TWI288681B - Electrode for electrolytic processing, and electrolytic processing apparatus and electrolytic processing method using the same - Google Patents

Electrode for electrolytic processing, and electrolytic processing apparatus and electrolytic processing method using the same Download PDF

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Publication number
TWI288681B
TWI288681B TW092127739A TW92127739A TWI288681B TW I288681 B TWI288681 B TW I288681B TW 092127739 A TW092127739 A TW 092127739A TW 92127739 A TW92127739 A TW 92127739A TW I288681 B TWI288681 B TW I288681B
Authority
TW
Taiwan
Prior art keywords
electrode
group
workpiece
processing
ion exchange
Prior art date
Application number
TW092127739A
Other languages
English (en)
Chinese (zh)
Other versions
TW200406276A (en
Inventor
Yuzo Mori
Hidekazu Goto
Yasushi Toma
Original Assignee
Ebara Corp
Yuzo Mori
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2002295421A external-priority patent/JP3953400B2/ja
Application filed by Ebara Corp, Yuzo Mori filed Critical Ebara Corp
Publication of TW200406276A publication Critical patent/TW200406276A/zh
Application granted granted Critical
Publication of TWI288681B publication Critical patent/TWI288681B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
TW092127739A 2002-10-08 2003-10-07 Electrode for electrolytic processing, and electrolytic processing apparatus and electrolytic processing method using the same TWI288681B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002295421A JP3953400B2 (ja) 2002-10-08 2002-10-08 イオン解離促進方法、電解加工用電極、電解加工方法及び装置
JP2003070898 2003-03-14

Publications (2)

Publication Number Publication Date
TW200406276A TW200406276A (en) 2004-05-01
TWI288681B true TWI288681B (en) 2007-10-21

Family

ID=32095408

Family Applications (1)

Application Number Title Priority Date Filing Date
TW092127739A TWI288681B (en) 2002-10-08 2003-10-07 Electrode for electrolytic processing, and electrolytic processing apparatus and electrolytic processing method using the same

Country Status (2)

Country Link
TW (1) TWI288681B (fr)
WO (1) WO2004033765A1 (fr)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS511673B2 (fr) * 1972-09-30 1976-01-19
JPS6014610B2 (ja) * 1979-11-17 1985-04-15 株式会社荏原製作所 粉末イオン交換樹脂のプレコ−テイング方法
US5948265A (en) * 1996-07-05 1999-09-07 Tosoh Corporation Ion-exchanger, process for production thereof, and process for removal of multiply charged anions employing the ion-exchanger
JP3837783B2 (ja) * 1996-08-12 2006-10-25 森 勇蔵 超純水中の水酸基による加工方法
US6652658B1 (en) * 1998-12-07 2003-11-25 Japan Science And Technology Corporation Method for machining/cleaning by hydroxide ion in ultrapure water
JP2001064799A (ja) * 1999-08-27 2001-03-13 Yuzo Mori 電解加工方法及び装置
JP4513145B2 (ja) * 1999-09-07 2010-07-28 ソニー株式会社 半導体装置の製造方法および研磨方法

Also Published As

Publication number Publication date
WO2004033765A1 (fr) 2004-04-22
TW200406276A (en) 2004-05-01

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