1273234 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種面板之自動光學檢測機台，尤指一種平面顯示器 面板色不均缺陷之自動光學檢測機台。 【先前技術】 按一般習知之面板(panel)中色不均(英語:biemish, mura;日本語:厶％ 缺陷(defect)之自動光學檢測機台其通常只具有一特定光源與一特定視角角 度(viewangle)之攝像裝置，但事實上，該特定視角角度可能仍有許多檢測 盲點，無法有效地檢測出待測面板之具有視角方向性(vjew ang|e d印endent)之色不均缺陷。另外，一般習知之線掃描(丨jnescan)攝像裝置， 口為其中線型光影像感應器（linear image sensor)之暗電流雜訊(dark current noise)與其他電子雜訊會造成掃晦圖像中之輕微垂直方向(亦即平 行於y-軸）明暗條紋，亦即_像中形成雜訊直條紋(nQise制㈣ _es) ’導致面板上垂直方向(亦即平行於y_軸)之輕微色不均條紋無法有 效刀辨檢測出。另外，一般光源無法完全避免光閃燦雜訊(丨丨肿触❻响 induced noise) ’若使用高敏感、高明暗解析之攝像裝置，例如㈣丨士解析 ^(12-bit __depth res〇|u㈣之攝像裝置，則些微之細 成㈣圖像巾讀_暗肢，—般為水平方向(亦即平行於x_軸)之明暗條 紋，亦即形成雜訊橫條紋(noise h〇riz〇nta|，導致水平方向(亦即平 ^色不均敝無法梅辨、雜。以上三則知技術之 檢/貝J盲點，喊屬美中不足之處。 物^ 3明係提供-種谢色不均缺陷之自動光學檢測機台，於 Ϊ、第二攝像二^:，度_93_，而該第一_ 斧以芬甘 有一特定視角角度，藉由各個不同之特定視角角 、纖置、娜敵整合㈣_〇η)， e__，以符合高功能面板自動光學檢測機台之需 5 1273234 要。 【發明内容】 第„本發明之目的係、提供一種面板中色不均缺陷之自動光學檢測機台，其 板上二、、出光為狹長型，例如但不限於一狹長型斜面，且於該待測面 第光源所發出之光具有一特定發光角度(丨jghtjng如㈣，藉以 測面板之色不均缺陷。 了1273234 IX. Description of the Invention: [Technical Field] The present invention relates to an automatic optical inspection machine for a panel, and more particularly to an automatic optical inspection machine for uneven color defects of a flat panel display panel. [Prior Art] An automatic optical inspection machine in a conventionally known panel (English: biemish, mura; Japanese: 厶% defect) usually has only a specific light source and a specific viewing angle (viewangle) camera device, but in fact, there may still be many blind spots for detection at this particular viewing angle, and it is impossible to effectively detect the color unevenness defect of the panel to be tested (vjew ang|ed). The conventional line scan (丨jnescan) camera device, the dark current noise of the linear image sensor and other electronic noise will cause slightness in the broom image. Vertical and vertical (ie parallel to the y-axis) light and dark stripes, that is, the formation of noise straight stripes in the image (nQise (4) _es) ' results in a slight color unevenness in the vertical direction of the panel (ie parallel to the y_axis) Stripes can't be detected effectively. In addition, the general light source can't completely avoid the light flashing noise (induced noise). If you use high-sensitivity, high-dark resolution camera, for example, (4) gentleman analysis ^ ( 12-b It __depth res〇|u (4) camera device, the micro-fine (4) image towel reading _ dark limbs, generally horizontal (that is, parallel to the x_ axis) of light and dark stripes, that is, the formation of noise horizontal stripes ( Noise h〇riz〇nta|, which leads to the horizontal direction (that is, the unevenness of the color and the unevenness of the color can not be distinguished, and the miscellaneous. The above three techniques are known for the detection of the technology/because of the blind spot, and the screaming is a flaw in the US. - an automatic optical inspection machine for the uneven color defect, the second camera 2:, degree _93_, and the first _ axe has a specific angle of view with a specific angle of view, by different specific angles of view , fiber placement, integration of the enemy (four) _〇η), e__, in order to meet the needs of high-function panel automatic optical inspection machine 5 1273234. [Invention] The purpose of the invention is to provide a color unevenness in the panel An automatic optical inspection machine for defects, wherein the light is elongated, such as but not limited to a long inclined surface, and the light emitted by the first light source has a specific illumination angle on the surface to be tested (丨jghtjng (4) In order to measure the unevenness of the color of the panel.
為達上述之目的，本發明之面板巾色不均缺陷之自動光學檢測機台， =括·龍門結構；面板移動載具，其係、置於該龍門結構之下彳，用以承 載及移動該待測面板；該面板移動載具係可做χ•軸及_之同步，斜角度 :angle)之面板傳輸運動；至少一第一光源，該第一光源出光口處為: 至少—第—攝像裝置，係置於該制結構上，該第—攝像裝置係 ^^掃描相卿ne scan咖抑），且該第一攝像裝置具有一第一特定視 又，以及至）一第一光感應器(ph〇t〇sens〇r)，係位於該第一光源出光 之光訊號(亦即該第—光源之出光強度讀值)係可 ；；.攝像裝置之取像時序同步讀取信號_e synch_zed signal rmence)者。其中’該第一攝像裝置於第—特定視角角度取像，俾 二二r移動載具做斜角度之面板傳輸運動，使得該待測面板之掃猫圖 ifeedb/kt 曲折線）’且該第—光錢11之同步光喊被回授至 G —電_電腦祕之軟體運算(SGftwa「e Ga丨⑶丨at_ 後即可_該制面板上衫具有色不均之缺陷。 德^、之Γ的’本發明之另—種面板中色不均缺陷之自動光學檢測 用二裁:公丨娜吉構;_移動載具，其係置於該龍門結構之下方， 該面板移動載具係可做y-軸之面板傳輸運動；至少 、卜二/第光源出光口處為一狹長型，例如但不限於一狹長型斜 同+之攝雜置，係置⑽朗結構上，可無面赫動載具做 p 乂 且°亥第—攝像裝置係為-線掃描相機，且該第一攝像裝 1273234 置具有一第一特定視角角度；以及至少一第一光感應器，係位於該第一光 源出光口處附近；該第一光感應器之光訊號(亦即該第一光源之出光強度讀 值)係可與該第一攝像裝置之取像時序同步讀取信號者。其中，該第一^ 裝置於第—特定視角角度取像，俾藉由該面板移動載具做y_軸之面板傳輪 運動，且第一攝像裝置做X-軸之同步運動時，使得該待測面板之掃瞄圖^ 明顯形成一斜角度之圖像防即該待測面板平行於y·軸之板邊明顯形成_斜 角線或-斜角之曲折線），且該第一光感應器之同步光訊號被回授至一電腦 系統，經該電腦系統之軟體運算後即可判斷該待測面板上是否有色 缺陷。 一 為達上述之目的，本發明之又一種面板中色不均缺陷之自動光學檢測 機台’其包括：龍門結構；面板移動載具，其係置於該龍門結構之下方， 用以承載該待測面板；該面板移動載具係可做y_軸之面板傳輸運動；至少 -光源’該第-光源出光口處為-狹長型；至少―第—攝像裝置，係置於 該龍門結構上，該第-攝像裝置係為一降溫線掃描減_丨如丨&扣如 camera)，且該第-攝健置具有—第―特定姻角度；俾藉由該面板移動 載具做y-轴之面板傳輸運動，該帛一攝像震置之取像，經一電腦系統之軟 體運异後即可判斷該待測面板上是否有色不均之缺陷。 四、【實施方式】 請參照圖1 ’其緣示根據本發明之一較佳實施例之面板中色不均缺陷 之自動光學檢測機台之示意®。如圖所示，本發明之面板巾色不均缺陷之 自動光學檢測機台，用以檢測-待測面板5〇(pane丨），其包括：龍門έ士構 (Ga_1〇;面板移動載具20;至少一第一光源30;至少一第一攝^置 40以及至少-第-光感應器(photo sens〇r)45所組合而成；俾藉由該第一 攝像裝置40於第-特定視角角度之取像gp可判斷該待測面板5〇上是否有 色不均之缺陷。 其中，5亥待測面板50例如但不限於為—軟板(f|exib丨e pane丨）、一玻璃 面板(Glass Panel)、- TFT面板、-TFT製程中半成品面板、一彩色渡光 7 -1273234 片（Color Filter)面板、-彩色渡光片製程中半成品面板或一偏光板(p〇|arizer Sheet)等。 5亥月I*門結構10 ’例如但不限於呈一”Π”字型，用以放置及固持至少一 第一攝像裝置40 ;該面板移動載具20，係位於該龍門結構彳〇下方，且位 於該第一攝像裝置40之下方，用以承載該待測面板5〇，以便提供光學掃 描该待測面板50時所需之等速移動，以及提供該待測面板5〇進出機台所 需之相關機械動作，其例如但不限於為一捲帶式傳輸(ree|_t〇_「ee| transport)、輸送滾輪_卽conveyor)、氣浮平台(airf|〇attab丨e)或x y平台 (x-y table)。 該第一光源30，係置於該龍門結構1〇之一側，例如但不限於為後側， 其具有至少一窄頻段(narrow bandwidth)原子光譜之發光源31，例如但不 限於為一低壓鈉燈(low pressure sodium lamp)以提供所需之照明，且其下 方出口處32為-斜面且為狹長型，此為本發明特徵之…冑以使該發光源 31經由出口處32下方發射至該待測面板5〇上之。 A弟攝像裝置40，係為一線掃描相機(|jne scan camera)，且較佳係 為為-降溫CMOS線掃描相機(coo丨ed CM〇s丨jne scan camera)或降溫 CCD 線掃描相機(cooled charge coupled device line scan camera)，係置 於該龍H結構1G之-侧，例如但稀於為細上，其數量例如但不限於為 兩個’且該第-攝像裝i 40具有第一特定視角角度，例如但不限於為3〇。 =角。其中，該第一攝像裝置4〇進一步具有一視角旋轉機構41以調整 该第-攝像裝置40之視角度，使該第一攝像裝置4〇具有3〇。_9〇。角之第 一特定視角角度。For the above purpose, the automatic optical detecting machine for the uneven color of the panel towel of the present invention, the gantry structure, the panel moving carrier, and the gantry structure are placed under the gantry structure for carrying and moving The panel to be tested; the panel moving carrier can be used for 面板•axis and _ synchronization, oblique angle: angle) of the panel transmission movement; at least one first light source, the first light source exit is: at least—the first The camera device is placed on the structure, the first camera device scans the image, and the first camera device has a first specific view, and a first light sensor The device (ph〇t〇sens〇r) is located in the light source of the first light source (that is, the light intensity reading value of the first light source);; e synch_zed signal rmence). Wherein the first camera device takes an image at a specific angle of view, and the second-two r-moving vehicle performs an oblique-angle panel transmission motion, such that the panel of the panel to be tested is ifeedb/kt zigzag line) and the first - The light of the light 11 is called back to G - electricity _ computer secret software operation (SGftwa "e Ga丨 (3) 丨 at_ can be _ the panel of the shirt has a color unevenness defect. De ^, Γ's another type of automatic optical detection of color unevenness defects in the panel of the present invention: a public 丨 吉 ;; _ mobile carrier, which is placed under the gantry structure, the panel mobile carrier system It can be used for the y-axis panel transmission movement; at least, the second/first light source exit opening is a long and narrow type, for example, but not limited to a narrow type of oblique + the same, and the system is provided with a (10) ridge structure. The Hewlett-Packard is made of p 乂 and ° Haidi - the camera is a line scan camera, and the first camera 1273234 has a first specific viewing angle; and at least one first light sensor is located at the first a light source near the light exit; the first light sensor optical signal (that is, the first light source The light intensity reading value is capable of reading the signal synchronously with the image capturing timing of the first image capturing device, wherein the first device picks up the image at the first specific angle of view, and the moving device is used to make the y_ by the panel. When the panel of the shaft moves, and the first camera performs the X-axis synchronous movement, the scan image of the panel to be tested obviously forms an oblique angle image, that is, the panel to be tested is parallel to the y·axis. The edge of the board is obviously formed with a _ oblique line or a meandering line of the oblique angle, and the synchronous optical signal of the first optical sensor is fed back to a computer system, and the software operation of the computer system can determine the waiting Whether there is a color defect on the measuring panel. For the above purpose, another automatic optical detecting machine for color unevenness in the panel of the present invention includes: a gantry structure; a panel moving carrier, which is placed on the gantry structure Bottom, for carrying the panel to be tested; the panel moving carrier can be used as a y_axis panel transmission motion; at least - the light source 'the first light source exit opening is - narrow; at least "first" camera Attached to the gantry structure, the first - photo The device is a cooling line scan minus 丨 丨 丨 amp amp amp 扣 扣 扣 扣 扣 扣 扣 扣 , , , , , 扣 , 扣 扣 , , , , , , 摄 摄 摄 摄 摄 摄 摄 摄 摄 摄 摄 摄 摄 摄 摄 摄 摄 摄 摄 摄 摄The image of the camera is shaken, and after the software of a computer system is transported, the defect of the color unevenness on the panel to be tested can be judged. 4. [Embodiment] Please refer to FIG. A schematic diagram of an automatic optical inspection machine for color unevenness in a panel of a preferred embodiment of the present invention. As shown, the automatic optical inspection machine for uneven color unevenness of the panel of the present invention is used for detecting - a panel to be tested, comprising: a gantry gentleman structure (Ga_1〇; a panel moving carrier 20; at least one first light source 30; at least one first camera 40 and at least a first light sensor) (photo sens〇r) 45 is combined; and the image pickup g of the first specific imaging device 40 at the first specific viewing angle can determine whether there is a defect of color unevenness on the panel 5 to be tested. Wherein, the 5H panel to be tested 50 is, for example but not limited to, a soft board (f|exib丨e pane丨), a glass panel (Glass panel), a TFT panel, a semi-finished panel in a TFT process, and a color crossing light 7 -1273234 Color Filter panel, semi-finished panel in color diver process, or a polarizer (p〇|arizer sheet). The 5th moon I* door structure 10' is, for example but not limited to, in a "Π" shape for placing and holding at least one first camera device 40; the panel moving carrier 20 is located below the gantry structure And being located below the first camera device 40 for carrying the panel to be tested 5 〇 to provide the constant velocity movement required for optically scanning the panel 50 to be tested, and providing the panel to be tested 5 into and out of the machine Relevant mechanical actions required, such as but not limited to a tape transfer (ree|_t〇_"ee| transport), transport wheel_卽conveyor), airfloat platform (airf|〇attab丨e) or xy platform The first light source 30 is disposed on one side of the gantry structure, such as but not limited to the back side, and has at least one narrow band atomic spectrum of the light source 31, for example, Not limited to being a low pressure sodium lamp to provide the desired illumination, and the lower exit 32 is beveled and elongated, which is a feature of the present invention such that the illumination source 31 is exited 32 is launched below the panel 5 to be tested. 40 is a first-line scanning camera (|jne scan camera), and is preferably a coo丨ed CM〇s丨jne scan camera or a cooled charge coupled device line. Scan camera), placed on the side of the dragon H structure 1G, for example, but thinner than fine, the number of which is for example but not limited to two 'and the first camera mount i 40 has a first specific angle of view, for example However, the first imaging device 4 further has a viewing angle rotating mechanism 41 for adjusting the viewing angle of the first imaging device 40 so that the first imaging device 4 has 3 turns. _9〇. The first specific angle of view of the corner.
其中，該第-攝像裝置40 Θ部之線型光影像感應器(丨hear image sensor，圖未示)之降溫機制(cooHng mechanjsm)係為一熱電致冷裝置(例 如加削士洲⑽他卜花咖丨贫或叫㈣副心圖未示卜一液體冷 卻裝置(liquid cooler，圖未示)或一氣體喷射冷卻裝置(ajr _ c〇〇|e「，圖I 示）Ο 8 1273234 ^其中，該熱電致冷裝置係一半導體裝置，利用一電流通過二種不同半 導體的界面(semiconductor junction)時，於其中一半導體之外表面吸熱， 而於另一半導體之外表面放熱，所組成的一種冷卻裝置。而該氣體喷射冷 部裝置係利用氣體絕熱膨脹過程(adiabatic expansion process)讓氣體絕熱 冷卻，使吹出之冷卻氣體(C0|d gas)降溫到ΟΧ附近。 在實際實施例中，該熱電致冷裝置係直接接觸(djrectc〇ntact^$線型光 〜像感應器之底部，而該液體冷卻裝置或該氣體喷射冷卻裝置係借由一管 路將冷卻液體(chilled liquid)或冷卻氣體引導至該線型光影像感應器底部下 方之散熱板(圖未示)中或該散熱板之鄰接區域。 •該第一攝像裝置40中之光影像感應器之降溫機制使得該光影像感應器 之底面降溫到（TC附近或低於(TC，大幅降低該光影像感應器之暗電流雜 訊，與一般習知在攝像裝置機殼(camera housing)外部加裝散熱片(heat sink)與冷卻風扇(C00|jng fan)之低效能散熱機制是截然不同的。 該第一光感應器(photo sensor)45，係位於該第一光源3〇出光口處附 近；該第一光感應器45之光訊號(light sensing signal)係可與該第一攝像裝 置40之取像時序(jmaging timing)同步讀取信號者(have synchr〇nized signal timing sequence);且該第一光感應器45之同步光訊號被回授至 (feedback to)該電腦系統(computer system，圖未示），以便計算並且消除 , (eliminate)該光源 30 之光閃燦雜訊(light flickering induced noise)於該第二 攝像裝置40取得圖像(image file)中所造成平行於x-轴之明暗條紋，亦即所 造成之雜訊橫條紋(noise horizontal stripes)。 該第一光感應器45之同步光訊號亦可被回授至該第一攝像裝置4〇， 以便於該第一攝像裝置40之内建處理器(built-in processor)計算並且消除 該光源30之光閃爍雜訊於該第一攝像裝置40取得圖像中所造成平行於χ_ 軸之雜訊橫條紋，再傳送圖像至該電腦系統。 此外，本發明之面板中色不均缺陷之自動光學檢測機台進一步具有至 少一第二攝像裝置60，該第二攝像裝置60，較佳係為降溫CMOS線掃描 9 -1273234 相機(cooled CMOS line scan camera)或降溫 CCD 線掃描相機(cooled charge coupled device line scan camera)等且其數量例如但不限於為兩 個’係置於该龍門結構彳〇之一側，例如但不限於為後側上且位於該第一攝 像裝置40之下方處，該第二攝像裝置6〇具有一第二特定視角角度，例如 但不限於為15。-60。角，以進-步以15。_6〇。角度檢測該待測面板5〇之色 不均缺陷，藉由使用該第二攝像裝置6〇，可進一步檢測出該第一攝像裝置 40於30 _90角度無法檢測出之色不均缺陷。其中，該第二攝像裝置6〇進 一步具有一視角旋轉機構61以調整該第二攝像裝置6〇之視角角度，使該 • 第二攝像裝置60具有15。-60。角之第二特定視角角度。 研一併參照圖2a〜2d ’其分別繪示待測面板50藉由面板移動載具2〇 做斜角度(tilted angle)之面板傳輸運動時之移動路線及所得到之圖像檔案 示意圖。如圖2a所示，本發明之面板色不均缺陷之自動光學檢測機台於掃 0¾時’當该待測面板50藉由面板移動載具20做斜角度(tilted angle)之面板 傳輸運動時，亦即該待測面板50係先沿與面板移動載具20之y-軸方向成 一正夾角度傾斜移動一段距離後，再沿與面板移動載具2〇之y-軸方向成一 負夾角度傾斜移動另一段距離(亦即於掃瞄途中反轉沿x_軸之移動），使該第 一攝像裝置40在取得圖像(image fj|e)時，該面板之y_軸板邊與該第一攝像 _ 裝置40於圖像中之雜訊直條紋形成一可分辨之夾角度(discernable angle)，亦即使該待測面板平行於火軸之板邊於圖像中明顯形成一斜角線 或一斜角之曲折線。 如圖2b所示，於該待測面板50藉由面板移動載具20做斜角度⑼ted angle)之面板傳輸運動時，該第一光感應器45所感應之同步光信號(如前述 與該第一攝像裝置40之取像時序同步讀取之光信號，亦即該第一光源之出 光強度讀值），經放大後於光閃爍較亮時會具有訊號昇高，於光閃爍較暗時 ^ 會具有訊號降低，如此經由一電腦系統(圖未示)之軟體將原始圖像執行正規 、 化(normalization)計算後，亦即將原始圖像之各(平行於X-軸)一維影像之各 像素灰階值(pixel gray scale)除以於該第一光感應器45所同步感應之各光 1273234 7C度域值(即於圖像中各¥_軸座標值所同步對應之各光亮度讀值)，所得 之規化圖像後，即可大幅降低該正規化圖像d jmage平一 於x-軸之雜物條紋，使得平行於該面板5〇χ轴板邊方向之真實色不 ，(在圖像中成-祕紋)之檢測靈敏度大幅提高。其中該正規化計算可以於 該電腦系統中執行，亦或於該第一攝像裝置4〇之内建處理器(圖未杆 後再傳送正規化圖像至該電腦系統。 丁The cooling mechanism (cooHng mechanjsm) of the 丨hear image sensor (not shown) of the first camera unit 40 is a thermoelectric cooling device (for example, Jiashizhou (10). The coffee is poor or called (4) The secondary heart is not shown a liquid cooler (not shown) or a gas jet cooling device (ajr _ c〇〇|e ", Figure I) Ο 8 1273234 ^ The thermoelectric cooling device is a semiconductor device that uses a current to pass through a semiconductor junction of two different semiconductors, absorbs heat on the outer surface of one of the semiconductors, and exotherms on the surface of the other semiconductor to form a cooling The gas injection cold section device uses a gas adiabattic expansion process to adiabatically cool the gas to cool the blown cooling gas (C0|d gas) to near the crucible. In a practical embodiment, the thermoelectricity The cold device is in direct contact with the bottom of the djrectc〇ntact^$ linear light-to-image sensor, and the liquid cooling device or the gas jet cooling device is chilled liquid by a pipeline The cooling gas is directed into a heat sink (not shown) below the bottom of the line image sensor or adjacent to the heat sink. The cooling mechanism of the light image sensor in the first camera 40 causes the light image to be sensed. The bottom surface of the device is cooled to (below or lower than TC (TC), which greatly reduces the dark current noise of the optical image sensor, and is generally added with a heat sink outside the camera housing. The low-efficiency heat dissipation mechanism of the cooling fan (C00|jng fan) is completely different. The first photo sensor 45 is located near the output port of the first light source 3; the first light sensor 45 a light sensing signal (have synchr〇nized signal timing sequence); and synchronization of the first light sensor 45 The optical signal is fed back to the computer system (not shown) for calculation and elimination, and the light flickering induced noise of the light source 30 is extracted to the second camera. Device 40 takes The light and dark stripes that are parallel to the x-axis caused by the image file, that is, the noise horizontal stripes. The synchronous optical signal of the first optical sensor 45 can also be fed back to the first camera device 4 to facilitate the built-in processor calculation of the first camera device 40 and eliminate the light source 30. The light flickering noise acquires the noise horizontal stripes caused by the image in the image parallel to the χ_axis, and then transmits the image to the computer system. In addition, the automatic optical detecting machine of the color unevenness defect in the panel of the present invention further has at least one second camera device 60, which is preferably a temperature-lowering CMOS line scan 9-1273234 camera (cooled CMOS line) a scan camera) or a cooled charge coupled device line scan camera, etc., and the number thereof is, for example but not limited to, two 'systems' placed on one side of the gantry structure, such as but not limited to the rear side And located below the first camera device 40, the second camera device 6 has a second specific viewing angle, such as but not limited to 15. -60. Corner, with a step-by-step of 15. _6〇. The color detection unevenness defect of the panel to be tested is detected by the angle, and by using the second image pickup device 6, the color unevenness defect which the first image pickup device 40 cannot detect at an angle of 30 _90 can be further detected. The second imaging device 6 further has a viewing angle rotating mechanism 61 for adjusting the viewing angle of the second imaging device 6 to make the second imaging device 60 have 15. -60. The second specific angle of view of the corner. Referring to Figures 2a to 2d, respectively, the moving path of the panel 50 to be tested by the panel moving carrier 2 is tilted and the moving image and the obtained image file are shown. As shown in FIG. 2a, the automatic optical inspection machine for panel color unevenness of the present invention is used for sweeping when the panel 50 is moved by the panel to move the carrier 20 to a tilted angle. That is, the panel 50 to be tested is first inclined at a positive clamping angle with the y-axis direction of the panel moving carrier 20, and then at a negative clamping angle along the y-axis direction of the panel moving carrier 2〇. Tilting and moving another distance (that is, reversing the movement along the x-axis during scanning), so that when the first camera 40 acquires an image (image fj|e), the y_axis edge of the panel The first image capturing device 40 forms a discernable angle of the noise straight stripes in the image, and even if the panel to be tested is parallel to the edge of the fire axis, a bevel is formed in the image. A zigzag line of lines or a bevel. As shown in FIG. 2b, when the panel 50 to be tested is moved by a panel that moves the carrier 20 at an oblique angle, the first optical sensor 45 senses a synchronous optical signal (as described above). The optical signal read by the imaging device 40 in synchronization with the image capturing timing, that is, the reading intensity of the light source of the first light source, is amplified, and the signal is raised when the light is blinking brighter, when the light flicker is darker^ There will be a signal reduction, so after the normal image is calculated by the software of a computer system (not shown), the original image will be parallel to the X-axis. The pixel gray scale is divided by the 7C degree value of each light 1273234 that is synchronously induced by the first light sensor 45 (that is, each light brightness corresponding to each of the ¥_axis coordinate values in the image is read. Value), after the obtained normalized image, the normalized image d jmage is flattened on the x-axis of the debris, so that the true color parallel to the edge of the panel 5 〇χ is not ( The detection sensitivity of the image in the image is greatly improved. Wherein the normalization calculation can be performed in the computer system, or the built-in processor is built in the first camera device (the normalized image is transmitted to the computer system after the picture is not taken).
如圖2C獅，其係麵當該制面板5G減沿與面板轉載具2〇之 y-軸方向成-正爽角度傾斜移動一段距離，再沿與面板移動載具2〇之^轴 方向成-負夾角度傾斜移動另一段距離(亦即於掃瞒途中反轉沿x_輛之移 後，該待測面板50在B像巾形成-騎、斜肖之板献形狀。 如圖2d所示，其係表示當該待測面板50係沿與面板移動載具2〇之 y-軸方向成_貞爽肢傾斜軸—段距離後，該制面板5Q麵像中 一斜角之板邊及形狀。 / 請參照圖3,其繪示本發明之第一光源3〇的示意圖。如圖所示，本發 明之第-光源3G，其具有至少—窄頻段原子光狀發光源31，例如但不限 於為一低壓鈉燈以提供所需之照明，且其下方出口 32為一斜面且為狹長 型，且於該低壓納燈31之下方具有至少一擴散板(djffuser)於，藉以均句 分佈該低壓納燈31所發出之光。該發光源31經由出光口處32下方發射至 該待測面板50上之光與該待測面板5〇具有例如但不限於3〇。_6〇。之特定 發光角度。該第一光源上方或側方具有至少一散熱孔洞35。 請參照圖4,其繪示根據本發明另一實施例之面板中色不均缺陷之自動 光學檢測機台的示意圖。如圖所示，本發明之面板中色不均缺陷之自動光 學檢測機台，其進一步可裝置一第二光源70，該第二光源7〇係置於該第 一光源30之一側，例如但不限於前侧或後侧，且由該第二光源之上方 處經由至少一光導管(light guide)75接收具有例如但不限於48〇nm_7〇〇nm 波長之寬頻帶光譜(broad bandwidth spectra)之發光源，以提供所需之照 明，且其出光口係為一斜向出光口。此外，本發明之面板中色不均缺陷之 11 -1273234 自動光學檢測機台進一步具有至少一第二光感應器65係位於該第二光源 70出光口處附近；該第二光感應器65之光訊號係可與該第一攝像裝置4〇 - 或該第二攝像裝置60之取像時序同步讀取信號者。 請參照圖5,其繪示根據本發明之再一實施例之面板中色不均缺陷之自 動光學檢測機台之立體示意圖。如圖所示，本發明之面板中色不均缺陷之 自動光學檢測機台其第一攝像裝置40及第二攝像裝置60視需要可分別裝 置一液體冷卻裝置42及62，其中該液體冷卻裝置42及62係分別裝置於 該第一攝像裝置40及第二攝像裝置60之下方，其具有一水管43、63，且 該水管42、62係固定於該龍門結構1〇上，藉由該水管43、63中之冷卻 # 液(例如但不限於純水)引導至該第一攝像裝置40及第二攝像裝置60中線型 • 光影像感應器（圖未示)底部下方之散熱板(圖未示）中或該散熱板之鄰接區 域，進行熱交換，以降低該第一攝像裝置4〇及第二攝像裝置60中該線型 光影像感應器之溫度，藉以提升該第一攝像裝置4〇及第二攝像裝置6〇之 敏感度與影像品質。 所以，經由本案之實施，其光源出光口具有一斜面且為狹長型，且該 光源所發出之光與該待測面板形成一特定發光角度，該第一攝像裝置、第 二攝像裝置分別具有一特定視角角度，藉由各個不同之特定視角角度，以 檢測待測面板之色不均缺陷，以符合面板自動光學檢測機台之需要。 本案之實施，亦不局限於色不均缺陷之自動光學檢測機台，舉凡需要 和:幵光學檢測之敏感度，訊號雜訊比(Sjgna|幻n〇jse「油〇)與檢測可靠度 者，不_待檢測之缺陷為巨觀缺陷（macr〇 defect)或微觀缺陷（⑴丨 defect) ’均可·本發明所揭示之全部或部份方法減置來提昇檢測功效。 本發明所揭示者，乃較佳實施例，舉凡局部之變更或修飾而源於本發 明之技術思想而為熟習該項技藝之人所易於推知者，倶不脫本發明之專利 ^ 權範疇。 练上所陳，本發明無論就目的、手段與功效，在在顯示其迥異於習知 之技術特徵，且其首先發明合於制，雜在符合發明之專利要件，懇請 12 1273234 貴審查委員明察，並祈早日賜予專利，俾嘉惠射會，實感德便。 【圖式之簡單說明】 圖1是一示意圖，其繪示根據本發明之一較佳實施例之面板中色不均缺 陷之自動光學檢測機台之示意圖。 圖2a是一示意圖，其繪示根據本發明之一較佳實施例之面板中色不均 缺陷之自動光學檢測機台之上視圖，及待測面板藉由面板移動載具做斜角 度之面板傳輸運動時之移動執跡。As shown in Fig. 2C, the lining of the panel is inclined at a positive angle from the y-axis direction of the panel transfer carrier 2G, and then moved along the axis of the panel moving carrier 2 - The negative clamp angle is tilted to move another distance (that is, after the shift of the x_car on the way of the broom, the panel 50 to be tested is formed in the shape of the B-like towel, and the shape of the board is obliquely inclined. As shown in Fig. 2d It is shown that when the panel 50 to be tested is in a y-axis direction with the y-axis direction of the panel moving carrier 2〇, the panel edge of the panel 5Q is in an oblique angle. And a shape. / Please refer to Fig. 3, which is a schematic view of the first light source 3A of the present invention. As shown, the first light source 3G of the present invention has at least a narrow-band atomic light-emitting source 31, for example However, it is not limited to being a low-pressure sodium lamp to provide the required illumination, and the lower outlet 32 is a sloped surface and is of a narrow shape, and has at least one diffusion plate (diffuser) under the low-pressure lamp 31. The light emitted by the low-voltage nano lamp 31. The light source 31 is emitted to the panel to be tested 50 via the lower portion 32 of the light exit port. The panel to be tested 5b has a specific illumination angle, for example, but not limited to, 3. The first light source has at least one heat dissipation hole 35 above or to the side. Referring to FIG. 4, another A schematic diagram of an automatic optical inspection machine for color unevenness defects in a panel of an embodiment. As shown, an automatic optical inspection machine for color unevenness in the panel of the present invention further includes a second light source 70. The second light source 7 is disposed on one side of the first light source 30, such as but not limited to a front side or a rear side, and is received by the light source 75 above the second light source with, for example, However, it is not limited to a broad bandwidth spectrum of 48 〇 nm_7 〇〇 nm wavelength to provide the desired illumination, and the light exit port is an oblique light exit. In addition, the panel color of the present invention The 11-1273234 automatic optical inspection machine further has at least one second light sensor 65 located near the light exit of the second light source 70; the optical signal of the second light sensor 65 can be the first Camera unit 4〇- or the Referring to FIG. 5, a schematic perspective view of an automatic optical detecting machine for color unevenness in a panel according to still another embodiment of the present invention is shown. The first optical imaging device 40 and the second imaging device 60 of the automatic optical detecting machine for color unevenness in the panel of the present invention can respectively be equipped with a liquid cooling device 42 and 62, wherein the liquid cooling devices 42 and 62 are respectively required. The device is respectively disposed below the first camera device 40 and the second camera device 60, and has a water pipe 43, 63, and the water pipes 42, 62 are fixed on the gantry structure 1 by the water pipes 43, 63. The cooling liquid # (for example, but not limited to pure water) is guided to the heat sink (not shown) at the bottom of the line type optical image sensor (not shown) in the first image capturing device 40 and the second image capturing device 60. Or a heat exchange between the adjacent regions of the heat dissipation plate to reduce the temperature of the line type optical image sensor in the first camera device 4 and the second camera device 60, thereby improving the first camera device 4 and the second camera Sensitive to device 6 And image quality. Therefore, through the implementation of the present invention, the light source of the light source has a sloped surface and is of a narrow shape, and the light emitted by the light source forms a specific light angle with the panel to be tested, and the first camera device and the second camera device respectively have a For a specific viewing angle, the color unevenness defects of the panel to be tested are detected by different specific viewing angles to meet the needs of the panel automatic optical inspection machine. The implementation of this case is not limited to the automatic optical inspection machine for color unevenness defects, and the need for: 幵 sensitivity of optical detection, signal noise ratio (Sjgna| 〇n〇jse "oil 〇" and detection reliability The defect to be detected is a macroscopic defect (macr〇defect) or a microscopic defect ((1)丨defect) 'may be all or part of the method disclosed in the present invention to reduce the detection efficiency. It is a preferred embodiment, and a part of the modification or modification of the invention is derived from the technical idea of the present invention and is easily inferred by those skilled in the art, without departing from the scope of the patent of the present invention. The present invention, regardless of its purpose, means and efficacy, is showing its technical characteristics different from the conventional ones, and its first invention is integrated into the system, and it is in accordance with the patent requirements of the invention, so please ask 12 1273234 to examine the examination, and pray for patents as soon as possible. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing an automatic optical inspection machine for color unevenness in a panel according to a preferred embodiment of the present invention. Figure 2a is a schematic view showing an upper view of an automatic optical inspection machine for color unevenness in a panel according to a preferred embodiment of the present invention, and the panel to be tested is tilted by the panel moving carrier The panel performs the movement of the movement during the movement.
圖2b是一示意圖，其左圖繪示待測面板藉由面板移動載具做斜角度之 面板傳輸運動時之移動路線及該第一攝像裝置所得到之圖像形狀示意圖， 該圖像中沿y-軸之雜訊直條紋亦繪示在左圖中；其右圖繪示光感應器之同 步光訊號及第一光源之光閃爍雜訊。 圖2c是一示意圖，其繪示該待測面板5〇在圖像中形成一曲折、斜角之 板邊及形狀之示意圖。 圖2d是-示意圖，其緣示該待測面板5〇在圖像中形成一斜 及形狀之示意圖。 圖 圖3是-示顏，其繪示本發明之第—光源3〇的示意 明另-實施例之面板中色不均缺陷之 明又-實施例之面板中色不均缺陷之 圖4是"不意圖’其繪不根據本發 自動光學檢測機台的示意圖。 圖5是一示意圖，其繪示根據本發 自動光學檢測機台的示意圖。 13 1273234 【圖式元件標號說明】 龍門結構1 〇 • 第一光源30 出光口 32 散熱孔洞35 視角旋轉機構41 水管43 待測面板50 視角旋轉機構61 t| 水管63 — 第二光源70 面板移動載具20 發光源（低壓納燈）31 擴散板33 第一攝像裝置40 液體冷卻裝置42 第一光感應器45 第二攝像裝置60 液體冷卻裝置62 第二光感應器65 光導管752b is a schematic view showing the moving route of the panel to be tested by the panel moving carrier at an oblique angle and the shape of the image obtained by the first camera. The y-axis noise straight stripes are also shown in the left picture; the right picture shows the synchronous optical signal of the light sensor and the light flicker noise of the first light source. Fig. 2c is a schematic view showing the edge and shape of a plate with a meandering and bevel angle formed in the image to be tested. Fig. 2d is a schematic view showing the slanting and shape of the panel to be tested 5 〇 in the image. FIG. 3 is a schematic view showing the first embodiment of the present invention, the light source 3 〇 is a schematic diagram of the color unevenness in the panel of the embodiment, and FIG. 4 is a color unevenness defect in the panel of the embodiment. "not intended to draw a schematic diagram of the automatic optical inspection machine according to the present invention. Figure 5 is a schematic view showing an automatic optical inspection machine according to the present invention. 13 1273234 [Description of Symbols of Drawing Elements] Gantry Structure 1 第一• First Light Source 30 Light Exit Port 32 Heat Dissipation Hole 35 Viewing Angle Rotation Mechanism 41 Water Pipe 43 Panel to Be Tested 50 Viewing Angle Rotating Mechanism 61 t| Water Pipe 63 - Second Light Source 70 Panel Moving Load 20 light source (low voltage nano lamp) 31 diffusion plate 33 first imaging device 40 liquid cooling device 42 first light sensor 45 second imaging device 60 liquid cooling device 62 second light sensor 65 light pipe 75
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