 0 0微米之硬鋁箔（表面糙度平均1 . 6 20 312/發明說明書(補件)/93-04/93101839 1306369 微米，最大2 . 7微米）的一表面，而形成厚度1 0微米之樹 脂組成物層。將於實施例3中製得之片材置於鋁箔之樹脂 組成物層上，及經由層合使片材與鋁箔彼此黏合以將其整 合，由此製備得鑽孔用潤滑劑片材（其之兩表面可明顯地區 別）。將製得之潤滑劑片材與實施例3類似地使用於製作孔 洞。評估孔洞。表2顯示評估結果。 (比較例5及6 ) 以與實施例3及4相同之方式製備鑽孔用潤滑劑片材， 除了未使用實施例3及4中所使用之著色劑。將各潤滑劑 片材分別設置於三個堆疊銅面層合物之上表面上，使潤滑 劑片材之鋁箔側面向上。以與實施例3及4相同之條件製 作孔洞。表2顯示評估結果。 (比較例4 ) 在與實施例3相同之條件下製作孔洞，除了以鋁箔取代 實施例3中所使用之鑽孔用潤滑劑片材。表2顯示評估結 果。 (表2) 項目 實施例 比較例 3 4 5 6 7 毛刺（μ m ) 2 2 11 12 3 孔洞位置準確度 (AVG+3a) (最大 M m ) 2 5 27 5 1 55 62 2 7 29 7 7 72 7 5 孔洞壁之糙度（最 大 μ m ) 7 6 14 17 2 9 〈孔洞位置準確度之測量方法〉 關於在三個堆疊層合物之最下方層合物之背面中之 1 5，0 0 0個孔洞（3，0 0 0擊X 5 )，測量在指向座標與各孔洞 21 312/發明說明書(補件)/93-04/93101839 1306369 位置之間的錯位。顯示其之平均值+ 3 σ及最大值。 (實施例5 ) 利用捏合機在1 3 0 °C在氮氣密封下將3 5份具5 0 0，0 0 0之 分子量的聚氧化乙烯及6 5份具9 0 0之分子量的聚甘油單硬 脂酸酯及2份作為著色劑之食用著色物質藍色1號捏合1 小時，而得具1 6 0，0 0 0泊黏度之混合物。使混合物通過在 1 3 0 °C下之加熱輥，而製得厚度0 . 0 5毫米之藍色片材。 另外經由噴砂處理厚度1 0 0微米之聚對苯二曱酸乙二酯 薄膜的兩表面，以致表面各具有1至4微米之糙度及20-30 微米之在外凸部分之間的距離。將以上之藍色片材置於聚 對苯二曱酸乙二酯薄膜之一表面上，及利用加熱輥將其加 壓及整合，而製得其中一表面為藍色之鑽孔用潤滑劑片 材。然後堆疊三個0 . 2毫米厚之B T樹脂銅面層合物。將潤 滑劑片材設置於堆疊層合物之上表面上，使潤滑劑片材之 樹脂組成物層面向上，及將1 . 5毫米厚之，紙酿·層合物設置 於堆疊層合物之下表面上。利用在每分鐘160 ,000轉在7.5 微米/轉之進給速度旋轉下之具7 5微米Φ鑽錐直徑之鑽 子製作孔洞。然後利用6 0 °C熱水在高壓下洗滌孔洞。定性 分析孔洞之内側，而發現沒有水溶性樹脂殘留於孔洞之内 側。評估孔洞。表3顯示其結果。 (比較例8 ) 重複實施例5，除了以具有6 0 - 8 0微米之在外凸部分之 間之距離的薄膜取代實施例5中所使用之具有2 0 - 3 0微米 之在外凸部分之間之距離的薄膜。表3顯示評估結果。 22 3丨2/發明說明書(補件)/93-04/93101839 1306369 (比較例9 ) 重複實施例5，除了以厚度1 0 0微米之硬鋁箔取代實施 例5中所使用之薄膜。表3顯示評估結果。 (比較例1 0 ) 重複實施例5，除了以厚度1 0 0微米之聚對苯二曱酸乙 二酯薄膜取代實施例5中所使用之鑽孔用潤滑劑片材。表 3顯示評估結果。 (表3) 項目 實施例 比較 (列 5 8 9 10 鑽子之斷裂（3, 000擊， n = 5) 無 無 5 / 5斷裂 2/5斷裂 孔洞位置準確度 (最大μ m) 20 25 — 28 孔洞壁之糙度（最大μ m) 5 6 - 10 〈孔洞位置準確度之測量方法〉 關於在三個堆疊層合物之最下方層合物之背面中之 1 5，0 0 0個孔洞（3，0 0 0擊X 5 )，測量在指向座標與各孔洞 位置之間的錯位。顯示其之最大值。 (實施例6 ) 將1份不含鹵素之藍色水溶性染料（食用著色物質藍色1 號）加至3 5份具5 0 0，0 0 0之分子量的聚氧化乙烯及6 5份具 9 0 0之分子量的聚甘油單硬脂酸酯。利用捏合機在1 3 0 °C在 氮氣密封下將其捏合1小時，而得具1 6 0，0 0 0泊黏度之混 合物。使混合物通過在1 3 0 °C下之加熱輥，而製得厚度0 . 0 5 毫米之藍色片材。 另外將1 0份於端基具有羥基及具2 0，0 0 0之分子量及 23 31刀發明說明書(補件)/93-04/93】0] 839 1306369 8 0 0泊之熔體黏度（在2 ◦◦ °C下）的飽和聚酷樹月旨及3份 氰酸己二酯溶解於曱苯/曱基乙基酮=3 / 1之混合溶劑 中，而得具1 0重量％濃度之溶液。將溶液塗布至厚度 微米之硬鋁箔的一表面，及將塗布溶液在1 0 0 °C下乾 小時，而形成厚度5微米之底塗層。將以上之片材置 箔之底塗層上，及利用加熱輥將片材及鋁箔加壓及整 而製得其中一表面為藍色之鑽孔用潤滑劑片材。潤滑 脂層中之空氣泡的最大直徑為9微米。然後堆疊三個 毫米厚之B T樹脂銅面六’層板。將调滑劑片材設置於堆 之上表面上，使湖滑劑片材之樹脂組成物層面向上， 1 . 6毫米厚之紙酚層合物設置於堆疊六層板之下表面 利用在每分鐘1 6 0 , 0 0 0轉在1 5微米/轉之進給速度旋 之具1 5 0微米Φ鑽錐直徑之鑽子製作孔洞。評估孔洞 4顯示其結果。 (比較例1 1 ) 重複實施例6，除了以其中空氣泡之最大直徑為7 0 之潤滑劑樹脂組成物層取代實施例6中所使用之其中 泡之最大直徑為9微米之潤滑劑樹脂組成物層。表4 評估結果。 (比較例1 2 ) 在與實施例6相同之條件下製作孔洞，除了以鋁箔 實施例6中所使用之鑽孔用潤滑劑片材。表4顯示評 果。 312/發明說明書(補件)/93-04/93 ] 01839 二異 I 10 0 燥1 於鋁 合， 劑樹 0. 4 疊板 及將 上。 轉下 。表 微米 空氣 顯示 取代 估結 24 1306369 (表4) 項目 實施例 比較例 6 11 1 2 孔洞位置準確度（μ m ) (AVG+3a) 29 42 38 (最大） 35 6 3 78 〈測量方法〉 關於在三個堆疊層合物之最下方層合物之背面中之 1 5，0 0 0個孔洞（3 , 0 0 0擊X 5 )，測量在指向座標與各孔洞 位置之間的錯位。顯示其之平均值+ 3 σ及最大值。 25 312/發明說明書(補件)/93-04/931018391306369 发明, the invention description: [Technical Field] The present invention relates to a lubricant sheet for drilling which is provided on the surface of a laminate or a plastic sheet when a hole is formed in a laminate or a plastic sheet. And a drilling method using the above lubricant sheet for drilling. The perforation obtained by using the above-described lubricant sheet for drilling in the manufacture of a printed wiring board is mainly suitable for use as a printed wiring board such as a semiconductor plastic package or a main board L (t h r 〇 u g h hole). Further, the lubricant sheet for drilling provided by the present invention can be applied to other precision drilling applications, for example, the application of a hard plastic plate such as a lens for drilling a lens. [Prior Art] A conventional aluminum sheet is used as an inlet sheet for drilling a laminate used for a printed wiring board using a metal drill. In recent years, in high-density printed wiring boards used in semiconductor plastic packages or the like, the diameter of the via holes has become smaller and smaller, and has 0. A printed wiring board having a minimum through-hole diameter of 1 mm or less is gradually increased. When the small-diameter hole is made of the aluminum inlet sheet alone, there is a problem that the life of the drill is short, the roughness of the hole wall is large, and the hole position accuracy is poor. Therefore, the lubricant sheet for drilling prepared by forming a lubricant resin layer on one surface of a metal foil such as aluminum is used to extend the life of the drill, improve the hole position accuracy, and improve the roughness of the hole wall. . For example, the J P - A _ 5 - 1 6 9 4 0 0 announcement proposes a thickness that can be 0 to 1 to 3 . A lubricant sheet in which a 0 mm lubricant resin composition layer is formed on one surface of a metal foil. The hue of the above lubricant resin composition layer is a natural color. Therefore, when the thickness of the lubricant resin layer 312 / invention specification (supplement) / 93-04 / 93101839 1306369 degrees, it is difficult to distinguish the two surfaces of the lubricant sheet, so it is difficult to determine which surface should be laminated Object or plastic plate contact. The above difficulties may cause problems such as incorrectly reversing the lubricant sheet or reducing the quality of the hole. In addition, when using small diameter drills, especially diameter 〇. When the drill is 1 mm or less, the problem that the drill is easily broken and the hole position accuracy becomes insufficient depending on the size of the air bubbles existing in the lubricant resin composition layer may occur. SUMMARY OF THE INVENTION An object of the present invention is to provide a lubricant sheet which overcomes the problem of poor void quality caused by erroneous reversal of a lubricant sheet. Another object of the present invention is to provide a lubricant sheet which prevents any breakage of the drill when a small diameter drill is used. A further object of the present invention is to provide a lubricant sheet which overcomes the problem of insufficient hole position accuracy caused by minute air bubbles present in the resin of the lubricant sheet. According to the present invention, there is provided a lubricant sheet for drilling, comprising a metal foil or an organic film, and a lubricant resin composition layer or a primer layer and a lubricant resin composition layer, the lubricant resin composition layer or bottom The coating and the lubricant resin composition layer are formed on at least one surface of the metal foil or the organic film, wherein at least one of the undercoat layer and the lubricant resin composition layer contains a colorant. Further, according to the present invention, there is provided a lubricant sheet for drilling according to the above lubricant sheet, wherein the organic film has a roughness of from 0.5 to 15 μm on one surface thereof, and is outside the roughness The distance between the convex portions is from 1 to 50 microns. 312 / Invention specification (supplement) / 93-04 / 93101839 1306369 Furthermore, according to the present invention, there is provided a method of drilling a laminate or a plastic sheet, the method comprising disposing a lubricant sheet for drilling into a layer The compound or the plastic plate, and the side of the lubricant resin composition layer are drilled. Further, according to the present invention, there is provided a lubricant sheet formed of a lubricant resin composition, the sheet being suitable for drilling a laminate or a plastic sheet, wherein the air bubbles contained in the lubricant sheet It has a diameter of less than 30 microns. [Embodiment] In the present invention, the term "laminate" means a plastic sheet having an insulating layer for a printing plate, and the above terms include a plastic sheet further having a conductor layer in addition to the insulating layer. The term "plastic plate" means a plate member formed of a composition containing an organic polymer compound as a main component, and includes a plate member having a glass substrate or an inorganic filler. The lubricant sheet for drilling obtained by forming a lubricant resin composition layer or a primer layer and a lubricant resin composition layer on at least one surface of a metal foil or an organic film, the present invention passes the coloring agent Preferably, the non-halogen colorant is added to at least one of the undercoat layer and the lubricant resin layer, so that the two surfaces of the lubricant sheet are clearly distinguishable from each other, and therefore, the present invention prevents lubrication during drilling The dosage sheet is misplaced. In addition, the addition of a non-halogen colorant provides an environmentally friendly lubricant sheet for drilling. Further, it is preferred to use a water-soluble resin in the lubricant resin composition, since the lubricant resin composition can be easily removed when it is adhered to a laminate or a plastic plate. In this case, it is also preferred to use a water-soluble colorant as a colorant. Further, a lubricant resin composition layer or a primer layer and a lubricant tree 7 312 / invention specification (supplement) / 93-04/93101839 1306369 fat composition layer are formed on at least one surface of the organic film. The lubricant sheet, the present invention provides an organic film having a predetermined size of roughness to prevent any breakage of the drill and improve the accuracy of the hole position. Further, the present invention remarkably improves the hole position accuracy by controlling the size of the air bubbles contained in the lubricant resin composition layer of the lubricant sheet. The lubricant resin composition used in the lubricant sheet of the present invention may be selected from a resin composition of a known resin composition for a lubricant sheet for drilling. Examples thereof include water-soluble resins, thermoplastic resins, thermosetting resins, and lubricants and mixtures of any of these resins and the like. They can be used singly or in combination. It is preferred to use a lubricant resin composition containing a water-soluble resin as a main component. The above water-soluble resin can be easily removed by washing with hot water when it remains in the perforation during the drilling process, so that a hole having excellent reliability can be obtained. Various additives can be added to the lubricant resin composition. For example, various organic or inorganic fillers may be added as needed for the application. Preferable examples of the water-soluble resin used in the lubricant resin composition of the present invention include polyethylene oxide, polypropylene glycol, polypropylene oxide, polyvinyl alcohol, sodium polyacrylate, polypropylene decylamine, polyvinylpyrrolidone. , carboxymethyl cellulose, polybutylene glycol, polyether ester, etc. They can be used singly or in combination. Preferable examples of the thermoplastic resin used in the lubricant resin composition of the present invention include polyethylene, polypropylene, polystyrene, polyester, polyethylene terephthalate, polyamine, polycarbonate, Polysulfone, polyethersulfone, polyallyl ester, polyetheretherketone, polyphenylene sulfide, and the like. These thermoplastic resins can be used alone or in combination with the invention instructions (supplements) / 93-04/93101839 1306369. Preferable examples of the thermosetting resin used in the lubricant resin composition of the present invention include a phenol resin, an epoxy resin, a melamine resin, a urea resin, an acrylic resin, an unsaturated polyester resin, a polyamino phthalate resin, Alkyd resin, polyoxyn epoxide resin, cyanate resin, maleimide resin, and the like. These thermosetting resins may be used singly or in combination. Preferable examples of the water-soluble lubricant used in the lubricant resin composition of the present invention include polyoxyethylene ethyl ether such as polyethylene glycol, polyoxyethylidene ether, polyoxyethyl ether Wax ether, polyoxyethylene ethyl stearyl ether, polyoxyethylene ethyl lauryl ether, polyoxyethylene ethyl dodecyl ether, polyoxyethylidene ether and polyoxyethyl octyl phenyl Ether, polyoxyethyl ester such as polyoxyethylidene monolaurate, polyoxyethylidene monostearate and polyoxyethylidene monooleate, polyoxyethyl sorbitan The unit ester, polyglycerol monostearate such as hexaglycerol monostearate and decaglyceryl monostearate, polyoxyethylidene propyl block polymer and the like. They can be used singly or in combination. Examples of the water-soluble lubricant used in the lubricant resin composition of the present invention include guanamine compounds such as ethylbisstearylamine, decyl oleate, decylamine stearate and fluorenylene sulfonate. Amines, fatty acid compounds such as lauric acid, stearic acid, palmitic acid and oleic acid, fatty acid ester compounds such as butyl stearate, butyl oleate and ethylene glycol laurate, aliphatic hydrocarbon compounds such as liquid paraffin and poly Ethylene wax, and high carbon aliphatic alcohols such as oleyl alcohol and the like. They can be used singly or in combination. The hole for the drilling of the above lubricant resin composition is formed by forming a layer of the lubricant composition 9 312 / invention specification (supplement) / 93-04/93101839 1306369 slip resin composition layer on a metal foil or an organic film. The method of the lubricant sheet is not particularly limited. The above method can be selected from generally known methods. For example, the lubricant resin composition may be kneaded by using a kneader or the like at a high temperature without using a solvent, the kneaded resin composition may be extruded to prepare a sheet, and the sheet may be pressed against a metal foil or organic. a method for producing a lubricant for drilling a hole on a film; and dissolving the lubricant resin composition in a solvent or water to prepare a coating composition, applying the coating composition to the surface of the metal foil or the organic film, and A method in which the coated coating composition is dried to obtain a lubricant sheet for drilling. The thickness of the lubricant resin composition layer is not particularly limited, but it is preferably from 5 to 100 μm. The lubricant resin composition layer may be formed on each surface of the metal foil or the organic film. For example, when a resin layer is formed on both surfaces of the metal foil, a hard resin for preventing burrs is provided on the surface of the material side as the drill target, and a soft resin containing a lubricant is set as a drill On the other side of the child side. In this way, the resin on both surfaces can be made to play different roles. The difference between the two surfaces is especially important when using the above types of lubricant sheets. When the adhesion between the metal foil or the organic film and the lubricant resin composition is insufficient, it is generally formed of a thermosetting resin or a thermoplastic resin, and has a value of 0. An undercoat layer having a thickness of 5 to 15 μm is formed on the surface of the metal foil or the organic film to improve the adhesion strength. The method of forming the undercoat layer on the surface of the metal foil or the organic film is not particularly limited. It can be selected from known methods. For example, a coating composition obtained without a solvent or a coating composition obtained by dissolving a primer resin in a solvent may be applied to the metal foil 10 312 / invention specification (supplement) /93-04/93丨01839 1306369 or an organic film surface, and a method of drying it to form an undercoat layer; or a method of directly spraying the above coating composition onto a surface of a metal foil or an organic film. In the present invention, when the lubricant sheet has an undercoat layer, it is preferred to add a colorant to the undercoat layer so that the two surfaces of the lubricant sheet are significantly different. In this case, a coloring agent may also be added to the lubricant resin layer formed on the undercoat layer. The coloring agent used in the present invention may be selected from generally known organic and inorganic pigments and organic and inorganic dyes. Specifically, organic pigments include azo pigments such as 1 akered, Hansa Yellow (hansaye 1 1 〇w ), /3 - naphthene, naphthalene AS, benzoximedine, double Nitrogen yellow and ° ratio n-ketone, ugly, quinone, ketone, sputum, sputum, sulphur blue, onion scallions (anthanthr ο ne ), isoporphyrin, isoindolinone , indanthrene, quinophtharone 'metal complex, 0 ratio slightly 0 to 0, S too green, copper S too blue, nickel blue, Ming Di blue, blue, sky Blue (skyblue), iron blue, ultramarine blue, indigo, monoazo yellow, benzimidazolone yellow and onion yellow. These colorants can be used alone or in combination to achieve the desired hue. The organic dye is preferably a food coloring matter. Most edible coloring matters are water-soluble and have extremely low toxicity, and therefore it is preferable to use an edible coloring matter from such characteristics. Specifically, the edible coloring matter includes a yellow coloring matter, a red coloring matter, and a blue coloring matter. The yellow coloring matter includes 111-° azole-3-carboxylic acid, 4,5-dihydro-5-oxo-1-(4-indolyl)-4-[(4- sulphate)azo] Sodium salt (yellow No. 4), 2-naphthoic acid, 6-carbamic-5-[(4-sulfonyl)azo]disodium salt (yellow No. 5) and the like. Red coloring substances include 2,7_Qin dilithenic acid, 3-carbyl _4-[(4_ 酸 酸 秦) even 11 312 / invention specification (supplement) / 93-04/93101839 1306369 nitrogen base] Trisodium salt (red 2), spiro-[isobenzofuran-1 (3 Η), 9 '- [ 9 Η ] ketone]-3 -keto-3,6,-dihydroxy-2, 4,5,,7,-tetraiododisodium salt (red No. 3), 6-hydroxy-5-[(2-methoxy-5-methyl-4-sulfonic acid phenyl)azo] -2 - naphthalenesulfonic acid disodium salt (red 40), 1,3 -naphthalene disulfonic acid, 7-hydroxy-8 - [(4-sulfonyl-1 -naphthalene)azo]trisodium salt (red 1 0 2), spiro-[isobenzofuran-1 ( 3 Η ), 9 ' - [ 9 Η ] ϋ山]-3 -keto-2,,4,,5,,7,-four Bromo-4,5,6,7-tetraki-3',6'-dihydroxy disodium salt (red 104) and spiro-[isobenzofuran-1 (3 Η), 9,- [ 9 Η ] D 山]-3 -keto-4,5,6 , 7 -tetragas-3 ', 6 dihydroxy 2',4',5',7'-tetraiododipotassium salt (red 105 )and many more. Blue coloring matter includes benzoguanamine _ (匕6112611611161;}1&113111111111111),! '}-Ethyl-hydrazine-[4-[[4-[ethyl[(3-phenylene)]]]]]]]]]]]]]] , 5-cyclohexadiene-1-propanidine (11^(^1^)]-3-sulfonic acid hydroxide inner salt disodium salt (blue No. 1), 1 Η -吲°朵-5 - continued acid, 2-(1,3-dihydroxy-3-keto-5-sulfonate-2Η-indol-2-propanyl)-2,3-dihydro-3-keto disodium salt Etc. These colorants may be halogen-containing colorants or non-halogen colorants. From a environmental standpoint, halogen-free colorants are preferred. Further, since the water-soluble colorant may remain in the pore portion, The coloring agent is preferably a water-soluble coloring agent which is removed by washing with hot water. The amount of the coloring agent is not particularly limited. The amount of the coloring agent in the lubricant resin composition is 0. From 1 to 5% by weight is preferred. Inorganic pigments include titanium dioxide and the like. Of course, a mixture of an organic pigment and an inorganic pigment can be used. Further, known dyes can be used. The combination of the lubricant resin composition and the coloring agent is not particularly limited. Specifically, examples thereof include (1) wherein the lubricant resin is a water-insoluble resin 12 312 / invention specification (supplement) / 93-04/93101839 1306369 and the coloring agent is a water-soluble or water-insoluble coloring agent. The method, (2) wherein the lubricant resin is a water-soluble resin and the coloring agent is a water-soluble or water-insoluble coloring agent, and (3) the lubricant resin is a water-soluble or water-insoluble resin mixture and coloring The agent is a method of water-soluble or water-insoluble coloring agent. The combination of the primer resin and the coloring agent is not particularly limited. Specifically, examples thereof include (1) a method in which a primer resin is a water-insoluble resin and a coloring agent is a water-soluble or water-insoluble coloring agent, and (2) a primer resin is a water-soluble resin and a coloring agent. a method of water-soluble or water-insoluble coloring agent, (3) a method in which a primer resin is a water-soluble or water-insoluble resin mixture and a coloring agent is a water-soluble or water-insoluble coloring agent, and (4) A method in which the primer resin itself is a colored resin. The lubricant sheet in which the lubricant resin composition layer is formed on the metal foil is preferably a combination of a water-soluble resin and a water-soluble colorant from the viewpoint of recovery and recycling of the metal foil after use. In the present invention, the term "non-fossil" means that the content of each gas and the content of bromine are 0 _ 0 9 % according to the measurement method described in the JPCA standard (JPCA - ES - 0 1 - 19 9 9 ), respectively. (9 0 0 ρ ρ η]) The following compounds. A method of mixing the above pigment or dye with a lubricant resin composition or a primer resin can be a known method. As the pigment, a pigment having fine particles is used, and the pigment is dispersed or dissolved in a lubricant resin composition, a primer resin, a solvent or the like. The dye is dissolved or dispersed in a solvent and/or water, and the resulting solution or dispersion is then added to the lubricant resin composition or the primer resin. Alternatively, the dye may be directly dispersed or dissolved in a lubricant resin composition or a primer resin of 13 3丨2/invention specification (supplement)/93-04/93101839 1306369. The metal foil on which the lubricant resin composition layer is to be formed may be selected from metal foils known as metal foils for use as a lubricant sheet for drilling. Specifically, hard aluminum, soft aluminum, annealed aluminum, high purity aluminum, nickel, copper, and the like, and alloys thereof can be used. A hard, soft or annealed aluminum foil having a thickness of 50 to 500 μm, more preferably 80 to 20 μm, or a combination of such foils, and having a thickness of 50 to 500 μm, more preferably 80 Aluminum foil having a thickness of 200 μm is preferred. The metal foil can be surface treated by a primer treatment. Further, it is preferable to use a metal foil having a surface roughness of 0.5 to 3 μm by a known method such as physical or chemical treatment. The organic film on which the lubricant resin composition layer is to be formed is not particularly limited as long as it can be molded into a film-forming polymer compound. Specifically, examples thereof include polyethylene terephthalate, polybutylene terephthalate, polypropylene, polyethylene, polyamine, polycarbonate, and the like, and at least two of these polymeric compounds. a mixture of people. These polymeric compounds are appropriately selected and used as needed in consideration of the heat processing, water solubility, viscosity, drilling processability, handling ability, and the like, as needed. The thickness of the organic film is preferably from 50 to 500 μm, more preferably from 80 to 200 μm. The surface roughness of the organic film is as follows, and the distance between the convex portions is 1 to 50 μm, preferably 3 to 30 μm. In addition, the roughness in the depth direction is 0. 5 to 15 μm, preferably 1 to 3 μm. The lubricant resin composition layer is formed on at least one surface of the above organic film having roughness. When the organic film is transparent, it is difficult to distinguish both surfaces of the lubricant film, so that different coloring agents are added to the lubricant resin composition layer and the organic film, respectively. 14 312 / Inventive specification (supplement) /93-04/93101839 1306369 A lubricant sheet for drilling having a diameter of 30 μm or less of air bubbles contained in a resin of a lubricant resin composition layer provided by the present invention A sheet of a lubricant resin composition layer formed on at least one surface of a metal foil, separately from a lubricant. A sheet formed of a resin or a sheet in which a lubricant resin composition layer is formed on at least one surface of the organic film. The metal foil or organic film used in the present invention for controlling the size of the air bubbles may be selected from the foregoing metal foils and organic films. The organic film can be treated to have a roughness by physical or chemical surface treatment. The surface treatment is carried out by a generally known method such as plasma treatment, corona treatment, chemical treatment or sand blasting. The lubricant sheet for drilling of the present invention requires that the diameter of the air bubbles contained in the lubricant resin composition layer be 30 μm or less, and the lubricant resin composition layer does not contain 1 / 1 0 which is larger than the diameter of the drill cone. The air bubble of the diameter is better. When the lubricant resin composition layer contains air bubbles having a diameter larger than 30 μm or when the diameter of the air bubbles is larger than 1 / 10 of the diameter of the drill cone, the drill cone is susceptible to air bubbles and slides during drilling. In this case, the larger the number of layers or plastic sheets to be stacked, the larger the misalignment (n] i s r e g i s t r a t i ο η ) of the holes in the lower plate becomes, so that the position accuracy of the 孑L holes is reduced. The diameter of the drill cone used is not particularly limited. However, when the diameter of the drill cone is less than 300 μm or less than 150 μm, the drill cone is easily bent because of the thin drill cone. The hole position accuracy is greatly reduced only by the slight curvature of the drill cone. The lubricant sheet for drilling of the present invention is disposed on at least the upper surface of the laminate or the plastic sheet, and the lubricant resin composition layer 15312 from the lubricant sheet/invention specification (supplement)/93- 04/93101839 1306369 Side drilling. The laminate or plastic sheet used in the above drilling is not particularly limited. Specifically, examples of the laminate or the plastic sheet include a laminate having no copper foil, a single-sided or double-sided copper laminate, a multilayer board obtained by using the above copper laminate, and a copper surface scratch Sheets, rigid-f 1 e X board, polycarbonate sheets, acrylic sheets, etc. (Effect of the Invention) According to the lubricant sheet for drilling provided by the present invention, a lubricant sheet can be provided without erroneously recognizing both surfaces. Regarding the lubricant sheet using the water-soluble resin, even when the resin is adhered to the wall of the hole, the resin can be easily removed by washing with water in a subsequent step. It can produce imported sheet with high industrial applicability. According to the lubricant sheet for colored drilling provided by the present invention, the two surfaces can be easily distinguished, so that the quality of the defective hole caused by the reversal of the lubricant sheet can be prevented. According to the lubricant sheet for drilling of the resin composition layer formed on the organic film having roughness, the fracture rate of the drill is greatly improved, and the hole having excellent hole position accuracy and the like can be obtained. . According to the sheet for drilling a lubricant for controlling the size of an air bubble provided by the present invention, a hole having excellent drilling position accuracy can be obtained. (Examples) The present invention will be specifically described with reference to the following examples and comparative examples, in which "parts" represent "parts by weight". (Example 1) 1 part of a halogen-free blue water-soluble dye (food coloring matter blue 1 16 312 / invention specification (supplement) / 93-04/93101839 1306369) was added to 35 parts with 5 0 Polyethylene oxide having a molecular weight of 0,0 0 0 and 65 parts of polyglycerol monostearate having a molecular weight of 900. The mixture was kneaded at 130 ° C under a nitrogen atmosphere for 1 hour by using a combined machine to obtain a mixture having a viscosity of 1,600,0 0 poise (ρ 〇 i s e ). The mixture was passed through a heating roller at 130 ° C to obtain a thickness of 0. 0 5 mm blue sheet. In addition, 10 parts of a saturated polyester resin having a hydroxyl group at the terminal group and a molecular weight of 20,0 0 and a melt viscosity of 80 poise (at 200 ° C) and 3 parts of diisocyanate are added. The hexamethylene diester was dissolved in a mixed solvent of toluene/methyl ethyl ketone = 3 / 1, and a solution having a concentration of 10% by weight was obtained. The solution was applied to a surface of a hard aluminum foil having a thickness of 100 μm, and the coating solution was dried at 100 ° C for 1 hour to form an undercoat layer having a thickness of 5 μm on the aluminum foil. The above blue sheet is placed on the undercoat layer of the aluminum foil, and the sheet and the aluminum foil are pressed and integrated by a heating roller to obtain a lubricant sheet for drilling a hole having a blue surface (the The two surfaces can be clearly distinguished). Then stack two 1s. 6 mm thick bis-butylene imino-cyanate resin (B T resin) type copper six-layer board. The above lubricant sheet is placed on the upper surface of the stacking plate so that the resin composition layer of the lubricant sheet is upward, and will be 1 . The 6 mm thick paper is expected to be placed on the lower surface of the stacked six-layer board. Use a rotation of 1 5 0,0 0 rpm (1 5 0,0 0 0 p m m) at a feed rate of 25 μm/rev. A 5 mm Φ drill cone diameter drill is used to make the hole. Evaluate the hole. Table 1 shows the results. (Example 2) 10 parts of polyethylene glycol as a lubricant is added to 200 parts of polyvinyl acetal resin, 400 parts of epoxy resin, and 00 parts of phenol resin, and 2 17 3丨2/Invention Manual (Supplement)/93-04/93101839 1306369 A portion of the edible coloring matter Yellow No. 5 as a coloring agent was added to the mixture to prepare a thermosetting resin composition. The thermosetting resin composition is bonded to a hard aluminum foil having a thickness of 100 μm (average surface roughness of 1). 6 microns, maximum 2 . On one surface of 7 μm, a lubricant sheet for drilling holes having a resin composition layer having a thickness of 100 μm was produced (the two surfaces of the lubricant sheet were clearly distinguished). Then stack two 1s. 6 mm thick glass epoxy copper six-layer board. The above lubricant sheet is placed on the upper surface of the stacking plate so that the resin composition of the lubricant sheet is level up, and will be 1 . A 5 mm thick paper-based material was placed on the lower surface of the stacked six-layer board. Use 0 at 0 0,0 0 0 per minute to rotate at a feed speed of 20 μm/rev. 3 mm Φ drill cones Diameter drills make holes. Evaluate the hole. Table 1 shows the results. (Comparative Examples 1 and 2) A lubricant sheet for drilling was prepared in the same manner as in Examples 1 and 2 except that the coloring agents used in Examples 1 and 2 were not used. Each of the lubricant sheets was separately placed on the upper surface of the two stacked copper six-layer boards so that the aluminum foil side of the lubricant sheet was upward. Holes were produced under the same conditions as in Examples 1 and 2. Table 1 shows the results of the evaluation. (Comparative Example 3) Holes were produced under the same conditions as in Example 1 except that the lubricant sheet for drilling used in Example 1 was not used. Table 1 shows the results of the evaluation. (Comparative Example 4) A hole was formed under the same conditions as in Example 1 except that the lubricant sheet for drilling used in Example 1 was replaced with an aluminum foil. Table 1 shows the results of the evaluation. 18 312/Invention Manual (supplement)/93-04/93101839 1306369 (Table 1) Item Example Comparative Example 1 2 1 2 3 4 Halo (um) Upper surface 131 147 222 267 491 450 Lower surface 110 129 165 212 400 383 Stain 2,0 0 0 hits an average of 9. 9 9. 4 9. 0 8. 7 8. 4 8. 5 minimum (9. 4) (8. 8) (8. 5) (8. 0) (7. 3) (7. 7) 5,0 0 0 hit Average 9. 3 8. 9 8. 4 8. 3 7. 7 8. 0 is the smallest (8. 6) (8. 2) (7. 8) (7. 5) (6. 5) (7. 0) Hole position accuracy (maximum μπ〇27 20 67 69 75 71 The roughness of the hole wall (maximum μπι) 8 13 12 17 29 27 <Measurement method> 1) Halo: Drilling holes in a six-layer board 3, 0 0 0 hit, then soak the six-layer board in 4 N - HC 1 at 25 ° C for 5 minutes. The maximum distance of the halo in the black oxide portion of the inner layer is measured. 2) Stain: drill 2, 0 0 0 and 5,0 0 0 respectively, observe 10 holes punched by 2,0 0 0 drilled holes and 10 0 hits by drilling 5,0 0 0 The cross section of the hole and the state of occurrence of the stain. Give 10 points when no stains are found, and 0 points when all stains are found. 3) Hole position accuracy and roughness of the hole wall: After drilling 3, 0 0 0 in two stacked six-layer plates, measuring the position of the hole in the back of the lower plate of the two stacked six-layer plates Misalignment between position and drilling position. Show the maximum value. In addition, regarding the roughness of the hole wall, the wall roughness of 10 holes hit by the hole 3,0 0 0 is measured, and the maximum value is shown. (Example 3) Using a kneader at a pressure of 1 3 Ot under a nitrogen atmosphere, 35 parts of a polymer having a molecular weight of 5 0 0,0 0 0 19 312 / invention specification (supplement) /93-04/9310 ] 839 1306369 Ethylene oxide and 65 parts of polyglycerol monostearate having a molecular weight of 900 were kneaded for 1 hour to obtain a mixture having a viscosity of 1,600,0 0. The thickness was obtained by passing the mixture through a heating roll at 130 °C. 〇 5 mm sheet. In addition, 10 parts of a saturated polyester resin having a hydroxyl group at the terminal group and a molecular weight of 20,0 0 and a melt viscosity of 80 poise (at 200 ° C) and 3 parts of diisocyanate are added. The hexamethylene diester was dissolved in a mixed solvent of toluene/mercaptoethyl ketone = 3 / 1, and a solution having a concentration of 10% by weight was obtained. Three parts of the blue pigment (anthraquinone blue) containing no element were added to the solution, and the blue pigment was uniformly dissolved and mixed in the solution. The resulting solution was applied to a surface of a hard aluminum foil having a thickness of 100 μm, and the coating solution was dried at 100 ° C for 1 hour to form an undercoat layer having a thickness of 5 μm. The sheet prepared above is placed on the undercoat layer of the aluminum foil, and the sheet and the aluminum foil are pressed and integrated by a heating roller to obtain a lubricant sheet for drilling a surface having a blue surface (the The two surfaces can be clearly distinguished). Then stack three zeros. 4 mm thick B T resin copper face laminate. The lubricant sheet is placed on the upper surface of the stacked laminate such that the resin composition of the lubricant sheet is level up, and will be 1 . A 5 mm thick paper laminate was placed on the lower surface of the stacked laminate. Use 0 at 60 °/0 0 rotations per minute at a feed rate of 15 μm/rev. A 5 mm Φ drill cone with a diameter drill makes holes. Evaluate the hole. Table 2 shows the results. (Example 4) Two parts of a red non-halogen coloring agent (edible red No. 2) was added to 100 parts of a water-soluble polyaminophthalic acid resin to obtain a resin composition. The resin composition was applied to a hard aluminum foil having a thickness of 100 μm (average surface roughness of 1). 6 20 312 / invention manual (supplement) / 93-04/93101839 1306369 micron, maximum 2 . A surface of 7 μm) forms a layer of a resin composition having a thickness of 10 μm. The sheet prepared in Example 3 was placed on the resin composition layer of the aluminum foil, and the sheet and the aluminum foil were bonded to each other via lamination to integrate them, thereby preparing a lubricant sheet for drilling (which The two surfaces can be clearly distinguished). The obtained lubricant sheet was used in the same manner as in Example 3 to make a hole. Evaluate the hole. Table 2 shows the results of the evaluation. (Comparative Examples 5 and 6) A lubricant sheet for drilling was prepared in the same manner as in Examples 3 and 4 except that the coloring agents used in Examples 3 and 4 were not used. Each of the lubricant sheets was separately placed on the upper surface of the three stacked copper laminates such that the aluminum foil side of the lubricant sheet was upward. Holes were made under the same conditions as in Examples 3 and 4. Table 2 shows the results of the evaluation. (Comparative Example 4) A hole was formed under the same conditions as in Example 3 except that the lubricant sheet for drilling used in Example 3 was replaced with an aluminum foil. Table 2 shows the results of the evaluation. (Table 2) Item Example Comparative Example 3 4 5 6 7 Burr (μ m ) 2 2 11 12 3 Hole position accuracy (AVG+3a) (maximum M m ) 2 5 27 5 1 55 62 2 7 29 7 7 72 7 5 Roughness of the hole wall (maximum μ m ) 7 6 14 17 2 9 <Measurement method of hole position accuracy> About 1 5,0 in the back of the lowest laminate of the three stacked laminates 0 0 holes (3,0 0 0 hit X 5 ), measuring the misalignment between the pointing coordinates and the holes 21 312 / invention manual (supplement) /93-04/93101839 1306369 position. The average value + 3 σ and the maximum value are displayed. (Example 5) 35 parts of polyoxyethylene having a molecular weight of 50,000, and 65 parts of a polyglycerol having a molecular weight of 900 at a temperature of 130 ° C under a nitrogen atmosphere using a kneader Stearic acid ester and 2 parts of the edible coloring matter blue coloring agent as a coloring agent were kneaded for 1 hour to obtain a mixture having a viscosity of 1,600,0 0. The mixture was passed through a heating roll at 130 ° C to produce a thickness of 0. 0 5 mm blue sheet. Further, both surfaces of the polyethylene terephthalate film having a thickness of 100 μm were treated by sand blasting so that the surfaces each had a roughness of 1 to 4 μm and a distance of 20 to 30 μm between the convex portions. The above blue sheet is placed on the surface of one of the polyethylene terephthalate films, and is pressed and integrated by a heating roll to obtain a lubricant for drilling a surface having a blue surface. Sheet. Then stack three zeros. 2 mm thick B T resin copper face laminate. The lubricant sheet is placed on the upper surface of the stacked laminate such that the resin composition of the lubricant sheet is level up, and will be 1 . The 5 mm thick paper-laminated laminate was placed on the lower surface of the stacked laminate. Utilize at 160,000 rpm at 7. A hole with a diameter of 7 μm Φ drill cone is rotated at a feed rate of 5 μm/rev. The holes were then washed under high pressure using hot water at 60 °C. The inner side of the hole was qualitatively analyzed, and it was found that no water-soluble resin remained on the inner side of the hole. Evaluate the hole. Table 3 shows the results. (Comparative Example 8) Example 5 was repeated except that a film having a distance between the convex portions of 60 to 80 μm was used instead of the outer convex portion having 20 to 30 μm used in Example 5 The distance of the film. Table 3 shows the results of the evaluation. 22 3丨2/Invention Manual (Supplement)/93-04/93101839 1306369 (Comparative Example 9) Example 5 was repeated except that the film used in Example 5 was replaced with a hard aluminum foil having a thickness of 100 μm. Table 3 shows the results of the evaluation. (Comparative Example 10) Example 5 was repeated except that the lubricant sheet for drilling used in Example 5 was replaced with a film of polyethylene terephthalate having a thickness of 100 μm. Table 3 shows the results of the evaluation. (Table 3) Comparison of project examples (column 5 8 9 10 drill fracture (3 000 hit, n = 5) No 5 / 5 fracture 2/5 fracture hole position accuracy (maximum μ m) 20 25 — 28 Roughness of the hole wall (maximum μ m) 5 6 - 10 <Measurement method of hole position accuracy> About 1 5,0 0 holes in the back of the lowest laminate of the three stacked laminates (3,0 0 0 hit X 5 ), the misalignment between the pointing coordinate and each hole position is measured. The maximum value is shown. (Example 6) 1 part of the halogen-free blue water-soluble dye (food coloring) The substance blue No. 1) is added to 35 parts of polyethylene oxide having a molecular weight of 500,000 and 65 parts of polyglycerol monostearate having a molecular weight of 900. Using a kneading machine at 1 3 The mixture was kneaded at 0 ° C for 1 hour under a nitrogen atmosphere to obtain a mixture having a viscosity of 1,600,0 0. The mixture was passed through a heating roll at 130 ° C to obtain a thickness of 0. 0 5 mm blue sheet. In addition, 10 parts of the terminal group has a hydroxyl group and has a molecular weight of 20,0 0 0 and a melt viscosity of 23 31 knife invention specification (supplement) /93-04/93]0] 839 1306369 8 0 0 poise ( The saturated polythene tree at 2 ◦◦ ° C) and 3 parts of hexamethylene cyanate are dissolved in a mixed solvent of toluene / mercapto ethyl ketone = 3 / 1 to obtain a concentration of 10% by weight. Solution. The solution was applied to one surface of a micron-thick hard aluminum foil, and the coating solution was dried at 100 ° C to form an undercoat layer having a thickness of 5 μm. The above sheet was placed on the undercoat of the foil, and the sheet and the aluminum foil were pressed and finished by a heating roll to obtain a lubricant sheet for drilling one of the surfaces. The maximum diameter of the air bubbles in the grease layer is 9 microns. Then, a three millimeter thick B T resin copper face six' layer was stacked. The slip agent sheet is placed on the upper surface of the stack to make the resin composition of the lake slip sheet layer up, 1 . The 6 mm thick paper phenolic laminate is placed on the lower surface of the stacked six-layer board using a 1 50 micron Φ drill cone at a feed rate of 1 60 μm/rev at 1 5 μm/rev. The diameter of the drill makes holes. Evaluation hole 4 shows the result. (Comparative Example 1 1) Example 6 was repeated except that the lubricant resin composition layer in which the maximum diameter of the air bubbles was 70 was used instead of the lubricant resin in which the maximum diameter of the bubble used in Example 6 was 9 μm. Layer of matter. Table 4 Evaluation results. (Comparative Example 1 2) A hole was formed under the same conditions as in Example 6 except that the lubricant sheet for drilling used in Example 6 was used. Table 4 shows the results. 312/Invention Manual (supplement)/93-04/93 ] 01839 Diiso I 10 0 Dry 1 in aluminum, agent tree 0. 4 stacks and will be on. Turn down. Table Micron Air Display Substitution Estimation 24 1306369 (Table 4) Item Example Comparison Example 6 11 1 2 Hole Position Accuracy (μ m ) (AVG+3a) 29 42 38 (Max.) 35 6 3 78 <Measurement Method> At 1 5,0 0 holes (3,0 0 hit X 5 ) in the back side of the lowermost laminate of the three stacked laminates, the misalignment between the pointing coordinates and the respective hole positions was measured. The average value + 3 σ and the maximum value are displayed. 25 312/Invention Manual (supplement)/93-04/93101839