TWI263595B - Composite sheet and apparatus for manufacturing the same - Google Patents

Composite sheet and apparatus for manufacturing the same Download PDF

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Publication number
TWI263595B
TWI263595B TW090110314A TW90110314A TWI263595B TW I263595 B TWI263595 B TW I263595B TW 090110314 A TW090110314 A TW 090110314A TW 90110314 A TW90110314 A TW 90110314A TW I263595 B TWI263595 B TW I263595B
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TW
Taiwan
Prior art keywords
heat
layer
resistant
substrate
composite
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TW090110314A
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Chinese (zh)
Inventor
Masakazu Nakayama
Masaaki Ikeda
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Chuki Chemical Internat Co Ltd
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Publication of TWI263595B publication Critical patent/TWI263595B/en

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/10Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/80001Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected by connecting a bonding area directly to another bonding area, i.e. connectorless bonding, e.g. bumpless bonding
    • H01L2224/808Bonding techniques
    • H01L2224/8085Bonding techniques using a polymer adhesive, e.g. an adhesive based on silicone, epoxy, polyimide, polyester
    • H01L2224/80855Hardening the adhesive by curing, i.e. thermosetting
    • H01L2224/80862Heat curing

Abstract

This invention relates to a composite sheet and apparatus for manufacturing the same. The composite sheet is employed in a press joint process of a process for manufacturing an electronic machine. The composite sheet 14 comprises: a sheet 11 formed of a fluorine resin and having a heat-resistant property, a silica micro-particle layer 12 formed on one side of the sheet 11, a silicone rubber layer 13 formed on the silica micro-particle layer 12 and having a heat-resistant property.

Description

12635951263595

經濟部智慧財產局員工消費合作社印製Ministry of Economic Affairs, Intellectual Property Bureau, employee consumption cooperative, printing

_叙明係有關於-種使用於電子儀器,特別是平面顯 不(FPD),更绿而士 > 乂么各 评 s之’係有關於一種彩色TFT液晶組件 =彩色STN液晶組件其製造程序之—的壓著程序所使用之 複合層材及其製造裝置。 以往%子儀裔之製造程序中,進行有如第6圖所示之 壓著程序。 圖中之元件^虎1所示者係於端部形成端子2之玻璃基 :反口亥玻璃基板!之端部上,以熱壓著層壓彈性基板3之端 此處忒彈性基板3係具有形成電路4之膜5,及形成於 X電路4 σ卩分上之各向異性導電膜6。前述玻璃基板丨與彈 性基板3之熱壓著預定部上,配置有—於下端部具有緩衝材 料/(切削帶如山叩〇7之加熱器8。又,元件標號9所示 者係抗蝕膜(保護膜)。 而作為别述緩衝材料者,以往係使用矽氧橡膠層材 (刖者),或具有脫膜性之氟樹脂層材(後者)。然而, 前者之緩衝材料雖可使用熱壓著數次,其脫膜性卻不甚 佳。反之,後者之緩衝材料雖脫膜性佳,其緩衝性卻明顯 低劣,造成用一次即扔之情形。 又,為解決如此之問題點,以往所知緩衝材料係使用 將氟樹脂(舉例言之如PTFE)單面化學蝕刻,並以未硫化 矽氧橡膠層材層壓者。但,由於前述pTFE之電蝕刻效果 少,而改為進行化學蝕刻。換言之,即以將金屬鈉溶解為 四氫呋喃之蝕刻液處理,並使表面之氟調換為羥基等,使 浸潤性佳再使用。 297公釐) ------------f------- —訂---------線-- (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準(CNS)A4規格(210 -4- 經濟部智慧財產局員工消費合作社印製 1263595 A7 --——-_______ 五、發明說明(2 ) 但,已活化之氟樹脂表面,經過一段時間即鈍化並減 处放果而有生產性上之問題。且,由於前述蝕刻處 理係使用金屬納,則因意外與水接觸而起火(爆炸)之危 險性间,且必須十分留意其處理或保管場所。更且,由於 使:大量之有機溶劑,則作業者因吸入而損害健康之危險 ο此外將氟树脂單面化學餘刻,並以未硫化石夕氧橡 聲層材層壓之複合品,其作業之連續性(長條製造)、薄 物之製造上甚為困難。 6本發明之目的即在於提供一種脫膜性及緩衝性佳,優 於:王14 M濟性、及生產性,可製成長條並可製造薄物 之複口層材,違複合層材之構造包含有:片狀耐熱基材, 係由氟樹脂或含導電性材料之敦樹脂所構成者;二氧化石夕 微粒層,係於該耐熱基材之一面形成者;及,耐熱橡膠層, 係形成於該二氧化矽微粒層上者。 本發明之另一目的即在於提供一種複合層材,該複合 有片狀耐熱基材,係於耐熱纖維織布上摻合氟 樹脂或含導電性材料之氣樹脂而成者;二氧化石夕微粒層’ 係於該耐熱基材之一面形成者;及,耐熱橡膠層,係形成 於該二氧化石夕微粒層上者;藉此構造而可得到與上述相同 之效果。 本發明之又另一目的則在於提供一種複合層材之製造 t置:該裝置係包含有:一送出用輥,係用以送出由就樹 月曰或a導電性材料之氟樹脂形成之片狀耐熱基材者;一塗 布輥,係用以於前述耐熱基材上塗布一定量之塗膠劑者; 本紙張尺度適用中國國藏?---~~ __ --------tT---------^· (請先閱讀背面之注意事項再填寫本頁) -5- 1263595_ 〗 〖Synthesis is used in electronic equipment, especially flat display (FPD), more green and sth. The composite layer used in the crimping procedure of the program and its manufacturing apparatus. In the past, in the manufacturing process of the % son-in-law, a crimping procedure as shown in Fig. 6 was performed. The component shown in the figure is the glass base of the terminal 2 formed at the end: the reverse glass substrate! At the end portion, the end of the elastic substrate 3 is laminated by heat pressing. Here, the elastic substrate 3 has a film 5 on which the circuit 4 is formed, and an anisotropic conductive film 6 formed on the X circuit 4 σ. The glass substrate 丨 and the heat-prescribing predetermined portion of the elastic substrate 3 are provided with a cushioning material at the lower end portion (a heater 8 having a cutting tape such as a mountain 7 and a resist film shown by a component number 9) (Protective film). As a buffer material, a silicone rubber layer (or the latter) or a fluororesin layer (the latter) having a release property has been used. However, the former cushioning material can use heat. When it is pressed several times, its release property is not very good. On the contrary, although the cushioning material of the latter has good release property, its cushioning property is obviously inferior, causing the situation to be thrown once. In order to solve such a problem, in the past, The buffer material is known to be one-sided chemically etched with a fluororesin (for example, PTFE) and laminated with an unvulcanized oxy-rubber rubber layer. However, since the electro-etching effect of the aforementioned pTFE is small, the chemical is changed to Etching. In other words, it is treated with an etching solution that dissolves sodium metal into tetrahydrofuran, and the surface fluorine is exchanged for a hydroxyl group, etc., so that the wettability is good. 297 mm) ------------ F--------book---------line-- (please read first Note on this page. This paper size applies to China National Standard (CNS) A4 specification (210 -4- Ministry of Economic Affairs Intellectual Property Office Staff Consumer Cooperative Printed 1263595 A7 ----_______ V. Invention Description (2 However, the surface of the activated fluororesin has a problem of productivity after passivation and reduction of the fruit for a period of time. Moreover, since the aforementioned etching treatment uses metal nanoparticles, it is ignited by an accidental contact with water (explosion). In the case of danger, it is necessary to pay great attention to the place where it is handled or stored. Moreover, due to the large amount of organic solvents, the operator may be harmed by inhalation due to inhalation. In addition, the fluororesin is chemically engraved on one side and The composite of the vulcanized sulphur oxide layer is difficult to handle the continuity of the operation (long strip manufacturing) and the manufacture of the thin material. 6 The object of the present invention is to provide a release property and a cushioning property. Superior: King 14 M is economical and productive. It can be made into long strips and can be used to make laminated sheets of thin materials. The structure of the composite laminates is composed of: sheet-like heat-resistant substrate, which is made of fluororesin or contains conductivity. material The composition of the resin; the silica dioxide layer is formed on one surface of the heat-resistant substrate; and the heat-resistant rubber layer is formed on the layer of the cerium oxide particles. Another object of the present invention is The invention provides a composite layer material which has a sheet-like heat-resistant substrate which is formed by blending a fluororesin or a gas-containing resin containing a conductive material on a heat-resistant fiber woven fabric; the cerium oxide layer is attached to the heat-resistant layer One surface of the substrate is formed; and a heat resistant rubber layer is formed on the layer of the SiO2 layer; the same effect as described above can be obtained by the structure. Still another object of the present invention is to provide a composite Manufacturing of the layer material: the apparatus comprises: a feeding roller for feeding a sheet-shaped heat-resistant substrate formed of a fluororesin of a tree or a conductive material; a coating roller For coating a certain amount of glue on the heat-resistant substrate; the paper scale is applicable to China's national collection? ---~~ __ --------tT---------^· (Please read the notes on the back and fill out this page) -5- 1263595

五、發明說明( 經濟部智慧財產局員工消費合作社印製 -第1域,係用以使塗布有塗膠劑之前述耐熱基材乾燥 者,一第2鍋爐,係用以燒成業經第1鍋爐之前述耐熱基材, 亚將之形成複合層材者;及,一繞捲用輥,係用以捲繞燒 成後之複合層材者;藉此構造則可製得脫膜性及緩衝性 佳,優於安全性、經濟性、及生產性,可製成長條並可製 造薄物之複合層材。 本申凊案第1發明之複合層材,係使用 程序之—的壓著程序中,該複合層材之特徵在 片狀耐熱基材,係於耐熱纖維織布上摻合氟樹脂或含導電 性材料之氟樹脂而成者;二氧化矽微粒層,係於該耐熱基 材之一面形成者;及,耐熱橡膠層,係形成於該二氧化矽 微粒層上者。 本申请案第2發明之複合層材,係使用於電子儀器製造 程序之一的壓著程序中,該複合層材之特徵在於具有··片 狀耐熱基材,係於耐熱纖維織布上摻合氟樹脂或含導電性 材料之氟樹脂而成者;二氧化矽微粒層,係於該耐熱基材 之一面形成者;及,耐熱橡膠層,係形成於該二氧化矽微 粒層上者。 本申凊案第3發明之複合層材之製造裝置,係具有:一 送出用輥,係用以送出由氟樹脂或含導電性材料之氟樹脂 形成之片狀耐熱基材者;一塗布輥,係用以於前述耐熱基 材上塗布一定量之塗膠劑者;一第1鍋爐,係用以使塗布有 塗膠劑之前述耐熱基材乾燥者;一第2鍋爐,係用以燒成業 經第1鍋爐之前述耐熱基材,並將之形成複合層材者;及, Μ氏張尺度適財國國家標準(CNS)A4規格⑽χ烈 --------訂--------- C請先閱讀背面之注意事項再填寫本頁} -6- 1263595V. Description of the invention (Printed by the Ministry of Economic Affairs, Intellectual Property Office, Employees' Cooperatives, the first domain, which is used to dry the above-mentioned heat-resistant substrate coated with a rubberizing agent, a second boiler, which is used for the first stage of firing. The heat-resistant substrate of the boiler, the composite layer formed by the sub-combiner; and a roll for winding, which is used for winding the composite layer after firing; thereby, the structure can be used to obtain the release property and the buffer It is superior in safety, economy, and productivity, and can be made into a long strip and can be made into a composite material of a thin material. The composite sheet of the first invention of the present application is in a pressing procedure using a program. The composite layer is characterized in that the sheet-like heat-resistant substrate is formed by blending a fluororesin or a fluororesin containing a conductive material on a heat-resistant fiber woven fabric; the ruthenium dioxide microparticle layer is attached to the heat-resistant substrate And a heat-resistant rubber layer formed on the cerium oxide microparticle layer. The composite material according to the second invention of the present application is used in a crimping program of one of electronic device manufacturing programs, and the composite is used. The layer material is characterized by having a sheet-like heat-resistant substrate. a fluororesin or a fluororesin containing a conductive material is blended on the heat-resistant fiber woven fabric; the cerium oxide microparticle layer is formed on one side of the heat-resistant substrate; and the heat-resistant rubber layer is formed on the second In the apparatus for producing a composite layer according to the third aspect of the invention, there is provided a feeding roller for feeding a sheet-like heat-resistant resin formed of a fluororesin or a fluororesin containing a conductive material. a substrate roller; a coating roller for coating a certain amount of the glue on the heat-resistant substrate; a first boiler for drying the heat-resistant substrate coated with the glue; 2Boiler, which is used to fire the above-mentioned heat-resistant substrate of the first boiler and form a composite layer; and, the Zhang's Zhang scale is the national standard (CNS) A4 specification (10) χ----- ---Order--------- C Please read the notes on the back and fill out this page} -6- 1263595

經濟部智慧財產局員工消費合作社印製Ministry of Economic Affairs, Intellectual Property Bureau, employee consumption cooperative, printing

一繞捲用輥,係用以捲繞燒成後之複合層材者。 以下,針對本發明進行更詳細之說明。 本發明中,作為前述氟樹脂者,可舉四氟乙烯樹脂 (tetrafluoroethylene resin,PTFE )、四氟乙烯全氟烷基乙 稀峻共聚樹脂(tetraflUOroethylene-perflu〇r〇alkyl vinyl ether copolymer resin,PFA )、四氟乙烯_六氟丙烯共聚樹脂 (tetrafluoroethylene-propylene hexafluoride copolymer resin,FEP)等為例,而以pTFE特別理想。 本發明中,作為前述導電性材料者,可舉白色導電性 針狀單晶體為例,舉例言之如導電鬚晶(商品名:單特魯 《音譯卜一爪》WK 一 2〇〇B、大塚化學製造)、碳黑、 石墨、碳纖維,或金、銀、銅、紹、飽等金屬粉末。 本發明中,耐熱纖維織布係分為無機纖維織布與有機 纖維織布。此處,作為無機纖維織布者,可舉由玻璃纖維、 奴纖維、氧化鋁等陶瓷纖維,或不銹鋼等金屬纖維中任一 所形成之織布為例。而作為前述有機纖維者,則可舉由聚 酿胺系纖維、芳族聚醯胺系纖維、聚_系纖維、聚乙 系纖維中任一所形成之織布為例。 本發明中,作為前述熱導性微粒之材料者,可舉氧化 鋁、二氧化鈦、氧化鎂、二氧化矽、碳黑、石墨,或:化 銀、銅、鋁、鈀等金屬粉末為例。 孟、 以下為圖示之簡單說明。 第1圖係有關於本發明實施例〗之複合層材截面圖。 —1^ ^ --------訂---------線· (請先閱讀背面之注意事項再填寫本頁) 第2圖係有關於本發明實施例2之複合層材截面圖。A winding roll is used to wind the composite layer after firing. Hereinafter, the present invention will be described in more detail. In the present invention, as the fluororesin, a tetrafluoroethylene resin (PTFE) or a tetrafluoroethylene-perfluoropropyl perfluoroalkyl copolymer copolymer (PFA) may be mentioned. A tetrafluoroethylene-propylene hexafluoride copolymer resin (FEP) is exemplified, and pTFE is particularly preferable. In the present invention, as the conductive material, a white conductive needle-shaped single crystal can be exemplified, for example, a conductive whisker (trade name: Single Trux, Transliteration, One Claw, WK-2, B, Daxie) Chemical manufacturing), carbon black, graphite, carbon fiber, or metal powder such as gold, silver, copper, Shao, and full. In the present invention, the heat-resistant fiber woven fabric is classified into an inorganic fiber woven fabric and an organic fiber woven fabric. Here, as the inorganic fiber woven fabric, a woven fabric formed of any one of a ceramic fiber such as glass fiber, slave fiber, and alumina, or a metal fiber such as stainless steel can be exemplified. Further, as the organic fiber, a woven fabric formed of any one of a polyamine fiber, an aromatic polyamide fiber, a poly fiber, and a polyethylene fiber can be exemplified. In the present invention, examples of the material of the thermally conductive fine particles include aluminum oxide, titanium oxide, magnesium oxide, cerium oxide, carbon black, graphite, or a metal powder such as silver, copper, aluminum or palladium. Meng, the following is a brief description of the illustration. Fig. 1 is a cross-sectional view showing a composite sheet according to an embodiment of the present invention. —1^ ^ --------Book --------- Line · (Please read the back note first and then fill out this page) Figure 2 is a composite of the second embodiment of the present invention Sectional view of the layer.

本紙張尺度_ -7- 經濟部智慧財產局員工消費合作社印製 1263595 A7 -------------B7___ 五、發明說明(5 ) 第3圖係有關於本發明實施例3之複合層材截面圖。 第4圖係有關於本發明實施例丨、2之複合層材於製造時 所使用之複合層材製造裝置之說明圖。 第5圖係有關於本發明實施例3之複合層材於製造時所 使用之複合層材製造裝置之說明圖。 第6圖係習知之緩衝材料使用例說明圖。 以下’參照圖示,對有關於本發明各實施例之複合層 材及其製造裝置進行說明。但,下記實施例中所示各構件 之材料或數值僅為一例,本發明則不限定於此。 (實施例1 ) 第1圖所示者係有關於實施例1之複合層材截面圖。圖 中之元件標號1 1所示者係由作為耐熱基材之就樹脂(舉例 言之如PTFE)形成之層材。該PTFE層材^之一面上,透 過二氧化矽微粒層12則形成有作為耐熱橡膠層之矽氧橡膠 層材13。 如此構成之複合層材14係以如第4圖所示之裝置而製 造。第4圖中元件標號2卜22所示者分別為用以進行乾燥之 第1銷爐(乾燥爐)及用以進行燒成之第2鍋爐(燒成爐)。 前述第1鍋爐之上游側係設置有捲繞業經表面處理(即,已 形成二氧化矽微粒層12)之PTFE層材u的送出用輥U、 24,一對之支承輥25及塗布輥26,及具有刮刀27&之計量輥 27。此處,該計量輥27係用以將一定量之塗膠劑送至塗布 輥上,而該塗布輥26則用以將塗膠劑塗布於前述層材"之 一面上。又,前述塗布輥26之附近各設置有收容液狀矽氧 本紙張尺度適用中國國家標準(CNS)A4規格(210 297公釐) --------訂---------線 (請先閱讀背面之注意事項再填寫本頁) -8- A7 經濟部智慧財產局員工消費合作社印製 I263595 --—·———-——_ 五、發明說明(6 ) 橡膠塗膠劑28a之托盤28。前述第2鍋爐22之下游側則配置 有一用以捲繞複合層材14之繞捲用輥29。此外,圖中元件 才示號30a、30b、30c、30d、30e所示者皆為滾子。 首先將起彳政粒一乳化碎粉末、表面活化劑及ptfe水 分散液混合,並將攪拌1小時之混合分散液(表面處理液) 均勻塗布於厚度在〇.〇5mm之PTFE層材11之一面上,再導入 鍋爐(未圖示)以l〇(TC乾燥後,進行36(rc之燒成以施行 表面處理。藉此,繼之將作為液狀矽氧橡膠劑之電子零件 用散熱石夕酮(舉例言之,東列•道科寧·石夕酮《音譯東p · 夕夕二一二 > 少·シy 3 一 ^》(株)製之商品名:Se44〇〇 (彈性材料形)),預先以有機溶劑(舉例言之如甲苯、 二甲苯、己烷之任一種)稀釋成易於塗布之黏度,並使之 真空脫泡。而,該塗膠劑28a係收容於前述拖盤28中。 其次’以送出用輥23將業經表面處理之ptfe層材11 於前頭X方向輸送’並將前述塗膠劑2 8 a經計量輥2 7、塗布 幸把2 6後’形成0 · 1 5匪之厚度而均句塗布於前述層材1 1之表 面處理面上。繼而,將該層材11送往第i鍋爐2 i,以8(rc乾 燥後,再將該層材11送往第2鍋爐22並以150°C熱固化,製 造成總厚度在0.2丽之複合層材。 有關於上述實施例1之複合層材14,係於ptfe層材11 之一面上透過二氧化矽微粒層12形成矽氧橡膠層材(耐熱 橡膠層)13而構成,因此優於脫膜性及緩衝性。又,由於 並無如習知之以金屬鈉處理,因此安全性、生產性優良。 更且,藉由於層材11與矽氧橡膠層材13間插設用以提高浸 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公复)The paper scale _ -7- Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printing 1263595 A7 ------------- B7___ V. Invention description (5) Figure 3 relates to the embodiment of the present invention 3 sectional view of the composite layer. Fig. 4 is an explanatory view showing a composite sheet manufacturing apparatus used in the production of the composite sheets of the examples 丨 and 2 of the present invention. Fig. 5 is an explanatory view showing a composite sheet manufacturing apparatus used in the production of the composite sheet of the third embodiment of the present invention. Fig. 6 is a diagram showing an example of the use of a conventional cushioning material. Hereinafter, a composite laminate and an apparatus for producing the same according to various embodiments of the present invention will be described with reference to the drawings. However, the materials or numerical values of the members shown in the following examples are merely examples, and the present invention is not limited thereto. (Example 1) A cross-sectional view of a composite sheet of Example 1 is shown in Fig. 1 . The element number 1 1 in the figure is a layer formed of a resin (for example, PTFE) as a heat resistant substrate. On one surface of the PTFE layer, a tantalum oxide rubber layer 13 as a heat-resistant rubber layer is formed through the ceria particle layer 12. The composite laminate 14 thus constructed is manufactured by the apparatus shown in Fig. 4. In the fourth drawing, the element numbers 2 and 22 are respectively the first pin furnace (drying furnace) for drying and the second boiler (baking furnace) for firing. The upstream side of the first boiler is provided with a feeding roller U, 24 for winding a PTFE layer u which has been subjected to surface treatment (that is, the cerium oxide fine particle layer 12 is formed), a pair of supporting rollers 25 and a coating roller 26 And a metering roller 27 having a scraper 27 & Here, the metering roller 27 is used to feed a certain amount of the glue to the coating roller, and the coating roller 26 is used to apply the glue to one side of the aforementioned layer. Further, in the vicinity of the application roller 26, a liquid-like enamel paper sheet is disposed in the vicinity of the Chinese National Standard (CNS) A4 specification (210 297 mm). --Line (please read the note on the back and fill in this page) -8- A7 Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Printed I263595 ---·————————_ V. Invention Description (6) Rubber Tray 28 of glue applicator 28a. On the downstream side of the second boiler 22, a winding roller 29 for winding the composite material 14 is disposed. Further, the components shown in the figures are indicated by the numerals 30a, 30b, 30c, 30d, and 30e as rollers. First, the granules of the granules, the surfactant and the ptfe aqueous dispersion are mixed, and the mixed dispersion (surface treatment liquid) stirred for 1 hour is uniformly applied to the PTFE layer 11 having a thickness of 〇.〇5 mm. On one side, another boiler (not shown) is introduced into the boiler (not shown). After the TC is dried, it is subjected to 36 (the firing of rc is performed to perform surface treatment. Accordingly, the heat-dissipating stone for electronic parts which will be used as a liquid silicone rubber agent will be used.酮 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( The material form)) is previously diluted with an organic solvent (for example, any one of toluene, xylene, and hexane) to a viscosity that is easy to apply, and is vacuum defoamed. The glue agent 28a is contained in the foregoing. In the tray 28. Next, the surface-treated ptfe layer 11 is conveyed in the front X direction by the feeding roller 23, and the aforementioned glue agent 28 8 is passed through the metering roller 27, and the coating is formed after 2 6 a thickness of 0 · 1 5 而 is applied to the surface treated surface of the aforementioned layer 1 1 . Then, The layer 11 is sent to the i-th boiler 2i, and after 8 (r dry, the layer 11 is sent to the second boiler 22 and heat-cured at 150 ° C to produce a composite layer having a total thickness of 0.2 Å. The composite layer 14 of the above-described first embodiment is formed by forming a niobium oxide rubber layer (heat-resistant rubber layer) 13 on the surface of the ptfe layer 11 through the ceria particle layer 12, and thus is superior to the release property and Buffering. Moreover, since it is not treated with sodium metal as is conventional, it is excellent in safety and productivity. Moreover, it is suitable for increasing the size of the dip paper by interposing between the layer 11 and the silicone rubber layer 13. China National Standard (CNS) A4 specification (210 X 297)

(請先閱讀背面之注意事項再填寫本頁) --------訂---------線> -9- A7 1263595 ------^--- 五、發明說明(7 ) ’閏性之二氧化矽微粒層12,則兩者1 1、1 3間之抗剝強度乃 較習知之層材大,並可實現製成長條且製造薄物之目的。 又,有關於上述實施例1之複合層材之製造裝置,其構 造係包含有:一送出用輥23,係用以送出PTFE層材1 1者; 塗布#昆26 ’係用以將一定量之塗膠劑塗布於前述?丁1?£;層 材11上者;一計量輥27,係用以將一定量之塗膠劑送至該 塗布輥26者;一第ϊ鍋爐21,係用以乾燥已塗布塗膠劑之前 述PTFE層材11者;一第2鍋爐22,係用以燒成業經該第1 鍋爐21之前述PTFE層材11,並形成複合層材14者;及,一 繞捲用輥29,係用以捲繞燒成後之複合層材14者。藉由如 此構成之裝置,乃可製得抗剝強度較習知之複合層材良 好,優於安全性、作業性、經濟性,且實用性高之複合層 材14 〇 事實上,將製得之複合層材中PTFE層材與矽氧橡膠之 層間抗剝強度以T形剝離法(JISK 6328 )測定時,矽氧橡 膠將於中途破損,則可判斷出其抗剝強度係在i〇n/ 15丽 以上。與以化學蝕刻進行表面處理而製造之習知之複合層 材相較,將可確認其抗剝強度良好,優於安全性、作業性、 經濟性,且實用性高。 (實施例2 ) 參照第2圖。但’同於第旧之構件則標以相同標號並 省略說明。本實施例2’除以摻合了導電性碳黑(導電性材 料)之四氟乙烯樹脂(PTFE)層材31作為基材外,以同於 實施例i之方式製造複合層材32。此處,前述層材31係由玻 本紙張尺度適財_冢標準(CNS)A4規格(21石 (請先閱讀背面之注意事項再填寫本頁) --------訂---------線 i 經濟部智慧財產局員工消費合作社印製 297公釐) -10- 1263595 A7(Please read the notes on the back and fill out this page) --------Book --------- Line gt- -9- A7 1263595 ------^--- Five , invention description (7) 'The bismuth dioxide particle layer 12, the peeling strength between the two 1 1 and 13 is larger than the conventional layer, and the purpose of making a long strip and manufacturing a thin object can be achieved. Further, in the apparatus for manufacturing a composite sheet according to the first embodiment, the structure includes: a feeding roller 23 for feeding the PTFE laminate 1; and a coating #昆26' for a certain amount. Is the glue applied to the above? a metering roller 27 for feeding a certain amount of the glue to the coating roller 26; a second boiler 21 for drying the applied glue a PTFE layer 11; a second boiler 22 for firing the PTFE layer 11 of the first boiler 21 to form a composite layer 14; and a winding roller 29 for use The composite laminate 14 after the firing is wound. With the device thus constructed, it is possible to obtain a composite layer which is superior in peeling strength to the conventional composite layer, superior to safety, workability, economy, and high in practicality. 14 In fact, it will be obtained. When the interlayer peeling strength of the PTFE layer and the silicone rubber in the composite layer is measured by the T-shaped peeling method (JISK 6328), the silicone rubber will be damaged in the middle, and the peel strength can be judged to be i〇n/ 15 liters or more. Compared with the conventional composite layer produced by surface treatment by chemical etching, it is confirmed that the peeling strength is good, and it is superior to safety, workability, economy, and practicality. (Example 2) Referring to Fig. 2 . However, the same components as the old ones are designated by the same reference numerals and the description is omitted. In the present Example 2', a composite layer 32 was produced in the same manner as in Example i except that a tetrafluoroethylene resin (PTFE) layer 31 in which conductive carbon black (conductive material) was blended was used as a substrate. Here, the aforementioned layer 31 is based on the glass paper scale _ _ standard (CNS) A4 specifications (21 stone (please read the back of the note before filling this page) -------- order -- ------- Line i Ministry of Economic Affairs Intellectual Property Bureau employee consumption cooperative printed 297 mm) -10- 1263595 A7

1263595 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明( 通過約5分鐘後再於已燒成之基材表面塗布混合分散液,待 乾燥後以390°C進行燒結以行表面處理。並,同於實施例1, 於已施表面處理之基材面上塗布矽氧橡膠溶液,並使之乾 燥且熱固化。 有關於貫施例3之複合層材3 5,如第3圖所示,係具有 矽氧橡膠層材13,於一面形成二氧化矽微粒層12a之pTFE 層材33 ’及於一面形成二氧化矽微粒層^之ρτρΕ層材 34 ’且’係使PTFE層材33、34將二氧化矽微粒層ΐ2&、⑶ 相互對向層壓於前述矽氧橡膠層材13之兩側面上而構成。 因此,根據實施例3,除具有與實施例丨相同之效果外,由 於該石夕氧橡膠層材13之兩面上形成有ptfE層材33、34,乃 可提南耐久性,並可達到使導電性提升之效果。 又’有關於實施例3之複合層材之製造裝置,其構造包 含有:一送出用輥41,係用以送出PTFE層材33者;一塗布 輥26,係用以於前述PTFE層材34上塗布一定量之塗膠劑 者;一計量輥27,係用以輸送一定量之塗膠劑於該塗布輥 26上者;一第1鍋爐21,係用以使塗布塗膠劑後之前述pTFE 層材33、34的層壓體44乾燥者;一第2鍋爐22,係用以燒成 經該第1锅爐21後之前述層壓體44,以形成複合層材35者; 及’一繞捲用輥29,係用以捲繞燒成後之複合層材35者。 藉由如此構成之裝置,乃可製得抗剝強度較習知之複合層 材良好’優於安全性、作業性、及經濟性,且實用性高之 複合層材35。 此外,上述實施例3中,述及PTFE分散液之使用,但 --------訂---------線 * - (請先閱讀背面之注意事項再填寫本頁) -12- 1263595 A7 五、發明說明(10) 經濟部智慧財產局員工消費合作社印製 非限定於此,舉例言之,亦可使用摻合了導電性碳黑之 PTFE分散液。 (實施例4 ) 首先,於同於實施例2之方式製造之基材一面上,以混 合分散液(超微粒狀二氧化矽粉末、表面活化劑、 分散液)施行表面處理,並於該面上塗布矽氧橡膠溶液。 其次,於塗布後之面上置放已預先施以表面處理之基材, 並以壓輥夾入,使之熱固化。 有關於實施例4之複合層材,係於耐熱基材之一面上施 以表面處理,並於該處理面側藉由一具耐熱性之矽氧橡膠 層疊設另一已施表面處理之耐熱基材而構成。因此,除具 有與實施例1相同之效果外,由於該耐熱基材兩面上皆形成 有石夕氧橡膠層,如此將可提南其耐久性,並達到使導電性 提升之效果。 (實施例5 ) 實施例1之矽氧橡膠溶液中除摻合了作為熱傳導性 粒之氧化鎂外,以與實施例丨相同方式形成複合層材。 根據實施例5所形成之複合層材,其具有可縮短關於 述熱壓著之保持時間並提高生產效率之效果。 如以上詳述,根據本發明之複合層材,其係具有: 含氟樹脂或導電性材料所形成之片狀耐熱基材,形成於該 而于熱基材之一面上的一氧化石夕微粒層,及形成於該二氧化 矽微粒層上之耐熱樹脂層,藉此構造則該複合層材之脫膜 性及緩衝性佳,優於安全性、經濟性、及生產性,並可製 微 刖 由 . --------訂---------線 * · (請先閱讀背面之注意事項再填寫本頁) -13- 1263595 A7 -----------B7__ 五、發明說明(u) 〜、" 成長條且可製造薄物。 又’根據本發明之複合層材, . ,、係具有·於耐熱纖雉 、、我布上摻合氟樹脂或含導電性材料之氣樹脂而成之片 熱基材,形成於該耐熱基材-面上之二氧化石夕微粒層,及 形成於該二氧化矽微粒層上之耐熱橡膠層;藉此構成乃可 得到與上述相同之效果。 且’根據本發明之複合層材製造裝置,其係具有:一 送出用輥,係用以送出由氟樹脂形成之片狀耐熱基板者; 一塗布輥,係用以塗布一定量之塗膠劑於前述耐熱基板上 者;一第1鍋爐,係用以使塗布塗膠劑後之前述耐熱基板乾 無者;一第2錫爐,係用以燒成業經第1麵爐之前述耐熱基 板並形成複合層材者;及,一繞捲用輥,係用以捲繞燒成 後之複合層材者;藉此構造乃可製得脫膜性及緩衝性佳, 優於安全性、經濟性、及生產性,並可製成長條且可製造 薄物之複合層材。 --------訂---------線 f請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準(CNS)A4規格(210 X 297公釐) -14- 1263595 A7 五、發明說明( 12 元件標 經濟部智慧財產局員工消費合作社印製 1··.玻璃基板 2.. ·端子 3…彈性基板 4…電路 5··.膜 6.. ·各向異性導電膜 7…緩衝材料 8···加熱器 9···抗蝕膜 11…P T F E層材 12、12a、12b -与 /· 乳化石夕微粒層 13…矽氧橡膠層材 14…複合層材 21…第1鋼爐 2 2…弟2銷爐 23、24·.·送出用輥 25…支承輥 26…塗布輥 27.··計量輥 2 7 a…刮刀 28…托盤 28a···液狀矽氧橡膠塗膠劑 29··.繞捲用幸昆 號對照表】 30a、30b、30c、30d、30e...滚子 31…四氟乙烯樹脂層材 31a…玻璃纖維織布 3 1 b…氟樹脂 3 2…複合層材 33、34...PTFE層材 33a、34a···纖維織布 33b - 34b...PTpg 35…複合層材 41、42···送出用輥 43a、43b···層壓用輥 44···層壓體 本紙張尺度適用中國國家標準(CNS)A4規格(21〇 χ 297公釐 先閱讀背面之注意事項再填寫本頁} ----- 訂---------線‘ -15-1263595 A7 B7 Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Printed V. Inventive Note (Approximately 5 minutes later, the mixed dispersion was applied to the surface of the fired substrate, and after drying, it was sintered at 390 ° C for surface treatment. And, in the same manner as in the first embodiment, the surface of the surface treated substrate is coated with a silicone rubber solution, which is dried and thermally cured. The composite layer 3 of the third embodiment is as shown in FIG. As shown, there is a ruthenium oxide rubber layer 13, a pTFE layer 33' which forms a ruthenium oxide particle layer 12a on one side, and a ρτρΕ layer 34' which forms a ruthenium dioxide particle layer on one side and which is a PTFE layer. 33 and 34, the cerium oxide microparticle layers ΐ2&, (3) are laminated on opposite sides of the ruthenium oxide rubber material 13 to each other. Therefore, according to the third embodiment, in addition to the same effect as the embodiment 丨Since the ptfE layers 33 and 34 are formed on both sides of the stone oxide rubber layer 13, the durability of the south can be improved, and the effect of improving the conductivity can be achieved. Further, the composite layer of the embodiment 3 is obtained. Manufacturing device, the structure of which includes: one delivery The roller 41 is used for feeding the PTFE layer 33; a coating roller 26 is used for coating a certain amount of the glue on the PTFE layer 34; and a metering roller 27 is used for conveying a certain amount of the coating. a glue is applied to the coating roller 26; a first boiler 21 is used to dry the laminate 44 of the pTFE laminates 33, 34 after application of the glue; a second boiler 22 is used The laminate 44 that has passed through the first boiler 21 is fired to form a composite laminate 35; and the 'winding roller 29' is used to wind the composite laminate 35 after firing. According to the apparatus thus constituted, the composite sheet 35 having better peeling strength than the conventional composite sheet which is superior to safety, workability, and economy, and high in practicability can be obtained. Further, in the above-described Embodiment 3 , refers to the use of PTFE dispersion, but -------- order --------- line * - (please read the note on the back and then fill out this page) -12- 1263595 A7 five (Description of the Invention) (10) The Ministry of Economic Affairs Intellectual Property Office employee consumption cooperative printing is not limited thereto, and for example, a PTFE dispersion in which conductive carbon black is blended may be used. (Example 4) First, on the side of the substrate produced in the same manner as in Example 2, a surface treatment was performed with a mixed dispersion (ultrafine cerium oxide powder, a surfactant, a dispersion), and a silicone rubber was coated on the surface. Next, a substrate which has been subjected to surface treatment in advance is placed on the surface after coating, and is sandwiched by a press roll to be thermally cured. The composite sheet according to Example 4 is applied to a heat-resistant substrate. One surface is subjected to a surface treatment, and a heat-resistant silicone rubber is laminated on the surface of the treated surface to form another heat-treated substrate to which the surface treatment has been applied. Therefore, in addition to the same effect as in the first embodiment, Since the heat-resistant substrate is formed with a stone oxide layer on both sides, the durability of the heat-resistant substrate can be improved, and the effect of improving the conductivity can be achieved. (Example 5) A composite layer was formed in the same manner as in Example 外 except that magnesium oxide as a thermally conductive granule was blended in the oxime rubber solution of Example 1. The composite sheet formed according to Example 5 has an effect of shortening the holding time with respect to the heat pressing and improving the production efficiency. As described in detail above, the composite sheet according to the present invention has a sheet-like heat-resistant substrate formed of a fluorine-containing resin or a conductive material, and is formed on the surface of the thermal substrate. a layer and a heat-resistant resin layer formed on the cerium oxide microparticle layer, whereby the composite layer has good release property and cushioning property, is superior to safety, economy, and productivity, and can be micronized刖由. --------Book --------- Line * · (Please read the back of the note before you fill out this page) -13- 1263595 A7 -------- ---B7__ V. Invention Description (u) ~, " Growing up and making thin objects. Further, the composite material according to the present invention, a heat-resistant substrate formed of a heat-resistant fiber, a fluororesin or a gas-containing resin containing a conductive material, is formed on the heat-resistant substrate. The layer of the cerium oxide layer on the material-side and the heat-resistant rubber layer formed on the cerium oxide microparticle layer; the same effect as described above can be obtained by this configuration. And a composite sheet manufacturing apparatus according to the present invention, comprising: a feeding roller for feeding a sheet-shaped heat-resistant substrate formed of a fluororesin; and a coating roller for applying a certain amount of the coating agent On the heat-resistant substrate; a first boiler for drying the heat-resistant substrate after applying the glue; and a second tin furnace for firing the heat-resistant substrate of the first furnace A composite roll is formed; and a winding roll is used to wind the composite layer after firing; thereby, the structure can be obtained with good release property and cushioning property, which is superior to safety and economy. And production, and can be made into a long strip and can be made into a composite layer of thin materials. --------Set---------Line f Please read the notes on the back and fill in this page.) Ministry of Economic Affairs, Intellectual Property Bureau, Staff Consumer Cooperatives, Printed Paper Scale Applicable to Chinese National Standards ( CNS) A4 specification (210 X 297 mm) -14- 1263595 A7 V. Description of invention (12 Component Standards Ministry of Economic Affairs Intellectual Property Bureau Staff Consumer Cooperative Printed 1.·.. Glass substrate 2.. Terminal 3... Elastic substrate 4 ...circuit 5··. film 6. anisotropic conductive film 7... cushioning material 8···heater 9···resist film 11...PTFE layer 12, 12a, 12b-and/· Fine particle layer 13...oxygen rubber layer 14...composite layer 21...first steel furnace 2 2...second 2 pin furnace 23,24·.feed roller 25...support roller 26...coating roller 27···metering roller 2 7 a... scraper 28... tray 28a···liquid silicone rubber glue 29··. winding table with the lucky number] 30a, 30b, 30c, 30d, 30e...roller 31...four Fluoroethylene resin layer 31a...glass fiber woven fabric 3 1 b...fluororesin 3 2...composite laminate 33,34...PTFE laminate 33a, 34a···fiber woven fabric 33b - 34b...PTpg 35... Composite layer 41, 42 ··· send Roller 43a, 43b···Laminating Roller 44···Laminate This paper size applies to China National Standard (CNS) A4 specification (21〇χ 297 cm. Read the back of the note first and then fill out this page) - ---- Order --------- Line ' -15-

Claims (1)

If1 Jil.. If1 Jil.. A 8 B8 C8 D8 I26B395 申請專利範圍 第90110314號專利申請案申請專利範圍修正本 曰期:95年5月 1. 一種複合層材,係使用於電子儀器製造程序之一的壓著 程序中,該複合層材之特徵在於包含有·· 片狀耐熱基材,係由氟樹脂或含導電性材料之銳樹脂 所構成者; 耐熱橡膠層’係形成於該耐熱基材之單面側上;及 二氧化矽微粒層’係形成於該耐熱基材與該耐熱橡膠 層之間以提昇兩者間之浸潤性者。 2·種m合層材,其特徵在於:具有第】耐熱基材及第2耐 熱基材.玄第1耐熱基材係為一於如申請專利範圍第i項 所述而才熱基材之單面上形成有用以提昇财熱基材及财 熱橡膠層間之浸潤性的二氧切微粒層者,而該第2财 熱基材則為-於單面上形成有用以提昇耐熱基材及耐 熱橡膠層間之浸難的二氧切微粒層者;並且,在該 第1及第2耐熱基材二者形成該等二氧化石夕微粒層之面 側呈相對向之狀態下’於兩者之間插人—财熱橡膠層而 重豐構成者。 3·如申請專利範圍第1項之複合層材,其中該耐熱橡膠層 係以於錢橡膠溶液中摻合熱導性微粒之混合物塗 布,經熱固化而製得者。 4.如申請專利範圍第3項之複合層材,其中該熱導性微粒 係乳化銘、二氧化鈦、氧化鎮、二氧化石夕、碳黑、石墨, 或金、銀、銅、鋁、鈀之金屬粉末中之一。 尺度適用中國國家榇) A4規格(210>< 297公^^^ _ (請先閲讀背面之注意事項再填寫本頁) 訂 -16- 1263595 A 8 B8 C8 D8 六 申請專利範園 經濟部口央標漆為負工消費合作社印製 智慧財產局 5.=請專利範圍第1項之複合層材,其中該導電性材科 係‘電#頁晶、碳黑、石墨、碳纖維,或金、銀、銅、紹、 免之金屬粉末中之一。 6. -種複合層材’係制於電子儀器製造程序之—的麗著 程序中,該複合層材之特徵在於包含有·· 片狀耐熱基材,係於耐熱纖維織布上換合氣樹脂或含 導電性材料之氟樹脂而成者; 耐熱橡膠層,係形成於該耐熱基材之單面側上,·及 二氧化石夕微粒層,係形成於該耐熱基材與該耐熱橡膠 層之間以提昇兩者間之浸潤性者。 7· 一種複合層材,其特徵在於··具有請熱基材及㈣ 熱基材,該第!耐熱基材係為一於如申請專利範圍第㈣ 所述耐熱基材之單面上形成有用以提昇耐熱基材及财 熱橡膠層間之浸潤性的二氧化石夕微粒層者,而該第2财 熱基材則為-於單面上形成有用以提昇耐熱基材及财 «膠層間之浸潤性的二氧切微粒子者;並且,在該 第1及第2耐熱基材二者形成該等二氧化㈣㈣之面 側呈相對向之狀態下,於兩者間插入耐熱橡膠層而重疊構成者。 8. 如申請專利範圍第6項之複合層材,其中該耐熱橡膠層 係以於石夕氧橡膠溶液中摻合熱導性微粒之混合物塗 布,經熱固化而製得者。 9. 如申請專利範圍第8項之複合層材,其中祕導性粒子 係係氧化紹、二氧化鈇、氧化鎂、二氡化石夕、碳黑、石 請 閲 讀 背 1¾ 5 i 事 項 再 旁 訂 ♦ -17- 1263595 A8 B8 C8 D8 申請專利範圍 墨,或金、銀、銅、鋁、鈀之金屬粉末中之一。 ίο.如申請專·圍第6項之複合層材,其中該耐熱纖維織 布係玻璃纖維、碳纖維、氧化紹等陶€纖維、不錄鋼等 金屬纖維’或聚醯胺系纖維、芳族聚醯胺系纖維、聚酯 系纖維、聚乙烯醇系纖維中之一。 11. 一種複合層材之製造裝置,係製造如中請專利範圍第 1-10項中任一項之複合層材者,該裝置包含有: 一送出用輥,係用以送出由氟樹脂或含導電性材料之 氟樹脂形成之片狀耐熱基材者; 一塗布輥,係用以於前述耐熱基材上塗布一定量之塗 膠劑者; 一第1鍋爐,係用以使塗布有塗膠劑之耐熱基材乾燥 者; 一第2鍋爐,係用以燒成業經第〗鍋爐之前述耐熱基 材,並將之形成複合層材者;及, 一繞捲用輥,係用以捲繞燒成後之複合層材者。 !------#------1T--------Φ (請先閲讀背面之法意事項存填寫本育) 經濟部口央標率辱貝工消費合作社印製 智慧財產局 冬紙張尺度適用中國國家橾準(CNS ) A4規格(210>< 297公釐) -18- Ι2ό!3 5 9¾90^0314號專利申請案圖式修正頁 曰期:95年5月If1 Jil.. If1 Jil.. A 8 B8 C8 D8 I26B395 Patent Application No. 9011014 Patent Application Amendment Patent Range Revision: May, 1995 1. A composite layer used in electronic instrument manufacturing procedures In a pressing procedure, the composite sheet is characterized in that it comprises a sheet-like heat-resistant substrate composed of a fluororesin or a sharp resin containing a conductive material; and a heat-resistant rubber layer is formed on the heat-resistant group. The single-sided side of the material; and the ceria particle layer ' is formed between the heat-resistant substrate and the heat-resistant rubber layer to enhance the wettability between the two. 2. The m-layered material is characterized in that it has a heat-resistant substrate and a second heat-resistant substrate. The first heat-resistant substrate is a heat-resistant substrate as described in the item i of the patent application. Forming a layer of dioxo-particles for improving the wettability between the heat-generating substrate and the heat-generating rubber layer on one side, and the second heat-treating substrate is formed on one side to enhance the heat-resistant substrate and a layer of dioxo-particles impregnated between the heat-resistant rubber layers; and the surface of the first and second heat-resistant substrates forming the same on the surface side of the layer of the dioxide particles Between the people - the heat rubber layer and the heavy composition. 3. The composite sheet according to claim 1, wherein the heat-resistant rubber layer is obtained by coating a mixture of thermally conductive fine particles in a money rubber solution and thermally curing. 4. The composite sheet according to claim 3, wherein the thermally conductive particles are emulsified, titanium dioxide, oxidized town, sulphur dioxide, carbon black, graphite, or gold, silver, copper, aluminum, palladium One of the metal powders. The scale applies to China's national 榇) A4 specification (210>< 297 public ^^^ _ (please read the note on the back and fill out this page) Order-16- 1263595 A 8 B8 C8 D8 Six application for patent Fanyuan Economic Department The central standard paint is printed by the Consumer Cooperatives, and the Intellectual Property Bureau 5.=Please apply the composite layer of the first item of the patent range, wherein the conductive material is 'Electrical#Page Crystal, Carbon Black, Graphite, Carbon Fiber, or Gold, One of the metal powders of silver, copper, shovel, and smear. 6. - The composite layer is made in the procedure of the electronic device manufacturing process, and the composite layer is characterized by containing ... The heat-resistant substrate is formed by replacing a gas resin or a fluororesin containing a conductive material on a heat-resistant fiber woven fabric; the heat-resistant rubber layer is formed on one side of the heat-resistant substrate, and the sulphur dioxide The fine particle layer is formed between the heat resistant substrate and the heat resistant rubber layer to improve the wettability between the two. 7) A composite layer characterized by having a hot substrate and (4) a thermal substrate. The first heat resistant substrate is a heat resistant as described in the fourth aspect of the patent application. The surface of the substrate is formed with a layer of a cerium oxide layer for improving the wettability between the heat-resistant substrate and the heat-generating rubber layer, and the second heat-generating substrate is formed on one side to enhance heat resistance. a substrate and a dip-cutting microparticle having a wettability between the rubber layers; and a surface of the first and second heat-resistant substrates which are formed on the surface of the second (4) and (4) 8. The composite sheet of the sixth aspect of the invention, wherein the heat-resistant rubber layer is coated with a mixture of thermally conductive particles in a solution of the cerium oxide rubber, and is heated. Cured and prepared. 9. For the composite layer of the scope of patent application No. 8, in which the secret particle system is oxidized, cerium oxide, magnesium oxide, bismuth fossil, carbon black, stone, please read back 13⁄4 5 i Matters and then ♦ -17- 1263595 A8 B8 C8 D8 Patent application range, or one of metal powders of gold, silver, copper, aluminum and palladium. ίο. Material, wherein the heat-resistant fiber woven fabric is glass fiber, carbon One of fiber, oxidized and so on, or metal fiber or non-polyamine fiber, aromatic polyamide fiber, polyester fiber or polyvinyl alcohol fiber. 11. A composite layer The manufacturing device of the material is a composite layer according to any one of the above claims, wherein the device comprises: a feeding roller for feeding a fluororesin or a conductive material. a sheet-shaped heat-resistant substrate formed of a fluororesin; a coating roller for applying a certain amount of a coating agent to the heat-resistant substrate; and a first boiler for using a heat-resistant group coated with a rubberizing agent a dry material; a second boiler for firing the heat-resistant substrate of the first boiler and forming the composite layer; and a winding roller for winding and firing Composite layer. !------#------1T--------Φ (Please read the legal information on the back to fill in the education) The economic department's central standard rate is insulted by the Bayer Consumer Cooperative The winter paper scale of the Intellectual Property Bureau applies to the Chinese National Standard (CNS) A4 specification (210><297 mm) -18- Ι2ό!3 5 93⁄490^0314 Patent application schema revision page Period: 95 years 5 month
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