TWI294016B - - Google Patents
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- Publication number
- TWI294016B TWI294016B TW095102347A TW95102347A TWI294016B TW I294016 B TWI294016 B TW I294016B TW 095102347 A TW095102347 A TW 095102347A TW 95102347 A TW95102347 A TW 95102347A TW I294016 B TWI294016 B TW I294016B
- Authority
- TW
- Taiwan
- Prior art keywords
- film
- cavity
- micro
- unit
- thermal expansion
- Prior art date
Links
- 239000007788 liquid Substances 0.000 claims description 51
- 239000000463 material Substances 0.000 claims description 50
- 239000000758 substrate Substances 0.000 claims description 17
- 238000000576 coating method Methods 0.000 claims description 2
- 239000010408 film Substances 0.000 claims 24
- 239000000126 substance Substances 0.000 claims 2
- URLKBWYHVLBVBO-UHFFFAOYSA-N Para-Xylene Chemical group CC1=CC=C(C)C=C1 URLKBWYHVLBVBO-UHFFFAOYSA-N 0.000 claims 1
- 210000000746 body region Anatomy 0.000 claims 1
- 239000011248 coating agent Substances 0.000 claims 1
- 210000003205 muscle Anatomy 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000000034 method Methods 0.000 description 16
- 230000008569 process Effects 0.000 description 15
- 229920000052 poly(p-xylylene) Polymers 0.000 description 7
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 238000009413 insulation Methods 0.000 description 4
- -1 Poly(p-phenylene) Polymers 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000010292 electrical insulation Methods 0.000 description 3
- 238000005459 micromachining Methods 0.000 description 3
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- 229920000265 Polyparaphenylene Polymers 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 210000001124 body fluid Anatomy 0.000 description 2
- 239000010839 body fluid Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 102000004169 proteins and genes Human genes 0.000 description 2
- 108090000623 proteins and genes Proteins 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 239000002918 waste heat Substances 0.000 description 2
- 239000008096 xylene Substances 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 235000015429 Mirabilis expansa Nutrition 0.000 description 1
- 244000294411 Mirabilis expansa Species 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 208000007536 Thrombosis Diseases 0.000 description 1
- 239000002318 adhesion promoter Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004720 dielectrophoresis Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000001962 electrophoresis Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 210000000987 immune system Anatomy 0.000 description 1
- 238000000338 in vitro Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 238000002032 lab-on-a-chip Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 235000013536 miso Nutrition 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 210000000496 pancreas Anatomy 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000006903 response to temperature Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000000779 smoke Substances 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/1077—Flow resistance valves, e.g. without moving parts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14346—Ejection by pressure produced by thermal deformation of ink chamber, e.g. buckling
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Micromachines (AREA)
- Fluid-Pressure Circuits (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW095102347A TW200728605A (en) | 2006-01-20 | 2006-01-20 | Thermo-buckled micro-actuator unit made of polymer with high thermal expansion coefficient |
| US11/653,212 US7800279B2 (en) | 2006-01-20 | 2007-01-16 | Thermo-buckled micro actuation unit made of polymer of high thermal expansion coefficient |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW095102347A TW200728605A (en) | 2006-01-20 | 2006-01-20 | Thermo-buckled micro-actuator unit made of polymer with high thermal expansion coefficient |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200728605A TW200728605A (en) | 2007-08-01 |
| TWI294016B true TWI294016B (enExample) | 2008-03-01 |
Family
ID=38285095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW095102347A TW200728605A (en) | 2006-01-20 | 2006-01-20 | Thermo-buckled micro-actuator unit made of polymer with high thermal expansion coefficient |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7800279B2 (enExample) |
| TW (1) | TW200728605A (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2881416B1 (fr) * | 2005-01-31 | 2007-06-01 | St Microelectronics Crolles 2 | Microresonateur |
| EP2178640A1 (en) * | 2007-08-03 | 2010-04-28 | Enigma Diagnostics Limited | Reaction vessel |
| GB0715170D0 (en) * | 2007-08-03 | 2007-09-12 | Enigma Diagnostics Ltd | Reaction vessel |
| EP2691232A4 (en) * | 2011-03-31 | 2014-08-13 | Michelin Rech Tech | PARYLENE COATING OF A TIRE PART |
| TWI672262B (zh) * | 2018-12-28 | 2019-09-21 | 財團法人工業技術研究院 | 微機電加熱裝置 |
| US10703625B1 (en) | 2019-03-29 | 2020-07-07 | Industrial Technology Research Institute | Microelectromechanical system (MEMS) apparatus with adjustable spring |
| TWI680097B (zh) * | 2019-03-29 | 2019-12-21 | 財團法人工業技術研究院 | 具可調整彈簧的微機電裝置 |
| TWI717178B (zh) * | 2019-12-30 | 2021-01-21 | 財團法人工業技術研究院 | 一種具氣密空腔的微機電裝置 |
| US12474721B2 (en) | 2022-12-16 | 2025-11-18 | Hamilton Sundstrand Corporation | Controlling flow of a fluid using thermally deformable channel |
| US20250085725A1 (en) * | 2023-09-08 | 2025-03-13 | Hamilton Sundstrand Corporation | Flow control device formed of thermally adaptive material and a thermoelectric junction |
| US12384515B2 (en) | 2023-09-08 | 2025-08-12 | Hamilton Sundstrand Corporation | Airfoil formed of thermally adaptive materials and a thermoelectric junction |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3946398A (en) * | 1970-06-29 | 1976-03-23 | Silonics, Inc. | Method and apparatus for recording with writing fluids and drop projection means therefor |
| US6071087A (en) * | 1996-04-03 | 2000-06-06 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Ferroelectric pump |
| US5816780A (en) * | 1997-04-15 | 1998-10-06 | Face International Corp. | Piezoelectrically actuated fluid pumps |
| FR2772512B1 (fr) * | 1997-12-16 | 2004-04-16 | Commissariat Energie Atomique | Microsysteme a element deformable sous l'effet d'un actionneur thermique |
| US6255757B1 (en) * | 1999-09-01 | 2001-07-03 | Jds Uniphase Inc. | Microactuators including a metal layer on distal portions of an arched beam |
| MXPA03002388A (es) * | 2000-09-18 | 2004-09-06 | Par Technologies Llc | Accionador piezoelectrico y bomba que lo utiliza. |
| FR2818795B1 (fr) * | 2000-12-27 | 2003-12-05 | Commissariat Energie Atomique | Micro-dispositif a actionneur thermique |
| KR100929601B1 (ko) * | 2001-08-20 | 2009-12-03 | 허니웰 인터내셔널 인코포레이티드 | 스냅작동식 열 스위치 |
| US7011288B1 (en) * | 2001-12-05 | 2006-03-14 | Microstar Technologies Llc | Microelectromechanical device with perpendicular motion |
| US6869169B2 (en) * | 2002-05-15 | 2005-03-22 | Eastman Kodak Company | Snap-through thermal actuator |
| US6817702B2 (en) * | 2002-11-13 | 2004-11-16 | Eastman Kodak Company | Tapered multi-layer thermal actuator and method of operating same |
| US7011228B2 (en) * | 2002-11-27 | 2006-03-14 | S.C. Johnson Home Storage, Inc. | Sealable container cover |
| US7073890B2 (en) * | 2003-08-28 | 2006-07-11 | Eastman Kodak Company | Thermally conductive thermal actuator and liquid drop emitter using same |
-
2006
- 2006-01-20 TW TW095102347A patent/TW200728605A/zh not_active IP Right Cessation
-
2007
- 2007-01-16 US US11/653,212 patent/US7800279B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| US7800279B2 (en) | 2010-09-21 |
| TW200728605A (en) | 2007-08-01 |
| US20070171257A1 (en) | 2007-07-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |