CN109425476A - Optical detection equipment for detecting uneven brightness of panel - Google Patents

Optical detection equipment for detecting uneven brightness of panel Download PDF

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Publication number
CN109425476A
CN109425476A CN201710949065.4A CN201710949065A CN109425476A CN 109425476 A CN109425476 A CN 109425476A CN 201710949065 A CN201710949065 A CN 201710949065A CN 109425476 A CN109425476 A CN 109425476A
Authority
CN
China
Prior art keywords
panel
optical detection
detection apparatus
light source
measured panel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710949065.4A
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Chinese (zh)
Inventor
叶丁源
林伯聪
林宥丞
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Utechzone Co Ltd
Original Assignee
Utechzone Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Utechzone Co Ltd filed Critical Utechzone Co Ltd
Publication of CN109425476A publication Critical patent/CN109425476A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination

Abstract

An optical detection device for detecting uneven brightness of a panel is used for detecting a panel to be detected and comprises a conveying device, a gantry device, a flash frequency device, a camera device and a processing unit. The flash frequency device is arranged on the gantry device and is provided with at least two light source components to irradiate the panel to be detected so as to generate an irradiation surface. The camera device is electrically connected with the strobe device to capture the image of the irradiation surface. The processing unit is electrically connected with the stroboscopic device and the camera device to switch the at least two light source components to alternately emit light sources, and after the camera device captures the irradiation surface, the processing unit obtains detection information by analyzing the irradiation surface.

Description

The optical detection apparatus of detection panel brightness disproportionation
Technical field
The present invention relates to a kind of optical detection apparatus, and more particularly to a kind of optics for detection panel brightness disproportionation Detection device.
Background technique
With the development of science and technology display equipment is widely used in various fields, for example, it is mobile phone, portable Multimedia device, laptop, LCD TV and LCD screen etc..
Display equipment is a kind of quite accurate device, is made of considerable part, therefore is needed before factory pair The a series of detection work of display equipment progress of different processing procedures, different phase is to detect flaw, such as panel luminance unevenness (MURA), whether appearance has unfilled corner or breakage etc., to promote outgoing.It is directly inspected since MURA is more difficult by human eye, Detect MURA usually all replaces traditional manpower to carry out Defect Detection using optical instrument, can not only improve production efficiency, can also mention The accuracy of high detection.
However, the existing equipment for detection panel brightness disproportionation needs very more measuring stations mostly, for not Same coating emits different light sources in each measuring station, and is captured by photographic device to have discriminated whether panel luminance Unevenness generates, and the costs of manufacture such as the length of integral device, the quantity of photographic device is caused to remain high, therefore, existing for examining The equipment for surveying panel luminance unevenness has improved necessity.
Summary of the invention
The present invention provides a kind of optical detection apparatus, has one to dodge frequency device, to shorten the length of integral device and subtract The quantity of few photographic device, to reduce the cost of manufacturing equipment.
The present invention proposes a kind of optical detection apparatus of detection panel brightness disproportionation, to detect a measured panel, the light Learning detection device includes a conveying device, a gantry device, a sudden strain of a muscle frequency device, a photographic device and a processing unit.The dragon Door gear is set and the conveying device is removably arranged in.The sudden strain of a muscle frequency device is arranged in the gantry device, the sudden strain of a muscle frequency device With at least two light source components, to irradiate the panel to be detected, to generate a shadow surface.The photographic device and sudden strain of a muscle frequency fill Electrical connection is set, to capture the image of the shadow surface.The processing unit is electrically connected the sudden strain of a muscle frequency device and the photographic device, should with switching At least two light source component alternate emission light sources, and after capturing the shadow surface by the photographic device, which should through analysis Shadow surface and a detection information.
Further include a gantry device in one embodiment of the invention, is set and conveying dress is removably set It sets.
In one embodiment of this invention, above-mentioned sudden strain of a muscle frequency device has an ontology, and at least two light source components are set respectively for this It sets in the two sides of ontology.
In one embodiment of this invention, above-mentioned photographic device is selected from a line scan camera shooting device, a face scan camera shooting One of group of device.
In one embodiment of this invention, further include a panel turning gear, the side of the conveying device is set, it will After the measured panel is rotated into another angle, then carry out second of inspection.
In one embodiment of this invention, above-mentioned panel turning gear has a bearing carrier and a lifting apparatus, should The lower section of the bearing carrier is arranged in lifting apparatus, to drive the bearing carrier to move up and down.
In one embodiment of this invention, above-mentioned color break-up frequency device is hubbed at the gantry device, and can be relative to gantry Device rotation.
In one embodiment of this invention, above-mentioned conveying device has a feeding area, a detection zone and a zones of inversions, should Detection zone is an air bearing microscope carrier between the feeding area and the zones of inversions, and the feeding area and the zones of inversions are provided with multiple rollings Wheel.
In one embodiment of this invention, further include a back checking device, the lower section of the detection zone is set, it should be to detection Panel is surveyed, which has an Image sensor apparatus and a light emitting device, the Image sensor apparatus and light emitting device electricity Connection, to capture the back side image of the measured panel when the measured panel is located at the detection zone.
It in one embodiment of this invention, further include a mechanical arm, adjacent to the conveying device, to transmit the tested surface Plate.
It is integrated into based on above-mentioned, of the invention optical detection apparatus at least two light source components and dodges frequency device, it can be single Complete Defect Detection is carried out to determinand in a station, to simplify testing process, and improves detection efficiency.It is another Aspect, by dodge frequency device setting can also reduce photographic device quantity and reduction optical detection apparatus entire length from And reduce the manufacturing cost of equipment.
To make the foregoing features and advantages of the present invention clearer and more comprehensible, special embodiment below, and it is detailed to cooperate attached drawing to make Carefully it is described as follows.
Detailed description of the invention
Fig. 1 is the perspective view of the optical detection apparatus of one embodiment of the invention.
Fig. 2-1 is a kind of side view of the optical detection apparatus of the embodiment of the present invention.
Fig. 2-2 is another side view of the optical detection apparatus of the embodiment of the present invention.
Fig. 3 is time diagram of the sudden strain of a muscle frequency device of the embodiment of the present invention when dodging frequency.
Fig. 4 is the schematic diagram of the panel turning gear of the optical detection apparatus of the embodiment of the present invention.
Fig. 5 is the flow diagram of the optical detection apparatus of the embodiment of the present invention.
Appended drawing reference:
100, optical detection apparatus
1, conveying device
11, feeding area
12, detection zone
13, zones of inversions
2, gantry device
3, frequency device is dodged
31, ontology
32, light source component
33, light source component
4, photographic device
5, processing unit
6, panel turning gear
61, bearing carrier
62, revolving part
63, lifting apparatus
7, checking device is carried on the back
71, Image sensor apparatus
72, light emitting device
8, mechanical arm
F, shadow surface
P, measured panel
Specific embodiment
Fig. 1 is the perspective view of the optical detection apparatus of one embodiment of the invention.Referring to FIG. 1, in the present embodiment, the light Detection device 100 is mainly used in the panel processing procedure of panel luminance uneven (MURA) but invention is not limited thereto.At other In embodiment, which can apply manufacture of semiconductor, semiconductor assembly and test, circuit board process, other electronics zero The Defect Detection of device process or other related industry processing procedures.
Refering to fig. 1, the present embodiment be a kind of detection panel brightness disproportionation optical detection apparatus 100, to detect one to Survey panel P, the optical detection apparatus include a conveying device 1, a gantry device 2, one dodge frequency device 3, a photographic device 4 and One processing unit 5.
Specifically, refering to fig. 1, which is sequentially respectively a feeding area 11, a detection zone by the right side a to left side for cooperation 12 and a zones of inversions 13.In the present embodiment, the feeding area 11 and the zones of inversions 13 are provided with multiple idler wheels, to drive this to be measured Panel P is moved left and right.Certainly, invention is not limited thereto, and the feeding area 11 and the zones of inversions 13 can also be replaced by air bearing microscope carrier. In the present embodiment, which is an air bearing microscope carrier.
The gantry device 2 is set and the conveying device 1 is removably arranged in.
The sudden strain of a muscle frequency device 3 is arranged in the gantry device 2 refering to fig. 1.Specifically, which is hubbed at the gantry Device 2 makes the sudden strain of a muscle frequency device 3 that can transfer to adjust irradiation position relative to 2 left-right rotary of gantry device.
The sudden strain of a muscle frequency device 3 has an ontology 31 and at least two light source components 32,33, to irradiate the panel P to be detected, with Generate a shadow surface F.In the present embodiment, two light source components 32,33 are respectively white light and sodium light and are arranged in the ontology 31 Opposite sides.Certainly, invention is not limited thereto, these light source components 32,33 can be feux rouges, blue and green light and white light Combination or feux rouges, blue and green light and ultraviolet light combination.
The photographic device 4 is electrically connected with the sudden strain of a muscle frequency device 3, to capture the image of shadow surface F.In the present embodiment, should Photographic device 4 is a line scan camera shooting device (line scan), and certainly, invention is not limited thereto, which can also For a face scan camera shooting device (Area Scan Camera).It is worth mentioning, in the present embodiment, which is one Thus black-and-white photography machine reduces the cost of detection without the colour camera that cost of use is higher.
In addition, dodging frequency device 3 and photographic device 4 by being arranged on the gantry device 2, and the gantry device 2 is removable It unloads, so that the gantry device 2 can be installed directly in any production online, and practicability can be increased.For example, it is passing The production line of simple transportation panel on system directly sets up the gantry device 2 and makes the production line of traditional transportation panel, can be because This checks the function of MURA, and is not necessary to replace the equipment of script, thereby increases the functionality of equipment, and reduce and replace Change the cost of old board.
Cooperation is electrically connected the sudden strain of a muscle frequency device 3 and the photographic device 4 refering to Fig. 2-1 and Fig. 2-2, the processing unit 5, with switching At least two light source components 32,33 alternate emission light sources, to generate shadow surface F on measured panel P, and by the camera shooting After device 4 captures shadow surface F, which is analyzed shadow surface F and obtains a detection information.
Cooperation refering to fig. 1 and Fig. 4, preferably, the optical detection apparatus 100 further includes a panel turning gear 6.The panel The side of the conveying device 1 is arranged in rotating device 6.The panel turning gear 6 has a bearing carrier 61, a revolving part 62 (not shown) and a lifting apparatus 63.The bearing carrier 61 is set to the conveying device 1.The revolving part 62 is arranged in bearing carrier Between 61 and the lifting apparatus 63, to drive bearing carrier 61 to rotate.The lifting apparatus 63 is arranged under the bearing carrier 61 Side, to drive the bearing carrier 61 to move up and down.For example, check that measured panel P is entered by short side for the first time, by dodging frequency After the light source component 32 of device 3 irradiates measured panel P respectively and captured by the photographic device 4, measured panel P will be transmitted To the panel turning gear 6, which is lifted by the lifting apparatus 63 of the panel turning gear 6, and by the rotation Part 62, which drives, rotates the bearing carrier 61, and measured panel P is rotated by 90 ° by short side and changes into long side, then carries out second of inspection It looks into.
Cooperation is refering to Fig. 2-1 and Fig. 2-2, preferably, the optical detection apparatus 100 further includes that a back checking device 7 is set to The lower section of the detection zone 12, to detect measured panel P.The back checking device 7 has an Image sensor apparatus 71 and a luminous dress Set 72.The Image sensor apparatus 71 is electrically connected with the light emitting device 72, to capture when measured panel P is located at the detection zone 12 The back side image of measured panel P, and it is sent to the processing unit 5.In the present embodiment, which is one side Scan camera shooting device, certainly, invention is not limited thereto, which can also be a line scan camera shooting device.
Cooperate refering to fig. 1, preferably, the optical detection apparatus 100 further includes a mechanical arm 8.Specifically, the machinery Arm 8 is multi-axis mechanical arm, adjacent to the conveying device 1, to transmit measured panel P.
Aforementioned lifted gantry device 2, the sudden strain of a muscle frequency device 3, the photographic device 4, the panel turning gear 6, back inspection The setting position of device 7 and the mechanical arm 8 is only purposes of discussion, those skilled in the art reference the present embodiment explanation it Afterwards, the setting position of foregoing components can be changed according to process requirement.
With reference to Fig. 1, Fig. 3 and Fig. 5.First time testing process: by the lifting apparatus 63 by 61 liters of the bearing carrier It rises, after measured panel P is placed on the bearing carrier 61 by the mechanical arm 8 in the way of short side pan feeding, lifting dress It sets 63 to decline the bearing carrier 61, is located at measured panel P on the idler wheel of the feeding area 11.Next, passing through the feeding Measured panel P is sent to the detection zone 12 and is detected by the sudden strain of a muscle frequency device 3 by the idler wheel in area 11.
Specifically, as shown in Figure 3, which drives one of light source component 32 to emit white in bright-field Light, and (Trigger) photographic device 4 (CCD) is driven to shoot first panel image, next switching to another light source structure Part 33 emits sodium light, then captures second panel image by photographic device 4, due to being filled in the present embodiment using line scan camera shooting It sets, therefore photographic device 4 can ceaselessly shoot different light sources and be detected with irradiating multiple panels image, when the scanning tested surface Measured panel P is being sent to the zones of inversions 13 behind the upper surface of plate P.
And then the idler wheel of the zones of inversions 13 is reversed, measured panel P is sent to the detection zone 12 and is filled by sudden strain of a muscle frequency It sets 3 to be detected, which drives one of light source component 32 to emit white light in dark field, is next switching Emit sodium light at another light source component 33, and multiple panels image is captured by photographic device 4, by the measured panel after detection P is sent to the bearing carrier 61 of feeding area 11, which rises the bearing carrier 61, and by measured panel P After being converted into long side by short side (that is, in single process, shadow surface that fechtable at least two light sources is irradiated Image).It is detected carrying out second, secondary testing process is identical as first time testing process, therefore is not repeating, and owns After the completion of detecting program, through the processing unit 5 multiple staggered panel images is analyzed and processed and obtain a detection information.
In conclusion multiple light sources component is integrated by optical detection apparatus of the invention dodges frequency device, and pass through sudden strain of a muscle The mode of frequency irradiates panel, therefore can carry out complete Defect Detection to determinand in single a station, to simplify detection Process, and improve detection efficiency.
Although the present invention has been disclosed by way of example above, it is not intended to limit the present invention., any technical field Middle tool usually intellectual, without departing from the spirit and scope of the present invention, when can make some changes and embellishment, thus it is of the invention Protection scope should be defined by the scope of the appended claims.

Claims (10)

1. a kind of optical detection apparatus of detection panel brightness disproportionation, to detect a measured panel, which is characterized in that the optics Detection device includes:
One conveying device, to convey the measured panel;
One dodges frequency device, is located above conveying device, which has at least two light source components, irradiates the face to be detected Plate, to generate a shadow surface;
One photographic device is electrically connected, to capture the image of the shadow surface with the sudden strain of a muscle frequency device;And
One processing unit is electrically connected the sudden strain of a muscle frequency device and the photographic device, controls the operation of at least two light source components, so that At least two light sources are alternately provided light for this, and wherein the processing unit analyzes the image of the shadow surface, to obtain a detection letter Breath.
2. optical detection apparatus according to claim 1, which is characterized in that further include a gantry device, be set and It is dismountable to be arranged in the conveying device.
3. optical detection apparatus according to claim 1, which is characterized in that the sudden strain of a muscle frequency device has an ontology, this is at least Two light source components are separately positioned on the two sides of ontology.
4. optical detection apparatus according to claim 1, which is characterized in that the photographic device is filled selected from a line scan camera shooting It sets, one of the group of a face scan camera shooting device.
5. optical detection apparatus according to claim 1, which is characterized in that further include a panel turning gear, setting exists The side of the conveying device after the measured panel is rotated into another angle, then carries out second of inspection.
6. optical detection apparatus according to claim 5, which is characterized in that the panel turning gear has a bearing carrier And a lifting apparatus, which is arranged in the lower section of the bearing carrier, to drive the bearing carrier to move up and down.
7. optical detection apparatus according to claim 1, which is characterized in that the sudden strain of a muscle frequency device is hubbed at the gantry device, And it can be rotated relative to gantry device.
8. optical detection apparatus according to claim 1, which is characterized in that the conveying device has a feeding area, an inspection Survey area and a zones of inversions, which is an air bearing microscope carrier positioned at the feeding area and the zones of inversions between, the feeding area and this Zones of inversions is provided with multiple idler wheels.
9. optical detection apparatus according to claim 8, which is characterized in that further include a back checking device, be arranged in the inspection The lower section in area is surveyed, to detect the measured panel, which has an Image sensor apparatus and a light emitting device, the image sense It surveys device to be electrically connected with the light emitting device, to capture the back side shadow of the measured panel when the measured panel is located at the detection zone Picture.
10. optical detection apparatus according to claim 1, which is characterized in that it further include a mechanical arm, it is defeated adjacent to this Device is sent, to transmit the measured panel.
CN201710949065.4A 2017-08-29 2017-10-12 Optical detection equipment for detecting uneven brightness of panel Pending CN109425476A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW106129361A TW201913037A (en) 2017-08-29 2017-08-29 Optical detecting device for detecting uneven brightness of panel
TW106129361 2017-08-29

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Publication Number Publication Date
CN109425476A true CN109425476A (en) 2019-03-05

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Application Number Title Priority Date Filing Date
CN201710949065.4A Pending CN109425476A (en) 2017-08-29 2017-10-12 Optical detection equipment for detecting uneven brightness of panel

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TW (1) TW201913037A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI719577B (en) * 2019-08-07 2021-02-21 力山工業股份有限公司 Conveying device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI273234B (en) * 2005-06-02 2007-02-11 Favite Inc Automatic optical test machine for determining the defect of color non-uniformity of panels
TW201030342A (en) * 2009-02-05 2010-08-16 Univ Nat Taiwan Ocean Micro particle image velocimetry, and particle image-capturing method thereof
CN104296971A (en) * 2014-10-22 2015-01-21 中国电子科技集团公司第四十一研究所 Display contrast calibration method and device under high luminance environment

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI273234B (en) * 2005-06-02 2007-02-11 Favite Inc Automatic optical test machine for determining the defect of color non-uniformity of panels
TW201030342A (en) * 2009-02-05 2010-08-16 Univ Nat Taiwan Ocean Micro particle image velocimetry, and particle image-capturing method thereof
CN104296971A (en) * 2014-10-22 2015-01-21 中国电子科技集团公司第四十一研究所 Display contrast calibration method and device under high luminance environment

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Application publication date: 20190305