CN109425476A - Optical detection equipment for detecting uneven brightness of panel - Google Patents
Optical detection equipment for detecting uneven brightness of panel Download PDFInfo
- Publication number
- CN109425476A CN109425476A CN201710949065.4A CN201710949065A CN109425476A CN 109425476 A CN109425476 A CN 109425476A CN 201710949065 A CN201710949065 A CN 201710949065A CN 109425476 A CN109425476 A CN 109425476A
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- China
- Prior art keywords
- panel
- optical detection
- detection apparatus
- light source
- measured panel
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- 238000001514 detection method Methods 0.000 title claims abstract description 69
- 230000003287 optical effect Effects 0.000 title claims abstract description 32
- 238000012545 processing Methods 0.000 claims abstract description 15
- 210000003205 muscle Anatomy 0.000 claims description 20
- 238000007323 disproportionation reaction Methods 0.000 claims description 6
- 238000007689 inspection Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 description 13
- 230000008569 process Effects 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000012360 testing method Methods 0.000 description 5
- 230000007547 defect Effects 0.000 description 4
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 229910052708 sodium Inorganic materials 0.000 description 3
- 239000011734 sodium Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
Abstract
An optical detection device for detecting uneven brightness of a panel is used for detecting a panel to be detected and comprises a conveying device, a gantry device, a flash frequency device, a camera device and a processing unit. The flash frequency device is arranged on the gantry device and is provided with at least two light source components to irradiate the panel to be detected so as to generate an irradiation surface. The camera device is electrically connected with the strobe device to capture the image of the irradiation surface. The processing unit is electrically connected with the stroboscopic device and the camera device to switch the at least two light source components to alternately emit light sources, and after the camera device captures the irradiation surface, the processing unit obtains detection information by analyzing the irradiation surface.
Description
Technical field
The present invention relates to a kind of optical detection apparatus, and more particularly to a kind of optics for detection panel brightness disproportionation
Detection device.
Background technique
With the development of science and technology display equipment is widely used in various fields, for example, it is mobile phone, portable
Multimedia device, laptop, LCD TV and LCD screen etc..
Display equipment is a kind of quite accurate device, is made of considerable part, therefore is needed before factory pair
The a series of detection work of display equipment progress of different processing procedures, different phase is to detect flaw, such as panel luminance unevenness
(MURA), whether appearance has unfilled corner or breakage etc., to promote outgoing.It is directly inspected since MURA is more difficult by human eye,
Detect MURA usually all replaces traditional manpower to carry out Defect Detection using optical instrument, can not only improve production efficiency, can also mention
The accuracy of high detection.
However, the existing equipment for detection panel brightness disproportionation needs very more measuring stations mostly, for not
Same coating emits different light sources in each measuring station, and is captured by photographic device to have discriminated whether panel luminance
Unevenness generates, and the costs of manufacture such as the length of integral device, the quantity of photographic device is caused to remain high, therefore, existing for examining
The equipment for surveying panel luminance unevenness has improved necessity.
Summary of the invention
The present invention provides a kind of optical detection apparatus, has one to dodge frequency device, to shorten the length of integral device and subtract
The quantity of few photographic device, to reduce the cost of manufacturing equipment.
The present invention proposes a kind of optical detection apparatus of detection panel brightness disproportionation, to detect a measured panel, the light
Learning detection device includes a conveying device, a gantry device, a sudden strain of a muscle frequency device, a photographic device and a processing unit.The dragon
Door gear is set and the conveying device is removably arranged in.The sudden strain of a muscle frequency device is arranged in the gantry device, the sudden strain of a muscle frequency device
With at least two light source components, to irradiate the panel to be detected, to generate a shadow surface.The photographic device and sudden strain of a muscle frequency fill
Electrical connection is set, to capture the image of the shadow surface.The processing unit is electrically connected the sudden strain of a muscle frequency device and the photographic device, should with switching
At least two light source component alternate emission light sources, and after capturing the shadow surface by the photographic device, which should through analysis
Shadow surface and a detection information.
Further include a gantry device in one embodiment of the invention, is set and conveying dress is removably set
It sets.
In one embodiment of this invention, above-mentioned sudden strain of a muscle frequency device has an ontology, and at least two light source components are set respectively for this
It sets in the two sides of ontology.
In one embodiment of this invention, above-mentioned photographic device is selected from a line scan camera shooting device, a face scan camera shooting
One of group of device.
In one embodiment of this invention, further include a panel turning gear, the side of the conveying device is set, it will
After the measured panel is rotated into another angle, then carry out second of inspection.
In one embodiment of this invention, above-mentioned panel turning gear has a bearing carrier and a lifting apparatus, should
The lower section of the bearing carrier is arranged in lifting apparatus, to drive the bearing carrier to move up and down.
In one embodiment of this invention, above-mentioned color break-up frequency device is hubbed at the gantry device, and can be relative to gantry
Device rotation.
In one embodiment of this invention, above-mentioned conveying device has a feeding area, a detection zone and a zones of inversions, should
Detection zone is an air bearing microscope carrier between the feeding area and the zones of inversions, and the feeding area and the zones of inversions are provided with multiple rollings
Wheel.
In one embodiment of this invention, further include a back checking device, the lower section of the detection zone is set, it should be to detection
Panel is surveyed, which has an Image sensor apparatus and a light emitting device, the Image sensor apparatus and light emitting device electricity
Connection, to capture the back side image of the measured panel when the measured panel is located at the detection zone.
It in one embodiment of this invention, further include a mechanical arm, adjacent to the conveying device, to transmit the tested surface
Plate.
It is integrated into based on above-mentioned, of the invention optical detection apparatus at least two light source components and dodges frequency device, it can be single
Complete Defect Detection is carried out to determinand in a station, to simplify testing process, and improves detection efficiency.It is another
Aspect, by dodge frequency device setting can also reduce photographic device quantity and reduction optical detection apparatus entire length from
And reduce the manufacturing cost of equipment.
To make the foregoing features and advantages of the present invention clearer and more comprehensible, special embodiment below, and it is detailed to cooperate attached drawing to make
Carefully it is described as follows.
Detailed description of the invention
Fig. 1 is the perspective view of the optical detection apparatus of one embodiment of the invention.
Fig. 2-1 is a kind of side view of the optical detection apparatus of the embodiment of the present invention.
Fig. 2-2 is another side view of the optical detection apparatus of the embodiment of the present invention.
Fig. 3 is time diagram of the sudden strain of a muscle frequency device of the embodiment of the present invention when dodging frequency.
Fig. 4 is the schematic diagram of the panel turning gear of the optical detection apparatus of the embodiment of the present invention.
Fig. 5 is the flow diagram of the optical detection apparatus of the embodiment of the present invention.
Appended drawing reference:
100, optical detection apparatus
1, conveying device
11, feeding area
12, detection zone
13, zones of inversions
2, gantry device
3, frequency device is dodged
31, ontology
32, light source component
33, light source component
4, photographic device
5, processing unit
6, panel turning gear
61, bearing carrier
62, revolving part
63, lifting apparatus
7, checking device is carried on the back
71, Image sensor apparatus
72, light emitting device
8, mechanical arm
F, shadow surface
P, measured panel
Specific embodiment
Fig. 1 is the perspective view of the optical detection apparatus of one embodiment of the invention.Referring to FIG. 1, in the present embodiment, the light
Detection device 100 is mainly used in the panel processing procedure of panel luminance uneven (MURA) but invention is not limited thereto.At other
In embodiment, which can apply manufacture of semiconductor, semiconductor assembly and test, circuit board process, other electronics zero
The Defect Detection of device process or other related industry processing procedures.
Refering to fig. 1, the present embodiment be a kind of detection panel brightness disproportionation optical detection apparatus 100, to detect one to
Survey panel P, the optical detection apparatus include a conveying device 1, a gantry device 2, one dodge frequency device 3, a photographic device 4 and
One processing unit 5.
Specifically, refering to fig. 1, which is sequentially respectively a feeding area 11, a detection zone by the right side a to left side for cooperation
12 and a zones of inversions 13.In the present embodiment, the feeding area 11 and the zones of inversions 13 are provided with multiple idler wheels, to drive this to be measured
Panel P is moved left and right.Certainly, invention is not limited thereto, and the feeding area 11 and the zones of inversions 13 can also be replaced by air bearing microscope carrier.
In the present embodiment, which is an air bearing microscope carrier.
The gantry device 2 is set and the conveying device 1 is removably arranged in.
The sudden strain of a muscle frequency device 3 is arranged in the gantry device 2 refering to fig. 1.Specifically, which is hubbed at the gantry
Device 2 makes the sudden strain of a muscle frequency device 3 that can transfer to adjust irradiation position relative to 2 left-right rotary of gantry device.
The sudden strain of a muscle frequency device 3 has an ontology 31 and at least two light source components 32,33, to irradiate the panel P to be detected, with
Generate a shadow surface F.In the present embodiment, two light source components 32,33 are respectively white light and sodium light and are arranged in the ontology 31
Opposite sides.Certainly, invention is not limited thereto, these light source components 32,33 can be feux rouges, blue and green light and white light
Combination or feux rouges, blue and green light and ultraviolet light combination.
The photographic device 4 is electrically connected with the sudden strain of a muscle frequency device 3, to capture the image of shadow surface F.In the present embodiment, should
Photographic device 4 is a line scan camera shooting device (line scan), and certainly, invention is not limited thereto, which can also
For a face scan camera shooting device (Area Scan Camera).It is worth mentioning, in the present embodiment, which is one
Thus black-and-white photography machine reduces the cost of detection without the colour camera that cost of use is higher.
In addition, dodging frequency device 3 and photographic device 4 by being arranged on the gantry device 2, and the gantry device 2 is removable
It unloads, so that the gantry device 2 can be installed directly in any production online, and practicability can be increased.For example, it is passing
The production line of simple transportation panel on system directly sets up the gantry device 2 and makes the production line of traditional transportation panel, can be because
This checks the function of MURA, and is not necessary to replace the equipment of script, thereby increases the functionality of equipment, and reduce and replace
Change the cost of old board.
Cooperation is electrically connected the sudden strain of a muscle frequency device 3 and the photographic device 4 refering to Fig. 2-1 and Fig. 2-2, the processing unit 5, with switching
At least two light source components 32,33 alternate emission light sources, to generate shadow surface F on measured panel P, and by the camera shooting
After device 4 captures shadow surface F, which is analyzed shadow surface F and obtains a detection information.
Cooperation refering to fig. 1 and Fig. 4, preferably, the optical detection apparatus 100 further includes a panel turning gear 6.The panel
The side of the conveying device 1 is arranged in rotating device 6.The panel turning gear 6 has a bearing carrier 61, a revolving part 62
(not shown) and a lifting apparatus 63.The bearing carrier 61 is set to the conveying device 1.The revolving part 62 is arranged in bearing carrier
Between 61 and the lifting apparatus 63, to drive bearing carrier 61 to rotate.The lifting apparatus 63 is arranged under the bearing carrier 61
Side, to drive the bearing carrier 61 to move up and down.For example, check that measured panel P is entered by short side for the first time, by dodging frequency
After the light source component 32 of device 3 irradiates measured panel P respectively and captured by the photographic device 4, measured panel P will be transmitted
To the panel turning gear 6, which is lifted by the lifting apparatus 63 of the panel turning gear 6, and by the rotation
Part 62, which drives, rotates the bearing carrier 61, and measured panel P is rotated by 90 ° by short side and changes into long side, then carries out second of inspection
It looks into.
Cooperation is refering to Fig. 2-1 and Fig. 2-2, preferably, the optical detection apparatus 100 further includes that a back checking device 7 is set to
The lower section of the detection zone 12, to detect measured panel P.The back checking device 7 has an Image sensor apparatus 71 and a luminous dress
Set 72.The Image sensor apparatus 71 is electrically connected with the light emitting device 72, to capture when measured panel P is located at the detection zone 12
The back side image of measured panel P, and it is sent to the processing unit 5.In the present embodiment, which is one side
Scan camera shooting device, certainly, invention is not limited thereto, which can also be a line scan camera shooting device.
Cooperate refering to fig. 1, preferably, the optical detection apparatus 100 further includes a mechanical arm 8.Specifically, the machinery
Arm 8 is multi-axis mechanical arm, adjacent to the conveying device 1, to transmit measured panel P.
Aforementioned lifted gantry device 2, the sudden strain of a muscle frequency device 3, the photographic device 4, the panel turning gear 6, back inspection
The setting position of device 7 and the mechanical arm 8 is only purposes of discussion, those skilled in the art reference the present embodiment explanation it
Afterwards, the setting position of foregoing components can be changed according to process requirement.
With reference to Fig. 1, Fig. 3 and Fig. 5.First time testing process: by the lifting apparatus 63 by 61 liters of the bearing carrier
It rises, after measured panel P is placed on the bearing carrier 61 by the mechanical arm 8 in the way of short side pan feeding, lifting dress
It sets 63 to decline the bearing carrier 61, is located at measured panel P on the idler wheel of the feeding area 11.Next, passing through the feeding
Measured panel P is sent to the detection zone 12 and is detected by the sudden strain of a muscle frequency device 3 by the idler wheel in area 11.
Specifically, as shown in Figure 3, which drives one of light source component 32 to emit white in bright-field
Light, and (Trigger) photographic device 4 (CCD) is driven to shoot first panel image, next switching to another light source structure
Part 33 emits sodium light, then captures second panel image by photographic device 4, due to being filled in the present embodiment using line scan camera shooting
It sets, therefore photographic device 4 can ceaselessly shoot different light sources and be detected with irradiating multiple panels image, when the scanning tested surface
Measured panel P is being sent to the zones of inversions 13 behind the upper surface of plate P.
And then the idler wheel of the zones of inversions 13 is reversed, measured panel P is sent to the detection zone 12 and is filled by sudden strain of a muscle frequency
It sets 3 to be detected, which drives one of light source component 32 to emit white light in dark field, is next switching
Emit sodium light at another light source component 33, and multiple panels image is captured by photographic device 4, by the measured panel after detection
P is sent to the bearing carrier 61 of feeding area 11, which rises the bearing carrier 61, and by measured panel P
After being converted into long side by short side (that is, in single process, shadow surface that fechtable at least two light sources is irradiated
Image).It is detected carrying out second, secondary testing process is identical as first time testing process, therefore is not repeating, and owns
After the completion of detecting program, through the processing unit 5 multiple staggered panel images is analyzed and processed and obtain a detection information.
In conclusion multiple light sources component is integrated by optical detection apparatus of the invention dodges frequency device, and pass through sudden strain of a muscle
The mode of frequency irradiates panel, therefore can carry out complete Defect Detection to determinand in single a station, to simplify detection
Process, and improve detection efficiency.
Although the present invention has been disclosed by way of example above, it is not intended to limit the present invention., any technical field
Middle tool usually intellectual, without departing from the spirit and scope of the present invention, when can make some changes and embellishment, thus it is of the invention
Protection scope should be defined by the scope of the appended claims.
Claims (10)
1. a kind of optical detection apparatus of detection panel brightness disproportionation, to detect a measured panel, which is characterized in that the optics
Detection device includes:
One conveying device, to convey the measured panel;
One dodges frequency device, is located above conveying device, which has at least two light source components, irradiates the face to be detected
Plate, to generate a shadow surface;
One photographic device is electrically connected, to capture the image of the shadow surface with the sudden strain of a muscle frequency device;And
One processing unit is electrically connected the sudden strain of a muscle frequency device and the photographic device, controls the operation of at least two light source components, so that
At least two light sources are alternately provided light for this, and wherein the processing unit analyzes the image of the shadow surface, to obtain a detection letter
Breath.
2. optical detection apparatus according to claim 1, which is characterized in that further include a gantry device, be set and
It is dismountable to be arranged in the conveying device.
3. optical detection apparatus according to claim 1, which is characterized in that the sudden strain of a muscle frequency device has an ontology, this is at least
Two light source components are separately positioned on the two sides of ontology.
4. optical detection apparatus according to claim 1, which is characterized in that the photographic device is filled selected from a line scan camera shooting
It sets, one of the group of a face scan camera shooting device.
5. optical detection apparatus according to claim 1, which is characterized in that further include a panel turning gear, setting exists
The side of the conveying device after the measured panel is rotated into another angle, then carries out second of inspection.
6. optical detection apparatus according to claim 5, which is characterized in that the panel turning gear has a bearing carrier
And a lifting apparatus, which is arranged in the lower section of the bearing carrier, to drive the bearing carrier to move up and down.
7. optical detection apparatus according to claim 1, which is characterized in that the sudden strain of a muscle frequency device is hubbed at the gantry device,
And it can be rotated relative to gantry device.
8. optical detection apparatus according to claim 1, which is characterized in that the conveying device has a feeding area, an inspection
Survey area and a zones of inversions, which is an air bearing microscope carrier positioned at the feeding area and the zones of inversions between, the feeding area and this
Zones of inversions is provided with multiple idler wheels.
9. optical detection apparatus according to claim 8, which is characterized in that further include a back checking device, be arranged in the inspection
The lower section in area is surveyed, to detect the measured panel, which has an Image sensor apparatus and a light emitting device, the image sense
It surveys device to be electrically connected with the light emitting device, to capture the back side shadow of the measured panel when the measured panel is located at the detection zone
Picture.
10. optical detection apparatus according to claim 1, which is characterized in that it further include a mechanical arm, it is defeated adjacent to this
Device is sent, to transmit the measured panel.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW106129361A TW201913037A (en) | 2017-08-29 | 2017-08-29 | Optical detecting device for detecting uneven brightness of panel |
TW106129361 | 2017-08-29 |
Publications (1)
Publication Number | Publication Date |
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CN109425476A true CN109425476A (en) | 2019-03-05 |
Family
ID=65513599
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710949065.4A Pending CN109425476A (en) | 2017-08-29 | 2017-10-12 | Optical detection equipment for detecting uneven brightness of panel |
Country Status (2)
Country | Link |
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CN (1) | CN109425476A (en) |
TW (1) | TW201913037A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI719577B (en) * | 2019-08-07 | 2021-02-21 | 力山工業股份有限公司 | Conveying device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI273234B (en) * | 2005-06-02 | 2007-02-11 | Favite Inc | Automatic optical test machine for determining the defect of color non-uniformity of panels |
TW201030342A (en) * | 2009-02-05 | 2010-08-16 | Univ Nat Taiwan Ocean | Micro particle image velocimetry, and particle image-capturing method thereof |
CN104296971A (en) * | 2014-10-22 | 2015-01-21 | 中国电子科技集团公司第四十一研究所 | Display contrast calibration method and device under high luminance environment |
-
2017
- 2017-08-29 TW TW106129361A patent/TW201913037A/en unknown
- 2017-10-12 CN CN201710949065.4A patent/CN109425476A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI273234B (en) * | 2005-06-02 | 2007-02-11 | Favite Inc | Automatic optical test machine for determining the defect of color non-uniformity of panels |
TW201030342A (en) * | 2009-02-05 | 2010-08-16 | Univ Nat Taiwan Ocean | Micro particle image velocimetry, and particle image-capturing method thereof |
CN104296971A (en) * | 2014-10-22 | 2015-01-21 | 中国电子科技集团公司第四十一研究所 | Display contrast calibration method and device under high luminance environment |
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Publication number | Publication date |
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TW201913037A (en) | 2019-04-01 |
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Application publication date: 20190305 |