1260749 九、發明說明: 【發明所屬之技術領域】 本發明係關於一種半導體封 壓模封裝之陶竟基板及其分斷边衣裎,尤其係關於-種封膠 【先前技術】 安。 眾所週知,積體電路的應用日兴1260749 IX. Description of the Invention: [Technical Field] The present invention relates to a ceramic package and a divided side cover for a semiconductor package, particularly for a sealant [Prior Art]. As we all know, the application of integrated circuits is Nikko
設備、家用電氣等均與積體電路自舉凡$腦網路、通訊 不斷發展魏,對频魏的產°隨著電子製造技術的 輕、薄、短、小及多功能的要求曰益提昇。在1C晶片 斷的推陳出新,為_高良率 ^子產業之封裝技術不 製程的良率實,產品品f成功的_^=^產奴,其中分斷 方法分離產:。ί:第封:壓模製裎之陶瓷基板採用切割 圖,在嶋請======的正面視 緣部分對應於各個電路單元在/、上下表面邊 134 ^ 130 -圖所不陶絲板⑽Ε_Ε向局 I-圖為弟十 封膠壓模封裝之陶究基板130,首i,在二2 =四圖,對於 其;主 门是基板3〇上複數電路單元132。由於陶f ίΪΠί的辨識點134被封膠136覆蓋,因此只能根據Ϊ 識點134將陶麵13°上的電路單元IS ^獨立^口,。㈣第十五圖,為切割刀具138切割如第十四 圖所不之陶錄板13〇之剖視圖。切割刀具138 板切割陶線反13G,然後切割封膠^ 了種= Θ Ρ1月16日公告的美國第6,42G,244號專利揭示 2級晶片尺寸封裝⑽打L⑽&㈤p Scale 法,其紋蝴s針也係制糊刀具將一具有 稷數曰曰片的基板切割成複數獨立的晶片。 1260749 於=究基板具有硬而脆之特性,上述習知之陶究基板分斷 曰Γί在切割時容易引㈣£基板崩裂、切割速度慢、產能 -2°177具磨損快等缺陷,影響產品良率,增加生產成本。 、亲声游= ’需要—種可減少切割刀具的磨損、提高切割 =避免切麟引起陶絲板崩裂、降低成本之陶餘板分斷 【發明内容】 在陶itdftf s的在於提供一種陶究基板分斷方法’可實現 靠近由i:FFr=^^ 域。 下對應,轉覆蓋於H基板上絲的第二區 在陶的方法包括如下步驟:(a) 識點的位置切割封膠了二 瓷基板。 /° It基板下表面上的裂片線分斷陶 線,JJ2 於同時採用了辨識點和裂片 斷陶兗基板時,切宝士刀割封膠。另一方面也使得在分 減少切割刀具的磨損,=二切_膠,大大提高了切割速度, 崩裂,降低成本。、 因切割陶瓷基板而引起的陶瓷基板 【實施方式】 板⑽=心f”°之正面視圖。在陶曼基 早兀102’在陶究基板100上表面的邊緣 1260749 m,數辨識點iQ4,一對應於複數電路單元⑽之間隙Equipment, household electrical, etc. are all self-extracting with the integrated circuit. The brain network and communication are constantly developing Wei, and the production of frequency Wei is greatly improved with the light, thin, short, small and multi-functional requirements of electronic manufacturing technology. In the 1C chip, the innovation is _ high yield rate. The sub-industry packaging technology does not process the yield, and the product product f is successful _^=^ slavery, which is separated and produced. ί: The first seal: the ceramic substrate of the compression molding adopts the cutting diagram, and the front view edge portion of the ======= corresponds to the respective circuit unit at the /, upper and lower surface sides 134 ^ 130 - the figure is not ceramic The board (10) Ε _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ Since the identification point 134 of the ceramic f ίΪΠί is covered by the sealant 136, the circuit unit IS ^ on the ceramic surface 13 can only be separated according to the knowledge point 134. (4) In the fifteenth figure, a sectional view of the cutting tool 13 is cut for the cutting tool 138 as shown in the fourteenth drawing. Cutting tool 138 plate cutting ceramic line anti 13G, and then cutting the sealing compound ^ Kind = Θ Ρ US Patent No. 6, 42G, 244 announced on January 16 reveals that the second-level wafer size package (10) is L (10) & (5) p Scale method, its pattern The butterfly needle is also a paste cutter that cuts a substrate having a number of turns into a plurality of independent wafers. 1260749 The board has a hard and brittle character. The above-mentioned conventional ceramic substrate is easy to be introduced during cutting. (4) The substrate is cracked, the cutting speed is slow, and the production capacity is -2°177. Rate, increase production costs. , pro-sound swim = 'needs - can reduce the wear of cutting tools, improve cutting = avoid the cracking of the ceramic board caused by the cutting of the stone board, reduce the cost of the ceramic plate breaking [invention] In the pottery itdftf s lies in providing a ceramic The substrate breaking method 'can be implemented close to the i:FFr=^^ field. Correspondingly, the second region of the wire covering the H substrate is transferred. The method of the ceramic comprises the following steps: (a) cutting the sealed ceramic substrate at the position of the spot. /° It The split line on the lower surface of the substrate breaks the ceramic line, and JJ2 cuts the sealant when the identification point and the split piece are used. On the other hand, it also reduces the wear of the cutting tool, = two cuts, which greatly increases the cutting speed, cracks and reduces costs. Ceramic substrate caused by cutting ceramic substrate [Embodiment] Front view of the plate (10) = heart f"°. At the edge of the upper surface of the ceramic substrate 100 in the Taumanki early 102', the number of identification points iQ4, one corresponding In the gap between the complex circuit units (10)
片i ;===:;線_ ’並且所述的裂 上表:基;,:’首先’在陶究基板咖 電路單弟二區域灌封膠110,其作用在於包覆複數 去:⑽。第八圖為第·二: t賊膠11(3,形成切割道112,切_深度= 線一 1〇β ^ Η二〇的厚度。最後,沿陶究基板100下表面的裂片 根據陶分斷H基板1⑽。對於W線106的深度,可 ㈣魏厚度設計,—般為纽鱗於仍的 為本㈣°請及第十一圖 100 ? F'^120 與第二區域的交界i二mm位置即上表面第一區域 于.124,幵>成切割道eg,切割的深度 1260749 娜】f封膠124的厚度。然後,去除陶曼基板120邊緣的 ,1.,路出陶瓷基板120上表面的辨識點,得到如第七圖所示 =的效果。其後的步賴第—較佳實施 味度也絲―較佳實財式_。 線122 、不上所述’本發明符合發明專利要件,爰依法提出專利申請。 人丰以上戶f述者僅為本發明之較佳實施例,舉凡熟悉本案技藝月之 在爰依本案發明精神所作之等效修飾或變化, 以下之中請專利範圍内。Piece i ;===:; line _ 'and the above-mentioned split table: base;,: 'first' in the ceramic substrate circuit single brother two area potting glue 110, its role is to cover the plural to: (10) . The eighth picture is the second two: t thief glue 11 (3, forming the scribe line 112, the cut _ depth = the thickness of the line 〇β ^ Η 〇 。. Finally, along the plaque of the lower surface of the ceramic substrate 100 according to the pottery Break the H substrate 1 (10). For the depth of the W line 106, it can be (iv) Wei thickness design, generally the neon is still the current (four) ° please and the eleventh figure 100 ? F'^120 and the second area of the interface i The mm position is the first area of the upper surface at .124, 幵> into the cutting path eg, the depth of the cut is 1260749 娜] the thickness of the sealant 124. Then, the edge of the Tauman substrate 120 is removed, 1. The exit ceramic substrate The identification point of the upper surface of 120 obtains the effect of = as shown in the seventh figure. The subsequent step--the preferred implementation of the taste is also the silk - the better real money type _. Line 122, not the above-mentioned invention In accordance with the requirements of the invention patent, the patent application is filed according to law. The above description of the person in charge of the above is only the preferred embodiment of the present invention, and all the equivalent modifications or changes made in the spirit of the invention in the spirit of the present invention are as follows. Please refer to the patent scope.
【圖式簡單說明】 =一圖係本發明之陶瓷基板正面視圖。 第亡圖係第一圖之A-Α向剖視圖。 之陶板分斷方法,在陶錄板上表面四邊 ^四圖係第三圖之向剖視圖。 ^圖係依本剌之喊基板分斷方法,在喊 膠帶内部灌封膠後之正面視圖。 衣曲四遭 第六圖係第五圖之C-C向剖視圖。 纖分斷方法’去除陶絲板上表面四 第八圖係第七圖之D〜d向剖視圖。 仅喊基斷錢,在㈣紐上表面灌封 第十-_依本發明之_基板摘絲刀具在 板上表面灌封膠的四邊切割封膠後之剖視圖。 土 第十二圖係習知之陶瓷基板正面視圖。 第十三圖係第十二圖2E—E向剖視圖。 1260749 第十四圖係依習知之陶瓷基板分斷方法,在陶瓷基板上灌封膠後 之剖視圖。 第十五圖係依習知之陶瓷基板分斷方法,用切割刀具切割陶瓷基 板及封膠之剖視圖。 【主要元件符號說明】 陶瓷基板 100、120、130 電路單元 102 、 132 辨識點 104 、 134 裂片線 106 、 122 膠帶 108 封膠 110、124、136 切割道 112 、 126 切割刀具 138BRIEF DESCRIPTION OF THE DRAWINGS = Figure 1 is a front view of a ceramic substrate of the present invention. The first death diagram is the A-Α cross-sectional view of the first figure. The ceramic plate breaking method is on the four sides of the surface of the ceramic recording board. ^ The picture is based on the front of the shouting method of the substrate, after shouting the inside of the tape. The fourth part of the sixth picture is the C-C cross-sectional view of the fifth figure. The fiber breaking method removes the surface of the ceramic plate. The eighth figure is the cross-sectional view of the D to d of the seventh figure. Only shouting the money, filling the surface on the (four) button. Tenth--the cross-sectional view of the four-side cutting and sealing of the board surface encapsulant according to the invention. The twelfth figure is a front view of a conventional ceramic substrate. Figure 13 is a cross-sectional view of the twelfth Figure 2E-E. 1260749 The fourteenth section is a cross-sectional view of a ceramic substrate breaking method according to the prior art, after potting on a ceramic substrate. The fifteenth drawing is a cross-sectional view of a ceramic substrate cutting method using a cutting tool to cut a ceramic substrate and a sealing material. [Description of main component symbols] Ceramic substrate 100, 120, 130 Circuit unit 102, 132 Identification point 104, 134 Split line 106, 122 Tape 108 Sealing 110, 124, 136 Cutting path 112, 126 Cutting tool 138