1274顶 pif 九、發明說明： 【發明所屬之技術領域】 本發明是關於一種基板運送裝置，更詳細而言，是關 於一種可穩定運送基板以確保基板之均勻性的基板運送裝 置。 【先前技術】 一般而言，液晶顯示裝置具備薄膜電晶體基板，其形 成有薄膜電晶體；彩色濾光片基板，其形成有彩色滅光片 層，以及液晶面板，其具有介於兩基板之間的液晶層。由BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer apparatus, and more particularly to a substrate transfer apparatus which can stably transport a substrate to ensure uniformity of the substrate. [Prior Art] In general, a liquid crystal display device includes a thin film transistor substrate formed with a thin film transistor, a color filter substrate formed with a color extinguishing sheet layer, and a liquid crystal panel having a substrate therebetween The liquid crystal layer between. by
於液晶面板是非發光元件，故照射有光之背光單元可位於 液晶面板上。自背光單元所照射之光之透過量相應於液晶 層之排列狀態而受到調節。X，液晶顯示裝置具備驅動電 路，其用於驅動液晶面板之各像素；以及資料驅動哭盥閘 ，'器，其從驅動電路接收信號，將電壓施加至顯祕 域内之資料線與閘極線。 等，膜電晶體基板、彩色濾、光片基板 樂液處理、洗淨、乾燥、檢查等-系列的基 板處^ ^此處理過程中必須妓而順利地運送基板。 示，基先前之基板運送裝置之概略圖。如圖面所 以及框架二:1()1、具備筒12。、滾筒支撐部I3。、 特定間距丨賴12()以沿基板運送方向&隔開 支樓，而排列。運送滾筒120藉由滾筒支撐部130 支撐部13G藉由框架部14〇支撑。 基板110藉由運送滚筒⑶之輪^送於基板運 5Since the liquid crystal panel is a non-light emitting element, the backlight unit that is irradiated with light can be located on the liquid crystal panel. The amount of light transmitted from the backlight unit is adjusted in accordance with the arrangement state of the liquid crystal layer. X, the liquid crystal display device has a driving circuit for driving each pixel of the liquid crystal panel; and a data driving crying gate, which receives a signal from the driving circuit, and applies a voltage to the data line and the gate line in the explicit domain . Etc., film transistor substrate, color filter, light substrate, liquid processing, washing, drying, inspection, etc. - series of substrates ^ ^ This process must be carried out smoothly and smoothly. A schematic diagram of a substrate transfer device according to the prior art. As shown in the figure, and frame 2: 1 () 1, with a cylinder 12. , roller support portion I3. The specific spacing depends on 12() to be arranged along the substrate transport direction & The transport roller 120 is supported by the frame portion 14 by the roller support portion 130G. The substrate 110 is transported to the substrate by the wheel of the transport roller (3).
^此’本發明之目的在於提供—種可穩定運送基板以 確保基板之均勻性的基板運送裝置。 I2747i2fip;fThe purpose of the present invention is to provide a substrate transport apparatus which can stably transport a substrate to ensure uniformity of the substrate. I2747i2fip;f
U方向a &板no’當其處於被投人基板運送裝置IN 並^運送滾筒120運送之狀態下，藉由進行特定基板處理 之處理部15〇進行歧。處理部⑼可對基㈣行洗淨、 檢查、以及其他處理。如此之基板運送裝置詳細揭示於下 述專利文獻1中。 然而’如此基板運送I置101中，由於多個運送滚筒 〇相互協力以運送支揮基板11〇，而存在基板n〇之支樓 不均勻、基板運送不敎等現象。因於基板110產生由運 达滾筒丨2〇支叙部分與未支狀部分，故產 〇 之局部彎曲。 尤其是由處理部150處理之區域中，必須將處理部15〇 人基板110之間距保持固定，而如此基板iiq之局部彎曲 使處理部150與基板11Gi距發技變，由此使基板處 理之均勻性下降。又，由處理部⑼處理之過程中，必須 ，基板、110之運送速度保持固定，而基板運送裝置1〇1藉 、，运滚㈤120與基板110之摩擦力而運送基板11〇，所 2打滑時，難以將基板11G之運送速度保持固定。因此， 存在基板110品質降低之情形。 [專利文獻1]韓國專利申請第2〇〇3一84273號。 【發明内容】 明< 目的由具有下述特徵之基板運送裝置而達 成，根據本發明，縣板運送裝置包括：基板支撐部，其 6 I2747^8pif :，其於特定基板運送方向延 基板支稽部；以及驅動部，並使上 述基i反:^、Γ上述軌道部移動並運送上述基板。 平板上?;可進而包括裝载部’該裝载部向上述 十衣载或攸上述平板上卸載上述基板。 於上述平板上形成有滾筒孔 突包其貫通塊筒孔並自二= 曰 ^位置與撤回位置之間變位，該運送位置 Γ置是從上述運送位置撤回之位置；以及作動部，其1ί :述運送滾筒部於上述運送位置及上述撤回位置之間變 位之方式’使上述平板及上述運送滾筒部中至少一方移動。 士 C作動邛，g上述驅動部使上述基板支稽部移動 ，可使上述運送滾筒部位於上述撤回位置；當上述驅動 部未使上述基板支撐部移動時，可使上述運送 上述運送位置。 、 、、上述基板支撐部進而包括套管部，其可迴動地支撐上 述運送滾筒部，上述運送滚筒部可迴動於上述運送位置與 上述撤回位置之間。 、 、 上述運送滚筒部具備運送滾筒，其中間部藉由鉸鏈可 迴轉地支樓於上述套管部，並且一端部運送支撐上述基 板’、上述作動部可使上述運送滾筒部之他端部移動，並使 上述運送滾筒部迴動於上述運送位置與上述撤回位置之 間〇 7 I2?4%Spif 板運運送單元而達成，根據本發明’該基 ^運达早7C疋插人以部與㈣部之間而運送 A ’該狀部於處理基板之處理利人上述基板，該^ =將上述基板從上述處理部搬出，其特徵在於包含套管 具5撐上述基板、並形成有滾筒孔之平板;運送 2的板，出，且可㈣送位置與撤回位置之間變位， 板搬出部方向上之位置，該撤回位置是從上 =置。及作動部’其以將上述運送滾筒部於上述運 k位置及上述撤回位置之間變位之方 述運送滾筒部中至少一方移動。 更上这千板及上 動至部可進而包括執道部，其以從上述引入部移 &搬出部之方式而配置；以及驅動部 管部沿上述執道部移動。 便上I套 上述作動部可使上述運送滾筒部錄上騎送位置， 亚將上述基板從上述引入部裝載於上述平板上， 載於上述平板上之基板於上述搬出部卸载。/ ，貝 之基板運送裝置，於基板由處理部所處理之區 配置有執道部，使可運送支擇基板之基板運送 移動並將基板引入、運送及搬出’藉此可防止 由處理部處理之過程中產生局部彎曲，並可以使運 3 式，運送基板。藉此’可使基板均勾性 奴Ν，亚使基板品質提高。 8 I27472^Pif 【實施方式】 μ以下，參照附圖就本發明之較好的實施形態加以詳細 況明。於各種實施形態中，同—構成要素中附上相同參^ 號碼。關於同-構成要素，於第丨實施耗巾有作代表^ 說明，於其他實施形態中便未說明。 又 圖2是表示本發明實施形態之基板運送裝置之概略 圖，圖3是表示圖2之主要部分之主要圖，圖如是表示圖 2之運送滾同部位於運送位置之狀態的概略圖，圖仆是表 不圖2之運送滾筒部位於撤回位置之狀態的概略圖。如圖 所示，基板運送裝置1具備基板支撐部2〇〇、執道部孙、 以及驅動部40。基板支撐部200具備支撐基板10之平板 21〇。軌道部30於基板運送方向Α延伸，並可移動地支撐 基板支撐部200。驅動部40使基板支撐部200沿軌道部3〇 移動並運送基板1〇。 較好的是平板210可由金屬、合金、高強度塑料而形 成，並且至少較基板10的彎曲強度更大。平板21〇均勻地 支撐基板10之全體，以使其於基板1〇之一部分區域中不 會產生局部彎曲。執道部3〇具備兩個執道，其相互平行地 配置於基板運送方向A上。執道部30可具備單一軌道或 二個以上軌道。 軌道部30如圖5a至圖5e所示，基板10於藉由處理 部50處理期間，配置於處理部5〇之基板處理區域，以便 運送基板10，亦可不使其延伸至未經處理部5〇所處理之 其他區域。即，基板10於被引入處理部50之區域與自處 I27472SPif 理部50被搬出之區域中，可如引入部60及搬出部7〇，以 通常之運送滾筒式而被運送。當然，軌道部30可設置於基 板10未經處理部50所處理之其他區域中，並運送基板1〇。 驅動部40插入軌道部30與基板支撐部2〇〇之間，並 供給基板支撐部200動力，以使其於軌道部3()上移動。驅 •動部40可是馬達、其他之通常電動機構。驅動部4〇可由 - 基板支撐部200支撐，並與基板支撐部200 —體移動，或 者可由基板支撐部200之外部支撐，而不與基板支撐部2〇〇 一體移動。驅動部40使基板支撐部2〇〇以固定之移動速度 矛夕動，藉此而使基板1〇以固定之運送速度被運送。 基板運送裝置1，於整體均勻地支撐基板1〇之平板21〇 上積載有基板10，並使基板支撐部2〇〇移動，由此可運送 基，10，以使基板10之局部不產生彎曲。藉此，基板運 . ，裊置1於基板10由處理部50處理之過程中運送基板10 •日守，可將基板10與處理部50之間距保持固定。 、又，基板運送裝置1中，驅動部40使基板支撐部200 | ㈣定之軸速度移動並運送基板1G，因此不會產生打 滑，故可將基板10之運送速度保持固定。冑此，基板運送 裝置1運送由處理部50所處理之基板10時，可使基板處 理之均勻性提高。 基板支撐部200具傷裝載部22〇，其將基板1〇於平板 」〇上裝載或卸載。裝載部22〇巾，基板支樓部可如 ^邻（圖5a〜圖5e中6〇)或搬出部（圖5a〜圖5e中 7〇)與其他裝置聯接而運送基板1G。裝載部22〇將基板 10 I274^gpif :其他瓜置1載於平板21〇上，並使基板支推部2⑻支撐 土板10，或者將基板1〇從平板21〇卸載至其他裝置，並 將基板10從基板支撐部2〇〇排除。 、於平板210上形成有滚筒孔212，並且裝載部220具 : 備，送滾筒部222以及作動部228。運送滾筒部222貫通 滾同孔212並從平板21〇之板面突出，可在運送位置“B，， . 與撤回位置“C”之間變位，該運送位置“B”是將基板1〇運 U支撐於基板運送方肖A上之位置，該撤回位置“C”是從 ，送位置“B”撤回之位置；以及作動部228，其以使運送滾 同部222在運送位置“B，，與撤回位置“c”之間變位之方式， 使平板210及運送滾筒部222中至少一方移動。 運送滾筒部222具備運送滾筒224，其在與基板運送 方向A相同之方向上運送基板1〇。運送滾筒224藉由馬 _ 達、其他通常之電動機構（未圖示）而迴轉驅動，並運送 • 基板10。電動機構（未圖示），當運送滾筒部222位於運 • 匕位置B日守，可迴轉驅動運送滾筒224，當運送滾筒部 Φ 222位於撤回位置“c”時，可不迴轉驅動運送滾筒224。 . 運送滾筒部222位於運送位置“b”時，運送滾筒224 • 貫通滾筒孔212並自平板210之板面突出，支撐基板1〇 以替代平板210。藉此，運送滾筒224於基板運送方向a 上運送基板10,並將基板1〇裝載或卸載於平板21〇上。（參 照圖4a) 運送滾筒部222位於撤回位置“C”時，將運送滚筒224 收容於滾筒孔212中，以使其不會自平板21〇之板面突出， I2747i2ftPif 並且由平板210支撐基板i〇。藉此，基板10積载於平板 210上並且與基板支撐部200 —體移動。（參照圖4b) 此處’運送滚筒部222之運送位置“B”及撤回位置“C，， • 是運送滚筒部222相對於平板210所具有之相對位置。將 ‘ 平板210固定且使運送滾筒部222移動，可使運送滾筒部 • 222位於運送位置“B”及撤回位置“C”，並且將運送滾筒部 ， 222固定且平板210移動，可使運送滾筒部222位於運送 位置“B”及撤回位置“C”。作動部228可使運送滾筒部222 鲁 或平板210移動並使運送滾筒部222變位，或者可使運送 滾筒部222與平板210全部移動並使運送滾筒部222變位。 基板支撐部200具備套管部230，該套管部230可迴 動地支撐運送滚筒部222。套管部230之上侧設有平板 210，並且侧面具備鉸鏈部226，該鉸鏈部226可迴轉地支 • 撐運送滾筒部222之中間部。運送滾筒部222與作動部228 收容於套管部230，並與套管部230 —體移動。 運送滾筒部222具備運送滾筒224，該運送滚筒224 • 之中間部藉由鉸鏈部226可迴轉地支撐於套管部23〇，且 • 一端部運达支撐基板丨〇，作動部228使運送滾筒部222之 — 他端部移動，並使運送滾筒部222迴動於運送位置“B，，與 撤回位置“c”之間。作動部228使他端部往返移動，藉此 I使運送滾筒部222以鉸鏈部226為中心而迴動，以使運 达滾筒部222位於運送位置“B”或撤回位置“C，，。作動部228 是線性致動器、其他之通常驅動機構。 運送滾筒部222如圖3及圖4a〜圖仆所示，以鉸鏈 12 I2747i2fi5pif 部226為中心而迴動並於運送位置“B”及撤回位置“c”之間 變位，而本發明之基板運送裝置並非限於如此之結構。作 動部228可使運送滾筒部222往返移動於相對平板21〇之 - 板面而垂直之方向上，並可使運送滚筒部222貫通滚筒孔 、 212而突出或不突出。或者，作動部228可使平板210往 • 返移動於相對其板面之垂直方向上，並可使運送滾筒部 • 222貫通滾甸孔212而突出或不突出。除此以外，運送滾 筒部222與作動部228可基於其他通常結構。 • 作動部228，當驅動部40使基板支撐部200移動時， 可使運送滾筒部222位於撤回位置“c”，當驅動部未使 基板支撐部200移動時，可使運送滾筒部222位於運送位 置“B”。驅動部40使基板支撐部200沿執道部3〇移動時， 作動部228使運送滾筒部222位於撤回位置“C，，，並且基 板10由平板210穩定支撐。藉此，基板10藉由驅動部4〇 之驅動力而被運送於基板運送方向A上。 由於將基板10引入或搬出處理部（圖5a〜圖5e中 • 50)，於基板支撐部2〇〇將基板10從引入部（圖5a〜圖5e • 中6〇)叙載或於搬出部（圖5a〜圖5e中70)卸載過程中， 為穩定地引入及搬出基板，將基板支撐部200於執道部3〇 亡定位。藉此，驅動部40不會使基板支撐部2〇〇移動。此 蚪，作動部228使運送滾筒部222位於 於平板2K)上裝载或卸載基板1〇。 亚 裴載部220具備運送滾筒部222及作動部228，但如 可於平板21〇上裝载或卸載基板1G，則裝載部可以 13The U-direction a & plate no' is distorted by the processing unit 15 that performs the specific substrate processing in a state where it is transported by the substrate transfer device IN and the transport roller 120. The processing unit (9) can clean, inspect, and otherwise process the base (four) rows. Such a substrate transfer device is disclosed in detail in Patent Document 1 below. However, in the case of the substrate transporting unit 101, since the plurality of transporting rollers 〇 cooperate with each other to transport the supporting substrate 11A, there is a phenomenon that the substrate of the substrate n〇 is uneven, and the substrate is not transported. Since the substrate 110 is produced by the running roller 丨 2 〇 and the unbranched portion, the partial bending of the raft is performed. In particular, in the region processed by the processing unit 150, the distance between the processing unit 15 and the substrate 110 must be kept fixed, and thus the partial bending of the substrate iiq causes the processing portion 150 to be shifted from the substrate 11Gi, thereby causing the substrate to be processed. The uniformity is reduced. Further, in the process of processing by the processing unit (9), the transport speed of the substrate and the 110 must be kept constant, and the substrate transporting device 1 〇1, and the rolling force of the substrate (10) 120 and the substrate 110 can be transported to the substrate 11 〇. At this time, it is difficult to keep the conveyance speed of the substrate 11G constant. Therefore, there is a case where the quality of the substrate 110 is lowered. [Patent Document 1] Korean Patent Application No. 2, No. 3, 842, 731. SUMMARY OF THE INVENTION The object is achieved by a substrate transport apparatus having the following features. According to the present invention, a county board transport apparatus includes a substrate support portion, which is 6 I2747^8pif : which extends a substrate support in a specific substrate transport direction. And a driving unit, and moving the substrate to move the substrate. The flat plate may further include a loading portion that unloads the substrate onto the ten clothes or the flat plate. Forming, on the flat plate, a roller escutcheon penetrating through the block cylinder hole and displacing from a position between the second position and the retracted position, wherein the transport position is removed from the transport position; and the actuating portion is 1ί The method of displacing the transport roller unit between the transport position and the retracted position is to move at least one of the flat plate and the transport roller unit. When the drive C is actuated, the drive unit moves the substrate support portion to position the transport roller unit at the retracted position, and when the drive unit does not move the substrate support portion, the transport position can be carried. Further, the substrate supporting portion further includes a sleeve portion that reversibly supports the transport roller portion, and the transport roller portion is reversible between the transport position and the retracted position. The transport roller unit includes a transport roller, the middle portion of which is pivotably supported by the sleeve portion at a hinge portion, and the one end portion supports and supports the substrate, and the actuator portion moves the other end portion of the transport roller portion. And the transport roller unit is retracted between the transport position and the retracted position by the I7 I2? 4% Spif board transport unit, and according to the present invention, the base is transported to the front and the fourth (4) Between the portions, the A' portion is processed on the substrate to process the substrate, and the substrate is carried out from the processing portion. The package includes the sleeve 5 supporting the substrate and the roller hole is formed. The flat plate; the plate of the transport 2, the out, and (4) the position between the sending position and the retracted position, the position in the direction of the plate unloading portion, the retracted position is from the upper=set. And the actuating portion' moves at least one of the transport roller portions that displaces the transport roller portion between the transport k position and the retracted position. Further, the top plate and the upper portion may further include an obstruction portion that is disposed to move from the introduction portion and the unloading portion, and the drive portion tube portion moves along the obstruction portion. The first actuator unit can record the transport roller unit to the riding position, and the substrate can be loaded on the flat plate from the lead-in portion, and the substrate placed on the flat plate can be unloaded at the carry-out portion. /, the substrate transport device of the shell, in which the substrate is processed by the processing unit, the obstruction portion is arranged, and the substrate on which the substrate can be transported is transported, and the substrate is introduced, transported, and carried out, thereby preventing the processing portion from being processed. Partial bending occurs during the process, and the substrate can be transported. In this way, the substrate can be hooked and the substrate quality can be improved. 8 I27472^Pif [Embodiment] Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings. In the various embodiments, the same reference numerals are attached to the same constituent elements. Regarding the same-constituting element, the description of the consumption of the towel in the third embodiment is described in the other embodiments. 2 is a schematic view showing a substrate transfer device according to an embodiment of the present invention, and FIG. 3 is a schematic view showing a main part of FIG. 2, and is a schematic view showing a state in which the transport roller portion of FIG. 2 is located at a transport position. The servant is a schematic view showing a state in which the transport roller unit of Fig. 2 is located at the retracted position. As shown in the figure, the substrate transfer device 1 includes a substrate supporting portion 2A, a branching portion, and a driving portion 40. The substrate supporting portion 200 is provided with a flat plate 21 that supports the substrate 10. The rail portion 30 extends in the substrate conveying direction , and movably supports the substrate supporting portion 200. The driving unit 40 moves the substrate supporting unit 200 along the rail unit 3〇 and transports the substrate 1〇. It is preferable that the flat plate 210 be formed of a metal, an alloy, a high-strength plastic, and at least more curved than the substrate 10. The flat plate 21 〇 uniformly supports the entirety of the substrate 10 so that local bending does not occur in a portion of the substrate 1 。. The obligatory portion 3 has two tracks, which are arranged in parallel with each other in the substrate transport direction A. The obeying portion 30 can have a single track or more than two tracks. As shown in FIGS. 5a to 5e, the track portion 30 is disposed in the substrate processing region of the processing portion 5 while being processed by the processing portion 50 so as to transport the substrate 10 or not extend to the unprocessed portion 5.其他 Other areas handled by 〇. In other words, in the region where the substrate 10 is introduced into the processing unit 50 and the area where the processing unit 50 is carried out, the introduction unit 60 and the carrying-out unit 7 can be transported by a normal transport drum type. Of course, the rail portion 30 may be disposed in other regions of the substrate 10 that are not processed by the processing portion 50, and transport the substrate 1''. The driving portion 40 is inserted between the rail portion 30 and the substrate supporting portion 2, and is supplied with power to the substrate supporting portion 200 to be moved on the rail portion 3(). The drive unit 40 can be a motor or other conventional motor-drive mechanism. The driving portion 4A can be supported by the substrate supporting portion 200 and moved integrally with the substrate supporting portion 200, or can be supported by the outside of the substrate supporting portion 200 without being integrally moved with the substrate supporting portion 2'. The driving unit 40 causes the substrate supporting portion 2 to be moved at a fixed moving speed, whereby the substrate 1 is transported at a fixed transport speed. The substrate transfer device 1 supports the substrate 10 on the flat plate 21 on which the substrate 1 is uniformly supported, and moves the substrate support portion 2 to transport the substrate 10 so that the portion of the substrate 10 does not bend. . Thereby, the substrate 1 is transported, and the substrate 10 is transported during the processing of the substrate 10 by the processing unit 50. The distance between the substrate 10 and the processing unit 50 can be kept constant. Further, in the substrate transfer apparatus 1, the drive unit 40 moves the substrate support unit 200 (4) at a predetermined axial speed and transports the substrate 1G, so that slippage does not occur, so that the transport speed of the substrate 10 can be kept constant. As a result, when the substrate transport apparatus 1 transports the substrate 10 processed by the processing unit 50, the uniformity of the substrate processing can be improved. The substrate supporting portion 200 has a damaged loading portion 22, which loads or unloads the substrate 1 on the flat plate. The loading unit 22 wipes the substrate, and the substrate branch portion can be coupled to the other device to transport the substrate 1G as if it were adjacent (6〇 in Fig. 5a to Fig. 5e) or the carry-out portion (7〇 in Fig. 5a to Fig. 5e). The loading unit 22 〇 mounts the substrate 10 I274^gpif: the other melon 1 on the flat plate 21〇, and causes the substrate supporting portion 2 (8) to support the soil plate 10, or unloads the substrate 1〇 from the flat plate 21〇 to other devices, and The substrate 10 is excluded from the substrate supporting portion 2A. A roller hole 212 is formed in the flat plate 210, and the loading unit 220 has a feeding roller portion 222 and an operating portion 228. The transport roller portion 222 passes through the same hole 212 and protrudes from the plate surface of the flat plate 21, and is displaceable between the transport position "B," and the retracted position "C" which is the substrate 1 The transport U is supported at a position on the substrate transporting side A, the retracted position "C" is a position withdrawn from the transport position "B"; and the actuating portion 228 is such that the transport rolling portion 222 is at the transport position "B, At least one of the flat plate 210 and the transport roller unit 222 is moved in such a manner as to be displaced from the retracted position "c". The transport roller unit 222 includes a transport roller 224 that transports the substrate 1 in the same direction as the substrate transport direction A. The transport roller 224 is rotatably driven by a motor or other conventional motor-driven mechanism (not shown), and transports the substrate 10. The motor-driven mechanism (not shown) can rotatably drive the transport roller 224 when the transport roller portion 222 is located at the transport position B, and can drive the transport roller 224 without rotating when the transport roller portion Φ 222 is at the retracted position "c". When the transport roller portion 222 is at the transport position "b", the transport roller 224 passes through the drum hole 212 and protrudes from the plate surface of the flat plate 210, and supports the substrate 1A instead of the flat plate 210. Thereby, the transport roller 224 transports the substrate 10 in the substrate transport direction a, and loads or unloads the substrate 1 on the flat plate 21A. (Refer to Fig. 4a) When the transport roller portion 222 is at the retracted position "C", the transport roller 224 is housed in the drum hole 212 so as not to protrude from the plate surface of the flat plate 21, I2747i2ftPif and the substrate i is supported by the flat plate 210. Hey. Thereby, the substrate 10 is stowed on the flat plate 210 and moved integrally with the substrate supporting portion 200. (Refer to Fig. 4b) Here, the transport position "B" of the transport roller portion 222 and the retracted position "C," are the relative positions of the transport roller portion 222 with respect to the flat plate 210. The 'plate 210 is fixed and the transport roller is fixed When the portion 222 is moved, the transport roller portion 222 can be positioned at the transport position "B" and the retracted position "C", and the transport roller portion 222 can be fixed and the flat plate 210 can be moved, so that the transport roller portion 222 can be positioned at the transport position "B" and The position "C" is withdrawn. The actuating portion 228 can move the transport roller portion 222 or the flat plate 210 and displace the transport roller portion 222, or can move the transport roller portion 222 and the flat plate 210 all the way and displace the transport roller portion 222. The substrate support portion 200 is provided with a sleeve portion 230 that reversibly supports the transport roller portion 222. The sleeve portion 230 is provided with a flat plate 210 on the upper side thereof, and a hinge portion 226 is provided on the side surface, and the hinge portion 226 can be rotated. The ground support portion supports the intermediate portion of the transport roller portion 222. The transport roller portion 222 and the actuating portion 228 are housed in the sleeve portion 230 and move integrally with the sleeve portion 230. The transport roller portion 222 is provided with a transport roller 224, which transport roller 2 24 • The intermediate portion is rotatably supported by the sleeve portion 23〇 by the hinge portion 226, and • one end portion reaches the support substrate 丨〇, and the actuation portion 228 moves the other end portion of the transport roller portion 222 and transports The roller portion 222 is returned between the transport position "B" and the withdrawal position "c". The actuating portion 228 moves the end portion back and forth, whereby the transport roller portion 222 is retracted around the hinge portion 226 so that the transport roller portion 222 is located at the transport position "B" or the withdrawal position "C". The portion 228 is a linear actuator and another normal drive mechanism. As shown in Fig. 3 and Fig. 4a to Fig. 3, the transport roller unit 222 is retracted around the hinge 12 I2747i2fi5pif portion 226 and is retracted at the transport position "B". The position "c" is displaced, and the substrate carrying device of the present invention is not limited to such a structure. The actuating portion 228 can reciprocate the transport roller portion 222 in a direction perpendicular to the plate surface of the flat plate 21, and The transport roller portion 222 is protruded or not protruded through the drum holes 212. Alternatively, the actuating portion 228 can move the flat plate 210 in the vertical direction with respect to the plate surface, and can pass the transport roller portion 222 through the rolling In addition, the transport roller portion 222 and the actuating portion 228 may be based on other conventional configurations. • The actuating portion 228, when the driving portion 40 moves the substrate supporting portion 200, the transport roller portion 222 may be located withdraw When the drive portion does not move the substrate supporting portion 200, the transport roller portion 222 can be positioned at the transport position "B". When the drive portion 40 moves the substrate support portion 200 along the obstruction portion 3, the actuator portion 228 causes the transport roller portion 222 to be in the retracted position "C," and the substrate 10 is stably supported by the flat plate 210. Thereby, the substrate 10 is transported in the substrate transport direction A by the driving force of the driving portion 4A. Since the substrate 10 is introduced or carried out of the processing portion (Fig. 5a to Fig. 5e, 50), the substrate 10 is carried out from the introduction portion (Fig. 5a to Fig. 5e, 6) in the substrate supporting portion 2 or in the carrying portion. (70 in Fig. 5a to Fig. 5e) During the unloading process, in order to stably introduce and carry out the substrate, the substrate supporting portion 200 is positioned at the obstruction portion 3. Thereby, the drive unit 40 does not move the substrate support unit 2〇〇. In this case, the operating portion 228 causes the transport roller portion 222 to be placed on the flat plate 2K) to load or unload the substrate 1''. The sub-tack portion 220 includes a transport roller portion 222 and an actuating portion 228. However, if the substrate 1G can be loaded or unloaded on the flat plate 21, the loading portion can be 13
I27472(95pif 機器人臂或其他通常機構而構成。 運’残81 5a至圖5e，就本發明實施形態之基板 k衣置之作動加以說明。 略圖~是說明0 2之基板運送裝置之作動的概 之二^圖㈣示，基板運送裝置1以對應於處理基板10 %之方式而配置。基板運送裝置1插人於引入部 之間，該引入部60於處理部50引入基板 、、，壯=1部70從處理部50搬出基板1〇。藉此，基板運 =衣1於基板10由處理部50所處理之狀態下，在基板 2方向送基板1()。處理部5G檢查或洗淨基板1〇 或者塗布藥液，進行特定之基板處理。 如圖5a所示，基板運送裝置1從引入部60領受基板 I此日守，驅動部4〇固定基板支撐部200之位置，基板被 fe疋地裝載於平板21〇上。作動部228使運送滾筒部瓜 位於運达位置“B”，並且運送滾筒224貫通滾筒孔212而 自平板210=板面突出。運送滾筒224與引入部6〇協力運 C 土板10藉此基板1〇於裝載方向d被裝載於平板21〇 上。較好的是，於運送滾筒部222之運送位置“B”處，運 送滚筒224與引入部60位於同一水平面，以使基板ι〇自 引入部6〇脫離而裝載至平板別上之過程中，被順利地運 、*/ 送0 、如圖5b及圖5c所示，若基板1〇自引入部6〇脫離而 裝載至平板210上，則作動部228使運送滚筒部222自運 送位置“B”變位至撤回位置“c，，。運送滚筒似收容於滾筒 14 I2747i2)ftpif 孔212内，亚且基板i〇由平板2i〇支擇。驅動部4〇使基 板支擇部200於執道部30上移動於基板運送方向A上。 藉此，基板10卩固定之速度且無局部彎曲的方式被運送， 故使處理部50之基板處理均勻性提高。 如圖5d及圖5e所示，當基板支撐部2〇〇到達搬出部 70時，驅動部40使基板支撐部2〇〇之位置固定。作動部 228使運送滚筒部222自撤回位置“c”變位至運送位置 “B”。運送滾筒224貫通滾筒孔212並自平板21〇之板面 突出，以支撐基板10並於卸載方向E上運送基板1〇。藉 此，將基板10從基板支撐部2〇〇卸載至搬出部7〇上。 【圖式簡單說明】 圖1是表示先前之基板運送裝置之概略圖。 圖2是表示本發明實施形態之基板運送裝置之概略 圖。 圖3是表示圖2之主要部分之主要圖。 圖4a是表示圖2之運送滾筒部位於運送^立置之狀態的 概略圖。 "" 圖4b疋表示圖2之運送滾筒部位於撤回也置之狀熊 概略圖。 心、 圖5a至圖5e是說明圖2之基板運送裝置之作動的概 略圖。 【主要元件符號說明】 A·基极運送方向 E:卸载方向 15 I2747i2)ftpif 1 :基板運送裝置 ίο:基板 30 :轨道部 - 40 :驅動部 • 50 :處理部 . 60 :引入部 . 70 :搬出部 101 :基板運送裝置 • 110 :基板 120 :運送滚筒 130 :滾筒支撐部 140 :框架部 150 :處理部 200 :基板支撐部 210 ··平板 * 212 :滾筒孔 φ 220 :裝載部 ^ 222 :運送滚筒部 ^ 224:運送滾筒 • 226 :鉸鏈部 228 :作動部 230 :套管部 16I27472 (95pif robot arm or other normal mechanism is constructed. The operation of the substrate k of the embodiment of the present invention will be described with reference to Fig. 5a to Fig. 5e. The outline is an illustration of the operation of the substrate transport device of 0 2 The fourth substrate (four) shows that the substrate transporting device 1 is disposed so as to correspond to 10% of the processing substrate. The substrate transporting device 1 is inserted between the lead-in portions, and the lead-in portion 60 is introduced into the processing portion 50, and is strong. The first unit 70 carries out the substrate 1 from the processing unit 50. Thereby, the substrate 1 is transported to the substrate 1 in a state where the substrate 10 is processed by the processing unit 50. The processing unit 5G inspects or cleans the substrate 1 The substrate 1 is coated or coated with a chemical solution to perform specific substrate processing. As shown in Fig. 5a, the substrate transfer device 1 receives the substrate I from the introduction portion 60, and the drive portion 4 is fixed at the position of the substrate support portion 200. The crucible is loaded on the flat plate 21. The actuating portion 228 positions the transport roller portion at the "B" position, and the transport roller 224 passes through the drum hole 212 and protrudes from the flat plate 210 = the plate surface. The transport roller 224 and the lead-in portion 6 Collaboration with the C-soil board 10 The load direction d is loaded on the flat plate 21. Preferably, at the transport position "B" of the transport roller portion 222, the transport roller 224 and the lead-in portion 60 are located at the same level so that the substrate is self-introduced from the lead-in portion 6 When it is detached and loaded onto the flat plate, it is smoothly transported, */ sent 0, as shown in Fig. 5b and Fig. 5c, if the substrate 1 is detached from the lead-in portion 6 而 and loaded onto the flat plate 210, the actuating portion 228, the transport roller portion 222 is displaced from the transport position "B" to the retracted position "c, the transport roller is accommodated in the drum 14 I2747i2) ftpif hole 212, and the substrate i is controlled by the flat plate 2i. 4, the substrate supporting portion 200 is moved on the obligating portion 30 in the substrate transport direction A. Thereby, the substrate 10 is transported at a constant speed without local bending, so that the substrate processing uniformity of the processing portion 50 is made. As shown in Fig. 5d and Fig. 5e, when the substrate supporting portion 2A reaches the carrying-out portion 70, the driving portion 40 fixes the position of the substrate supporting portion 2A. The operating portion 228 causes the transport roller portion 222 to retract from the position. c" is displaced to the transport position "B". The transport roller 224 is connected The cylindrical hole 212 protrudes from the plate surface of the flat plate 21 to support the substrate 10 and transport the substrate 1 in the unloading direction E. Thereby, the substrate 10 is unloaded from the substrate supporting portion 2 to the carry-out portion 7 . BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a substrate transfer device of the prior art. Fig. 2 is a schematic view showing a substrate transfer device according to an embodiment of the present invention. Fig. 3 is a view showing a main part of Fig. 2. Fig. 4b is a schematic view showing a state in which the transport roller unit of Fig. 2 is in a state of being retracted. 5A to 5e are schematic views for explaining the operation of the substrate transporting apparatus of Fig. 2. [Description of main component symbols] A·Base transport direction E: Unloading direction 15 I2747i2) ftpif 1 : Substrate transport unit ίο: Substrate 30: Track section - 40 : Drive section • 50 : Processing section. 60 : Lead-in section 70 : Carry-out unit 101: Substrate transport apparatus 110: Substrate 120: Transport drum 130: Roller support unit 140: Frame unit 150: Processing unit 200: Substrate support unit 210·· Flat plate* 212: Roller hole φ220: Loading unit 222: Transport roller unit ^ 224: transport roller • 226: hinge portion 228: actuating portion 230: sleeve portion 16