CN101890679B - 超级研磨工具及其相关方法 - Google Patents
超级研磨工具及其相关方法 Download PDFInfo
- Publication number
- CN101890679B CN101890679B CN201010110899.4A CN201010110899A CN101890679B CN 101890679 B CN101890679 B CN 101890679B CN 201010110899 A CN201010110899 A CN 201010110899A CN 101890679 B CN101890679 B CN 101890679B
- Authority
- CN
- China
- Prior art keywords
- superfinishing
- particle
- hard solder
- solder layer
- superfinishing particle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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- 238000000034 method Methods 0.000 title abstract description 45
- 230000002596 correlated effect Effects 0.000 title description 2
- 239000002245 particle Substances 0.000 claims abstract description 148
- 229910000679 solder Inorganic materials 0.000 claims description 94
- 239000000463 material Substances 0.000 claims description 83
- 239000010410 layer Substances 0.000 claims description 78
- 239000000956 alloy Substances 0.000 claims description 55
- 229910045601 alloy Inorganic materials 0.000 claims description 53
- 239000010432 diamond Substances 0.000 claims description 40
- 229910003460 diamond Inorganic materials 0.000 claims description 40
- 239000000203 mixture Substances 0.000 claims description 38
- 238000005476 soldering Methods 0.000 claims description 35
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical group [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 21
- 239000011241 protective layer Substances 0.000 claims description 20
- 229910052582 BN Inorganic materials 0.000 claims description 12
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims description 12
- 229910052759 nickel Inorganic materials 0.000 claims description 11
- 239000000470 constituent Substances 0.000 claims description 7
- 238000002844 melting Methods 0.000 abstract description 13
- 230000008018 melting Effects 0.000 abstract description 13
- 239000000758 substrate Substances 0.000 abstract description 10
- 238000000227 grinding Methods 0.000 description 55
- 238000005498 polishing Methods 0.000 description 21
- 239000006061 abrasive grain Substances 0.000 description 17
- 239000000126 substance Substances 0.000 description 15
- 239000002002 slurry Substances 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- 238000005219 brazing Methods 0.000 description 12
- 235000012431 wafers Nutrition 0.000 description 12
- 238000012545 processing Methods 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 9
- 239000010703 silicon Substances 0.000 description 9
- 230000008859 change Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 7
- 229910052804 chromium Inorganic materials 0.000 description 7
- 239000011651 chromium Substances 0.000 description 7
- 239000012071 phase Substances 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 6
- 239000000843 powder Substances 0.000 description 6
- 239000010936 titanium Substances 0.000 description 6
- 238000002425 crystallisation Methods 0.000 description 5
- 230000008025 crystallization Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 229910052719 titanium Inorganic materials 0.000 description 5
- 229910000906 Bronze Inorganic materials 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 239000007767 bonding agent Substances 0.000 description 4
- 239000010974 bronze Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000004033 plastic Substances 0.000 description 4
- 229920003023 plastic Polymers 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000004411 aluminium Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 239000002657 fibrous material Substances 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 238000010297 mechanical methods and process Methods 0.000 description 3
- 230000005226 mechanical processes and functions Effects 0.000 description 3
- 229910001092 metal group alloy Inorganic materials 0.000 description 3
- 230000008439 repair process Effects 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000004070 electrodeposition Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000003801 milling Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 230000002028 premature Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 241000273930 Brevoortia tyrannus Species 0.000 description 1
- 241000252203 Clupea harengus Species 0.000 description 1
- 241001269238 Data Species 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- 208000034189 Sclerosis Diseases 0.000 description 1
- 229910000676 Si alloy Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000010306 acid treatment Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000013536 elastomeric material Substances 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 235000019514 herring Nutrition 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 150000002815 nickel Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- -1 pottery Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000010583 slow cooling Methods 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 210000003813 thumb Anatomy 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- 238000004017 vitrification Methods 0.000 description 1
- 239000000080 wetting agent Substances 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
- B24D3/10—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements for porous or cellular structure, e.g. for use with diamonds as abrasives
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
Description
Claims (7)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14739309P | 2009-01-26 | 2009-01-26 | |
US61/147,393 | 2009-01-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101890679A CN101890679A (zh) | 2010-11-24 |
CN101890679B true CN101890679B (zh) | 2015-07-08 |
Family
ID=42354527
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201010110899.4A Active CN101890679B (zh) | 2009-01-26 | 2010-01-25 | 超级研磨工具及其相关方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8491358B2 (zh) |
CN (1) | CN101890679B (zh) |
TW (1) | TW201028249A (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130171583A1 (en) * | 2010-06-30 | 2013-07-04 | Mutsunori SHIOIRI | Medical cutting instrument |
CN102569225A (zh) * | 2010-12-13 | 2012-07-11 | 铼钻科技股份有限公司 | 热传导装置及其制造方法 |
WO2014031573A1 (en) * | 2012-08-21 | 2014-02-27 | 3M Innovative Properties Company | Articles with binder-deficient slip coating and method for making same |
US20180009065A1 (en) * | 2016-07-05 | 2018-01-11 | Diamond Innovations, Inc. | Abrasive tool having a braze joint with insoluble particles |
CN111775073B (zh) * | 2020-06-19 | 2021-04-23 | 长江存储科技有限责任公司 | 一种抛光垫修整器及其制作方法 |
TWI753605B (zh) * | 2020-10-14 | 2022-01-21 | 中國砂輪企業股份有限公司 | 拋光墊修整器及其製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1597258A (zh) * | 2004-09-14 | 2005-03-23 | 龙治国 | 抗切割研磨片及其制造方法 |
CN101039775A (zh) * | 2004-09-29 | 2007-09-19 | 宋健民 | 具有定向颗粒的化学机械抛光垫修整器及其相关方法 |
CN101068654A (zh) * | 2004-09-29 | 2007-11-07 | 宋健民 | 呈曲面的化学机械抛光垫修整器及其相关方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4925457B1 (en) * | 1989-01-30 | 1995-09-26 | Ultimate Abrasive Syst Inc | Method for making an abrasive tool |
US6039641A (en) | 1997-04-04 | 2000-03-21 | Sung; Chien-Min | Brazed diamond tools by infiltration |
US6884155B2 (en) * | 1999-11-22 | 2005-04-26 | Kinik | Diamond grid CMP pad dresser |
US6368198B1 (en) | 1999-11-22 | 2002-04-09 | Kinik Company | Diamond grid CMP pad dresser |
US6286498B1 (en) | 1997-04-04 | 2001-09-11 | Chien-Min Sung | Metal bond diamond tools that contain uniform or patterned distribution of diamond grits and method of manufacture thereof |
-
2009
- 2009-12-31 US US12/650,782 patent/US8491358B2/en active Active
-
2010
- 2010-01-08 TW TW099100316A patent/TW201028249A/zh unknown
- 2010-01-25 CN CN201010110899.4A patent/CN101890679B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1597258A (zh) * | 2004-09-14 | 2005-03-23 | 龙治国 | 抗切割研磨片及其制造方法 |
CN101039775A (zh) * | 2004-09-29 | 2007-09-19 | 宋健民 | 具有定向颗粒的化学机械抛光垫修整器及其相关方法 |
CN101068654A (zh) * | 2004-09-29 | 2007-11-07 | 宋健民 | 呈曲面的化学机械抛光垫修整器及其相关方法 |
Also Published As
Publication number | Publication date |
---|---|
US8491358B2 (en) | 2013-07-23 |
US20100190423A1 (en) | 2010-07-29 |
CN101890679A (zh) | 2010-11-24 |
TW201028249A (en) | 2010-08-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract | ||
EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20101124 Assignee: Taiwan China grinding wheel Enterprise Co.,Ltd. Assignor: Song Jianmin Contract record no.: X2021990000664 Denomination of invention: Super grinding tool and its related methods Granted publication date: 20150708 License type: Common License Record date: 20211027 |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20220221 Address after: Building 21b, Vanke enterprise residence, No. 63, Qianwan 1st Road, Nanshan District, Shenzhen, Guangdong Patentee after: Shenzhen Qianhai Kechuang graphene New Technology Research Institute Address before: Taipei County, Taiwan, China Patentee before: Song Jianmin |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20231010 Address after: 518000, 2nd Floor, Unit B, Building 21, Vanke Qianhai Enterprise Mansion, No. 63 Qianwan 1st Road, Qianhai Shengang Cooperation Zone, Nanshan Street, Qianhai Shengang Cooperation Zone, Shenzhen, Guangdong Province Patentee after: Shenzhen Kezhuan Technology Co.,Ltd. Address before: Building 21B, Vanke Enterprise Mansion, No. 63 Qianwan 1st Road, Nanshan District, Shenzhen, Guangdong Province, 518000 Patentee before: Shenzhen Qianhai Kechuang graphene New Technology Research Institute |