TWI306048B - - Google Patents

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Publication number
TWI306048B
TWI306048B TW94133718A TW94133718A TWI306048B TW I306048 B TWI306048 B TW I306048B TW 94133718 A TW94133718 A TW 94133718A TW 94133718 A TW94133718 A TW 94133718A TW I306048 B TWI306048 B TW I306048B
Authority
TW
Taiwan
Prior art keywords
dresser
superabrasive
chemical mechanical
substrate
mechanical polishing
Prior art date
Application number
TW94133718A
Other languages
English (en)
Chinese (zh)
Other versions
TW200621430A (en
Inventor
Chien Min Sung
Original Assignee
Chien Min Sung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chien Min Sung filed Critical Chien Min Sung
Publication of TW200621430A publication Critical patent/TW200621430A/zh
Application granted granted Critical
Publication of TWI306048B publication Critical patent/TWI306048B/zh

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Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
TW094133718A 2004-09-29 2005-09-28 CMP pad dresser with oriented particles and associated methods TW200621430A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US61459604P 2004-09-29 2004-09-29

Publications (2)

Publication Number Publication Date
TW200621430A TW200621430A (en) 2006-07-01
TWI306048B true TWI306048B (ja) 2009-02-11

Family

ID=45071288

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094133718A TW200621430A (en) 2004-09-29 2005-09-28 CMP pad dresser with oriented particles and associated methods

Country Status (1)

Country Link
TW (1) TW200621430A (ja)

Also Published As

Publication number Publication date
TW200621430A (en) 2006-07-01

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