TWI269418B - Chip scale packaging with improved heat dissipation capability - Google Patents

Chip scale packaging with improved heat dissipation capability Download PDF

Info

Publication number
TWI269418B
TWI269418B TW094103231A TW94103231A TWI269418B TW I269418 B TWI269418 B TW I269418B TW 094103231 A TW094103231 A TW 094103231A TW 94103231 A TW94103231 A TW 94103231A TW I269418 B TWI269418 B TW I269418B
Authority
TW
Taiwan
Prior art keywords
wafer
package substrate
heat
package
solder balls
Prior art date
Application number
TW094103231A
Other languages
English (en)
Other versions
TW200629501A (en
Inventor
I-Cheng Keng
Original Assignee
Nanya Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanya Technology Corp filed Critical Nanya Technology Corp
Priority to TW094103231A priority Critical patent/TWI269418B/zh
Priority to US10/908,633 priority patent/US7030487B1/en
Publication of TW200629501A publication Critical patent/TW200629501A/zh
Application granted granted Critical
Publication of TWI269418B publication Critical patent/TWI269418B/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
    • H01L23/3128—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367—Cooling facilitated by shape of device
    • H01L23/3677—Wire-like or pin-like cooling fins or heat sinks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0201—Thermal arrangements, e.g. for cooling, heating or preventing overheating
    • H05K1/0203—Cooling of mounted components
    • H05K1/0207—Cooling of mounted components using internal conductor planes parallel to the surface for thermal conduction, e.g. power planes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321—Disposition
    • H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144—Gold (Au) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/4824—Connecting between the body and an opposite side of the item with respect to the body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73201—Location after the connecting process on the same surface
    • H01L2224/73215—Layer and wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/12—Mountings, e.g. non-detachable insulating substrates
    • H01L23/13—Mountings, e.g. non-detachable insulating substrates characterised by the shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
    • H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
    • H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01078—Platinum [Pt]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01079—Gold [Au]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/153—Connection portion
    • H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0201—Thermal arrangements, e.g. for cooling, heating or preventing overheating
    • H05K1/0203—Cooling of mounted components
    • H05K1/0204—Cooling of mounted components using means for thermal conduction connection in the thickness direction of the substrate
    • H05K1/0206—Cooling of mounted components using means for thermal conduction connection in the thickness direction of the substrate by printed thermal vias
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/0929—Conductive planes
    • H05K2201/09309—Core having two or more power planes; Capacitive laminate of two power planes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/09—Shape and layout
    • H05K2201/09209—Shape and layout details of conductors
    • H05K2201/095—Conductive through-holes or vias
    • H05K2201/09536—Buried plated through-holes, i.e. plated through-holes formed in a core before lamination
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621—Components characterised by their electrical contacts
    • H05K2201/10734—Ball grid array [BGA]; Bump grid array

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Description

1269418 九、發明說明： 【發明所屬之技術領域】 本發明係關於半導體晶片封裝技術，特別是關於具有高散熱效 能的晶片尺寸封裝(chip scale packaging，CSP)技術。 【先前技術】 $ 動態隨機存取記憶體(Dynamic Random Access Memory， DRAM)不只是應用在電腦設備的記憶模組上，許多電子產品也需 •要使用到DRAM記憶元件，針對各別商品的不同特性，對DRAM v的封裝型式也有不同的要求。 ic製程最後都須使用封裝來達成線路保護及媒介Ic與電路板 (PCB) δΜ虎傳遞功能。综觀DRAM產品，其中有許多高階封裝型 式如球型柵狀陣列(BGA)、晶片尺寸封裝(csp)等適合高i/q接腳 _數或封後體積小的技術’而目前使用最多的的封裝型式還是以打 線接合的TSOP(Thin Small Outline Package)為主，尤其是用在資訊 產品類’如印表機、PC等。究其原因，一方面這類型產品較無體 積上限制，其所適用的PCB線距較寬(120-150 L/S) ;二來有成本 考量，使用傳統TSOP封裝是最適合的選擇。 細，隨著消費性電子產品市場走向高速化、輕薄短小化，這 類型產品不僅需要封後體積小的技術，而且訊號傳遞距離也要 1269418 短’因此就須使用高階封裝技術來滿足產品特性的需求。 明麥閱弟1圖’其緣示的e習 千音圖。如^㈣ 片尺寸封裝構造的剖面 片、二轉_ ^ I知技藝的⑼尺寸封裝構造包括有晶 線19 ^置在縣基板14的第二表面17上的連胁遍成* 性連結。連接墊18、金線19、妞勃加的連接墊20構成电 丨22埴4 / 連轉2G細口 16最後再以樹脂 26 ^ 14 32 I " ° _缺點在於封裝基板14為單 上有金屬線路存I:· 面15上則無。如此一來/ #者_裝基板14的第一表 材質的封壯 Λθθ片在刼作時所產生的熱需通過塑膠 金：=4之後’才能經由封裝基板14第二表面-上的 傳導她傳導致電路板上。然而，職基板14的執 .她低(約0.37 W/mt)，因壯^、 不易散熱，而影響到晶片的操作效能^知舶片尺寸封域造的 【發明内容】 因此’本發明之主要目的即在於提供-種改良之晶片尺寸缝 1269418 構造，具有較佳的散熱效能。 為達前述目的’本發明提供-種晶片尺寸封裝結構，包括有— 封裝基板’其具有-第-表面與一第二表面’複數個金屬化的導 通孔貫穿連通該第-表面與該第二麵，以及錢聽進行打線 的中央開Π ; -晶片’籍由-黏著層固定在該封裝基板的該第— 表面上’其中該晶片具有複數個第一連接墊，經由該中央開口以 金屬線與形成在該封裝基板的該第工表面上的各相對應的第二連 接墊構成電氣連結’複數個散熱錫球，植在該封裝基板的該第二 .表面上’並與該金屬化的導通孔相連結，籍此將該晶片在操作時 -產生的熱傳遞至一電路板上；以及複數個功能錫球，植在該封裝 基板的該第二表®上’並介於該巾綱口以及該複數個散熱錫球 之間，用來溝通傳遞晶片與該電路板之間的訊號。 為了使貝審查委員能更近-步了解本發明之特徵及技術内 _容，請參閱以下有關本發明之詳細說明與附圖。然而所附圖式僅 供芩考與辅助說明用，並非用來對本發明加以恨制者 【實施方式】 本發明主要係針對使用單層板形式的窗式球型柵狀陣列 (window BGA)的晶片尺寸封裝(CSP)技術所做之改良，使其具有較 佳的散熱效果，而在操作時能夠提高晶片的運作效能。 1269418 ’ a請參閱第2圖，其繪示的是本發明晶片尺寸封裝結構的較佳實 知例的抽tf思圖。如第2圖所示’本發明晶片尺寸封裝構造包 括有晶片1〇/其藉由黏著層12固定在封裝基板m的第-表面 II5上黏著層12可以為聚亞醯胺㈣yimi岭環氧樹脂(印㈣ 或者含金屬(或不含金屬)成分的散熱膠等等，但不限於此。封裝基 板114具有^口 m，使得晶片1〇下方的連接塾π可經由金線 D與设置在封裝基板η4的第二表面m上的連接塾·構成電 籲性連結。連接塾18、金線D、連接墊120與開口 116最後再以樹 脂22填滿保護。 、 在封衣基板114的第二表面1Π上另植有複數個錫球126，以 方便與私路板3〇〇電連接，構成晶片1〇與電路板嫩 傳遞路徑。在封裝基板114的第二表面117上複數個錫球视^ 外圍另植有複數個散熱錫球128。而在晶片10表面以及周圍另 以樹脂32密封保護。 根據本發明的較佳實施例，封裝基板114包括有複數個金屬化 的導通孔118a與118b，其中每一個導通孔皆貫穿封裝基板114的 第一表面115與第二表面117，且導通孔,118&與前述的散熱錫球 128相連接，而導通孔U8b可與錫球126相連接。且，導通孔ii8a 與118b之間為互相獨立，亦即各導通孔之間沒有電性連結。導通 孔118a與U8b的金屬化可以利用化學沈積銅或電鍍銅方法進行 1269418 由於銅的熱傳導係數約為385W/mt，而錫球的熱傳導係數约 為5〇.9W/mC ’皆比習知的塑膠材質的封褒基板(約or輪。c) 高出許多，因此藉由上義域，本發㈣片尺寸崎構造可藉 由如第2圖中的箭頭所示的散熱路徑，透過導通孔-錫球-電路板二 途徑進行晶片在操作時的散熱，以提高晶片的運作效能^外，、 根據本發明之較佳實施例’散熱錫球m ,亦可以連接至電路板· 的地線金屬層训，可明加賴_，使散熱效錢佳。散雜 球 128 亦可以使用接地錫球 ^ ^ ^ ^ ^ … 請參閱第3圖，其綠示的是本發明晶片尺寸封裝結構的另一較 佳實施例的剖面示意圖。如第3圖所示，本發明晶版^ 造包括有晶片ίο’其藉由黏著層12固定在封裝基板114的第一表 面115上。同樣的，封裝基板114具有一開口 ιΐ6，使^ 下方的連紐18可經由金線D與設置在聽基板114的第二表 面117上的連接塾120構成電性連結。連接塾18、金線！9、連接 塾120與開口 116最後再以樹脂22填滿保護。 在封裝基板114的第二表面117上另植有複數個錫球126，以 方便與電路板300電連接’構成晶片1〇與電路板300之間的訊號 傳遞功能路徑。在封裝基板114的第二表面117上複數個錫球126 的外圍’另植有複數個散熱錫球128。而在晶片1G表面以及周圍 另以樹脂32密封保護。 1269418 根據本發明的較佳實施例，封裝基板114的第一表面115上設 有一散熱金屬層200，例如銅層。封裝基板丨μ包括有複數個金屬 化的導通孔118,其中每一個導通孔皆貫穿封裝基板114的第一表 面115與第二表面117，且導通孔118與散熱金屬層2〇〇、前述的 128 ^ ^ ° ^ 球I28亦可以連接至電路板3〇0的地線金屬I 面積，使散熱效率更佳。 以上所述僅為本發明之較佳實施例，凡依本發明申請專利範 圍所做之均等變化與修飾，皆應屬本發明之涵蓋贿。 【圖式簡單說明】 第1圖繪示的是習知技藝晶片尺寸封裝構造的剖面示音 =圖繪示的是本發侧尺寸封_的較佳實施^剖面
第3圖繪示的是本發明晶片 剖面示意圖。 尺寸封裝結構㈣—軸實施例的 1269418 【主要元件符號說明】 10 晶片 12 黏著層 14 封裝基板 15 第一表面 16 開口 17 第二表面 18 連接墊 19 金線 20 連接墊 22 樹脂 26 錫球 32 樹脂 114 封裝基板 115 第一表面 ’116 開口 117 第二表面 、118 導通孔 118a 導通孔 • 118b 導通孔 120 連接墊 126 錫球 128 錫球 200 金屬層 300 電路板 310 地線金屬層 13

Claims (1)

1269418 4·如申請專利範圍第 口以樹脂填滿保護。 項所述的晶片尺寸封裝結構，其中該中央開 5. 曰曰 片的 6· 一種晶片尺寸封裝結構，包括有··
一封裝基板，其具有一第一表面盥一第— τ孔貫穿連通該第一表面與咏表面:二 打線的中央開口； α 一晶片’藉由-黏著層固定在_裝基板的該第一表面上其 该晶片具有複數個第-連接墊，經由該中央開口以金屬線盘形 綠該封裝基板_第二表面上的各姆應的第二連接塾構成電 氣連結；
-散熱金屬層，設於朗裝基㈣該第—表面上，介於該黏著 層與該封裝基板之間，並與該複數個金屬化料通孔連接，用以 收集該晶片在操作時產生的熱； 複數個散熱錫球，植在該封裝基板的該第二表面上，並與該金 屬化的$通孔相連結’其巾該複數個散熱錫球係直接接觸一電路 板上的地線金顧，藉此在猶時產生的熱傳遞至該電 路板上；以及 複數個功能錫球，植在該封裝基板的該第二表面上，並介於該 中央開π以及該複數個散熱鍚球之間，用來溝通傳遞晶片與該電 15 .1269418 路板之間的訊號。 7·如申請專利範圍第6項所述的晶片尺寸封^ 的導通孔仙化學沈積贼電酸I方料屬化
8·如申請專利範圍第 為金線。 6項所述的；尺寸魄結構，射該金屬線 6項所述的晶片尺寸封| 9·如申請專利範園第 口以樹脂填滿保護。 結構，其中該中央開 結構，其中該黏著
十一、圖式：
TW094103231A 2005-02-02 2005-02-02 Chip scale packaging with improved heat dissipation capability TWI269418B (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW094103231A TWI269418B (en) 2005-02-02 2005-02-02 Chip scale packaging with improved heat dissipation capability
US10/908,633 US7030487B1 (en) 2005-02-02 2005-05-20 Chip scale packaging with improved heat dissipation capability

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW094103231A TWI269418B (en) 2005-02-02 2005-02-02 Chip scale packaging with improved heat dissipation capability

Publications (2)

Publication Number Publication Date
TW200629501A TW200629501A (en) 2006-08-16
TWI269418B true TWI269418B (en) 2006-12-21

Family

ID=36147392

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094103231A TWI269418B (en) 2005-02-02 2005-02-02 Chip scale packaging with improved heat dissipation capability

Country Status (2)

Country Link
US (1) US7030487B1 (zh)
TW (1) TWI269418B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI578418B (zh) * 2013-01-03 2017-04-11 德山金屬有限公司 金屬芯錫球及利用它的半導體裝置的散熱連接結構

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100871386B1 (ko) 2007-07-31 2008-12-02 주식회사 하이닉스반도체 반도체 패키지 및 이의 제조 방법
US7787252B2 (en) * 2008-12-04 2010-08-31 Lsi Corporation Preferentially cooled electronic device
TWI505422B (zh) * 2012-12-07 2015-10-21 Powertech Technology Inc 分散晶片角隅應力之窗口型球格陣列封裝構造
US9917068B2 (en) 2014-03-14 2018-03-13 Taiwan Semiconductor Manufacturing Company Package substrates, packaged semiconductor devices, and methods of packaging semiconductor devices
US10541156B1 (en) 2018-10-31 2020-01-21 International Business Machines Corporation Multi integrated circuit chip carrier package
KR20210131548A (ko) * 2020-04-24 2021-11-03 삼성전자주식회사 반도체 패키지

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6122171A (en) * 1999-07-30 2000-09-19 Micron Technology, Inc. Heat sink chip package and method of making
US6479321B2 (en) * 2001-03-23 2002-11-12 Industrial Technology Research Institute One-step semiconductor stack packaging method
US6569712B2 (en) * 2001-10-19 2003-05-27 Via Technologies, Inc. Structure of a ball-grid array package substrate and processes for producing thereof
TWI242274B (en) * 2003-02-27 2005-10-21 Siliconware Precision Industries Co Ltd Ball grid array semiconductor package and method for fabricating the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI578418B (zh) * 2013-01-03 2017-04-11 德山金屬有限公司 金屬芯錫球及利用它的半導體裝置的散熱連接結構

Also Published As

Publication number Publication date
TW200629501A (en) 2006-08-16
US7030487B1 (en) 2006-04-18

Similar Documents

Publication Publication Date Title
TWI644407B (zh) 封裝結構、電子設備及封裝方法
TW415056B (en) Multi-chip packaging structure
TWI374536B (en) Apparatus for packaging semiconductor devices, packaged semiconductor components, methods of manufacturing apparatus for packaging semiconductor devices, and methods of manufacturing semiconductor components
US7902648B2 (en) Interposer configured to reduce the profiles of semiconductor device assemblies, packages including the same, and methods
US7026719B2 (en) Semiconductor package with a heat spreader
TWI742517B (zh) 半導體封裝和印刷電路板
US11837552B2 (en) Semiconductor package with layer structures, antenna layer and electronic component
US7554185B2 (en) Flip chip and wire bond semiconductor package
US20060006517A1 (en) Multi-chip package having heat dissipating path
US9674940B2 (en) Electronic device and semiconductor package with thermally conductive via
TWI269418B (en) Chip scale packaging with improved heat dissipation capability
US8963299B2 (en) Semiconductor package and fabrication method thereof
TWI284402B (en) Build-up package and method of an optoelectronic chip
JP2008166440A (ja) 半導体装置
JP3304957B2 (ja) 多重チップ半導体モジュールとその製造方法
TW200908268A (en) Packaging substrate structure with capacitor embedded therein and method for fabricating the same
TWI391084B (zh) 具有散熱件之電路板結構
TW201924010A (zh) 半導體封裝
US9530714B2 (en) Low-profile chip package with modified heat spreader
KR101047139B1 (ko) 단층 보드온칩 패키지 기판 및 그 제조방법
KR100230189B1 (ko) 볼 그리드 어레이 반도체 패키지
CN211208440U (zh) 一种芯片和天线集成的三维封装结构
TW200841452A (en) Multi-chip stack structure
JP3024596B2 (ja) フィルムキャリアテープを用いたｂｇａ型半導体装置
JP7375108B2 (ja) スタック型ｓｓｄ半導体デバイス