1301436 九、發明說明： 【發明所屬之技術領域】 本發明係關於一種拋光刀具系統，尤其是關於可 隨著工件形狀調整而進行拋光加工之拋光刀具系統， 該系統可用於尺寸、錐度不同的凹、凸軸對稱工件進 行拋光加工。· 【先前技術】 拋光加工術之目的在於降低物體表面粗度，而得 一光滑表面，且可去除工件因加工後產生之變質層， 消除殘留應力對工件的影響。一般而言，拋光加工係 採用在拋光區域内，以刀具推動磨粒且在工件上運動 而達到加工的目的。而拋光區域内之磨粒所受的負載 與磨粒分布的隨機性導致加工的不確定性，因此，上 述的不破定性對於模具及晶圓的拋光加工，易破壞模 具的形狀精度及晶圓的平面度。中華民國專利公告號 第299267號中揭示一種複合式液壓拋光之加工方法及 裝置，使拋光加工成為一確定性之加工方法，達到超 精密加工的目的。 拋光加工可提高工件的品質，但對於深孔工件而 言，因其幾何條件導致拋光加工的困難度，中華民國 專利公告號第520686號中揭示一種深孔拋光裝置，利 用彈性磨塊及可深入工件深孔之拋光刀具執行拋光加 工，達到深孔加工的目的。 如欲以同一拋光加工裝置達到尺寸、錐度不同的 凹、凸轴對稱工件之拋光加工，其需更換刀具及刀具 連接座體，易因受限於刀具及刀具連接座體的尺寸及 機構上的設計，不易依工件形狀調整而達到超精密加 工及深孔加工的目的。 美國專利公告第6，113,469號中揭示一種拋光方 法，用於光學連接器之套圈形成凸面球形表面，而美 國專利公告第6,227,952號中揭示一種拋光裝置用於鏡 片毛胚之凹表面，上述拋光裝置用於拋光工件表面， 使其具有凹或凸表面，然而，如欲拋光尺寸、錐度不 同的凹、凸軸對稱之凸圓錐、圓柱、孔、坑及洞等工 件，必須更換不同形式的刀具及複雜的刀具運動規 劃，才能完成整體工件的拋光加工，而更換刀具導致 重新定位的缺點，將失去加工精度且十分耗時。 【發明内容】 本發明之目的在提供一種拋光刀具系統，尤其是 可隨著工件形狀調整而進行拋光加工，該系統可用於 尺寸、錐度不同的凹、凸軸對稱工件進行拋光加工。 達到上述目的拋光刀具系統，包括：座體，具有 至少一長度及角度可調整之夾具；及至少一拋光刀 具，置於前述座體之夾具上；其中，依一工件之形狀 用以調整前述夾具之長度及角度，且藉由前述拋光刀 具旋轉接觸前述工件表面，或由工件旋轉帶動前述拋 光刀具轉動以進行拋光。 較佳地，前述夾具進一步包括：支撐件；連動件； 1301436 夾持件；及刀具固定座；其中，二 接於前述支撐件，且前述連動件件之一端連 夾持件，而前述刀具固定座遠接μ、， 端連接於前述 度旋轉。 魏於㈣崎件並可360 較佳地’前述支樓件可為 較佳地，前述支撐件之材、、=; 一變形用以調整前述夾且之离”、、早性材料，可產生 接觸於該工件表面上之角度’帶動前述抛光刀具 較佳地，前述連動件可為矩形。 較佳地，前述連動件之择 截面的長度小於其寬度。”截面為—矩形，前述横 ^佳地’前述連動件之材料為彈 /較佳地，前述刀具固定座包括 〃'。 形體用以挾持前述拋光刀且， “形體，第—门 連動可— 有二包?， J下軸承;1阻 :二：具有上軸承 -對旋轉主軸的軸心為中：：，=光刀具以前述 ^上轴承、前述上阻尼板、前述下^ 8 板、前述下輛承A、 及前述外筒，日二、則述下旋轉主軸，並套接前述套筒 較佳地，前1述随尼液注入於前述拋光刀具中。 前述拋光刀具=述二對阻尼板用於調整前述阻尼液在 的轉速。八的流動狀態，進而控制前述拋光刀具1301436 IX. INSTRUCTIONS OF THE INVENTION: TECHNICAL FIELD The present invention relates to a polishing tool system, and more particularly to a polishing tool system that can be polished in accordance with the shape adjustment of a workpiece, which can be used for concaves having different sizes and tapers. The convex axis symmetrical workpiece is polished. · [Prior Art] The purpose of polishing is to reduce the surface roughness of the object, and to obtain a smooth surface, and to remove the altered layer produced by the workpiece, and to eliminate the influence of residual stress on the workpiece. In general, the polishing process is carried out in the polishing zone by the tool pushing the abrasive particles and moving on the workpiece for processing. However, the randomness of the load and the random distribution of the abrasive grains in the polishing area leads to the processing uncertainty. Therefore, the above-mentioned non-breaking property is easy to damage the shape accuracy of the mold and the wafer for the polishing process of the mold and the wafer. Flatness. The Republic of China Patent Publication No. 299267 discloses a composite hydraulic polishing processing method and apparatus for making polishing processing a deterministic processing method for ultra-precision machining. Polishing can improve the quality of the workpiece, but for deep-hole workpieces, the difficulty of the polishing process due to its geometrical conditions, the Republic of China Patent Publication No. 520686 discloses a deep-hole polishing device that utilizes elastic grinding blocks and can be deepened. The polishing tool for the deep hole of the workpiece is polished to achieve the purpose of deep hole machining. If you want to use the same polishing processing device to achieve the polishing process of concave and convex axis symmetrical workpieces with different sizes and tapers, it is necessary to replace the tool and the tool connecting seat. It is easy to be limited by the size and mechanism of the tool and tool connecting seat. Design, it is not easy to adjust the shape of the workpiece to achieve ultra-precision machining and deep hole machining. A polishing method for forming a convex spherical surface of a ferrule of an optical connector is disclosed in U.S. Patent No. 6,113, 469, the disclosure of which is incorporated herein by reference. The device is used to polish the surface of the workpiece to have a concave or convex surface. However, if you want to polish the workpiece with different dimensions, different taper, convex axis, cylindrical, hole, pit and hole, you must replace the tool with different forms. And complicated tool movement planning, in order to complete the polishing of the whole workpiece, and the replacement of the tool leads to the disadvantage of repositioning, which will lose the processing precision and is very time consuming. SUMMARY OF THE INVENTION The object of the present invention is to provide a polishing tool system, in particular, which can be polished according to the shape adjustment of the workpiece. The system can be used for polishing of concave and convex axis symmetrical workpieces having different sizes and tapers. A polishing tool system for achieving the above object, comprising: a seat body having at least one length and angle adjustable jig; and at least one polishing tool disposed on the jig of the seat body; wherein the shape of the workpiece is used to adjust the jig The length and the angle, and the polishing tool is rotated to contact the surface of the workpiece, or the polishing tool is rotated by the workpiece to perform polishing. Preferably, the jig further comprises: a support member; a linkage member; 1301436 a clamping member; and a cutter holder; wherein, the second support member is connected to the support member, and one of the linkage member members is connected to the clamping member, and the cutter is fixed The seat is remotely connected to the μ, and the end is connected to the aforementioned degree of rotation. Wei Yu (4) Saki pieces and 360 preferably 'the aforementioned branch members may be preferably, the materials of the aforementioned support members, =; a deformation for adjusting the aforementioned clips and the ", early materials, can be produced Preferably, the angle of the contact on the surface of the workpiece is to drive the polishing tool. Preferably, the linkage member has a rectangular shape. Preferably, the length of the selected cross-section of the linkage member is smaller than the width thereof. The cross-section is a rectangle, and the cross-section is good. The material of the aforementioned linkage is a bullet/better, and the cutter holder includes a 〃'. The shape is used to hold the aforementioned polishing knife and, "shape, first door linkage can be - there are two packs?, J lower bearing; 1 resistance: two: with upper bearing - the axis of the rotating spindle is medium::, = optical cutter The above-mentioned upper bearing, the upper damper plate, the lower plate, the lower bearing A, and the outer cylinder, the second embodiment of the rotating main shaft, and the sleeve is preferably sleeved, preferably The liquid is injected into the polishing tool. The polishing tool=the second pair of damping plates are used to adjust the speed of the damping fluid. The flow state of the eight, and then the polishing tool is controlled.
幸父佳地，前述一拟A 錐體。 對旋轉主軸之插銷端部可為多面 較佳地，前述一對 阻尼板及下阻尼板。對阻尼板可為上下凹凸互補之上 較佳地，前述外铃 膠材料。 卜同為—空心滾筒，且外層包覆橡 一種拋光加工機，甘， 本發明功效在刀具系統。 態，驅動至少-個抛t改變抛光刀具系統的幾何型 光刀具的刀具面圍3 :在空間中產生位移，使拋 :整而進仃拋光加工’該系統可用於尺寸、錐】不: :二3對稱工件進行拋光加工，達二兼二Ξ 位時間）及省時(節H 先率(平均加工深度/單 點。 ，更換刀具及重新定位的時間）等優 細說2 1的或特徵’將依據後附圖式加以詳 做為說明而；在以縮及所舉之例’祇是 【實施方式】 晴參閱第一圖係顯示本發明拋光刀具系統1之立 體示意圖。本發明之拋光刀具系統1包含座體10，具 有二組長度及角度可調整之夾具20、30、40 ;及三組 拋光刀具60、70、80，分別置於前述座體之夾具2〇 ' ^义4〇上；其中，依一工件（圖未示）之形狀用以調 =則述夾具20、30、40之長度及角度，且藉由前述拋 光刀具60、70、80旋轉接觸前述工件表面，以進行拋 光。 别述夾具20、30、40包括：支撐件21〇、310、410 ; 連動件220、320、420 ;夾持件230、330、430 ;及刀 ”固疋座240、340、440 ;其中，前述連動件22〇、320、 420之一端連接於前述支撐件210、310、410，且前述 連動件220、320、420之另一端連接於前述夾持件23〇、 =〇、430,而前述刀具固定座24〇、34〇、44〇連接於 前述=持件230、330、430並可作360度旋轉。 =配合夢閱第二圖係顯示本發明拋光刀具系統卫 之支標件210局部之立體圖，且於本實施例中僅以單 一支撐件210作說明。前述支撐件21〇係藉由有限元 素法輔f分析，而將前述支撐件21〇設計為一扇形結 構，使前述支撐件21〇於操作時作適當的結構弱化， 且增加前述支#件21G之扇形後端211結構的厚度以 避免應f過大而產生斷裂，反之減少前述支撐件21〇 ^扇形前端212之厚度以降底結構剛性，並於前述支 樓件210之扇形結構上設有複數個鏤空之透孔加，以 更進一步弱化扇形結構之剛性，俾使設計最佳的變形 1301436 里，而使適當的變性量供前述拋光刀具60的刀面持續 圍繞在工件表面上。 請參閱第三圖係顯示沿第一圖中線a_a之剖面 ，，且=本實施例中僅以單一連動件420之橫截面作 j月如述連動件420之橫截面為一矩形體（長度pj、 覓度W)，且前述連動件420截面之矩形體的長度！|較 小，而f前述連動件420敏感於長度H方向的受力， • 反之，前述連動件420截面之矩形體的寬度w設計較 長，以增加分擔前述連動件420寬度W方向的應力， 俾使基於慣性矩原則，垂直於受力方向的慣性矩越 大’則前述連動件420則越難變形。 當欲藉由拋光刀具系統1拋光一工件時，需隨著 • 工件形狀改變拋光刀具系統1的幾何型態，進而調整 拋光刀具系統1之夾具20、30、40的長度及角度，以 驅動三組拋光刀具60、70、80在空間中產生位移，使 拋光刀具60、70、80的刀具面圍繞在工件表面上，而 馨 進行拋光加工；且若欲拋光大尺寸之工件時，則將該 夾具20、30、40之長度設計成符合待拋光之工件所需 之長度，並產生大角度之變形。因此，於本實施例中， 前述支撐件210、310、410及連動件220、320、420 均由一彈性材料所製成，可隨著工件形狀而調整變形 角度，且不因產生大變形而斷裂。 而當前述拋光刀具60、70、80之刀具面接觸工件 表面時’產生一反作用力而引發連動件22〇、320、420 變形，透過變形量來判別拋光刀具系統給予工件負載 1301436 巧。因此，前述連動件220、32〇、樣的剛性需 於支撐件210、31〇、410，則連動件22〇、32〇、 20的變形量遠大於支撐件21〇、31〇、41〇。 凊芬閱第四圖係顯示本發明拋光刀具系統丨之夾 持件230及刀具固疋座240之局部立體圖，且於本實 施例:僅以單-夾持件，及刀具固定座24〇作說 明。丽述夾持件230係呈一门型體，該门型體之頂端 • 係與前述連動件22〇連接，且於該门型體之開口端的 兩端各橫設有一樞接部231(請參考第五圖所示），而前 述刀具固定座240係由二门型體241、242相互垂直所 組成，以形成一具有水平部及垂直部之十字框體，且 於该水平部之门型體241的開口端之兩端外侧各設有 • 一凹孔243,該凹孔243用以枢接前述夾持件23〇之樞 接部231，而可作360度旋轉，並使該刀具固定座24〇 方便由該夾持件230上組接及拆卸，而於該垂直部之 门型體242的開口端之一端内側設有一錐形透孔244， _ 而於另一端内側則設有一方形凹孔245，該錐形透孔 244及方形凹孔245用以組接前述拋光刀具6〇，且前 述刀具固定座240的垂直部之门型體242亦可組接不 同尺寸及不同種類的抛光刀具60。 鈾述刀具固定座240、340、440亦提供抛光刀異 60、70、80具有360度的自轉及偏轉的自由度，該偏 轉軸的設計可確保拋光刀具60、70、80的刀具面平貼 任思尺寸與錐度的凹凸工件表面，而自轉軸則是提供 抛光刀具60、70、80在工件表面上轉動，兩旋轉軸線 12 1301436 垂直相交於前述拋光刀具60、70、80之形心。 ^明芩閱第五圖及第六圖係顯示本發明拋光刀具系 統1之夾具受外力F推壓及變形示意圖，且於圖中省 略刀具固定座240、34〇、44〇及拋光刀具6〇、7〇、8〇， 僅^夾具2〇、30、40作說明。該支撐件210、310、410 可選，壓電材料作為主動變形控制，或藉由外力F(例 如油氣壓或螺絲線性推動）推壓而被動產生變形。 • ^ 當施一外力F於支撐件210、310、410時，藉由 =支撐件210、310、410為由彈性材料所製成，而使 剷述支撐件210、310、410之自由端向下移動，進而 帶動該連動件220、320、420往内角移動，而使連接 • 於連動件220、320、420之夾持件230、33〇、43〇向 " 内移動，以使該夾具20、30、40可隨著工件形狀而調 整變形角度。 請參閱第七圖係顯示本發明抛光刀具6〇之分解立 體圖。該拋光刀具60包含··一對旋轉主轴，具有一上 • 旋轉主軸610及下旋轉主軸670 ; —對軸承，具有上轴 承620及下軸承660 ; —對阻尼板，具有上阻尼板630 及下阻尼板650 ; —阻尼液690 (請參考第九圖所示）； 一套筒640 ;及一外筒680。 前述下旋轉主軸670之插銷端部670Α係呈一方形 體，該方形體用以與前述刀具固定座240、340、440 之方形凹孔245、345、445組接，而前述上旋轉主軸 610之插銷端部610Α係呈一十字錐形體，該十字錐形 體用以與前述刀具固定座240、340、440之錐形透孔 13 1301436 244、344、444組接，使拋光刀具60、70、80自轉時， 前述上旋轉主軸610及下旋轉主軸670不跟著旋轉， 而是讓拋光刀具60、70、80隨著上軸承620及下轴承 660外環相對上軸承620及下軸承660内環相對旋轉運 動。 前述上軸承620及下軸承660之中央各設有第一 穿孔621、661，而前述上阻尼板630及下阻尼板650 φ 之中央亦各設有第二穿孔63卜651，該第一穿孔621、 661及第二穿孔631、651係供前述上旋轉主軸61〇及 下紅轉主轴670穿接。 前述下阻尼板650兩侧各設有一凸柱652,而使前 • 述下阻尼板650之中央位置呈一凹槽653,而前述上阻 * 尼板630之中央位置設有一凸部632,用以配合與前述 下阻尼板650之凹槽653組接。 前述套筒640内設有一穿孔（圖未示），係用以供 前述上阻尼板630之凸部632穿過該穿孔而與前述下 • 阻尼板65〇組接，且再將前述上軸承620及下軸承66〇 置於韵述套肉640内，而使前述上軸承620疊置於前 述上阻尼板630上，而前述下軸承66〇疊置於下阻尼 板650下，並將前述阻尼液690注入前述上阻尼板 630、下阻尼板650與上軸承620、下軸承66〇之間， 再利用前述上旋轉主軸610及下旋轉主軸67〇穿 -穿孔⑶、661及第二穿孔631、⑹，以固定;：= 軸承620、下軸承660、上阻尼板630及下阻尼板65〇， 最後將組合後之套筒640置於一中空狀之外筒68〇 14 1301436 中，即元成本發明拋光刀具糸統1之拋光刀具6〇的組 成，清參考第八圖所示。前述上下阻尼板630、650用 於調整前述阻尼液690在前述拋光刀具60内的流動狀 悲，進而控制前述拋光刀具6〇的轉速，而前述外筒 為一空心滾筒，且外層包覆橡膠材料，且於拋光的過 程中’因磨耗造成拋光刀具6〇、7〇、8〇刀具表面曲率 的改變，嚴重影響拋光加工的穩定性，刀具表面曲率 的改變是因為刀具表面被磨粒移除所致，若是採用滾 同式的拋光方法’則拋光刀具6〇、70、80的刀具表面 則會產生一致且均勻性的磨耗，拋光前後的刀具表面 的曲率變化小至可被忽略，故本發明之拋光刀具6〇、 70、80為滾筒狀之設計，可增加拋光之穩定性。 明參閱弟九圖及弟十圖係顯示本發明抛光刀具系 統1调節拋光刀具60之上旋轉主轴610之剖面示意 圖，且於本實施例中僅以單一拋光刀具6〇作說明。^ 未轉動前述上旋轉主軸610之插銷端部610A時，前述 上阻尼板630疊置於下阻尼板65〇且相互平行，此時 該阻尼液690環繞於上阻尼板63〇及下阻尼板65〇之 兩側，如第九圖所示；而當欲調節拋光刀具6〇之轉速 時，則藉由壓擠並同時旋轉該上旋轉主軸61〇之插銷 端部610A，使前述上旋轉主軸610之插銷端部61〇A 因變形而帶動緊配合於前述上旋轉主軸61〇之上阻尼 板630而相對於下阻尼板65〇做轉動，此時前述上阻 尼板630因轉動而與前述下阻尼板65〇形成_夾角， 而前述阻尼液690隨著前述上阻尼板63〇之轉動而充 15 1301436 填於前述上阻尼630旋轉所空出來之空隙中，如第十 圖所示。 前述上旋轉主軸610之插銷端部610A的十字錐形 體的面數，係作為上阻尼板630相對於下阻尼板650 轉動夾角的控制，於本實施例中，插銷端部610A為六 面錐體，即炎角為每轉動一面增加60度，夾角設計越 大，轉動阻力越小，即拋光刀具60自轉的轉速越快。 因此，可藉由上旋轉主軸610之插銷端部610A的十字 錐形體的面數設計，作為拋光刀具60自轉阻尼狀態的 設計依據。 在詳細說明本發明的較佳實施例之後，熟悉該項 技術人士可清楚的暸解，在不脫離下述申請專利範圍 的精神下進行各種變化與改變，且本發明亦不受限於 說明書中所舉實施例的實施方式。 16 1301436 【圖式簡単說明】 第一圖係顯示本發明拋光刀具系統之立體示意 圖， 第二圖係顯示本發明拋光刀具系統之支撐件局部 之立體圖； 第三圖係顯示沿第一圖中線A-A之剖面圖； 第四圖係顯示本發明拋光刀具系統之夾持件及刀 具固定座之局部立體圖； 第五圖係顯示本發明拋光刀具系統之夾具未受外 力推壓之示意圖； 第六圖係顯示本發明拋光刀具系統之夾具受外力 推壓之示意圖； 第七圖係顯示本發明拋光刀具系統之拋光刀具之 分解立體圖； 第八圖係顯示本發明拋光刀具系統之拋光刀具之 組合立體圖； 第九圖係顯示本發明拋光刀具系統之拋光刀具未 調節上旋轉主轴之剖面示意圖； 第十圖係顯示本發明拋光刀具系統之拋光刀具調 節上旋轉主軸之剖面示意圖。 【主要元件符號說明】 1 拋光刀具系統 10 座體 20、30、40 夾具 17 1301436Fortunately, the father, the aforementioned a pyramid. The pin end of the rotating main shaft may be multi-faceted, preferably the pair of damper plates and the lower damper plate. The damper plate may be complemented by upper and lower embossments, preferably the aforementioned outer ring rubber material. Bu is the same - hollow cylinder, and the outer layer is covered with rubber. A polishing machine, Gan, the effect of the invention is in the tool system. State, drive at least one throwing t to change the tool face of the geometric tool of the polishing tool system. 3: Generate displacement in space, make the throw: whole and finish the polishing process 'The system can be used for size, cone】 No: : 2 3 symmetrical workpieces for polishing, up to 2 and 2 Ξ time) and time saving (H-rate (average machining depth / single point., replacement tool and repositioning time), etc.) DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT OF THE EMBODIMENT OF THE EMBODIMENT OF THE EMBODIMENT OF THE PREFERRED EMBODIMENT 1 comprising a base 10 having two sets of clamps 20, 30, 40 with adjustable length and angle; and three sets of polishing cutters 60, 70, 80 respectively placed on the clamp 2'' of the aforementioned seat; The shape of the workpiece (not shown) is used to adjust the length and angle of the clamps 20, 30, 40, and the polishing tool 60, 70, 80 is rotated into contact with the workpiece surface for polishing. The clips 20, 30, 40 include: a support member 21〇 310, 410; linkages 220, 320, 420; clamping members 230, 330, 430; and knives "fixed sockets 240, 340, 440; wherein one of the aforementioned linking members 22, 320, 420 is connected to the aforementioned support The other end of the linking member 220, 320, 420 is connected to the clamping member 23〇, =〇, 430, and the cutter holders 24〇, 34〇, 44〇 are connected to the foregoing= The holders 230, 330, 430 can be rotated 360 degrees. The second figure shows a partial perspective view of the polishing tool system of the present invention, and in the present embodiment only a single support 210 The support member 21 is configured by a finite element method, and the support member 21 is designed as a fan-shaped structure, so that the support member 21 is appropriately weakened during operation, and the aforementioned support is increased. The thickness of the structure of the fan-shaped rear end 211 of the piece 21G avoids the occurrence of breakage due to excessive f, and conversely reduces the thickness of the front end 212 of the support member 21〇 to reduce the rigidity of the bottom structure, and is disposed on the sector structure of the aforementioned branch member 210. There are a number of hollow through holes to further weaken The rigidity of the fan-shaped structure is such that the optimum deformation of the design is 1301436, and the appropriate amount of degeneration is provided for the surface of the polishing tool 60 to continuously surround the surface of the workpiece. Please refer to the third figure to show the line along the first line. a cross section of a_a, and = in this embodiment, only the cross section of the single linking member 420 is used as a cross section of the linking member 420 as a rectangular body (length pj, twist W), and the cross section of the linking member 420 The length of the rectangular body is smaller, and the aforementioned linking member 420 is sensitive to the force in the length H direction. Conversely, the width w of the rectangular body in the cross section of the linking member 420 is designed to be long to increase the sharing of the linking member 420. The stress in the width W direction, so that the moment of inertia perpendicular to the direction of the force is larger based on the principle of the moment of inertia, the more difficult the aforementioned link 420 is to deform. When a workpiece is to be polished by the polishing tool system 1, the geometry of the polishing tool system 1 needs to be changed with the shape of the workpiece, and the length and angle of the fixtures 20, 30, 40 of the polishing tool system 1 are adjusted to drive the three. The group of polishing tools 60, 70, 80 are displaced in space such that the tool faces of the polishing tools 60, 70, 80 are wound around the surface of the workpiece, and the polishing process is performed; and if a large-sized workpiece is to be polished, The length of the clamps 20, 30, 40 is designed to match the length required for the workpiece to be polished and produces a large angle of deformation. Therefore, in the embodiment, the support members 210, 310, and 410 and the linking members 220, 320, and 420 are all made of an elastic material, and the deformation angle can be adjusted according to the shape of the workpiece without causing large deformation. fracture. When the cutter faces of the polishing tools 60, 70, 80 are in contact with the surface of the workpiece, a reaction force is generated to cause the linkages 22, 320, and 420 to be deformed, and the amount of deformation is used to discriminate the polishing tool system to give the workpiece load 1301436. Therefore, the rigidity of the aforementioned linking members 220, 32 is required for the supporting members 210, 31, 410, and the deformation amount of the linking members 22, 32, 20 is much larger than that of the supporting members 21, 31, 41. The fourth figure shows a partial perspective view of the clamping member 230 and the tool holder 240 of the polishing tool system of the present invention, and in this embodiment: only the single-clamping member and the tool holder 24 Description. The reading member 230 is a door type body, and the top end of the door body is connected to the connecting member 22, and a pivoting portion 231 is disposed at each end of the open end of the door body (please Referring to the fifth figure, the cutter holder 240 is composed of two-door bodies 241 and 242 which are perpendicular to each other to form a cross frame body having a horizontal portion and a vertical portion, and a gate type at the horizontal portion. Each of the two ends of the open end of the body 241 is provided with a recess 243 for pivoting the pivoting portion 231 of the clamping member 23 to rotate 360 degrees and fix the tool. The seat 24 is conveniently assembled and disassembled by the clamping member 230, and a tapered through hole 244 is formed inside one end of the open end of the door body 242 of the vertical portion, and a square is provided on the inner side of the other end. The concave hole 245, the rectangular through hole 244 and the square concave hole 245 are used for assembling the polishing tool 6〇, and the vertical shape of the door body 242 of the tool holder 240 can also be assembled with different sizes and different types of polishing. Tool 60. The uranium tool holders 240, 340, and 440 also provide 360 degrees of freedom of rotation and deflection of the polishing blades 60, 70, 80. The yaw axis is designed to ensure that the tool faces of the polishing tools 60, 70, 80 are flat. The size and taper of the concave and convex workpiece surface, while the rotation axis provides the polishing tool 60, 70, 80 to rotate on the surface of the workpiece, and the two rotation axes 12 1301436 intersect perpendicularly to the centroid of the polishing tool 60, 70, 80. The fifth and sixth figures show the drawing of the clamp of the polishing tool system 1 of the present invention by the external force F, and the tool holders 240, 34〇, 44〇 and the polishing tool are omitted in the figure. , 7〇, 8〇, only ^ fixture 2〇, 30, 40 for explanation. The support members 210, 310, and 410 are optional, and the piezoelectric material is passively deformed as an active deformation control or by an external force F (e.g., oil pressure or screw linear push). • When applying an external force F to the support members 210, 310, 410, the free support of the support members 210, 310, 410 is made by the = support members 210, 310, 410 being made of an elastic material. Moving downwards, thereby driving the linking members 220, 320, 420 to move inwardly, and moving the clamping members 230, 33, 43 of the linking members 220, 320, 420 to " 20, 30, 40 can adjust the deformation angle with the shape of the workpiece. Please refer to the seventh drawing for an exploded perspective view of the polishing tool 6 of the present invention. The polishing tool 60 includes a pair of rotating spindles, having an upper rotating spindle 610 and a lower rotating spindle 670; a pair of bearings having an upper bearing 620 and a lower bearing 660; a pair of damping plates having an upper damping plate 630 and a lower Damping plate 650; - damping fluid 690 (please refer to the ninth figure); a sleeve 640; and an outer cylinder 680. The latch end 670 of the lower rotating spindle 670 is a square body for engaging with the square recesses 245, 345, 445 of the cutter holders 240, 340, 440, and the latch of the upper rotating spindle 610. The end portion 610 is a cross-conical body for engaging with the tapered through holes 13 1301436 244, 344, 444 of the cutter holders 240, 340, 440 to rotate the polishing tools 60, 70, 80. When the upper rotating main shaft 610 and the lower rotating main shaft 670 are not rotated, the polishing tools 60, 70, 80 are rotated relative to the inner ring of the upper bearing 620 and the lower bearing 660 with respect to the inner ring 620 and the lower bearing 660. . The first through holes 621 and 661 are respectively disposed at the center of the upper bearing 620 and the lower bearing 660, and the second through holes 63 651 are respectively disposed at the centers of the upper damper plate 630 and the lower damper plate 650 φ. The first through holes 621 are provided. The 661 and the second through holes 631 and 651 are connected to the upper rotating main shaft 61〇 and the lower red rotating main shaft 670. A protrusion 652 is disposed on each of the two sides of the lower damper plate 650, so that a central portion of the damper plate 650 is a groove 653, and a central portion of the upper dam plate 630 is provided with a convex portion 632. The engagement with the groove 653 of the lower damper plate 650 is combined. A through hole (not shown) is disposed in the sleeve 640 for the convex portion 632 of the upper damper plate 630 to pass through the through hole to be assembled with the lower damper plate 65 ,, and the upper bearing 620 is further disposed. And the lower bearing 66 is placed in the rhyme 640, and the upper bearing 620 is stacked on the upper damper plate 630, and the lower bearing 66 is folded over the lower damper plate 650, and the damping fluid is 690 is injected between the upper damper plate 630 and the lower damper plate 650 and the upper bearing 620 and the lower bearing 66 ,, and then the upper rotating main shaft 610 and the lower rotating main shaft 67 are pierced-perforated (3), 661 and the second through holes 631, (6). To fix;:= bearing 620, lower bearing 660, upper damper plate 630 and lower damper plate 65〇, and finally put the combined sleeve 640 in a hollow outer tube 68〇14 1301436, that is, the cost of invention The composition of the polishing tool 6抛光 of the polishing tool 1 is as shown in the eighth figure. The upper and lower damper plates 630 and 650 are used to adjust the flow sorrow of the damping fluid 690 in the polishing tool 60, thereby controlling the rotation speed of the polishing tool 6〇, and the outer cylinder is a hollow cylinder, and the outer layer is covered with a rubber material. During the polishing process, the curvature of the surface of the polishing tool 6〇, 7〇, 8〇 is changed due to wear, which seriously affects the stability of the polishing process. The curvature of the tool surface changes because the surface of the tool is removed by abrasive particles. Therefore, if the polishing method of the same type is used, the tool surface of the polishing tool 6〇, 70, 80 will produce uniform and uniform wear, and the curvature change of the tool surface before and after polishing is small enough to be neglected, so the present invention The polishing tools 6〇, 70, 80 are designed in the shape of a roller to increase the stability of polishing. Referring to the drawings, the ninth and the ninth drawings show a schematic cross-sectional view of the polishing tool system 1 of the present invention for adjusting the rotating spindle 610 above the polishing tool 60, and in the present embodiment, only a single polishing tool 6 is used for explanation. ^ When the latch end 610A of the upper upper rotating spindle 610 is not rotated, the upper damper plates 630 are stacked on the lower damper plate 65 and are parallel to each other, and the damping fluid 690 surrounds the upper damper plate 63 and the lower damper plate 65 at this time. The two sides of the crucible are as shown in the ninth figure; and when the rotation speed of the polishing tool 6 is to be adjusted, the upper rotating main shaft 610 is made by pressing and simultaneously rotating the pin end 610A of the upper rotating main shaft 61〇. The pin end portion 61A is driven to be tightly engaged with the damper plate 630 above the upper rotating main shaft 61〇 to rotate relative to the lower damper plate 65. At this time, the upper damper plate 630 is rotated and the aforementioned lower damper. The plate 65A forms an angle, and the damping fluid 690 is filled in the gap which is vacated by the above-mentioned upper damping 630 as the above-mentioned upper damper plate 63 is rotated, as shown in the tenth figure. The number of faces of the cross cone of the latch end 610A of the upper rotating spindle 610 is controlled as the angle between the upper damper plate 630 and the lower damper plate 650. In this embodiment, the pin end 610A is a six-sided cone. That is, the inflammatory angle is increased by 60 degrees for each rotating side, and the larger the angle design, the smaller the rotational resistance, that is, the faster the rotational speed of the polishing tool 60 is rotated. Therefore, the design of the number of faces of the cross-cone of the upper end portion 610A of the upper spindle 610 can be used as a design basis for the self-rotation damping state of the polishing tool 60. Various changes and modifications can be made without departing from the scope of the inventions described below, and the invention is not limited by the description. Embodiments of the embodiments are given. 16 1301436 [Description of the drawings] The first figure shows a perspective view of the polishing tool system of the present invention, the second figure shows a partial perspective view of the support member of the polishing tool system of the present invention; the third figure shows the line along the first figure. A cross-sectional view of the AA; the fourth figure shows a partial perspective view of the clamping member and the tool holder of the polishing tool system of the present invention; and the fifth figure shows a schematic view of the jig of the polishing tool system of the present invention which is not pressed by an external force; The figure shows a schematic view of the fixture of the polishing tool system of the present invention being pressed by an external force; the seventh figure shows an exploded perspective view of the polishing tool of the polishing tool system of the present invention; and the eighth figure shows the combination of the polishing tools of the polishing tool system of the present invention. The ninth diagram shows a schematic cross-sectional view of the upper rotary spindle of the polishing tool of the polishing tool system of the present invention; and the tenth is a schematic cross-sectional view of the upper rotary spindle of the polishing tool of the polishing tool system of the present invention. [Main component symbol description] 1 Polishing tool system 10 Seat 20, 30, 40 Fixture 17 1301436
60、70、80 210、310、410 211 212 213 220、320、420 230、 330、430 231、 331、431 240、340、440 241 242 243 244 245 610 610A 620 621 630 631 632 640 650 651 652 抛光刀具 支稽件 扇形後端 扇形前端 透孔 連動件 失持件 柩接部 刀具固定座 水平部之Π型體 垂直部之门型體 凹孔 錐形透孔 方形凹孔 上旋轉主軸 插銷端部 上轴承 第一穿孔 上阻尼板 第二穿孔 凸部 套筒 下阻尼板 第二穿孔 凸柱 18 1301436 653 凹槽 660 下轴承 661 第一穿孔 670 下旋轉主軸 670A 插銷端部 680 外筒 690 阻尼液 ❿ 1960, 70, 80 210, 310, 410 211 212 213 220, 320, 420 230, 330, 430 231, 331, 431 240, 340, 440 241 242 243 244 245 610 610A 620 621 630 631 632 640 650 651 652 Polishing Tool support member, fan-shaped rear end, fan-shaped front end, through hole, linkage, missing piece, splicing, tool holder, horizontal portion, vertical body, door, body, recessed hole, tapered through hole, square recess, on the rotating spindle pin end Bearing first perforation upper damper plate second perforated convex sleeve lower damper plate second perforated stud 18 1301436 653 groove 660 lower bearing 661 first perforation 670 lower rotating main shaft 670A pin end 680 outer cylinder 690 damping fluid ❿ 19