TWI296999B - Mold for molding glass optical articles - Google Patents

Mold for molding glass optical articles Download PDF

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TWI296999B
TWI296999B TW093116211A TW93116211A TWI296999B TW I296999 B TWI296999 B TW I296999B TW 093116211 A TW093116211 A TW 093116211A TW 93116211 A TW93116211 A TW 93116211A TW I296999 B TWI296999 B TW I296999B
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Taiwan
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mold
hard coating
super
particles
ultra
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TW093116211A
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Chinese (zh)
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TW200540133A (en
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Shih Che Chien
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Hon Hai Prec Ind Co Ltd
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Priority to TW093116211A priority Critical patent/TWI296999B/en
Priority to JP2005134658A priority patent/JP2005343783A/en
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

Description

1296999 五、發明說明(1) 【發明所屬之技術領域】 本發明係關於一種模仁,特別係關於一種高硬度且容 易脫模之模仁。 【先前技術】 模仁廣泛應用於模壓成型製程,特別係製造光學玻璃 產品,如非球面玻璃透鏡、球透鏡、稜鏡等,採用直接模 壓成型(Direct Press-molding)技術可直接生產光學玻璃 產品,無需打磨、拋光等後續加工步驟,可大大提高生產 政率及產量’且產品質量好。但直接模壓成型法對於模仁 之化學穩定性、抗熱沖擊性能、機械強度、表面光滑度等 要求非常高。故,模壓成型技術之發展實際上主要取決於 模仁材料及模仁製造技術之進步。對於模壓成型之模仁一 般有以下要求: 、 a.於高溫時,具有很好之剛性、耐機械衝擊強 足夠之硬度; b. 於反復及快速加熱冷卻之熱衝擊下模仁不產生 紋及變形; 衣 c. 於高J昆時模仁成型表面與光學玻璃不發生化 應,不黏附玻璃; 予久 d. 不發生高溫氧化; 面光潔度之 型面e:加工性能好,易加工成高精度及高表 f .成本低。 傳統模仁大多採用不錄鋼或耐熱合金作為模仁材料1296999 V. INSTRUCTION DESCRIPTION OF THE INVENTION (1) Technical Field of the Invention The present invention relates to a mold core, and more particularly to a mold having a high hardness and easy release. [Prior Art] Molding is widely used in the molding process, especially in the manufacture of optical glass products, such as aspherical glass lenses, ball lenses, crucibles, etc. Direct optical molding can be directly produced by Direct Press-molding technology. There is no need for subsequent processing steps such as grinding and polishing, which can greatly improve the production rate and output' and the product quality is good. However, the direct compression molding method requires very high requirements for chemical stability, thermal shock resistance, mechanical strength, and surface smoothness of the mold. Therefore, the development of compression molding technology actually depends mainly on the improvement of mold core materials and mold manufacturing technology. Generally, the mold core has the following requirements: a. At high temperature, it has good rigidity and hardness sufficient for mechanical impact; b. The mold does not produce grain under the thermal shock of repeated and rapid heating and cooling. Deformation; Clothing c. In the high J Kun time mold surface molding and optical glass does not occur, do not adhere to the glass; long d. no high temperature oxidation; surface finish profile e: good processing performance, easy to process into high Accuracy and high table f. Low cost. Most of the traditional mold cores use non-recorded steel or heat-resistant alloy as the mold material.

五、發明說明(2) ,f模仁容易發生高溫氧化,於反復熱沖擊作用下,會發 曰曰粒長大’從而模仁表面變粗糙,黏結玻璃。 為解決上述問題,非金屬及超硬合金被用於模仁。 核=矽(SiC),氮化矽(叫比),碳化鈦(Tic),碳化 ’· *及叙化鶴—話合金已經被用於製造模仁。惟,上述 ΐ物陶莞硬度非常高,很難加工成所需要之外形, 特別係兩精度非球面形。而超硬合金除難以加工之外, 用一段時間之後還可能發生高溫氧化。 二以碳化物或超硬合金為模仁基底,其表面形成有 層ί覆層之複合結構模仁成為新的發展方向。 光學玻璃產::4: ?5,948號揭示一種用於直接模壓成型 :子!璃產时之谡合結構模仁。其採用高強度之超硬合 ^、喊化物陶究或金屬陶究作為模仁基底 =形成有銀⑻薄膜層,或Ir與麵(pt)、鍊、=核 (:=)或,)之合金薄膜層’或_膜層或Ru Re、Os、Rh之合金薄膜層。 針Ϊ本或其合金資源稀少,價格昂貴,使得 二碳化物或金屬陶究作為模仁基底, ;钥(二等:屬i辛:ϊ結過程中需添加銘(c〇)、鎳(⑴ J鉬(Mo)等金屬疋素作為添加劑,這樣模仁長 後,迢些7L素將通過上述貴金屬層,擴散至 從而與欲模壓形成之玻璃發生反應,影 模 壓成型玻璃產品之質量。 、之精度及才吳 除上述形成貴金屬薄膜層之外,還有利用電衆化學氣 1296999V. Description of the invention (2), f-mould is prone to high-temperature oxidation, and under the action of repeated thermal shock, the granules grow up, so that the surface of the mold is roughened and the glass is bonded. In order to solve the above problems, non-metal and super-hard alloys are used for the mold core. Nuclear = bismuth (SiC), tantalum nitride (Ten), titanium carbide (Tic), carbonized ‘· * and sedative crane-speaking alloys have been used to make molds. However, the above-mentioned stolen pottery has a very high hardness and is difficult to process into a desired shape, in particular, a two-precision aspherical shape. In addition to being difficult to process, superhard alloys may undergo high temperature oxidation after a period of time. Secondly, the carbide or super-hard alloy is used as the base of the mold, and the composite structure with the layered coating on the surface becomes a new development direction. Optical Glass Production::4: ?5,948 Reveals a Kind for Direct Molding: Sub! The structure of the glass is combined with the mold. It adopts high-strength superhardness, shouting ceramics or metal ceramics as the base of the mold = formed with a silver (8) film layer, or Ir and face (pt), chain, = core (:=) or, Alloy film layer 'or _ film layer or alloy film layer of Ru Re, Os, Rh. Acupuncture sputum or its alloy resources are scarce and expensive, so that the two carbides or metal ceramics are used as the base of the mold, and the key (second class: belongs to i xin: in the process of ϊ knot, it is necessary to add Ming (c〇), nickel ((1) J molybdenum (Mo) and other metal bismuth as an additive, so that after the mold is long, some of the 7L will diffuse through the noble metal layer to react with the glass to be molded, and the quality of the molded glass product. In addition to the above-mentioned formation of the precious metal film layer, there is also the use of electricity chemical gas 1296999

沈積法(T h e r m a 1 惟,這種薄膜層於 ’使得光學玻璃產品 相沈積法(Plasma CVD)或熱化學氣相 CVD)形成碳化矽或氮化矽薄膜層者, 400度兩溫時容易黏著光學玻璃產品 不易脫模。 可防止模仁基體 且脫模時不會黏著玻璃之模仁實為 有監於此,提供 之金屬元素向外擴散 必要。 一種化學穩定性佳 【内容】 為,決習知技術之上述問題,本發明之目的在於提供 化、機械強度高、可防止金屬元素擴散且容易脫 模之換仁。 為實,本發明之目的,本發明提供一種具有超硬鍍膜 之杈仁,其包括: 2仁基體,其具有一與欲模壓產品相對應之模壓面; 及覆盍於該模壓面之超硬膜層。 ^ 該模仁基體係由陶瓷、金屬陶瓷或超硬合金材料製 造,包括SiC、Si、Si3N4、Zr02、A 1203、TiN、Ti02、TiC、 B4C、WC、W 或WC-Co。 超硬膜層係包括非晶質硼碳氮材料基體及分佈於基體 ,之立方晶氮化硼微粒及金剛石碳微粒。所述非晶質硼碳 虱材料基體係連續分佈,而立方晶氮化硼微粒及金剛石碳 微粒係離散或部分連續分佈於其中,且立方晶氮化硼微粒 及金剛石碳微粒之粒徑為卜1 0 0奈米範圍内。 上述超硬膜層可通過電漿化學氣相沈積法沈積或濺鍍Deposition method (T herma 1), this film layer is formed in a thin film of tantalum carbide or tantalum nitride by 'Plasma CVD or thermal chemical vapor phase CVD. It is easy to adhere at 400 degrees. Optical glass products are not easy to demould. It is necessary to prevent the mold core from being adhered to the mold and to prevent the glass from sticking to the mold when it is released. A chemical stability is good [Contents] In order to solve the above problems of the prior art, the object of the present invention is to provide a replacement which is high in mechanical strength, prevents diffusion of metal elements, and is easily released. To achieve the object of the present invention, the present invention provides a cocoon having an ultra-hard coating comprising: a matrix of 2 in a core having a molding surface corresponding to the product to be molded; and a superhard covering the molding surface Membrane layer. ^ The matrix system is made of ceramic, cermet or superhard alloy, including SiC, Si, Si3N4, Zr02, A 1203, TiN, Ti02, TiC, B4C, WC, W or WC-Co. The super-hard film layer includes an amorphous boron-carbon nitrogen material matrix and a cubic boron nitride particle and diamond carbon particles distributed on the substrate. The amorphous boron-carbon ruthenium material-based system is continuously distributed, and the cubic boron nitride particles and the diamond carbon particles are discretely or partially distributed therein, and the particle diameters of the cubic boron nitride particles and the diamond carbon particles are Within 1 0 0 nanometer range. The above superhard layer can be deposited or sputtered by plasma chemical vapor deposition

第7頁 1296999Page 7 1296999

法而形成。 相較於先前技術,本發 面形成一超硬膜層,利用非 好之特點,使得本發明之模 產品黏著,容易脫模;而立 粒硬度極高,故,可提高模 硬膜層還可防止模仁基體之 璃產品產生不良影響。 【實施方式】 明於高硬度之模仁基體模壓表 晶質硼碳氮材料基體潤滑性良 仁於模壓時,不會與光學玻璃 方晶氮化硼微粒及金剛石碳微 壓面之機械強度;另外,該超 金屬元素擴散,從而避免對玻 下面將結合附圖對本發明作進一步之詳細說明。 請參閱第一圖,本發明第一實施例提供一種用於模壓 非球7光學玻璃產品之模仁10,其包括一模仁基體12及形 成於模仁基體12模壓面之薄膜層η。該模仁基體12可藉由 =下陶瓷、金屬陶瓷或超硬合金為主要材料經燒結製造而 得:SiC、Si、Si3N4、Zr02、Al2〇3、TiN、Ti02、TiC、 、WC、或WC-Co。模仁基體i 2之模壓表面需與待模壓之 非球面光學玻璃產品之形狀相對應,即非球面形。薄膜層 14覆盍於模仁基體1 2之模壓表面,其係包括非晶質硼破氮 材料 16(Amorphous Boron Carbon Nitride,即a-BCN)、 立方晶氮化硼微粒17(Cubic Boron Nitride)及金剛石碳 微粒1 8。非晶質硼碳氮材料1 6係連續層,可作為立方晶氮 化硼微粒17及金剛石碳微粒18分佈的基體;而立方晶氮化 硼微粒1 7及金剛石碳微粒1 8係離散或部分連續分佈於整個 非晶質硼碳氮材料1 6基體中,其含量佔薄膜層丨4總量1 〇 %Formed by law. Compared with the prior art, the surface of the present invention forms a super-hard film layer, and the mold product of the invention is adhered to the mold by easy use, and the hardness of the granule is extremely high, so that the mold hard layer can be improved. Prevent the adverse effects of the glass products of the matrix of the mold. [Embodiment] It is shown that the matrix of the matrix of the high-hardness mold is molded, and the lubricity of the boron-carbon-nitrogen-based material is not mechanically bonded to the optical glass cubic boron nitride particles and the diamond carbon micro-pressure surface. The supermetallic element is diffused so as to avoid further details of the invention, which will be described below with reference to the accompanying drawings. Referring to the first figure, a first embodiment of the present invention provides a mold core 10 for molding an aspherical 7 optical glass product, comprising a mold base 12 and a film layer η formed on the molding surface of the mold base 12. The mold base 12 can be obtained by sintering a ceramic, a cermet or a superhard alloy as a main material: SiC, Si, Si3N4, Zr02, Al2〇3, TiN, Ti02, TiC, WC, or WC. -Co. The molded surface of the matrix of the mold core i 2 corresponds to the shape of the aspherical optical glass product to be molded, i.e., aspherical. The film layer 14 is coated on the molding surface of the mold base 12, which includes an amorphous boron carbon nitride material 16 (a-BCN), and a cubic boron nitride particle 17 (Cubic Boron Nitride). And diamond carbon particles 18. A 16-series continuous layer of amorphous boron-carbon nitrogen material can be used as a matrix for distribution of cubic boron nitride particles 17 and diamond carbon particles 18; and cubic boron nitride particles 17 and diamond carbon particles 18 are discrete or partially Continuously distributed in the entire matrix of amorphous boron-carbon nitrogen materials, the content of which is 1 〇 % of the total thickness of the film layer 丨4

12969991296999

五、發明說明(5) :〇/。(摩爾百*比)。立方晶氮化硼微粒η及 内。=薄膜層U之厚度可在i微米至1〇〇微米範圍二犯圍 當然’本發明不僅可用於模壓非球面光學玻璃產品之 二:’亦可應用於其他不同形狀、不同用途之模壓產品之 二-。清參閱第二圖,本發明第二實施例提供一種用於模 一平面光學玻璃產品之模仁2〇,纟包括一具有光滑平面之 模仁基,22,及覆蓋於該光滑平面之薄膜層24。該模仁基 體2 2可藉由以下陶瓷、金屬陶瓷或超硬合金為主要材料經 燒結製造而得:SiC、Si、Si3N4、Zr02、Al2〇3、TiN、V. Description of invention (5) : 〇 /. (Moore 100% ratio). Cubic boron nitride particles η and inside. = The thickness of the film layer U can be in the range of i micrometer to 1 〇〇 micron. Of course, the invention can be used not only for the molding of aspherical optical glass products: 'It can also be applied to other molded products of different shapes and different uses. two-. Referring to the second figure, a second embodiment of the present invention provides a mold core for a mold-plane optical glass product, comprising a mold base having a smooth plane, 22, and a film layer covering the smooth plane. twenty four. The mold core 2 2 can be obtained by sintering the following ceramic, cermet or super hard alloy as main materials: SiC, Si, Si3N4, Zr02, Al2〇3, TiN,

Ti02 ' TiC、B4C、WC、W或WC-Co。薄膜層24係包括非晶質 删碳氮材料26、立方晶氮化硼微粒π及金剛石碳微粒28。 非晶質爛碳氮材料26係連續層,可作為立方晶氮化硼微粒 27及金剛石碳微粒28分佈的基體;而立方晶氮化硼微粒27 及金剛石碳微粒2 8係離散或部分連續分佈於整個非晶質硼 碳氮材料26基體中,其含量佔薄膜層24總量10%〜60%(摩 爾百分比)。立方晶氮化硼微粒27及金剛石碳微粒28之粒 徑係在1-1 00奈米範圍内,最好係在5〜丨00奈米範圍内。而 薄膜層24之厚度可在1微米至1〇〇微米範圍内。 上述二實施例中,模仁基體12及22係通過燒結或其他 加工方法製備而成,薄膜層14及24可通過電漿化學氣相沈 積法(Plasma Chemical Vapor Deposition)或濺鍍法形 成,包括微波電漿化學氣相沈積法(Microwave Plasma Chemical Vapor Deposition),共鍍法(Co-Sputtering)Ti02 'TiC, B4C, WC, W or WC-Co. The thin film layer 24 includes an amorphous carbon-depleted nitrogen material 26, cubic boron nitride fine particles π, and diamond carbon fine particles 28. Amorphous rotten carbon-nitrogen material 26 is a continuous layer which can be used as a matrix for distribution of cubic boron nitride particles 27 and diamond carbon particles 28; and cubic boron nitride particles 27 and diamond carbon particles 28 are discrete or partially continuous. The content of the entire amorphous boron carbonitride material 26 is 10% to 60% by mole based on the total amount of the film layer 24. The cubic boron nitride particles 27 and the diamond carbon particles 28 have a particle diameter in the range of 1-1 00 nm, preferably in the range of 5 丨 00 nm. The thickness of the film layer 24 can range from 1 micron to 1 micron. In the above two embodiments, the matrix bases 12 and 22 are prepared by sintering or other processing methods, and the film layers 14 and 24 may be formed by plasma chemical vapor deposition (Plasma Chemical Vapor Deposition) or sputtering, including Microwave Plasma Chemical Vapor Deposition, Co-Sputtering

第9頁 1296999 五、發明說明(6) 或反應式賤鍍法(Reactive Sputtering)。 本發明之模仁10(20),其模仁基體12(22)具有高硬 度’高機械強度之優點,可承受高溫模壓時產生的壓力及 應力。模壓面被薄膜層14(24)覆蓋,其係由不易被氧化的 非金屬材料組成,包括較軟之非晶質硼碳氮材料丨6 (2 6)及 高硬度之立方晶氮化硼微粒17(27)與金剛石碳微粒18 (28), 其潤滑 化硼微 小,既 高。另 屬元素 些金屬 本發明 化學穩 綜 提出專 例,自 技藝之 應涵蓋 由於非晶質硼碳氮材料1 6 ( 2 6 )含有sp2鍵結,使得 性良好,故,模壓玻璃產品容易脫模;而立方晶氮 粒17(27)及金剛石碳微粒18(28)之硬度高、粒徑 可增強模仁表面之機械強度,亦使模壓面之精度提 外,該薄膜層14(24)還可阻止模仁基體12(22)之金 於使用時滲透、擴散至薄膜層14(24)外面,避免這 元素使玻璃變色,影響光學玻璃質量。綜上所述, 之具有超硬鍍膜之模仁具有高機械強度、抗 定性優良且容易脫模之特點。 上所述,本發明確已符合發明專利之要件,遂依法 矛J申喷准以上所述者僅為本發明之較佳實施 不能以此限制本荦之φ古杳直女丨益固 ,丄α >丄甲导利靶圍。舉凡熟悉本案 人士极2本發明之精神所作之等效修 於以下申請專利範圍内。 ιPage 9 1296999 V. Description of the invention (6) or Reactive Sputtering. The mold core 10 (20) of the present invention has the advantages of high hardness and high mechanical strength of the mold base 12 (22), and can withstand the pressure and stress generated during high temperature molding. The molding surface is covered by a film layer 14 (24) composed of a non-metallic material that is not easily oxidized, including a soft amorphous boron carbonitride material 丨6 (26) and a high hardness cubic boron nitride particle. 17 (27) and diamond carbon particles 18 (28), which lubricate boron is small and high. The other elements of the metal of this invention are chemically stable and put forward special cases. The self-skills should cover that the amorphous boron-carbon nitrogen material 16 6 ( 2 6 ) contains sp2 bonding, which makes it good, so the molded glass product is easy to demould. The cubic crystal nitrogen particles 17 (27) and the diamond carbon particles 18 (28) have high hardness, the particle size can enhance the mechanical strength of the surface of the mold, and the precision of the molded surface is also improved, and the film layer 14 (24) is also The gold of the matrix base 12 (22) can be prevented from penetrating and diffusing to the outside of the film layer 14 (24) during use, thereby preventing the element from discoloring the glass and affecting the quality of the optical glass. In summary, the mold core with super-hard coating has the characteristics of high mechanical strength, excellent resistance and easy demolding. As described above, the present invention has indeed met the requirements of the invention patent, and the above-mentioned ones are only the preferred implementation of the present invention, which cannot be used to limit the φ 杳 杳 杳 丨 丨 丄 丄 丄α > armor guides the target circumference. The equivalents of the spirit of the present invention, which is familiar to the person skilled in the present invention, are within the scope of the following patent application. ι

第10頁 1296999 圖式簡單說明 第一圖係本發明第一實施例用於模壓非球面光學玻璃 產品之模仁之示意圖; 第二圖係本發明第二實施例用於模壓平面光學玻璃產 品之模仁之示意圖。 【主要元件符號說明】 模仁 10,20 模仁基體 12,22 薄膜層 14,24 非晶質硼碳氮材料16,26 立方晶氮化硼微粒 1 7,2 7Page 10 1296999 BRIEF DESCRIPTION OF THE DRAWINGS The first drawing is a schematic view of a mold for molding an aspherical optical glass product according to a first embodiment of the present invention; and the second embodiment is a mold for molding a flat optical glass product according to a second embodiment of the present invention. Schematic diagram of Ren. [Main component symbol description] Molding 10,20 Mold base 12,22 Film layer 14,24 Amorphous boron carbon nitride material 16,26 Cubic boron nitride particles 1 7,2 7

第11頁Page 11

Claims (1)

^m\ 六、申請專利範圍 1· 一種具有超硬鍍膜之模仁,其包括: 一模仁基體,其具有一模壓面;及 一超硬膜層覆蓋於該模仁基體之模壓面; 其中,該超硬膜層包括非晶質硼碳氮材料連續基 體、立方晶氮化硼微粒及金剛石碳微粒分佈於該非晶 質删碳氮材料基體中者。 2·如申請專利範圍第1項所述之具有超硬鍍膜之模仁,其 中該模仁基體係由SiC、Si、Si3N4、Zr02、Α12〇3、 TiN、Ti02、TiC、B4C、WC、W 或WC-Co材料製成。 3·如申請專利範圍第2項所述之具有超硬鍍膜之模仁,其 中該模仁基體係經燒結而成。 4.如申請專利範圍第1項所述之具有超硬鍍膜之模仁,其 中該超硬膜層係通過電漿化學氣相沈積法或濺鍍法沈 積而成。 5 ·如申請專利範圍第1項所述之具有超硬鍍膜之模仁,其 中該超硬膜層厚度為1微米至100微米範圍内。 6·如申請專利範圍第1項所述之具有超硬鍍膜之模仁,其 中該立方晶氮化硼微粒及金剛石碳微粒之摩爾百分比 含量為10 %〜60%。 7·如申請專利範圍第1項所述之具有超硬鍍膜之模仁,其 中該立方晶氮化硼微粒及金剛石碳微粒之粒徑在1 一 100奈米範圍内。 8·如申請專利範圍第7項所述之具有超硬鍍膜之模仁,其 中該立方晶氮化碾微粒及金剛石碳微粒之粒徑在5〜^m\6. Patent application scope 1. A mold core having a super-hard coating, comprising: a mold core body having a molding surface; and a super hard film layer covering the molding surface of the mold core body; The superhard film layer comprises a continuous matrix of amorphous boron carbon nitride material, cubic boron nitride particles and diamond carbon particles distributed in the matrix of the amorphous carbon-depleting material. 2. The mold core having super-hard coating as described in claim 1, wherein the mold-based system is composed of SiC, Si, Si3N4, Zr02, Α12〇3, TiN, Ti02, TiC, B4C, WC, W Or made of WC-Co material. 3. A mold having a super-hard coating as described in claim 2, wherein the mold-based system is sintered. 4. The mold having an ultra-hard coating as described in claim 1, wherein the super-hard film layer is deposited by plasma chemical vapor deposition or sputtering. 5. The mold having an ultra-hard coating as described in claim 1, wherein the superhard layer has a thickness in the range of 1 micrometer to 100 micrometers. 6. The mold having an ultra-hard coating according to claim 1, wherein the cubic boron nitride fine particles and the diamond carbon fine particles have a molar percentage of 10% to 60%. 7. The mold having an ultra-hard coating as described in claim 1, wherein the cubic boron nitride particles and the diamond carbon particles have a particle diameter in the range of 1 to 100 nm. 8. The mold core having the super-hard coating as described in claim 7 wherein the cubic nitride nitride particles and the diamond carbon particles have a particle size of 5~ 第12頁 1296999 六、申請專利範圍 1 0 0奈米範圍内。 9.如申請專利範圍第1項所述之具有超硬鍍膜之模仁,其 中該模仁之模壓面為非球面。 1 0.如申請專利範圍第1項所述之具有超硬鍍膜之模仁,其 中該模仁之模壓面為平面。Page 12 1296999 VI. The scope of application for patents is within the range of 100 nanometers. 9. The mold core having an ultra-hard coating as described in claim 1, wherein the mold surface of the mold core is aspherical. A mold having an ultra-hard coating as described in claim 1, wherein the mold face of the mold is flat. 第13頁Page 13
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