1300836 九、發明說明： 【舍明所屬之技術領域】 本發明係有關於一種声 禋層*型無塵室之氣流供應系 ^ 口 ，係有關於一種應用於層流型盔塵室之工 作空間與外壁之間所且之〇U至之工 所具之乳流通這，且透過每一組過滹模 組對應一線型風谨B丘 μ ， U^ imp 型風道對應一進氣單元之方 式形成…、塵至之均勻氣流供應系統。 【先前技術】 …按目九前：業界高潔淨度之層流型無塵室為了有效排 二I S二，製程良率’大量採用全覆蓋式的風機遽 ，、同枝、、且格配南架孔洞回風地板來製造層流型氣流場。 如第1圖所示，在半導體製造工廠等之無塵室丨 作空間10之天花板n上係透過骨架之設計配置成格子 ，’並於骨架所形成之格子空間内，分別設置有瀘、網° ， 每一濾網係搭配有一風機13與外殼，並藉由風機13之驅 動，吸取無塵室1工作空間1〇天花板u上方之空氣來提 高外殼内之空氣靜壓以穿透濾網形成出風氣流12，&此L曰 經過濾網過濾之潔淨氣流進入無塵室1工作空間1〇後持 續向下流動，可將無塵室1工作空間i 0内之汙染物帶至 播塵至1工作空間1 〇下方孔洞地板14，經由地板1 * 孔洞將帶有汙染物之氣流導至地板14下方之空間，再^ 由與外部空氣15混合後，復將空氣再次導至無塵室丨工 作空間10之天花板11上方，以此方式持續進行氣、、斧循 環’可使無塵室1的工作空間10内之空氣保持清淨。 19873 6 1300836 然，上述之無塵室，係以一濾網搭配一風機之方式來 製造層流型氣流場，對於大型無塵室，則必需使用大量的 風機濾網機組，相對於此種高使用量，不論於耗電或維修 費用均會造成成本上之負擔。 職是，如何提供一種能夠解決上述習知技術之問題的 層流型無塵室之氣流供應系統，實為此領域中亟待解決之 問題。 【發明内容】 馨於上述習知技術之缺失，本發明之主要目的在於提 ^種低耗電及低維修f用之無塵室之氣流供應系統，以 卽省成本。 /為達上述主要目的，本發明之層流型無塵室氣流供應 糸統，係應用於無塵室之工作空間與外壁之間所且之氣流 通運中，該無塵室之氣流供應系統包括：回風地板，係對 應该氣流通道設置於該無塵室之工作空間之底部，並設有 二洞：外氣導風孔，係穿設於該無塵室之外壁，並銜接外 乳風官與通風纟統外氣”箱且用m丨 =道;複數進氣單元，係設置於該氣流通道上;複數 線^這，係分別相對各該進氣單^設置於該無塵室之 :，間頂部對應該氣流通道上；以及複數組過濾模組， 係/刀別相對各該、㈣風道而設置於該 頂部。 土王〜丨F工间 承上述’該無塵室之層流型氣流供應系統係透過該回 風地板之孔洞以及該外氣導風孔分別導出該工作空間之 19873 7 1300836 •、 , \ 空氣以及導入外部空氣至該氣流通道，該些空氣在該氣流 通道混合後，藉由該進氣單元將混合後之空氣傳導至該線 型風這，以提高其内部空氣靜壓至足以穿透該過濾模組而 形成出風氣流，由於該線型風道長度可達數公尺，其内部 猙壓分布不均，必須透過該過濾模組之阻抗變化將該過濾 模組表面出風氣流速度均勻化，同時過濾該氣流且據以導 入热塵室工作空間；或先透過該線型風道之結構變化於該 I線=風道内將其内部壓力均勻化，再透過過濾模組將輸出 1氣流方向一致化，同時過濾該氣流且據以導入該無塵室之 工作空間，此一速度均勻化之氣流穿越該無塵室之工作空 =後再穿越該回風地板進入該氣流通道中，如此持續進行 前述流程，俾可淨化該無塵室之工作空間内之空氣。 >於本發明之-較佳實施例中，該進氣單元係為風機； 该線型風道係由風管形成；該線型風道之結構變化係指該 風管之高度變化；每-組過濾模組係包括複數過濟單元· >該過濾單元係為濾網。 技術，本發明之無塵室之氣流供應系統主 道對過遽模組對應一線型風道且每-線型風 =用；，亦Γ早7式形成氣流’故可節省進氣單元之 里’、15，可即省風機之使用量，相對地，則可節劣 再乜万面之成本，以達上述之主要目的。 【貫施方式】 1 以下係糟由特定的具體實例說 式，熟悉此技藝之人士 七月之貝&方 由本5兄月曰所揭不之内容輕易地 19873 8 13008扣, ‘瞭解本發明之其他優點與功效。本發明亦可藉由其他不同 的具體實例加以施行或應用’本說明書中的各項細節亦可 基於不同觀點與應用，在不㈣本發明之精神下進行 修飾與變更。 σ | 友請參閲第2Α及2Β圖，其係為本發明之層流型無塵室 氣流供應系統之實施例一平面及立體示意圖。如圖所示， 該無塵室之層流型氣流供應系統2係應用於無塵室3之工 作空間30與外壁31之間所具之氣流通道32中， 室之層流型氣流供應系統2包括回風地板2Q、外氣導風 數進氣單^22、複數線型風道23以及複數組過 濾模組24。 —以下即對本發明之層流型無塵室氣流供應系統2之 貫施例一的上揭各物件進行詳細說明： 相風地板20,係對應該氣流通道32設置於該無塵 至之工作空間30之底冑，並設有1300836 IX. Description of the invention: [Technical field to which Sheming belongs] The present invention relates to a gas supply system for a sonar layer* type clean room, relating to a working space applied to a laminar flow helmet chamber The milk that is connected to the outer wall of the outer wall is distributed by the milk, and the through-module corresponding to the one-line type wind b-b, the U^ imp type air passage corresponds to an air intake unit. Form a uniform airflow supply system with... [Prior Art] ... According to the front of the ninth: the industry's high cleanliness laminar flow clean room in order to effectively discharge the second IS II, the process yield 'a large number of fully-covered fan 遽, the same branch, and the match with the South The holes are returned to the floor to create a laminar flow field. As shown in Fig. 1, the ceiling n of the clean room 空间10 of the semiconductor manufacturing factory is arranged in a lattice through the design of the skeleton, and is provided with a cymbal and a net in the lattice space formed by the skeleton. ° , each filter is equipped with a fan 13 and a casing, and driven by the fan 13, sucks the air in the clean room 1 working space 1 above the ceiling u to increase the static pressure inside the casing to penetrate the filter. The air flow 12, & this L曰 filtered clean air flow into the clean room 1 working space 1 持续 continuous downward flow, can bring the pollutants in the clean room 1 working space i 0 to the dust To the working space 1 〇 below the hole floor 14, through the floor 1 * hole to direct the airflow with contaminants to the space below the floor 14, and then mix with the outside air 15, then re-direct the air to the clean room上方 Above the ceiling 11 of the work space 10, in this way, the air and the axe circulation are continued to keep the air in the working space 10 of the clean room 1 clean. 19873 6 1300836 However, the above-mentioned clean room is a laminar flow type with a filter and a fan. For a large clean room, a large number of fan filter units must be used. The amount of use, regardless of power consumption or maintenance costs, will cause a cost burden. It is a problem to provide an airflow supply system for a laminar flow clean room capable of solving the above-mentioned problems of the prior art, which is an urgent problem to be solved in this field. SUMMARY OF THE INVENTION In view of the above-mentioned shortcomings of the prior art, the main object of the present invention is to provide an airflow supply system for a clean room with low power consumption and low maintenance, so as to save costs. For the above main purpose, the laminar flow type clean room air supply system of the present invention is applied to the air flow between the working space and the outer wall of the clean room, and the air supply system of the clean room includes The return air floor is disposed at the bottom of the working space of the clean room, and has two holes: an outer air guiding hole, which is disposed on the outer wall of the clean room and is connected to the outer milk wind. The officer and the ventilation system are outside the box and use m丨=channel; the plurality of air intake units are disposed on the air flow passage; the plurality of lines are respectively disposed in the clean room relative to each of the air intake units :, the top corresponds to the airflow channel; and the complex array filter module, the system/knife is opposite to each of the (4) air ducts and is disposed at the top. The earth king ~ 丨F work space carries the above-mentioned 'the clean room layer The flow air supply system through the hole of the return air floor and the outer air air guiding hole respectively derives the working space of the labor space of the 1987, the air, and the air into the air flow channel, wherein the air is in the air flow channel After mixing, the air intake unit will be mixed The air is conducted to the linear wind to increase the internal air static pressure enough to penetrate the filter module to form a wind air flow. Since the linear air passage length is up to several meters, the internal pressure distribution is uneven. The airflow velocity of the surface of the filter module must be uniformized by the impedance change of the filter module, and the airflow is filtered and introduced into the hot-dust chamber working space; or the structure of the linear air duct is first changed to the I-line. = The internal pressure of the air duct is equalized, and then the direction of the airflow of the output 1 is uniformized through the filter module, and the airflow is filtered and introduced into the working space of the clean room, and the uniformity of the airflow passes through the dust-free room. The working space of the chamber is then passed through the return air floor into the air flow passage, so that the foregoing process is continued, and the air in the working space of the clean room can be purified. In the preferred embodiment of the present invention The air intake unit is a fan; the linear air duct is formed by a air duct; the structural change of the linear air duct refers to a height change of the air duct; each of the filter modules includes a plurality of temporary passage units. The filter unit is a filter screen. The technology, the air supply system of the clean room of the present invention has a main channel to the pass-through module corresponding to the one-line type air duct and the air type per line type is used; 'Therefore, it can save the inside of the air intake unit', 15, which can save the use of the fan, and relatively, the cost can be reduced to meet the main purpose of the above. [Comprehensive application method] 1 The specifics of the specific example, the person familiar with the art of the July shell & the content revealed by the 5 brothers and sisters is easily deducted from 19873 8 13008, 'understand the other advantages and effects of the present invention. The present invention Modifications and variations can be made without departing from the spirit and scope of the invention. And FIG. 2 is a plan and perspective view of a first embodiment of the laminar flow type clean room air supply system of the present invention. As shown in the figure, the laminar flow type air supply system 2 of the clean room is applied to the air flow passage 32 between the working space 30 and the outer wall 31 of the clean room 3, and the laminar flow type air supply system 2 of the chamber The utility model comprises a return air floor 2Q, an outer air guide air intake air inlet unit 22, a plurality of linear air ducts 23 and a complex array filter module 24. - The following is a detailed description of the above-mentioned items of the first embodiment of the laminar flow type clean room air supply system 2 of the present invention: the phase air floor 20 is disposed corresponding to the air flow passage 32 in the dust-free working space At the end of 30, and
該回風地板20係為高牟祕把 n ^ T 工作空間30之空氣（如箭頭❹卜 、…該外氣導風孔21，係穿設於該無塵室3之外壁3卜 並銜接外氣風管與诵涵金 处# ^ 糸、、先外氣空調箱且用以引入外部 工乳至该氣流通道3 2。认丄, ^从立 於本貫施例中，該外氣導風孔21 係用以導入外部空翕 2、〜、 乳至该氣流通道32(如箭頭所示），需 予以說明的是，該外氣总 / ^η 及風s與通風糸統外氣空調箱係非為 本發明主要技術内容 屬資知技術之範_，故未予圖示。 该複數進氣單元？9 γ U，係設置於該氣流通道32上。於 19873 9 13〇〇836 例中，該進氣單元22係 =產生氣流，如第2B圖所示，係以且用二動:： 際實施時，係可依敫並非以此為限，實 列方式以及^際需求調整該複數進氣單元22之排 \ ，數線型風道23，係、以每—線型風道以對應一進氣 於今氣首式3應$亥無塵室3之工作空間3〇之頂部設置 # 上。於本實施例中，該線型風道23係由 虫e形成，且用以作為氣流通往該無 ，通道，如第2B圖所示，係以十二線型 思，但亚非以此為限，實際實施時，係可依實際需求調整 該複數線型風道23之數量。 複數組過濾模組24，係以每一組過濾模組24對應一 線型風道23之方式設置於該無塵室3之工作空間3〇之頂 部。於本實施例中，每一組過濾模組24係包括複數過濾 單元，該過濾單元係為濾網，如第2B圖所示，係以每〆 組過濾模組24包括六過濾單元作示意（每一線型風道23 上所、纟會製之方格係對應一過滤早元），但並非以此為限， 實際實施時，係可依實際需求調整每一組過濾、模組24之 過濾、單元的數量。 承上述’該無塵室之氣流供應糸統2之工作方式係、透 過該回風地板20之孔洞以及該外氣導風孔21分別導出該 工作空間30之空氣以及導入外部空氣至該氣流通道32， 該些空氣在該氣流通道32混合後，藉由該進氣單元22 19873 10 ί300836 =混合後之空氣導入該線型風道23,以提高該線型風道 23内部空氣靜壓到足俾穿透該過濾單元（濾網）形 氣流，由於該線型風道23長度可達數公尺，該 23内部靜壓分布不均’必須再透過該過濾模組24之阻二 變化將該過濾單元(濾網)表面出風氣流速度均勻化，同日Γ 過濾該氣流且據以導入該無塵室3之工作空間如，戍先r 透過該線型風道23之結構變化於該線型風道23内將5其内 部壓力均句化，再透過該過遽模組24將輸出氣流方向、一 致化’同時過濾該氣流且據以導入該無塵室3之工作空間 30，此一速度均勻化之氣流穿越該無塵室3之工作空間 30後再穿越回風地板2〇進入氣流通道犯中，如此持續 進行前述流程，俾可淨化該無塵室3之工作空間3〇内1 空氣；其中，該線型風道23之結構變化係指該風管之 度變化。The return air floor 20 is an air that is high in the n ^ T working space 30 (such as an arrow, a wind tunnel 21, which is disposed outside the wall 3 of the clean room 3 and is connected Air duct and 诵涵金处# ^ 糸,, first external air-conditioning box and used to introduce external work milk to the air flow channel 3 2. Put it, ^ from the basic example, the outside air guide The hole 21 is used to introduce the external space 2, ~, milk to the air flow channel 32 (as indicated by the arrow), it should be noted that the external air total / ^ η and the wind s and the ventilation system outside the air conditioning box This is not the main technical content of the present invention, and is not shown in the figure. The complex air intake unit ?9 γ U is disposed on the air flow channel 32. In the case of 19873 9 13〇〇836 The air intake unit 22=generates the airflow. As shown in FIG. 2B, when the two-way operation is implemented, the system can adjust the plural number according to the actual method and the demand. The row of the air intake unit 22, the number of linear air ducts 23, is the top of the working space 3 〇 每 无 今 进气 进气 进气 进气 进气 进气 今 今 今 今 今 今 今 今 今 今 今 今 今In the present embodiment, the linear air duct 23 is formed by the insect e, and is used as an air flow to the non-channel, as shown in FIG. 2B, which is a twelve-line type, but Except for this limitation, in actual implementation, the number of the plurality of linear air ducts 23 can be adjusted according to actual needs. The complex array filter module 24 is set in such a manner that each group of filter modules 24 corresponds to the one-line type air duct 23 In the embodiment, each set of filter modules 24 includes a plurality of filter units, and the filter unit is a filter screen, as shown in FIG. 2B. Each group of filter modules 24 includes six filter units for illustration (the grids on each of the linear ducts 23 and the grids corresponding to the grids are corresponding to one filter element), but not limited thereto, and in actual implementation, Adjusting the number of filters and modules of each group of filters and modules 24 according to actual needs. The working mode of the air supply system 2 of the clean room is through the hole of the return air floor 20 and the outer air guide. The air holes 21 respectively lead the air of the working space 30 and introduce the outside air The air flow channel 32, after the air flow channel 32 is mixed, the air is introduced into the linear air channel 23 by the air intake unit 22 19873 10 300 300836 = to increase the internal air static pressure of the linear air channel 23 to The foot is penetrated by the filter unit (filter) shaped airflow. Since the linear air duct 23 can be several meters in length, the 23 internal static pressure distribution unevenness must be transmitted through the filter module 24 The air flow velocity of the filter unit (filter) surface is uniformized, and the working space that is introduced into the clean room 3 according to the same day is filtered, and the structure of the linear air passage 23 is changed to the linear air passage. In the 23, the internal pressure of the internal pressure is equalized, and the direction of the output airflow is uniformly made through the over-modulation module 24, and the airflow is filtered and introduced into the workspace 30 of the clean room 3, and the speed is uniformized. The airflow passes through the working space 30 of the clean room 3 and then passes through the return air floor 2 to enter the airflow passage. Thus, the foregoing process is continued, and the air in the clean room 3 can be purified. , the structural change of the linear air duct 23 The chemical system refers to the change in the degree of the duct.
^由上述可知，本發明之層流型無塵室之氣流供應系統 2係可透過二種方式讓導入該無塵室3之工作空間30之 氣/瓜速度及方向王一致的狀態，亦即，不論由該過濾模組 24中之那過濾單元（濾網）將氣流導入該無塵室3之工 乍工門3 0 °亥氣流之出風速度及方向皆為相同。以下即 針對該二種方式之實施方式進行詳細說明： (1)透過該過濾模組24之阻抗變化將該濾網出口氣 流之速度均勻化，並將該氣流之方向一致化，同時過濾該 氣流且據以導入該無塵室3之工作空間3〇 : 一般高度一 致的線型風道23之内部壓力係隨風管長度、風管高度、 19873 11 1300836 v · \ '供風量以及遽網阻抗而變，例如一線型風道23，風道外 親（風管）規格如下：風道長度為3500mm;寬度為1 000賴； 風迢氣流入口高度為200 mm;濾網阻抗為140pa(當 Vj〇. 5m/s時）’當線型風道23之風量由2〇cmm增至7〇 時，各風量下風管管路各部壓力梯度變化如第3圖所示。 …固定風量下可在風管各部安裝不同阻抗之濾網(該過 濾杈組24之過濾單疋）來促使出風達到均勻的效果，濾網 過濾模組24之過濾單元）之阻抗分布曲線可依實際風 官管路各部分之内外壓力差異推導出（範例如第从及4β 圖所不，其中，第4A圖係為平均風速在0.33m/s情況下 =濾網阻抗分布曲線，第4b圖係為平均風速在〇5m/s 情況下之濾網阻抗分布曲線）。 需附加說明的是，於實際實施時，濾網阻抗難以完全 依照阻抗分佈曲線製作，但可透過分段變更阻抗的方式改 善出風均勻度。此外，送風量（風速）變更時，最佳之濾網 _之阻抗分佈曲線亦隨之變更，因此，分段選擇具適當阻抗 之濾網的方式雖可改善壓力均勻度，但對於非設計風量之 改善程度係隨風速差距（風速差距=實際使用風速—設計風 速）的增加而遞減。 (2)先透過該線型風道23之結構變化於該線型風道 内將該風道内部壓力均勻化，再透過該過濾模組24將濾 網出口氣流之方向一致化並過濾該氣流且據以導入該無 塵至3之工作空間3〇 :此一結構變化數學模式主要係透 過該氣流在該線型風道23行經一微小距離（άχ)的控制體 12 19873 1300836 ，、 ，，丨 ，（Control Volumn)内導致的流速與壓力變化加以推 導，建立經由該過濾模組24之過濾單元（濾網）之氣流的 風速與阻抗之關係式。如第5圖所示，在微小控制體積内 (control VQlume)，假^該氣流之人口流速為以，流經 肚後，流速為ui + 1，該過濾模組24之過濾單元（濾網） 之出口風速為vn，由於該氣流之出。為大氣狀態（ui + i •之=向），因此沿著X軸方向之壓力分佈為ρ(χ)=ρ&，壓 力變化為零。因此動量方程式（mQmentum卿如⑻如式 _ (1)所示： d{u2r) + (1 ^ p)uVndx = ^gdx _^mdp p p……式（1); 其中’冷值為動量分佈比值。 另外以連續方程式（c〇ntinuity 如式 ⑵），即可導出該過濾模組24之過渡單元（遽網）之出口 .風速H線型風運23之氣流流速之關係式（如 ! ……式⑵；It can be seen from the above that the airflow supply system 2 of the laminar flow type clean room of the present invention can pass the air/melon speed and the direction of the direction of the working space 30 introduced into the clean room 3 in two ways, that is, The wind speed and direction of the airflow of the working chamber of the clean room 3 by the filter unit (filter) in the filter module 24 are the same. The following is a detailed description of the implementation of the two modes: (1) homogenizing the velocity of the outlet flow of the filter through the impedance change of the filter module 24, and aligning the direction of the airflow while filtering the airflow. And according to the working space 3导入 into which the clean room 3 is introduced: the internal pressure of the linear air duct 23 with a generally uniform height is related to the length of the duct, the height of the duct, the air supply volume of 19873 11 1300836 v · \ 'and the impedance of the net Change, for example, the first-line air duct 23, the air duct outer (air duct) specifications are as follows: the length of the air duct is 3500mm; the width is 1000 liters; the air inlet height is 200 mm; the screen impedance is 140pa (when Vj〇. 5m/s) When the air volume of the linear duct 23 is increased from 2〇cmm to 7〇, the pressure gradient of each part of the duct pipe under each air volume is as shown in Fig. 3. ...A fixed-air volume can be installed in the air ducts with different impedance filters (the filtering unit of the filter group 24) to promote the uniform effect of the air outlet, and the impedance distribution curve of the filter unit of the filter module 24 can be According to the difference between the internal and external pressures of the various parts of the actual wind pipe (fan, for example, the first and the 4β maps, where the 4A is the average wind speed of 0.33m / s = filter impedance distribution curve, 4b The graph is the strain impedance distribution curve of the average wind speed at 〇5m/s). It should be noted that, in actual implementation, the filter impedance is difficult to be completely formed according to the impedance distribution curve, but the uniformity of the wind can be improved by changing the impedance in sections. In addition, when the air supply volume (wind speed) is changed, the impedance distribution curve of the optimal filter _ is also changed. Therefore, the method of selecting the filter with appropriate impedance can improve the pressure uniformity, but for the non-design air volume. The degree of improvement is diminished with the increase in wind speed difference (wind speed difference = actual wind speed - design wind speed). (2) firstly homogenizing the internal pressure of the air passage through the linear air passage 23, and then passing the filter module 24 to align the direction of the outlet airflow of the filter and filtering the airflow. Introducing the dust-free to 3 working space 3: This structural change mathematical mode is mainly through the airflow in the linear air duct 23 through a small distance (άχ) of the control body 12 19873 1300836, ,,,丨, (Control The flow rate and pressure changes caused by the Volumn) are derived to establish a relationship between the wind speed and the impedance of the air flow through the filter unit (filter) of the filter module 24. As shown in Fig. 5, in the small control volume (control VQlume), the population flow rate of the airflow is ,, after flowing through the belly, the flow rate is ui + 1, the filter unit of the filter module 24 (filter) The exit wind speed is vn due to the outflow of the airflow. It is the atmospheric state (ui + i • = direction), so the pressure distribution along the X-axis direction is ρ(χ) = ρ & the pressure changes to zero. Therefore, the momentum equation (mQmentum Qing (8) is as shown in the formula _ (1): d{u2r) + (1 ^ p)uVndx = ^gdx _^mdp pp... (1); where 'cold value is the momentum distribution ratio . In addition, in the continuous equation (c〇ntinuity, as in equation (2)), the exit of the transition unit (遽网) of the filter module 24 can be derived. The relationship between the airflow velocity of the wind speed H-line wind transport 23 (eg, ... (2) ;
Vndx =，……式(3); 由於dp=0(壓力變化），所以式（1)無因次化後 (non-dimensionless)，可得出式（4)。 邮〜U ···“·式(4); ^於該線型風道23之氣流流場可視為资流狀態，因 ^ as1Us reslstance^ turbulent flow vel〇city Ρ116#式⑶可以得出—階動量方程式，詳細推導 19873 13 1300836 νί ^ I ι "請參考 【Albert L· Loeffler， Turbulent Flow Through Porous Resistances Slightly Inclined To The Flow Direction, National Advisory Committee For Aeronautics, NACA， Technical Note 4221·】。 而由該一階動量方程式即可進行該線型風道23之結 構設計（風管之高度設計如第6圖所示’即為線型風道 23之結構設計範例，其中’風道外觀（風管）之風道長度 #為3500mm、風道寬度為10 00mm、風道氣流入口高度為200 mm以及濾網阻抗為l40Pa(當V=0· 5m/s時）。 再請參閱第7A及7B圖’其係為本發明之層流型無塵 室氣流供應系統之實施例二平面及立體示意圖。如圖所 示，此實施例二與前揭實施例一間之差異’係在於本發明 之層流型無塵室氣流供應糸統2之外氣導風孔21、衩數 進氣單元22、複數線蜇風道23之設置位置’而若以此實 施例二進行該無塵室之層流型氣流供應系統2之物件佈 鲁設，係可相應節省使用空間’以提局空間利用率’或適用 於較小型之無塵室3 ° 綜上所述，本發明之層流型無塵室氣流供應系統係主 要包括回風地板、外氣導風孔、複數進氣單元、複數線型 風道以及複數組過濾模組’透過該些物件之相互配合’以 在無塵室内產生風速一致均勻且方向一致的氣流’俾可淨 化該無塵室之工作空間内之空氣；相較於習知技術’本發 明之層流型無塵室氣流供應系統為節省進氣單元之使用 14 19873 1300836 « ^ 量，主要錢過每-組_额對應 型風道對應-進氣單元之方式形成氣流，相::也且：—線 省在耗電及維修方面之成本。 … 17可即 上述實施例僅例示性說明本發明之原理及其 非用於限制本發明。任何熟習此項技藝之人士均可‘ 背本發明之精神及範訂，對上述實施例進行修飾盘改延 =因此’本發明之權利保護範圍，應如後述之中請專利 乾圍所列。 【圖式簡單說明】 第1圖係為習知之無塵室之平面示意圖； 弟2Α及2Β圖係為本發明之層流型無塵室氣流供應系 統之實施例一平面及立體示意圖； 第3圖係為本發明之層流型無塵室氣流供應系統之 風管於各風量下之管路内部各部份壓力梯度之變化示意 圖； ~ 第4Α及4Β圖係為本發明之層流型無塵室氣流供應系 統之濾網於不同風速下之阻抗分布曲線示意圖； 第5圖係為本發明之層流型無塵室氣流供應系統之 風道分析圖； 第6圖係為本發明之層流型無塵室氣流供應系統之 線型風道之結構設計範例示意圖；以及 第7Α及7Β圖係為本發明之層流型無塵室氣流供應系 統之實施例二平面及立體示意圖。 【主要元件符號說明】 15 19873 1300836 ^Vndx =, ... (3); Since dp = 0 (pressure change), equation (1) is non-dimensionless, and equation (4) can be obtained. Post ~U ·····(4); ^The flow field of the linear duct 23 can be regarded as the status of the flow, because ^ as1Us reslstance^ turbulent flow vel〇city Ρ116# (3) can be obtained - the amount of momentum Equation, detailed derivation 19873 13 1300836 νί ^ I ι " Please refer to [Albert L. Loeffler, Turbulent Flow Through Porous Resistances Slightly Inclined To The Flow Direction, National Advisory Committee For Aeronautics, NACA, Technical Note 4221.] The first-order momentum equation can be used to design the structure of the linear air duct 23 (the height design of the duct is as shown in Fig. 6), which is an example of the structural design of the linear duct 23, wherein the wind of the air duct appearance (duct) The track length # is 3500mm, the air duct width is 10000mm, the air duct air inlet height is 200mm, and the filter impedance is l40Pa (when V=0·5m/s). Please refer to Figures 7A and 7B' The plane and the three-dimensional schematic diagram of the second embodiment of the laminar flow type clean room air supply system of the present invention. As shown in the figure, the difference between the second embodiment and the first embodiment is based on the laminar flow type of the present invention. dust The air supply plenum 2, the air plenum 21, the enthalpy intake unit 22, and the plurality of hurricane ducts 23 are disposed at the position of the airflow supply system 2 of the clean room according to the second embodiment. The object is Bruce, which can save space by using 'to improve the space utilization' or apply to the smaller clean room 3 °. In summary, the laminar flow clean room air supply system of the present invention is mainly Including the return air floor, the outer air guiding hole, the plurality of air intake units, the plurality of linear air ducts and the multi-array filter module 'through the mutual cooperation of the objects' to generate a uniform and uniform airflow in the clean room.俾 can purify the air in the working space of the clean room; compared with the prior art, the laminar flow type clean room air supply system of the present invention saves the use of the air intake unit 14 19873 1300836 « ^ amount, the main money The airflow is formed in a manner corresponding to the air intake unit of the corresponding air duct, and the phase:: also: - the cost of power consumption and maintenance in the line. 17 The above embodiment is merely illustrative of the present invention. The principle and its non-use The present invention can be modified by anyone skilled in the art, and the above embodiments are modified. Therefore, the scope of protection of the present invention should be patented as described later. The following is a schematic diagram of a conventional clean room; the 2nd and 2nd drawings are the first embodiment of the laminar flow clean room air supply system of the present invention. Fig. 3 is a schematic diagram showing changes in pressure gradients of various portions of a duct of a laminar flow type clean room air supply system of the present invention under various air volumes; ~ Figs. 4 and 4 are diagrams of the present invention Schematic diagram of the impedance distribution curve of the filter screen of the laminar flow clean room air supply system at different wind speeds; Fig. 5 is a wind channel analysis diagram of the laminar flow type clean room air supply system of the present invention; The schematic diagram of the structural design of the linear air duct of the laminar flow type clean room air supply system of the present invention; and the seventh and seventh drawings are the plane and the three-dimensional diagram of the second embodiment of the laminar flow type clean room air supply system of the present invention.[Main component symbol description] 15 19873 1300836 ^
x \ I I -1 無塵室 10 工作空間 11 天花板 12 濾網 13 風機 14 地板 .15 外部空氣 2 無塵室之層流型氣流供應系統 • 20 回風地板 21 外氣導風孔 22 進氣單元 23 線型風道 24 過濾模組 3 無塵室 30 工作空間 31 外壁 ^ 32 氣流通道 16 19873x \ II -1 Clean room 10 Work space 11 Ceiling 12 Filter 13 Fan 14 Floor.15 External air 2 Laminar flow air supply system for clean room • 20 Return air floor 21 External air vent 22 Air intake unit 23 linear air duct 24 filter module 3 clean room 30 working space 31 outer wall ^ 32 air flow channel 16 19873