TWI271394B - Jig for heat-treating ceramic for electronic part and its manufacturing process - Google Patents

Abstract

To provide a jig for heat-treating a ceramic for electronic parts which has an improved peeling resistance of a coating layer such as a sprayed coating film, etc., shows excellent strength under heat, creep resistance and durability and can be suitably used in a heat-treatment or baking process of the ceramic for the electronic parts such as a ceramic capacitor, a ceramic transformer, etc., and its manufacturing process. On each of upper and lower surfaces of a first layer which is an SiC ceramic substrate 1, a second layer comprising at least one ceramic 2 chosen from Al2O3, Al2O3-SiO2, Al2O3-SiO2-MgO and MgO-Al2O3-ZrO2 ceramics is formed. On a partial or entire surface of the second layer, a third layer comprising a single or multiple sprayed coating film layers 3 containing at least one chosen from Al2O3, mullite, ZrO2 and Y2O3 is formed.

Description

1271394 V. INSTRUCTION DESCRIPTION Q) Technology is not only the invention relates to electronic cross-flow - and its manufacturing method, and more * * The heat treatment jig (JIG, treatment container, ceramic transformer, etc.) The heat treatment and baking step of the ceramics for electronic parts in the ceramic electric circuit is a heat treatment jig and a manufacturing method thereof. Ceramics have been widely used as electric strong dielectric ceramics for ceramic crying in recent years. For example, a ceramics such as a barium titanate or the like, a Ni-Zn system, or the like, is used for an electron-based ceramic body, and a ferrite body (Mn-Zn is used as a constituent material of an electronic component. The ceramics for the parts are usually heat-treated or fired under the circumference of the crucible. Therefore, the j70〇c/container is used for the processing of the 〇乍f electronic parts, and the heat of the ceramics is used... Sl02, Al2〇3 - Si〇9 - Mg〇皙, g: A, 120 plant Zr〇2, carbon carbide, etc., which are excellent in heat resistance, etc. It is a suitable material. Excellent in strength and resistance to latent deformation, therefore, in the above heat treatment When the workpiece is directly placed on the jig, and the contact is made, depending on the composition, a reaction with the constituent material of the jig for heat treatment may occur during the heat treatment. In this case, in order to prevent the object to be treated and The jig reaction is performed by using a ceramic having a poorly reactive side, such as Zr02, to form a jig surface. For example, in the case of performing heat treatment of barium titanate (BaT i 〇 3 ), Zr〇2 ceramic is used. In the case of heat treatment of soft ferrite (Mn-Zn system, Ni-Zn system, etc.), A丨2〇3, Zr〇2 or treated material 1271394 is used.

When the ceramic material of the same composition is used, or the ceramic-coated carbonized enamel ceramic base is used as a material, the surface of the ceramic material is thickened to the above-mentioned coated material, and a plurality of use cases are used. After coating, the desired ceramic slurry is formed by baking at a high temperature. Among them, the spraying method: 苴:, CVD method, and the method of the fusion method are not easily peeled off, and the d-effect is physical. These coated materials are, for example, too worn. In the middle, the secret description dry + μ ^, this patent special opening 200 1 -278685: material = 0" strength and excellent resistance to latent carbonization of the fossil eve = andalusite, called the heat of the spray Γ ν: as shown, The melted coating films 12 and 13 formed of the t搂ί layer of the carbon-cut ceramic substrate 11 are not easily peeled off. </ RTI> The above materials are formed on the surface of the carbonized stone ceramsite substrate η. Since the spray coatings 12 and 13 of ruthenium, mullite, and Zr〇2 are formed directly on the surface, they are used in the heat treatment and baking step of the ceramic for electronic parts, because the film is passed through the film 丨2, 丨The oxygen of 3 causes the surface of the substrate of the carbonized stone to be oxidized and becomes fragile. As the frequency of use increases, the sprayed coating 丨2, i3 from the carbonized enamel ceramic base occurs. In the case of the heat treatment jig formed by the above, the peeling of the sprayed film is not sufficiently prevented, and the heat treatment jig having a long durability life is subjected to an ardent period. Hope. Summary of invention

C:\2D-CODE\91-07\91109669.ptd Page 5 1271394 V'Invention Description (7) Further, the center line average roughness Ra of the surface of the second layer is 3 or more and 20 // m or less. good. If the average thickness of the center line of the surface is less than 3 #m, the adhesion between the second layer and the sprayed coating layer is insufficient, and there is a case where peeling occurs from the boundary portion. On the other hand, the center line of the surface is averaged. When the roughness Ra exceeds 2 ,, cracks and breakage are likely to occur in the second layer as the thermal environment changes, and a spray coating layer having a uniform and moderately smooth surface is formed on the surface of the second layer. Difficulties. Further, the film thickness of the third layer of the deposited film layer is preferably 5 Å or more. Μ丨丨I Μ = When the thickness is less than 50 _, since the film thickness is too thin, the heat treatment and the heat treatment may not sufficiently prevent the jig from reacting with the object to be treated. \ Body fit;! When the thickness exceeds 5°0^, the thermal stress of the film itself increases during the refining, which makes it easy to peel off. The above-mentioned spray coating layer may be a single layer, or may be the most external sound of the spray coating layer, and may not be used in the heat treatment and roasting steps. It is better to form with ^ ^ + r 7 pieces of materials that react with ceramics. Further, in the case of forming a plurality of layers, a material of a thermal expansion enthalpy/value is formed as a molten film of the underlayer, and +a is formed in such a manner that the film can be suppressed from being deformed by the thermal environment tm # Peeling of the layers. The kimono of the kimono is guided by the following:

1271394 V. Description of the invention (9) Auxiliaries are preferred. By preventing the above-mentioned sprayed child body melting method from being superficially smooth, and the physical density of the spray is high, the surface is made coarse, and the degree Ra is 3 // m (Example) It is preferable that the surface of the shape of the first coating layer or the like is formed by lamination of the film, and the surface of the second layer of the above 20% is formed into a molten film layer, and the carbon layer of the layer can be formed. The passage of oxygen in the fossil ceremonial pottery. The flame spray method, the burst spray method, and the various types of spray methods which are specifically defined by the flame spray method can be formed, and it is preferable to form a plasma spray of a film which is more excellent in heat resistance. As described above, since the anchoring effect is used, the contact area can be increased to increase the contact force, and the second layer of the substrate to be melted can be made by a sand mill or the like. The center line of the surface is preferably coarser / m or less. Hereinafter, the present invention will be more specifically described based on the examples, but the present invention is not limited to the following examples. (Example 1)

On the upper and lower surfaces of the first layer of the niobium carbide particle layer, a particle layer of Al2〇3-SiO2 (Al2〇3 8 7 wt%, SiO 2 22 wt%) as the second layer is placed, and formed and fired. The thickness of the first layer is 4πηπ, the thickness of the second layer is 1. 5 mm, and the center line average roughness Ra of the surface is 4·8 // m of 30 〇 _ X 300 mm of plate-shaped ceramic. On the surface of the obtained plate-like ceramic, an Al2〇3 molten film layer having a thickness of UOvm is formed, and a thickness of 200 wt% m γ2 03 - is formed on the surface thereof.

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The Zr02 is sprayed with a film layer to form a plate-shaped heat treatment jig. A 150 mm X 150 mm sample plate was produced from the obtained plate-shaped heat treatment jig, and the sample plate was subjected to a heat cycle test. The test conditions were as follows: a step of cooling after maintaining at 1 3 50 ° C for 2 hours. The results are shown in Table 1 (Examples 2 to 5). The thickness of the second layer and the center line average roughness Ra of the surface were as shown in Examples 2 to 4 of Table 1, except that A sample plate was produced in the same manner as in Example 1. For the sample plates, the thermal cycle entangled test was carried out in the same manner as in the first embodiment. This special result is not as shown in Table 1. (Comparative Example 1) An A 12 03 refining film layer having a thickness of 150 k m was directly formed on the surface of a 300 mm X 30 0 mm X 4 mm carbonized tantalum ceramic substrate, and a thickness of 200 // was formed on the surface thereof. 8 wt ° / m. Y2 03 -Zr02 is sprayed on the film layer to form a plate-shaped heat treatment jig. 15〇111111 xl50mm was produced from the obtained plate-shaped heat treatment jig

The sample plate was subjected to a heat cycle test in the same manner as in Example 1 for this sample plate. The results are shown in Table 1. (Comparative Examples 2 and 3) The same procedure as in Example i was carried out except that the thickness of the second layer and the center line average roughness Ra of the surface were as shown in Comparative Examples 2 and 3 of Table i.

__丨丨-j 1271394

V. INSTRUCTION OF THE INVENTION (11) In addition to the above, the sample sheets were prepared in accordance with the method of the present invention. The same procedure as in Example 1 was carried out to perform a thermal cycle on the test plates for the test. These results are shown in Table 1. Table 1 il2〇3 · Si02M ceramic layer (2nd layer) thickness (ym) 1 1 2 2 3 3 4 3 5 7 1 2 ^3 0.7 / Γ* S® probability Ra ( Ττα) 4.8 4.0 4.1 20 3 〇----------------- 2.1 Thickness of the sprayed coating layer (3rd layer) (//in) Al2〇3 150 1 cn 4.5 8wt% Y203-Zr02 200 ?ηή Thermal cycle test result&quot;Main 1 ή匕Art ·1 未1 peeling occurred in 2^^ When the film layer was peeled off at 4 〇 times 1 The film was peeled off at the first 1 The boundary between the layer and the second layer « W / Ding ' and U1 111 from 丄, 111 m under the armpit, and the average thickness of the center line of the surface of the second layer is in the ten main conditions of 3 or more and 20 or less (Example (5) Even if the heat cycle test was repeated, the month was not peeled off, and the heat resistance and durability were confirmed. On the other hand, in the case where the A丨2〇3 spray coating layer is directly formed on the surface of the carbonized tantalum ceramic without forming the second layer (Comparative Example), and the center line average roughness Ra of the surface of the ^ In the case of less than 3" (compare 曰2), the thermal cycle samples were peeled off at 2 times and 4 times, respectively. &amp; i &amp; Less than 1mm (Comparative Example 3)

Page 14 1271394

Stripping. According to the above-mentioned 4 and 'the invention according to the present invention, the heat treatment jig for the heat treatment of the ceramics of the 纣Baozheng Luozi parts is excellent in heat resistance and latent denaturation A, . . . ^ ^ ^ + Ai 1 1 love In the jig for heat treatment using the enamel ceramic as the substrate, it is possible to prevent peeling of the spray film on the surface and the ceramic layer in the middle, and it is expected to improve durability. The ceramic transformer can contribute to the heat treatment, and the heat treatment jig is improved in the heat treatment and baking step of the ceramic for electronic parts such as ceramic capacitors. Further, according to the production method of the present invention, the heat treatment jig for the above-mentioned ceramics for parts can be efficiently produced. Component No. Description 1, 11 Carbonized Tantalum Ceramic Substrate (Substrate) 2 Ceramic 3 Sprayed Coating Layer 4 Mixed in Layer (Polycan Mixed Layer) 12 ^ 13 Sprayed Film

1271394 Brief Description of the Drawings Fig. 1 is a schematic cross-sectional view showing the configuration of a heat treatment jig for ceramics for electronic parts of the present invention. Fig. 2 is a schematic cross-sectional view showing a configuration of a conventional glazing film carbon carbide substrate.

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Claims (1)

2006 1 6 AU8 Replacement This heat treatment is characterized by 'Al2〇3, Al2 03 -Si02 quality 'A1 〇~1·: upper and lower 'with at least one species selected from the group of Taos ^102-Mg0 A part of the surface of the mass, Μδ0-Α1Α-ΖΙ·02, or the whole of the 24th, and the second layer of the above-mentioned second layer of stone, Zr〇2, Υ2〇3 to 'insert. a molten film layer containing a single layer or a plurality of layers selected from the group consisting of Α3, 多3, and a polyaluminum column, wherein the second layer is PCT; #^ the first layer and the second layer The boundary of the Ministry of the Eighth is the upper 7 levels, and the layer of knives in the above two layers of pottery mash; in the center and line of the surface of the second layer below The average roughness Ra is 3 // in. 20 core clips 2 such as Π special: the heat treatment for electronic parts used in ceramics 3· - ^ t ^ ; ΓΛ Λ #Λ50 &quot;&quot;500&quot;τ ° In the carbon-cutted particle layer, the particle layer of the method of manufacturing, which is 4: ΐ^; Ι\^ΜΓΑΐ2°3^ and above 20❹, is formed]::: Degree = 3 hearts of the plate-shaped pottery Part or all of the surface, after H, Α12〇3, mullite, zr〇, γ〇, 熔 έ have a spray coating layer selected from the layer. 2 2 at least one single or plural 4. The method for manufacturing an electronic love jig according to item 3 of the patent application scope, wherein the heat treatment of the nucleus is carried out by using a sinusoidal particle layer and a selected from C:\ total file\91\91 109669\9110%69 (replacement)-2.ptc ΛΜ 91109Rfig 1271394 曰6. Patent application scope - at least one of ai2〇3, ai2〇3~Si〇2, Ai2〇3—Si〇2 ^ ^ The boundary of the particle layer of the composition J 2 ~ zr〇 2 makes the particles near the boundary coarse and makes it 〃. For the formation, by AW, Al2〇3-Sl〇2f, Al2〇3 : a f-A Zr 〇 2 5 of the constituent particles of at least one of the nucleus of the chemistry. The ceramic layer is in the ceramic layer according to the third or fourth aspect of the patent application. The piece is formed by the heat treatment of the ceramic heat treatment body. The 〃, ^... are in the film layer, and are separated by